CN113640908A - Optical glass optical filter and grinding processing method thereof - Google Patents

Optical glass optical filter and grinding processing method thereof Download PDF

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Publication number
CN113640908A
CN113640908A CN202110985228.0A CN202110985228A CN113640908A CN 113640908 A CN113640908 A CN 113640908A CN 202110985228 A CN202110985228 A CN 202110985228A CN 113640908 A CN113640908 A CN 113640908A
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Prior art keywords
grinding
optical filter
angle
error
optical
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Chinese (zh)
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徐斌
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Wuhan Zhengke Technology Co ltd
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Wuhan Zhengke Technology Co ltd
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Priority to CN202110985228.0A priority Critical patent/CN113640908A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/0031Machines having several working posts; Feeding and manipulating devices
    • B24B13/0037Machines having several working posts; Feeding and manipulating devices the lenses being worked by different tools, e.g. for rough-grinding, fine-grinding, polishing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/14Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of optical work, e.g. lenses, prisms

Abstract

The invention discloses an optical glass filter and a grinding processing method thereof, in particular to the technical field of optical glass processing, after the shape of an inner circle slicer is determined on the surface of the optical filter, the angle of a cutting position is detected by comparing an angle measuring instrument, so that the actual cutting position error between the upper and lower angles of an arc-shaped side surface and the deviation of the actual cutting angle are judged and measured as the angle difference, then according to the degree of the corresponding angle, under the grinding speed of 600 meshes and the constant grinding pressure state, different independent grinding states with long classification time are carried out according to the numerical value of the error, the error between the angles is further reduced, when the angle precision error between a plurality of angles is maintained within 10 seconds, a fine grinding process can be carried out, and the mode can carry out targeted grinding after the error measurement on different optical filters, the rejection rate can be effectively reduced when the device is used, and the production efficiency is improved.

Description

Optical glass optical filter and grinding processing method thereof
Technical Field
The invention relates to the technical field of optical glass processing, in particular to an optical glass optical filter and a grinding processing method thereof.
Background
The filter is made by mixing special dye into resin or glass material, and can play a role of filtering according to different absorption capacities to light with different wavelengths. The colored glass filter has the advantages of being stable, uniform, good in beam quality, low in manufacturing cost, stable and uniform in surface quality, and the surface quality of the filter, mainly the surface of the filter inevitably has defects such as scratches and pits, the most common specification of the surface quality is the scratch and pit specification described by MIL-PRF-13830B, the pit name is calculated by dividing the pit diameter in microns by 10, and the scratch pit specification is usually in the range of 80 to 50 and is called as standard quality; in the range of 60 to 40 as accurate mass; and in the range of 20 to 10 will be considered as a high precision quality, surface flatness is one of the measurements of surface precision for measuring deviations of the plane of a mirror, window plate, prism or plano mirror, where deviations of smoothness are usually measured in terms of a ripple value (λ), which is composed of a plurality of wavelength test sources, one stripe corresponding to a wavelength of 1/2, and a smoothness of 1 λ represents a general quality class; smoothness is λ/4, which represents the exact quality level; the smoothness is lambda/20, which represents a high-precision quality grade, wherein in the manufacturing process of the current optical filter, due to the low-cost manufacturing mode, the importance degree in the grinding process of the production and the manufacturing is low, most of the current optical filters adopt a direct processing mode, so that defective products are easy to appear in the conventional general grinding process after the processing, and an accurate grinding mode aiming at the surface deviation of different optical filters is not provided, so that the effect of reducing the defective products is achieved.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides an optical glass filter and a grinding processing method thereof, and the technical problems to be solved by the invention are as follows: most of the existing optical filters adopt a direct processing mode, so that inferior-quality products are easy to appear in the conventional general grinding process after the optical filters are processed, and an accurate grinding mode aiming at the surface deviation of different optical filters is not provided, so that the effect of reducing the inferior-quality products is achieved.
In order to achieve the purpose, the invention provides the following technical scheme: the optical glass optical filter comprises a substrate, wherein arc-shaped surfaces are arranged on the upper surface and the lower surface of the substrate, the side surface of the substrate is arranged to be a plane, the substrate is made of K9 glass, the clear aperture of the substrate is 85%, the angular precision of the plane and the side surface is less than 5 seconds, the surface smoothness of the substrate is 40-20, the upper surface, the lower surface and the side surface of the substrate are chamfered, and the chamfer value and the smoothness are respectively 0.25mm 45 degrees and lambda/10.
A grinding processing method of an optical glass filter comprises the following steps:
s1, preprocessing: after the K9 glass material raw material of the optical filter is prepared, firstly, the surface of the optical filter is pretreated through an ultrasonic cleaning machine, the surface of the optical filter is kept clean and then dried through an oven, the optical filter is fixed into an inner circle slicer after drying is finished, the optical filter is cut into the shapes of a plane and an arc surface through the inner circle slicer immediately, and then the angle of the cutting position is detected through a comparison goniometer after cutting so as to judge the actual cutting position error between the upper angle and the lower angle of the arc side surface and the deviation from the actual cutting angle and mainly judge whether the over-cutting phenomenon exists or not.
S2, rough grinding: after the angle difference is measured, whether impurities or cracks exist in the raw material in the manufacturing process is checked through a microscope, the raw material is fixed into the surface of a plane grinder to be subjected to rough grinding processing, grinding processing is carried out by adopting an abrasive material with the fineness of 600 meshes in the first circular polishing process, different independent grinding states with different classification duration are carried out according to the error values of a plurality of angles measured in the preprocessing process during processing according to the degrees of corresponding angles and the grinding speed of 600 meshes and the constant grinding pressure state, so that the error among the angles is further reduced, and the fine grinding process can be carried out when the angle precision error among the angles is maintained within 10 seconds.
S3, fine grinding: the surface of the optical filter is kept to be ultrasonically cleaned for the second time in the using process, the surface of the optical filter is kept to be cleaned and then placed on the surface of a purification workbench through a direction finder and a comparison angle meter to be subjected to numerical value detection, corresponding detection numerical values are transmitted to the ring polishing machine at any time, the optical filter is fixed inside the ring polishing machine at any time, the ring polishing machine is kept to perform fine grinding according to the measurement numerical values of the surface of the optical filter, the grinding precision is kept to be 6000-plus 8000 meshes in the fine grinding process, the surface of the optical filter is synchronously sprayed with grinding fluid in the fine grinding process, the optical filter is taken out and detected after 2-3min of grinding, and the flatness and the side radian error of the upper surface are kept within 5 seconds.
S4, finished product detection: and then fixing the optical filter on the surface of the spectrometer after the optical filter has proper precision, detecting the transmittance of the optical filter by matching with a helium-neon laser, when the transmittance is qualified and the transmittance of the spectrum is detected by the spectrometer, immediately placing the optical filter into the ring polishing machine, and then performing chamfer grinding on the upper and lower angles of the side surface of the optical filter by actively controlling ring polishing on a correction disc of the ring polishing machine until the angle reaches 0.25mm 45 degrees.
And S5, processing a finished product, namely, after the optical filter is processed, placing the optical filter into an ultrasonic cleaning machine, removing the grinding fluid on the surface, observing the position of the chamfer without a notch through a microscope, and packaging the optical filter through soft foam.
As a further scheme of the invention: the specific model of the purification workbench is YJ-1450, the ultrasonic cleaning agent is B5200D, the spectrometer is FGY-01, the inside diameter slicer is J5060-1, and the orientation device is DX-2.
As a further scheme of the invention: the classified independent grinding state described in S2 is a specific classified independent grinding state in which the precision on one side is compared with the precision on the other side, and when the ratio of the precision on both sides is a: b, the ratio of the grinding time on the a side is Ta > Tb, and vice versa.
As a further scheme of the invention: the specific determination method of the over-cut phenomenon depicted in S1 is as follows:
standard finished product value: q, maximum error value: w, minimum error value: e, the number of the first and second groups,
and judging that the cutting is not performed when q is greater than w and is greater than e, and judging that the cutting is performed in an over-cutting state when w is greater than q and is greater than e or w is greater than e and is greater than q.
The invention has the beneficial effects that:
1. the invention determines the shape of the filter by the inside diameter slicer, detects the angle of the cutting position by the comparison angle measuring instrument, judges the actual cutting position error between the upper and lower angles of the arc-shaped side surface and the deviation of the actual cutting angle when the angle difference is measured, inspects whether impurities or cracks exist in the raw material in the manufacturing process by a microscope, then fixes the raw material in the surface of the plane grinder for rough grinding treatment, adopts grinding material with the fineness of 600 meshes in the first circular polishing process, and classifies the independent grinding state of the duration according to the difference of a plurality of angles measured in the preprocessing process, then according to the degree of the corresponding angle, according to the grinding speed of 600 meshes and the constant grinding pressure state, according to the value of the error, the method can achieve targeted grinding after error measurement of different optical filters, effectively reduce the rejection rate and improve the production efficiency when the method is used.
2. The invention fixes the optical filter inside the ring polishing machine, keeps the ring polishing machine to carry out fine grinding according to the measured value of the surface of the optical filter, keeps the grinding precision to be 6000-8000 meshes in the fine grinding process, immediately sprays grinding fluid on the surface of the optical filter synchronously in the fine grinding process, immediately takes out the optical filter for grinding for 2-3min, detects the optical filter until the error between the flatness of the upper surface and the side radian is kept within 5 seconds, immediately fixes the optical filter on the surface of a spectrometer after the optical filter has proper precision, simultaneously detects the transmittance of the optical filter by cooperating with a helium-neon laser, immediately places the optical filter inside the ring polishing machine after the transmittance is qualified and the transmittance of the spectrum is detected by the spectrometer, immediately carries out chamfer grinding on the upper and lower angles of the side surface of the optical filter by actively controlled ring polishing of a correcting disc of the ring polishing machine, until the angle to 0.25mm 45 degrees can, this kind of mode can keep good grinding precision when using, divide into two segmentations' grinding simultaneously and make its grinding can handle respectively through thickness, promote efficiency, carry out the chamfer operation to it simultaneously, make the difficult condition appearance that appears bursting apart of its corner.
Drawings
FIG. 1 is a schematic three-dimensional structure of an optical glass filter according to the present invention;
in the figure: 1, base body and 2 chamfering.
Detailed Description
The technical solution of the present patent will be described in further detail with reference to the following embodiments.
As shown in the figure, the present invention provides a technical solution: an optical glass optical filter and a grinding method thereof comprise a substrate 1, wherein arc-shaped surfaces are arranged on the upper surface and the lower surface of the substrate 1, the side surface of the substrate 1 is arranged to be a plane, the substrate 1 is made of K9 glass, the clear aperture of the substrate 1 is 85%, the angle precision between the plane and the side surface is less than 5 seconds, the surface smoothness of the substrate 1 is 40-20, the upper surface, the lower surface and the side surface of the substrate 1 are both processed by chamfering 2, and the numerical value and the smoothness of the chamfering 2 are 0.25mm 45 degrees and lambda/10 respectively.
A grinding processing method of an optical glass filter comprises the following steps:
s1, preprocessing: after the K9 glass material raw material of the optical filter is prepared, firstly, the surface of the optical filter is pretreated through an ultrasonic cleaning machine, the surface of the optical filter is kept clean and then dried through an oven, the optical filter is fixed into an inner circle slicer after drying is finished, the optical filter is cut into the shapes of a plane and an arc surface through the inner circle slicer immediately, and then the angle of the cutting position is detected through a comparison goniometer after cutting so as to judge the actual cutting position error between the upper angle and the lower angle of the arc side surface and the deviation from the actual cutting angle and mainly judge whether the over-cutting phenomenon exists or not.
S2, rough grinding: after the angle difference is measured, whether impurities or cracks exist in the raw material in the manufacturing process is checked through a microscope, the raw material is fixed into the surface of a plane grinder to be subjected to rough grinding processing, grinding processing is carried out by adopting an abrasive material with the fineness of 600 meshes in the first circular polishing process, different independent grinding states with different classification duration are carried out according to the error values of a plurality of angles measured in the preprocessing process during processing according to the degrees of corresponding angles and the grinding speed of 600 meshes and the constant grinding pressure state, so that the error among the angles is further reduced, and the fine grinding process can be carried out when the angle precision error among the angles is maintained within 10 seconds.
S3, fine grinding: the surface of the optical filter is kept to be ultrasonically cleaned for the second time in the using process, the surface of the optical filter is kept to be cleaned and then placed on the surface of a purification workbench through a direction finder and a comparison angle meter to be subjected to numerical value detection, corresponding detection numerical values are transmitted to the ring polishing machine at any time, the optical filter is fixed inside the ring polishing machine at any time, the ring polishing machine is kept to perform fine grinding according to the measurement numerical values of the surface of the optical filter, the grinding precision is kept to be 6000-plus 8000 meshes in the fine grinding process, the surface of the optical filter is synchronously sprayed with grinding fluid in the fine grinding process, the optical filter is taken out and detected after 2-3min of grinding, and the flatness and the side radian error of the upper surface are kept within 5 seconds.
S4, finished product detection: and then fixing the optical filter on the surface of the spectrometer after the optical filter has proper precision, detecting the transmittance of the optical filter by matching with a helium-neon laser, when the transmittance is qualified and detecting the transmittance of the spectrum by the spectrometer, immediately placing the optical filter into a ring polishing machine, and then performing chamfer 2 grinding on the upper and lower angles of the side surface of the optical filter by actively controlling ring polishing on a correction disc of the ring polishing machine until the angle reaches 0.25mm x 45 degrees.
And S5, processing a finished product, namely, after the optical filter is processed, placing the optical filter into an ultrasonic cleaning machine, removing the grinding fluid on the surface, observing the position of the chamfer 2 through a microscope without a gap, and immediately packaging the optical filter through soft foam.
The specific model of the purification workbench is YJ-1450, the ultrasonic cleaning agent is B5200D model, the spectrometer is FGY-01 model, the inside diameter slicer is J5060-1 model, the orientation device is DX-2 model, the classified frequently independent grinding state described in S2 is adopted, the specifically classified independent grinding state is obtained by comparing the precision of one side with the precision of the other side, when the precision ratio of the two sides is a: B, if a > B, the grinding frequently ratio of the a side is Ta > Tb, and vice versa, and the specific judgment method of the over-cutting phenomenon depicted in S1 is as follows: standard finished product value: q, maximum error value: w, minimum error value: e, judging whether the cutting is not performed when q is larger than w and larger than e, and judging that the cutting is performed in an over-cutting state when w is larger than q and larger than e or w is larger than e and larger than q.
The invention fixes the optical filter inside the ring polishing machine, keeps the ring polishing machine to carry out fine grinding according to the measured value of the surface of the optical filter, keeps the grinding precision to be 6000-8000 meshes in the fine grinding process, immediately sprays grinding fluid on the surface of the optical filter synchronously in the fine grinding process, immediately takes out the optical filter for 2-3min grinding, detects the optical filter until the error between the flatness of the upper surface and the side radian is kept within 5 seconds, immediately fixes the optical filter on the surface of a spectrometer after the optical filter has proper precision, simultaneously detects the transmittance of the optical filter by cooperating with a helium-neon laser, immediately places the optical filter inside the ring polishing machine after the transmittance is qualified and the transmittance of the spectrum is detected by the spectrometer, immediately carries out chamfering 2 on the upper and lower angles of the side surface of the optical filter by actively controlled ring polishing of a correcting disc of the ring polishing machine, until the angle to 0.25mm 45 degrees can, this kind of mode can keep good grinding precision when using, divide into two segmentations' grinding simultaneously and make its grinding can handle respectively through thickness, promote efficiency, carry out chamfer 2 operation to it simultaneously, make the difficult condition appearance that appears bursting apart of its corner.
The points to be finally explained are: although the present invention has been described in detail with reference to the general description and the specific embodiments, on the basis of the present invention, the above embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (5)

1. An optical glass filter comprising a substrate (1), characterized in that: the high-precision chamfering machine is characterized in that arc-shaped surfaces are arranged on the upper surface and the lower surface of the base body (1), the side face of the base body (1) is a plane, the base body (1) is made of K9 glass, the clear aperture of the base body (1) is 85%, the angle precision between the plane and the side face is less than 5 seconds, the surface finish of the base body (1) is 40-20, chamfering (2) is carried out on the upper surface, the lower surface and the side face of the base body (1), and the numerical value and the smoothness of the chamfering (2) are respectively 0.25mm 45 degrees and lambda/10.
2. A grinding processing method of an optical glass filter is characterized in that: use of an optical glass filter according to claim 1, comprising the steps of:
s1, preprocessing: after the K9 glass material raw material of the optical filter is prepared, firstly, the surface of the optical filter is pretreated through an ultrasonic cleaning machine, the surface of the optical filter is kept clean and then dried through an oven, the optical filter is fixed into an inner circle slicer after drying is finished, then the optical filter is cut into the shapes of a plane and an arc surface through the inner circle slicer, and then the angle of the cutting position is detected through a comparison goniometer after cutting, so that the optical filter judges the actual cutting position error between the upper and lower angles of the arc side surface and the deviation from the actual cutting angle and mainly judges whether the over-cutting phenomenon exists or not;
s2, rough grinding: after the angle difference is measured, whether impurities or cracks exist in the raw material in the manufacturing process or not is checked through a microscope, the raw material is fixed into the surface of a plane grinder to be subjected to rough grinding processing, grinding processing is carried out by adopting an abrasive material with the fineness of 600 meshes in the first circular polishing process, different independent grinding states with different classification duration are carried out according to the error values of a plurality of angles measured in the preprocessing process during processing according to the degrees of the corresponding angles and the grinding speed with 600 meshes and the constant grinding pressure state, so that the error among the angles is further reduced, and the fine grinding process can be carried out when the angle precision error among the plurality of angles is maintained within 10 seconds;
s3, fine grinding: the surface of the optical filter is kept to be ultrasonically cleaned for the second time in the using process, the surface of the optical filter is kept to be cleaned and then placed on the surface of a purification workbench through a direction finder and a comparison angle meter to be subjected to numerical value detection, corresponding detection numerical values are transmitted to the ring polishing machine at any time, the optical filter is fixed inside the ring polishing machine at any time, the ring polishing machine is kept to perform fine grinding according to the measurement numerical values of the surface of the optical filter, the grinding precision is kept to be 6000-plus 8000 meshes in the fine grinding process, the surface of the optical filter is synchronously sprayed with grinding fluid in the fine grinding process, the optical filter is taken out and detected after 2-3min of grinding, and the flatness of the upper surface and the error of the side radian are kept within 5 seconds;
s4, finished product detection: fixing the optical filter on the surface of a spectrometer after the optical filter has proper precision, detecting the transmittance of the optical filter by matching with a helium-neon laser, when the transmittance is qualified and detecting the transmittance of a spectrum by the spectrometer, immediately placing the optical filter into a ring polishing machine, and then performing chamfer (2) grinding on the upper and lower angles of the side surface of the optical filter by actively controlling ring polishing on a correction disc of the ring polishing machine until the angle reaches 0.25mm 45 ℃;
and S5, processing a finished product, namely, after the optical filter is processed, placing the optical filter into an ultrasonic cleaning machine, removing the grinding fluid on the surface, observing the position of the chamfer (2) through a microscope without a gap, and immediately packaging the optical filter through soft foam.
3. An optical glass filter and a grinding method thereof according to claim 2, wherein: the specific model of the purification workbench is YJ-1450, the ultrasonic cleaning agent is B5200D, the spectrometer is FGY-01, the inside diameter slicer is J5060-1, and the orientation device is DX-2.
4. An optical glass filter and a grinding method thereof according to claim 2, wherein: the classified independent grinding state described in S2 is a specific classified independent grinding state in which the precision on one side is compared with the precision on the other side, and when the ratio of the precision on both sides is a: b, the ratio of the grinding time on the a side is Ta > Tb, and vice versa.
5. An optical glass filter and a grinding method thereof according to claim 4, wherein: the specific determination method of the over-cut phenomenon depicted in S1 is as follows:
standard finished product value: q, maximum error value: w, minimum error value: e, the number of the first and second groups,
and judging that the cutting is not performed when q is greater than w and is greater than e, and judging that the cutting is performed in an over-cutting state when w is greater than q and is greater than e or w is greater than e and is greater than q.
CN202110985228.0A 2021-08-26 2021-08-26 Optical glass optical filter and grinding processing method thereof Pending CN113640908A (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09323247A (en) * 1996-06-04 1997-12-16 Nikon Corp Process of wafer-thin optical member and parts thereof
JP2004344996A (en) * 2003-05-20 2004-12-09 Daishinku Corp Method for manufacturing optical filter, and optical filter by the same manufacturing method
KR20060122687A (en) * 2005-05-27 2006-11-30 니폰 덴키 가라스 가부시키가이샤 The edge processing device of a glass substrate and the edge processing method thereof
JP2010221304A (en) * 2009-03-19 2010-10-07 Showa Denko Kk Manufacturing method of disk-shaped substrate
JP2015153999A (en) * 2014-02-18 2015-08-24 信越半導体株式会社 Semiconductor wafer manufacturing method
CN110900312A (en) * 2018-09-14 2020-03-24 蔡赞峰 Precise brush grinding and polishing process
CN112296765A (en) * 2020-10-05 2021-02-02 中山市光大光学仪器有限公司 Wedge-shaped ultrathin optical glass processing technology

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09323247A (en) * 1996-06-04 1997-12-16 Nikon Corp Process of wafer-thin optical member and parts thereof
JP2004344996A (en) * 2003-05-20 2004-12-09 Daishinku Corp Method for manufacturing optical filter, and optical filter by the same manufacturing method
KR20060122687A (en) * 2005-05-27 2006-11-30 니폰 덴키 가라스 가부시키가이샤 The edge processing device of a glass substrate and the edge processing method thereof
JP2010221304A (en) * 2009-03-19 2010-10-07 Showa Denko Kk Manufacturing method of disk-shaped substrate
JP2015153999A (en) * 2014-02-18 2015-08-24 信越半導体株式会社 Semiconductor wafer manufacturing method
CN110900312A (en) * 2018-09-14 2020-03-24 蔡赞峰 Precise brush grinding and polishing process
CN112296765A (en) * 2020-10-05 2021-02-02 中山市光大光学仪器有限公司 Wedge-shaped ultrathin optical glass processing technology

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