CN113634093A - Gas purifier for treating semiconductor waste gas - Google Patents
Gas purifier for treating semiconductor waste gas Download PDFInfo
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- CN113634093A CN113634093A CN202110919092.3A CN202110919092A CN113634093A CN 113634093 A CN113634093 A CN 113634093A CN 202110919092 A CN202110919092 A CN 202110919092A CN 113634093 A CN113634093 A CN 113634093A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/30—Controlling by gas-analysis apparatus
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
- B01D46/12—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces in multiple arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/26—Drying gases or vapours
- B01D53/261—Drying gases or vapours by adsorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
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- Chemical Kinetics & Catalysis (AREA)
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- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Treating Waste Gases (AREA)
Abstract
The invention belongs to the field of gas purifiers, and particularly relates to a gas purifier for treating semiconductor waste gas, which comprises a base, wherein a first cylinder and a second cylinder are respectively fixed on two sides of the top of the base; the middle part of the inner cavity of the first cylinder body is fixed with an active carbon filter screen plate and a high-efficiency HEPA filter screen plate. The aerator can be adjusted by the controller according to the concentration of the entering tail gas, so that the reaction sufficiency of the reaction liquid is ensured, and meanwhile, the inclination angle of the net frame can be adjusted according to the detection result, so that the contact rate of the activated carbon particles and the water-absorbent resin particles in the net frame with the gas can be adjusted, the cleaning efficiency is adjusted, the adjustment can be performed according to the concentration of the smoke, the accurate treatment of the waste gas is ensured, and the discharge of the waste gas is avoided being unqualified.
Description
Technical Field
The invention relates to the field of gas purifiers, in particular to a gas purifier for treating semiconductor waste gas.
Background
Semiconductors are used in the fields of integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power conversion, etc., for example, diodes are devices made of semiconductors, and the importance of semiconductors is enormous from the viewpoint of technology or economic development. Most of electronic products, such as computers, mobile phones or digital audio recorders, have a core unit closely related to semiconductors, and common semiconductor materials include silicon, germanium, gallium arsenide, etc., and silicon is the most influential one of various semiconductor material applications.
Present semiconductor is at the in-process of processing production, can produce waste gas, thereby need utilize equipment to handle waste gas, thereby can avoid waste gas direct discharge to cause the pollution to the air, also avoid causing the injury to the human body simultaneously, current clarification plant, most all react through the liquid of reaction, then directly discharge after handling through filterable mode again, but at the in-process of handling, there is the condition of handling not thorough, and at the in-process of handling, can't adjust according to the size of smog concentration, and then the exhaust-gas treatment effect to different concentrations is not good. For this reason, new technical solutions need to be designed to solve the problem.
Disclosure of Invention
The object of the present invention is to provide a scrubber for treating semiconductor exhaust gas that solves the problems set forth in the background art.
In order to achieve the purpose, the invention provides the following technical scheme: a gas purifier for treating semiconductor waste gas comprises a base, wherein a first cylinder and a second cylinder are respectively fixed on two sides of the top of the base, the top of the first cylinder is communicated with a first guide pipe, the top of the first guide pipe is communicated with a fan, and the top of the fan is communicated with a gas inlet pipe;
the device comprises a first barrel, a second barrel, an active carbon filter screen plate and a high-efficiency HEPA filter screen plate are fixed in the middle of an inner cavity of the first barrel, an aerator is fixed at the bottom of the inner cavity of the first barrel, a drain pipe is communicated with the lower side of the right side wall of the first barrel, a liquid pump is fixed on the lower side of the left side wall of the first barrel, a liquid inlet of the liquid pump is communicated with a liquid inlet pipe, a liquid outlet of the liquid pump is communicated with a liquid guide pipe, the outer end of the liquid guide pipe is communicated with the first barrel, a smoke concentration sensor is fixedly mounted on the upper side of the outer wall of the first pipe, the tail end of the first pipe penetrates through the active carbon filter screen plate and the high-efficiency HEPA filter screen plate and is inserted into the lower side of the inner cavity of the first barrel, a controller is fixed in the middle of the right side wall of the first barrel, a second pipe is communicated with the upper side of the right side wall of the first barrel, the outer end of the second pipe penetrates through the outer wall of the second barrel and is embedded on the inner wall of the second barrel, the air outlet of the second conduit is arranged at the bottom of the inner cavity of the second cylinder;
the utility model discloses a tail gas detector, including first barrel, drive shell, screen frame, exhaust pipe, drive shell, screen frame, exhaust pipe, and exhaust pipe, and exhaust pipe.
As a preferred embodiment of the present invention, the signal output ends of the smoke concentration sensor and the tail gas detector are connected to the signal input end of the controller, and the signal output end of the controller is connected to the signal input ends of the liquid pump, the aerator, and the motor, respectively.
As a preferred embodiment of the present invention, an electromagnetic valve is fixedly installed on an outer wall of the drain pipe, and a signal output end of the controller is connected to a signal input end of the electromagnetic valve.
As a preferred embodiment of the invention, the outer end of the liquid guide pipe is arranged at the lower side of the activated carbon filter screen plate.
In a preferred embodiment of the present invention, the screen frames on the left and right sides are respectively disposed in a staggered manner.
As a preferred embodiment of the present invention, the inner cavity of the second cylinder is a square cavity, and the front and rear side walls of the screen frame are respectively attached to the front and rear walls of the inner cavity of the second cylinder.
As a preferred embodiment of the present invention, the outside of the blower is fixedly connected to the outer wall of the first cylinder through a connecting rod.
In a preferred embodiment of the present invention, rubber legs are fixed at all four corners of the bottom of the base.
Compared with the prior art, the invention has the following beneficial effects:
1. the treatment liquid is used for treating, the treatment liquid is filtered again, the concentration of the tail gas is detected again after the treatment liquid is filtered again through the screen frame, adverse effect caused by unqualified direct discharge is avoided, the aerator can be adjusted by the controller according to the concentration of the entering tail gas, reaction sufficiency of the reaction liquid is guaranteed, the inclined angle of the screen frame can be adjusted according to a detection result after the concentration of the discharged tail gas is detected, contact rates of activated carbon particles and water-absorbent resin particles in the screen frame and gas can be adjusted, cleaning efficiency is adjusted, adjustment can be carried out according to the concentration of smoke, accurate waste gas treatment is guaranteed, and unqualified discharge is avoided.
2. According to the invention, the liquid pump can be started to work regularly through the controller, so that the treatment liquid in the inner cavity of the first cylinder can be exchanged regularly, the treatment effect is further ensured, the treatment effect is prevented from being influenced due to overlong use time, the exchange time can be calculated according to the smoke concentration and the smoke amount, and the accuracy is further ensured.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic view showing the overall structure of a scrubber for treating semiconductor exhaust gas according to the present invention;
FIG. 2 is a schematic diagram of the inner cavities of the first cylinder and the second cylinder of the scrubber for treating semiconductor waste gas according to the present invention;
FIG. 3 is a schematic view of the inner cavity of the driving shell of the scrubber for treating semiconductor waste gas according to the present invention;
fig. 4 is a schematic diagram of the inner cavity structure of a net frame of a scrubber for treating semiconductor waste gas according to the present invention.
In the figure: 1. a base; 2. a first cylinder; 3. a second cylinder; 4. a first conduit; 5. a fan; 6. a connecting rod; 7. an exhaust pipe; 8. an air inlet pipe; 9. a smoke concentration sensor; 10. a high-efficiency HEPA filter screen plate; 11. an active carbon filter screen plate; 12. a liquid pump; 13. a liquid inlet pipe; 14. an aerator; 15. a drain pipe; 16. a controller; 17. a second conduit; 18. an exhaust gas detector; 19. a drive case; 20. a screen frame; 21. a motor; 22. a hole; 23. activated carbon particles; 24. water-absorbent resin particles; 25. a catheter.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "disposed" are to be construed broadly and can, for example, be fixedly connected, disposed, detachably connected, disposed, or integrally connected and disposed. For those skilled in the art, the specific meaning of the above terms in the present invention can be understood in specific situations, the model of the electrical appliance provided in the present invention is only referred to, and different models of electrical appliances with the same function can be replaced according to the actual use situation.
Referring to fig. 1-4, the present invention provides a technical solution: a gas purifier for treating semiconductor waste gas comprises a base 1, wherein a first barrel 2 and a second barrel 3 are respectively fixed on two sides of the top of the base 1, the top of the first barrel 2 is communicated with a first conduit 4, the top of the first conduit 4 is communicated with a fan 5, the top of the fan 5 is communicated with an air inlet pipe 8, and particularly, the fan 5 can guide the waste gas into the first barrel 2;
the inner chamber middle part of first barrel 2 is fixed with active carbon filter screen plate 11 and high-efficient HEPA filter screen plate 10, can adsorb the well granule of waste gas, the inner chamber bottom of first barrel 2 is fixed with aerator 14, can drive the treatment fluid and roll, increases reaction effect, the right side wall downside intercommunication of first barrel 2 has drain pipe 15, the solenoid valve is installed to the outer wall of drain pipe 15, the left side wall downside of first barrel 2 is fixed with liquid pump 12, the inlet intercommunication of liquid pump 12 has feed liquor pipe 13, the liquid outlet intercommunication of liquid pump 12 has catheter 25, the outer end and the first barrel 2 intercommunication of catheter 25, the outer wall upside fixed mounting of first pipe 4 has smoke concentration sensor 9, the tail end of first pipe 4 runs through active carbon filter screen plate 11 and high-efficient HEPA filter screen plate 10 and pegs graft in the inner chamber downside of first barrel 2, a controller 16 is fixed in the middle of the right side wall of the first barrel 2, a second conduit 17 is communicated with the upper side of the right side wall of the first barrel 2, the outer end of the second conduit 17 penetrates through the outer wall of the second barrel 3 and is embedded on the inner wall of the second barrel 3, and the air outlet of the second conduit 17 is arranged at the bottom of the inner cavity of the second barrel 3;
a driving shell 19 is fixed on two side walls of an inner cavity of the second cylinder 3, a motor 21 is fixed in the inner cavity of the driving shell 19, a net frame 20 is fixedly connected to the outer end of a transmission shaft of the motor 21, the net frame 20 penetrates through a hole 22 formed in the outer wall of the driving shell 19, activated carbon particles 23 and water-absorbent resin particles 24 are filled in the inner cavity of the net frame 20, an exhaust pipe 7 is communicated with the top of the second cylinder 3, and a tail gas detector 18 is fixed on the outer wall of the exhaust pipe 7;
the signal output ends of the smoke concentration sensor 9 and the tail gas detector 18 are connected with the signal input end of the controller 16, and the signal output end of the controller 16 is respectively connected with the signal input ends of the liquid pump 12, the aerator 14, the motor 21 and the electromagnetic valve.
When the device is used, waste gas is firstly extracted by the fan 5 to enter the inner cavity of the first cylinder 2, the concentration of the waste gas can be detected by the smoke concentration sensor 9, the detected data is fed back to the controller 16, meanwhile, the controller 16 can calculate the smoke amount entering the first cylinder 2 in unit time, the entering smoke is subjected to reaction treatment by the treatment liquid, in the treatment process, the controller 16 can adjust the working efficiency of the aerator 14 according to the smoke entering amount and the concentration, so that the full reaction is ensured, the reacted gas is filtered by the activated carbon filter screen plate 11 and the high-efficiency HEPA filter screen plate 10, then enters the inner cavity of the second cylinder 3, passes through a plurality of groups of screen frames 20 in the inner cavity of the second cylinder 3, is subjected to moisture absorption by the water-absorbent resin particles 24 in the inner cavity of the screen frame 20, and is subjected to impurity absorption again by the activated carbon particles 23, the tail gas is directly discharged, whether the discharged tail gas is qualified or not is detected through the tail gas detector 18, if the discharged tail gas is unqualified, the controller 16 starts the motor 21 to drive the screen frame 20 to rotate for a certain angle, so that the contact rate of the gas and the activated carbon particles 23 can be adjusted, the treatment effect is further improved, the thorough treatment is ensured, meanwhile, the synchronous adjustment of the aerator 14 ensures that the primary adjustment effect is better, and the qualification of the discharged tail gas can be thoroughly ensured;
simultaneously at the in-process that uses, controller 16 can be according to the volume and the concentration that smog got into, the calculation obtains the time that leading-in treatment fluid can be used, after reacting a certain time, start in liquid pump 12 draws new treatment fluid entering first barrel 2, open the solenoid valve of drain pipe 15 outer wall simultaneously and carry out the treatment fluid after the discharge use to supply new treatment fluid, guarantee the treatment effect, the time of treatment fluid is traded with the control that can be accurate, thereby the effect of further assurance processing.
In an alternative embodiment, the outer end of the liquid guide tube 25 is arranged on the lower side of the activated carbon filter screen plate 11.
It should be noted that, ensure that the treatment fluid can enter the lower side of the inner cavity of the first cylinder 2, and do not influence the activated carbon filter screen plate 11 and the high-efficiency HEPA filter screen plate 10.
In an alternative embodiment, the frames 20 on the left and right sides are staggered.
It should be noted that the staggered frames 20 can ensure that the gas is staggered.
In an alternative embodiment, the inner cavity of the second cylinder 3 is a square cavity, and the front and rear side walls of the screen frame 20 are respectively attached to the front and rear walls of the inner cavity of the second cylinder 3.
It should be noted that the inner cavity of the second cylinder 3 can be fully covered.
In an alternative embodiment, the outer part of the fan 5 is fixedly connected with the outer wall of the first cylinder 2 through a connecting rod 6.
It should be noted that the stability of the fan 5 is ensured.
In an alternative embodiment, rubber feet are fixed at the four corners of the bottom of the base 1.
It should be noted that the stability of the entire apparatus is ensured.
In addition, the components of the gas purifier for treating the semiconductor waste gas comprise general standard components or components known by a person skilled in the art, the structure and the principle of the gas purifier are known by the person skilled in the art through technical manuals or conventional experimental methods, at the idle position of the device, all the electric devices refer to power elements, electric devices, adaptive monitoring computers and power supplies which are connected through leads, the specific connection means refers to the following working principle, the electric connection is completed between the electric devices in sequence, the detailed connection means refers to the known technology in the art, the working principle and the process are mainly described below, and the electric control is not described.
While there have been shown and described what are at present considered the fundamental principles and essential features of the invention and its advantages, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (8)
1. A scrubber for treating semiconductor exhaust gas, comprising a base (1), characterized in that: a first cylinder (2) and a second cylinder (3) are respectively fixed on two sides of the top of the base (1), the top of the first cylinder (2) is communicated with a first conduit (4), the top of the first conduit (4) is communicated with a fan (5), and the top of the fan (5) is communicated with an air inlet pipe (8);
the inner chamber middle part of first barrel (2) is fixed with active carbon filter screen board (11) and high-efficient HEPA filter screen board (10), the inner chamber bottom of first barrel (2) is fixed with aeration machine (14), the right side wall downside intercommunication of first barrel (2) has drain pipe (15), the left side wall downside of first barrel (2) is fixed with liquid pump (12), the inlet intercommunication of liquid pump (12) has feed liquor pipe (13), the liquid outlet intercommunication of liquid pump (12) has catheter (25), the outer end and the first barrel (2) intercommunication of catheter (25), the outer wall upside fixed mounting of first pipe (4) has smog concentration sensor (9), the tail end of first pipe (4) runs through active carbon filter screen board (11) and high-efficient HEPA filter screen board (10) and pegs graft in the inner chamber downside of first barrel (2), a controller (16) is fixed in the middle of the right side wall of the first barrel (2), a second conduit (17) is communicated with the upper side of the right side wall of the first barrel (2), the outer end of the second conduit (17) penetrates through the outer wall of the second barrel (3) and is embedded on the inner wall of the second barrel (3), and an air outlet of the second conduit (17) is arranged at the bottom of the inner cavity of the second barrel (3);
the inner chamber both sides wall of second barrel (3) all is fixed with drive shell (19), the inner chamber of drive shell (19) is fixed with motor (21), the transmission shaft outer end fixedly connected with screen frame (20) of motor (21), hole (22) that drive shell (19) outer wall was seted up are run through in screen frame (20), the inner chamber packing of screen frame (20) has activated carbon particle (23) and water-absorbent resin granule (24), the top intercommunication of second barrel (3) has blast pipe (7), the outer wall of blast pipe (7) is fixed with tail gas detection appearance (18).
2. A scrubber for treating semiconductor off-gas as defined in claim 1, wherein: the signal output ends of the smoke concentration sensor (9) and the tail gas detector (18) are connected with the signal input end of the controller (16), and the signal output end of the controller (16) is connected with the signal input ends of the liquid pump (12), the aerator (14) and the motor (21) respectively.
3. A scrubber for treating semiconductor off-gas as defined in claim 1, wherein: the outer wall fixed mounting of drain pipe (15) has the solenoid valve, the signal output part of controller (16) and the signal input part of solenoid valve are connected.
4. A scrubber for treating semiconductor off-gas as defined in claim 1, wherein: the outer end of the liquid guide pipe (25) is arranged at the lower side of the activated carbon filter screen plate (11).
5. A scrubber for treating semiconductor off-gas as defined in claim 1, wherein: the screen frames (20) on the left side and the right side are respectively arranged in a staggered mode.
6. A scrubber for treating semiconductor off-gas as defined in claim 1, wherein: the inner cavity of the second cylinder body (3) is a square cavity, and the front side wall and the rear side wall of the screen frame (20) are respectively attached to the front wall and the rear wall of the inner cavity of the second cylinder body (3).
7. A scrubber for treating semiconductor off-gas as defined in claim 1, wherein: the outer part of the fan (5) is fixedly connected with the outer wall of the first cylinder (2) through a connecting rod (6).
8. A scrubber for treating semiconductor off-gas as defined in claim 1, wherein: rubber support legs are fixed at four corners of the bottom of the base (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110919092.3A CN113634093A (en) | 2021-08-11 | 2021-08-11 | Gas purifier for treating semiconductor waste gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110919092.3A CN113634093A (en) | 2021-08-11 | 2021-08-11 | Gas purifier for treating semiconductor waste gas |
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| Publication Number | Publication Date |
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| CN113634093A true CN113634093A (en) | 2021-11-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110919092.3A Pending CN113634093A (en) | 2021-08-11 | 2021-08-11 | Gas purifier for treating semiconductor waste gas |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114470993A (en) * | 2022-01-28 | 2022-05-13 | 众智机械(临沂)有限公司 | Be used for waste gas dust removal to adsorb processing apparatus |
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| JP2000167342A (en) * | 1998-12-09 | 2000-06-20 | Kashiyama Kogyo Kk | Exhaust gas treatment method |
| CN207042229U (en) * | 2017-08-14 | 2018-02-27 | 肖胜 | A kind of thermal power generation wasted nickel catalyst processing unit |
| CN208694518U (en) * | 2018-07-05 | 2019-04-05 | 石家庄明石印染有限公司 | Energy-saving printing and dyeing emission-control equipment |
| CN211245878U (en) * | 2019-11-01 | 2020-08-14 | 李宏益 | Air purification device for decorative film processing |
| CN212091514U (en) * | 2020-03-30 | 2020-12-08 | 常州蔓格环保科技有限公司 | Waste gas treatment equipment |
| CN212790393U (en) * | 2020-05-21 | 2021-03-26 | 桃源县虹鑫竹业有限公司 | Waste gas collecting and treating device |
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2021
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH0938463A (en) * | 1995-08-01 | 1997-02-10 | Ebara Corp | Treating method of waste gas from semiconductor production |
| JP2000167342A (en) * | 1998-12-09 | 2000-06-20 | Kashiyama Kogyo Kk | Exhaust gas treatment method |
| CN207042229U (en) * | 2017-08-14 | 2018-02-27 | 肖胜 | A kind of thermal power generation wasted nickel catalyst processing unit |
| CN208694518U (en) * | 2018-07-05 | 2019-04-05 | 石家庄明石印染有限公司 | Energy-saving printing and dyeing emission-control equipment |
| CN211245878U (en) * | 2019-11-01 | 2020-08-14 | 李宏益 | Air purification device for decorative film processing |
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| CN212790393U (en) * | 2020-05-21 | 2021-03-26 | 桃源县虹鑫竹业有限公司 | Waste gas collecting and treating device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114470993A (en) * | 2022-01-28 | 2022-05-13 | 众智机械(临沂)有限公司 | Be used for waste gas dust removal to adsorb processing apparatus |
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