CN113732219B - Vacuum hot extrusion forming device for rare earth terbium target - Google Patents

Vacuum hot extrusion forming device for rare earth terbium target Download PDF

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Publication number
CN113732219B
CN113732219B CN202110924003.4A CN202110924003A CN113732219B CN 113732219 B CN113732219 B CN 113732219B CN 202110924003 A CN202110924003 A CN 202110924003A CN 113732219 B CN113732219 B CN 113732219B
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China
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cylinder
tank body
movable
ring
rare earth
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CN113732219A (en
Inventor
郑巨根
邹宁
邹宇钦
孙铅铅
王佳文
张艳成
邹旭杰
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Ningbo Funeng Rare Earth New Material Co ltd
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Ningbo Funeng Rare Earth New Material Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21JFORGING; HAMMERING; PRESSING METAL; RIVETING; FORGE FURNACES
    • B21J5/00Methods for forging, hammering, or pressing; Special equipment or accessories therefor
    • B21J5/02Die forging; Trimming by making use of special dies ; Punching during forging
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21JFORGING; HAMMERING; PRESSING METAL; RIVETING; FORGE FURNACES
    • B21J1/00Preparing metal stock or similar ancillary operations prior, during or post forging, e.g. heating or cooling
    • B21J1/06Heating or cooling methods or arrangements specially adapted for performing forging or pressing operations
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3407Cathode assembly for sputtering apparatus, e.g. Target
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)

Abstract

The invention discloses a vacuum hot extrusion forming device for a rare earth terbium target, which comprises: the device comprises a tank body, an extrusion cylinder and a demolding cylinder; the top of the tank body is provided with a vacuum port, and the vacuum port is used for being externally connected with a vacuum device so as to keep negative pressure in the tank body; the extrusion oil cylinder is arranged at the top of the tank body; the demolding cylinder is arranged at the bottom of the tank body; the outer side of the demolding cylinder is provided with a supporting platform, a heating assembly is arranged in the supporting platform, and an extrusion die is arranged in the supporting platform above the demolding cylinder; the movable cylinder is arranged outside the tank body and is provided with a push rod for pushing the rare earth terbium target to move. The invention carries out hot extrusion molding on the rare earth terbium target under the vacuum condition, can prevent oxidation to a certain extent, has complete equipment configuration automation function, is simple to operate and strong in reliability, has the effects of higher production quality, stronger reliability and lower cost, and has higher production efficiency.

Description

Vacuum hot extrusion forming device for rare earth terbium target
Technical Field
The invention relates to the field of rare earth terbium target forming equipment, in particular to a vacuum hot extrusion forming device for a rare earth terbium target.
Background
At present, the shape of the surface of a magnetic material product is compounded by adopting a plasma sputtering technology method for high-purity terbium metal, so that the magnetic energy and the ring-making rate are more effectively improved, the production cost is greatly reduced, and the effective utilization of rare earth resources is improved.
Disclosure of Invention
Aiming at the problems, the invention provides a vacuum hot extrusion forming device for a rare earth terbium target, which solves the defects that the existing vacuum hot extrusion forming device is complex in processing link and more in steps, so that the manufactured rare earth terbium target is extra-high, the yield is low, the quality purity, the density and other indication consistency are poor, and the quality is difficult to meet the sputtering technical index requirement.
The technical scheme adopted by the invention is as follows:
a vacuum hot extrusion molding device for a rare earth terbium target material comprises:
a tank body; the top of the tank body is provided with a vacuum port, and the vacuum port is used for being externally connected with a vacuum device so as to keep negative pressure in the tank body;
the extrusion oil cylinder is arranged at the top of the tank body;
the demolding oil cylinder is arranged at the bottom of the tank body; the outer side of the demolding cylinder is provided with a supporting platform, a heating assembly is arranged in the supporting platform, and an extrusion die is arranged in the supporting platform above the demolding cylinder; the movable cylinder is arranged outside the tank body and is provided with a push rod for pushing the rare earth terbium target to move. The heated raw material is clamped and pushed to an extrusion die, and an extrusion punch is used for punching the raw material, so that the raw material is extruded and molded into a cylindrical terbium target with an opening at the upper part and a closed lower part; the rare earth terbium target is formed by hot extrusion under the vacuum condition, oxidation of the rare earth terbium target can be prevented to a certain extent, the equipment configuration automation function is complete, the operation is simple and the reliability is high, the production quality is high, the reliability is high, the cost is reduced, and the production efficiency is high.
Optionally, a material feeding port is arranged at the top of the tank body.
Optionally, the gas pitcher is equipped with to the heating device bottom, external flexible trachea on the gas pitcher is located the supporting platform top of heating device both sides is inwards sunken to form the installation cavity, the installation cavity is equipped with the removal inflator, in the removal inflator, flexible tracheal end intercommunication removes the inflator, the diapire of removing the inflator is equipped with first spring, the piston is equipped with to the end of first spring, the piston is kept away from one side of removing the inflator diapire and is equipped with the dead lever, the dead lever wears out the removal inflator and connects the movable arm of buckling, the top of movable arm stretches out the installation cavity and is connected with the grip block, be equipped with the second spring in the installation cavity, the inner wall in installation cavity is connected to second spring one end, and the lateral wall of removal inflator is connected to the other end for the direction removal of the push rod direction of the perpendicular to removal jar of promotion removal inflator.
Optionally, the push rod is externally connected with a pair of plugboards, and a slot convenient for plugboard insertion is arranged in the clamping plate.
Optionally, a temperature sensor is arranged in the clamping plate, and copper heat conducting sheets are arranged outside the temperature sensor in parallel; the binding post of the temperature sensor is electrically connected with a heat conducting sheet through a wire, the binding post of the temperature sensor of one clamping plate is also electrically connected with the positive electrode of the mobile power supply, the binding post of the temperature sensor of the other clamping plate is also electrically connected with the negative electrode of the power supply, the upper part of the clamping plate is provided with a vertical plate, the top of the vertical plate is provided with a transverse plate, a movable cavity is arranged in the transverse plate, and the two transverse plates on the pair of clamping plates are oppositely arranged; the mobile power supply is arranged in the clamping plate.
Optionally, be connected with the heat conduction copper pipe on the conducting strip, the heat conduction copper pipe passes vertical board and extends to the movable intracavity of diaphragm the movable intracavity still is equipped with solid fixed ring, gu be connected with the memory metal on the fixed ring and hug closely the helicoid of overcoat at the heat conduction copper pipe, helicoid end-to-end connection has the outer lantern ring, be equipped with the inner lantern ring of copper in the overcoat ring, the end of heat conduction copper pipe is connected with the conducting strip through the conducting strip, the conducting strip hugs closely the contact inner lantern ring, the inboard of overcoat ring is equipped with first magnet ring, the lateral wall of inner lantern ring is equipped with the second magnet ring, the contact surface magnetic pole between first magnet ring and second magnet ring is mutually adsorbed in contrast, the helicoid is heated and is reached deformation temperature and take place to extend, and then make the mutual conflict of lantern ring in a pair of grip block both sides and then make temperature sensor's both sides power supply circuit switch on for temperature sensor begins work. At present, the temperature of the raw materials is detected through a temperature sensor arranged outside the tank body, only single measurement data is needed, and the detection precision is low. The invention adopts the structure that the temperature of the heating component is transmitted to the gas tank, so that the gas in the gas tank enters the movable gas tank to push the piston to move and drive the fixed rod to move, and the clamping plate clamps the target; the temperature of the target material is transferred to the temperature sensor and the heat conducting copper pipe, the heat conducting copper pipe transfers the temperature to the spiral ring, the spiral ring stretches when being heated to reach the deformation temperature, and then the inner lantern rings at the two sides of the pair of clamping plates are mutually abutted, so that a closed circuit is formed by the power supply, the temperature sensor, the heat conducting copper pipe, the inner lantern rings, the conducting strip and the conducting ring in the pair of clamping plates, the temperature sensors at the two sides start to work, and meanwhile, different positions of the target material are measured, and the detection precision is improved; the automatic clamping and automatic detection after the temperature is reached are realized, the detection is not required to be additionally controlled, and the accuracy of detecting the temperature of an object in vacuum is improved.
Optionally, a first heat transfer air pipe communicated with the inside of the movable air cylinder is arranged on the piston, and the first heat transfer air pipe penetrates through the fixed rod and the movable arm to further abut against the clamping plate.
Optionally, the end of the heat transfer air pipe is provided with a constant pressure valve, the constant pressure valve is connected with a second heat transfer air pipe, and the second heat transfer air pipe penetrates through the clamping plate and into the heat transfer copper pipe until the end of the second heat transfer air pipe.
(III) beneficial effects
1. The heated raw material is clamped and pushed to an extrusion die, and an extrusion punch is used for punching the raw material, so that the raw material is extruded and molded into a cylindrical terbium target with an opening at the upper part and a closed lower part; the rare earth terbium target is formed by hot extrusion under the vacuum condition, oxidation of the rare earth terbium target can be prevented to a certain extent, the equipment configuration automation function is complete, the operation is simple and the reliability is high, the production quality is high, the reliability is high, the cost is reduced, and the production efficiency is high.
2. The invention transmits the temperature of the heating component to the gas tank, so that the gas in the gas tank enters the movable gas tank to push the piston to move and drive the fixed rod to move, and the clamping plate clamps the target; the temperature of the target material is transferred to the temperature sensor and the heat conducting copper pipe, the heat conducting copper pipe transfers the temperature to the spiral ring, the spiral ring stretches when being heated to reach the deformation temperature, and then the inner lantern rings at the two sides of the pair of clamping plates are mutually abutted, so that a closed circuit is formed by the power supply, the temperature sensor, the heat conducting copper pipe, the inner lantern rings, the conducting strip and the conducting ring in the pair of clamping plates, the temperature sensors at the two sides start to work, and meanwhile, different positions of the target material are measured, and the detection precision is improved; the automatic clamping and automatic detection after the temperature is reached are realized, the detection is not required to be additionally controlled, and the accuracy of detecting the temperature of an object in vacuum is improved.
3. When the pressure of the internal gas further rises, the pressure of the constant pressure valve is broken through, so that hot gas in the first heat transfer pipe enters the second heat transfer pipe, the heat transfer copper pipe is rapidly heated, and the spiral ring is further heated; heat transfer can be accelerated.
Description of the drawings:
FIG. 1 is an internal structural view of a vacuum hot extrusion molding apparatus for a rare earth terbium target of example 1 of the present invention;
FIG. 2 is a cross-sectional view of a heating element of a support platform of a vacuum hot extrusion apparatus for forming terbium rare earth targets according to example 2 of the present invention;
FIG. 3 is an enlarged partial view of part A of FIG. 2 of a vacuum hot extrusion apparatus for forming a terbium rare earth target in accordance with example 2 of the present invention;
FIG. 4 is a view showing the construction of the inner part of the installation cavity of the vacuum hot extrusion molding device for the rare earth terbium target in the embodiment 2 of the invention;
FIG. 5 is a partial block diagram of the pushrod portion of FIG. 3 of a rare earth terbium target vacuum hot extrusion apparatus of example 2 of the present invention.
FIG. 6 is a circuit diagram of the operation of the temperature sensor of the vacuum hot extrusion device for forming a rare earth terbium target in example 2 of the present invention;
FIG. 7 is a cross-sectional view of a heating element of a support platform of a vacuum hot extrusion apparatus for terbium rare earth targets according to example 3 of the present invention;
FIG. 8 is an enlarged view of part B of the apparatus for vacuum hot extrusion of terbium rare earth targets of example 3 of the present invention.
The reference numerals in the drawings are as follows:
1. the cylinder body, 2, extrusion cylinder, 3, demolding cylinder, 4, moving cylinder, 5, vacuum port, 6, heating component, 7, extrusion die, 8, push rod, 9, material feed port, 10, gas tank, 11, flexible gas pipe, 12, installation cavity, 13, moving gas pipe, 14, first spring, 15, piston, 16, fixed rod, 17, movable arm, 18, clamping plate, 19, second spring, 20, plugboard, 21, slot, 22, heat conducting sheet, 23, fixed ring, 24, movable power supply, 25, vertical plate, 26, transverse plate, 27, movable cavity, 28, heat conducting copper pipe, 29, spiral ring, 30, outer ring, 31, inner ring, 32, conductive sheet, 33, conductive ring, 34, temperature sensor, 35, first magnet ring, 36, second magnet ring, 37, first heat conducting gas pipe, 38, valve core, 39, plug, 40, second heat conducting gas pipe, 41 and support platform.
The specific embodiment is as follows:
the present invention will be described in detail with reference to the accompanying drawings.
Example 1
As shown in fig. 1, the technical scheme adopted by the invention is as follows:
a vacuum hot extrusion molding device for a rare earth terbium target material comprises: the device comprises a tank body 1, an extrusion oil cylinder 2, a demolding oil cylinder 3 and a moving cylinder 4; the top of the tank body is provided with a vacuum port 5 which is used for being externally connected with a vacuum device to keep negative pressure in the tank body; the extrusion oil cylinder is arranged at the top of the tank body; the demolding cylinder is arranged at the bottom of the tank body; a supporting platform 41 is arranged on the outer side of the demolding cylinder, a heating assembly 6 is arranged in the supporting platform, and an extrusion die 7 is arranged in the supporting platform above the demolding cylinder; the movable cylinder is arranged outside the tank body and is provided with a push rod 8 for pushing the rare earth terbium target to move. The top of the tank body is provided with a material feeding port 9. The vacuum port in this embodiment is externally connected to a vacuum pump system. The demolding cylinder in the embodiment is used for extruding the extruded rare earth terbium target material out of the mold.
When the embodiment is implemented, in the processing process, cylindrical rare earth materials are put into a tank body through a material feeding port, so that raw materials fall onto a heating component, a sealing cover is closed, the vacuum tank body is vacuumized through an external vacuum system, so that the internal negative pressure value reaches minus 0.08mpa, the heating component heats the raw materials, the raw materials are heated to 450-650 ℃, then the heated raw materials are clamped and pushed to an extrusion die through a push rod, and the raw materials are extruded by an extrusion punch to be extruded into a cylindrical terbium target with an opening at the upper part and a closed lower part. Therefore, the rare earth terbium target is subjected to hot extrusion molding under the vacuum condition, oxidation of the rare earth terbium target can be prevented to a certain extent, the equipment configuration automation function is complete, the operation is simple and the reliability is high, the effects of high production quality, high reliability and cost reduction are achieved, and the production efficiency is also high.
Example 2
As shown in fig. 2, fig. 3, fig. 4, fig. 5 and fig. 6, the difference between this embodiment 2 and embodiment 1 is that the gas pitcher 10 is installed to the heating device bottom, external flexible trachea 11 is gone up to the gas pitcher, is located the supporting platform top of heating device both sides inwards sunken formation installation cavity 12, the installation cavity is equipped with and removes inflator 13, remove in the inflator, flexible trachea's end intercommunication removes the inflator, the diapire of removing the inflator is equipped with first spring 14, the end of first spring is equipped with piston 15, one side that the piston kept away from the removal inflator diapire is equipped with dead lever 16, the dead lever wears out and removes the inflator and connect the expansion arm 17 of buckling, the top of expansion arm stretches out the installation cavity and is connected with grip block 18, be equipped with second spring 19 in the installation cavity, the inner wall in installation cavity is connected to second spring one end, and the lateral wall of removal is connected to the other end for promote the direction removal perpendicular to the push rod direction of removing the jar and remove.
The push rod is externally connected with a pair of plugboards 20, and a slot 21 which is convenient for the plugboards to be inserted is arranged in the clamping plate. A temperature sensor 34 is arranged in the clamping plate, and copper heat conducting fins 22 are arranged outside the temperature sensor in parallel; the terminal of temperature sensor has the conducting strip through wire electric connection, and the terminal of temperature sensor of one grip block is electric connection portable power source 24's anodal still, and the terminal of temperature sensor of another grip block is electric connection power source's negative pole still, vertical board 25 is equipped with on grip block upper portion, diaphragm 26 is equipped with at the top of vertical board, movable chamber 27 is equipped with in the diaphragm, two diaphragms relative arrangement on a pair of grip block. The mobile power supply is arranged in the clamping plate.
The heat conduction plate is connected with a heat conduction copper pipe 28, the heat conduction copper pipe passes through the vertical plate and extends to the movable cavity of the transverse plate, a fixed ring 23 is further arranged in the movable plate cavity, a coil 29 which is made of memory metal and is tightly sleeved on the heat conduction copper pipe is connected to the fixed ring, the tail end of the coil is connected with an outer sleeve 30, an inner sleeve ring 31 which is made of copper is arranged in the outer sleeve, the tail end of the heat conduction copper pipe is connected with an electric conduction ring 33 through an electric conduction plate 32, the electric conduction ring is tightly contacted with the inner sleeve ring, a first magnet ring 35 is arranged on the inner side of the outer sleeve ring, a second magnet ring 36 is arranged on the outer side wall of the inner sleeve ring, contact surface magnetic poles of the first magnet ring and the second magnet ring are mutually adsorbed in opposite, the coil stretches when being heated to reach the deformation temperature, and then the inner sleeve rings on two sides of the pair of clamping plates are mutually abutted to enable power circuits on two sides of the temperature sensor to be conducted, and the temperature sensor starts working. The outer surface of the transverse plate is coated with a radiation protection layer. The heating device of this embodiment includes an electric heating wire. The inner surface of the clamping plate in this embodiment has a curved surface adapted to the target. The temperature sensor in this embodiment is electrically connected to an external control unit, and is configured to transmit data to the control unit.
When the embodiment is implemented, the temperature of the heating component is transmitted to the gas tank, so that the gas in the gas tank enters the movable gas tank to push the piston to move and drive the fixing rod to move, and the clamping plate clamps the target; the temperature of the target material is transferred to the temperature sensor and the heat conducting copper pipe, the heat conducting copper pipe transfers the temperature to the spiral ring, the spiral ring stretches when being heated to reach the deformation temperature, and then the inner lantern rings at the two sides of the pair of clamping plates are mutually abutted, so that a closed circuit is formed by the power supply, the temperature sensor, the heat conducting copper pipe, the inner lantern rings, the conducting strip and the conducting ring in the pair of clamping plates, the temperature sensors at the two sides start to work, and meanwhile, different positions of the target material are measured, and the detection precision is improved; the automatic clamping and automatic detection after the temperature is reached are realized, the detection is not required to be additionally controlled, and the accuracy of detecting the temperature of an object in vacuum is improved; after the clamping plate clamps the materials, the push rod drives the inserting plate to be inserted into the slot, and pushes the movable air cylinder (the movable air cylinder moves in the mounting cavity) and the clamping plate to move together, so that the heated raw materials are clamped and pushed to the extrusion die.
Example 3
As shown in fig. 7 and 8, the difference between the present embodiment 3 and embodiment 2 is that the piston is provided with a first heat transfer air pipe 37 communicating with the inside of the moving air cylinder, and the first heat transfer air pipe passes through the fixed rod and the movable arm to abut against the clamping plate.
The end of the heat transfer air pipe is provided with a constant pressure valve 38 which is connected with a second heat transfer air pipe 40, and the second heat transfer air pipe penetrates through the clamping plate and into the heat transfer copper pipe until the end of the second heat transfer air pipe. In this embodiment, a commercially available constant pressure valve may be used.
When the embodiment is implemented, along with the temperature of the heating component transferred to the gas tank, the gas in the gas tank enters the movable gas tank to push the piston to move, so that the clamping plate clamps the target, and further when the pressure of the gas in the gas tank further rises, the pressure of the constant pressure valve is broken, so that the hot gas in the first heat transfer pipe enters the second heat transfer pipe, the heat transfer copper pipe is quickly heated, and the spiral ring is further heated; heat transfer can be accelerated.
The foregoing description is only of the preferred embodiments of the present invention, and is not intended to limit the scope of the invention, but rather is intended to cover all equivalent structures as modifications within the scope of the invention, either directly or indirectly, as may be contemplated by the present invention.

Claims (3)

1. The vacuum hot extrusion forming device for the rare earth terbium target is characterized by comprising the following components:
a tank body; the top of the tank body is provided with a vacuum port, and the vacuum port is used for being externally connected with a vacuum device so as to keep negative pressure in the tank body;
an extrusion cylinder; the extrusion oil cylinder is arranged at the top of the tank body;
a demolding cylinder; the demolding cylinder is arranged at the bottom of the tank body; the outer side of the demolding cylinder is provided with a supporting platform, a heating assembly is arranged in the supporting platform, and an extrusion die is arranged in the supporting platform above the demolding cylinder;
a moving cylinder; the movable cylinder is arranged outside the tank body and is provided with a push rod for pushing the rare earth terbium target to move; the top of the tank body is provided with a material feeding port; the bottom of the heating assembly is provided with a gas tank, the gas tank is externally connected with a flexible gas pipe, the top of a supporting platform positioned at two sides of the heating assembly is inwards recessed to form a mounting cavity, the mounting cavity is provided with a movable gas cylinder, the tail end of the flexible gas pipe is communicated with the movable gas cylinder, the bottom wall of the movable gas cylinder is provided with a first spring, the tail end of the first spring is provided with a piston, one side of the piston, which is far away from the bottom wall of the movable gas cylinder, is provided with a fixed rod, the fixed rod penetrates out of the movable gas cylinder and is connected with a bent movable arm, the top of the movable arm extends out of the mounting cavity to be connected with a clamping plate, a second spring is arranged in the mounting cavity, one end of the second spring is connected with the inner wall of the mounting cavity, and the other end of the second spring is connected with the outer side wall of the movable gas cylinder to be used for pushing the movable gas cylinder to move in a direction perpendicular to the moving direction of a push rod of the movable cylinder; the push rod is externally connected with a pair of plugboards, and a slot which is convenient for the plugboards to be inserted is arranged in the clamping plate; a temperature sensor is arranged in the clamping plate, and copper heat conducting sheets are arranged outside the temperature sensor in parallel; the binding post of the temperature sensor is electrically connected with a heat conducting sheet through a wire, the binding post of the temperature sensor of one clamping plate is also electrically connected with the positive electrode of the mobile power supply, the binding post of the temperature sensor of the other clamping plate is also electrically connected with the negative electrode of the power supply, the upper part of the clamping plate is provided with a vertical plate, the top of the vertical plate is provided with a transverse plate, a movable cavity is arranged in the transverse plate, and the two transverse plates on the pair of clamping plates are oppositely arranged; the heat conducting strip is connected with a heat conducting copper pipe, the heat conducting copper pipe passes through the vertical plate and extends to the movable cavity of diaphragm, the movable cavity is equipped with the solid fixed ring still, be connected with memory metal on the solid fixed ring and hug closely the helicoid of overcoat at the heat conducting copper pipe, helicoid end-to-end connection has the outer lantern ring, be equipped with the interior lantern ring of copper in the overcoat ring, the end of heat conducting copper pipe is connected with the conducting ring through the conducting strip, the conducting ring hugs closely the contact inner lantern ring, the inboard of overcoat ring is equipped with first magnet ring, the lateral wall of inner lantern ring is equipped with the second magnet ring, the contact surface magnetic pole between first magnet ring and second magnet ring is mutually adsorbed in contrast, the helicoid stretches up when being heated up deformation temperature, and then makes the mutual conflict of lantern ring of a pair of grip block both sides and then makes temperature sensor's both sides power supply circuit switch on, makes temperature sensor begin to work.
2. The vacuum hot extrusion molding device of the rare earth terbium target according to claim 1, wherein a first heat transfer air pipe communicated with the inside of the movable air cylinder is arranged on the piston, and the first heat transfer air pipe passes through the fixed rod and the movable arm and further abuts against the clamping plate.
3. The vacuum hot extrusion molding device of the rare earth terbium target material according to claim 2, wherein the end of the heat transfer air pipe is provided with a constant pressure valve, the constant pressure valve is connected with a second heat transfer air pipe, and the second heat transfer air pipe penetrates through the clamping plate and penetrates into the heat transfer copper pipe until the end of the second heat transfer air pipe.
CN202110924003.4A 2021-08-12 2021-08-12 Vacuum hot extrusion forming device for rare earth terbium target Active CN113732219B (en)

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