CN113686781A - Detection device for integrated circuit chip - Google Patents

Detection device for integrated circuit chip Download PDF

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Publication number
CN113686781A
CN113686781A CN202010424508.XA CN202010424508A CN113686781A CN 113686781 A CN113686781 A CN 113686781A CN 202010424508 A CN202010424508 A CN 202010424508A CN 113686781 A CN113686781 A CN 113686781A
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China
Prior art keywords
plate
plates
movable
fixed plate
fixed
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CN202010424508.XA
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Chinese (zh)
Inventor
张�成
姚燕杰
王丽
位贤龙
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Jiangsu A Kerr Bio Identification Technology Co Ltd
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Jiangsu A Kerr Bio Identification Technology Co Ltd
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Priority to CN202010424508.XA priority Critical patent/CN113686781A/en
Publication of CN113686781A publication Critical patent/CN113686781A/en
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G01N2021/0112—Apparatus in one mechanical, optical or electronic block

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention discloses a detection device for an integrated circuit chip, which comprises a bottom plate, a motor, a fixed plate and a movable plate, the motor is arranged at the outer side of the fixed plate or the movable plate, a sliding plate is arranged between the bottom plate and the movable plate, the output end of the motor is connected with a rotating shaft, one end of the rotating shaft is provided with a main gear, an auxiliary gear is arranged on the rotating shaft between the main gear and the motor, the opposite sides of the fixed plate and the movable plate are respectively provided with a rotating disc, the rotating disc is in transmission connection with the pinion through a clamping belt, the rotating disc is in transmission connection with the main gear through another clamping belt, the outer wall of the clamping belt is provided with an installation clamping groove, the movable plates are connected through a push plate, the outer side of the push plate is provided with an installation frame, the installation frame is provided with a first air cylinder, the mounting frame is further provided with a second air cylinder, and a push rod of the second air cylinder is connected with a CCD camera. The invention solves the problems that chips with different specifications cannot be detected and the chips cannot be accurately shot.

Description

Detection device for integrated circuit chip
Technical Field
The invention relates to a detection device for an integrated circuit chip, and belongs to the technical field of integrated circuit detection.
Background
An integrated circuit (integrated circuit) is a micro electronic device or component, and elements such as transistors, resistors, capacitors, inductors and the like required in a circuit and wiring are interconnected together by adopting a certain process, manufactured on a small piece or a plurality of small pieces of semiconductor wafers or medium substrates, and then packaged in a tube shell to form a micro structure with the required circuit function; all the components have been integrated in the structure, which makes the electronic components advance toward miniaturization, low power consumption, intelligence and high reliability, and the electronic components are represented by the letter "IC" in the circuit, the inventor of the integrated circuit is a jak-kiky-ratio (integrated circuit based on germanium (Ge)) and robert-noesi (integrated circuit based on silicon (Si)), most of the applications in the semiconductor industry today are silicon-based integrated circuits, the integrated circuit chip is a core component of the integrated circuit, and the integrated circuit chip is tested after the components are connected to the circuit board.
The existing detection device shoots a chip through a camera, the camera transmits a detection picture to a chip monitoring unit, the chip monitoring unit processes the picture to judge whether the chip is qualified or not, manpower and material resources can be effectively saved, but the detection device cannot detect the chips with different specifications when in use, the use efficiency is poor, the camera is inconvenient to use, and the chip cannot be shot accurately.
Disclosure of Invention
The invention aims to provide a detection device for an integrated circuit chip, which solves the problems that chips with different specifications cannot be detected and the chips cannot be accurately shot.
In order to solve the technical problems, the invention adopts the technical scheme that: a detection device for an integrated circuit chip comprises a bottom plate, a motor, a plurality of fixed plates and a plurality of movable plates, wherein the motor is installed on the upper surface of the bottom plate, the fixed plates are arranged on the upper surface of the bottom plate at intervals, the movable plates are respectively arranged opposite to the fixed plates, the motor is installed on the outer side of the fixed plates or the movable plates, a sliding plate is arranged between the bottom plate and the movable plates, and the lower surfaces of the movable plates are movably installed on the sliding plate, so that the movable plates can move in the direction close to or far away from the fixed plates;
a limiting shaft is connected between the fixed plate and the movable plate which are oppositely arranged, a convex tube facing the fixed plate is arranged on the surface of one side of the movable plate close to the fixed plate, a through hole for the limiting shaft to be embedded is formed in the center of the convex tube, one end of the limiting shaft is embedded in the fixed plate and is rotatably connected with the fixed plate, and the other end of the limiting shaft is embedded in the through hole in the convex tube and can slide in the through hole;
the output end of the motor is connected with a rotating shaft, one end of the rotating shaft, which is far away from the motor, is provided with a main gear, a pinion is arranged on the rotating shaft between the main gear and the motor, one sides of the fixed plate and the movable plate, which are respectively opposite to each other, are provided with a rotating disc, the rotating disc, which is positioned at one side of the fixed plate, is rotatably arranged on a limiting shaft, the rotating disc, which is positioned at one side of the movable plate, is rotatably sleeved outside the convex pipe, a plurality of rotating discs, which are positioned at the same side, are in transmission connection with the pinion through a clamping belt, a plurality of rotating discs, which are positioned at the other side, are in transmission connection with the main gear through another clamping belt, and the outer wall of the clamping belt is provided with a plurality of mounting clamping grooves for mounting the integrated chip;
a plurality of connect through a push pedal between the fly leaf, this push pedal is located the fly leaf and carries on the back in the fixed plate outside, the outside of push pedal is provided with a mounting bracket, installs a first cylinder on this mounting bracket, the output and the push pedal fixed connection of this first cylinder, still be provided with a second cylinder on the mounting bracket, the push rod of second cylinder spanes in the cassette tape top, and is connected with a CCD camera on the push rod of this second cylinder, and this CCD camera passes through the wire and installs the chip detecting element switch-on the mounting bracket.
The further improved scheme in the technical scheme is as follows:
1. in the above scheme, the number of the fixed plates, the movable plates and the sliding plates is two, and the fixed plates, the movable plates and the sliding plates are respectively and correspondingly arranged at two ends of the bottom plate.
2. In the scheme, each circumferential surface of the rotating disc is provided with the clamping teeth, the inner surface of the clamping belt is provided with the clamping grooves matched with the clamping teeth, and the clamping belt is in transmission connection with the rotating disc through the clamping grooves and the clamping teeth.
3. In the scheme, the rotating disc is respectively provided with a baffle plate back to one side of the fixed plate and one side of the movable plate, so that a limit groove for embedding the clamping belt is formed between the baffle plate and the rotating disc.
4. In the above scheme, the bottom plate is further provided with a support frame, the support frame is located between the main gear and the pinion, and the rotating shaft is in limit connection with the bottom plate through the support frame.
5. In the above scheme, each fixed plate is provided with a limiting plate on the outer side of the movable plate back, and one end of the limiting shaft penetrates through the fixed plate to be connected with the limiting plate.
6. In the above scheme, the thickness of the main gear is greater than that of the secondary gear.
7. In the scheme, the upper surface of the sliding plate is provided with a plurality of groups of moving sliding grooves, and the movable plate is connected with the sliding plate in a sliding mode through the moving sliding grooves.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
1. according to the detection device for the integrated circuit chip, the distance between the mounting clamping grooves can be changed through the arrangement of the movable plate, the convex pipe, the push plate, the clamping belt, the mounting clamping grooves, the main gear and the first air cylinder, so that the integrated chips with different specifications can be mounted in the device through adjusting the distance between the opposite mounting clamping grooves, the universality of the device is improved, the problem that the integrated chips with different specifications cannot be detected is effectively solved, and the detection efficiency is improved.
2. According to the detection device for the integrated circuit chip, the mounting frame, the second cylinder, the integrated chip monitoring unit, the CCD camera, the motor, the main gear, the pinion, the clamping belt and the mounting clamping groove are arranged, so that the CCD camera can carry out all-around scanning on the side face of the integrated chip at a position close enough, the scanning quality is improved, and the problem that the integrated chip cannot be accurately shot is effectively solved.
Drawings
FIG. 1 is a schematic structural diagram of a detection apparatus for an integrated circuit chip according to the present invention;
FIG. 2 is a schematic diagram of a transmission structure of the detecting device for an integrated circuit chip according to the present invention;
FIG. 3 is a schematic diagram of the internal structure of a movable plate of the detecting device for an integrated circuit chip according to the present invention;
FIG. 4 is a schematic diagram of a power mechanism of the detecting device for an integrated circuit chip according to the present invention;
FIG. 5 is a schematic view of a mounting frame of the inspection apparatus for IC chips according to the present invention.
In the above drawings: 1. a base plate; 2. a motor; 201. a rotating shaft; 202. a main gear; 203. a support frame; 204. a pinion gear; 3. a mounting frame; 301. a first cylinder; 302. a chip detection unit; 303. a second cylinder; 304. a CCD camera; 4. a movable plate; 401. a convex pipe; 402. pushing the plate; 5. a fixing plate; 501. a limiting shaft; 502. a limiting plate; 6. rotating the disc; 601. clamping teeth; 602. clamping a belt; 603. a baffle plate; 604. installing a clamping groove; 7. a slide plate; 701. a moving chute; 9. and (4) integrating the chip.
Detailed Description
In the description of this patent, it is noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; furthermore, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, as they may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The meaning of the above terms in this patent may be specifically understood by those of ordinary skill in the art.
Example 1: a detection device for an integrated circuit chip comprises a bottom plate 1, a motor 2 arranged on the upper surface of the bottom plate 1, a plurality of fixed plates 5 arranged on the upper surface of the bottom plate 1 at intervals, and a plurality of movable plates 4 arranged face to face with the fixed plates 5 respectively, wherein the motor 2 is arranged on the outer sides of the fixed plates 5 or the movable plates 4, a sliding plate 7 is arranged between the bottom plate 1 and the movable plates 4, and the lower surfaces of the movable plates 4 are movably arranged on the sliding plate 7, so that the movable plates 4 can move in the direction close to or far away from the fixed plates 5;
a limiting shaft 501 is connected between the fixed plate 5 and the movable plate 4 which are oppositely arranged, a convex tube 401 facing the fixed plate 5 is arranged on the surface of one side of the movable plate 4 close to the fixed plate 5, a through hole for embedding the limiting shaft 501 is formed in the center of the convex tube 401, one end of the limiting shaft 501 is embedded in the fixed plate 5 and is rotatably connected with the fixed plate 5, and the other end of the limiting shaft 501 is embedded in the through hole in the convex tube 401 and can slide in the through hole;
the output end of the motor 2 is connected with a rotating shaft 201, one end of the rotating shaft 201 far away from the motor 2 is provided with a main gear 202, a pinion 204 is arranged on the rotating shaft 201 between the main gear 202 and the motor 2, one side of each of the fixed plate 5 and the movable plate 4 is provided with a rotating disc 6, the rotating disc 6 at one side of the fixed plate 5 is rotatably arranged on a limiting shaft 501, the rotating disc 6 at one side of the movable plate 4 is rotatably sleeved outside the convex pipe 401, a plurality of rotating discs 6 at the same side are in transmission connection with the pinion 204 through a clamping belt 602, a plurality of rotating discs 6 at the other side are in transmission connection with the main gear 202 through another clamping belt 602, and the outer wall of the clamping belt 602 is provided with a plurality of mounting clamping grooves 604 for mounting the integrated chip 9;
a plurality of connect through a push pedal 402 between the fly leaf 4, this push pedal 402 is located fly leaf 4 and carries on the back in the fixed plate 5 outside, the outside of push pedal 402 is provided with an mounting bracket 3, installs a first cylinder 301 on this mounting bracket 3, and the output and the push pedal 402 fixed connection of this first cylinder 301, still be provided with a second cylinder 303 on the mounting bracket 3, the push rod of second cylinder 303 spanes in the cassette 602 top, and is connected with a CCD camera 304 on the push rod of this second cylinder 303, and this CCD camera 304 is put through wire and the chip detecting element 302 of installing on mounting bracket 3.
The number of the fixed plates 5, the movable plates 4 and the sliding plates 7 is two, and the two fixed plates, the movable plates and the sliding plates are respectively and correspondingly arranged at two ends of the bottom plate 1; a latch 601 is arranged on the circumferential surface of each rotating disc 6, a clamping groove matched with the latch 601 is arranged on the inner surface of the clamping band 602, and the clamping band 602 is in transmission connection with the rotating discs 6 through the clamping groove and the latch 601; a baffle 603 is disposed on one side of the rotating disc 6 opposite to the fixed plate 5 and the movable plate 4, so that a limit groove for the clamping belt 602 to be embedded is formed between the baffle 603 and the rotating disc 6.
Example 2: a detection device for an integrated circuit chip comprises a bottom plate 1, a motor 2 arranged on the upper surface of the bottom plate 1, a plurality of fixed plates 5 arranged on the upper surface of the bottom plate 1 at intervals, and a plurality of movable plates 4 arranged face to face with the fixed plates 5 respectively, wherein the motor 2 is arranged on the outer sides of the fixed plates 5 or the movable plates 4, a sliding plate 7 is arranged between the bottom plate 1 and the movable plates 4, and the lower surfaces of the movable plates 4 are movably arranged on the sliding plate 7, so that the movable plates 4 can move in the direction close to or far away from the fixed plates 5;
a limiting shaft 501 is connected between the fixed plate 5 and the movable plate 4 which are oppositely arranged, a convex tube 401 facing the fixed plate 5 is arranged on the surface of one side of the movable plate 4 close to the fixed plate 5, a through hole for embedding the limiting shaft 501 is formed in the center of the convex tube 401, one end of the limiting shaft 501 is embedded in the fixed plate 5 and is rotatably connected with the fixed plate 5, and the other end of the limiting shaft 501 is embedded in the through hole in the convex tube 401 and can slide in the through hole;
the output end of the motor 2 is connected with a rotating shaft 201, one end of the rotating shaft 201 far away from the motor 2 is provided with a main gear 202, a pinion 204 is arranged on the rotating shaft 201 between the main gear 202 and the motor 2, one side of each of the fixed plate 5 and the movable plate 4 is provided with a rotating disc 6, the rotating disc 6 at one side of the fixed plate 5 is rotatably arranged on a limiting shaft 501, the rotating disc 6 at one side of the movable plate 4 is rotatably sleeved outside the convex pipe 401, a plurality of rotating discs 6 at the same side are in transmission connection with the pinion 204 through a clamping belt 602, a plurality of rotating discs 6 at the other side are in transmission connection with the main gear 202 through another clamping belt 602, and the outer wall of the clamping belt 602 is provided with a plurality of mounting clamping grooves 604 for mounting the integrated chip 9;
a plurality of connect through a push pedal 402 between the fly leaf 4, this push pedal 402 is located fly leaf 4 and carries on the back in the fixed plate 5 outside, the outside of push pedal 402 is provided with an mounting bracket 3, installs a first cylinder 301 on this mounting bracket 3, and the output and the push pedal 402 fixed connection of this first cylinder 301, still be provided with a second cylinder 303 on the mounting bracket 3, the push rod of second cylinder 303 spanes in the cassette 602 top, and is connected with a CCD camera 304 on the push rod of this second cylinder 303, and this CCD camera 304 is put through wire and the chip detecting element 302 of installing on mounting bracket 3.
The bottom plate 1 is further provided with a support frame 203, the support frame 203 is positioned between the main gear 202 and the pinion 204, and the rotating shaft 201 is in limit connection with the bottom plate 1 through the support frame 203; a limiting plate 502 is disposed on the outer side of each of the fixing plates 5 opposite to the movable plate 4, and one end of the limiting shaft 501 penetrates through the fixing plate 5 and is connected with the limiting plate 502; the thickness of the main gear 202 is larger than that of the pinion 204; the upper surface of the sliding plate 7 is provided with a plurality of sets of moving chutes 701, and the movable plate 4 is slidably connected with the sliding plate 7 through the moving chutes 701.
When the integrated chip mounting device is used, firstly, the distance between the opposite mounting clamping grooves is adjusted according to the specification of the integrated chip, the first air cylinder is started, the output end of the first air cylinder drives the push plate to move, the push plate drives the multiple groups of movable plates to slide on the sliding plate, the movable plates drive the convex tubes to move, so that the convex tubes slide along the limiting shafts, the movable plates drive the multiple groups of rotating discs to move through the convex tubes, the rotating discs drive the corresponding clamping belts to slide on the main gear, so that the one group of clamping belts are far away from the fixed plate, then, the integrated chip is mounted in the mounting clamping grooves, and the edge positions of the integrated chip are clamped in the mounting clamping grooves;
after the integrated chip is inserted into the mounting clamping groove, a motor is started, the output end of the motor drives a rotating shaft to rotate, the rotating shaft drives a main gear and an auxiliary gear to rotate, the main gear and the auxiliary gear drive a plurality of groups of clamping bands to move simultaneously, the clamping bands drive the integrated chip to move through the mounting clamping groove until the integrated chip moves to a detection position, the motor is stopped at the moment, a second air cylinder is started, the output end of the second air cylinder drives a CCD camera to extend to one side of the integrated chip above the clamping bands, the CCD camera scans for the first time at the moment, after the maximum stroke of the second air cylinder is reached, the second air cylinder is started, the output end of the second air cylinder drives the CCD camera to return to the original position, the CCD camera scans the integrated chip again, and a lead of the CCD camera conveys a scanning result to a chip detection unit to process, so that the quality of the integrated chip is judged.
When the detection device for the integrated circuit chip is adopted, the distance between the mounting clamping grooves can be changed through the arrangement of the movable plate, the convex pipe, the push plate, the clamping belt, the mounting clamping grooves, the main gear and the first air cylinder, so that the integrated chips with different specifications can be mounted in the device by adjusting the distance between the opposite mounting clamping grooves, the universality of the device is improved, the problem that the integrated chips with different specifications cannot be detected is effectively solved, and the detection efficiency is improved;
in addition, the mounting rack, the second cylinder, the integrated chip monitoring unit, the CCD camera, the motor, the main gear, the auxiliary gear, the clamping belt and the mounting clamping groove are arranged, so that the CCD camera can carry out all-dimensional scanning on the side face of the integrated chip at a position close enough, the scanning quality is improved, and the problem that the integrated chip cannot be accurately shot is effectively solved.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims (8)

1. A test device for an integrated circuit chip, comprising: the motor-driven bicycle comprises a base plate (1), a motor (2) arranged on the upper surface of the base plate (1), a plurality of fixed plates (5) arranged on the upper surface of the base plate (1) at intervals and a plurality of movable plates (4) respectively arranged face to face with the fixed plates (5), wherein the motor (2) is arranged on the outer sides of the fixed plates (5) or the movable plates (4), a sliding plate (7) is arranged between the base plate (1) and the movable plates (4), and the lower surfaces of the movable plates (4) are movably arranged on the sliding plate (7), so that the movable plates (4) can move in the direction close to or far away from the fixed plates (5);
a limiting shaft (501) is connected between the fixed plate (5) and the movable plate (4) which are oppositely arranged, a convex tube (401) facing the fixed plate (5) is arranged on the surface of one side, close to the fixed plate (5), of the movable plate (4), a through hole for embedding the limiting shaft (501) is formed in the center of the convex tube (401), one end of the limiting shaft (501) is embedded in the fixed plate (5) and is rotatably connected with the fixed plate (5), and the other end of the limiting shaft (501) is embedded in the through hole in the convex tube (401) and can slide in the through hole;
the output end of the motor (2) is connected with a rotating shaft (201), one end of the rotating shaft (201) far away from the motor (2) is provided with a main gear (202), a pinion (204) is arranged on the rotating shaft (201) between the main gear (202) and the motor (2), one sides of the fixed plate (5) and the movable plate (4) which are opposite to each other are respectively provided with a rotating disc (6), the rotating disc (6) positioned on one side of the fixed plate (5) is rotatably arranged on the limiting shaft (501), the rotating disc (6) positioned on one side of the movable plate (4) is rotatably sleeved on the outer side of the convex pipe (401), a plurality of rotating discs (6) positioned on the same side are in transmission connection with the pinion (204) through a clamping belt (602), and a plurality of rotating discs (6) positioned on the other side are in transmission connection with the main gear (202) through another clamping belt (602), a plurality of installation clamping grooves (604) for installing integrated chips (9) are formed in the outer wall of the clamping belt (602);
a plurality of connect through a push pedal (402) between fly leaf (4), this push pedal (402) are located fly leaf (4) and carry on the back in fixed plate (5) outside, the outside of push pedal (402) is provided with a mounting bracket (3), installs a first cylinder (301) on this mounting bracket (3), the output and the push pedal (402) fixed connection of this first cylinder (301), still be provided with a second cylinder (303) on mounting bracket (3), the push rod of second cylinder (303) spanes in cassette (602) top, and is connected with a CCD camera (304) on the push rod of this second cylinder (303), and this CCD camera (304) are through wire and chip detection unit (302) switch-on of installing on mounting bracket (3).
2. The test device of claim 1, wherein: the number of the fixed plates (5), the movable plates (4) and the sliding plates (7) is two, and the fixed plates, the movable plates and the sliding plates are respectively and correspondingly arranged at two ends of the bottom plate (1).
3. The test device of claim 1, wherein: every be provided with latch (601) on the circumferential surface of rolling disc (6), be provided with on the internal surface of cassette (602) with latch (601) complex draw-in groove, be connected through draw-in groove and latch (601) transmission between cassette (602) and rolling disc (6).
4. The test device of claim 1, wherein: one side of each of the rotating disc (6), which is back to the fixed plate (5) and the movable plate (4), is provided with a baffle (603), so that a limit groove for embedding the clamping belt (602) is formed between the baffle (603) and the rotating disc (6).
5. The test device of claim 1, wherein: the bottom plate (1) is further provided with a support frame (203), the support frame (203) is located between the main gear (202) and the pinion (204), and the rotating shaft (201) is in limit connection with the bottom plate (1) through the support frame (203).
6. The test device of claim 1, wherein: every fixed plate (5) all is provided with a limiting plate (502) in the outside that moves back to fly leaf (4), the one end of spacing axle (501) is passed fixed plate (5) and is connected with limiting plate (502).
7. The test device of claim 1, wherein: the thickness of the main gear (202) is larger than that of the auxiliary gear (204).
8. The test device of claim 1, wherein: the upper surface of slide (7) is opened has multiunit removal spout (701), fly leaf (4) are through removing spout (701) and slide (7) sliding connection.
CN202010424508.XA 2020-05-19 2020-05-19 Detection device for integrated circuit chip Withdrawn CN113686781A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010424508.XA CN113686781A (en) 2020-05-19 2020-05-19 Detection device for integrated circuit chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010424508.XA CN113686781A (en) 2020-05-19 2020-05-19 Detection device for integrated circuit chip

Publications (1)

Publication Number Publication Date
CN113686781A true CN113686781A (en) 2021-11-23

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010424508.XA Withdrawn CN113686781A (en) 2020-05-19 2020-05-19 Detection device for integrated circuit chip

Country Status (1)

Country Link
CN (1) CN113686781A (en)

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Application publication date: 20211123