CN113733751B - Method, system and device for regulating morphology of electrofluid spray printing microstructure - Google Patents

Method, system and device for regulating morphology of electrofluid spray printing microstructure Download PDF

Info

Publication number
CN113733751B
CN113733751B CN202111122546.0A CN202111122546A CN113733751B CN 113733751 B CN113733751 B CN 113733751B CN 202111122546 A CN202111122546 A CN 202111122546A CN 113733751 B CN113733751 B CN 113733751B
Authority
CN
China
Prior art keywords
microstructure
morphology
regulating
electrode
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202111122546.0A
Other languages
Chinese (zh)
Other versions
CN113733751A (en
Inventor
尹周平
陈建魁
肖小亮
朱红
喻梦雯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huazhong University of Science and Technology
Original Assignee
Huazhong University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huazhong University of Science and Technology filed Critical Huazhong University of Science and Technology
Priority to CN202111122546.0A priority Critical patent/CN113733751B/en
Publication of CN113733751A publication Critical patent/CN113733751A/en
Application granted granted Critical
Publication of CN113733751B publication Critical patent/CN113733751B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/06Ink jet characterised by the jet generation process generating single droplets or particles on demand by electric or magnetic field

Abstract

The invention discloses a method for regulating and controlling the appearance of an electrofluid spray printing microstructure, which comprises the following steps: starting an electric spinning nozzle to spray and print the linear array on the substrate, and applying a morphology regulating and controlling electric field above the spray and printing linear array after spray printing; detecting a contact angle between the jet printing line and the substrate and the thickness distribution of the cross points of the jet printing linear arrays, comparing the contact angle with a target value, and applying an electric field regulation signal according to a comparison result so as to regulate and control the line morphology and the linear array cross point morphology; and spraying and printing liquid drops in a grid formed by the linear arrays in an electric atomization mode to form a microstructure, detecting the thickness and the shape of the microstructure, comparing the thickness and the shape with a target value, and applying an electric field regulation and control signal according to a comparison result, thereby regulating and controlling the appearance of the microstructure. The invention also provides a system and a device for realizing the method. The invention adopts the combination of the electrospinning technology and the electrospray technology to manufacture the microstructure, and utilizes the additional electric field to regulate and control the morphology, thereby greatly improving the manufacturing efficiency and the morphology precision of the microstructure.

Description

Method, system and device for regulating morphology of electrofluid spray printing microstructure
Technical Field
The invention belongs to the technical field of electrofluid ink jet printing manufacturing, and particularly relates to a method and a device for regulating and controlling the appearance of an electrofluid jet printing microstructure.
Background
The microstructure array refers to micro-nano structures with certain morphologies which are arranged according to a certain mode, and the micro-structures have excellent expression on the surface hydrophobicity and surface modification of products, so that the microstructure array is widely applied to the fields of medical treatment, micro electro mechanical systems, optics, buildings, traffic and the like.
The electrofluid spray printing technology is a high-resolution printing technology, can spray liquid drops far smaller than the size of a spray head of the electrofluid spray printing technology, and has wide prospects in the field of micro-nano manufacturing. At present, the microstructure array is usually manufactured by photoetching, thermal reflow, soft imprinting and other modes, heating or complex process is required, the method is not suitable for large-area manufacturing, and the electrofluid jet printing process is widely concerned with the process characteristics that the electrofluid jet printing process does not need a mask plate, is simple and convenient, and is compatible with large-area manufacturing. The principle of the electrofluid spray printing technology is that an electric field is applied between a spray head and a substrate, when the electric stress applied to liquid drops at the tip of a spray nozzle is increased to a certain degree, the liquid is sprayed out from the tip, and microstructures such as points, lines and the like can be manufactured according to different spray printing modes.
The shape of the microstructure array often has an important influence on the function of the microstructure array, and if the shape characteristics of the microstructure can be accurately controlled, the method has an important help for improving the performance of the microstructure array, so the method is very important for controlling the shape of the microstructure.
Disclosure of Invention
Aiming at the defects or improvement requirements of the prior art, the invention provides a method and a device for regulating the appearance of an electrofluid jet printing microstructure, and aims to improve the preparation efficiency and the appearance precision of the electrofluid jet printing microstructure.
An electrofluid spray printing microstructure morphology regulation and control method comprises the following steps:
(1) starting an electric spinning nozzle to spray and print the linear array on the substrate, and applying a morphology regulating and controlling electric field above the spray and printing linear array after spray printing;
(2) detecting a contact angle between the jet printing line and the substrate, comparing the contact angle with a target contact angle, and applying an electric field regulation signal according to the comparison result so as to regulate and control the line morphology;
(3) detecting the thickness distribution of the cross points of the jet printing linear array, comparing the thickness distribution with a target thickness distribution, and applying an electric field regulation signal according to the comparison result so as to regulate and control the appearance of the cross points of the linear array;
(4) adopting an electric atomization mode to spray and print liquid drops in a grid surrounded by the linear arrays, and forming a microstructure after the liquid drops are leveled;
(5) and detecting the thickness and the shape of the microstructure, comparing the thickness and the shape with the target thickness and the target shape, and applying an electric field regulation signal according to the comparison result so as to regulate and control the microstructure morphology.
Further, in the step (2), an electrode array is adopted to apply a morphology regulating electric field, and the electric field regulating signal is generated as follows:
Figure BDA0003277776520000021
wherein the content of the first and second substances,
Figure BDA0003277776520000022
representing a line profile electrode regulation signal; thetapThe contact angle of the p line and the substrate is shown; kl、ClFor the correlation coefficient between applied voltage and target contact angle, Kl、ClSelecting a relation curve for calibrating the voltage and the contact angle; m represents the row number of the electrode array, and n represents the column number of the electrode array;
Figure BDA0003277776520000023
the electrode state control signals for rows i and j indicate that the electrodes are assigned a value of 1 when a positive voltage is applied, a value of-1 when a negative voltage is applied, and a value of 0 when no voltage is applied.
Further, in the step (3), an electrode array is adopted to apply a morphology regulating electric field, and the electric field regulating signal is generated as follows:
Figure BDA0003277776520000024
wherein the content of the first and second substances,
Figure BDA0003277776520000025
representing a linear array intersection point shape electrode regulation signal; h iscRepresenting the average thickness of the electrode corresponding to the ith row and the j column in the intersection area of the linear arrays;
Figure BDA0003277776520000026
representing the average thickness of the whole area of the intersection point of the linear arrays; kc、CcFor the correlation coefficient of applied voltage and thickness difference, Kc、CcSelecting a relation curve of the voltage and the thickness calibration at the intersection point; m represents the row number of the electrode array, and n represents the column number of the electrode array;
Figure BDA0003277776520000031
a state control signal indicating the ith row and j column electrodes, which is assigned a value of 1 when a positive voltage is applied, is assigned a value of-1 when a negative voltage is applied, and is assigned a value of-1 when no voltage is applied0。
Further, in the step (5), an electrode array is adopted to apply a morphology regulating electric field, and the electric field regulating signal is generated as follows:
Figure BDA0003277776520000032
wherein the content of the first and second substances,
Figure BDA0003277776520000033
representing a microstructure morphology electrode regulation signal; the microstructure topography comprises hmax、hminAnd d, hmaxRepresents the maximum thickness value, h, of the microstructure to be controlledminA value representing the minimum thickness of the microstructure; d is the minimum circumscribed circle diameter of the overlooking projection of the microstructure; kh、Kd、CmAs a correlation coefficient between applied voltage and microstructure morphology, Kh、Kd、CmSelecting a relation curve for calibrating the voltage and the microstructure shape; m represents the row number of the plate-shaped electrode array, and n represents the column number of the plate-shaped electrode array;
Figure BDA0003277776520000034
and the state control signals of the electrode plates in the ith row and the jth column are assigned to 1 when positive voltage is applied to the electrodes, to-1 when negative voltage is applied to the electrodes and to 0 when no voltage is applied to the electrodes.
An electrofluid spray printing microstructure topography regulation and control system for realizing the method comprises:
the appearance observation module is used for detecting a contact angle between the jet printing line and the substrate, the thickness distribution of a cross point of the jet printing linear array and the thickness and shape of the microstructure;
the system control module is used for generating an electrode regulation and control signal according to the method;
the appearance regulating and controlling module is used for regulating the voltage of the electrode array according to the electrode regulating and controlling signal;
the electrode array comprises a plurality of electrodes, and after the electrodes are charged, an electric field is formed on the substrate so as to regulate and control the line morphology, the linear array cross point morphology and the microstructure morphology.
Further, the appearance observation module comprises an appearance observation camera, a three-dimensional appearance observation unit and a visual processing unit; the appearance observation camera is used for acquiring image information of the linear array and the side profile of the microstructure, transmitting the image information to the visual processing unit, and obtaining contact angle information after image processing; and the three-dimensional appearance observation unit is used for measuring and acquiring the thickness distribution condition of the linear array and the microstructure, transmitting data to the visual processing unit, and extracting the maximum thickness, the minimum thickness and the minimum circumscribed circle diameter of the overlooking projection of the microstructure.
An electrofluid spray printing microstructure morphology regulating and controlling device for realizing the method comprises:
the electrofluid spray printing module comprises an electrospinning spray head unit and an electric atomization spray head unit, the electrospinning spray head unit is used for spray printing linear arrays on the substrate, the electric atomization spray head unit is used for spray printing liquid drops in grids defined by the linear arrays, and a microstructure is formed after the liquid drops are leveled;
the electrofluid spouts seal microstructure topography regulation and control system includes: the appearance observation module is used for detecting a contact angle between the jet printing line and the substrate, the thickness distribution of a cross point of the jet printing linear array and the thickness and shape of the microstructure; the system control module is used for generating an electrode regulation signal according to the method; the appearance regulating and controlling module is used for regulating the voltage of the electrode array according to the electrode regulating and controlling signal; the electrode array comprises a plurality of electrodes, and each electrode forms an electric field on the substrate so as to regulate and control the line morphology, the linear array cross point morphology and the microstructure morphology.
Further, the device also comprises a curing module which comprises a light curing unit and a heat curing unit; the light curing unit is used for performing light curing on the linear array and the microstructure, and the heat curing unit is used for performing heat curing on the linear array and the microstructure and performing drying treatment on the substrate.
Further, the device also comprises a surface treatment module, a drying module and a control module, wherein the surface treatment module comprises a hydrophilic material spraying unit, a hydrophobic material spraying unit and a drying unit; the hydrophilic spraying device is used for spraying hydrophilic solution on the substrate, the hydrophobic material spraying unit is used for spraying hydrophobic material on the substrate of the printing linear array, and the drying unit is used for drying and solidifying the leveling solution.
The system further comprises an atmosphere control module, a temperature control module and a control module, wherein the atmosphere control module comprises a box body, a filtering and purifying unit, a temperature control unit, a sensor feedback unit and an atmosphere controller; the box body is of a closed structure and is used for providing a self-assembly manufacturing space of the microstructure; the filtering and purifying unit is used for removing water vapor, oxygen and fine particles in the air and generating an inert gas environment; the temperature control unit is used for adjusting the temperature to keep the temperature in the box body stable; the sensor feedback unit is used for monitoring the oxygen content, pressure and temperature of water in the box body and feeding back signals to the atmosphere controller; the atmosphere controller is used for regulating and controlling other units according to the signals of the sensor feedback unit so as to maintain the ultra-pure environment and stable temperature in the box body.
Generally, compared with the prior art, the above technical solution according to the present invention mainly has the following technical advantages:
the invention closely combines the electrohydrodynamic jet printing technology to manufacture the microstructure for research, and provides a scheme for manufacturing the microstructure by combining the electrospinning technology and the electrospray technology, the electrospinning technology can efficiently manufacture a linear array, atomized liquid drops generated by the electrospraying form the microstructure after the linear array is leveled, and the manufacturing efficiency of the microstructure can be greatly improved. The invention also utilizes an additional electric field to independently regulate and control the linear array, the microstructure appearance and the linear array cross points after spray printing, and utilizes white light to relate to visual measurement to observe the microstructure appearance in real time so as to accurately regulate and control the linear array and the microstructure appearance.
Drawings
FIG. 1 is a flow chart of the method for regulating and controlling the morphology of an electrofluid jet printing microstructure according to the present invention;
FIG. 2 is a schematic view of an electrode array of the present invention;
FIG. 3 is a schematic diagram of the regulation of line morphology by the method of the present invention;
FIG. 4 is a schematic diagram of the method of the present invention for regulating and controlling linear array intersections;
FIG. 5 is a schematic diagram of the method of the present invention for controlling the morphology of a microstructure;
FIG. 6 is a schematic diagram of a microstructure morphology regulating system for electrofluid jet printing and a working principle of the system;
FIG. 7 is a schematic diagram of an overall apparatus for applying the topography modulation system of the present invention to electrofluid jet printing microstructures;
FIG. 8 is a schematic diagram of a manufacturing process of an electrofluid jet printing microstructure with microstructure morphology control according to the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the respective embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
FIG. 1 shows a flow chart of the microstructure morphology regulating method of the present invention, the method for regulating the microstructure morphology by electrofluid spray printing comprises the following steps:
(1) starting an electric spinning nozzle to spray and print the linear array on the substrate, and applying a morphology regulating and controlling electric field above the spray and printing linear array after spray printing;
(2) detecting a contact angle between the jet printing line and the substrate, comparing the contact angle with a target contact angle, and applying an electric field regulation signal according to a comparison result so as to regulate and control the line morphology;
(3) detecting the thickness distribution of the cross points of the jet printing linear array, comparing the thickness distribution with a target thickness distribution, and applying an electric field regulation and control signal according to a comparison result, thereby implementing regulation and control on the appearance of the cross points of the linear array;
(4) adopting an electric atomization mode to spray and print liquid drops in a grid surrounded by the linear arrays, and forming a microstructure after the liquid drops are leveled;
(5) and detecting the thickness and the shape of the microstructure, comparing the thickness and the shape with the target thickness and the target shape, and applying an electric field regulation signal according to the comparison result so as to regulate and control the microstructure morphology.
The above steps are further detailed below:
the present invention preferably applies the electric field regulation signal using the electrode array 4. Referring to fig. 2, the electrode array is a plate-shaped electrode array formed by a plurality of electrode layouts, and each electrode can apply voltages with different sizes, so that uniform electric fields with different sizes are generated at each part of the substrate.
FIG. 3 is a schematic diagram of the regulation of the line morphology by the method of the present invention. And (2) detecting the morphology of the jet printing line on line, comparing the morphology with the morphology of the target line, and outputting a line morphology regulation signal. The line morphology is characterized by adopting a contact angle between a jet printing line and a substrate, and the contact angle can be observed by acquiring a maximum profile surface image of a line section and processing the image to obtain the maximum profile surface image.
The electric field regulation signal is generated as follows:
Figure BDA0003277776520000061
wherein the content of the first and second substances,
Figure BDA0003277776520000062
representing a line-shaped electric field regulation signal; theta.theta.pThe contact angle of the p line and the substrate is shown; kl、ClFor the correlation coefficient between applied voltage and target contact angle, Kl、ClSelecting a relation curve for calibrating the voltage and the contact angle; m represents the row number of the electrode array, and n represents the column number of the electrode array;
Figure BDA0003277776520000071
the electrode state control signals for rows i and j indicate that the electrodes are assigned a value of 1 when a positive voltage is applied, a value of-1 when a negative voltage is applied, and a value of 0 when no voltage is applied.
FIG. 4 is a schematic diagram of the method of the present invention for regulating and controlling linear array intersections. And (3) detecting the intersection point appearance of the linear array on line, comparing the intersection point appearance with the intersection point appearance of the target linear array, and outputting a linear array intersection point appearance regulation and control signal. The cross point appearance of the linear array is characterized by the average thickness of the cross point area of the linear array and the average thickness of the whole cross point area of the linear array. The linear array intersection point morphology regulating and controlling electric field signal is generated as follows:
Figure BDA0003277776520000072
wherein the content of the first and second substances,
Figure BDA0003277776520000073
representing a linear array intersection point appearance electric field regulation and control signal; h iscRepresenting the average thickness of the electrode of the ith row and j columns corresponding to the intersection point area of the linear arrays;
Figure BDA0003277776520000074
representing the average thickness of the whole area of the intersection point of the linear arrays; kc、CcFor the correlation coefficient of applied voltage and thickness difference, Kc、CcSelecting a relation curve of the voltage and the thickness calibration at the intersection point; m represents the row number of the electrode array, and n represents the column number of the electrode array;
Figure BDA0003277776520000075
the state control signals representing the ith row and j column electrodes are assigned a value of 1 when a positive voltage is applied, a value of-1 when a negative voltage is applied, and a value of 0 when no voltage is applied.
FIG. 5 is a schematic diagram of the method of the present invention for controlling the morphology of a microstructure. And (4) comparing the microstructure morphology with the target microstructure morphology through online detection of the microstructure morphology, and outputting a microstructure morphology regulation and control signal. The microstructure appearance is characterized by adopting the maximum thickness value and the minimum thickness value of the microstructure and the overlooking projection minimum circumscribed circle diameter of the microstructure. The microstructure appearance electric field regulation and control signal is generated according to the following modes:
Figure BDA0003277776520000076
wherein the content of the first and second substances,
Figure BDA0003277776520000077
representing an electric field regulation signal of the microstructure appearance; the microstructure topography comprises hmax、hminAnd d, hmaxMaximum of microstructure to be regulatedThickness value, hminA value representing the minimum thickness of the microstructure; d is the minimum diameter of the overlooking projection circumscribed circle of the microstructure; kh、Kd、CmAs a correlation coefficient between applied voltage and microstructure morphology, Kh、Kd、CmSelecting a relation curve for calibrating the voltage and the microstructure appearance; m represents the row number of the plate-shaped electrode array, and n represents the column number of the plate-shaped electrode array;
Figure BDA0003277776520000078
the state control signals for the electrode plates in row i and column j are assigned a value of 1 when a positive voltage is applied to the electrodes, a value of-1 when a negative voltage is applied to the electrodes, and a value of 0 when no voltage is applied to the electrodes.
FIG. 6 is a schematic diagram of a microstructure morphology regulating system for electrofluid jet printing and a working principle thereof. Electrofluid spouts prints micro-structure topography regulation and control device includes: the appearance observation module 1 is used for detecting a contact angle between a jet printing line and a substrate, the thickness distribution of a cross point of a jet printing linear array and the thickness and shape of a microstructure; the system control module generates an electrode regulation and control signal according to the method; the morphology regulating and controlling module 3 is used for regulating the voltage of the electrode array according to the electrode regulating and controlling signal; the electrode array 4 comprises a plurality of electrodes, and an electric field is formed between each electrode and the substrate after each electrode is charged so as to regulate and control the line morphology, the linear array cross point morphology and the microstructure morphology.
The morphology observation module 1 comprises a morphology observation camera 11, a three-dimensional morphology observation unit 12 and a visual processing unit 13, wherein the morphology observation camera 11 is used for observing the contact angle between a linear array and a microstructure, is horizontally arranged on a substrate, acquires the side profile information of the linear array and the microstructure, transmits the observed image information to the visual processing unit, and obtains the contact angle information after image processing; the three-dimensional topography observation unit 12 preferably adopts a white light interference vision scheme for measuring and acquiring the thickness distribution of the linear array and the microstructure, transmitting data to the vision processing unit 13, and extracting the maximum thickness, the minimum thickness and the minimum circumscribed circle diameter of the overlooking projection of the microstructure.
The shape regulating module 3 receives a regulating signal of the real-time processing controller to regulate the voltage of each electrode, so as to regulate and control the contact angles of the linear array and the microstructure, and further realize closed-loop regulation and control on the shapes of the linear array and the microstructure; the electrode array and the substrate motion structure are integrated together;
FIG. 7 is a schematic diagram of an overall apparatus for applying the topography control system of the present invention to electrofluid jet printing microstructures. The device includes a plurality of modules such as electrofluid spouts seal module, appearance detection module, solidification module, surface treatment module, appearance regulation and control module, atmosphere control module, system control module, wherein:
the electrofluid spray printing module 5 comprises a spray head unit 51, a spray printing auxiliary device 52 and a substrate 53; the nozzle unit 51 integrates an ink supply system and a nozzle, and voltage is applied between the nozzle and the substrate to realize jet printing; the nozzle unit 51 is arranged on a motion module with X, Y, Z-direction moving freedom degree and Z-direction rotating freedom degree, and the jet printing auxiliary device 52 is connected with the nozzle unit through a connecting piece; the substrate 13 is provided on a motion module having X, Y-directional freedom of movement and Z-directional freedom of rotation.
The topography observation module 1 comprises a topography observation camera 11, a three-dimensional topography observation unit 12 and a vision processing unit 13. The three-dimensional shape detection unit is arranged on a motion assembly with Z freedom degree, preferably adopts a white light interference vision scheme and is used for respectively carrying out real-time vision detection on the thickness, the volume and the uniformity of the linear array and the dot matrix on the substrate before and after curing; the appearance observation camera is used for observing a contact angle between the linear array and the microstructure and is fixed on the substrate motion platform; and the system is used for detecting the spraying state, the linear array after spraying and printing and the microstructure.
The curing module 6 comprises a light curing unit 61 and a heat curing unit 62; the light curing unit 61 comprises a UVLED and is used for performing light curing on the linear array and the microstructure on the substrate; the thermal curing unit 62 includes a hot plate for curing the linear arrays and microstructures on the substrate and drying the substrate; the light-curing unit 61 is mounted on a moving member having X, Y degrees of freedom; the thermal curing unit 62 is integrated with the substrate moving structure; the curing module and the spray printing module are integrated together, so that the linear array and the microstructure after spray printing can be conveniently cured.
The surface treatment module 7 includes a hydrophilic material spraying unit 71, a hydrophobic material spraying unit 72, and a drying device 73. The hydrophilic spraying device 71 can spray hydrophilic solution on the substrate, the hydrophobic material spraying device 72 sprays hydrophobic material on the substrate of the printing linear array, and the drying device 73 can dry and solidify the leveling solution. The surface treatment module is arranged in the independent chamber and used for adjusting the hydrophilicity and hydrophobicity of the substrate and the linear array of the jet printing.
The electrode back plate 4 is composed of a plate-shaped electrode array, and each electrode can apply voltages with different sizes respectively to generate uniform electric fields with different sizes at each part of the substrate. The electrode back plate is integrated with the substrate motion structure. The shape regulation and control module 3 receives the regulation and control signal of the real-time processing control module to regulate the voltage of each electrode, and the contact angles of the linear array and the microstructure are regulated and controlled, so that the closed-loop regulation and control of the shapes of the linear array and the microstructure are realized.
The atmosphere control module 8 comprises a box body, a filtering and purifying unit, a temperature control unit, a sensor feedback unit and an atmosphere controller; the box body is of a closed structure and provides a self-assembly manufacturing space of the microstructure; the filtering and purifying unit removes water vapor, oxygen, fine particles in the air and the like and generates an inert gas environment according to the requirement; the temperature control unit keeps the temperature in the box body stable; the sensor feedback unit is used for monitoring the oxygen content, pressure and temperature of water in the box body and feeding back signals to the atmosphere control unit; the atmosphere controller regulates and controls the atmosphere in the box body according to the signal of the sensor feedback unit, and ensures the stability of the ultra-pure environment and the temperature in the box body.
The system control module 2 comprises a real-time processing control module 21, a spray head controller 22 and a curing controller 23; the nozzle controller 22 is used for regulating and controlling the nozzle voltage and the parameters of the jet printing auxiliary device and controlling the movement of the nozzle unit and the substrate; the curing controller 23 is configured to control the light curing unit and the heat curing unit; the real-time processing controller 21 is respectively connected with the nozzle controller, the morphology regulating and controlling module, the vision processing unit and the curing controller, wherein the system control module carries out closed-loop control on the morphology regulating and controlling module according to the linear array and the microstructure detection results.
For the electrofluid spray printing module 5, the electrofluid spray printing module is provided with a plurality of sets of nozzle units 51, preferably a set of electrospinning nozzle units and a set of electric atomizing nozzle units, and an electrofluid electrospinning spray printing mode and an electric atomizing spray printing mode are matched with each other to finish the self-assembly high-efficiency manufacture of the microstructure, wherein the electrofluid electrospinning mode is used for spraying and printing a linear array, atomizing and spraying are carried out above the linear array by adopting the electric atomizing mode, and the microstructure is formed by self-assembly in an area surrounded by the linear array after liquid drops are leveled; the spray printing assisting device 52 may select one or more of an electrostatic focusing assisting device, an extraction electrode assisting device, and a trajectory inducing device according to the requirements of electrospinning spray printing or electrospray spray printing, and preferably integrates the extraction electrode assisting device when printing on an insulating substrate, the electrostatic focusing assisting device when satellite droplets need to be suppressed, and the trajectory inducing device when the trajectory of the ink droplets flying in the air needs to be controlled.
For the nozzle unit 51, the nozzle unit is composed of a single row of multiple nozzles, the nozzle controller rotates the nozzles along the Z axis to realize linear array jet printing with different pitches, and the linear array pitch is preferably regulated according to the following formula:
Lp=kp·L·cosα
wherein L ispThe interval between the p-th line and the (p +1) -th line representing jet printing; l represents the distance between two adjacent spray holes; k is a radical ofpRepresenting the interval number between two jet holes for jet printing the p line and the (p +1) line; alpha represents the angle of rotation of the showerhead along the Z-axis.
FIG. 8 is a schematic diagram of a manufacturing process of an electrofluid jet printing microstructure with microstructure morphology control, which comprises the following steps:
(a) initializing a system, and inputting a plurality of set parameters such as voltage amplitude of a spray head according to experiment requirements; placing the substrate in a surface treatment module for hydrophilic treatment;
(b) firstly, an electrospinning spray head module is used for spraying and printing linear arrays on a substrate, the linear arrays form a net shape along two directions, and the two directions can be vertical or at other angles according to requirements;
(c) rotating the substrate to enable the appearance observation camera to observe the maximum profile surface of the cross section of the linear array, observing the contact angle and the appearance of the linear array on the substrate in real time, and when the contact angle and the appearance are not in accordance with preset values, sending an adjusting signal to the appearance adjusting and controlling module by the system control module, and generating an electric field through the adjusting and controlling electrode back plate to adjust the contact angle of the linear array;
(d) the white light interference vision unit is adopted to detect the shape of the linear array cross point, the thickness distribution of the area near the cross point is obtained, when the distribution does not meet the requirement, the system control module sends an adjusting signal to the shape adjusting and controlling module, and an electric field is generated by adjusting and controlling the electrode back plate to promote the leveling of liquid drops;
(e) starting the substrate to heat or curing the linear array by using a curing lamp;
(f) carrying out surface treatment on the cured substrate and the linear array by using the surface treatment module to make the spray drain the linear array and the substrate;
(g) the electric atomization module is adopted to carry out atomization spraying on the linear array, atomized liquid drops form a microstructure after leveling, the defects of the spray head are detected before spraying, different spraying modes are selected according to the defects of the spray head, and preferably, the defect spray head and a part of defect-free spray head are closed to carry out patterned spraying; after the sprayed liquid drops are leveled, the optical detection module is used for detecting the shape and consistency of the formed microstructure, a defect distribution diagram is recorded, and if the consistency is poor, the step can be repeatedly changed to carry out local additional spraying according to the defect condition;
(h) according to the defect distribution map, the system control module sends an adjusting signal to the morphology adjusting and controlling module, an electric field is generated by adjusting and controlling the electrode back plate, the curvature of the microstructure is adjusted, and the consistency of the microstructure is detected in real time through the optical detection module to form closed-loop control;
(i) and heating and curing or photocuring the microstructure by adopting the curing module.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (7)

1. A method for regulating and controlling the morphology of an electrofluid spray printing microstructure is characterized by comprising the following steps:
(1) starting an electric spinning nozzle to spray and print the linear array on the substrate, and applying a morphology regulating and controlling electric field above the spray and printing linear array after spray printing;
(2) detecting a contact angle between the jet printing line and the substrate, comparing the contact angle with a target contact angle, and applying an electric field regulation signal according to the comparison result so as to regulate and control the line morphology;
(3) detecting the thickness distribution of the cross points of the jet printing linear array, comparing the thickness distribution with a target thickness distribution, and applying an electric field regulation and control signal according to the comparison result, thereby implementing regulation and control on the appearance of the cross points of the linear array;
(4) adopting an electric atomization mode to spray and print liquid drops in a grid surrounded by the linear arrays, and forming a microstructure after the liquid drops are leveled;
(5) detecting the thickness and the shape of the microstructure, comparing the thickness and the shape with the target thickness and the target shape, and applying an electric field regulation signal according to the comparison result so as to regulate and control the microstructure shape;
the step (2) applies a morphology regulating electric field by adopting an electrode array, and the electric field regulating signal is generated according to the following mode:
Figure FDA0003648952230000011
wherein, the first and the second end of the pipe are connected with each other,
Figure FDA0003648952230000012
representing a line profile electrode regulation signal; thetapThe contact angle of the p line and the substrate is shown; kl、ClFor the correlation coefficient between applied voltage and target contact angle, Kl、ClSelecting a relation curve for calibrating the voltage and the contact angle; m represents the number of rows of the electrode array;n represents the number of columns of the electrode array;
Figure FDA0003648952230000013
the electrode state control signals represent the ith row and the jth column, and the electrode is assigned to 1 when positive voltage is applied, assigned to-1 when negative voltage is applied and assigned to 0 when no voltage is applied;
and (3) applying a morphology regulating electric field by adopting an electrode array, wherein the electric field regulating signal is generated according to the following mode:
Figure FDA0003648952230000021
wherein the content of the first and second substances,
Figure FDA0003648952230000022
representing a linear array intersection point shape electrode regulation signal; h is a total ofcRepresenting the average thickness of the electrode of the ith row and j columns corresponding to the intersection point area of the linear arrays;
Figure FDA0003648952230000023
representing the average thickness of the whole area of the linear array intersection point; kc、CcFor the correlation coefficient of applied voltage and thickness difference, Kc、CcSelecting a relation curve of the voltage and the thickness calibration at the intersection point; m represents the row number of the electrode array, and n represents the column number of the electrode array;
Figure FDA0003648952230000024
state control signals representing the ith row and the jth column electrodes, wherein the electrodes are assigned to 1 when a positive voltage is applied, assigned to-1 when a negative voltage is applied and assigned to 0 when no voltage is applied;
and (5) applying a morphology regulating electric field by adopting an electrode array, wherein the electric field regulating signal is generated according to the following mode:
Figure FDA0003648952230000025
wherein the content of the first and second substances,
Figure FDA0003648952230000026
representing a microstructure morphology electrode regulation signal; the microstructure topography comprises hmax、hminAnd d, hmaxRepresents the maximum thickness value, h, of the microstructure to be controlledminA minimum thickness value representing the microstructure; d is the minimum circumscribed circle diameter of the overlooking projection of the microstructure; kh、Kd、CmAs a correlation coefficient between applied voltage and microstructure morphology, Kh、Kd、CmSelecting a relation curve for calibrating the voltage and the microstructure shape; m represents the row number of the plate-shaped electrode array, and n represents the column number of the plate-shaped electrode array;
Figure FDA0003648952230000027
the state control signals for the electrode plates in row i and column j are assigned a value of 1 when a positive voltage is applied to the electrodes, a value of-1 when a negative voltage is applied to the electrodes, and a value of 0 when no voltage is applied to the electrodes.
2. An electrohydrodynamic jet printing microstructure topography control system for implementing the method of claim 1, comprising:
the appearance observation module is used for detecting a contact angle between the jet printing line and the substrate, the thickness distribution of a cross point of the jet printing linear array and the thickness and shape of the microstructure;
a system control module for generating an electrode conditioning signal according to the method of claim 1;
the appearance regulating and controlling module is used for regulating the voltage of the electrode array according to the electrode regulating and controlling signal;
the electrode array comprises a plurality of electrodes, and after the electrodes are charged, an electric field is formed on the substrate so as to regulate and control the line morphology, the linear array cross point morphology and the microstructure morphology.
3. The system for regulating and controlling the morphology of an electrofluidic jet printing microstructure according to claim 2, wherein the morphology observation module comprises a morphology observation camera, a three-dimensional morphology observation unit and a vision processing unit; the appearance observation camera is used for acquiring image information of the linear array and the side profile of the microstructure, transmitting the image information to the visual processing unit, and obtaining contact angle information after image processing; and the three-dimensional appearance observation unit is used for measuring and acquiring the thickness distribution condition of the linear array and the microstructure, transmitting data to the visual processing unit, and extracting the maximum thickness, the minimum thickness and the minimum circumscribed circle diameter of the overlooking projection of the microstructure.
4. An electrofluid jet printing microstructure topography regulation and control device for realizing the method of claim 1, which is characterized by comprising the following components:
the electrofluid spray printing module comprises an electrospinning spray head unit and an electric atomizing spray head unit, wherein the electrospinning spray head unit is used for spraying and printing linear arrays on a substrate, the electric atomizing spray head unit is used for spraying and printing liquid drops in grids enclosed by the linear arrays, and a microstructure is formed after the liquid drops are leveled;
the electrofluid spouts seal microstructure topography regulation and control system includes: the appearance observation module is used for detecting a contact angle between the jet printing line and the substrate, the thickness distribution of a cross point of the jet printing linear array and the thickness and shape of the microstructure; a system control module for generating an electrode conditioning signal according to the method of claim 1; the appearance regulating and controlling module is used for regulating the voltage of the electrode array according to the electrode regulating and controlling signal; the electrode array comprises a plurality of electrodes, and each electrode forms an electric field on the substrate so as to regulate and control the line morphology, the linear array cross point morphology and the microstructure morphology.
5. The electrohydrodynamic jet printing microstructure topography control device according to claim 4, further comprising a curing module comprising a photo-curing unit and a thermal-curing unit; the light curing unit is used for performing light curing on the linear array and the microstructure, and the heat curing unit is used for performing heat curing on the linear array and the microstructure and performing drying treatment on the substrate.
6. The electrohydrodynamic jet printing microstructure morphology control device according to claim 5, further comprising a surface treatment module comprising a hydrophilic material spraying unit, a hydrophobic material spraying unit, and a drying unit; the hydrophilic spraying device is used for spraying hydrophilic solution on the substrate, the hydrophobic material spraying unit is used for spraying hydrophobic material on the substrate of the printing linear array, and the drying unit is used for drying and solidifying the leveling solution.
7. The device for regulating and controlling the morphology of the electrofluid jet printing microstructure according to claim 5 or 6, characterized by further comprising an atmosphere control module, wherein the atmosphere control module comprises a box body, a filtering and purifying unit, a temperature control unit, a sensor feedback unit and an atmosphere controller; the box body is of a closed structure and is used for providing a self-assembly manufacturing space of the microstructure; the filtering and purifying unit is used for removing water vapor, oxygen and fine particles in the air and generating an inert gas environment; the temperature control unit is used for adjusting the temperature to keep the temperature in the box body stable; the sensor feedback unit is used for monitoring the oxygen content, pressure and temperature of water in the box body and feeding back signals to the atmosphere controller; the atmosphere controller is used for regulating and controlling other units according to the signals of the sensor feedback unit so as to maintain the ultra-pure environment and stable temperature in the box body.
CN202111122546.0A 2021-09-24 2021-09-24 Method, system and device for regulating morphology of electrofluid spray printing microstructure Active CN113733751B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111122546.0A CN113733751B (en) 2021-09-24 2021-09-24 Method, system and device for regulating morphology of electrofluid spray printing microstructure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111122546.0A CN113733751B (en) 2021-09-24 2021-09-24 Method, system and device for regulating morphology of electrofluid spray printing microstructure

Publications (2)

Publication Number Publication Date
CN113733751A CN113733751A (en) 2021-12-03
CN113733751B true CN113733751B (en) 2022-07-12

Family

ID=78740863

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111122546.0A Active CN113733751B (en) 2021-09-24 2021-09-24 Method, system and device for regulating morphology of electrofluid spray printing microstructure

Country Status (1)

Country Link
CN (1) CN113733751B (en)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7108894B2 (en) * 1998-09-30 2006-09-19 Optomec Design Company Direct Write™ System
US8562095B2 (en) * 2010-11-01 2013-10-22 The Board Of Trustees Of The University Of Illinois High resolution sensing and control of electrohydrodynamic jet printing
US8919899B2 (en) * 2012-05-10 2014-12-30 Integrated Deposition Solutions Methods and apparatuses for direct deposition of features on a surface using a two-component microfluidic jet
CN104309338B (en) * 2014-10-17 2017-01-11 华中科技大学 Closed-loop control method for electrospining direct writing technology
CN104723677A (en) * 2015-02-14 2015-06-24 广东工业大学 Flexible circuit printing method and device based on electro-hydraulic coupling power
CN104723678B (en) * 2015-03-12 2017-05-24 上海交通大学 Electro hydrodynamic preparation device and method for batch micro-droplets
US11203207B2 (en) * 2015-12-07 2021-12-21 Kateeva, Inc. Techniques for manufacturing thin films with improved homogeneity and print speed
CN109334258B (en) * 2018-09-06 2019-08-30 华中科技大学 A kind of black liquid cone detection device and method suitable for inkjet printing
CN110614848B (en) * 2019-09-26 2020-09-18 华中科技大学 Track-induced deposition control system and method for electrohydrodynamic jet printing
CN112757796B (en) * 2020-12-30 2022-04-08 华中科技大学 System and method for detecting quality of display device in whole spray printing manufacturing process
CN113199867B (en) * 2021-04-12 2022-06-14 华中科技大学 Electrofluid jet patterning induction method and system

Also Published As

Publication number Publication date
CN113733751A (en) 2021-12-03

Similar Documents

Publication Publication Date Title
Mishra et al. High-speed and drop-on-demand printing with a pulsed electrohydrodynamic jet
US9278522B2 (en) High resolution sensing and control of electrohydrodynamic jet printing
CN104723678B (en) Electro hydrodynamic preparation device and method for batch micro-droplets
Sumerel et al. Piezoelectric ink jet processing of materials for medicaland biological applications
CN109228304B (en) Three-dimensional printing device for electric field induced auxiliary electrospray
JP6804650B2 (en) Dispenser containing sensors to detect surfaces and surface properties
US10086622B2 (en) Apparatuses and methods for stable aerosol-based printing using an internal pneumatic shutter
CN104191819B (en) Nozzle sprays independent controlled array electrofluid jet-printing head and its implementation
CN104553342B (en) Color three dimension curved surface ink-jet printing apparatus
CN110614848B (en) Track-induced deposition control system and method for electrohydrodynamic jet printing
US20120225208A1 (en) Fabrication method and fabrication apparatus for solid shaped product
CN106891414A (en) Droplet ejection printing equipment and the method that Graphene metamaterial microstructure is prepared using the device
KR20070093101A (en) Miniature aerosol jet and aerosol jet array
CN109049674B (en) Additive manufacturing device and method for microsystem three-dimensional structure
US10124602B2 (en) Apparatuses and methods for stable aerosol deposition using an aerodynamic lens system
CN113199867B (en) Electrofluid jet patterning induction method and system
CN113733751B (en) Method, system and device for regulating morphology of electrofluid spray printing microstructure
CN109366980A (en) A kind of laser assisted electrojet original position printing manufacturing method
CN109228305B (en) Three-dimensional printing method for electric field induced auxiliary electrospray
CN106273518B (en) A kind of spherical or cylindrical surface type lenticule processing unit (plant) and its processing method based on extruding printing
CN204123788U (en) Nozzle sprays independent controlled array electrofluid jet-printing head
Kim et al. On-demand electrohydrodynamic jetting with meniscus control by a piezoelectric actuator for ultra-fine patterns
US20130314472A1 (en) Methods and Apparatus for Manufacturing Micro- and/or Nano-Scale Features
CN105773965A (en) Inverted single-electrode electrofluid three-dimensional jet printing device
CN114905855B (en) Micro-circumference curved surface conformal sensitive structure and preparation method and device thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant