CN113639776A - Graphene-based mechanical vibrator high-temperature sensor and working method - Google Patents
Graphene-based mechanical vibrator high-temperature sensor and working method Download PDFInfo
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Abstract
The invention provides a high-temperature sensor based on a graphene mechanical vibrator and a working method, wherein the graphene mechanical vibrator comprises a patterned substrate and graphene to form an optical resonant cavity; the graphene mechanical vibrator high-temperature sensor comprises an optical resonant cavity, a detection laser source, a driving laser source, an optical fiber collimator, a lens, a precision pinhole, a high-reflection mirror, a half-wave plate, a quarter-wave plate, a polarization beam splitter, an electro-optical modulator, an illumination light source, a CCD camera, a photoelectric detector and a lock-in amplifier; compared with the traditional sensor, the graphene sensor has the advantages of simple preparation process, small volume, small mass, high resonant frequency, high quality factor, high sensitivity and the like, and has good stability at high temperature. The graphene mechanical vibrator sensor with light weight, high sensitivity and high temperature resistance has wide application prospect in the field of modern precision measurement.
Description
Technical Field
The invention relates to the technical fields of design and preparation of graphene mechanical vibrators, cavity optomechanics, phonon information devices, precision measurement and the like, in particular to a high-temperature sensor based on a graphene mechanical vibrator and a working method.
Background
The sensor technology is taken as the leading-edge technology of modern science and technology and plays an important role in different industries. The sensor senses and measures a physical quantity change from an external environment, converts the physical quantity change into a signal which can be interpreted by a person or a machine, and is widely applied to the fields of transportation industry, communication field, biological medical treatment, aeronautical and shipboard, industrial technology and the like. In recent years, sensors tend to be miniaturized and miniaturized more and more, and with the progress of micro-nano manufacturing technology, novel micro-nano mechanical vibrators become powerful candidates for manufacturing the sensors. The graphene has ultra-small size and unique mechanical, thermal and electrical properties, and the nano mechanical vibrator sensor prepared based on the graphene has the characteristics of small volume, light weight, high resonant frequency, high quality factor, high sensitivity and the like, and can be widely used for measuring physical quantities such as temperature, pressure, mass, acceleration and the like. The method comprises the following steps that an interference optical resonant cavity is formed by graphene and a pre-patterned substrate, the light intensity of driving laser is modulated into sine light intensity through an electro-optical modulator, and microwave driving signals are radiated to the surface of a graphene mechanical oscillator to perform resonance driving; the detection laser is incident to the graphene mechanical vibrator, the reflected light intensity of the detection laser changes along with the change of the depth of the optical resonant cavity and is modulated by the graphene mechanical vibration mode, the reflected light intensity signal is converted into an electric signal through a photoelectric detector, and the resonant mode of the graphene mechanical vibrator can be extracted through a phase-locked amplifier. When the physical quantity of the external environment changes, the physical property of the graphene mechanical vibrator changes along with the change of the physical quantity, the vibration mode shifts, and the change of the resonance mode is measured and calibrated, so that the sensing of the change of the physical quantity can be realized. Voltage is applied to a source electrode and a drain electrode of the graphene mechanical vibrator to generate joule heat, the temperature of the graphene rises, and the graphene mechanical vibrator has good thermal stability at high temperature, so that the graphene mechanical vibrator can normally work at high temperature.
Disclosure of Invention
In view of the defects of the prior art, the invention aims to provide a graphene mechanical vibrator and a working method thereof.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a high-temperature sensor based on a graphene mechanical vibrator comprises a detection light path, a driving light path, a convergence light path and a reflection light path;
along the direction of a detection light path, the device sequentially comprises a detection laser source, a first single-mode optical fiber 1-1 optically coupled with space emitted by the detection laser source, a first optical fiber coupler 2-1 connected with the first single-mode optical fiber 1-1, a first half-wave plate 3-1 aligned with the center of the first optical fiber coupler 2-1, a first polarization beam splitter prism 4-1 aligned with emergent light of the first half-wave plate 3-1, a first lens 5-1 aligned with emergent light of the first polarization beam splitter prism 4-1, a first precise pinhole 6-1 aligned with the center of the first lens 5-1, a second lens 5-2 aligned with the center of the first precise pinhole 6-1, a third half-wave plate 3-3 aligned with the center of the second lens 5-2, a first high-reflection mirror 7-1 for reflecting emergent light of the third half-wave plate 3-3, a second high-reflection mirror 7-1, a third high-reflection mirror 7-1, a second high-reflection mirror 7, A third polarization beam splitter prism 4-3 aligned with emergent light of the first high-reflection mirror 7-1, and a fourth half-wave plate 3-4 aligned with emergent light of the third polarization beam splitter prism 4-3; an illumination light source 8 is arranged on one side, far away from the third half-wave plate 3-4, of the third polarization beam splitter prism 4-3;
along driving the light path direction, include in proper order: the device comprises a driving laser source, a second single-mode fiber 1-2 optically coupled with space of the driving laser source, a second fiber coupler 2-2 connected with the second single-mode fiber 1-2, an electro-optic modulator 19 for modulating the driving light source, a second half-wave plate 3-2 aligned with the electro-optic modulator 19, a second polarization beam splitter prism 4-2 aligned with emergent light of the second half-wave plate 3-2, a third lens 5-3 aligned with emergent light of the second polarization beam splitter prism 4-2, a second precision pinhole 6-2 aligned with the center of the third lens 5-3, a fourth lens 5-4 aligned with the center of the second precision pinhole 6-2, and a second high-reflection mirror 7-2 for reflecting the emergent light of the fourth lens 5-4;
the converging light path comprises a dichroic mirror 9 for converging a detection light path emitted by a fourth half-wave plate 3-4 and a driving light path reflected by a second high-reflection mirror 7-2, a fourth polarization beam splitter prism 4-4 aligned with emergent light of the dichroic mirror 9, a quarter-wave plate 10 aligned with emergent light of the fourth polarization beam splitter prism 4-4, an objective lens 11 aligned with the center of the quarter-wave plate 10, a graphene mechanical oscillator 12 aligned with the center of the objective lens 11, and a nanometer electric displacement table 13 for controlling the movement of the graphene mechanical oscillator 12;
the reflection light path comprises a beam splitter 14 aligned with the emergent light of the fourth polarization beam splitter prism 4-4, a CCD camera 15 aligned with a part of emergent light of the beam splitter 14, a third high-reflection mirror 7-3 aligned with the other part of emergent light of the beam splitter 14, a lens 5-5 aligned with the emergent light of the third high-reflection mirror 7-3, a filter 16 aligned with the center of the lens 5-5, a photoelectric detector 17 aligned with the filter 16, and a phase-locked amplifier 18 electrically connected with the photoelectric detector 17.
As a preferred mode, the graphene of the graphene mechanical oscillator and a pre-patterned substrate form an interference optical resonant cavity, the laser light intensity of a driving light path is modulated into sine light intensity by an electro-optical modulator 19, and a microwave driving signal generated by a phase-locked amplifier is radiated to the surface of the graphene mechanical oscillator 12 for resonance driving; laser of a detection light path is incident to the graphene mechanical vibrator 12, the reflected light intensity of the graphene mechanical vibrator changes along with the change of the depth of the optical resonant cavity and is modulated by a graphene mechanical vibration mode, a reflected light intensity signal is converted into an electric signal through the photoelectric detector 17, and the resonant mode of the graphene mechanical vibrator is extracted through the lock-in amplifier 18.
Preferably, the third half-wave plate 3-3 and the first high-reflection mirror 7-1 form an included angle of 45 degrees, and the centers of the third half-wave plate and the first high-reflection mirror are aligned; the fourth lens 5-4 and the second high reflection mirror 7-2 form an included angle of 45 degrees and are aligned in the center.
As a preferred mode, the graphene mechanical vibrator 12 comprises a pre-patterned substrate, wherein the pre-patterned substrate is a silicon substrate with a microelectrode structure, which is prepared by a micro-nano processing technology and is prepared by photoetching, electron beam exposure, plasma etching and evaporation coating; the graphene is obtained by mechanically stripping blocky graphite, the blocky graphite is suspended on a substrate through two-dimensional material transfer, and the pre-patterned substrate and the graphene form an interference optical resonant cavity.
Preferably, the first single mode fiber 1-1 is a 633nm wavelength single mode fiber, and the second single mode fiber 1-2 is a 795nm wavelength single mode fiber.
Preferably, the nano electric displacement stage 13 is a three-axis displacement stage, and moves in a three-dimensional direction in space, and initially, the center of the objective lens 11 and the center of the graphene mechanical oscillator 12 are aligned by the movement of the displacement stage.
Preferably, the detection laser source is a 633nm single-mode continuous light laser, and the laser driving source is a 795nm single-mode continuous light laser.
Preferably, beam splitter 14 is a 10:90 beam splitter; and/or white LEDs as illumination sources for CCD camera imaging.
The invention also provides a working method of the high-temperature sensor based on the graphene mechanical vibrator, which comprises the following steps: the detection laser source emits laser, the laser is coupled to a first single-mode optical fiber 1-1, is collimated by a first optical fiber coupler 2-1, enters a first half-wave plate 3-1 to change the polarization direction of the light, then enters a first polarization beam splitter prism 4-1, enters a first precise pinhole 6-1 and a second lens 5-2 through a first lens 5-1, performs spatial filtering on the light beam, adjusts the laser mode, then enters a third half-wave plate 3-3, enters a first high-reflection mirror 7-1 to change the light path direction, enters a third polarization beam splitter prism 4-3, passes through a fourth half-wave plate 3-4, and enters a dichroic mirror 9;
the driving laser source emits laser, the laser is coupled to a second single-mode fiber 1-2, the laser is collimated by a second fiber coupler 2-2, the light intensity is modulated into sine change by an electro-optic modulator 19, the light enters a second half-wave plate 3-2 to change the polarization direction of the light and then enters a second polarization beam splitter prism 4-2, the emergent light intensity of the second polarization beam splitter prism 4-2 is adjusted by rotating the second half-wave plate 3-2, the emergent light passes through a third lens 5-3, a second precise pinhole 6-2 and a fourth lens 5-4 to perform spatial filtering on the light beam, the laser mode is adjusted, the light path direction is changed by a second high-reflection mirror 7-2, and the light beam enters a dichroic mirror 9;
a detection light path emitted by a fourth half-wave plate 3-4 is transmitted by a dichroic mirror 9, a driving light path reflected by a second high-reflection mirror 7-2 is reflected by the dichroic mirror 9, the two are converged and jointly incident into a fourth polarization beam splitter prism 4-4, the polarization state of emergent light is changed by a quarter-wave plate 10, the emergent light is focused to a graphene mechanical vibrator 12 fixed on an electric nano displacement table 13 through an objective lens 11, detection laser reflected by the graphene mechanical vibrator 12 is collected by the objective lens 11, the polarization state of light is changed by the quarter-wave plate 10 again, the light is reflected by the fourth polarization beam splitter prism 4-4, reflected laser after the fourth polarization beam splitter prism 4-4 is split by a beam splitter 14, one beam of the reflected laser enters a CCD camera 15 for imaging, the other beam changes the direction of the light path by a third high-reflection mirror 7-3, is focused by a fifth lens 5-5 and filtered by a filter plate 16, the laser obtained after being focused by the fifth lens 5-5 and filtered by the filter 16 is incident to the photoelectric detector 17, an optical signal is converted into an electric signal, the electric signal is input to the phase-locked amplifier 18, and a resonance mode signal of the graphene mechanical oscillator 12 is extracted.
Preferably, the operating method further includes: focusing the driving laser and the detection laser on an optical resonant cavity, then dividing a laser beam reflected by the graphene harmonic oscillator 12 into two beams by using a 90:10 beam splitter 14, wherein one beam is used for imaging, and the other beam is converted into an electrical signal by a photoelectric detector 17 and is input into a phase-locked amplifier 18 to extract a resonant mode signal of the graphene mechanical oscillator 12; when the physical quantity of the external environment changes, the physical property of the graphene mechanical vibrator 12 changes along with the change, the vibration mode shifts, and the change of the resonance mode is measured and calibrated to realize the sensing of the change of the physical quantity.
The invention has the beneficial effects that: compared with the traditional sensor, the graphene sensor has the advantages of simple preparation process, small volume, small mass, high resonant frequency, high quality factor, high sensitivity and the like, and has good stability at high temperature. The graphene mechanical vibrator sensor with light weight, high sensitivity and high temperature resistance has wide application prospect in the field of modern precision measurement.
Drawings
Fig. 1 is a structural diagram of a graphene-based mechanical oscillator high-temperature sensor according to the present invention.
Fig. 2 is an optical microscope image of the graphene mechanical oscillator based high-temperature sensor of the present invention.
Fig. 3 is a typical amplitude and phase spectrum of a graphene-based mechanical vibrator resonant mode according to the present invention.
Fig. 4 is a phase diagram of the graphene-based mechanical vibrator resonant mode changing with heating current according to the invention.
1-1 is a first single mode fiber, 1-2 is a second single mode fiber, 2-1 is a first fiber coupler, 2-2 is a second fiber coupler, 3-1 is a first half-wave plate, 3-2 is a second half-wave plate, 3-3 is a third half-wave plate, 3-4 is a fourth half-wave plate, 4-1 is a first polarization beam splitter prism, 4-2 is a second polarization beam splitter prism, 4-3 is a third polarization beam splitter prism, 4-4 is a fourth polarization beam splitter prism, 5-1 is a first lens, 5-2 is a second lens, 5-3 is a third lens, 5-4 is a fourth lens, 5-5 is a fifth lens, 6-1 is a first precision pinhole, 6-2 is a second precision pinhole, 7-1 is a first high-reflection mirror, 7-2 is a second high-reflection mirror, 7-3 is a third high reflection mirror, 8 is a lighting source, 9 is a dichroic mirror, 10 is a quarter-wave plate, 11 is an objective lens, 12 is a graphene mechanical oscillator, 13 is an electric nanometer displacement table, 14 is a beam splitter, 15 is a CCD camera, 16 is a filter, 17 is a photoelectric detector, 18 is a phase-locked amplifier, and 19 is an electro-optical modulator.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
The embodiment provides a graphene mechanical vibrator 12, which comprises a pre-patterned substrate, wherein the pre-patterned substrate is a silicon substrate with a microelectrode structure, which is prepared by a micro-nano processing technology and is prepared by photoetching, electron beam exposure, plasma etching and evaporation coating; the graphene is obtained by mechanically stripping blocky graphite, the blocky graphite is suspended on a substrate through two-dimensional material transfer, and the pre-patterned substrate and the graphene form an interference optical resonant cavity.
When laser is incident to the optical resonant cavity, the light intensity of the driving laser is modulated into sine light intensity by an electro-optical modulator, and a microwave driving signal generated by a phase-locked amplifier is radiated to the surface of the graphene mechanical oscillator 12 for resonance driving; laser of a detection light path is incident to the graphene mechanical vibrator 12, the reflected light intensity of the graphene mechanical vibrator changes along with the change of the depth of the optical resonant cavity and is modulated by a graphene mechanical vibration mode, a reflected light intensity signal is converted into an electric signal through the photoelectric detector 17, and the resonant mode of the graphene mechanical vibrator is extracted through the lock-in amplifier 18. When the physical quantity of the external environment changes, the property of the graphene mechanical vibrator changes, the vibration mode shifts, and the change of the resonance mode is measured and calibrated, so that the sensing of the change of the physical quantity can be realized.
As shown in fig. 1, the present embodiment further provides a graphene-based mechanical oscillator high temperature sensor, which includes a detection light path, a driving light path, a convergence light path, and a reflection light path;
along the direction of a detection light path, the device sequentially comprises a detection laser source, a first single-mode optical fiber 1-1 optically coupled with space emitted by the detection laser source, a first optical fiber coupler 2-1 connected with the first single-mode optical fiber 1-1, a first half-wave plate 3-1 aligned with the center of the first optical fiber coupler 2-1, a first polarization beam splitter prism 4-1 aligned with emergent light of the first half-wave plate 3-1, a first lens 5-1 aligned with emergent light of the first polarization beam splitter prism 4-1, a first precise pinhole 6-1 aligned with the center of the first lens 5-1, a second lens 5-2 aligned with the center of the first precise pinhole 6-1, a third half-wave plate 3-3 aligned with the center of the second lens 5-2, a first high-reflection mirror 7-1 for reflecting emergent light of the third half-wave plate 3-3, a second high-reflection mirror 7-1, a third high-reflection mirror 7-1, a second high-reflection mirror 7, A third polarization beam splitter prism 4-3 aligned with emergent light of the first high-reflection mirror 7-1, and a fourth half-wave plate 3-4 aligned with emergent light of the third polarization beam splitter prism 4-3; an illumination light source 8 is arranged on one side, far away from the third half-wave plate 3-4, of the third polarization beam splitter prism 4-3;
along driving the light path direction, include in proper order: the device comprises a driving laser source, a second single-mode fiber 1-2 optically coupled with space of the driving laser source, a second fiber coupler 2-2 connected with the second single-mode fiber 1-2, an electro-optic modulator 19 for modulating the driving light source, a second half-wave plate 3-2 aligned with the electro-optic modulator 19, a second polarization beam splitter prism 4-2 aligned with emergent light of the second half-wave plate 3-2, a third lens 5-3 aligned with emergent light of the second polarization beam splitter prism 4-2, a second precision pinhole 6-2 aligned with the center of the third lens 5-3, a fourth lens 5-4 aligned with the center of the second precision pinhole 6-2, and a second high-reflection mirror 7-2 for reflecting the emergent light of the fourth lens 5-4;
the converging light path comprises a dichroic mirror 9 for converging a detection light path emitted by a fourth half-wave plate 3-4 and a driving light path reflected by a second high-reflection mirror 7-2, a fourth polarization beam splitter prism 4-4 aligned with emergent light of the dichroic mirror 9, a quarter-wave plate 10 aligned with emergent light of the fourth polarization beam splitter prism 4-4, an objective lens 11 aligned with the center of the quarter-wave plate 10, a graphene mechanical oscillator 12 aligned with the center of the objective lens 11, and a nanometer electric displacement table 13 for controlling the movement of the graphene mechanical oscillator 12;
the reflection light path comprises a beam splitter 14 aligned with the emergent light of the fourth polarization beam splitter prism 4-4, a CCD camera 15 aligned with a part of emergent light of the beam splitter 14, a third high-reflection mirror 7-3 aligned with the other part of emergent light of the beam splitter 14, a lens 5-5 aligned with the emergent light of the third high-reflection mirror 7-3, a filter 16 aligned with the center of the lens 5-5, a photoelectric detector 17 aligned with the filter 16, and a phase-locked amplifier 18 electrically connected with the photoelectric detector 17.
An included angle between the third half-wave plate 3-3 and the first high-reflection mirror 7-1 is 45 degrees, and the centers of the third half-wave plate and the first high-reflection mirror are aligned; the fourth lens 5-4 and the second high reflection mirror 7-2 form an included angle of 45 degrees and are aligned in the center.
In this embodiment, the first single mode fiber 1-1 is a single mode fiber having a wavelength of 633nm, and the second single mode fiber 1-2 is a single mode fiber having a wavelength of 795 nm. Laser is coupled into a space optical path by utilizing a 633nm single-mode fiber 1-1 and a 795nm single-mode fiber 1-2, a first fiber coupler 2-1 and a second fiber coupler 2-2 respectively.
The electro-optical modulator 19 modulates the 795nm driving laser, and modulates the light intensity of the 795nm laser into a sinusoidally varying light intensity by adjusting the direct-current bias voltage and the sinusoidal signal voltage.
The polarization beam splitter prism divides the laser beam into two beams, the half-wave plate is fixed on the rotary mounting seat, the two beams are combined for use, the polarization direction of the light is changed by rotating the wave plate by utilizing the polarization characteristic of the laser, the ratio of the light intensity of the two beams of laser is changed, and the adjustment of the laser intensity in each part of light path is realized.
The combination of the fourth polarization beam splitter prism 4-4 and the quarter wave plate 10 is used to form an optical isolator, so that reflected light is separated from an incident light beam, and it is ensured that laser with polarization characteristics does not return along an incident light path, which is convenient for subsequent imaging and detection of graphene mechanical oscillator resonance signals.
The high reflector is used for changing the direction of the light path and folding the light path to save space.
The sample is vertically fixed on an electric nanometer displacement platform 13, the movable range of the sample is 5mm multiplied by 5mm, and the step pitch is 100 nm. And the displacement platform accurately adjusts the displacement of the graphene mechanical oscillator sample, so that the light spot is accurately focused to the target position of the sample.
The nano electric displacement table 13 is a three-axis displacement table, moves along a three-dimensional direction in space, and initially aligns the center of the objective lens 11 with the center of the graphene mechanical oscillator 12 through the movement of the displacement table.
In this embodiment, the detection laser source adopts a 633nm single-mode continuous optical laser, and the laser drive source adopts a 795nm single-mode continuous optical laser.
The beam splitter 14 is a 10:90 beam splitter; and/or white LEDs as illumination sources for CCD camera imaging.
Adjusting a half-wave plate and a quarter-wave plate in a light path to focus two beams of laser on the graphene at a certain power; the source and drain electrodes of the graphene mechanical oscillator are electrified to generate joule heat, the temperature of the graphene rises, and the graphene mechanical oscillator has good thermal stability at high temperature, as shown in fig. 2, which shows that the graphene mechanical oscillator can normally work at high temperature.
The graphene and the pre-patterned substrate form an interference optical resonant cavity, the light intensity of the driving laser is modulated into sine light intensity by an electro-optical modulator 19, and a microwave driving signal is radiated to the surface of the graphene mechanical vibrator 12 to perform resonance driving; the detection laser is incident to the graphene mechanical vibrator 12, the reflected light intensity of the detection laser changes along with the change of the depth of the optical resonant cavity and is modulated by the graphene mechanical vibration mode, the reflected light intensity signal is converted into an electric signal through the photoelectric detector 17, and the resonant mode of the graphene mechanical vibrator can be extracted through the lock-in amplifier 18.
The embodiment provides a working method of the graphene mechanical oscillator high-temperature sensor, which comprises the following steps:
the detection laser source emits laser, the laser is coupled to a first single-mode optical fiber 1-1, is collimated by a first optical fiber coupler 2-1, enters a first half-wave plate 3-1 to change the polarization direction of the light, then enters a first polarization beam splitter prism 4-1, enters a first precise pinhole 6-1 and a second lens 5-2 through a first lens 5-1, performs spatial filtering on the light beam, adjusts the laser mode, then enters a third half-wave plate 3-3, enters a first high-reflection mirror 7-1 to change the light path direction, enters a third polarization beam splitter prism 4-3, passes through a fourth half-wave plate 3-4, and enters a dichroic mirror 9;
the driving laser source emits laser, the laser is coupled to a second single-mode fiber 1-2, the laser is collimated by a second fiber coupler 2-2, the light intensity is modulated into sine change by an electro-optic modulator 19, the light enters a second half-wave plate 3-2 to change the polarization direction of the light and then enters a second polarization beam splitter prism 4-2, the emergent light intensity of the second polarization beam splitter prism 4-2 is adjusted by rotating the second half-wave plate 3-2, the emergent light passes through a third lens 5-3, a second precise pinhole 6-2 and a fourth lens 5-4 to perform spatial filtering on the light beam, the laser mode is adjusted, the light path direction is changed by a second high-reflection mirror 7-2, and the light beam enters a dichroic mirror 9;
a detection light path emitted by a fourth half-wave plate 3-4 is transmitted by a dichroic mirror 9, a driving light path reflected by a second high-reflection mirror 7-2 is reflected by the dichroic mirror 9, the two are converged and jointly incident into a fourth polarization beam splitter prism 4-4, the polarization state of emergent light is changed by a quarter-wave plate 10, the emergent light is focused to a graphene mechanical vibrator 12 fixed on an electric nano displacement table 13 through an objective lens 11, detection laser reflected by the graphene mechanical vibrator 12 is collected by the objective lens 11, the polarization state of light is changed by the quarter-wave plate 10 again, the light is reflected by the fourth polarization beam splitter prism 4-4, reflected laser after the fourth polarization beam splitter prism 4-4 is split by a beam splitter 14, one beam of the reflected laser enters a CCD camera 15 for imaging, the other beam changes the direction of the light path by a third high-reflection mirror 7-3, is focused by a fifth lens 5-5 and filtered by a filter plate 16, the laser obtained after being focused by the fifth lens 5-5 and filtered by the filter 16 is incident to the photoelectric detector 17, an optical signal is converted into an electric signal, the electric signal is input to the phase-locked amplifier 18, and a resonance mode signal of the graphene mechanical oscillator 12 is extracted.
Further, focusing the driving laser and the detection laser on an optical resonant cavity, then dividing a laser beam reflected by the graphene harmonic oscillator 12 into two beams by using a 90:10 beam splitter 14, wherein one beam is used for imaging, the other beam is converted into an electrical signal by a photoelectric detector 17, and the electrical signal is input into a phase-locked amplifier 18 to extract a resonant mode signal of the graphene mechanical oscillator 12; when the physical quantity of the external environment changes, the physical property of the graphene mechanical vibrator 12 changes along with the change, the vibration mode shifts, and the change of the resonance mode is measured and calibrated to realize the sensing of the change of the physical quantity. Voltage is applied to a source electrode and a drain electrode of the graphene mechanical vibrator to generate joule heat, the temperature of the graphene rises, and the graphene mechanical vibrator has good thermal stability at high temperature, so that the graphene mechanical vibrator can normally work at high temperature.
Graphene-based mechanical vibrator high temperature sensors include, but are not limited to, the above examples.
Other mechanical vibrator embodiments of different two-dimensional materials can realize sensing of physical quantity changes.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. The utility model provides a high temperature sensor based on graphite alkene mechanical oscillator which characterized in that: the device comprises a detection light path, a driving light path, a convergence light path and a reflection light path;
the device comprises a detection laser source, a first single-mode optical fiber (1-1) optically coupled with space emitted by the detection laser source, a first optical fiber coupler (2-1) connected with the first single-mode optical fiber (1-1), a first half-wave plate (3-1) aligned with the center of the first optical fiber coupler (2-1), a first polarization beam splitter prism (4-1) aligned with emergent light of the first half-wave plate (3-1), a first lens (5-1) aligned with emergent light of the first polarization beam splitter prism (4-1), a first precise pinhole (6-1) aligned with the center of the first lens (5-1), a second lens (5-2) aligned with the center of the first precise pinhole (6-1), a third half-wave plate (3-3) aligned with the center of the second lens (5-2), and a second half-wave plate (3-1) sequentially arranged along the direction of a detection light path, A first high reflection mirror (7-1) for reflecting the emergent light of the third half-wave plate (3-3), a third polarization beam splitter prism (4-3) aligned with the emergent light of the first high reflection mirror (7-1), and a fourth half-wave plate (3-4) aligned with the emergent light of the third polarization beam splitter prism (4-3); an illumination light source (8) is arranged on one side, far away from the third half-wave plate (3-4), of the third polarization beam splitting prism (4-3);
along driving the light path direction, include in proper order: a driving laser source, a second single mode fiber (1-2) optically coupled with the space of the driving laser source, a second fiber coupler (2-2) connected with the second single mode fiber (1-2), an electro-optical modulator (19) for modulating the driving laser source, a second half-wave plate (3-2) aligned with the electro-optical modulator (19), the polarized light source comprises a second polarization beam splitter prism (4-2) aligned with emergent light of a second half-wave plate (3-2), a third lens (5-3) aligned with emergent light of the second polarization beam splitter prism (4-2), a second precise pinhole (6-2) aligned with the center of the third lens (5-3), a fourth lens (5-4) aligned with the center of the second precise pinhole (6-2), and a second high-reflection mirror (7-2) for reflecting emergent light of the fourth lens (5-4);
the converging light path comprises a dichroic mirror (9) for converging a detection light path emitted by a fourth half-wave plate (3-4) and a driving light path reflected by a second high-reflection mirror (7-2), a fourth polarization beam splitter prism (4-4) aligned with emergent light of the dichroic mirror (9), a quarter-wave plate (10) aligned with emergent light of the fourth polarization beam splitter prism (4-4), an objective lens (11) aligned with the center of the quarter-wave plate (10), a graphene mechanical oscillator (12) aligned with the center of the objective lens (11), and a nano electric displacement table (13) for controlling the movement of the graphene mechanical oscillator (12);
the reflection light path comprises a beam splitter (14) aligned with emergent light of the fourth polarization beam splitter prism (4-4), a CCD camera (15) aligned with part of emergent light of the beam splitter (14), a third high-reflection mirror (7-3) aligned with the other part of emergent light of the beam splitter (14), a lens (5-5) aligned with the emergent light of the third high-reflection mirror (7-3), a filter (16) aligned with the center of the lens (5-5), a photoelectric detector (17) aligned with the filter (16), and a phase-locked amplifier (18) electrically connected with the photoelectric detector (17).
2. The graphene mechanical vibrator high temperature sensor according to claim 1, wherein: an interference optical resonant cavity is formed by graphene of the graphene mechanical vibrator and a pre-patterned substrate, the laser light intensity of a driving light path is modulated into sine light intensity through an electro-optical modulator (19), and a microwave driving signal generated by a phase-locked amplifier is radiated to the surface of the graphene mechanical vibrator (12) to be driven in a resonant mode; laser of a detection light path is incident to the graphene mechanical vibrator (12), the reflected light intensity of the graphene mechanical vibrator changes along with the change of the depth of the optical resonant cavity and is modulated by a graphene mechanical vibration mode, a reflected light intensity signal is converted into an electric signal through a photoelectric detector (17), and the resonant mode of the graphene mechanical vibrator is extracted through a phase-locked amplifier (18).
3. The graphene mechanical vibrator high temperature sensor according to claim 1, wherein: an included angle between the third half-wave plate (3-3) and the first high-reflection mirror (7-1) is 45 degrees, and the centers of the third half-wave plate and the first high-reflection mirror are aligned; the fourth lens (5-4) and the second high-reflection mirror (7-2) form an included angle of 45 degrees and are aligned in the center.
4. The graphene mechanical vibrator high temperature sensor according to claim 1, wherein: the graphene mechanical vibrator (12) comprises a pre-patterned substrate, wherein the pre-patterned substrate is a silicon substrate with a microelectrode structure, which is prepared by a micro-nano processing technology and is prepared by photoetching, electron beam exposure, plasma etching and evaporation coating; the graphene is obtained by mechanically stripping blocky graphite, the blocky graphite is suspended on a substrate through two-dimensional material transfer, and the pre-patterned substrate and the graphene form an interference optical resonant cavity.
5. The graphene mechanical vibrator based high temperature sensor according to claim 1, wherein: the first single-mode fiber (1-1) is a single-mode fiber with the wavelength of 633nm, and the second single-mode fiber (1-2) is a single-mode fiber with the wavelength of 795 nm.
6. The graphene mechanical vibrator based high temperature sensor according to claim 1, wherein: the nanometer electric displacement platform (13) is a three-axis displacement platform and moves along the three-dimensional direction of the space, and the center of the objective lens (11) is aligned with the center of the graphene mechanical vibrator (12) through the movement of the displacement platform initially.
7. The graphene mechanical vibrator based high temperature sensor according to claim 5, wherein: the detection laser source adopts a 633nm single-mode continuous light laser, and the laser driving source adopts a 795nm single-mode continuous light laser.
8. The graphene mechanical vibrator based high temperature sensor according to claim 1, wherein: the beam splitter (14) is a 10:90 beam splitter; and/or white LEDs as illumination sources for CCD camera imaging.
9. The working method of any one of claims 1 to 8 based on the graphene mechanical vibrator high temperature sensor is characterized in that: the detection laser source emits laser, the laser is coupled to a first single-mode fiber (1-1), collimated by a first fiber coupler (2-1), enters a first half-wave plate (3-1) to change the polarization direction of the light, then enters a first polarization beam splitter prism (4-1), enters a first precise pinhole (6-1) and a second lens (5-2) through a first lens (5-1), performs spatial filtering on the light beam, adjusts the laser mode, then enters a third half-wave plate (3-3), enters a first high-reflection mirror (7-1) to change the light path direction, enters a third polarization beam splitter prism (4-3), passes through a fourth half-wave plate (3-4), and enters a dichroic mirror (9);
the driving laser source emits laser, the laser is coupled to a second single-mode fiber (1-2), the laser is collimated by a second fiber coupler (2-2), the light intensity is modulated into sine change by an electro-optical modulator (19), the laser enters a second half-wave plate (3-2) to change the polarization direction of the light and then enters a second polarization beam splitter prism (4-2), the emergent light intensity of the second polarization beam splitter prism (4-2) is adjusted by rotating the second half-wave plate (3-2), the emergent light passes through a third lens (5-3), a second precise pinhole (6-2) and a fourth lens (5-4), the light beam is subjected to spatial filtering, the laser mode is adjusted, the light path direction is changed by a second high-reflection mirror (7-2), and the laser enters a dichroic mirror (9);
a detection light path emitted by a fourth half-wave plate (3-4) is transmitted by a dichroic mirror (9), a driving light path reflected by a second high-reflection mirror (7-2) is reflected by the dichroic mirror (9), the two light paths are converged and jointly enter a fourth polarization beam splitter prism (4-4), the polarization state of the emergent light is changed by a quarter-wave plate (10), the emergent light is focused to a graphene mechanical vibrator (12) fixed on an electric nanometer displacement table (13) through an objective lens (11), the detection laser reflected by the graphene mechanical vibrator (12) is collected by the objective lens (11), the polarization state of the light is changed by the quarter-wave plate (10) again, the detection laser is reflected by the fourth polarization beam splitter prism (4-4), and the reflected laser after the fourth polarization beam splitter prism (4-4) is split by a beam splitter (14), so that one light beam enters a CCD camera (15) for imaging, and the other beam changes the direction of a light path through a third high-reflection mirror (7-3), is focused through a fifth lens (5-5) and filtered through a filter (16), and then is incident on a photoelectric detector (17) through laser obtained after being focused through the fifth lens (5-5) and filtered through the filter (16), so that an optical signal is converted into an electric signal and is input to a phase-locked amplifier (18), and a resonance mode signal of the graphene mechanical oscillator (12) is extracted.
10. The working method of the graphene mechanical vibrator-based high temperature sensor according to claim 9, wherein: focusing the driving laser and the detection laser on an optical resonant cavity, then dividing a laser beam reflected by the graphene harmonic oscillator (12) into two beams by using a 90:10 beam splitter (14), wherein one beam is used for imaging, the other beam is converted into an electrical signal by a photoelectric detector (17), and the electrical signal is input into a phase-locked amplifier (18) to extract a resonant mode signal of the graphene mechanical oscillator (12); when the physical quantity of an external environment changes, the physical property of the graphene mechanical vibrator (12) changes along with the change of the physical quantity, the vibration mode shifts, and the change of the resonance mode is measured and calibrated to realize the sensing of the change of the physical quantity.
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