CN113654585A

CN113654585A - Automatic device for calibrating pressure sensor and acceleration sensor

Info

Publication number: CN113654585A
Application number: CN202110927581.3A
Authority: CN
Inventors: 冯常宁
Original assignee: Nanjing Yingruichuang Electronic Technology Co Ltd
Current assignee: Shanghai Yijie Electronic Technology Co ltd; Nanjing Yingruichuang Electronic Technology Co Ltd
Priority date: 2021-08-11
Filing date: 2021-08-11
Publication date: 2021-11-16
Anticipated expiration: 2041-08-11
Also published as: CN113654585B

Abstract

The invention relates to an automation device for calibrating a pressure sensor and an acceleration sensor, comprising: a feeding assembly; the first grabbing component is matched with the feeding component and used for transferring a sensor to be tested in the feeding component; the testing component is used for measuring the to-be-tested sensor transferred by the first grabbing component; and the second grabbing component is matched with the testing component and used for transferring the measured sensor on the testing component. The above-mentioned scheme that this application provided uses through the first cooperation that snatchs the subassembly and the subassembly is snatched to the second, need not artifical the intervention, and whole automation operation has greatly promoted whole production efficiency, has also reduced the risk of manual operation simultaneously.

Description

Automatic device for calibrating pressure sensor and acceleration sensor

Technical Field

The invention relates to the technical field of sensors, in particular to an automatic device for calibrating a pressure sensor and an acceleration sensor.

Background

In recent years, due to the high-speed growth of the automotive electronics and consumer electronics industries, the development of the global MEMS (Micro electro mechanical System) sensor industry is very rapid, and the demand of the domestic market for MEMS sensors such as silicon microphones, acceleration sensors, gyroscopes, high-precision pressure sensors, and gas sensors is rapidly increasing. Among them, the pressure sensor and the acceleration sensor occupy almost 50% of the MEMS sensor market share.

No matter what kind of sensor, need calibrate before putting into use, also known as calibrate, one of the most important composition part in calibrating is temperature calibration; at least two temperature points are needed for conventional temperature calibration, and at least two temperature points are needed for verification after calibration is finished; even if the calibration and verification temperature points coincide, at least three temperature points may be required.

At present, aiming at calibration of a pressure sensor and an acceleration sensor, a plurality of mature automatic production schemes are internationally provided, for example, HT3580 of Multitest of XCERRA and SPEA in italy in germany, and HT3580 of Multitest of XCERRA and SPEA are generally divided into three major parts, namely a feeding station, a testing station and a blanking station, so that although the equipment has excellent operation stability, temperature control accuracy and the like, due to the temperature calibration characteristic of the sensor, a chip must be rotated at least three times in the same equipment, manual intervention is required for each rotation, and the production efficiency is inevitably reduced.

Disclosure of Invention

In view of the above, it is necessary to provide an automated apparatus for calibrating a pressure sensor and an acceleration sensor, which is used for solving the problem that the existing calibration setup for a pressure sensor and an acceleration sensor is inefficient.

The invention provides an automatic device for calibrating a pressure sensor and an acceleration sensor, which comprises:

a feeding assembly;

the first grabbing component is matched with the feeding component and used for transferring a sensor to be tested in the feeding component;

the testing component is used for measuring the to-be-tested sensor transferred by the first grabbing component;

and the second grabbing component is matched with the testing component and is used for transferring the sensor after measurement on the testing component.

Above-mentioned an automation equipment for pressure sensor and acceleration sensor are markd, snatch the cooperation that the subassembly was snatched the subassembly through first subassembly and second and use, need not artifical intervention, whole automatic operation has greatly promoted whole production efficiency, has also reduced the risk of manual operation simultaneously.

In one embodiment, the feeding assembly comprises a first box body and a feeding tray, the first grabbing assembly comprises a first mechanical arm and a first clamping jaw, and the first clamping jaw is connected with the first mechanical arm;

the feeding tray and the first mechanical arm are arranged on the first box body, and the first mechanical arm is used for controlling the first clamping jaw to transfer the sensor to be tested in the feeding tray.

In one embodiment, the feeding assembly further comprises an empty tray transfer part, and the empty tray transfer part comprises a belt conveying mechanism, and the belt conveying mechanism is arranged on the first box body.

In one embodiment, the test device further comprises a second box body, the second box body is tightly attached to the first box body, and the plurality of test components are arranged on the second box body in parallel.

In one embodiment, the testing assembly comprises a U-shaped supporting seat, an electric cylinder, an upper pressure cavity, a lower pressure cavity, a heating and detecting module, a circuit board and a controller;

the U-shaped supporting seat is arranged on the second box body, a first side plate on the U-shaped supporting seat is tightly attached to the upper surface of the second box body, the upper pressure cavity is arranged on one side, facing the first side plate, of a second side plate on the U-shaped supporting seat, the lower pressure cavity is arranged on one side, facing the first side plate, of the second side plate, the electric cylinder penetrates through the second side plate from top to bottom and then is connected with the upper pressure cavity, the heating and detecting module is arranged on the upper pressure cavity, the circuit board is arranged on one side, facing the upper pressure cavity, of the lower pressure cavity, and the heating and detecting module and the circuit board are respectively connected with the controller through wires.

In one embodiment, the testing assembly further includes a wire drag chain disposed on the U-shaped supporting seat, and the heating and detecting module is connected to the controller through the wire drag chain.

In one embodiment, the test assembly further comprises a first seal ring disposed on a side of the upper pressure chamber facing the lower pressure chamber and a second seal ring disposed on a side of the lower pressure chamber facing the upper pressure chamber.

In one embodiment, the device further comprises a third box body, a first defective product placing disc and a qualified product placing disc;

the second snatchs the subassembly and includes second arm and second clamping jaw, the second clamping jaw with the second arm is connected, the third box with the second box is hugged closely, the third box with first box is located the relative both sides of second box, first defective products are placed a set and are fixed to be set up on the third box, the setting of dish is placed to the certified products is in on the third box, just the dish can be placed to the certified products the third box is last to move, the second arm is used for control the second clamping jaw will the sensor after measuring on the test assembly shifts to corresponding first defective products place the dish or in the qualified products place the dish.

In one embodiment, the device further comprises a second defective product placing disc and a belt conveying mechanism, wherein the belt conveying mechanism is arranged on the third box body, and the qualified product placing disc and the second defective product placing disc are respectively placed on the corresponding belt conveying mechanisms.

In one embodiment, the tray changer further comprises a third mechanical arm, a replacement tray and a lifting mechanism, wherein the third mechanical arm and the lifting mechanism are arranged on the third box body, the replacement tray is arranged on the lifting mechanism, and a third clamping jaw on the third mechanical arm is used for transferring the replacement tray.

Drawings

Fig. 1 is a schematic structural diagram of an automated apparatus for calibrating a pressure sensor and an acceleration sensor according to an embodiment of the present invention;

FIG. 2 is a top view of FIG. 1;

FIG. 3 is a partial schematic view of FIG. 1;

FIG. 4 is a schematic view of FIG. 3 with the second housing removed;

FIG. 5 is a partial schematic view of FIG. 4;

FIG. 6 is a schematic view of the U-shaped support seat shown in FIG. 5 with the U-shaped support seat removed;

FIG. 7 is a schematic view of the upper pressure chamber of FIG. 5;

FIG. 8 is a schematic view of the U-shaped supporting seat shown in FIG. 5.

The figures are labeled as follows:

10. a first case; 20. a first robot arm; 30. feeding a material plate; 40. an empty tray transfer member; 50. a second case; 60. testing the component; 601. a U-shaped supporting seat; 60111. a first side plate; 60112. a second side plate; 60113. a third side plate; 602. an electric cylinder; 603. an upper pressure chamber; 6031. a first seal ring; 604. routing a drag chain; 605. a lower pressure chamber; 606. a heating and detection module; 607. a first air intake hole; 608. a circuit board; 609. a second air intake hole; 6010. a circuit board wire outlet joint; 6011. testing the chip; 701. a first transfer table; 702. a second transfer table; 703. a third transfer table; 80. a third box body; 90. a second mechanical arm; 100. a third mechanical arm; 110. a first defective product placement tray; 120. placing a qualified product tray; 130. a second defective product placing tray; 140. the disc is replaced.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

As shown in fig. 1, in an embodiment of the present invention, an automated apparatus for calibrating a pressure sensor and an acceleration sensor is provided, which includes: the test device comprises a feeding assembly, a first grabbing assembly, a testing assembly 60 and a second grabbing assembly, wherein the first grabbing assembly is matched with the feeding assembly and used for transferring a sensor to be tested in the feeding assembly, the testing assembly 60 is used for measuring the sensor to be tested transferred from the first grabbing assembly, and the second grabbing assembly is matched with the testing assembly 60 and used for transferring the sensor measured on the testing assembly 60.

By adopting the technical scheme, the first grabbing component and the second grabbing component are matched for use, manual intervention is not needed, full automation operation is achieved, the overall production efficiency is greatly improved, and meanwhile, the risk of manual operation is also reduced.

In some embodiments, as shown in fig. 1 in combination with fig. 2, the feeding assembly in the present application includes a first casing 10 and a feeding tray 30, and the first grasping assembly includes a first robot arm 20 and a first clamping jaw, wherein the first clamping jaw is connected to the first robot arm 20, the feeding tray 30 and the first robot arm 20 are both disposed on the first casing 10, and the first robot arm 20 is configured to control the first clamping jaw to transfer a sensor to be tested in the feeding tray 30.

Specifically, the belt conveying mechanism is arranged on the first box 10, and as the belt conveying mechanism is the prior art, the description is not repeated here, the feeding tray 30 is placed on the belt conveying mechanism, and the feeding tray 30 is driven by the belt conveying mechanism to move, so that the feeding tray 30 is convenient to move on the first box 10, and the sensor to be tested is placed in the feeding tray 30.

When the test device is used, after the belt conveying mechanism moves the feeding tray 30 to the preset position, the belt conveying mechanism stops rotating, and at the moment, the first clamping jaw on the first mechanical arm 20 is controlled to grab the to-be-tested sensor in the feeding tray 30, and the grabbed to-be-tested sensor is placed at the preset position.

In some embodiments, as shown in fig. 1 in combination with fig. 2, the feeding assembly of the present application further includes an empty tray transfer member 40, and the empty tray transfer member 40 includes a belt conveyor mechanism, and the belt conveyor mechanism is disposed on the first casing 10.

When the test device is used, after the sensors to be tested in the feeding tray 30 are grabbed, the first clamping jaws on the first mechanical arms 20 are controlled to place the feeding tray 30 grabbed with the sensors on the empty tray transfer part 40 for conveying, so that the feeding tray 30 grabbed with the sensors is convenient to transfer.

In some embodiments, as shown in fig. 1 in combination with fig. 2, the automated device for calibration of pressure sensors and acceleration sensors in the present application further comprises a second housing 50, the second housing 50 being attached to the first housing 10, and a plurality of test assemblies 60 being disposed in parallel on the second housing 50. The arrangement of the plurality of test assemblies 60 facilitates the one-time completion of the calibration and verification of the multipoint temperature of the sensor, thereby greatly improving the efficiency of automatic production.

In some embodiments, as shown in FIG. 5 in combination with FIGS. 6 and 8, the testing assembly 60 of the present application includes a U-shaped support base 601, an electric cylinder 602, an upper pressure chamber 603, a lower pressure chamber 605, a heating and detection module 606, a circuit board 608, and a controller, the U-shaped supporting seat 601 is disposed on the second box 50, a first side plate 60111 on the U-shaped supporting seat 601 is closely attached to the upper surface of the second box 50, an upper pressure chamber 603 is disposed on one side of the second side plate 60112 on the U-shaped supporting seat 601 facing the first side plate 60111, a lower pressure chamber 605 is disposed on one side of the first side plate 60111 facing the second side plate 60112, the electric cylinder 602 penetrates through the second side plate 60112 from top to bottom and is connected to the upper pressure chamber 603, the heating and detecting module 606 is disposed on the upper pressure chamber 603, the circuit board 608 is disposed on one side of the lower pressure chamber 605 facing the upper pressure chamber 603, and the heating and detecting module 606 and the circuit board 608 are connected to the controller through wires, respectively.

When the device is used, the first clamping jaw on the first mechanical arm 20 is controlled to grab the sensor to be tested in the feeding tray 30, the grabbed sensor to be tested is placed on the first transfer table 701 (as shown in fig. 3 or fig. 4), then the sensor to be tested on the first transfer table 701 is grabbed and placed on the circuit board 608, the test chip 6011 shown in fig. 6 is the sensor to be tested, then the controller controls the electric cylinder 602 to drive the upper pressure cavity 603 to approach the lower pressure cavity 605 until the upper pressure cavity 603 and the lower pressure cavity 605 are tightly attached, at this time, the heating and detecting module 606 is started, and meanwhile, the detection result is sent to the host through the controller.

Further, after the upper pressure chamber 603 is fastened to the lower pressure chamber 605, in order to conveniently pressurize the chamber formed between the upper pressure chamber 603 and the lower pressure chamber 605, as shown in fig. 6, a first air inlet hole 607 is provided on the upper pressure chamber 603, and a second air inlet hole 609 is provided on the lower pressure chamber 605.

In some embodiments, to facilitate connecting wires, as shown in fig. 5 or fig. 6, the testing assembly 60 further includes a trace drag chain 604, the trace drag chain 604 is disposed on the U-shaped supporting base 601, the heating and detecting module 606 is connected to the controller through the trace drag chain 604, and a circuit board outlet connector 6010 on the circuit board 608 is also connected to the controller through the trace drag chain 604.

In some embodiments, to ensure the sealing performance of the upper pressure chamber 603 after the lower pressure chamber 605 is fastened, as shown in FIG. 7, the test assembly 60 further includes a first seal ring 6031 and a second seal ring, the first seal ring 6031 is disposed on a side of the upper pressure chamber 603 facing the lower pressure chamber 605, and the second seal ring is disposed on a side of the lower pressure chamber 605 facing the upper pressure chamber 603.

In some embodiments, as shown in fig. 1 in combination with fig. 2, the automated apparatus for pressure sensor and acceleration sensor calibration of the present application further comprises a third housing 80, a first reject placement tray 110, and a good placement tray 120, the second gripper assembly comprises a second robotic arm 90 and a second gripper jaw, wherein, the second clamping jaw is connected with the second mechanical arm 90, the third box 80 is clung to the second box 50, the third box 80 and the first box 10 are positioned at two opposite sides of the second box 50, the first defective product placing tray 110 is fixedly arranged on the third box 80, the qualified product placing tray 120 is arranged on the third box 80, and the acceptable product placing tray 120 can move on the third box 80, and the second mechanical arm 90 is used for controlling the second clamping jaw to transfer the sensor measured on the testing assembly 60 to the corresponding first defective product placing tray 110 or the acceptable product placing tray 120.

When the test fixture is used, the first clamping jaws on the first mechanical arm 20 grab the sensors to be tested in the upper tray 30, the grabbed sensors to be tested are placed on the first transfer table 701 and the second transfer table 702 (as shown in fig. 3 or fig. 4), then the sensors to be tested on the first transfer table 701 and the second transfer table 702 are grabbed and placed on the corresponding test assemblies 60, after the sensors to be tested are tested, the controller controls the second clamping jaws on the second mechanical arm 90 to place the sensors after the testing on the third transfer table 703, and then the sensors on the third transfer table 703 are placed on the corresponding first defective product placing tray 110 or the qualified product placing tray 120.

In some embodiments, as shown in fig. 1, the automated equipment for calibrating a pressure sensor and an acceleration sensor in the present application further includes a second defective product placing tray 130 and a belt conveying mechanism, the belt conveying mechanism is disposed on the third casing 80, and the non-defective product placing tray 120 and the second defective product placing tray 130 are respectively placed on the corresponding belt conveying mechanisms.

Specifically, two belt conveying mechanisms are arranged on the third box 80 in the present application, wherein one belt conveying mechanism is provided with a qualified product placing tray 120, and the other belt conveying mechanism is provided with a second defective product placing tray 130, when the number of sensors placed in the first defective product placing tray 110 reaches a preset number, redundant defective products are placed in the second defective product placing tray 130, and when the number of sensors placed in the second defective product placing tray 130 reaches the preset number, the corresponding belt conveying mechanism is started to transport the second defective product placing tray 130 away; meanwhile, the qualified product placing tray 120 is also placed on the corresponding belt conveying mechanism, so that the qualified product placing tray 120 is convenient to transfer.

In some embodiments, as shown in fig. 1 in combination with fig. 2, the automated apparatus for calibration of pressure sensors and acceleration sensors in the present application further includes a third robot arm 100, a replacement disc 140, and a lifting mechanism, wherein the third robot arm 100 and the lifting mechanism are both disposed on the third casing 80, the replacement disc 140 is disposed on the lifting mechanism, and a third jaw on the third robot arm 100 is used for transferring the replacement disc 140.

When the automatic replacing device is used, after the sensors in the qualified product placing disc 120 or the sensors in the second defective product placing disc 130 reach the preset number and are transferred away, the lifting mechanism is started, the lifting mechanism can select an electric telescopic rod, the electric telescopic rod drives the replacing disc 140 to rise to the preset height, and then the third clamping jaw on the third mechanical arm 100 grabs the replacing disc 140 and places the replacing disc 140 on the corresponding belt conveying mechanism.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. An automated apparatus for pressure sensor and acceleration sensor calibration, comprising:

a feeding assembly;

the testing component (60) is used for measuring the to-be-tested sensor transferred by the first grabbing component;

and the second grabbing component is matched with the testing component (60) and is used for transferring the sensor measured on the testing component (60).

2. The automated equipment for pressure sensor and acceleration sensor calibration according to claim 1, characterized in that said feeding assembly comprises a first box (10) and a feeding tray (30), said first gripping assembly comprises a first mechanical arm (20) and a first gripping jaw, said first gripping jaw is connected with said first mechanical arm (20);

the feeding tray (30) and the first mechanical arm (20) are arranged on the first box body (10), and the first mechanical arm (20) is used for controlling the first clamping jaw to transfer a sensor to be tested in the feeding tray (30).

3. The automated equipment for pressure sensor and acceleration sensor calibration according to claim 2, characterized in that said feeding assembly further comprises an empty tray transfer (40), said empty tray transfer (40) comprising a belt conveyor, said belt conveyor being arranged on said first box (10).

4. The automated apparatus for pressure sensor and acceleration sensor calibration according to claim 2, characterized in that it further comprises a second box (50), said second box (50) being in close proximity to said first box (10), a plurality of said test assemblies (60) being arranged side by side on said second box (50).

5. The automated equipment for pressure sensor and acceleration sensor calibration according to claim 4, characterized in that the test assembly (60) comprises a U-shaped support base (601), an electric cylinder (602), an upper pressure chamber (603), a lower pressure chamber (605), a heating and detection module (606), a circuit board (608) and a controller;

the U-shaped supporting seat (601) is arranged on the second box body (50), a first side plate (60111) on the U-shaped supporting seat (601) is clung to the upper surface of the second box body (50), the upper pressure chamber (603) is arranged on one side, facing the first side plate (60111), of the second side plate (60112) on the U-shaped supporting seat (601), the lower pressure chamber (605) is provided on a side of the first side plate (60111) facing the second side plate (60112), the electric cylinder (602) is connected with the upper pressure cavity (603) after passing through the second side plate (60112) from top to bottom, the heating and detection module (606) is arranged on the upper pressure chamber (603), the circuit board (608) is arranged on a side of the lower pressure chamber (605) facing the upper pressure chamber (603), the heating and detecting module (606) and the circuit board (608) are respectively connected with the controller through leads.

6. The automated equipment for pressure sensor and acceleration sensor calibration according to claim 5, characterized in that said test assembly (60) further comprises a wire drag chain (604), said wire drag chain (604) is disposed on said U-shaped support base (601), said heating and detecting module (606) is connected with said controller through said wire drag chain (604).

7. The automated apparatus for pressure sensor and acceleration sensor calibration according to claim 5, characterized in that the test assembly (60) further comprises a first sealing ring (6031) and a second sealing ring, the first sealing ring (6031) being arranged on the side of the upper pressure chamber (603) facing the lower pressure chamber (605), the second sealing ring being arranged on the side of the lower pressure chamber (605) facing the upper pressure chamber (603).

8. The automated equipment for pressure sensor and acceleration sensor calibration according to claim 5, characterized by further comprising a third box (80), a first bad product placing tray (110) and a good product placing tray (120);

the second grabbing component comprises a second mechanical arm (90) and a second clamping jaw, the second clamping jaw is connected with the second mechanical arm (90), the third box body (80) is tightly attached to the second box body (50), the third box body (80) and the first box body (10) are located on two opposite sides of the second box body (50), the first defective product placing plate (110) is fixedly arranged on the third box body (80), the qualified product placing plate (120) is arranged on the third box body (80), the qualified product placing plate (120) can move on the third box body (80), and the second mechanical arm (90) is used for controlling the second clamping jaw to transfer a sensor measured on the testing component (60) to the corresponding first defective product placing plate (110) or the qualified product placing plate (120).

9. The automated equipment for pressure sensor and acceleration sensor calibration according to claim 8, characterized by further comprising a second bad product placing tray (130) and a belt conveying mechanism, wherein the belt conveying mechanism is disposed on the third box (80), and the good product placing tray (120) and the second bad product placing tray (130) are respectively placed on the corresponding belt conveying mechanism.

10. The automated apparatus for pressure sensor and acceleration sensor calibration according to claim 9, characterized by further comprising a third robotic arm (100), a replacement disc (140) and a lifting mechanism, said third robotic arm (100) and said lifting mechanism being both arranged on said third box (80), said replacement disc (140) being arranged on said lifting mechanism, a third jaw on said third robotic arm (100) being used for transferring said replacement disc (140).