CN113676078A - Large-stroke two-dimensional piezoelectric positioning table - Google Patents
Large-stroke two-dimensional piezoelectric positioning table Download PDFInfo
- Publication number
- CN113676078A CN113676078A CN202110948467.9A CN202110948467A CN113676078A CN 113676078 A CN113676078 A CN 113676078A CN 202110948467 A CN202110948467 A CN 202110948467A CN 113676078 A CN113676078 A CN 113676078A
- Authority
- CN
- China
- Prior art keywords
- decoupling
- pair
- positioning table
- piezoelectric
- displacement amplification
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 140
- 238000006073 displacement reaction Methods 0.000 claims abstract description 106
- 230000003321 amplification Effects 0.000 claims abstract description 64
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 64
- 229910003460 diamond Inorganic materials 0.000 claims description 7
- 239000010432 diamond Substances 0.000 claims description 7
- 230000005284 excitation Effects 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims 2
- 230000008878 coupling Effects 0.000 abstract description 7
- 238000010168 coupling process Methods 0.000 abstract description 7
- 238000005859 coupling reaction Methods 0.000 abstract description 7
- 238000005452 bending Methods 0.000 description 8
- 239000000919 ceramic Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000002955 isolation Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000005188 flotation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Abstract
The invention discloses a two-dimensional piezoelectric positioning table with a large stroke and a large effective stroke area ratio, and belongs to the technical field of piezoelectric driving. The device comprises a bottom plate, a piezoelectric positioning table, an object carrying platform and a pre-tightening mechanism; the pre-tightening mechanisms comprise a first pre-tightening mechanism and a second pre-tightening mechanism which are respectively arranged on the bottom plates on the sides corresponding to the piezoelectric positioning tables of the two displacement amplification mechanisms; the piezoelectric positioning table comprises an object platform frame, a first displacement amplification mechanism, a first decoupling mechanism, a second displacement amplification mechanism and a second decoupling mechanism; the first displacement amplification mechanism and the first decoupling mechanism are a group for realizing displacement output of the piezoelectric positioning table in the Y direction, and the second displacement amplification mechanism and the second decoupling mechanism are a group for realizing displacement output of the piezoelectric positioning table in the X direction. The invention makes the integral amplification ratio reach 14.4 through the structural design of two displacement amplification mechanisms; the coupling error of the piezoelectric positioning table in the X direction and the Y direction is reduced to 0.35% by adjusting the mechanical mechanism parameters of the two decoupling mechanisms.
Description
Technical Field
The invention belongs to the technical field of piezoelectric driving, and particularly relates to a large-stroke two-dimensional piezoelectric positioning table.
Background
The piezoelectric positioning table is a mechanical structure which utilizes a piezoelectric driving technology to realize precise positioning. The inverse piezoelectric effect of the piezoelectric ceramic is utilized, so that the piezoelectric ceramic generates micro displacement after being electrified and excited, and the precise positioning is realized.
The current piezoelectric positioning table can be divided into a single-degree-of-freedom type and a multi-degree-of-freedom type according to the classification of degrees of freedom, and can be divided into a direct-drive type and an amplification type according to the classification of displacement amplification mechanisms. Because the electrostrictive deformation of the piezoelectric ceramic is usually one thousandth of the thickness of the ceramic, the direct-drive piezoelectric positioning table is usually limited by micron-sized output displacement of a piezoelectric driver and cannot realize large-stroke output, but the direct-drive piezoelectric positioning table usually has very high resonant frequency and is widely applied to the field of high-frequency scanning positioning. The displacement of the piezoelectric driver is amplified and output by reasonably designing the displacement amplification mechanism of the amplification type piezoelectric positioning table, so that large-stroke displacement output is realized, and the requirements of different positioning strokes are met.
A piezoelectric driving large-stroke non-coupling two-dimensional precision positioning platform increases the output displacement stroke through an X-direction diamond amplification mechanism and drives the whole inner-layer substrate nested on the X-direction platform to realize the transverse movement of a workbench, namely the X-direction movement; meanwhile, the central workbench is driven by the two diamond amplifying mechanisms which are connected in series to realize the motion in the Y direction, namely the vertical direction, and the motion displacement of the inner platform and the outer platform is the displacement of the piezoelectric ceramic driver amplified by the diamond amplifying mechanisms.
However, the stroke of the traditional piezoelectric positioning platform similar to the piezoelectric driving positioning platform is usually less than 200 microns, and the traditional piezoelectric positioning platform cannot be applied to the application occasions of large-stroke precise positioning; the ratio of the carrying area (the area of the carrying platform/the area of the positioning table) is usually smaller than 1/3, and the precision positioning is difficult to realize for the target object with a larger size; the effective stroke area ratio (the stroke (unit: micron)/the area (unit: millimeter) of the positioning table) is usually less than 1, namely, the larger displacement can not be output by effectively utilizing a mechanical structure under the same size space, and the larger the effective stroke area ratio is, the more beneficial the positioning table can realize large-stroke displacement output in a limited space; meanwhile, the output displacement crosstalk between the traditional piezoelectric positioning platform in the X direction and the Y direction is large, namely, the coupling error is large, and high positioning precision is difficult to realize.
Disclosure of Invention
In order to solve the problems of small stroke, small carrying area, small effective stroke area and large coupling error of the traditional piezoelectric positioning platform, the invention provides a large-stroke two-dimensional piezoelectric positioning platform.
A large-stroke two-dimensional piezoelectric positioning table comprises a bottom plate 1, a piezoelectric positioning table 2, an object carrying platform 3 and a pre-tightening mechanism; the piezoelectric positioning table 2 is fixedly arranged on the bottom plate 1, and the objective platform 3 is fixedly arranged on the top surface of the piezoelectric positioning table 2; the pre-tightening mechanisms comprise a first pre-tightening mechanism and a second pre-tightening mechanism which are respectively arranged on the bottom plates 1 at the two side edges of the piezoelectric positioning table 2 corresponding to the two displacement amplification mechanisms;
the piezoelectric positioning table 2 comprises a rectangular object platform frame 27, a first displacement amplification mechanism 23, a first decoupling mechanism 25, a second displacement amplification mechanism 24 and a second decoupling mechanism 26;
the carrier platform frame 27 is a rectangular frame;
the first displacement amplification mechanism 23 and the first decoupling mechanism 25 form a group and are horizontally arranged in the middle of the loading platform frame 27 in parallel;
the second displacement amplifying mechanism 24 and the second decoupling mechanism 26 are a group and are respectively and vertically arranged on two sides in the loading platform frame 27;
the first displacement amplification mechanism 23 and the second displacement amplification mechanism 24 have the same structure, and piezoelectric stacks are arranged in the first displacement amplification mechanism 23; the first decoupling mechanism 25 and the second decoupling mechanism 26 are identical in structure;
the first displacement amplification mechanism 23 and the first decoupling mechanism 25 realize the displacement output of the piezoelectric positioning table in the Y direction; the second displacement amplification mechanism 24 and the second decoupling mechanism 26 realize the displacement output of the piezoelectric positioning table in the X direction; the output displacement in the X direction and the output displacement in the Y direction are equal under the same voltage excitation.
The further concrete technical scheme is as follows:
the first displacement amplification mechanism 23 comprises a first rhomboid 231, a first piezoelectric stack 21, a pair of first levers 233, and a pair of first straight beam-shaped flexible hinges 236; bosses are respectively arranged on the outer parts of two ends of the short diagonal line of the first rhombohedron 231, a first auxiliary fulcrum hole 237 is formed on one boss, and a first fulcrum hole 238 is formed on the other boss; the first piezoelectric stack 21 is located on the long diagonal line of the first rhomboid 231, and two ends of the first piezoelectric stack are respectively connected with the first rhomboid 231; the pair of first levers 233 are symmetrically positioned at two sides of the boss where the first auxiliary fulcrum hole 237 is positioned, one end of the pair of first levers 233 is connected with the first rhomboid 231 at two sides of the first auxiliary fulcrum hole 237 through the first flexible hinge 232, the other end of the pair of first levers 233 is connected with one end of the pair of first straight beam flexible hinges 236, the first levers 233 and the first straight beam flexible hinges 236 are connected in a right angle, and the other end of the pair of first straight beam flexible hinges 236 is connected with the long side frame of the loading platform frame 27; the first lever 233 adjacent to the first flexible hinge 232 is connected with the first fulcrum block 235 through the second flexible hinge 234, and the first fulcrum block 235 is provided with a first through hole 239; the series connection of the first rhomboid 231 and the pair of first levers 233 realizes a composite type multistage displacement amplification.
The second displacement amplification mechanism 24 comprises a second rhomboid 241, a second piezoelectric stack 22, a pair of second levers 243, a pair of second straight beam-type flexible hinges 246; bosses are respectively arranged on the outer parts of two ends of the short diagonal line of the second rhombohedron 241, a second auxiliary fulcrum hole 247 is arranged on one boss, and a second fulcrum hole 248 is arranged on the other boss; the second piezoelectric stack 22 is located on a long diagonal line of the second rhomboid 241, and two ends of the second piezoelectric stack are respectively connected with the second rhomboid 241; the pair of second levers 243 are symmetrically positioned at two sides of the boss where the second auxiliary fulcrum hole 247 is positioned, one end of the pair of second levers 243 is connected with the second rhomboid 241 at two sides of the second auxiliary fulcrum hole 247 through the second flexible hinge 242, the other end of the pair of second levers 233 is connected with one end of the pair of second straight beam-shaped flexible hinges 246, the second levers 243 and the second straight beam-shaped flexible hinges 246 are connected in a right angle, and the other end of the pair of second straight beam-shaped flexible hinges 246 is connected with the short side frame of the loading platform frame 27; a second lever 243 adjacent to the second flexible hinge 242 is connected with a second fulcrum block 245 through a second decoupling flexible hinge 244, and a second through hole 249 is formed in the second fulcrum block 245; the series connection of the second rhomboid 241 and the pair of second levers 243 realizes the composite type multistage displacement amplification.
The first decoupling mechanism 25 comprises a pair of first L-shaped decoupling beams 251, one end of each first L-shaped decoupling beam 251 is connected with the long side frame of the objective platform frame 27, and the other end of each first L-shaped decoupling beam 251 is connected with a decoupling fulcrum block 252, so that the long side frames of the first L-shaped decoupling beams 251 and the objective platform frame 27 form a hollow rectangle; the first decoupling fulcrum block 252 is provided with a first decoupling through hole 253.
The second decoupling mechanism 26 comprises a pair of second L-shaped decoupling beams 261, one ends of the pair of second L-shaped decoupling beams 261 are respectively connected with the short side frames of the object carrying platform frame 27, and the other ends of the pair of second L-shaped decoupling beams 261 are connected with second decoupling fulcrum blocks 262, so that the pair of second L-shaped decoupling beams 261 and the short side frames of the object carrying platform frame 27 form a hollow rectangle; a second decoupling through hole 263 is formed in the second decoupling fulcrum block 262.
The first pre-tightening mechanism and the second pre-tightening mechanism have the same structure; the first pre-tightening mechanism comprises a first fixing block 41 and a first pre-tightening bolt 42; the first fixed block 41 is fixed outside the long side frame of the loading platform frame 27 corresponding to the first displacement amplification mechanism 23; the first pre-tightening bolt 42 is in threaded fit with the first fixed block 41, and the working end of the first pre-tightening bolt 42 passes through a long-edge through hole 271 on the long edge of the loading platform frame 27 to be in contact with the first rhombohedron 231; the second pre-tightening mechanism comprises a second fixed block 51 and a second pre-tightening bolt 52; the working end of the second pre-tightening bolt 52 passes through the short-side through hole 272 on the short side of the loading platform frame 27 to contact with the second rhomboid 241.
The four corners of the object platform frame 27 are respectively provided with a mounting hole, the long side frame of the object platform frame 27 corresponding to the first rhomboid 231 is provided with a long side through hole 271, and the short side frame of the object platform frame 27 corresponding to the second rhomboid 241 is provided with a short side through hole 272.
The first L-shaped decoupling beam 251 and the second L-shaped decoupling beam 261 are identical in structure, and the widths of the first L-shaped decoupling beam 251 and the second L-shaped decoupling beam 261 are 0.2 mm-1 mm.
The included angle between the first rhomboid 231 and the second rhomboid 241 in the long diagonal direction is 5-30 degrees.
The invention has at least the following beneficial technical effects:
1. the stroke of the two-dimensional piezoelectric positioning table is 488 micrometers multiplied by 488 micrometers, the area of the object carrying platform is increased by arranging all the displacement amplifying mechanisms and the decoupling mechanisms in the object carrying platform frame, the area of the object carrying platform is equal to the area (173.5 mm multiplied by 93 mm) of the piezoelectric positioning table, the area ratio of the object carrying platform is 1 (the area of the object carrying platform/the area of the positioning table), the area ratio of the effective stroke is 14.76 (the stroke (unit: micrometer) of the positioning table/the area (unit: millimeter) of the positioning table), the available object carrying area of the piezoelectric positioning table is greatly improved, and the space structure is more compact.
2. The displacement amplification mechanism is a symmetrical structure, and the amplification ratio of the displacement amplification mechanism is increased by a method of mechanically connecting the rhombohedron and the lever in series. The rhomboid adopts the principle of triangular amplification, the long diagonal end of the rhomboid is pushed by the stretching action of the piezoelectric stack to drive the short diagonal end to contract towards the direction close to the piezoelectric stack, because one end of the short diagonal is fixed, the displacement of the other end is twice of that of a single side, the movable end of the rhomboid is connected with the lever, and the output displacement is further amplified by the amplifying action of the lever. The overall magnification ratio of the displacement magnification mechanism is 14.4.
3. According to the decoupling mechanism, two L-shaped decoupling beams are mechanically connected in parallel, and the bending rigidity of the first decoupling mechanism in the X direction or the bending rigidity of the second decoupling mechanism in the Y direction is approximately equal to the bending rigidity of a straight beam type flexible hinge in a displacement amplification mechanism by adjusting the mechanical mechanism parameters of the L-shaped decoupling beams, so that rigidity balance is realized, the coupling error of the piezoelectric positioning table in the X direction and the Y direction is reduced, and the theoretical coupling error is 0.35%.
Drawings
Fig. 1 is a schematic view of the overall structure of the large-stroke two-dimensional piezoelectric positioning table of the invention.
Fig. 2 is an isometric structural schematic diagram of a piezoelectric positioning stage.
FIG. 3 is a top view of a piezoelectric positioning stage.
Fig. 4(a) is a schematic structural view of the first displacement magnification mechanism.
Fig. 4(b) is a schematic structural view of the second displacement magnification mechanism.
Fig. 5(a) is a schematic structural view of the first decoupling mechanism.
Fig. 5(b) is a schematic structural view of the second decoupling mechanism.
Fig. 6(a) is a schematic diagram of a first force analysis of the L-shaped decoupling beam.
Fig. 6(b) is a second force analysis diagram of the L-shaped decoupling beam.
Fig. 7 is a schematic structural deformation diagram of the piezoelectric positioning table during X-direction displacement output.
Fig. 8 is a schematic structural deformation diagram of the piezoelectric positioning stage during Y-direction displacement output.
Sequence numbers in FIGS. 1-6 above: the decoupling device comprises a base plate 1, a piezoelectric positioning table 2, an object carrying platform 3, a first piezoelectric stack 21, a second piezoelectric stack 22, a first displacement amplifying mechanism 23, a second displacement amplifying mechanism 24, a first decoupling mechanism 25, a second decoupling mechanism 26, an object carrying platform frame 27, a first rhomboid 231, a first flexible hinge 232, a first lever 233, a first decoupling flexible hinge 234, a first fulcrum block 235, a first straight beam-shaped flexible hinge 236, a first auxiliary fulcrum hole 237, a first fulcrum hole 238, a first through hole 239, a second rhomboid 241, a second flexible hinge 242, a second lever 243, a second decoupling flexible hinge 244, a second fulcrum block 245, a second straight beam-shaped flexible hinge 246, a second auxiliary fulcrum hole 247, a second fulcrum hole 248, a second through hole 249, a first L-shaped decoupling beam 251, a first decoupling fulcrum block 252, a first decoupling through hole 253, a second L-shaped decoupling beam 261, a second decoupling fulcrum block 262, The first decoupling through hole 263, the first fixing block 41, the first pre-tightening bolt 42, the second fixing block 51, the second pre-tightening bolt 52, the long-side through hole 271 and the short-side through hole 272.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, the large-stroke two-dimensional piezoelectric positioning table comprises a bottom plate 1, a piezoelectric positioning table 2, an object carrying platform 3 and a pre-tightening mechanism. The piezoelectric positioning table 2 is fixedly arranged on the bottom plate 1, and the objective platform 3 is fixedly arranged on the top surface of the piezoelectric positioning table 2. The pre-tightening mechanism comprises a first pre-tightening mechanism and a second pre-tightening mechanism which are respectively arranged on the bottom plate 1 at the two side edges of the piezoelectric positioning table 2 corresponding to the two displacement amplifying mechanisms.
Referring to fig. 2, the piezoelectric positioning stage 2 includes a rectangular stage frame 27, a first displacement amplification mechanism 23, a first decoupling mechanism 25, a second displacement amplification mechanism 24, and a second decoupling mechanism 26. The carrier platform frame 27 is a rectangular frame; the first displacement amplification mechanism 23 and the first decoupling mechanism 25 form a group and are horizontally and parallelly arranged in the middle of the inside of the loading platform frame 27; the second displacement amplifying mechanism 24 and the second decoupling mechanism 26 are a group and are respectively and vertically arranged on two sides in the loading platform frame 27; the first displacement amplification mechanism 23 and the second displacement amplification mechanism 24 are identical in structure, and the first decoupling mechanism 25 and the second decoupling mechanism 26 are identical in structure.
Referring to fig. 3 and 4a, the first displacement amplification mechanism 23 includes a first rhomb 231, a first piezoelectric stack 21, a pair of first levers 233, and a pair of first straight beam-type flexible hinges 236. The first rhomboid 231 has an angle of 15 in the long diagonal direction. Bosses are respectively arranged on the outer parts of the two ends of the short diagonal line of the first rhombohedron 231, a first auxiliary fulcrum hole 237 is arranged on one boss, and a first fulcrum hole 238 is arranged on the other boss. The first piezoelectric stack 21 is mounted on the long diagonal of the first rhomboid 231, and both ends are connected to the first rhomboid 231 respectively. The pair of first levers 233 are symmetrically located at two sides of the boss where the first auxiliary fulcrum hole 237 is located, one end of the pair of first levers 233 is connected to the first rhomboid 231 at two sides of the first auxiliary fulcrum hole 237 through the first flexible hinge 232, the other end of the pair of first levers 233 is connected to one end of the pair of first straight beam flexible hinges 236, the first levers 233 and the first straight beam flexible hinges 236 are connected in a right angle, and the other end of the pair of first straight beam flexible hinges 236 is connected to the long side frame of the loading platform frame 27. The first lever 233 adjacent to the first flexible hinge 232 is connected with the first fulcrum block 235 through the second flexible hinge 234, and the first fulcrum block 235 is provided with a first through hole 239; the series connection of the first rhomboid 231 and the pair of first levers 233 realizes a composite type multistage displacement amplification.
Referring to fig. 3 and 4b, the second displacement amplification mechanism 24 includes a second rhomboid 241, a second piezoelectric stack 22, a pair of second levers 243, and a pair of second straight beam-type flexible hinges 246. The angle of the second rhomboid 241 in the long diagonal direction is 15 °. Bosses are respectively arranged on the outer parts of two ends of the short diagonal line of the second rhombohedron 241, a boss at one position is provided with a second auxiliary fulcrum hole 247, and a boss at the other position is provided with a second fulcrum hole 248. The second piezoelectric stack 22 is mounted on the long diagonal line of the second rhomboid 241, and two ends of the second piezoelectric stack are respectively connected with the second rhomboid 241. The pair of second levers 243 are symmetrically located at two sides of the boss where the second auxiliary fulcrum hole 247 is located, one end of the pair of second levers 243 is connected to the second rhomboid 241 at two sides of the second auxiliary fulcrum hole 247 through the second flexible hinge 242, the other end of the pair of second levers 233 is connected to one end of the pair of second straight beam-shaped flexible hinges 246, the second levers 243 and the second straight beam-shaped flexible hinges 246 are connected in a right angle, and the other end of the pair of second straight beam-shaped flexible hinges 246 is connected to the short side frame of the loading platform frame 27. A second lever 243 adjacent to the second flexible hinge 242 is connected with a second fulcrum block 245 through a second decoupling flexible hinge 244, and a second through hole 249 is formed in the second fulcrum block 245; the series connection of the second rhomboid 241 and the pair of second levers 243 realizes the composite type multistage displacement amplification.
Referring to fig. 3 and 5a, the first decoupling mechanism 25 includes a pair of first L-shaped decoupling beams 251, one end of each of the pair of first L-shaped decoupling beams 251 is connected to a long side frame of the carrier platform frame 27, and the other end of each of the pair of first L-shaped decoupling beams 251 is connected to the decoupling fulcrum block 252, so that the pair of first L-shaped decoupling beams 251 and the long side frame of the carrier platform frame 27 form a hollow rectangle. The first decoupling fulcrum block 252 is provided with a first decoupling through hole 253. The width of the first L-shaped decoupling beam 251 is 0.5 mm.
Referring to fig. 3 and 5b, the second decoupling mechanism 26 includes a pair of second L-shaped decoupling beams 261, one end of each of the pair of second L-shaped decoupling beams 261 is connected to a short side frame of the carrier platform frame 27, and the other end of each of the pair of second L-shaped decoupling beams 261 is connected to the second decoupling fulcrum block 262, so that the pair of second L-shaped decoupling beams 261 and the short side frame of the carrier platform frame 27 form a hollow rectangle. The second decoupling fulcrum block 262 is provided with a second decoupling through hole 263. The width of the second L-shaped decoupling beam 261 is 0.5 mm.
Referring to fig. 2, four corners of the object platform frame 27 are respectively provided with mounting holes, a long-side through hole 271 is provided on the long-side frame of the object platform frame 27 corresponding to the first rhomboid 231, and a short-side through hole 272 is provided on the short-side frame of the object platform frame 27 corresponding to the second rhomboid 241.
Referring to fig. 1 and 2, the first pretensioning mechanism and the second pretensioning mechanism are identical in structure. The first pre-tightening mechanism comprises a first fixing block 41 and a first pre-tightening bolt 42; the first fixed block 41 is fixed to the outside of the long-side frame of the stage frame 27 corresponding to the first piezoelectric stack 21 of the first displacement magnification mechanism 23. The first pre-tightening bolt 42 is in threaded fit with the first fixing block 41, and the working end of the first pre-tightening bolt 42 passes through the long-edge through hole 271 on the long edge of the loading platform frame 27 to be in contact with the first rhomboid 231. The second pre-tightening mechanism comprises a second fixed block 51 and a second pre-tightening bolt 52; the working end of the second pre-tightening bolt 52 passes through the short-side through hole 272 on the short side of the loading platform frame 27 to contact with the second rhomboid 241.
Referring to fig. 1, when in use, the bottom plate 1 is fixed on a vibration isolation platform through four bolts, and the vibration isolation platform is an air flotation vibration isolation platform which is generally used in experiments in common knowledge and is used for isolating the influence of external vibration on the piezoelectric positioning table.
Referring to fig. 2, the length direction of the first piezoelectric stack 21 is assumed to be the X direction, and the length direction of the second piezoelectric stack 22 is assumed to be the Y direction. The first displacement amplification mechanism 23 and the first decoupling mechanism 25 realize the displacement output of the piezoelectric positioning table 2 in the Y direction; the second displacement amplification mechanism 24 and the second decoupling mechanism 26 realize the displacement output of the piezoelectric positioning table 2 in the X direction; the output displacement in the X direction and the output displacement in the Y direction are equal under the same voltage excitation.
Referring to fig. 6(a) and 6(b), by reasonably designing the size parameters of the L-shaped decoupling beam, the bending stiffness of the first decoupling mechanism in the X direction or the bending stiffness of the second decoupling mechanism in the Y direction is approximately equal to the bending stiffness of the straight beam-shaped flexible hinge in the displacement amplification mechanism, so that the stiffness balance is realized, and the coupling error is reduced.
The bending stiffness of the L-shaped decoupling beam in the direction of force F in fig. 6(a) is:
the bending stiffness of the L-shaped decoupling beam in the direction of force F in fig. 6(b) is:
l in the invention7，L8The range of the (A) is 39 mm-43 mm, E is the Young modulus of the aluminum alloy 7075, the value is E =7.17 multiplied by 10^10Pa, I is the section inertia moment of the decoupling beam, the range of I = 0.1-0.83 mm ^4, A is the section area of the decoupling beam, the range of A = 2-10 mm ^2, t is0For decoupling the width of the beam, t in the invention0The value range of (A) is 0.2 mm-1 mm.
During assembly, the first auxiliary fulcrum hole 237 and the second auxiliary fulcrum hole 247 in the piezoelectric positioning table 2 are fixed through bolts, thereby limiting the degree of freedom of one end of the short diagonal lines of the first diamond 231 and the second diamond 241, meanwhile, the first pre-tightening mechanism 4 and the second pre-tightening mechanism 5 are fixed at corresponding positions on the bottom plate, the tops of the pre-tightening bolts pass through the long-edge through holes 271 along with the rotation of the pre-tightening bolts 42, and contacts with one end of the short diagonal line of the first rhombus 231, which is close to the loading platform frame 27, continues to rotate the pre-tightening bolt 42, since the first auxiliary fulcrum holes 237 are fixed, the long diagonal lines of the first rhomboid 231 are expanded according to the buckling deformation principle, at this time, the first piezoelectric stack 21 is loaded, the pretension bolt 42 is then loosened, the piezoelectric stack 21 is clamped by the restoring force of the elastic deformation of the amplification mechanism and a suitable pre-stress is applied, which can be converted depending on the number of revolutions and the thread pitch of the bolt. The assembly process of the second piezoelectric stack 22 can be obtained according to the assembly process of the first piezoelectric stack 21.
Referring to fig. 4a and 4b, two first through holes 239 and first fulcrum holes 238 are axially symmetrically distributed, and two second through holes 249 and second fulcrum holes 248 are axially symmetrically distributed. Under the excitation of a non-negative voltage signal, the first piezoelectric stack 21 generates a small displacement, so that the long diagonal of the first rhomboid 231 extends, and meanwhile, because the first fulcrum hole 238 is fixed, according to the buckling deformation principle, the short diagonal of the first rhomboid 231 contracts to drive the first flexible hinge 232 to move downwards, the displacement is amplified by the rhomboid, then is further amplified by the first lever 233, and drives the objective platform frame 27 to move upwards through the first straight beam type flexible hinge 236, so that the Y-direction displacement output of the positioning table is realized. Similarly, the second piezoelectric stack 22 generates a small displacement under the excitation of the non-negative voltage signal, and the small displacement is amplified by the rhomboid, further amplified by the second lever 243, and drives the object platform frame 27 to move leftward through the second straight beam type flexible hinge 246, so as to implement the X-direction displacement output of the positioning table.
Referring to fig. 7, a non-negative voltage signal is applied to the second piezoelectric stack 22, so that the second piezoelectric stack 22 generates an output displacement in the Y direction, the long diagonal end of the second rhomboid 241 is pushed, the short diagonal end of the second rhomboid 241 is driven to contract in the direction close to the second piezoelectric stack 22, because one end of the short diagonal is fixed, the displacement of the other end is twice of that of a single side, the movable end of the second rhomboid 241 is connected with two second levers 243, the two second levers 243 are pulled, the whole loading platform frame 27 is pulled by two second straight beam-shaped flexible hinges 246 to move along the X-axis negative direction, and the displacement in the X direction is output, at this time, the deformation of the whole structure is as shown in fig. 7.
Referring to fig. 8, a non-negative voltage signal is applied to the first piezoelectric stack 21, so that the first piezoelectric stack 21 generates an output displacement in the X direction, the long diagonal end of the first rhomboid 231 is pushed, the short diagonal end of the first rhomboid 231 is driven to contract in a direction close to the first piezoelectric stack 21, because one end of the short diagonal is fixed, the displacement of the other end is twice of that of a single side, the movable end of the first rhomboid 231 is connected with two first levers 233, the two first levers 233 are pulled, the whole loading platform frame 27 is pulled by two first straight beam-shaped flexible hinges 236 to move in the positive direction of the Y axis, and a displacement in the Y direction is output, at this time, the deformation of the whole structure is as shown in fig. 8.
In the embodiment, the displacement amplification mechanism is of a symmetrical structure, and the amplification ratio of the displacement amplification mechanism is increased by a method of mechanically connecting the rhombohedron and the lever in series, wherein the amplification ratio is 14.4; the stroke of the piezoelectric positioning table is 488 micrometers multiplied by 488 micrometers, the area of the object carrying platform is equal to the area (173.5 mm multiplied by 93 mm) of the piezoelectric positioning table, the area ratio of the object carrying area (the area of the object carrying platform/the area of the positioning table) is 1, and the available object carrying area of the piezoelectric positioning table is greatly improved; the effective stroke area ratio (positioning stage stroke (unit: micrometer)/positioning stage area (unit: millimeter)) is 14.76, so that the piezoelectric stage can realize displacement output with larger stroke in a limited dimensional space.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.
Claims (9)
1. The utility model provides a large stroke two dimension piezoelectricity location platform which characterized in that: comprises a bottom plate (1), a piezoelectric positioning table (2), an object carrying platform (3) and a pre-tightening mechanism; the piezoelectric positioning table (2) is fixedly arranged on the bottom plate (1), and the object carrying platform (3) is fixedly arranged on the top surface of the piezoelectric positioning table (2); the pre-tightening mechanisms comprise a first pre-tightening mechanism and a second pre-tightening mechanism which are respectively arranged on the bottom plates (1) at the two side edges of the piezoelectric positioning table (2) corresponding to the two displacement amplification mechanisms;
the piezoelectric positioning table (2) comprises a rectangular object carrying platform frame (27), a first displacement amplification mechanism (23), a first decoupling mechanism (25), a second displacement amplification mechanism (24) and a second decoupling mechanism (26);
the carrying platform frame (27) is a rectangular frame;
the first displacement amplification mechanism (23) and the first decoupling mechanism (25) form a group and are horizontally arranged in the middle of the inside of the loading platform frame (27) in parallel;
the second displacement amplification mechanism (24) and the second decoupling mechanism (26) are in a group and are respectively and vertically arranged on two sides in the loading platform frame (27);
the first displacement amplification mechanism (23) and the second displacement amplification mechanism (24) have the same structure, and piezoelectric stacks are arranged in the first displacement amplification mechanism and the second displacement amplification mechanism; the first decoupling mechanism (25) and the second decoupling mechanism (26) are identical in structure;
the first displacement amplification mechanism (23) and the first decoupling mechanism (25) realize the displacement output of the piezoelectric positioning table in the Y direction; the second displacement amplification mechanism (24) and the second decoupling mechanism (26) realize the displacement output of the piezoelectric positioning table in the X direction; the output displacement in the X direction and the output displacement in the Y direction are equal under the same voltage excitation.
2. The large-stroke two-dimensional piezoelectric positioning table as claimed in claim 1, wherein: the first displacement amplification mechanism (23) comprises a first rhomboid (231), a first piezoelectric stack (21), a pair of first levers (233) and a pair of first straight beam type flexible hinges (236); bosses are respectively arranged on the outer parts of two ends of the short diagonal line of the first rhombohedron (231), a first auxiliary fulcrum hole (237) is formed in one boss, and a first fulcrum hole (238) is formed in the other boss; the first piezoelectric stack (21) is positioned on the long diagonal line of the first rhombohedron (231), and two ends of the first piezoelectric stack are respectively connected with the first rhombohedron (231); the pair of first levers (233) are symmetrically positioned at two sides of a boss where the first auxiliary fulcrum hole (237) is positioned, one ends of the pair of first levers (233) are respectively connected with the first rhombohedrons (231) at two sides of the first auxiliary fulcrum hole (237) through first flexible hinges (232), the other ends of the pair of first levers (233) are respectively connected with one ends of a pair of first straight beam-shaped flexible hinges (236), the first levers (233) and the first straight beam-shaped flexible hinges (236) are connected in a right angle, and the other ends of the pair of first straight beam-shaped flexible hinges (236) are connected with a long edge frame of the loading platform frame (27); a first lever (233) adjacent to the first flexible hinge (232) is connected with a first fulcrum block (235) through a second flexible hinge (234), and a first through hole (239) is formed in the first fulcrum block (235); the series connection of the first rhomboid (231) and the pair of first levers (233) realizes compound multi-stage displacement amplification.
3. The large-stroke two-dimensional piezoelectric positioning table as claimed in claim 1, wherein: the second displacement amplification mechanism (24) comprises a second rhomboid (241), a second piezoelectric stack (22), a pair of second levers (243) and a pair of second straight beam type flexible hinges (246); bosses are respectively arranged on the outer parts of two ends of the short diagonal of the second rhombohedron (241), a second auxiliary fulcrum hole (247) is formed on one boss, and a second fulcrum hole (248) is formed on the other boss; the second piezoelectric stack (22) is positioned on the long diagonal line of the second rhombohedron (241), and two ends of the second piezoelectric stack are respectively connected with the second rhombohedron (241); the pair of second levers (243) are symmetrically positioned at two sides of the boss where the second auxiliary supporting point hole (247) is positioned, one ends of the pair of second levers (243) are respectively connected with the second rhombohedrons (241) at two sides of the second auxiliary supporting point hole (247) through second flexible hinges (242), the other ends of the pair of second levers (233) are respectively connected with one ends of a pair of second straight beam type flexible hinges (246), the second levers (243) and the second straight beam type flexible hinges (246) are connected in a right angle, and the other ends of the pair of second straight beam type flexible hinges (246) are connected with a short side frame of the carrying platform frame (27); a second lever (243) adjacent to the second flexible hinge (242) is connected with a second fulcrum block (245) through a second decoupling flexible hinge (244), and a second through hole (249) is formed in the second fulcrum block (245); the series connection of the second rhomboid (241) and the pair of second levers (243) realizes compound multi-stage displacement amplification.
4. The large-stroke two-dimensional piezoelectric positioning table as claimed in claim 1, wherein: the first decoupling mechanism (25) comprises a pair of first L-shaped decoupling beams (251), one ends of the first L-shaped decoupling beams (251) are respectively connected with long-edge frames of the objective platform frame (27), and the other ends of the first L-shaped decoupling beams (251) are connected with decoupling fulcrum blocks (252), so that the first L-shaped decoupling beams (251) and the long-edge frames of the objective platform frame (27) form a hollow rectangle; the first decoupling fulcrum block (252) is provided with a first decoupling through hole (253).
5. The large-stroke two-dimensional piezoelectric positioning table as claimed in claim 1, wherein: the second decoupling mechanism (26) comprises a pair of second L-shaped decoupling beams (261), one ends of the pair of second L-shaped decoupling beams (261) are respectively connected with the short-side frames of the object carrying platform frame (27), and the other ends of the pair of second L-shaped decoupling beams (261) are connected with the second decoupling fulcrum blocks (262), so that the pair of second L-shaped decoupling beams (261) and the short-side frames of the object carrying platform frame (27) form a hollow rectangle; and a second decoupling through hole (263) is formed in the second decoupling fulcrum block (262).
6. The large-stroke two-dimensional piezoelectric positioning table as claimed in claim 1, wherein: the first pre-tightening mechanism and the second pre-tightening mechanism have the same structure; the first pre-tightening mechanism comprises a first fixing block (41) and a first pre-tightening bolt (42); the first fixed block (41) is fixed outside a long side frame of the carrying platform frame (27) corresponding to the first displacement amplification mechanism (23); the first pre-tightening bolt (42) is in threaded fit with the first fixing block (41), and the working end of the first pre-tightening bolt (42) penetrates through a long-edge through hole (271) on the long edge of the loading platform frame (27) to be in contact with the first rhombohedron (231); the second pre-tightening mechanism comprises a second fixed block (51) and a second pre-tightening bolt (52); the working end of the second pre-tightening bolt (52) passes through a short-edge through hole (272) on the short edge of the loading platform frame (27) to be in contact with the second rhomboid (241).
7. The large-stroke two-dimensional piezoelectric positioning table as claimed in claim 1, wherein: the mounting holes are respectively formed in four corners of the carrying platform frame (27), long-edge through holes (271) are formed in long-edge frames of the carrying platform frame (27) corresponding to the first rhombohedron (231), and short-edge through holes (272) are formed in short-edge frames of the carrying platform frame (27) corresponding to the second rhombohedron (241).
8. The large-stroke two-dimensional piezoelectric positioning table as claimed in claim 1, wherein: the first L-shaped decoupling beam (251) and the second L-shaped decoupling beam (261) are identical in structure, and the widths of the first L-shaped decoupling beam and the second L-shaped decoupling beam are 0.2-1 mm.
9. A large-stroke two-dimensional piezoelectric positioning table as claimed in claim 1, wherein: the included angle between the first diamond (231) and the second diamond (241) in the long diagonal direction is 5-30 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110948467.9A CN113676078B (en) | 2021-08-18 | 2021-08-18 | Large-stroke two-dimensional piezoelectric positioning table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110948467.9A CN113676078B (en) | 2021-08-18 | 2021-08-18 | Large-stroke two-dimensional piezoelectric positioning table |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113676078A true CN113676078A (en) | 2021-11-19 |
| CN113676078B CN113676078B (en) | 2022-07-15 |
Family
ID=78543673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110948467.9A Active CN113676078B (en) | 2021-08-18 | 2021-08-18 | Large-stroke two-dimensional piezoelectric positioning table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113676078B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117260646A (en) * | 2023-11-20 | 2023-12-22 | 上海隐冠半导体技术有限公司 | Leveling and positioning device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1644329A (en) * | 2005-01-11 | 2005-07-27 | 同济大学 | Small two-dimensional de-coupling platforms |
| CN103411106A (en) * | 2013-08-23 | 2013-11-27 | 苏州大学 | Nested rhombus-shaped amplification two-dimensional precise locating platform |
| CN106737646A (en) * | 2017-01-17 | 2017-05-31 | 西安交通大学 | It is capable of achieving translation and the Three Degree Of Freedom Piezoelectric Driving adjusting means and method that rotate |
| CN108962336A (en) * | 2018-05-22 | 2018-12-07 | 郑州轻工业学院 | A kind of two-dimensional parallel flexible micro platform based on Piezoelectric Driving |
| US20210233800A1 (en) * | 2020-07-09 | 2021-07-29 | Guangdong University Of Technology | Decoupled xy parallel micro-positioning stage |
-
2021
- 2021-08-18 CN CN202110948467.9A patent/CN113676078B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1644329A (en) * | 2005-01-11 | 2005-07-27 | 同济大学 | Small two-dimensional de-coupling platforms |
| CN103411106A (en) * | 2013-08-23 | 2013-11-27 | 苏州大学 | Nested rhombus-shaped amplification two-dimensional precise locating platform |
| CN106737646A (en) * | 2017-01-17 | 2017-05-31 | 西安交通大学 | It is capable of achieving translation and the Three Degree Of Freedom Piezoelectric Driving adjusting means and method that rotate |
| CN108962336A (en) * | 2018-05-22 | 2018-12-07 | 郑州轻工业学院 | A kind of two-dimensional parallel flexible micro platform based on Piezoelectric Driving |
| US20210233800A1 (en) * | 2020-07-09 | 2021-07-29 | Guangdong University Of Technology | Decoupled xy parallel micro-positioning stage |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117260646A (en) * | 2023-11-20 | 2023-12-22 | 上海隐冠半导体技术有限公司 | Leveling and positioning device |
| CN117260646B (en) * | 2023-11-20 | 2024-01-30 | 上海隐冠半导体技术有限公司 | Leveling and positioning device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113676078B (en) | 2022-07-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108561700B (en) | Three-degree-of-freedom ultrasonic vibration auxiliary machining precision positioning platform | |
| CN101862966B (en) | Two freedom-degree translational parallel decoupling micromotion platform | |
| CN109176420B (en) | Middle-mounted movable joint type flexible decoupling precision positioning structure | |
| CN113676078B (en) | Large-stroke two-dimensional piezoelectric positioning table | |
| CN111030505B (en) | Secondary displacement amplifying piezoelectric driver | |
| CN111667878A (en) | Large-stroke high-speed high-precision XY parallel decoupling micro-positioning platform | |
| CN109650327B (en) | Flat plate type three-dimensional large-stroke nano operating platform | |
| CN1833351A (en) | Piezoelectric electromechanical drive unit | |
| US20210140819A1 (en) | Tunable spectrum sensing device, out-of-plane motion motor and producing method thereof | |
| CN211183830U (en) | Secondary displacement amplification type piezoelectric driver | |
| CN1592071A (en) | Lever-arm displacement-increasing device | |
| CN1590966A (en) | Displacement amplifying mechanism | |
| CN100357069C (en) | 2D shifting unit | |
| CN116155136B (en) | Two-degree-of-freedom decoupling large-stroke flexible structure micro-motion platform | |
| CN114913913B (en) | Two-dimensional high-precision piezoelectric positioning platform and method | |
| CN112994512B (en) | Two-degree-of-freedom motion platform based on bending composite piezoelectric actuator | |
| CN110661505A (en) | Low-extrusion-film damping micromechanical resonator with large length-width ratio structure | |
| CN217406430U (en) | Planar piezoelectric actuator | |
| CN117260646B (en) | Leveling and positioning device | |
| CN218771812U (en) | Bidirectional-driven multistage micro-displacement amplifying device | |
| CN216290731U (en) | V-shaped sandwich type linear motor stator | |
| CN113572387B (en) | Piezoelectric actuator with tuning fork structure and working method thereof | |
| CN112448612B (en) | Piezoelectric actuation linear moving platform and working method thereof | |
| CN219351560U (en) | Positioning platform | |
| CN2639852Y (en) | Displacement enlarging mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |