CN113658913B - Array substrate manufacturing method, array substrate, electronic paper device and manufacturing method thereof - Google Patents
Array substrate manufacturing method, array substrate, electronic paper device and manufacturing method thereof Download PDFInfo
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- CN113658913B CN113658913B CN202110779659.1A CN202110779659A CN113658913B CN 113658913 B CN113658913 B CN 113658913B CN 202110779659 A CN202110779659 A CN 202110779659A CN 113658913 B CN113658913 B CN 113658913B
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- 238000000034 method Methods 0.000 claims abstract description 37
- 239000004065 semiconductor Substances 0.000 claims abstract description 25
- 238000005530 etching Methods 0.000 claims abstract description 10
- 239000011159 matrix material Substances 0.000 claims description 46
- 239000003292 glue Substances 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 4
- 229910021424 microcrystalline silicon Inorganic materials 0.000 claims description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 3
- 229920005591 polysilicon Polymers 0.000 claims description 3
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- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- 229910052682 stishovite Inorganic materials 0.000 claims description 2
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- 229910004205 SiNX Inorganic materials 0.000 claims 1
- -1 siNx Inorganic materials 0.000 claims 1
- 239000010408 film Substances 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
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- 238000004140 cleaning Methods 0.000 description 7
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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Abstract
The invention relates to the technical field of display manufacturing, and provides a manufacturing method of an array substrate, which comprises the following steps: providing a substrate; preparing a first metal layer, a common electrode layer and a metal terminal on the substrate; sequentially preparing an insulating layer and a semiconductor channel layer on the substrate; etching a first contact hole in the insulating layer, wherein the first contact hole is used for exposing the metal terminal; and preparing a second metal layer, a pixel electrode layer and a lead electrode layer on the insulating layer, wherein the lead electrode layer is communicated with the metal terminal through the contact hole. The invention also provides an array substrate, an electronic paper device and a manufacturing method of the electronic paper device. According to the invention, the first metal layer and the common electrode layer are prepared in the same process, and the second metal layer and the pixel electrode layer are prepared in the same process, so that the production efficiency of the array substrate is improved, the production cost is reduced, and the product yield is improved.
Description
Technical Field
The present invention relates to the field of display manufacturing technologies, and in particular, to an array substrate manufacturing method, an array substrate, an electronic paper device, and a manufacturing method thereof.
Background
With the continuous development of the technical level, TFT LCDs (Thin film tranSistor Liquid CRYSTAL DISPLAY, thin film transistor liquid crystal displays) are becoming a mainstream display by virtue of their light weight, flat panel, low power consumption, no radiation, excellent display quality, and the like. The TFT (Thin film tranSistor ) is used as a switching device therein, and is mainly composed of a gate electrode, a source electrode, and a drain electrode, and when a controllable voltage is applied to each pixel in the LCD, it can be selectively driven, thereby forming the TFT LCD.
The existing TFT array substrate generally needs 5 processes to be implemented, each process represents closed-loop production of a once-made pattern, namely "cleaning, depositing, coating, exposing, developing, etching and photoresist removing" one patterning cycle, and five patterning cycles are needed for completely producing the array substrate, so that the manufacturing process of the array substrate involves more equipment, more processes, long flow and long time, which not only results in lower production efficiency and higher product cost, but also increases factors requiring management and control in the production process, thereby resulting in lower product yield.
Disclosure of Invention
The invention provides an array substrate manufacturing method, an array substrate, an electronic paper device and a manufacturing method thereof, and aims to improve the production efficiency of the array substrate, reduce the production cost and improve the product yield.
An embodiment of a first aspect of the present application provides a method for manufacturing an array substrate, including:
Providing a substrate;
Preparing a first metal layer, a common electrode layer and a metal terminal on the substrate, wherein the first metal layer comprises a plurality of grids and a plurality of scanning lines, the metal terminal comprises a first metal terminal and a second metal terminal, the first metal terminal is conducted with the scanning lines, and the second metal terminal is conducted with the common electrode layer;
Sequentially preparing an insulating layer and a semiconductor channel layer on the substrate, wherein the insulating layer covers the first metal layer, the public electrode layer and the metal terminal, and the semiconductor channel layer is positioned above the insulating layer;
etching a first contact hole and a second contact hole in the insulating layer, wherein the first contact hole is used for exposing the first metal terminal, and the second contact hole is used for exposing the second metal terminal;
The method comprises the steps that a second metal layer, a pixel electrode layer and a lead electrode layer are prepared above an insulating layer at the same time, the second metal layer comprises a plurality of source electrodes, a plurality of drain electrodes and a plurality of data lines, a plurality of scanning lines and a plurality of data lines are arranged in a crossing mode to form a plurality of pixel areas, the pixel electrode layer comprises a plurality of pixel electrodes which are respectively located in the pixel areas, the pixel electrodes are in contact with the corresponding drain electrodes and are conducted, the lead electrode layer comprises a first lead electrode and a second lead electrode, the first lead electrode is conducted with the first metal terminal through a first contact hole, and the second lead electrode is conducted with the second metal terminal through a second contact hole.
In some embodiments, the semiconductor channel layer is made of one of a-Si, microcrystalline silicon, polysilicon or IGZO.
In some embodiments, after the second metal layer, the pixel electrode layer and the lead electrode layer are simultaneously prepared above the insulating layer, a cofferdam matrix is prepared on the surface of the array substrate, and covers the area where the second metal layer and the lead electrode layer are located and exposes the area where the pixel electrode layer is located.
An embodiment of a second aspect of the present application provides an array substrate, including:
a substrate;
The first metal layer, the public electrode layer and the metal terminal are all arranged on the substrate and are positioned on the same layer, the first metal layer comprises a grid electrode and a scanning line, the metal terminal comprises a first metal terminal and a second metal terminal, the first metal terminal is communicated with the scanning line, and the second metal terminal is communicated with the public electrode layer;
an insulating layer disposed over the first metal layer, the common electrode layer, and the metal terminal;
the semiconductor channel layer is arranged above the insulating layer;
The second metal layer, the pixel electrode layer and the lead electrode layer are arranged above the insulating layer, and the semiconductor channel layer is arranged between the second metal layer and the first metal layer; the second metal layer comprises a source electrode, a drain electrode and a data line, a plurality of scanning lines and a plurality of data lines are arranged in a crossing mode to form a plurality of pixel areas, the pixel electrode layer comprises a plurality of pixel electrodes respectively positioned in the pixel areas, the pixel electrodes are in contact with and are communicated with the corresponding drain electrodes, and the lead electrode layer comprises a first lead electrode and a second lead electrode;
A first contact hole provided in the insulating layer for exposing the first metal terminal, the first lead electrode being in communication with the first metal terminal through the first contact hole;
And the second contact hole is arranged in the insulating layer and used for exposing the second metal terminal, and the second lead electrode is communicated with the second metal terminal through the second contact hole.
In some embodiments, the second metal layer and the pixel electrode layer are made of one or more of Mo, gr, AL, an alloy thereof, and ITO.
In some embodiments, the insulating layer is made of one or more of SiO2, siNx, and SiONx.
In some embodiments, a cofferdam matrix is further disposed on the array substrate, and covers the area where the second metal layer and the lead electrode layer are located and exposes the area where the pixel electrode layer is located.
An embodiment of a third aspect of the present application provides an electronic paper device, including the array substrate according to the second aspect and a counter substrate, where a transparent conductive film is plated on the counter substrate, a cofferdam matrix is disposed on the array substrate, electronic ink is disposed in the cofferdam matrix, and the counter substrate and the array substrate are attached together, and the electronic ink is encapsulated in the cofferdam matrix.
An embodiment of a fourth aspect of the present application provides a method for manufacturing an electronic paper device, including:
Providing a counter substrate and an array substrate according to the second aspect, wherein the surface of the counter substrate is plated with a transparent conductive film;
manufacturing a cofferdam matrix on the surface of the array substrate;
Injecting electronic ink into the cofferdam matrix;
And attaching the opposite substrate to the array substrate through frame glue so as to encapsulate the electronic ink in the cofferdam matrix.
In some embodiments, the dam matrix is made of an insulating material, and covers the area where the second metal layer and the lead electrode layer are located and exposes the area where the pixel electrode layer is located.
The manufacturing method of the array substrate provided by the embodiment of the invention has the beneficial effects that: the first metal layer and the common electrode layer are prepared in the same process, and the second metal layer and the pixel electrode layer are prepared in the same process, so that one process is saved compared with the prior art, the production efficiency of the array substrate is greatly improved, the production cost is reduced, and meanwhile, the product yield of the array substrate is improved due to the reduction of production links.
According to the array substrate, the first metal layer and the common electrode layer are prepared in the same process in the manufacturing process, and the second metal layer and the pixel electrode layer are prepared in the same process, so that the production efficiency of the array substrate is improved, the production cost is reduced, and the product yield is improved.
According to the electronic paper device provided by the embodiment of the invention, the adopted array substrate is prepared in the same procedure by the first metal layer and the common electrode layer in the production process, and the second metal layer and the pixel electrode layer are prepared in the same procedure, so that the production efficiency of the array substrate is improved, the production efficiency of the electronic paper device is improved, and the production cost of the electronic paper device is reduced.
According to the manufacturing method of the electronic paper device, the first metal layer and the common electrode layer are prepared in the same process in the manufacturing process of the array substrate, and the second metal layer and the pixel electrode layer are prepared in the same process, so that the production efficiency of the array substrate is obviously improved, the production efficiency of the electronic paper device is further improved, and the production cost of the electronic paper device is reduced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a flow chart of a method for manufacturing an array substrate according to one embodiment of the invention;
FIG. 2 is a schematic diagram of an array substrate after forming a gate electrode, a scan line, a common electrode layer and a metal terminal according to one embodiment of the present invention;
Fig. 3 is a schematic view of the structure of the array substrate after forming an insulating layer and a semiconductor channel layer on the array substrate of fig. 2;
fig. 4 is a schematic structural view of the array substrate after forming a first contact hole on the array substrate of fig. 3;
FIG. 5 is a schematic view of the structure of the array substrate after forming source, drain, data lines and pixel electrode layers on the array substrate of FIG. 4;
FIG. 6 is a schematic diagram of an array substrate according to one embodiment of the present invention;
FIG. 7 is a schematic structural view of an array substrate after forming a cofferdam matrix in one embodiment of the present invention;
FIG. 8 is a schematic structural view of an array substrate after filling electronic ink in the dam matrix of FIG. 7;
FIG. 9 is a schematic view of a structure of an opposite substrate according to one embodiment of the present invention;
FIG. 10 is a schematic diagram of an electronic paper device according to one embodiment of the present invention;
FIG. 11 is a flow chart of a method of manufacturing an electronic paper device in one embodiment of the invention.
The meaning of the labels in the figures is:
100. An array substrate; 1. a substrate; 2. a gate; 3. a common electrode layer; 4. a metal terminal; 5. an insulating layer; 6. a semiconductor channel layer; 7. a first contact hole; 71. a second contact hole; 72. a third contact hole; 81. a source electrode; 82. a drain electrode; 9. a pixel electrode layer; 10. a lead electrode layer; 11. a third metal terminal; 200. a cofferdam matrix; 300. electronic ink; 400. an opposite substrate; 410. a transparent conductive film; 500. and (5) frame glue.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail below with reference to the accompanying drawings, i.e., embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In order to describe the technical scheme of the invention, the following description is made with reference to specific drawings and embodiments.
Referring to fig. 1 to 6, an embodiment of a first aspect of the present application provides a method for manufacturing an array substrate, including:
S10: a substrate 1 is provided.
Specifically, the substrate 1 may be a glass substrate, or the substrate 1 may be a flexible substrate, such as a flexible film attached on the glass substrate 1 to obtain a flexible substrate.
S20: a first metal layer including a plurality of gate electrodes 2 and a plurality of scanning lines GL, a common electrode layer 3 and a metal terminal 4 including a first metal terminal and a second metal terminal is prepared on the substrate 1, the first metal terminal is conducted with the scanning lines GL, and the second metal terminal is conducted with the common electrode layer 3.
Specifically, a first metal layer, a common electrode layer 3, and a metal terminal 4 are prepared on a substrate 1 using a first photomask. It will be appreciated that a patterning cycle of "cleaning, deposition, coating, exposure, development, etching and photoresist removal" is used to prepare the first metal layer, the common electrode layer 3 and the metal terminals 4 on the substrate 1, wherein the materials of the first metal layer, the common electrode layer 3 and the metal terminals 4 may be one or more of Mo, gr, AL or alloys thereof.
Alternatively, the first metal terminal, the gate electrode 2 and the scanning line GL may be integrally provided, or may be separately provided and connected to each other by a lead.
Alternatively, the second metal terminal and the common electrode layer 3 are integrally provided, or may be separately provided and connected to each other by a lead.
S30: an insulating layer 5 and a semiconductor channel layer 6 are sequentially prepared on the substrate 1, the insulating layer 5 covering the first metal layer, the common electrode layer 3 and the metal terminals 4, and the semiconductor channel layer 6 being located above the insulating layer 5.
Specifically, an insulating layer 5 and a semiconductor channel layer 6 are prepared on the substrate 1 using the second mask. It will be appreciated that the insulating layer 5 and the semiconductor channel layer 6 are sequentially prepared on the substrate 1 using one patterning cycle of "cleaning, depositing, coating, exposing, developing, etching and photoresist removing", wherein the material of the insulating layer 5 may be one or more of SiO 2, siNx, and the material of the semiconductor channel layer 6 may be one of a-Si, microcrystalline silicon, polysilicon, or IGZO.
S40: a first contact hole 7 for exposing the first metal terminal and a second contact hole 71 for exposing the second metal terminal are etched in the insulating layer.
Specifically, the first contact hole 7 and the second contact hole 71 are etched in the insulating layer 5 using the third mask. It will be appreciated that the first contact hole 7 and the second contact hole 71 may be etched by exposure, dry etching, or a test screen method, so long as the first contact hole 7 and the second contact hole 71 can be manufactured and the first contact hole 7 exposes the first metal terminal and the second contact hole 71 exposes the second metal terminal.
S50: a second metal layer including a plurality of source electrodes 81, a plurality of drain electrodes 82, and a plurality of data lines DL, a plurality of scan lines GL and a plurality of data lines DL being alternately disposed to form a plurality of pixel regions, a pixel electrode layer 9 including a plurality of pixel electrodes respectively located in the pixel regions, the pixel electrodes contacting and being conductive with the respective drain electrodes 82, and a lead electrode layer 10 including a first lead electrode and a second lead electrode, the first lead electrode being conductive with the first metal terminal through the first contact hole 7, the second lead electrode being conductive with the second metal terminal through the second contact hole 71, are simultaneously prepared over the insulating layer 5.
Specifically, the second metal layer, the pixel electrode layer 9, and the lead electrode layer 10 are simultaneously prepared over the insulating layer 5 using the fourth mask. It will be appreciated that a patterning cycle of "cleaning, depositing, coating, exposing, developing, etching and photoresist removing" is used to prepare the second metal layer, the pixel electrode layer 9 and the lead electrode layer 10 on the insulating layer 5, and the materials of the second metal layer, the pixel electrode layer 9 and the lead electrode layer 10 may be ITO, or may be one or more of Mo, gr, AL, or alloys thereof.
According to the manufacturing method of the array substrate 100, the first metal layer and the common electrode layer 3 are manufactured in the same process, and the second metal layer and the pixel electrode layer 9 are manufactured in the same process, so that compared with the prior art, one process is saved, the production efficiency of the array substrate 100 is greatly improved, the production cost is reduced, and meanwhile, the product yield of the array substrate 100 is improved due to the reduction of production links. In actual production, after the technical scheme in the embodiment is adopted, the whole production flow of the array substrate is shortened by more than 20%, the production efficiency is improved by 25%, the reject ratio is correspondingly reduced by 20% due to the fact that the process is reduced by 20% theoretically, and good economic benefits are created.
The array substrate 100 of the present invention is applicable to a wide range of applications, and can be applied to a dot matrix EPD display, a total reflection LCD display, and an AMOLED display.
Referring to fig. 1 to 7, in some embodiments, after simultaneously preparing the second metal layer, the pixel electrode layer 9 and the lead electrode layer 10 above the insulating layer 5, a dam matrix 200 is fabricated on the surface of the array substrate 100, and the dam matrix 200 covers the area where the second metal layer and the lead electrode layer 10 are located and exposes the area where the pixel electrode layer 9 is located.
Optionally, the cofferdam matrix 200 is configured as a plurality of surrounding frames, the surrounding frames are used for containing the electronic ink 300, and the frame edges of the surrounding frames cover the second metal layer and the lead electrode layer 10 and the area where the lead electrode layer 10 is located.
By adopting the above scheme, the cofferdam matrix 200 is manufactured while the second metal layer and the area where the lead electrode layer 10 is located are covered, so that the working procedures are saved, the production efficiency of the array substrate 100 is greatly improved, the production cost is reduced, and meanwhile, the product yield of the array substrate 100 is improved due to the reduction of production links.
Referring to fig. 5 and 6, an embodiment of the second aspect of the present application provides an array substrate 100 including a substrate 1, a first metal layer, a common electrode layer 3, a metal terminal 4, an insulating layer 5, a semiconductor channel layer 6, a second metal layer, a pixel electrode layer 9, a lead electrode layer 10, and a first contact hole 7 and a second contact hole 71.
The substrate 1 may be a glass substrate, or the substrate 1 may be a flexible substrate, such as a flexible film attached on a glass substrate to obtain a flexible substrate.
The first metal layer, the common electrode layer 3 and the metal terminal 4 are all arranged on the substrate 1 and located on the same layer, the first metal layer comprises a grid electrode 2 and a scanning line GL, the metal terminal comprises a first metal terminal and a second metal terminal, the first metal terminal is communicated with the scanning line GL, and the second metal terminal is communicated with the common electrode layer 3.
Specifically, the first metal layer, the common electrode layer 3 and the metal terminal 4 are prepared by using one photomask. It will be appreciated that a patterning cycle of "cleaning, deposition, coating, exposure, development, etching and photoresist removal" is used to prepare the first metal layer, the common electrode layer 3 and the metal terminals 4 on the substrate 1, wherein the materials of the first metal layer, the common electrode layer 3 and the metal terminals 4 may be one or more of Mo, gr, AL or alloys thereof.
An insulating layer 5 is provided over the first metal layer, the common electrode layer 3 and the metal terminals 4, and a semiconductor channel layer 6 is provided over the insulating layer 5.
Specifically, the insulating layer 5 and the semiconductor channel layer 6 are prepared using the same photomask. It will be appreciated that the insulating layer 5 and the semiconductor channel layer 6 are prepared on the substrate 1 using one patterning cycle of "cleaning, depositing, coating, exposing, developing, etching and photoresist removing", wherein the material of the insulating layer 5 may be one or more of SiO 2, siNx, and the material of the semiconductor channel layer 6 may be one of a-Si, microcrystalline silicon, polycrystalline silicon, or IGZO.
The second metal layer, the pixel electrode layer 9 and the lead electrode layer 10 are all arranged above the insulating layer 5, and the semiconductor channel layer 6 is arranged between the second metal layer and the first metal layer; the second metal layer includes a source electrode 81, a drain electrode 82, and a data line DL, the plurality of scan lines GL and the plurality of data lines DL are disposed to cross to form a plurality of pixel regions, the pixel electrode layer 9 includes a plurality of pixel electrodes respectively located in the pixel regions, the pixel electrodes are in contact with and are electrically connected to the respective drain electrodes 82, and the lead electrode layer 10 includes a first lead electrode and a second lead electrode.
Specifically, the second metal layer, the pixel electrode layer 9, and the lead electrode layer 10 are prepared using the same photomask. It will be appreciated that a patterning cycle of "cleaning, depositing, coating, exposing, developing, etching and photoresist removing" is used to prepare the second metal layer, the pixel electrode layer 9 and the lead electrode layer 10 on the insulating layer 5, and the materials of the second metal layer, the pixel electrode layer 9 and the lead electrode layer 10 may be ITO, or may be one or more of Mo, gr, AL, or alloys thereof.
The first contact hole 7 and the second contact hole 71 are both disposed in the insulating layer 5, and the first contact hole 7 is used for exposing the first metal terminal, the first lead electrode is conducted with the first metal terminal through the first contact hole 7, the second contact hole 71 is used for exposing the second metal terminal, and the second lead electrode is conducted with the second metal terminal through the second contact hole 71.
Specifically, the first contact hole 7 and the second contact hole 71 are etched in the insulating layer 5 using a photomask. It will be appreciated that the first contact hole 7 and the second contact hole 71 may be etched by exposure, dry etching, or silk screen printing, so long as the first contact hole 7 and the second contact hole 71 can be manufactured and the first contact hole 7 exposes the first metal terminal and the second contact hole 71 exposes the second metal terminal.
The array substrate 100 of the present invention is applicable to a dot matrix type EPD display screen and a total reflection type LCD display screen, and simultaneously, the first metal layer and the common electrode layer 3 are prepared in the same process in the manufacturing process, and the second metal layer and the pixel electrode layer 9 are prepared in the same process, so that the production efficiency of the array substrate 100 is improved, the production cost is reduced, and the product yield is improved.
Referring to fig. 6 and 7, in some embodiments, a dam matrix 200 is further disposed on the array substrate 100, where the dam matrix 200 covers the second metal layer and the area where the lead electrode layer 10 is located and exposes the area where the pixel electrode layer 9 is located.
Optionally, the cofferdam matrix 200 is configured as a plurality of surrounding frames, the surrounding frames are used for containing the electronic ink 300, and the frame edges of the surrounding frames cover the second metal layer and the lead electrode layer 10 and the area where the lead electrode layer 10 is located.
By adopting the above scheme, the cofferdam matrix 200 is manufactured while the second metal layer and the area where the lead electrode layer 10 is located are covered, so that the working procedures are saved, the production efficiency of the array substrate 100 is greatly improved, the production cost is reduced, and meanwhile, the product yield of the array substrate 100 is improved due to the reduction of production links.
Referring to fig. 6, optionally, the metal terminal 4 further includes a third metal terminal 11, the third metal terminal 11 is not conductive to the first metal terminal and the second metal terminal, the array substrate 100 further includes a third contact hole 72, the third contact hole 72 is disposed in the insulating layer 5 and is used for exposing the third metal terminal 11, and the data line DL is conductive to the third metal terminal through the third contact hole 72.
Through adopting above-mentioned scheme, can draw forth the lead wire of data line DL through the third metal terminal of insulating layer 5 below, both reduced its influence to electronic ink that follows, also make scanning line GL, data line DL and common electrode layer draw forth through the lead wire of same layer, reduced the area that the lead wire of three occupied.
Referring to fig. 11, an embodiment of the third aspect of the present application provides an electronic paper device, which includes an array substrate 100 and an opposite substrate 400 as in the second aspect, a transparent conductive film 410 is plated on the opposite substrate 400, a dam matrix 200 is disposed on the array substrate 100, an electronic ink 300 is disposed in the dam matrix 200, the opposite substrate 400 is attached to the array substrate 100, and the electronic ink 300 is encapsulated in the dam matrix 200, and the transparent conductive film 410 may be ITO for driving the electronic ink 300 together with a pixel electrode on the array substrate 100.
According to the electronic paper device provided by the embodiment of the invention, the adopted array substrate 100 is prepared in the same process by preparing the first metal layer and the common electrode layer 3 in the same process, and simultaneously preparing the second metal layer and the pixel electrode layer 9 in the same process, so that the production efficiency of the array substrate 100 is improved, the production efficiency of the electronic paper device is improved, and the production cost of the electronic paper device is reduced.
Referring to fig. 7 to 11, an embodiment of a fourth aspect of the present application provides a method for manufacturing an electronic paper device, including:
S100: a counter substrate 400 and an array substrate 100 as in the second aspect are provided, and the surface of the counter substrate 400 is plated with a transparent conductive film 410.
Specifically, the array substrate 100 is the array substrate 100 baked by the baking oven, and the transparent conductive film 410 is used for conducting electricity to the electronic ink 300.
S200: a dam matrix 200 is formed on the surface of the array substrate 100.
Specifically, the cofferdam matrix 200 is made of an insulating material, such as an organic material like OC glue or water glue, or one or more inorganic materials of SiO 2, siNx, and optionally, the cofferdam matrix 200 is manufactured on the array substrate 100 through the processes of coating, exposing, developing, and photoresist removing.
S300: the electronic ink 300 is injected into the cofferdam matrix 200.
Specifically, the electronic ink 300 may be a black-and-white electronic ink 300, or may be a color electronic ink 300, which is determined according to the display effect actually required.
S400: the opposite substrate 400 is attached to the array substrate 100 through a frame glue, so as to encapsulate the electronic ink 300 in the cofferdam matrix 200.
Specifically, the frame glue is coated on the array substrate 100 or the opposite substrate 400 by means of screen printing or frame glue, and then the opposite substrate 400 is attached to the array substrate 100, so as to encapsulate the electronic ink 300 in the cofferdam matrix 200.
According to the manufacturing method of the electronic paper device, the array substrate 100 is manufactured in the same process in the manufacturing process of the first metal layer and the common electrode layer 3, and the second metal layer and the pixel electrode layer 9 are manufactured in the same process, so that the production efficiency of the array substrate 100 is remarkably improved, the production efficiency of the electronic paper device is further improved, and the production cost of the electronic paper device is reduced.
Referring to fig. 6 and 7, in some embodiments, the dam matrix 200 is made of an insulating material, and the dam matrix 200 covers the second metal layer and the area where the lead electrode layer 10 is located and exposes the area where the pixel electrode layer 9 is located.
Optionally, the cofferdam matrix 200 is configured as a plurality of surrounding frames, the surrounding frames are used for containing the electronic ink 300, and the frame edges of the surrounding frames cover the second metal layer, the lead electrode layer 10 and the area where the lead electrode layer 10 is located. The enclosure frame may be a rectangular frame, but is not limited thereto.
By adopting the scheme, the cofferdam matrix 200 is manufactured and the areas where the second metal layer and the lead electrode layer 10 are located are covered, the working procedures are saved, the production efficiency of the array substrate 100 is greatly improved, the production cost is reduced, meanwhile, the product yield of the array substrate 100 is improved due to the reduction of production links, the influence of an electric field on the lead electrode layer on the induction of the electronic ink 300 is avoided, the areas where the pixel electrode layer 9 is located are exposed, the induction of the electric field of the pixel electrode layer 9 on the electronic ink 300 is enhanced, the display of an electronic paper device is clearer and finer, and meanwhile, the semiconductor channel can be covered and protected.
The above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention, and are intended to be included in the scope of the present invention.
Claims (10)
1. An array substrate manufacturing method, comprising:
Providing a substrate;
Preparing a first metal layer, a common electrode layer and a metal terminal on the substrate, wherein the first metal layer, the common electrode layer and the metal terminal are positioned on the same layer, the first metal layer comprises a plurality of grids and a plurality of scanning lines, the metal terminal comprises a first metal terminal, a second metal terminal and a third metal terminal, the first metal terminal is communicated with the scanning lines, the second metal terminal is communicated with the common electrode layer, the second metal terminal and the common electrode layer are integrally or separately arranged, and the third metal terminal is not communicated with the first metal terminal and the second metal terminal;
Sequentially preparing an insulating layer and a semiconductor channel layer on the substrate, wherein the insulating layer covers the first metal layer, the public electrode layer and the metal terminal, and the semiconductor channel layer is positioned above the insulating layer;
Etching a first contact hole, a second contact hole and a third contact hole in the insulating layer, wherein the first contact hole is used for exposing the first metal terminal, the second contact hole is used for exposing the second metal terminal, and the third contact hole is used for exposing the third metal terminal;
The method comprises the steps that a second metal layer, a pixel electrode layer and a lead electrode layer are prepared above an insulating layer at the same time, the second metal layer comprises a plurality of source electrodes, a plurality of drain electrodes and a plurality of data wires, the data wires are communicated with a third metal terminal through third contact holes, a plurality of scanning wires and a plurality of data wires are arranged in a crossing mode to form a plurality of pixel areas, the pixel electrode layer comprises a plurality of pixel electrodes which are respectively located in the pixel areas, the pixel electrodes are in contact with and are communicated with the corresponding drain electrodes, the lead electrode layer comprises a first lead electrode and a second lead electrode, the first lead electrode is communicated with the first metal terminal through the first contact holes, and the second lead electrode is communicated with the second metal terminal through the second contact holes.
2. The method of manufacturing an array substrate according to claim 1, wherein the semiconductor channel layer is made of one of a-Si, microcrystalline silicon, polysilicon, and IGZO.
3. The method of manufacturing an array substrate according to claim 1, wherein after the second metal layer, the pixel electrode layer and the lead electrode layer are simultaneously prepared above the insulating layer, a bank matrix is fabricated on the surface of the array substrate, and the bank matrix covers the area where the second metal layer and the lead electrode layer are located and exposes the area where the pixel electrode layer is located.
4. An array substrate, characterized by comprising:
a substrate;
The first metal layer, the public electrode layer and the metal terminal are all arranged on the substrate and are positioned on the same layer, the first metal layer comprises a grid electrode and a scanning line, the metal terminal comprises a first metal terminal, a second metal terminal and a third metal terminal, the first metal terminal is communicated with the scanning line, the second metal terminal is communicated with the public electrode layer, the second metal terminal and the public electrode layer are integrally or separately arranged, and the third metal terminal is not communicated with the first metal terminal and the second metal terminal ;
An insulating layer disposed over the first metal layer, the common electrode layer, and the metal terminal;
the semiconductor channel layer is arranged above the insulating layer;
The second metal layer, the pixel electrode layer and the lead electrode layer are arranged above the insulating layer, and the semiconductor channel layer is arranged between the second metal layer and the first metal layer; the second metal layer comprises a source electrode, a drain electrode and a data line, a plurality of scanning lines and a plurality of data lines are arranged in a crossing mode to form a plurality of pixel areas, the pixel electrode layer comprises a plurality of pixel electrodes respectively positioned in the pixel areas, the pixel electrodes are in contact with and are communicated with the corresponding drain electrodes, and the lead electrode layer comprises a first lead electrode and a second lead electrode;
A first contact hole provided in the insulating layer for exposing the first metal terminal, the first lead electrode being in communication with the first metal terminal through the first contact hole;
a second contact hole provided in the insulating layer for exposing the second metal terminal, the second lead electrode being in communication with the second metal terminal through the second contact hole;
and a third contact hole, wherein the first contact hole is arranged in the insulating layer and used for exposing the third metal terminal, and the data line is communicated with the third metal terminal through the third contact hole.
5. The array substrate of claim 4, wherein the second metal layer and the pixel electrode layer are made of one or more of Mo, gr, AL, an alloy thereof, and ITO.
6. The array substrate of claim 4, wherein the insulating layer is made of one or more of SiO2, siNx, and SiNx.
7. The array substrate according to claim 4, further comprising a dam matrix, wherein the dam matrix covers the area where the second metal layer and the lead electrode layer are located and exposes the area where the pixel electrode layer is located.
8. An electronic paper device, characterized by comprising an array substrate and a counter substrate according to any one of claims 4-7, wherein a transparent conductive film is plated on the counter substrate, a cofferdam matrix is arranged on the array substrate, electronic ink is arranged in the cofferdam matrix, the counter substrate is attached to the array substrate, and the electronic ink is packaged in the cofferdam matrix.
9. A method of manufacturing an electronic paper device, comprising:
Providing a counter substrate and an array substrate according to any one of claims 4 to 7, wherein the surface of the counter substrate is plated with a transparent conductive film;
manufacturing a cofferdam matrix on the surface of the array substrate;
Injecting electronic ink into the cofferdam matrix;
And attaching the opposite substrate to the array substrate through frame glue so as to encapsulate the electronic ink in the cofferdam matrix.
10. The method of manufacturing an electronic paper device according to claim 9, wherein the bank matrix is made of an insulating material, covers the area where the second metal layer and the lead electrode layer are located, and exposes the area where the pixel electrode layer is located.
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