CN113637944A - Button type high temperature heating ware - Google Patents
Button type high temperature heating ware Download PDFInfo
- Publication number
- CN113637944A CN113637944A CN202111194787.6A CN202111194787A CN113637944A CN 113637944 A CN113637944 A CN 113637944A CN 202111194787 A CN202111194787 A CN 202111194787A CN 113637944 A CN113637944 A CN 113637944A
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- tantalum
- heater
- heat preservation
- insulating
- piece
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Resistance Heating (AREA)
Abstract
The invention belongs to the field of resistance heaters, and particularly relates to a button type high-temperature heater which comprises a heater shell, a heating wire mounting rack, a side heat-insulating layer, an upper heat-insulating layer, an insulating heat-insulating sheet A and an insulating heat-insulating sheet B. The side heat preservation sets up in the inside of heater shell, goes up heat preservation, insulating heat preservation piece A and heater strip mounting bracket from top to bottom and sets gradually in the inboard of side heat preservation, and the heater strip evenly twines on the heater strip mounting bracket, and insulating heat preservation piece B installs in the opening part of heater shell to offside heat preservation supports. According to the invention, the side heat-insulating layer and the upper heat-insulating layer are matched, so that the heat conduction can be effectively reduced, and the heat radiation shielding effect is improved; the heating wires which are uniformly and densely arranged can realize stable and uniform heating. The invention can be used in an ultrahigh vacuum environment, the minimum heating diameter can be 20mm, the maximum heating temperature can reach 1000 ℃, and the high-temperature heating effect with high efficiency, uniformity, stability and energy conservation can be realized.
Description
Technical Field
The invention belongs to the field of resistance heaters, and particularly relates to a button type high-temperature heater.
Background
Vacuum evaporation equipment refers to a process of evaporating or sublimating a substance to be formed into a film in vacuum in a vacuum environment so as to separate the substance out of the surface of a heated substrate workpiece or a heated substrate. The film of metal, semiconductor, insulator, alloy with different composition ratio, compound and partial organic polymer can be deposited on the surface of metal, semiconductor, insulator, plastic, paper and fabric by evaporation, and the application range is very wide. The small-size substrate heater for vacuum evaporation equipment in the prior art has poor heating effect on high temperature and even heat.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a button type high temperature heater.
The purpose of the invention is realized by the following technical scheme:
a button type high-temperature heater comprises a heater shell, a heating wire mounting rack, a side heat-insulating layer, an upper heat-insulating layer, an insulating heat-insulating sheet A and an insulating heat-insulating sheet B;
the side heat preservation set up in the inside of heater shell, go up the heat preservation insulating piece A reaches the heater strip mounting bracket from top to bottom sets gradually in the inboard of side heat preservation, the heater strip evenly twine in on the heater strip mounting bracket, insulating heat preservation piece B install in the opening part of heater shell, and right the side heat preservation supports.
A heating wire leading-out pipe penetrates through the heater shell, the part, located inside the heater shell, of the heating wire leading-out pipe penetrates through the upper heat insulation layer, and leading-out ends of the heating wire penetrate out of the heating wire leading-out pipe respectively.
A temperature measuring thermocouple protective pipe penetrates through the heater shell, the part of the temperature measuring thermocouple protective pipe, which is located inside the heater shell, sequentially penetrates through the upper heat insulation layer, the insulating heat insulation sheet A and the heating wire installation frame, the part of the temperature measuring thermocouple protective pipe, which extends into the space between the heating wire installation frame and the insulating heat insulation sheet B, is provided with an opening, a temperature measuring thermocouple penetrates through the temperature measuring thermocouple protective pipe, the temperature measuring end of the temperature measuring thermocouple is exposed out of the opening, and the leading-out end of the temperature measuring thermocouple penetrates out of the temperature measuring thermocouple protective pipe respectively.
The heater shell is formed by punching a tantalum sheet.
The side heat-insulating layer comprises a plurality of layers of tantalum cylinders which are sequentially sleeved from outside to inside in the heater shell, a tantalum ring A is welded at the position, close to the opening of the heater shell, of the tantalum cylinder on the innermost layer, the tantalum ring A is welded with the end portions of the tantalum cylinders except the tantalum cylinder on the innermost layer, and the tantalum ring A is abutted to the upper surface of the insulating sheet B.
The axial center line of each tantalum cylinder and the axial center line of the heater shell are collinear.
Convex and/or concave bulges are punched on the surface of each tantalum cylinder, and the bulges of each tantalum cylinder are abutted with the surface of the adjacent tantalum cylinder.
Go up the heat preservation including from top to bottom a plurality of layers of tantalum piece that set up in proper order range upon range of, each the equal punching press of tantalum piece surface goes out protruding and/or concave texture, each the texture of tantalum piece and adjacent the surface butt of tantalum piece, the lower floor the below of tantalum piece is equipped with welds in the inlayer tantalum ring B of tantalum section of thick bamboo medial surface, tantalum ring B with the upper surface butt of insulating heat preservation piece A.
The heater comprises a heater shell, a heater wire mounting frame, an insulating heat preservation piece A and an insulating heat preservation piece B, wherein the heater wire mounting frame, the insulating heat preservation piece A and the insulating heat preservation piece B are all made of boron nitride pieces, the lower end of the insulating heat preservation piece A is abutted to the heater wire, and a tantalum ring C is further welded at an opening of the heater shell and supports the lower surface of the insulating heat preservation piece B.
The heating wire mounting frame is provided with a plurality of layers of wire penetrating holes which are uniformly distributed in an annular shape and used for winding the heating wires.
The invention has the advantages and positive effects that:
according to the invention, the heating wire mounting frame, the insulating heat preservation sheet A, the insulating heat preservation sheet B, the side heat preservation layer and the upper heat preservation layer are arranged in a matched manner, so that the heat conduction can be effectively reduced, and the heat radiation shielding effect is improved; the heating wires which are uniformly and densely arranged can realize stable and uniform heating. The invention can be used in an ultrahigh vacuum environment, can be applied to heating small-size substrates of evaporation equipment, can achieve the minimum heating diameter of 20mm and the maximum heating temperature of 1000 ℃, can realize high-temperature heating effects of high efficiency, uniformity, stability and energy saving, and has the advantages of long service life, simple structural design and low manufacturing cost.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged view of FIG. 1 at A;
FIG. 3 is a schematic view of the overall arrangement of the heater strip and the heater strip mounting bracket of the present invention;
FIG. 4 is a schematic front view of the arrangement of the heater strip and the heater strip mounting bracket of the present invention;
FIG. 5 is a schematic top view of the arrangement of the heater wire and the heater wire mounting bracket of the present invention;
fig. 6 is a schematic bottom view of the arrangement structure of the heater strip and the heater strip mounting bracket of the present invention.
In the figure: the heater comprises a heater shell 1, a heater strip 2, a heater strip mounting frame 3, a wire feed hole 301, a side heat-insulating layer 4, a tantalum cylinder 401, an upper heat-insulating layer 5, a tantalum sheet 501, an insulating heat-insulating sheet A6, an insulating heat-insulating sheet B7, a heater strip leading-out pipe 8, a temperature-measuring thermocouple protective pipe 9, a temperature-measuring thermocouple 10, a tantalum ring A11, a tantalum ring B12 and a tantalum ring C13.
Detailed Description
The invention is described in further detail below with reference to figures 1-6.
A button type high-temperature heater is shown in figure 1 and comprises a heater shell 1, a heating wire 2, a heating wire mounting rack 3, a side heat-insulating layer 4, an upper heat-insulating layer 5, an insulating heat-insulating sheet A6 and an insulating heat-insulating sheet B7. In the embodiment, the heater shell 1 is formed by punching a tantalum sheet with the thickness of 0.1-0.5 mm.
Specifically, a heating wire leading-out pipe 8 penetrates through the heater shell 1, the part, located inside the heater shell 1, of the heating wire leading-out pipe 8 penetrates through the upper heat preservation layer 5, and leading-out ends of the heating wires 2 penetrate out of the heating wire leading-out pipe 8 respectively. In this embodiment, the heating wire 2 is a heating element of a heater, and a commercially available heating wire made of tantalum material with a diameter of 0.3mm-0.5mm is adopted, or a heating wire made of iron-chromium-aluminum, copper wire and other materials can be adopted; the heating wire leading-out pipe 8 is made of ceramic materials and plays a role in protecting the heating wire 2 and insulating.
Particularly, wear to be equipped with temperature measurement thermocouple protective tube 9 on the heater shell 1, the part that temperature measurement thermocouple protective tube 9 is located heater shell 1 inside passes in proper order and goes up heat preservation 5, insulating heat preservation piece A6 and heater strip mounting bracket 3, it has seted up the opening on stretching into the partial temperature measurement thermocouple protective tube 9 in the space between heater strip mounting bracket 3 and insulating heat preservation piece B7, wear to be equipped with temperature measurement thermocouple 10 in the temperature measurement thermocouple protective tube 9, the temperature measurement end of temperature measurement thermocouple 10 exposes from the opening, in order to measure the temperature, the leading-out terminal of temperature measurement thermocouple 10 wears out from temperature measurement thermocouple protective tube 9 respectively. In this embodiment, the temperature measuring couple 10 may be a platinum-rhodium thermocouple, a tungsten-rhenium thermocouple or a K-type thermocouple; the temperature measuring thermocouple protective tube 9 with the notch is made of ceramic materials, and plays a role in protecting the temperature measuring thermocouple 10 and insulating.
Specifically, as shown in fig. 2, the side heat-insulating layer 4 includes a plurality of tantalum cylinders 401 sequentially sleeved from outside to inside the heater housing 1, a tantalum ring a 11 is spot-welded at an opening of the innermost tantalum cylinder 401 close to the heater housing 1, and the tantalum ring a 11 is respectively welded with the end of each tantalum cylinder 401 except for the innermost tantalum cylinder 401, thereby forming an integral side heat-insulating layer 4; the tantalum ring A11 abuts against the upper surface of the insulating sheet B7. In the embodiment, the wall thickness of the tantalum cylinder 401 at the innermost layer is 0.1-0.3 mm; the tantalum cylinder 401 with 8-10 layers is arranged except the tantalum cylinder 401 at the innermost layer, the wall thickness is 0.02-0.1mm, and the total thickness of the side heat-insulating layer 4 is about 2 mm; the axial centerline of each tantalum cylinder 401 is collinear with the axial centerline of the heater housing 1. Convex and/or concave spherical bulges are punched on the surface of each tantalum cylinder 401, and the bulges of each tantalum cylinder 401 are abutted to the surface of the adjacent tantalum cylinder 401, so that the contact area between the adjacent tantalum cylinders 401 can be reduced, and further the heat conduction is reduced.
Specifically, as shown in fig. 2, the upper insulating layer 5 includes a plurality of tantalum sheets 501 sequentially stacked from top to bottom, convex and/or concave textures are stamped on the surface of each tantalum sheet 501, the textures of each tantalum sheet 501 are abutted to the surface of the adjacent tantalum sheet 501, so that the contact area between the adjacent tantalum sheets 501 can be reduced, and further the heat conduction is reduced; a tantalum ring B12 welded on the inner side surface of the tantalum cylinder 401 at the innermost layer is arranged below the tantalum sheet 501 at the lowermost layer, and the tantalum ring B12 is abutted with the upper surface of the insulating heat-preserving sheet A6. In this embodiment, the tantalum sheet 501 has 6-10 layers, a thickness of 0.02-0.1mm, and a wavy or mesh texture.
Specifically, heating wire mounting bracket 3, insulating heat preservation piece A6 and insulating heat preservation piece B7 all adopt the boron nitride piece to make in this embodiment, and insulating heat preservation piece A6 lower extreme and heater strip 2 butt have tantalum ring C13 still to spot welding at the opening part of heater shell 1 and support insulating heat preservation piece B7's lower surface. The insulating heat-preserving sheet A6 made of the high-purity boron nitride sheet can effectively play the roles of insulation and heat preservation, and the insulating heat-preserving sheet B7 made of the high-purity boron nitride sheet can effectively play the roles of heat preservation, uniform heating, packaging and protection of the temperature measuring couple 10.
Specifically, as shown in fig. 3 to 6, in the present embodiment, three layers of wire passing holes 301 are formed in the heating wire mounting frame 3 for winding the heating wire 2, so that the heating wire 2 can be uniformly and finely wound on the heating wire mounting frame 3.
The working principle is as follows:
through the matched arrangement of the heating wire mounting frame 3, the insulating sheet A6, the insulating sheet B7, the side insulating layer 4 and the upper insulating layer 5, the heat conduction can be effectively reduced, and the heat radiation shielding effect is improved; the heating wires 2 are uniformly and densely arranged to realize stable and uniform heating, and the temperature measuring couple 10 measures the heating temperature of the heater.
Claims (10)
1. A button type high temperature heater which is characterized in that: comprises a heater shell (1), a heating wire (2), a heating wire mounting rack (3), a side heat-insulating layer (4), an upper heat-insulating layer (5), an insulating heat-insulating sheet A (6) and an insulating heat-insulating sheet B (7);
side heat preservation (4) set up in the inside of heater shell (1), go up heat preservation (5) insulating heat preservation piece A (6) reach heater strip mounting bracket (3) from top to bottom set gradually in the inboard of side heat preservation (4), heater strip (2) evenly twine in on heater strip mounting bracket (3), insulating heat preservation piece B (7) install in the opening part of heater shell (1), and right side heat preservation (4) support.
2. The button type high temperature heater according to claim 1, wherein: a heating wire leading-out pipe (8) penetrates through the heater shell (1), the heating wire leading-out pipe (8) is located in the heater shell (1), the inner portion of the heater shell (1) penetrates through the upper heat insulation layer (5), and leading-out ends of the heating wires (2) penetrate out of the heating wire leading-out pipe (8) respectively.
3. The button type high temperature heater according to claim 1, wherein: the heater is characterized in that a temperature measuring thermocouple protective pipe (9) penetrates through the heater shell (1), the part of the temperature measuring thermocouple protective pipe (9) located in the heater shell (1) sequentially penetrates through the upper heat insulation layer (5), the insulating heat insulation sheet A (6) and the heating wire mounting frame (3), and extends into the part of the space between the heating wire mounting frame (3) and the insulating heat insulation sheet B (7), an opening is formed in the temperature measuring thermocouple protective pipe (9), a temperature measuring thermocouple (10) penetrates through the temperature measuring thermocouple protective pipe (9), the temperature measuring end of the temperature measuring thermocouple (10) is exposed out of the opening, and the leading-out end of the temperature measuring thermocouple (10) penetrates out of the temperature measuring thermocouple protective pipe (9).
4. The button type high temperature heater according to claim 1, wherein: the heater shell (1) is formed by punching a tantalum sheet.
5. The button type high temperature heater according to claim 1, wherein: the side heat preservation layer (4) comprises a plurality of layers of tantalum cylinders (401) which are sequentially sleeved from outside to inside and are arranged in the heater shell (1), the tantalum cylinder (401) is close to the inner layer, a tantalum ring A (11) is welded at an opening of the heater shell (1), the tantalum ring A (11) is respectively welded with the end of each tantalum cylinder (401) except the tantalum cylinder (401) at the inner layer, and the tantalum ring A (11) is abutted to the upper surface of the insulating heat preservation sheet B (7).
6. Button-type high-temperature heater according to claim 5, characterized in that: the axial center line of each tantalum cylinder (401) is collinear with the axial center line of the heater shell (1).
7. Button-type high-temperature heater according to claim 5, characterized in that: convex and/or concave bulges are punched on the surface of each tantalum cylinder (401), and the bulges of each tantalum cylinder (401) are abutted with the surface of the adjacent tantalum cylinder (401).
8. Button-type high-temperature heater according to claim 5, characterized in that: go up heat preservation (5) including a plurality of layers of tantalum piece (501) that from top to bottom stack gradually the setting, each protruding and/or concave texture is all punched out on tantalum piece (501) surface, each the texture and the adjacent of tantalum piece (501) the surface butt of tantalum piece (501), the lower floor the below of tantalum piece (501) is equipped with welds in the inlayer tantalum ring B (12) of tantalum section of thick bamboo (401) medial surface, tantalum ring B (12) with the upper surface butt of insulating heat preservation A (6).
9. The button type high temperature heater according to claim 1, wherein: heater strip mounting bracket (3), insulating heat preservation piece A (6) and insulating heat preservation piece B (7) all adopt the boron nitride piece to make, insulating heat preservation piece A (6) lower extreme with heater strip (2) butt, the opening part of heater shell (1) still welds tantalum ring C (13) and right the lower surface of insulating heat preservation piece B (7) supports.
10. The button type high temperature heater according to claim 1, wherein: the heating wire mounting rack (3) is provided with a plurality of layers of annular and uniformly distributed wire penetrating holes (301) for winding the heating wires (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111194787.6A CN113637944B (en) | 2021-10-14 | 2021-10-14 | Button type high temperature heating ware |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111194787.6A CN113637944B (en) | 2021-10-14 | 2021-10-14 | Button type high temperature heating ware |
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| Publication Number | Publication Date |
|---|---|
| CN113637944A true CN113637944A (en) | 2021-11-12 |
| CN113637944B CN113637944B (en) | 2022-01-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111194787.6A Active CN113637944B (en) | 2021-10-14 | 2021-10-14 | Button type high temperature heating ware |
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| CN (1) | CN113637944B (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5041719A (en) * | 1990-06-01 | 1991-08-20 | General Electric Company | Two-zone electrical furnace for molecular beam epitaxial apparatus |
| JP2000200671A (en) * | 1999-01-07 | 2000-07-18 | Hakko Kk | Heater |
| CN2425427Y (en) * | 2000-04-29 | 2001-03-28 | 中国科学院沈阳科学仪器研制中心 | Molecular beam source furnace |
| CN202246836U (en) * | 2011-07-22 | 2012-05-30 | 上海奕瑞光电子科技有限公司 | Resistance heating type evaporation source |
| CN103458539A (en) * | 2012-05-29 | 2013-12-18 | 李柏盛 | Heating plate |
| CN103726022A (en) * | 2013-11-22 | 2014-04-16 | 上海和辉光电有限公司 | Heating evaporation source for organic materials |
| CN205152402U (en) * | 2015-09-29 | 2016-04-13 | 郎业方 | Single crystal furnace heating device |
| CN105862013A (en) * | 2016-06-17 | 2016-08-17 | 南京大学 | High-temperature heating device applied to miniature MOCVD system |
| CN110662314A (en) * | 2019-09-10 | 2020-01-07 | 博宇（天津）半导体材料有限公司 | Heater and preparation method thereof |
| CN210868187U (en) * | 2019-11-05 | 2020-06-26 | 沈阳中科汉达科技有限公司 | Resistance evaporation heater structure |
| CN111712002A (en) * | 2020-06-29 | 2020-09-25 | 耀能（上海）节能科技股份有限公司 | Heating device |
-
2021
- 2021-10-14 CN CN202111194787.6A patent/CN113637944B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5041719A (en) * | 1990-06-01 | 1991-08-20 | General Electric Company | Two-zone electrical furnace for molecular beam epitaxial apparatus |
| JP2000200671A (en) * | 1999-01-07 | 2000-07-18 | Hakko Kk | Heater |
| CN2425427Y (en) * | 2000-04-29 | 2001-03-28 | 中国科学院沈阳科学仪器研制中心 | Molecular beam source furnace |
| CN202246836U (en) * | 2011-07-22 | 2012-05-30 | 上海奕瑞光电子科技有限公司 | Resistance heating type evaporation source |
| CN103458539A (en) * | 2012-05-29 | 2013-12-18 | 李柏盛 | Heating plate |
| CN103726022A (en) * | 2013-11-22 | 2014-04-16 | 上海和辉光电有限公司 | Heating evaporation source for organic materials |
| CN205152402U (en) * | 2015-09-29 | 2016-04-13 | 郎业方 | Single crystal furnace heating device |
| CN105862013A (en) * | 2016-06-17 | 2016-08-17 | 南京大学 | High-temperature heating device applied to miniature MOCVD system |
| CN110662314A (en) * | 2019-09-10 | 2020-01-07 | 博宇（天津）半导体材料有限公司 | Heater and preparation method thereof |
| CN210868187U (en) * | 2019-11-05 | 2020-06-26 | 沈阳中科汉达科技有限公司 | Resistance evaporation heater structure |
| CN111712002A (en) * | 2020-06-29 | 2020-09-25 | 耀能（上海）节能科技股份有限公司 | Heating device |
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| CN113637944B (en) | 2022-01-07 |
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