CN113687102B - Packaging method of electrochemical angular acceleration sensor - Google Patents

Packaging method of electrochemical angular acceleration sensor Download PDF

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Publication number
CN113687102B
CN113687102B CN202111058974.1A CN202111058974A CN113687102B CN 113687102 B CN113687102 B CN 113687102B CN 202111058974 A CN202111058974 A CN 202111058974A CN 113687102 B CN113687102 B CN 113687102B
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shell
sealing
flow channel
sensitive core
shells
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CN113687102A (en
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陈德勇
陈明惟
王军波
钟安详
段语默
刘博文
梁天
齐文杰
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Aerospace Information Research Institute of CAS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/006—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of fluid seismic masses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices

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  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

The invention discloses a packaging method of an electrochemical angular acceleration sensor, which comprises the following steps: respectively placing sealing gaskets on the flow passage sections at two ends of two shells, then placing a sensitive core between one ends of the two shells, and placing the other sensitive core between the other ends of the two shells, wherein the sensitive cores are positioned on the flow passage sections of the two shells to form a complete circular flow passage; sealing the two shells, the other two shells and the sealing washer in a mechanical mode to complete the sealing of the flow channel and the sensitive core; and injecting electrolyte into the flow channel, completely discharging bubbles in the flow channel, and sealing the liquid injection port to finish the packaging of the whole electrochemical angular accelerometer. The packaging method of the invention increases the sensitivity of angular motion, reduces the error of the device caused by external translation motion signals, and enhances the anti-interference performance; and the rubber ring is used for packaging the shell, so that the possibility of liquid leakage is reduced, and the performance of the device is kept stable for a long time.

Description

Packaging method of electrochemical angular acceleration sensor
Technical Field
The invention relates to the field of MEMS sensors, in particular to an assembling method of a low-frequency electrochemical angular acceleration sensor.
Background
The earthquake motion is divided into translation and rotation, and the measurement of the vibration condition has important significance for researching seismology, performing earthquake-resistant design of engineering structures and the like. The angular accelerometer for directly measuring the seismic rotation component can be divided into the following components according to the difference of inertia mass: angular accelerometers based on solid inertial mass (mechanical pendulum); a MEMS angular accelerometer; an angular accelerometer based on the inertial mass of a liquid. The angular accelerometer based on the solid inertial mass (mechanical pendulum) has poor shock resistance, large volume and heavy mass, and the lower limit of low-frequency measurement is high; the angular motion sensor based on the MEMS has low precision and poor temperature stability; the lower limit of low-frequency measurement of the molecular liquid ring type angular accelerometer based on the liquid inertial mass is higher at 0.1hz, and the sensitivity is low, so that the molecular liquid ring type angular accelerometer is not suitable for measuring the low-frequency seismic rotation component.
The angular accelerometer based on the electrochemical principle has obvious advantages in low-frequency seismic vibration signal measurement, high impact resistance, good low-frequency performance and low-frequency noise by using the liquid inertia mass. The electrochemical angular accelerometer mainly comprises a sensitive element, an organic glass shell, electrolyte and the like, wherein the sensitive element comprises four electrodes arranged according to an anode-cathode-anode arrangement and an insulating layer between the electrodes, the sensitive element is fixed in a flow channel filled with electrolyte solution, and the electrolyte solution contains KI and I2The aqueous solution of (a). When a voltage difference exists between the anode and the cathode, ions in the electrolyte solution respectively react at the anode and the cathode, and the charge transfer between the anode and the cathode is completed. When the electrolyte solution has mechanical motion, the ion distribution around the electrode is unbalanced, so that the current output of the two cathodes is unbalanced, and the electric signal proportional to the external input motion signal can be obtained by calculating the differential current output by the cathodes.
The sensitive core of the traditional electrochemical angular accelerometer is manufactured on a ceramic wafer by using a ceramic sintering method, and then the ceramic sensitive core is adhered to a polymer shell plate by using an epoxy resin adhesive and then is adhered to a sensor shell. The used epoxy resin can absorb a large amount of electrolyte during curing to influence the performance of the device, and the liquid glue has poor shock resistance after curing and is easy to break. Therefore, the invention uses the rubber ring and the screw to fasten the components, thereby avoiding the problems caused by the adhesive. The traditional ceramic sensitive core is expensive in cost and complex in manufacturing, so that the sensitive element is mainly manufactured by using an MEMS (micro electro mechanical System) process in the later stage, two structures of a plane electrode and a body electrode are generated, and the sensitivity of the angular accelerometer of the body electrode structure is far higher than that of the plane electrode structure.
Disclosure of Invention
In order to solve the above problems, the present invention provides a packaging method for an electrochemical angular acceleration sensor. The invention provides a packaging method for an electrochemical angular accelerometer with a body electrode as a sensitive core component, which does not use an epoxy resin bonding component and keeps the performance of the sensor effective for a long time.
The invention adopts the following technical scheme:
a method for packaging an electrochemical angular acceleration sensor, comprising the steps of:
step 1, placing the four sealing gaskets on the cross sections of the flow channels at the two ends of the first shell and the second shell respectively to obtain the first shell with the sealing gaskets at the two ends and the second shell with the sealing gaskets at the two ends.
Step 2, a sensitive core is placed between one end of the first shell and one end of the second shell, and the sensitive core is positioned on the flow passage section of the two shells; placing another sensitive core between the other end of the first shell and the other end of the second shell, wherein the sensitive core is positioned on the flow channel section of the two shells; thereby forming a complete annular flow passage. Wherein the sensitive core is sandwiched between a sealing gasket on the first housing and a sealing gasket on the second housing.
And 3, mechanically sealing the fourth shell, the second shell and the sealing washer, and mechanically sealing the third shell, the first shell and the sealing washer to complete the sealing of the flow channel and the sensitive core.
And 4, injecting electrolyte into the flow channel through the liquid injection port, completely discharging bubbles in the flow channel, and sealing the liquid injection port to finish the packaging of the whole electrochemical angular accelerometer.
Further, the first housing and the second housing have annular flow passages, respectively.
Further, the sensor comprises a first housing, a second housing, a third housing and a fourth housing, a sealing gasket and an electrode sensitive core.
Further, the sealing washer is a rubber ring; preferably, the rubber ring is made of silicone rubber or nitrile rubber.
Further, mechanically fixing a sensitive core between one end of the first housing and one end of the second housing; and the other sensitive core is mechanically fixed between the other end of the first shell and the other end of the second shell. The mechanical fixation is screw compression. For example, a sensitive core is screwed between one end of the first housing and one end of the second housing by means of a rubber ring; and the other sensitive core is pressed between the other end of the first shell and the other end of the second shell by a rubber ring through a screw.
Furthermore, the inner radius and the flow channel width of the circular flow channel can be set according to requirements.
Further, the two sensitive cores are symmetrically fixed in the flow channel.
Further, the shell is made of inert materials; preferably, the housing is made of plexiglass or polytetraflouroethylene.
Further, the electrolyte is a solution capable of undergoing a reversible redox reaction.
Further, the electrolyte is KI and I2Solution, or bromine-bromide solution.
The invention has the beneficial effects that:
(1) an encapsulation method for a bulk electrode electrochemical angular accelerometer is proposed that can provide an order of magnitude higher angular acceleration sensitivity than a planar electrode.
(2) By adopting the method of symmetrically placing the two sensitive cores in the flow channel, when an angular acceleration signal is input, the output signals generated by the two sensitive cores are added, so that not only can the sensitivity of angular motion be increased, but also the error generated by the device due to an external translation motion signal can be reduced, and the anti-interference performance is enhanced.
(3) The rubber ring is used for packaging the shell, so that the possibility of liquid leakage is reduced, and the performance of the device can be kept stable for a long time.
(4) The shell can be detached for reuse.
Drawings
FIG. 1 is a schematic diagram of a sensitive core part package of an electrochemical angular acceleration sensor;
FIG. 2 is a schematic diagram of a right half runner package of the electrochemical angular acceleration sensor;
fig. 3 is an overall structure of the electrochemical angular acceleration sensor.
In the figure, 001: a lower left organic glass housing; 002: a lower right organic glass shell; 003: a sensitive unit 1; 004: a rubber ring 1; 005: a rubber ring 2; 006: a flow channel; 007: a liquid injection port; 008: an upper right organic glass shell; 009: a rubber ring 3; 010: an upper left organic glass shell; 011: a sensitive unit 2.
Detailed Description
The invention is described in detail below with reference to the figures and the embodiments. The following examples are only for explaining the present invention, the scope of the present invention shall include the full contents of the claims, and the full contents of the claims of the present invention can be fully realized by those skilled in the art through the following examples.
Fig. 1 is a schematic diagram of a sensitive core part package, which mainly comprises two organic glass shells, namely a lower left shell (001) and a lower right shell (002), a sensitive unit 1(003), a sensitive unit 2(011), a rubber ring 1(004) and a rubber ring 2 (005). The lower left organic glass shell (001) is provided with an annular flow passage (006) and a plurality of screw holes. The rubber ring 1(004) and the rubber ring 2(005) are respectively arranged in two square hollows in the section of the annular flow channel of the lower left organic glass shell (001). The lower right organic glass shell (002) is provided with an annular flow channel (006), a plurality of screw holes and a liquid injection port (007). The rubber ring 1(004) and the rubber ring 2(005) are respectively arranged in two square hollows in the section of the annular flow channel of the lower right organic glass shell (002).
The rubber ring is made of rubber which is difficult to absorb electrolyte, such as silicon rubber or nitrile rubber, and has elasticity. The sensing unit 1(003) is pressed between the lower left organic glass shell (001) and the lower right organic glass shell (002) through a rubber ring 1(004) by screws, and the sensing unit 2(011) is pressed between the lower left organic glass shell (001) and the lower right organic glass shell (002) through a rubber ring 2(005) on the other side to form a complete circular flow channel (006). The sensing units 1(003) and 2(011) are fixed in the flow channel in a bilateral symmetry mode, and the cathode differential output currents of the two sensing units are added to serve as a total output current signal.
When angular acceleration (clockwise direction) is input to the sensor from the outside, as shown in a direction 1 of fig. 3, the electrolyte has angular acceleration (counterclockwise direction) in the same direction relative to the two sensitive units, and respectively outputs electric signals proportional to the external input angular motion signals, the signs of the two electric signals are the same, and the two electric signals are added to obtain double sensitivity. When the external input line acceleration (translation) to the sensor is input, as shown in the direction 2 of fig. 3, the electrolyte has the accelerations in opposite directions relative to the two sensitive units respectively, and respectively outputs electric signals proportional to external input translation motion signals, the signs of the two electric signals are opposite, and the two electric signals are added, so that error signals generated by the sensor due to the external translation motion signals can be eliminated. The left-right symmetrical arrangement mode of the sensitive units can reduce the influence of horizontal vibration on the angular acceleration sensor and improve the sensitivity of the angular acceleration sensor relative to the angular acceleration.
Fig. 2 is a schematic diagram of the right half channel encapsulation, and after the sensitive core part is encapsulated, the upper right plexiglass shell (008), the lower right plexiglass shell (002) and the rubber ring 3(009) are pressed and sealed by screws. As shown in fig. 3, the upper left plexiglass casing (010) and the lower left plexiglass casing (001) are operated in the same way to complete the sealing of the flow channel (006) and the sensitive core. And then, sucking the electrolyte by using an injector, injecting the electrolyte into the flow channel through an injection port (007), completely discharging bubbles in the flow channel, screwing a plastic screw to tightly seal the injection port, and completing the packaging of the whole electrochemical angular accelerometer, wherein the structure of the packaged whole is shown in fig. 3.
The invention has the alternative technical scheme that:
(1) the inner radius and the width of the circular ring runner can be set according to requirements;
(2) KI and I of electrolyte2The solution may be replaced by other solutions that can undergo reversible redox reactions, such as bromine-bromide solutions, and the like.
(3) The sensitive core can be fastened at any end of the flow passage, and the sensitive cores can be placed at both ends.
(4) The shell can be made of organic glass or made of inert materials such as polytetrafluoroethylene.
The invention has not been described in detail and is part of the common general knowledge of a person skilled in the art. The above-described embodiments are merely illustrative of the preferred embodiments of the present invention, and the preferred embodiments are not exhaustive and do not limit the invention to the precise embodiments described. Various modifications and improvements of the technical solution of the present invention may be made by those skilled in the art without departing from the spirit of the present invention, and the technical solution of the present invention is to be covered by the protection scope defined by the claims.

Claims (7)

1. A packaging method of an electrochemical angular acceleration sensor comprises a first shell, a second shell, a third shell and a fourth shell, a sealing gasket and a sensitive core, wherein the first shell and the second shell are respectively provided with an annular flow channel; the method is characterized by comprising the following steps:
step 1, respectively placing four sealing gaskets on the cross sections of flow channels at two ends of a first shell and a second shell to obtain the first shell with the sealing gaskets at two ends and the second shell with the sealing gaskets at two ends;
step 2, a sensitive core is placed between one end of the first shell and one end of the second shell, and the sensitive core is positioned on the flow passage section of the two shells; placing another sensitive core between the other end of the first shell and the other end of the second shell, wherein the sensitive core is positioned on the flow channel section of the two shells; thereby forming a complete circular flow passage; wherein the sensitive core is sandwiched between a sealing gasket on the first housing and a sealing gasket on the second housing;
step 3, sealing the fourth shell, the second shell and the sealing washer in a mechanical mode, and sealing the third shell, the first shell and the sealing washer in a mechanical mode to complete sealing of the flow channel and the sensitive core;
step 4, injecting electrolyte into the flow channel through the liquid injection port, completely discharging bubbles in the flow channel, and sealing the liquid injection port to finish the packaging of the whole electrochemical angular accelerometer;
wherein the two sensitive cores are symmetrically fixed in the flow channel.
2. The method of claim 1 wherein the sealing gasket is a rubber ring.
3. The method of claim 1, wherein a sensitive core is mechanically secured between one end of the first housing and one end of the second housing; and the other sensitive core is mechanically fixed between the other end of the first shell and the other end of the second shell.
4. The method of claim 3, wherein the mechanical fixation is screw compression.
5. The method of claim 1, wherein the housing is made of an inert material.
6. The method of claim 1, wherein the electrolyte is a solution capable of undergoing a reversible redox reaction.
7. The method according to claim 6, wherein the electrolytes are KI and I2Solution, or bromine-bromide solution.
CN202111058974.1A 2021-09-10 2021-09-10 Packaging method of electrochemical angular acceleration sensor Active CN113687102B (en)

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Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5435901A (en) * 1989-08-18 1995-07-25 Robert Bosch Gmbh Electrochemical measuring sensor
US7516660B2 (en) * 2004-05-21 2009-04-14 Met Tech, Inc. Convective accelerometer
CN103235337B (en) * 2013-05-21 2015-05-06 中国科学院电子学研究所 Electrochemical seismic detector based on mechanical seal and packaging method thereof
CN111474575B (en) * 2020-04-23 2022-10-18 中国科学院空天信息创新研究院 MEMS integrated planar electrode and electrochemical angular acceleration sensor comprising same
CN112666367B (en) * 2020-12-31 2022-10-11 中国科学院空天信息创新研究院 MEMS electrochemical angular acceleration sensor and method based on magnetofluid feedback

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