CN113637940A - OLED (organic light emitting diode) evaporation mask plate capable of improving evaporation quality and application method thereof - Google Patents

OLED (organic light emitting diode) evaporation mask plate capable of improving evaporation quality and application method thereof Download PDF

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Publication number
CN113637940A
CN113637940A CN202111001172.7A CN202111001172A CN113637940A CN 113637940 A CN113637940 A CN 113637940A CN 202111001172 A CN202111001172 A CN 202111001172A CN 113637940 A CN113637940 A CN 113637940A
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Prior art keywords
mask plate
evaporation
sliding
oled
plate
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王宏宇
罗雪春
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Chongqing Hanbo Display Technology R & D Center Co ltd
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Chongqing Hanbo Display Technology R & D Center Co ltd
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Priority to CN202111001172.7A priority Critical patent/CN113637940A/en
Publication of CN113637940A publication Critical patent/CN113637940A/en
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

A mask plate for OLED evaporation capable of improving evaporation quality comprises an OLED display substrate and a mask plate body, wherein the mask plate body comprises a mask plate upper plate and a mask plate lower plate, a mounting cavity layer is arranged between the mask plate upper plate and the mask plate lower plate, the OLED display substrate is tightly mounted in the mounting cavity layer, a pixel opening area is further formed in the mask plate upper plate, and a local mask plate mechanism is arranged in the mask plate body in a sliding mode; a positioning mechanism is arranged between the mask plate body and the local mask plate mechanism, the mask plate upper plate is movably buckled on the mask plate lower plate, a fine adjustment lifting mechanism is arranged between the mask plate upper plate and the mask plate lower plate, and a sealing mechanism is further arranged at the opening of the installation cavity layer. According to the invention, the mask plate does not need to be replaced in the evaporation process of the pixels with the same color, so that the position deviation among the pixels can not be generated, and the evaporation efficiency and quality of the OLED are greatly improved.

Description

OLED (organic light emitting diode) evaporation mask plate capable of improving evaporation quality and application method thereof
Technical Field
The invention relates to the technical field of display panel manufacturing, in particular to an OLED (organic light emitting diode) evaporation mask plate capable of improving evaporation quality and an application method thereof.
Background
Mask plates, also known as reticles, photomasks, photolithographic masks, reticles, etc., carry design patterns through which light passes to project the design patterns onto the photoresist. Photomask blanks are used to produce various functional patterns on a film, plastic or glass substrate and precisely positioned for use in a structure for selective exposure of a photoresist coating. Masks are widely used, and are required to be used in fields related to photolithography processes, such as ICs (integrated circuits), FPDs (flat panel displays), PCBs (printed circuit boards), MEMS (micro electro mechanical systems), and the like. The performance of the mask plate directly determines the quality of the photolithography and evaporation processes.
An Organic Light Emitting Diode (OLED) display is a flat panel display technology with great development prospect, and has excellent display performance, especially characteristics of self-luminescence, simple structure, ultra-lightness and thinness, fast response speed, wide viewing angle, low power consumption, and capability of realizing flexible display.
However, evaporation is one of the core process steps of the OLED, is the second stage of five major steps of the OLED manufacturing process, and is the only method for realizing high-precision and large-capacity OLED microcell color patterning. Evaporation requires placing a mask plate (FMM) under the LTPS substrate, and when the OLED is evaporated with organic materials, the organic materials can only be deposited at the positions set by the mask plate. Without the use of a mask, pixel clutter will result, for example, green and blue are deposited on the red (R) pixels, and thus a solid color will not be obtained. Therefore, different mask plates with corresponding RGB positions and shapes need to be used at different time in the evaporation process, so that the repeated replacement of the mask plates is not only inefficient, but also needs to be repositioned once, and the positions among pixel colors can have certain deviation, so that the quality of the produced OLED is not high.
Disclosure of Invention
The mask plate for OLED evaporation and the application method thereof have the advantages that the mask plate is simple in structure, stable and reliable in use, and does not need to be replaced in the evaporation process of pixels with the same color, so that position deviation among the pixels is avoided, the OLED evaporation efficiency is greatly improved, and the evaporation quality can be improved.
The specific technical scheme is as follows:
the mask plate for OLED evaporation comprises an OLED display substrate and a mask plate body, wherein the mask plate body comprises a mask plate upper plate and a mask plate lower plate, a mounting cavity layer is arranged between the mask plate upper plate and the mask plate lower plate, a graphene layer covers the whole inner wall of the mounting cavity layer, the graphene layer prevents the OLED display substrate from being scratched in the process of being installed in the mounting cavity layer, the OLED display substrate is tightly installed in the mounting cavity layer, a pixel opening area is further formed in the mask plate upper plate, and a local mask plate mechanism is arranged in the mask plate body in a sliding mode; a positioning mechanism is arranged between the mask plate body and the local mask plate mechanism, the mask plate upper plate is movably buckled on the mask plate lower plate, a fine adjustment lifting mechanism is arranged between the mask plate upper plate and the mask plate lower plate, and a sealing mechanism is further arranged at the opening of the installation cavity layer.
The realization principle is as follows: in order to realize self-luminescence of red (R), green (G) and blue (B) OLED pixels by performing evaporation on the pixels in the OLED display substrate, it is necessary to emit red (R), green (G) and blue (B) organic light emitting layers to the OLED display substrate, and a structure for protecting the organic light emitting layer, both of which are covered on the corresponding RGB pixels in the OLED display substrate by evaporation, the distance between the upper plate of the mask plate and the lower plate of the mask plate is pulled open by finely adjusting the lifting mechanism, so that the height of the installation cavity layer is slightly raised, the OLED display substrate can be easily installed in the installation cavity layer, after the pixel opening areas are aligned with the pixels of the OLED display substrate one by one, the height of the installation cavity layer is reduced through the fine adjustment lifting mechanism, so that the mask plate body is tightly attached to the OLED display substrate, and finally the opening of the installation cavity layer is sealed through the sealing mechanism. The specific part of the pixel opening area is blocked by the sliding mask plate, namely, a part of pixels of the OLED display substrate are covered, only the other part of pixels of the OLED display substrate are exposed to be in contact with evaporation materials such as organic materials evaporated in an evaporation device, the part of pixels are all one of RGB pixels, the evaporation materials cover the pixels, evaporation work is completed, the sliding mask plate covers the part of pixels through sliding, only the other part of pixels in the RGB pixels are exposed, the evaporation materials are replaced to complete the evaporation work, and the operation is repeated until the OLED pixels complete the evaporation work.
As an optimized structure: pixel opening groups are uniformly and densely distributed in the pixel opening areas, each pixel opening group comprises at least three pixel openings, and the size and the arrangement combination mode of the pixel openings in the pixel opening groups are consistent with those of the pixels of the OLED display substrate;
the local mask plate mechanism is provided with a sliding mask plate, through holes are uniformly formed in the sliding mask plate, the through holes slide to different positions and are overlapped with one pixel opening in each pixel opening group, at least one side portion of the sliding mask plate is connected with a push-pull handle, the push-pull handle extends out of the side face of the mask plate body, and a sealing layer is further arranged on the inner wall of the sliding area of the sliding mask plate.
As an optimized structure: the positioning mechanism is provided with a positioning hole which is arranged on the upper plate of the mask plate, the upper surface of the sliding mask plate is evenly provided with at least three positioning grooves, and positioning keys are also arranged in the positioning holes in a matched manner and penetrate through the positioning holes to be closely matched with the positioning grooves.
As an optimized structure: the fine adjustment lifting mechanism is provided with an air valve port, a groove is formed in the lower plate of the mask plate, a bump is arranged on the upper plate of the mask plate, the groove is in sealed fit with the bump, the air valve port is arranged at the bottom of the groove, high-pressure air can be filled into a gap between the groove and the bump by pushing the air valve port by a high-pressure air gun nozzle, the height of an installation cavity layer can be increased, the air valve port is in a closed state after the high-pressure air gun nozzle is taken away and does not apply force to the air valve port, the air valve port can be in an open state by pushing the air valve port by a sharp object in the same way, the high-pressure air filled into the gap between the groove and the bump is discharged, and the height of the installation cavity layer is reduced.
As an optimized structure: the sealing mechanism is provided with a sealing plate, a sliding buckling groove is formed in the end face of the mask plate body and is arranged at the opening end of the installation cavity body layer, the sealing plate is slidably installed in the sliding buckling groove, a chamfer is further formed at one edge of the mask plate body and is close to the opening of the sliding buckling groove, and the chamfer is convenient for the sealing plate to be inserted into the sliding buckling groove to be in sealing fit with the sliding buckling groove.
As an optimized structure: the lower mask plate has a structure like the upper mask plate, i.e. is provided with a pixel opening area.
In a second aspect, the invention provides an application method of the mask plate for the evaporation of the OLED, which can improve the evaporation quality, wherein the mask plate is used in the evaporation process of the OLED, and the evaporation process comprises the following steps:
firstly, adjusting the height of the installation cavity layer through a fine adjustment lifting mechanism to enable the height of the installation cavity layer to be larger than the thickness of the OLED display substrate;
secondly, the OLED display substrate is arranged in the installation cavity layer, and the height of the installation cavity layer is adjusted through the fine adjustment lifting mechanism, so that the inner wall of the installation cavity layer is tightly attached to the OLED display substrate;
thirdly, the position of a sliding mask plate of the local mask plate mechanism is adjusted in a sliding mode, so that the pixel opening overlapped with the through hole corresponds to the color of the pixel to be evaporated;
and fourthly, putting the mask plate body into the equipment to carry out vacuum evaporation on the OLED display substrate.
As an optimization method: after the OLED display substrate finishes the evaporation work of one pixel color, the through hole, the pixel opening and the whole pixel opening area are cleaned, the position of the sliding mask plate of the local mask plate mechanism is adjusted in a sliding mode, the pixel opening overlapped with the through hole corresponds to the pixel color of the next evaporation, finally, the OLED display substrate in the installation cavity layer is subjected to vacuum evaporation, and the operation is circulated until all the pixel colors of the OLED display substrate are evaporated and finished, and the quality reaches the standard.
As an optimization method: and after the OLED display substrate is arranged in the installation cavity layer, the OLED display substrate is sealed and fixed in the installation cavity layer through the sealing mechanism.
As an optimization method: the sliding mask plate of the local mask plate mechanism is precisely positioned and fixed through the positioning mechanism in the sliding adjustment process inside the mask plate body, so that the through holes and the pixel openings are precisely coincided, and the dislocation movement cannot occur in the evaporation process.
The invention has the beneficial effects that: the method comprises the steps that a local mask plate mechanism is arranged in a mask plate body in a matched mode, a sliding mask plate in the local mask plate mechanism covers a part of pixels of an OLED display substrate, only one of RGB pixels of the OLED display substrate is exposed to be in contact with an evaporation material, the evaporation material covers the pixels, evaporation work of the time is completed, the sliding mask plate covers the part of pixels when evaporation is performed again, only the other pixel of the RGB pixels is exposed, the evaporation material is replaced to complete evaporation work again, evaporation work of all OLED pixels can be completed repeatedly in the mode, the mask plate does not need to be replaced, evaporation efficiency is higher, and evaporation materials of different colors are not prone to interfere evaporation and have higher OLED quality; the sliding mask plate can accurately position OLED pixels in the sliding process through the positioning mechanism, and the condition that evaporation materials interfere with the quality of OLED evaporation from the opening of the installation cavity layer is avoided through the sealing mechanism; when having reduced the degree of difficulty that OLED display substrate packed into the installation cavity body layer through fine setting elevating system, adaptable in the OLED display substrate of different thickness, if the mask plate hypoplastron has the pixel opening district with the mask plate upper plate is the same, then two OLED display substrate of two OLED display substrate are packed into in the installation cavity body layer simultaneously to adjustable fine setting elevating system, accomplish the coating by vaporization work to two OLED display substrate simultaneously, efficiency is higher. When the mask plate is applied to evaporation plating work of the OLED display substrate, the evaporation plating efficiency is effectively improved, meanwhile, evaporation plating of pixels of all colors is not interfered with one another, the evaporation plating quality is greatly improved, the defective rate is reduced, the OLED display substrate can be effectively protected, damage to raw materials is effectively reduced, and the defective rate is further reduced.
Drawings
Fig. 1 is a schematic front view of the whole structure of the present invention.
Fig. 2 is a schematic view of the overall backside structure of the present invention.
FIG. 3 is a schematic structural view of the mounting cavity layer of the present invention.
Fig. 4 is a schematic sectional view of the present invention as a whole.
Fig. 5 is a schematic cross-sectional view of the left side of the present invention 1.
Fig. 6 is a schematic sectional view of the front view of the present invention 1.
Fig. 7 is a schematic sectional view 2 in front view.
Fig. 8 is a schematic cross-sectional view 2 from the left side of the present invention.
Fig. 9 is a schematic sectional view of the present invention in front view, schematically shown in fig. 3.
Description of reference numerals: an OLED display substrate 1; a mask plate body 2; a local mask mechanism 3; a positioning mechanism 4; a fine adjustment lifting mechanism 5; a sealing mechanism 6; a mask plate upper plate 21; a mask plate lower plate 22; mounting the cavity layer 23; a pixel opening area 24; the pixel opening group 25; the pixel opening 26; a graphene layer 27; a metal layer 28; sliding the mask plate 31; a through hole 32; a push-pull handle 33; a sealing layer 35; positioning holes 41; a positioning groove 42; a positioning key 43; an air valve port 51; a recess 52; a bump 53; a sealing plate 61; a sliding catch groove 62.
Detailed Description
The following detailed description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will make the advantages and features of the invention easier to understand by those skilled in the art, and thus will clearly and clearly define the scope of the invention.
Example of implementation:
as shown in fig. 1, 2, 3, 4, 5 to 6: the utility model provides a can improve mask plate for OLED coating by vaporization of coating by vaporization quality, including OLED display substrate 1 and mask plate body 2, mask plate body 2 is including mask plate upper plate 21 and mask plate hypoplastron 22, be provided with installation cavity layer 23 between mask plate upper plate 21 and the mask plate hypoplastron 22, OLED display substrate 1 closely installs in this installation cavity layer 23, mask plate upper plate 21 and mask plate hypoplastron 22 all have graphite alkene layer 27 and metal level 28, this graphite alkene layer 27 covers whole installation cavity layer 23 inner wall, graphite alkene layer 27 has prevented that OLED display substrate 1 is being packed into the in-process on installation cavity layer 23 by the fish tail, pixel opening district 24 has still been seted up on mask plate upper plate 21, it is provided with local mask plate mechanism 3 to slide in mask plate body 2 inside.
A positioning mechanism 4 is arranged between the mask plate body 2 and the local mask plate mechanism 3, a mask plate upper plate 21 is movably buckled on a mask plate lower plate 22, a fine adjustment lifting mechanism 5 is arranged between the mask plate upper plate 21 and the mask plate lower plate 22, and a sealing mechanism 6 is further arranged at an opening of the installation cavity layer 23.
Pixel opening regions 24 are uniformly and densely distributed with pixel opening groups 25, the pixel opening groups 25 include three pixel openings 26 respectively corresponding to three primary colors of red (R), green (G) and blue (B) OLED pixels, and the size and arrangement combination of the pixel openings 26 in the pixel opening groups 25 are the same as those of the OLED display substrate 1, and the simplest RGB arrangement, which is also the broadest application range, is adopted here.
The local mask mechanism 3 is provided with a sliding mask 31, through holes 32 are uniformly formed in the sliding mask 31, the through holes 32 slide to different positions and coincide with one pixel opening 26 in each pixel opening group 25, a specific part of the pixel opening area 24 is blocked through the sliding mask 31, namely, a part of pixels of the OLED display substrate 1 are covered, and only the other part of pixels of the OLED display substrate 1 are exposed.
The two side parts of the sliding mask plate 31 are respectively and movably connected with a push-pull handle 33, namely, hook plates are arranged on the two side parts of the sliding mask plate 31, the push-pull handle 33 is also provided with hook plates matched with the push-pull handle 33, the sliding control of the sliding mask plate 31 can be realized when the push-pull handle 33 is pulled towards the two sides, and meanwhile, a movable gap is formed between the hook plates, so that the fine adjustment lifting mechanism 5 can be used for fine adjustment without influencing the control activity of the push-pull handle 33 on the sliding mask plate 31. And the push-pull handle 33 is extended from the side of the mask plate body 2, the sliding mask plate 31 slides in the mask plate body 2, and a sealing layer 35 is arranged on the inner wall of the sliding area of the sliding mask plate 31 in the mask plate body 2 to prevent evaporation materials from penetrating to other places through the sliding area.
As shown in fig. 9, the push-pull handle 33 is directly and fixedly connected to two side portions or any side portion of the sliding mask plate 31, which is beneficial to dealing with other irregular arrangement of pixels of the OLED display substrate 1 (for example, p arrangement, etc.), the sliding mask plate 31 not only needs to be horizontally pulled left and right to realize left and right sliding of the push-pull handle 33, but also needs to control the sliding mask plate 31 to vertically slide back and forth by the push-pull handle 33, the direct and fixed connection of the push-pull handle 33 can be better realized, and as for the fine adjustment space problem of the fine adjustment lifting mechanism 5, a larger opening needs to be formed at a position where the push-pull handle 33 extends out from the side surface of the mask plate body 2.
The positioning mechanism 4 is provided with a positioning hole 41, the positioning hole 41 is arranged on the mask plate upper plate 21, three positioning grooves 42 are further uniformly formed in the upper surface of the sliding mask plate 31, a positioning key 43 is further installed in the positioning hole 41 in a matched manner, and the positioning key 43 penetrates through the positioning hole 41 to be closely matched with the positioning grooves 42, so that the sliding positioning of the sliding mask plate 31 is completed.
The fine adjustment lifting mechanism 5 is provided with an air valve port 51, a groove 52 is formed in the lower mask plate 22, a bump 53 is formed in the upper mask plate 21, the groove 52 is in sealed fit with the bump 53, the air valve port 51 is arranged at the bottom of the groove 52, high-pressure air can be filled into a gap between the groove 52 and the bump 53 by pushing the air valve port 51 against an external high-pressure air gun nozzle, the height of the installation cavity layer 23 can be increased, the air valve port 51 is closed after the high-pressure air gun nozzle is taken away without applying force to the air valve port 51, the air valve port 51 is pushed against the air valve port 51 by a sharp object in a similar manner, the air valve port 51 can be opened by applying force, the high-pressure air filled into the gap between the groove 52 and the bump 53 is discharged, and the height of the installation cavity layer 23 is automatically reduced.
The distance between the upper mask plate 21 and the lower mask plate 22 is pulled open through the fine adjustment lifting mechanism 5, so that the height of the installation cavity layer 23 is slightly increased, the OLED display substrate 1 can be easily installed in the installation cavity layer 23, after the pixel opening areas 24 are aligned with the pixels of the OLED display substrate one by one, the height of the installation cavity layer 23 is reduced through the fine adjustment lifting mechanism 5, and the mask plate body 2 is tightly attached to the OLED display substrate 1.
The sealing mechanism 6 is provided with a sealing plate 61, a sliding buckle groove 62 is arranged on the end face of the mask plate body 2, the sliding buckle groove 62 is arranged at the opening end of the installation cavity layer 23, the sealing plate 61 is slidably arranged in the sliding buckle groove 62, a chamfer is further arranged at one corner of the mask plate body 2, the chamfer is arranged close to the opening of the sliding buckle groove 62, the chamfer is convenient for the sealing plate 61 to be inserted into the sliding buckle groove 62 to be in sealing fit with the sliding buckle groove 62, and the opening of the installation cavity layer 23 is sealed through the sealing mechanism 6.
The mask plate lower plate 22 has the same structure as the mask plate upper plate 21, namely a pixel opening area 24 is formed, the adjustable fine adjustment lifting mechanism 5 enables the installation cavity layer 23 to be simultaneously installed into the two OLED display substrates 1, the display surfaces of the two OLED display substrates are respectively aligned to the pixel opening areas 24 on the mask plate lower plate 22 and the mask plate upper plate 21, the evaporation work of the two OLED display substrates 1 can be simultaneously completed during evaporation, and the efficiency is higher.
As shown in fig. 7 to 8, the two mask plate lower plates 22 and the mask plate upper plate 21 are respectively provided with a sliding mask plate 31, two side portions of the two sliding mask plates 31 are respectively movably connected with a same push-pull handle 33, that is, two side portions of the two sliding mask plates 31 are provided with an upward hook plate and a downward hook plate, the push-pull handle 33 is also provided with hook plates respectively extending to two sides to be respectively matched with the hook plates, when the push-pull handle 33 is pulled to two sides, the two sliding mask plates 31 can be simultaneously controlled in a sliding manner, and a movable gap is formed between the hook plate of the push-pull handle 33 and the other two hook plates.
The OLED display substrate is required to emit red (R), green (G) and blue (B) organic light emitting layers and a structure for protecting the organic light emitting layers respectively, the organic light emitting layers and the protective layers are covered on corresponding RGB pixels in the OLED display substrate through evaporation, and the traditional method is to replace masks with different corresponding patterns to realize evaporation when the pixels with different colors are subjected to evaporation. However, this method is too inefficient, and the quality of the evaporation is too low and the defect rate is too high.
Therefore, the invention provides the application method of the mask plate for OLED evaporation, which can improve the evaporation quality, wherein the mask plate is used in the OLED evaporation process, and the evaporation process comprises the following steps:
firstly, the height of the installation cavity layer 23 is adjusted through the fine adjustment lifting mechanism 5, so that the height of the installation cavity layer 23 is larger than the thickness of the OLED display substrate 1;
secondly, the OLED display substrate 1 is arranged in the installation cavity layer 23, and the height of the installation cavity layer 23 is adjusted through the fine adjustment lifting mechanism 5, so that the inner wall of the installation cavity layer 23 is tightly attached to the OLED display substrate 1;
thirdly, the position of a sliding mask plate 31 of the local mask plate mechanism 3 is adjusted in a sliding mode, so that the pixel opening 26 overlapped with the through hole 32 corresponds to the color of a pixel to be evaporated;
fourthly, the mask plate body 2 is placed into the device to carry out vacuum evaporation on the OLED display substrate 1.
Further, after the OLED display substrate 1 finishes the evaporation of one pixel color, the through hole 32, the pixel opening 26 and the whole pixel opening area 24 are cleaned, the position of the sliding mask 31 of the local mask mechanism 3 is adjusted in a sliding manner, so that the pixel opening 26 overlapped with the through hole 32 corresponds to the pixel color of the next evaporation, finally, the OLED display substrate 1 in the installation cavity layer 23 is subjected to vacuum evaporation, and the steps are repeated until all the pixel colors of the OLED display substrate 1 are evaporated and the quality reaches the standard. Of course, after the OLED display substrate 1 completes one evaporation, the evaporation work of one pixel color may not be completed, and the position of the sliding mask plate 31 may also be adjusted to expose another corresponding pixel of the pixel color that is not evaporated last time, and the above operation is performed again until the evaporation work of one pixel color is completed.
Further, after the OLED display substrate 1 is loaded into the mounting cavity layer 23, the OLED display substrate 1 is hermetically fixed in the mounting cavity layer 23 through the sealing mechanism 6.
Further, in the application method, in the process that the sliding mask plate 31 of the local mask plate mechanism 3 is adjusted in a sliding manner in the mask plate body 2, the sliding mask plate 31 is accurately positioned and fixed through the positioning mechanism 4, so that the through holes 32 and the pixel openings 26 are accurately superposed, and the dislocation movement cannot occur in the evaporation process.
When the mask plate is applied to carry out evaporation on the OLED display substrate 1, the evaporation efficiency is effectively improved, meanwhile, evaporation of pixels of all colors is not interfered with one another, the evaporation quality is greatly improved, the defective rate is reduced, the OLED display substrate can be effectively protected, the damage to raw materials is effectively reduced, and the defective rate is further reduced.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims.

Claims (10)

1. The utility model provides a can improve OLED mask plate for coating by vaporization of coating by vaporization quality which characterized in that: the OLED display device comprises an OLED display substrate (1) and a mask plate body (2), wherein the mask plate body (2) comprises a mask plate upper plate (21) and a mask plate lower plate (22), a mounting cavity layer (23) is arranged between the mask plate upper plate (21) and the mask plate lower plate (22), a graphene layer (27) covers the whole inner wall of the mounting cavity layer (23), the OLED display substrate (1) is tightly installed in the mounting cavity layer (23), a pixel opening area (24) is further formed in the mask plate upper plate (21), and a local mask plate mechanism (3) is arranged in the mask plate body (2) in a sliding mode;
a positioning mechanism (4) is arranged between the mask plate body (2) and the local mask plate mechanism (3), the mask plate upper plate (21) is movably buckled on the mask plate lower plate (22), a fine adjustment lifting mechanism (5) is arranged between the mask plate upper plate (21) and the mask plate lower plate (22), and a sealing mechanism (6) is further arranged at an opening of the installation cavity layer (23).
2. The mask plate for OLED evaporation capable of improving evaporation quality according to claim 1, characterized in that: pixel opening groups (25) are uniformly and densely distributed in the pixel opening area (24), each pixel opening group (25) comprises at least three pixel openings (26), and the size and the arrangement combination mode of the pixel openings (26) in each pixel opening group (25) are consistent with those of the OLED display substrate (1);
the local mask plate mechanism (3) is provided with a sliding mask plate (31), through holes (32) are uniformly formed in the sliding mask plate (31), the through holes (32) slide to different positions and are overlapped with one pixel opening (26) in each pixel opening group (25), at least one side portion of the sliding mask plate (31) is connected with a push-pull handle (33), the push-pull handle (33) extends out of the side face of the mask plate body (2), and a sealing layer (35) is further arranged on the inner wall of the sliding area of the sliding mask plate (31).
3. The mask plate for OLED evaporation capable of improving evaporation quality according to claim 2, characterized in that: the positioning mechanism (4) is provided with positioning holes (41), the positioning holes (41) are arranged on the mask plate upper plate (21), at least three positioning grooves (42) are uniformly formed in the upper surface of the sliding mask plate (31), positioning keys (43) are further installed in the positioning holes (41) in a matched mode, and the positioning keys (43) penetrate through the positioning holes (41) to be tightly matched with the positioning grooves (42).
4. The mask plate for OLED evaporation capable of improving evaporation quality according to claim 2, characterized in that: the fine adjustment lifting mechanism (5) is provided with an air valve port (51), a groove (52) is formed in the lower mask plate (22), a convex block (53) is arranged on the upper mask plate (21), the groove (52) is in close fit with the convex block (53), and the air valve port (51) is arranged at the bottom of the groove (52).
5. The mask plate for OLED evaporation capable of improving evaporation quality according to claim 2, characterized in that: the sealing mechanism (6) is provided with a sealing plate (61), a sliding buckling groove (62) is formed in the end face of the mask plate body (2), the sliding buckling groove (62) is formed in the opening end of the installation cavity layer (23), the sealing plate (61) is slidably installed in the sliding buckling groove (62), a chamfer is further formed in one edge of the mask plate body (2), and the chamfer is arranged close to the opening of the sliding buckling groove (62).
6. The mask plate for OLED evaporation capable of improving evaporation quality according to claim 2, characterized in that: the mask lower plate (22) has a structure similar to the mask upper plate (21), that is, a pixel opening area (24) is formed.
7. The application method of the mask plate for OLED evaporation, which can improve the evaporation quality, of any one of claims 2 to 6, is characterized in that: the mask plate is used in the OLED evaporation process, and the evaporation process comprises the following steps:
firstly, the height of the installation cavity layer (23) is adjusted through a fine adjustment lifting mechanism (5), so that the height of the installation cavity layer (23) is larger than the thickness of the OLED display substrate (1);
secondly, the OLED display substrate (1) is arranged in the installation cavity layer (23), and the height of the installation cavity layer (23) is adjusted through the fine adjustment lifting mechanism (5), so that the inner wall of the installation cavity layer (23) is tightly attached to the OLED display substrate (1);
thirdly, the position of a sliding mask plate (31) of the local mask plate mechanism (3) is adjusted in a sliding mode, so that the pixel openings (26) overlapped with the through holes (32) correspond to the colors of pixels to be subjected to evaporation;
fourthly, the mask plate body (2) is placed into the device to carry out vacuum evaporation on the OLED display substrate (1).
8. The application method of the OLED evaporation mask plate capable of improving evaporation quality according to claim 7, is characterized in that: after the OLED display substrate (1) finishes the evaporation work of one pixel color, the through hole (32), the pixel opening (26) and the whole pixel opening area (24) are cleaned, the position of the sliding mask plate (31) of the local mask plate mechanism (3) is adjusted in a sliding mode, the pixel opening (26) overlapped with the through hole (32) corresponds to the pixel color of the next evaporation, finally, the OLED display substrate (1) in the installation cavity body layer (23) is subjected to vacuum evaporation, and the operation is circulated until all the pixel colors of the OLED display substrate (1) are evaporated and the quality reaches the standard.
9. The application method of the OLED evaporation mask plate capable of improving evaporation quality according to claim 7, is characterized in that: after the OLED display substrate (1) is arranged in the installation cavity layer (23), the OLED display substrate (1) is sealed and fixed in the installation cavity layer (23) through a sealing mechanism (6).
10. The application method of the OLED evaporation mask plate capable of improving evaporation quality according to claim 8, is characterized in that: the sliding mask plate (31) of the local mask plate mechanism (3) is precisely positioned and fixed through the positioning mechanism (4) in the sliding adjustment process inside the mask plate body (2), so that the through holes (32) and the pixel openings (26) are precisely coincided, and dislocation movement cannot occur in the evaporation process.
CN202111001172.7A 2021-08-30 2021-08-30 OLED (organic light emitting diode) evaporation mask plate capable of improving evaporation quality and application method thereof Pending CN113637940A (en)

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