CN113720847A - Image reproduction apparatus and detection method thereof - Google Patents
Image reproduction apparatus and detection method thereof Download PDFInfo
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- CN113720847A CN113720847A CN202110205376.6A CN202110205376A CN113720847A CN 113720847 A CN113720847 A CN 113720847A CN 202110205376 A CN202110205376 A CN 202110205376A CN 113720847 A CN113720847 A CN 113720847A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8861—Determining coordinates of flaws
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8877—Proximity analysis, local statistics
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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Abstract
The application discloses image reproduction device for cooperate and examine equipment implementation again, image reproduction device contains: the device comprises a shell, a reproduction module and a transmission module. The reproduction module is accommodated in the shell and reproduces the flaw position image of the object to be detected from the reproduction detection equipment. The transmission module is coupled to the reproduction module and transmits the flaw position image generated by the image reproduction device to the image detection device so as to generate an image re-detection result.
Description
Technical Field
The present application relates to an image reproduction apparatus and a detection method thereof, and more particularly, to an image reproduction apparatus of a symbiotic review system and a detection method thereof.
Background
Automatic Optical Inspection (AOI) uses machine vision as a standard detection technology, replaces traditional human eye identification by machine vision to achieve high-precision and high-efficiency detection, and is used for improving the defects of detection by using an Optical instrument by manpower in the prior art.
Generally, machine vision inspection can greatly increase the detection efficiency compared with human eye detection, but machine vision still often causes false detection or false judgment. For example, hair, dust, etc. on the surface of the panel are often misjudged as scratches or noise on the panel because of their close physical proximity to imperfections in the panel. Based on the above reasons, in order to reduce the probability of false detection and false judgment and improve the yield and productivity of the product, the detected defect of the object to be tested is usually re-detected through human eyes, and the defect of the object to be tested is confirmed again through the human eyes, so as to reduce the possibility of false slaughter (overkill).
However, when manual review is performed, not only a lot of manpower is consumed, which increases the production cost, but also the production efficiency cannot be improved. In addition, if the traditional reinspection equipment is directly eliminated, purchasing new full-automatic reinspection equipment is also a large cost expenditure for manufacturers.
Disclosure of Invention
In view of this, the present disclosure provides an image reproduction apparatus and a detection method thereof, which are used to implement an automatic review program in cooperation with a review device.
The embodiment of the application provides an image reproduction device, which is used for being implemented in cooperation with reinspection equipment, and comprises: the device comprises a shell, a reproduction module and a transmission module. The reproduction module is accommodated in the shell and reproduces the flaw position image of the object to be detected from the reproduction detection equipment. The transmission module is coupled to the reproduction module and transmits the flaw position image generated by the image reproduction device to the image detection device so as to generate an image re-inspection result.
Another embodiment of the present invention provides a review system including the image reproduction apparatus, which includes an automatic operation apparatus and the image reproduction apparatus. The automatic operation device outputs an operation instruction, so that the rechecking camera of the rechecking equipment moves to the position above the flaw position of the object to be detected, and the image of the flaw position is shot. The image reproduction device is used for reproducing the flaw position image from the reinspection equipment and transmitting the flaw position image to the image detection device, thereby generating an image reinspection result.
Another embodiment of the present application provides a method for detecting image reproduction, including the following steps: providing a rechecking device for receiving the detection result of the object to be detected generated by the automatic optical detection device; the rechecking equipment generates a flaw position image according to the detection result of the object to be detected; reproducing and transmitting the flaw position image to an external image detection device on the rechecking equipment; and on the external image detection device, image-detecting the reproduced flaw position image on the self-review equipment to generate an image review result.
The application can improve the defect that the traditional program needs to execute the reinspection in a large amount of manual work, especially can solve the problems that the detection software capability is insufficient or the manpower load generated during the process change is too heavy when the process is overhauled and misjudged in a large amount, can improve the detection efficiency and the accuracy of the reinspection equipment, and can greatly reduce the workload of personnel.
This application can be applicable to each type and examine equipment again, increases the expandability and the practicality of product, and through plus software and hardware or procedure, the work that consumes the manpower most in the effectual tradition reinspection is automatic, reaches the purpose that reduces the manpower by a wide margin.
The image reproduction device is suitable for various rechecking equipment, and the installation mode of the image reproduction device is simple and is suitable for various detection sites. The image reproduction device can provide the flaw position image for the image detection device to carry out image detection so as to automatically generate an image recheck result, thereby not only improving the detection efficiency, but also reducing the occurrence probability of misjudgment of personnel.
Drawings
Fig. 1 is a block diagram illustrating an application of an image reproducing apparatus to a review device according to the present application.
Fig. 2 is a block diagram of another image reproducing apparatus applied to a review device according to the present application.
FIG. 3 is a block diagram of an image reproducing apparatus according to the present application.
Fig. 4 is a schematic diagram illustrating a usage state of an image reproducing apparatus according to some embodiments of the present disclosure.
Fig. 5 is a schematic diagram illustrating a use state of an image reproducing apparatus according to another embodiment of the present application.
FIG. 6 is a block diagram of an image reproducing apparatus according to another embodiment of the present application.
FIG. 7 is a block diagram of another embodiment of an image reproduction apparatus according to the present application.
Fig. 8 is an external view of the image reproducing apparatus applied to the review device according to the present application.
Fig. 9 is a perspective schematic view of an image reproducing apparatus according to the present application.
Fig. 10 is a block diagram of an image detection apparatus according to the present application.
Fig. 11 is a flowchart illustrating a method for detecting image duplication according to the present application.
Detailed Description
The detailed description and technical contents of the present application will be described below with reference to the accompanying drawings. In addition, for convenience of explanation, the drawings in the present application are not necessarily drawn to scale, and the drawings and the scale of the drawings are not intended to limit the scope of the present application, and are described in the foregoing.
Referring to fig. 1 and 2, a block diagram of an image reproducing apparatus applied to a review device in the present application is shown.
In some embodiments, the present application includes an automated optical inspection device 10, a review device 20, and a symbiotic review system 30 disposed in cooperation with the review device 20.
The automatic optical inspection apparatus 10 is used for inspecting the defect of the object H and recording the defect coordinates and defect types of the object H. The automatic Optical Inspection apparatus 10 may be any existing automatic Optical Inspection Apparatus (AOI) for performing image analysis on the object H to be inspected and evaluating the defect type by machine vision. The image analysis method may be a general image processing method (e.g., gaussian, fourier, binarization, image subtraction, and morphological analysis) to obtain the type and location of the defect, or a neural network may be used to identify and locate the type of the defect through machine learning, deep learning, etc., which is not limited in the present application.
It is noted that in some embodiments, the automatic optical inspection apparatus 10 can be applied to defect detection in semiconductor processes, semiconductor package testing, circuit board processes, other electronic component processes, or other related industries, and is not limited in this application; the object to be tested H may be an electronic component such as a semiconductor device, a printed circuit board, a panel, etc., and is not limited in this application.
The rechecking device 20 is disposed at the rear end of the automatic optical inspection device 10 and is configured to receive the object to be inspected H classified as a defective product, which is output by the automatic optical inspection device 10. The rechecking device 20 rechecks the defect according to the type and position of the defect to further determine whether the defect has a misjudgment condition, so as to reduce the misjudgment (overdill) condition by a rechecking mode and further improve the yield.
The review apparatus 20 includes a transfer device 21, a review platform 22, a review camera 23, a manual operation device 24, and a review display device 25.
The inspection platform 22 is used for carrying the object H to be inspected, and the transferring device 21 is used for transferring the object H to be inspected, which is inspected by the automatic optical inspection apparatus 10, to the inspection platform 22, so as to perform the re-determination on the object H to be inspected through the inspection platform 22. In some embodiments, in the configuration of the station position, when there is a distance between the review apparatus 20 and the automatic optical inspection apparatus 10, a conveying platform (e.g., a conveyor belt, a linear stage, etc.) may be further disposed between the automatic optical inspection apparatus 10 and the review apparatus 20, and the object H to be tested is moved from the automatic optical inspection apparatus 10 to the review apparatus 20 through the conveying platform; in other embodiments, when the distance between the automatic optical inspection apparatus 10 and the review apparatus 20 is relatively close, the transferring device 21 of the review apparatus 20 may perform the work of transferring the object H to be inspected; in still other embodiments, the transfer device 21 is not required to be provided, and the object to be measured H may be directly placed on the detection platform 22 by a manual loading manner, which is not limited in this application.
The review camera 23 is used for shooting the object H on the detection platform 22. The review camera 23 includes a camera body 231, and a review camera moving stage 232 on which the camera body 231 is disposed and connected to the manual operation device 24.
In some embodiments, the Camera body 231 may be a Line Scan Camera (Line Scan Camera) or an Area Scan Camera (Area Scan Camera), which is not limited in this application. In some embodiments, the camera body 231 may further include an optical device, and the optical device magnifies the defect image of the object H to obtain a magnified enhanced defect image that is clearer after the magnification. In other embodiments, the camera body 231 may also adjust the focal length directly through its own lens, so as to achieve the function of magnifying the defect image, which is not limited in this application. In still other embodiments, the defect image may be enhanced by a light source, so as to enhance the defect feature in the defect image, which is not limited in the present application.
The rechecking camera moving stage 232 is used for moving the camera body 231 to a corresponding position according to a control command input by the manual operation device 24, so as to shoot the flaws of the object H to be detected. The review camera moving stage 232 may be an XY stage (or an XYZ stage) in some embodiments, and moves the object H in the X direction or the Y direction through a corresponding control command. It is not excluded that a multi-axis robot or other similar device may be used to move the review camera 23 to the corresponding position, other than the XY stage, and is not limited in this application.
The manual operation device 24 is connected to the review camera 23, and controls the operation of the review camera 23. The manual operating device 24 may be, for example, a keyboard, a button, or other similar human-machine interface, and the manual operating device 24 includes an electric control device that outputs a control signal to the review camera moving stage 232 according to an input command to operate the camera body 231 to move to the defect position. In some embodiments, the manual operating device 24 includes at least one control key 241. The at least one control key 241 may be implemented as a physical key or a virtual key. At least one control button 241 is connected to the review camera 23 for controlling the operation of the review camera 23. In detail, the electric control device of the manual operating device 24 can output a control signal to the rechecking camera moving stage 232 in response to the pressing of the at least one control button 241, so as to operate the camera body 231 to move to the defect position. The number of the at least one control key 241 is not limited, and may be configured according to actual requirements.
The review display device 25 is used for displaying the flaw position image shot by the review camera 23 for visual inspection. Specifically, the review Display device 25 may be a Display device for displaying image information, such as a Liquid Crystal Display (LCD), an Organic Light Emitting Diode Display (OLED Display), an electrophoretic Display (EPD), or a Plasma Display Panel (PDP), and is not limited in the present application.
The symbiotic review system 30 is disposed in cooperation with the review device 20 for performing a full-automatic image detection function, and includes an automatic operation device 31, an image reproduction device 32, and an image detection device 33.
The automatic operation device 31 is connected or coupled to the host system of the automatic optical inspection apparatus 10 or the review apparatus 20 to obtain the defect position information of the object H, and outputs an operation command to the review apparatus 20, so that the review camera 23 of the review apparatus 20 moves to above the defect position of the object H, and captures a defect position image. When the review camera 23 moves to the defect position of the object H, the review camera 23 will automatically capture images of the object H, and the captured images will be transferred to the review display device 25 of the review device 20 for display.
The image reproducing device 32 is provided on the review display device 25 on the review apparatus 20, the review device 20, and reproduces the flaw position image. In some embodiments, the image reproduction device 32 may be connected to the review camera 23 by way of a signal connection to reproduce the captured flaw location image; in other embodiments, the image reproduction apparatus 32 may capture the image reproduction defect position image of the display through the receiving end of the review device 20; in still other embodiments, the image reproduction device 32 may capture the review display device 25 or other display devices with defect position images by the image capture unit to reproduce the defect position images, which is not limited in the present application.
It is noted that in other embodiments, the defect location image may not be reproduced by the image reproduction apparatus 32, and the defect location image may be directly reproduced by the review device 20.
Specifically, fig. 3 is a block diagram of an image reproducing apparatus according to the present application. Please refer to fig. 3. In some embodiments, the image reproduction device 32 includes a housing 321, a reproduction module 322, and a transfer module 323. The reproduction module 322 is accommodated in the housing 321, and reproduces the defect position image of the object H from the review display device 25 of the review apparatus 20. The internal components are covered by the housing 321, which facilitates the person holding the image reproduction device 32 to set or mount the image reproduction device 32 in place. As mentioned above, the reproduction module 322 can reproduce the defect position image of the object H by a specific signal connection manner or by a photographing display device manner.
The transmission module 323 is coupled to the reproduction module 322, and transmits the defect location image reproduced by the reproduction module 322 to the image detection device 33, so as to generate an image review result. The transmission module 323 may include a wired/wireless transmission unit for transmitting the defect location image to the image detection device 33. In detail, the transmission module 323 can transmit the defect position image to the image detection device 33 by a wired or wireless transmission technology. However, the transmission technology used by the transmission module 323 is not limited in this application. For example, the transmission module 323 may transmit the flaw location image using bluetooth transmission, USB transmission, HDMI transmission, ZigBee transmission, ethernet transmission, or other suitable transmission techniques.
Referring to fig. 4, a schematic diagram of a use state of the image reproduction apparatus 32 according to some embodiments of the present application is shown in fig. 4:
in some embodiments, the reproduction module 322 includes an image capturing unit 322A for capturing an image of the defect location or a portion of the defect location displayed on the review display device 25 toward the review display device 25. In some embodiments, the image capturing unit 322A may be directly aligned to the review display device 25 during the pre-calibration to capture the defect position image, which is not limited in this application. The image reproducing apparatus 32 including the image capturing unit 322A is, for example, a web camera or other image capturing devices, and the like, which is not limited in the present application. In some embodiments, the housing 321 may enclose the image capturing unit 322A, so that the image capturing unit is convenient for people to hold and install, which is not limited in this application.
In other embodiments, please refer to fig. 5, which is a schematic diagram illustrating a usage status of an image reproducing apparatus according to another embodiment of the present application.
The image reproduction device 32 may be signally coupled to the review display device 25 to reproduce the defect location image presented by the review display device 25. Specifically, the image reproduction device 32 may be connected to the review display device 25 of the review apparatus 20 through a signal, and a flaw image is captured to reproduce a flaw position image captured by the review camera 23 from the image input to the review display device 25. The connection method mentioned herein includes, but is not limited to, tapping the signal directly from the connector input to the review display device 25 through the video splitter, or directly connecting to the main board of the review display device 25 to reproduce the signal, etc., which is not limited in this application.
It should be noted that the image reproduction device 32 may capture the display frame input to the review display device 25 according to a predetermined range, for example, directly determine the capture range according to a predetermined pixel coordinate, the image reproduction device 32 may also obtain candidate images of which the display frame may be a defect image through a significant boundary in the image, select a defect position image through image recognition from the candidate images, and record the pixel coordinate for continuous tracking.
An example of the image reproduction device 32 connected to acquire a defective image by a signal is described below.
Please refer to fig. 6, which is a block diagram illustrating an image reproducing apparatus according to another embodiment of the present application. In other embodiments, the reproduction module 322 of the image reproduction device 32 includes a split screen unit 322B. The review device 20 also includes an image output interface 26 for outputting an image of the flaw location. The split screen unit 322B receives and reproduces the flaw position image captured by the review camera 23 from the image output interface 26. In detail, the split screen unit 322B has a signal input interface and a plurality of signal output interfaces. The signal input interface of the split screen unit 322B is connected to the image output interface 26 of the review device 20, and receives and reproduces the flaw position image captured by the review camera 23. One signal output interface of the split screen unit 322B is coupled to the review display device 25, and the other signal output interface of the split screen unit 322B is coupled to the image detection device 33 through the transmission module 323. In other words, the screen splitting unit 322B splits the image of the defect location output by the image output interface 26 into two paths, one path leading to the review display device 25 and the other path leading to the image detection device 33. For example, the screen splitting unit 322B is, for example, a one-in-one-out screen splitter (also referred to as a video switcher). By means of signal tapping, the split screen unit 322B can provide the defect position image to the review display device 25 and the image detection device 33 at the same time. In other embodiments, the housing 321 encloses the split screen unit 322B to facilitate the holding and installation of personnel, which should not be limited in this application.
Please refer to fig. 7, which is a block diagram illustrating an image reproducing apparatus according to still another embodiment of the present application. In still other embodiments, the reproduction module 322 of the image reproduction apparatus 32 includes a split screen unit 322C _1, a reproduction display unit 322C _2, and an image capture unit 322C _ 3.
The signal input interface of the split screen unit 322C _1 is coupled to the image output interface 26, and receives and reproduces the defect position image captured by the review camera 23. One signal output interface of the split screen unit 322C _1 is coupled to the review display device 25, and the other signal output interface of the split screen unit 322C _1 is coupled to the reproduction display unit 322C _ 2. In other words, the screen splitting unit 322C _1 splits the defect location image output by the image output interface 26 into two signals, one of which is directed to the review display device 25, and the other of which is directed to the reproduction display unit 322C _ 2.
The reproduction display unit 322C _2 is connected to the split screen unit 322C _1 for receiving and displaying the defect location image. In detail, the reproduction display unit 322C _2 receives the defect location image from the split screen unit 322C _1 and displays the defect location image. Specifically, the reproduction Display unit 322C _2 may be a Display device for displaying image information, such as a Liquid Crystal Display (LCD), an Organic Light Emitting Diode Display (OLED Display), an electrophoretic Display (EPD), or a Plasma Display (PDP), which is not limited in the present application.
The image capturing unit 322C _3 may include an image sensor and a lens. The image sensor may be configured with a Charge Coupled Device (CCD), a Complementary Metal-Oxide Semiconductor (CMOS) Device or other types of photosensitive devices for generating images, which is not limited in the present application. The image capturing unit 322C _3 captures an image toward the reproduction display unit 322C _2 to obtain a defect position image or a portion of the defect position image.
The image capturing unit 322C _3 can be directly aligned to a specific capturing position on the reproduction display unit 322C _2 during the pre-calibration to obtain the whole defect position image or a part of the defect position image. The image capturing unit 322C _3 can send the entire defect position image or a part of the defect position image to the image detecting device 33 for further detection to generate the image review result. In still other embodiments, the casing 321 covers the split screen unit 322C _1, the reproduction display unit 322C _2, and the image capturing unit 322C _3, so that the personnel can conveniently hold and install the device, which is not limited in the present application.
Please refer to fig. 8, which is an appearance diagram of the image reproducing apparatus applied to the review device in the present application. In some embodiments, the image reproduction device 32, which is in the shape of a box, is adapted to be placed on a stage beside the review apparatus 20. In some embodiments, the image reproduction device 32 may receive and simultaneously reproduce the defect location image displayed by the review display device 25 via the image output interface 26 of the review apparatus 20. However, the actual placement position of the image reproduction device 32 is not limited in the present application, and the flexible configuration may be performed depending on the actual application site. In other embodiments, when the space around the review apparatus 20 is not enough, the image reproduction device 32 may be placed at a position away from the review apparatus 20, and the image reproduction device 32 and the review display device 25 are connected by a signal transmission physical line with a sufficient length.
Please refer to fig. 9, which is a perspective view of an image reproducing apparatus according to the present application. In some embodiments, the housing 321 includes an upper cover 321_1 and a bottom plate 321_ 2. The upper housing 321_1 and the bottom plate 321_2 form an accommodation space for accommodating some or all components of the image reproduction apparatus 32.
It should be noted that, since the image reproduction device 32 is formed by the casing 321 covering the internal components, the heat generated by the internal components is accumulated in the casing 321, and the temperature rises. For example, the continuous operation of the reproduction display unit 322C _2 and the image capturing unit 322C _3 generates heat energy accumulated in the housing 321. When the temperature inside the housing 321 is too high, the internal components will not operate properly. Therefore, in some embodiments, the image reproduction apparatus 32 further includes a heat dissipation module 324. The heat dissipation module 324 is disposed on the housing 321 for transferring heat energy accumulated in the housing 321 to the outside of the housing 321. In some embodiments, the heat dissipation module 324 may be one of a heat dissipation fin unit, a fan unit, a water cooling unit, a heat dissipation hole unit, or a combination thereof, which is not limited in the present application. In some embodiments, the heat dissipation module 324 is implemented as a fan unit.
In some embodiments, the reproduction display unit 322C _2, the image capturing unit 322C _3, and the heat dissipation module 324 are all fixedly disposed on the bottom plate 321_ 2. The reproduction display unit 322C _2 receives and displays the defect position image from the screen splitting unit 322C _1, and the image capturing unit 322C _3 captures an image of the display surface of the reproduction display unit 322C _2 to obtain the defect position image or a part of the defect position image.
In some embodiments, the side of the upper cover 321_1 of the housing 321 has at least one fan vent 83 and at least one convection vent 84, and the heat dissipation module 324 implemented as a fan unit may be disposed beside the at least one fan vent 83. The at least one fan ventilating hole 83 and the at least one convection ventilating hole 84 connect the external space with the internal space of the case 321, and generate a ventilation air flow by the operation of the fan unit, so that the heat energy accumulated in the case 321 can be effectively removed. However, the number and the position of the vent holes are not limited in the present application, and may be configured according to actual requirements.
It should be noted that, in some embodiments, the image capturing unit 322C _3 captures the reproduced display unit 322C _2 in the inner space of the casing 321, and the casing 321 can shield the external ambient light source, so that the influence of the external ambient light source on the captured result can be reduced, which is more favorable for improving the accuracy of the image detection. In addition, through calibration in advance, the image capturing unit 322C _3 can capture the complete display frame or the partial display frame of the reproduction display unit 322C _2 to obtain the defect position image or a part of the defect position image, thereby providing an elastic image reproduction detection method.
The above-mentioned methods are only some embodiments of the image reproducing device 32 for acquiring the defect image, and in addition to the above-mentioned methods, the defect image may be captured by any station connected or coupled between the review camera 23 and the review display device 25, which is not limited in the present application.
Fig. 10 is a block diagram of an image detection apparatus according to the present application. In some embodiments, the image detection device 33 is externally coupled to the image reproduction device 32, and generates the image review result according to the defect position image. Specifically, the image detection apparatus 33 may be a computer host, and includes a processor 331 and a storage unit 332 connected to the processor 331. In other embodiments, the processor 331 and the storage unit 332 may together form a computer or processor, such as a personal computer, a workstation, a mainframe computer, or other types of computers or processors, and are not limited in this respect.
In some embodiments, the processor 331 is coupled to the storage unit 332. The Processor 331 is, for example, a Central Processing Unit (CPU), or other Programmable general purpose or special purpose Microprocessor (Microprocessor), Digital Signal Processor (DSP), Programmable controller, Application Specific Integrated Circuit (ASIC), Programmable Logic Device (PLD), or other similar devices or combinations thereof, and the types thereof are not limited herein.
In some embodiments, the image inspection apparatus 33 further includes a defect review module 33A for determining whether the object H is a defect according to the defect position image. In other embodiments, the image inspection apparatus 33 further includes a class review module 33B for classifying the defect type of the object H according to the defect position image. Specifically, the image detection device 33 may determine whether the defect position image is a defect or the type of the defect by a general image processing method (e.g., gaussian, fourier, binarization, image subtraction, and morphological analysis) or by machine learning, deep learning, and the like using a neural network, and the image processing method is not limited in the present application. In some embodiments, the defect review module 33A and the category review module 33B are stored in the storage unit 332 for the processor 331 to read and execute corresponding programs. In other embodiments, the defect review module 33A and the category review module 33B may be stored in an external storage device, so as to reduce the calculation burden of the image detection device 33 itself, which is not limited in the present application.
Finally, the image detection device 33 compares the defect type in the detection result of the automatic optical detection device 10 with the image analysis result generated by the image detection device 33 to output an image review result, so as to confirm the correctness of defect judgment through the image review result, thereby reducing the condition of false slaughter (overtur).
The following is a detailed description of the method for automatically detecting image duplication in the present application, and please refer to fig. 11, which is a schematic flow chart of the method for detecting image duplication in the present application.
In some embodiments, a method for detecting image reproduction is provided to be implemented in conjunction with a review apparatus, the method being performed according to the following steps to detect defects of an object under test by full automation control.
In step S01, a retest device is provided for receiving the detection result of the dut generated by the automatic optical detection device. In this step, the automatic optical inspection apparatus 10 first inspects the object H and generates an inspection result, and the re-inspection apparatus 20 then receives the inspection result of the object H from the automatic optical inspection apparatus 10.
In step S02, the review device generates a defect position image according to the detection result of the object. In this step, the rechecking device 20 first receives the flaw position information of the object H from the automatic optical inspection device 10, in some embodiments, the flaw position information is included in the inspection result generated by the automatic optical inspection device 10, and in other embodiments, the rechecking device 20 may obtain the flaw position information of the object H by other methods, which is not limited in this application. Then, the automatic operation device 31 outputs an operation command to the review device 20, so that the review camera 23 moves to the defect position of the object H according to the defect position information of the object H, and captures a defect position image. In some embodiments, the review camera 23 may be operated by the manual operator 24 of the review apparatus 20 to move over the defect location and take a defect location image. In some embodiments, the automatic operating device 31 automatically presses at least one control button 241 of the manual operating device 24 to move the review camera 23 to the defect position of the object H according to the defect position information.
In step S03, the defect location image is reproduced and transmitted to the external image inspection device on the review equipment. In this step, the image reproduction device 32 may tap a signal or directly photograph the review display device 25 of the review device 20 to reproduce the defect location image, or the image reproduction device 20 may directly reproduce the defect location image and transmit the reproduced defect location image to the image detection device 33. In some embodiments, the image capturing unit 322A may be used to capture images of the defect locations of the review display device 25 to reproduce the defect location images or a portion of the defect location images displayed on the review display device 25. Alternatively, in other embodiments, the defect location image may be reproduced using the split screen unit 322B in the image reproducing apparatus 32. Alternatively, in still other embodiments, the split screen unit 322C _1 of the image reproduction apparatus 32 may be used to transmit the defect position image to the reproduction display unit 322C _2 for display, and the image capture unit 322C _3 is used to capture the defect position image or a portion of the defect position image captured by the reproduction display unit 322C _ 2.
In step S04, on the external image detection device, the reproduced flaw position image on the self-review apparatus is image-detected to generate an image review result. In this step, the image detection process may be analyzed by the computer device and the image processing software, and the defect type of the object H to be detected is classified according to the defect position image to generate an image review result, or whether the object H to be detected is a defect is determined according to the defect position image to generate an image review result.
And step S05, carrying out manual visual inspection on the object to be detected according to the image rechecking result. In this step, after obtaining the image review result, the operator may perform manual visual inspection on the image of the defect position of the object H on the review display device 25 according to the image review result, and finally perform human review again.
In conclusion, the application can improve the defect that the traditional program needs to execute the reinspection by a large amount of manpower, and particularly can solve the problems of insufficient software detection capability or excessive manpower load generated in the process of process change during a large amount of overdetection and misjudgment.
In addition, this application can be applicable to each type and examine equipment again, increases the expansibility and the practicality of product, and through plus software and hardware or procedure, the work that consumes the manpower most in the effectual tradition reinspection is automatic, reaches the purpose that reduces the manpower by a wide margin. Moreover, the image reproduction device is suitable for various rechecking equipment, is simple in installation mode and is suitable for various detection sites. The image reproduction device can provide the flaw position image for the image detection device to carry out image detection so as to automatically generate an image recheck result, thereby not only improving the detection efficiency, but also reducing the occurrence probability of misjudgment of personnel.
The disclosure is only a preferred embodiment of the present application and is not intended to limit the scope of the claims of the present application, so that all technical equivalents and modifications made by the disclosure of the present application and the drawings are included in the scope of the claims of the present application.
Claims (11)
1. An image reproduction apparatus, for implementation in conjunction with a review device, the image reproduction apparatus comprising:
a housing;
the reproduction module is accommodated in the shell and reproduces the flaw position image of the object to be detected from the rechecking equipment; and
the transmission module is coupled to the reproduction module and transmits the flaw position image reproduced by the image reproduction module to an image detection device so as to generate an image re-inspection result.
2. The image reproduction apparatus of claim 1, wherein the reproduction module includes a first screen unit connected to the review device to reproduce the defect location image of the review device.
3. The image reproduction apparatus of claim 1, wherein the reproduction module comprises a first image capture unit, the first image capture unit being captured toward a review display of the review device to reproduce the defect location image, or a portion thereof.
4. The image reproduction apparatus according to claim 1, wherein the reproduction module includes:
the second screen splitting unit is connected to the rechecking equipment and is used for reproducing the flaw position image displayed by a rechecking display device of the rechecking equipment;
the reproduction display unit is connected to the second screen splitting unit and used for displaying the flaw position image; and
a second image capturing unit, which captures images toward the reproduction display unit to obtain the defect position image or a part of the defect position image.
5. The image reproduction apparatus according to claim 1, wherein the image inspection apparatus comprises a defect review module for determining whether the object has a defect according to the defect position image and a category review module for classifying a defect type of the object according to the defect position image to generate the image review result.
6. A review system including the image reproduction apparatus according to claim 1, comprising:
the automatic operation device outputs an operation instruction, so that a rechecking camera of the rechecking equipment moves to the position above the flaw position of the object to be detected, and the image of the flaw position is shot; and
the image reproduction device is used for reproducing the flaw position image from the rechecking equipment and transmitting the flaw position image to the image detection device so as to generate an image rechecking result.
7. A detection method for image reproduction is characterized by comprising the following steps:
providing a rechecking device for receiving the detection result of the object to be detected generated by the automatic optical detection device;
the rechecking equipment generates a flaw position image according to the detection result of the object to be detected;
reproducing and transmitting the flaw position image to an external image detection device on the rechecking equipment; and
on the external image detection device, image detection is carried out on the flaw position image reproduced on the rechecking equipment so as to generate an image rechecking result.
8. The method according to claim 7, wherein the step of generating the defect position image by the rechecking device according to the detection result of the object to be inspected comprises:
and outputting an operation instruction by using an automatic operation device, so that a rechecking camera of the rechecking equipment moves to the flaw position of the object to be detected according to the flaw position information, and shoots the flaw position image.
9. The method of claim 7, wherein the defect location image is reproduced on the review device by an image reproduction device, and the image is shot toward a review display device of the review device to reproduce the defect location image or a portion of the defect location image displayed on the review display device.
10. The method according to claim 7, wherein when the defect position image is reproduced on the review device, the defect position image displayed on the review display device is reproduced from the review device by an image reproduction device, and then the defect position image is displayed on a reproduction display unit and captured to reproduce the defect position image or a part of the defect position image.
11. The method of claim 7, wherein the re-inspection result is generated by determining whether the object has a defect and classifying a defect type of the object from the reconstructed defect position image.
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| TW109117539 | 2020-05-26 | ||
| TW109117539A TW202144765A (en) | 2020-05-26 | 2020-05-26 | Image recording device and inspect method thereof |
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