CN1136224A - Piezoelectric element and method of manufacturing the same - Google Patents
Piezoelectric element and method of manufacturing the same Download PDFInfo
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- CN1136224A CN1136224A CN95119785A CN95119785A CN1136224A CN 1136224 A CN1136224 A CN 1136224A CN 95119785 A CN95119785 A CN 95119785A CN 95119785 A CN95119785 A CN 95119785A CN 1136224 A CN1136224 A CN 1136224A
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Abstract
The invention relates to a piezoelectric element, which comprises an inner electrode which is buried inside a piezoelectric ceramics body and extends along the longitudinal direction of the piezoelectrics. A first, a second and a third surface electrodes are formed inside a first, a second and a third parts of the upper surface and lower surface of the piezoelectric ceramics along the longitudinal direction. The formation of the connecting electrodes facilitates the mutual connection of the three surface electrodes. The polarization mode of the three parts causes the polarization direction of the second part to be opposite to the polarization of the first part and the third part, and ensures the areas above and below the inner electrode to polarize in contrary directions inside each part of the three parts.
Description
The method that the present invention relates to a kind of piezoelectric element and make this piezoelectric element in more detail, the present invention relates to a kind of piezoelectric element of the bimorph type that is used to form acceleration transducer and makes the method for this piezoelectric element.
In general, can be used for surveying impact etc. to the acceleration transducer that comprises a kind of piezoelectric element.An example of such piezoelectric element 1 is described referring now to Fig. 1.
This piezoelectric element 1 has a piezoelectric ceramic body 2.On a upper surface of this piezoelectric ceramic body 2, form first, second and the 3rd surface electrode 3,4 and 5 respectively by film formation method (as sputter).At longitudinal separation place electrode 3,4 and 5 is separated along piezoelectric ceramic body 2.Moreover, on this upper surface of piezoelectric ceramic body 2, form one first connection electrode 6, first to the 3rd surface electrode 3 to 5 is electrically connected mutually.Form one first signal extraction electrode by this first to the 3rd surface electrode 3 to 5 and this first connection electrode 6.
On the other hand, first to third part respectively forming first, second and three surface electrode 7,8 and 9 at it by a kind of film formation method on the lower surface of this piezoelectric ceramic body 2.Form one second connection electrode 10 and make it cover this first to the 3rd surface electrode 7 to 9 at least in part, this first to the 3rd surface electrode 7 to 9 is electrically connected mutually.Form a secondary signal extraction electrode by this first to the 3rd surface electrode 7 to 9 and this second connection electrode 10.
This piezoelectric ceramic body 2 has one and is arranged on interior electrode 11 an intermediate vertical position, longitudinal extension.As shown in fig. 1, this interior electrode 11 does not extend to arbitrary end of this piezoelectric ceramic body 2.
In a kind of mode of in hypomere, describing polarized in the inside of this piezoelectric ceramic body 2.A piezoelectric ceramic body region 2A being positioned on the part that possesses this electrode 11 as shown by arrow B, polarizes this second portion downwards, and shown in arrow A and C, make this first and third part upwards polarization respectively.At a piezoelectric ceramic body region 2B who is positioned under this electrode 11, as arrow D, E and F respectively shown in, make first opposite with the polarised direction of piezoelectric ceramic body region 2A on being positioned at this electrode 11 to the polarised direction of third part.In other words, first to the various piece of third part, the piezoelectric ceramic body region 2A and the 2B of upper and lower are polarized in the opposite direction.In each of each piezoelectric ceramic body region 2A and 2B, make second portion and first and third part polarize in the opposite direction.
On the upper surface of this piezoelectric ceramic body 2, first surface electrode 3 extends a side end that arrives this piezoelectric ceramic body 2, and an end that is positioned at the first signal extraction electrode on the upper surface thus extends to this side surface of this piezoelectric ceramic body 2.On the lower surface of this piezoelectric ceramic body 2, form another side end that the 3rd surface electrode 9 makes it also to extend to this piezoelectric ceramic body 2, be positioned at this side end that secondary signal extraction electrode on the lower surface extends to this piezoelectric ceramic body 2 thus.
Dotted line G and H be illustrated in this piezoelectric ceramic body 2 first to each border between third part.First, second and third part lay respectively between left side, border G and the H of border G and the right side of border H.
This piezoelectric ceramic body 2 supports by disposing the framework 12 and 13 that goes up at an upper portion thereof and at a lower portion thereof respectively.Framework 12 and 13 each all by making as the insulating material of aluminium oxide or another kind of material with desired rigidity that has, and all have a plate part and a pair of standing part that extends to this piezoelectric ceramic body 2 from the two ends of this plate part.Framework 12 is fixed to the upper surface of this piezoelectric ceramic body 2 at this to the front end place of standing part.Similarly, framework 13 is fixed to the lower surface of this piezoelectric ceramic body 2 at this to the front end place of standing part.
This piezoelectric element 1 has a kind of structure that makes framework 12 and 13 be fixed to the upper and lower of this piezoelectric ceramic body 2. External electrode 14 and 15 is arranged on two side surfaces of this structure.External electrode 14 is electrically connected to the signal extraction electrode on the upper surface that is positioned at these piezoelectrics 2, promptly the first surface electrode 3.On the other hand, external electrode 15 is electrically connected to the signal extraction electrode on the lower surface that is positioned at this piezoelectric ceramic body 2, i.e. the 3rd surface electrode 9.
When in an acceleration transducer this piezoelectric element 1 being set, this piezoelectric element 1 works as described as following.When acceleration acts on this piezoelectric element 1, make the piezoelectric ceramic body region 2A that forms this piezoelectric ceramic body 2 and each core of 2B by inertia force, promptly deformation takes place in second portion and first and third part in the opposite direction.In this case, make this second portion and first and third part be subjected to a kind of tension force or a kind of compression that produce by above-mentioned deformation.For instance, when the second portion at center is subjected to tension force, first and third part be subjected to compression.Because make second portion and first and third part polarize in the opposite direction, so owing to second portion and first and third part in the electric charge that produces of stress the quantity of electric charge that produces in the whole piezoelectric ceramic body 2 is greatly increased.Therefore, can form a kind of acceleration transducer with good detectivity.
The method of the piezoelectric element 1 shown in a kind of shop drawings 1 is described referring now to Fig. 2 A to 2C and Fig. 3 A and 3B.This method is used to form the piezoelectric element 1 shown in Fig. 1 from a kind of piezoelectric ceramic fertile material.Divide zone by dotted line X, Y, Z among Fig. 2 A to 2C and Fig. 3 A and the 3B corresponding to each piezoelectric element.
At first, shown in Fig. 2 A, make the piezoelectric ceramic parent 16 that its shape is a plate that has elongated.Electrode 11 extends it on longitudinal direction in an intermediate vertical position forms in this piezoelectric ceramic parent 16.Though in Fig. 2 A, form electrode 11 in many, shown in Figure 1, as a result of only provide an interior electrode 11 in the piezoelectric element 1 of generation.
By the part that possesses above-mentioned interior electrode 11 this piezoelectric ceramic parent 16 is divided into piezoelectric ceramic body region 16A top and the bottom and 16B.
Forming many groups first to the 3rd surface electrodes 3 to 5 on a upper surface of this piezoelectric ceramic parent 16 makes it longitudinally extend along piezoelectric ceramic body 16.
Forming many groups first to the 3rd surface electrodes 7 to 9 on a lower surface of this piezoelectric ceramic parent 16 similarly extends it on longitudinal direction.Forming first to the 3rd surface electrode 3 to 5 and 7 to 9 makes it be positioned above-mentioned first respectively to third part.
Polarize by the interior electrode 11 and first to the 3rd surface electrode 3 to 5 and 7 to 9 then.Promptly, higher voltage, lower voltage and middle voltage be added to respectively second surface electrode 4 and 8, the first and the 3rd surface electrode 3,5,7 and 9 and interior electrode 11 on, thereby to shown in C and the D to F, each piezoelectric ceramic body region 16A and 16B are polarized as the arrow A among Fig. 2 B.
Then, as shown in Fig. 2 C, in each piezoelectric element part, on first to the 3rd surface electrode 3 to 5 and 7 to 9, first and second connection electrode 6 and 10 are set respectively.
Then, as shown in Fig. 3 A, by adhesive respectively female framework 17 and 18 is connected to this piezoelectric ceramic body 16 the upper and lower and with integral body of its formation.Moreover, along 2 chain line X, Y and Z the structure shown in Fig. 3 A is cut obtaining single piezoelectric element 1, thereby obtain a structure 19 shown in Fig. 3 B.Making the signal extraction electrode on the upper surface that is arranged on this piezoelectric ceramic body 2 is that first surface electrode 3 is exposed on one first side surface of the structure 19 that obtains in the above described manner.Similarly, making an end of another signal extraction electrode is that the 3rd surface electrode 9 is exposed on one second side surface of this piezoelectric ceramic body 2. External electrode 14 and 15 shown in Fig. 1 is set on these side surfaces, makes each signal extraction electrode be electrically connected to obtain piezoelectric element 1 with external electrode 14 and 15.
But the method for above-mentioned manufacturing piezoelectric element 1 has following problem.First to the 3rd surperficial female electrode 3 to 5 that forms on the upper and lower surface of piezoelectric ceramic parent 16 and 7 to 9 thickness can be reduced according to formation condition.Surface electrode 3 to 5 and 7 to 9 minimizing thickness can destroy external electrode 14 and 15 with surface electrode 3 and 9 between be electrically connected, promptly external electrode 14 and 15 with each signal extraction electrode between be electrically connected.
In addition, when toasting when forming connection electrode 6 and 10, because the heat that is applied during toasting can cause depolarising in piezoelectric ceramic body 16 by the silk screen printing conductive paste with to this paste.When producing slight depolarising, detectivity is descended.Therefore, conventional manufacture method makes the decreased performance of the zero defect rate of acceleration transducer and the property produced in batches aspect, and this is very disadvantageous.
In order to solve the problem of above-mentioned piezoelectric element and the method aspect of making this piezoelectric element, the method that an object of the present invention is to provide a kind of piezoelectric element and make this piezoelectric element, provide reliable electrical connection between signal extraction electrode that the present invention provides and the external electrode in this element, in piezoelectric ceramic body, do not produce the depolarising phenomenon simultaneously.
According to the first aspect of a preferred embodiment of the present invention, a piezoelectric element comprises piezoelectrics, and these piezoelectrics have first, second and third part, interior electrode and the first and second signal extraction electrodes.Above-mentioned first extends along a longitudinal direction to third part, make this first and third part and this second portion polarize in the opposite direction along thickness direction, electrode is set at the inside of these piezoelectrics in above-mentioned, and it is extended along this longitudinal direction, but does not extend to the end of longitudinal direction.The above-mentioned first and second signal extraction electrodes are separately positioned on the upper and lower surface of these piezoelectrics.This first and second signals extraction electrode has first to the 3rd surface electrode and the connection electrode.The thick film that above-mentioned first to the 3rd surface electrode is included in is first that form respectively to the third part, be separated from each other along this longitudinal direction.Above-mentioned connection electrode comprises to be used so that first to the 3rd surface electrode film that be electrically connected mutually, that cover this first to the 3rd surface electrode simultaneously at least in part.
Can form this connection electrode in this wise, make it not extend to two longitudinal ends of these piezoelectrics.These piezoelectrics are preferably made by piezoelectric ceramic.
According to the second aspect of a preferred embodiment of the present invention, above-mentioned piezoelectric element can be made by following a kind of method.This method may further comprise the steps, and makes piezoelectrics, and these piezoelectrics have one and are arranged on interior electrode this piezoelectrics inside, that extend along one longitudinal direction; To third part, conductive paste is coated on the upper and lower surface of these piezoelectrics at first of these piezoelectrics along this longitudinal direction, and these piezoelectrics are toasted to form first to the 3rd surface electrode respectively; By the electrode in this and first to the 3rd surface electrode that on the upper and lower surface of these piezoelectrics, provides respectively these piezoelectrics are polarized, make first and third part of these piezoelectrics and second portion polarize in the opposite direction along a thickness direction; And forming first and second connection electrode, this connection electrode is electrically connected and partly covers at least respectively this first to the 3rd surface electrode mutually to first to the 3rd surface electrode that forms respectively on the upper and lower surface of these piezoelectrics.In this case, make the piezoelectrics with interior electrode step can by for example a pair of piezoelectric ceramic plate be connected with each other make in the method for electrode between two plates realize.
According to the third aspect of a preferred embodiment of the present invention, above-mentioned piezoelectric element can be made by following step: make a pair of piezoelectric ceramic plate; Electrode in forming on the single first type surface of each piezoelectric ceramic plate makes and should extend along its longitudinal direction by interior electrode, but do not extend to two longitudinal ends; Toast by the coating electrically conductive paste with to it, the surperficial upper edge of this piezoelectric ceramic plate longitudinal direction first to third part (surface of this piezoelectric ceramic plate with possess in this of electrode first relative to third part) in thick film be set respectively form first to the 3rd surface electrode; To each piezoelectric ceramic plate that possesses the interior electrode and first to the 3rd surface electrode polarize so that first and third part and second portion polarize in the opposite direction along thickness direction by the electrode in this and first to the 3rd surface electrode; Form connection electrode first to the 3rd surface electrode is electrically connected mutually thereby film is set on the surface of the piezoelectric ceramic plate by possessing first to the 3rd surface electrode at each, cover first to the 3rd surface electrode simultaneously at least in part; And the surface that possesses interior electrode is connected to each other with this surface to piezoelectric ceramic plate that possesses connection electrode is in the same place, to form piezoelectrics.
According to the piezoelectric element of the fourth aspect of a preferred embodiment of the present invention and make in the method for this piezoelectric element, first to the 3rd surface electrode of determining the signal extraction electrode is formed as thick film.Thereby, but the status of electrically connecting of surface of stability electrode and the external electrode that on the outer surface of piezoelectric element, forms.Moreover, by sputter connection electrode is formed as film, so that first to the 3rd surface electrode is electrically connected mutually covers simultaneously first to the 3rd surface electrode at least in part, therefore during forming this electrode, do not produce the depolarising phenomenon of these piezoelectrics.That is to say, during forming this electrode, the temperature of these piezoelectrics is controlled at below the temperature of Curie point, thereby almost make these piezoelectrics not produce the depolarising phenomenon by sputter.Therefore in an acceleration transducer that forms by piezoelectric element of the present invention, can improve the detectivity of this acceleration transducer and the property produced in batches.
According to a fifth aspect of the present invention, a piezoelectric element is provided, this piezoelectric element comprises: the electrode and the first and second signal extraction electrodes in piezoelectrics, first to the 3rd, these piezoelectrics have on a longitudinal direction, extend first to third part, the polarization mode of these piezoelectrics be first and third part and second portion polarize in the opposite direction along thickness direction; This in first to the 3rd electrode be arranged in these piezoelectrics, make it respectively first to the third part longitudinal extension, disconnected from each other opening simultaneously; And this first and second signals extraction electrode is set on the upper and lower surface of these piezoelectrics respectively.
These piezoelectrics are preferably made by piezoelectric ceramic.
For instance, can make this piezoelectric element by at least the first or second method.
This first method preferably includes following steps:
Make the undressed thin plate of the first and second rectangle templates that comprise piezoelectric ceramic;
The longitudinal direction in a surperficial upper edge of the first undressed thin plate conductive paste is coated to its first to the third part to form electrode pattern in the first to the 3rd respectively;
The second undressed thin plate is deposited on the surface that possesses the first undressed thin plate of electrode pattern in first to the 3rd to obtain a laminated thin plate;
This laminated thin plate is fired, should be done as a whole firing with this first to the 3rd interior electrode by pottery thus to obtain a sintered body;
Conductive paste is coated on the upper and lower surface of this sintered body and and toasts, form the first and second signal extraction electrodes thus respectively this sintered body; And
Polarize by this sintered body of electrode pair in this first and second signals extraction electrode and first to the 3rd, make along this sintered body longitudinally first and third part polarize with opposite direction on its thickness direction with second portion.
On the other hand, this second method preferably includes following steps:
Make and have first and second piezoelectric ceramic plates that pass through the shape of the rectangular slab of firing;
The single surperficial upper edge of first and second piezoelectric ceramic plates longitudinal direction respectively conductive paste is coated to first to the third part to form electrode pattern in the first to the 3rd;
Conductive paste is coated on the surperficial facing surfaces that possesses interior electrode pattern with it of first and second piezoelectric ceramic plates to form the first and second signal extraction electrode figures respectively;
Thereby heating internally to first and second piezoelectric ceramic plates, electrode pattern and signal extraction electrode figure toast to form electrode and signal extraction electrode in first to the 3rd;
Polarize by electrode pair first and the 2nd piezoelectric ceramic plate in this signal extraction electrode and first to the 3rd, make first and third part of this piezoelectric ceramic plate on its thickness direction, polarize with opposite direction with second portion; And
First and second piezoelectric ceramic plates that possess electrode in first to the 3rd possessed the surperficial bonded to each other together to obtain a piezoelectric element of interior electrode.
For instance, the piezoelectric element according to preferred embodiment of the present invention can be applied to a kind of acceleration transducer.Therefore according to the present invention, provide a kind of acceleration transducer that comprises the piezoelectric element of above-mentioned preferred embodiment of the present invention.
According to a preferred embodiment of the present invention the 6th aspect piezoelectric element and make in the method for this piezoelectric element, be arranged on electrode in first to the 3rd in these piezoelectrics and on the outer surface, polarize to third part to first by this first to the 3rd interior electrode and signal extraction electrode simultaneously the configuration of the first and second signal extraction electrodes.Therefore, just there is no need on the upper and lower surface of these piezoelectrics to form a plurality of surface electrodes disconnected from each other and first to the 3rd surface electrode by such separation polarizes.Moreover, there is no need after finishing polarization, to form connection electrode, also there is no need with double-deck mode signalization extraction electrode.Therefore can be reduced at the step that forms electrode on the upper and lower surface of these piezoelectrics.Though can be when forming double-deck signal extraction electrode because of heating cause producing the depolarising phenomenon by the baking conductive paste, according to the piezoelectric element of at least one preferred embodiment of the present invention with make in the method for this piezoelectric element and do not produce such depolarising phenomenon.
By following when the reference accompanying drawing to the detailed description that the present invention did, above-mentioned purpose, feature, aspect and advantage with other of the present invention more become more obvious.
Fig. 1 is a perspective view of the structure of the piezoelectric element that a routine is described of the mode with summary;
Fig. 2 A to 2C is the perspective view that is used to illustrate a kind of method of making this routine piezoelectric element, wherein respectively under a kind of state that possesses first to the 3rd surface electrode on the upper and lower surface respectively, under a kind of polarized state and under a kind of state that possesses connection electrode a piezoelectric ceramic parent is being shown;
Fig. 3 A and 3B are the perspective views that is used to illustrate the method for making this routine piezoelectric element, wherein comprise a structure parent and the structure that the single piezoelectric element that obtains by the structure parent shown in the cutting drawing 3A is described respectively.
Fig. 4 is a perspective view that illustrates according to a piezoelectric element of first preferred embodiment of the present invention;
Fig. 5 A to 5C illustrates an a pair of perspective view that possesses the Piezoelectric Substrates of the interior electrode and first to the 3rd surface electrode, is illustrated in a decomposition diagram of first and second Piezoelectric Substrates under the polarized state and a perspective view of first and second Piezoelectric Substrates that possess connection electrode is shown, and these three figure are used for illustrating a kind of preferred methods of manufacturing according to a piezoelectric element of a preferred embodiment of the present invention;
Fig. 6 is a perspective view that illustrates according to a piezoelectric element of second preferred embodiment of the present invention;
Plywood that Fig. 7 A to 7C is respectively the end view that is illustrated in first and second piezoelectrics under the state that possesses electrode pattern in first to the 3rd, obtain by first and second piezoelectrics are banked up mutually and possess the plywood of the first and second signal extraction electrodes thereon on the lower surface, these three figure are used for illustrating a kind of preferred methods of manufacturing according to the piezoelectric element of second preferred embodiment;
Fig. 8 A and 8B illustrate end view of female framework of being fixed to this piezoelectric ceramic body and a structure of the single piezoelectric element that scales off from the parent structure body, and these two figure are used for illustrating a kind of preferred methods of manufacturing according to the piezoelectric element of second preferred embodiment; And
Fig. 9 A to 9C be respectively be used to illustrate in advance a decomposition diagram through first and second piezoelectric ceramic plates of firing that on single surface, possess electrode in the first to the 3rd, illustrate possess the signal extraction electrode and through the end view of first and second piezoelectric ceramic plates of hyperpolarization with the end view of first and second piezoelectric ceramic plates that are combined with each other is shown, these three figure are used for illustrating the another kind of preferred methods of manufacturing according to the piezoelectric element of second preferred embodiment.
Below each preferred embodiment is described:
Fig. 4 is a perspective view that is used to illustrate according to a piezoelectric element 21 of first preferred embodiment of the present invention.
This piezoelectric element 21 comprises a rectangle template piezoelectric ceramic body 22.On a upper surface of this piezoelectric ceramic body 22, form first to the 3rd surface electrode 23,24 and 25.Position in the position of first to the 3rd surface electrode 3 to 5 of the piezoelectric element 1 that is similar to the routine shown in Fig. 1 forms first to the 3rd surface electrode 23 to 25.On a lower surface of these piezoelectrics 22, form first to the 3rd surface electrode 27 to 29 and make it disconnected from each other.Position in the position of first to the 3rd surface electrode 7 to 9 of the piezoelectric element 1 that is similar to the routine shown in Fig. 1 forms first to the 3rd surface electrode 27 to 29.According to this preferred embodiment, preferably toast all first to the 3rd surface electrodes 23 to 25 and 27 are formed as thick film to 29 by the coating electrically conductive paste with to it.In this, first to the 3rd surface electrode 23 to 25 is different with 27 to 29 with the surface electrode 3 to 5 and 7 to 9 shown in Fig. 1.
According to this preferred embodiment, on the upper surface of this piezoelectric ceramic body 22, form a connection electrode 26, this electrode 26 gets up to cover at least in part simultaneously first to the 3rd surface electrode 23 to 25 to 23 to the 25 mutual electrical connections of first to the 3rd surface electrode.Form a signal extraction electrode by this connection electrode 26 and first to the 3rd surface electrode 23 to 25.Similarly, also form another connection electrode 30 on the lower surface of this piezoelectric ceramic body 22, this electrode 30 is electrically connected first to the 3rd surface electrode 27 to 29 get up mutually.Signal extraction electrode below forming one by this connection electrode 30 and surface electrode 27 to 29.
Therefore, connection electrode 26 and 30 have basically with the piezoelectric element 1 shown in Fig. 1 in the connection electrode 6 and the 10 similar functions that provide.But according to this preferred embodiment, connection electrode 26 and 30 forms as film by a kind of film formation method (as sputter), and this point is different with the connection electrode 6 and 10 shown in Fig. 1.
In others, this piezoelectric element 21 is similar with the piezoelectric element 1 shown in Fig. 1.That is to say, to third part, forming first to the 3rd surface electrode 23 to 25 and 27 to 29 along first of the longitudinal direction of this piezoelectric ceramic body 22 respectively.By border G and H divide this piezoelectric ceramic body 22 first to third part.That is to say, respectively between the left side, border G and the H of border G and the right of border H be provided with first to third part.Moreover, in this piezoelectric ceramic body 22, form one longitudinally in electrode 31.Form and it to be extended interior electrode 31 on longitudinal direction, but do not extend to two longitudinal ends.Therefore, this interior electrode 31 is come out on arbitrary end surfaces of this piezoelectric ceramic body 22.Moreover, to shown in C and the D to F, this piezoelectric ceramic body 22 is polarized as the arrow A among Fig. 4 to third part first.In addition, first make respectively to each part of third part be positioned on the electrode 31 and under piezoelectric ceramic body region 22A and 22B polarize in the opposite direction.Moreover, in each zone of piezoelectric ceramic body region 22A and 22B, make second portion and first and third part polarize in the opposite direction.
In this piezoelectric element 21, on two side surfaces of a structure, form external electrode 34 and 35, this structure is by forming on the top and the bottom that framework 32 and 33 are respectively fixed to piezoelectric ceramic body 22.
In this piezoelectric element 21, allow the signal extraction electrode that on the upper surface of piezoelectric ceramic body 22, forms be electrically connected with external electrode 34 at surface electrode 23 places.Similarly, be electrically connected with external electrode 35 in the signal extraction electrode that allows the 3rd surface electrode 29 on lower surface, form.In this case because surface electrode 23 and 29 forms by thick film as mentioned above, so can remain on reliably surface electrode 23 and 29 and external electrode 34 and 35 between status of electrically connecting.
As shown in Figure 4 under the state, can be applied to a kind of acceleration transducer to this piezoelectric element 21 in example.Under another kind of mode, can be contained in this piezoelectric element 21 on the substrate (not shown) or box (not shown) in so that an element that provides in a kind of acceleration transducer to be provided.
A kind of method of a preferred embodiment of the piezoelectric element 21 shown in the shop drawings 4 is described under the situation of reference Fig. 2 A to 2C and 3A and 3B (these figure have been used to illustrate above-mentioned conventional method) now.
Though the reference number that occurs in Fig. 2 A to 2C and 3A and 3B is corresponding to the various piece of the piezoelectric element shown in Fig. 11, but still piezoelectric element 21 according to the embodiment shown in Fig. 4 is described with reference to these figure, this piezoelectric element 21 is structurally similar with piezoelectric element 1 except the signal extraction electrode.
In order to make piezoelectric element 21, at first by piezoceramic material, make a piezoelectric ceramic parent as lead zirconates and lead titanates (lead zirconate titanate) piezoelectric ceramic according to this first preferred embodiment.Make this piezoelectric ceramic body in the mode that is similar to the piezoelectric ceramic body of making shown in Fig. 2 A 16, the interior electrode that makes the many bar shapeds of formation in this piezoelectric ceramic body.Can obtain such piezoelectric ceramic body by one of two kinds of following methods: first method is an electrode in printing on a surface of a undressed motherboard, another undressed motherboard is stacked on this surface, then the motherboard of these two stack ups is fired; Second method is an electrode in forming on prior process first a piezoelectric ceramic motherboard of firing, and then the second piezoelectric ceramic motherboard that a process is fired is adhered on the surface of the first piezoelectric ceramic motherboard that possesses interior electrode.
Moreover, make the conductive paste that comprises silver and silver-palladium alloy powder so that on the upper and lower surface of this piezoelectric ceramic parent, form first to the 3rd surface electrode.Be preferably in the position identical and form first to the 3rd surface electrodes with first to the 3rd surface electrode 3 to 5 of the piezoelectric element 1 of the routine shown in Fig. 2 B and 7 to 9.
Can be by applying this conductive paste, make this paste drying and under about 800 a ℃ temperature, this paste being toasted the surface electrode that forms this conductive paste afterwards.So, in this preferred embodiment, form first to the 3rd surface electrode 23 to 25 and 27 to 29 that thickness is about the thick film of 3 to 10 μ m.The piezoelectric ceramic of lead zirconates and lead titanates has an about Curie point of 300 ℃.But before the step that forms surface electrode 23 to 25 and 27 to 29, do not polarize.Therefore, form surface electrode 23 to 25 and 27 to 29 in this way and do not produce the depolarising phenomenon.
Then, by the electrode in this and first to the 3rd surface electrode this piezoelectric ceramic parent is polarized.In this case, can by higher voltage, lower voltage and middle voltage are added to respectively the second surface electrode that in second portion, provides, first and third part in polarize on the first and the 3rd surface electrode that provides and the interior electrode.So, can be similar to the polarization mode (polarization mode of this piezoelectric ceramic body 16 is illustrated to C and D to F by arrow A) of the piezoelectric ceramic body 16 shown in Fig. 2 B, this piezoelectric ceramic parent is polarized.
Then, on the upper and lower surface of this piezoelectric ceramic parent, form connection electrode respectively in the position that is similar to the connection electrode 6 shown in Fig. 2 C and 10.But in this preferred embodiment, preferably form this connection electrode by sputter.That is to say, preferably by sputter on the upper and lower surface of this piezoelectric ceramic body for example Mo Nieer (Monel) alloy form connection electrode, to cover first to the 3rd surface electrode.These connection electrode are finally determined the connection electrode 26 and 30 shown in Fig. 4.
The metal material that is used to form connection electrode is not limited to K monel (a kind of nickel-copper alloy), and can be made by nickel or silver.In above-mentioned sputter, the temperature of this piezoelectric ceramic body is about 100 to 200 ℃.Therefore, the temperature of this piezoelectric ceramic body in sputter is lower than the lead zirconates of this piezoelectric ceramic body of formation and the Curie point of lead titanate piezoelectric ceramics, so can not cause producing the depolarising phenomenon.
Afterwards, respectively forming on the upper and lower surface of this piezoelectric ceramic parent after first to the 3rd surface electrode and connection electrode determine the signal extraction electrode, fix female framework by in the above described manner.Can form female framework makes it to have basically and framework 17 shown in Fig. 3 B and 18 identical structures.Moreover, can be by obtain the structure of single piezoelectric element along the structure parent that obtains in the above described manner corresponding to the cutting of the line of dotted line X, Y shown in Fig. 3 A and Z.Each structure that obtains by this way is corresponding to a kind of structure of the piezoelectric element shown in Fig. 4 21, and this structure does not possess external electrode 34 and 35 as yet.
Then, can form the external electrode 34 and 35 shown in Fig. 4, obtain piezoelectric element 21 thus by a kind of film formation method (as sputter or plating).
In piezoelectric element 21, surface electrode 23 and 29 is preferably formed by thick film, can be stabilized in thus surface electrode 23 and 29 and external electrode 34 and 35 between status of electrically connecting.
Though in said method, use the rectangle template piezoelectric ceramic motherboard of electrode in imbedding in advance, also can make piezoelectric element 21 by the method for in hypomere, describing according to first preferred embodiment.
At first, shown in Fig. 5 A, make the first piezoelectric ceramic motherboard 41 and second a piezoelectric ceramic motherboard 42 that on one surface, also possesses electrode 31 in a plurality of mothers that on one surface, possesses electrode 31 in a plurality of mothers.Go up on this piezoelectric ceramic plate 41 and 42 surface (this surface with possess in electrode 31 surperficial relative) and preferably to form first to the 3rd surface electrode 23 to 25 and 27 to 29 respectively by the conductive paste that comprises silver or silver-palladium.Preferably form above-mentioned surface electrode 23 to 25 and 27 to 29 by printing and toasting this conductive paste, preferably toast by this conductive paste being heated to an about temperature of 800 ℃ simultaneously, this point and said method are similar.
Form first to the 3rd surface electrode 23 to 25 and 27 to 29 with its be separately positioned on corresponding to the piezoelectric ceramic body that forms single piezoelectric element first to third part.
Then, use should in electrode 31 and surface electrode 23 to 25 and 27 to 29 polarize respectively first and second piezoelectric ceramic plates 41 and 42.As shown in Fig. 5 B, respectively high voltage, low voltage and intermediate voltage are added to second surface electrode 24 in the piezoelectric ceramic plate 41, the first and the 3rd surface electrode 23 and 25 and interior electrode 31, thereby in piezoelectric ceramic plate 41, second portion is polarized along arrow B, make first and third part along arrow A and C polarization.Similarly, in second piezoelectric ceramic plate 42, second portion is polarized along arrow E, make first and third part along arrow F and G polarization.
Then, preferably form connection electrode 26 and 30 by sputter.
Afterwards, the first and second piezoelectricity motherboards 41 and 42 are bonded to each other, make the interior electrode 31 of two plates overlap each other.Can be piezoelectric ceramic motherboard 41 and 42 is bonded to each other by a kind of adhesive, to obtain a kind of structure that is similar to according to the piezoelectric element 21 of the embodiment shown in Fig. 4.Can be by obtaining piezoelectric element 21 with a kind of suitable method formation external electrode 34 and 35 (see figure 4)s.
In piezoelectric element 21 according to first preferred embodiment, as described above, preferably form first to the 3rd surface electrode 23 to 25 and 27 to 29 by thick film, can guarantee thus external electrode 34 and 35 with the first and the 3rd surface electrode 23 and 29 between be electrically connected.Moreover, in manufacturing step, polarize before afterwards and forming connection electrode 26 and 30 (these connection electrode be with the form appearance of film) forming first to the 3rd surface electrode 23 to 25 and 27 to 29 (these surface electrodes are formed by thick film).Therefore, these piezoelectrics are not heated to a temperature that surpasses Curie point after polarization, so do not cause producing the depolarising phenomenon.
Fig. 6 is a perspective view that illustrates according to a piezoelectric element 61 of one second preferred embodiment of the present invention.
This piezoelectric element 61 has a piezoelectric ceramic body 62 that plays a piezoelectrics effect.On the upper and lower surface of this piezoelectric ceramic body 62, form the first and second signal extraction electrodes 63 and 64 respectively.The generation type of the first signal extraction electrode 63 is to make the one end extend to a side end of this piezoelectric ceramic body 62, simultaneously secondary signal extraction electrode 64 is drawn out to a side end relative with the side end of signal extraction electrode 63.
In the inside of this piezoelectric ceramic body 62, the upright position a centre forms electrode 65,66 and 67 in the first to the 3rd.Respectively along forming electrode 65 to 67 in the first to the 3rd in first to the 3rd position of the longitudinal direction of this piezoelectric ceramic body 62.
Divide first respectively to third part by the border shown in dashed lines G and the H.In other words, be arranged on first, second and third part of this piezoelectric ceramic body 62 between the left side, border G and the H of border G and the right of border H respectively.
, to shown in the F this piezoelectric ceramic body 62 is polarized as the arrow A among Fig. 6.At a piezoelectric ceramic body region 62A of this piezoelectric ceramic body 62 (this zone 62A is positioned at the top of the part that possesses electrode 65 to 67), this second portion is polarized along arrow B, and opposite with the polarised direction of second portion, make respectively first and third part along arrow A and C polarization.Similarly, the piezoelectrics zones 62B being positioned under the part that possesses electrode 65 to 67 makes second portion polarize along arrow E, and opposite with the polarised direction of second portion, make respectively first and third part along arrow D and F polarization.That is to say, in each zone of piezoelectric ceramic body region 62A and 62B, make second portion and first and third part polarize in the opposite direction.Moreover, first to each part of third part, upper and lower piezoelectric ceramic body region 62A and 62B are polarized in the opposite direction.
Polarize by 65 to 67 pairs of piezoelectric ceramic bodies 62 of electrode in the first and second signal extraction electrodes 63 and the 64 and first to the 3rd.As what can be well understood to from a kind of manufacture method of describing down, respectively high voltage, low voltage and intermediate voltage are added to electrode 65 and 67, the second inner electrode 66 and the first and second signal extraction electrodes 63 and 64 in the first and the 3rd, this piezoelectric ceramic body 62 is polarized along the arrow A among Fig. 6 to F.Because electrode 65 to 67 is arranged on the intermediate vertical position of this piezoelectric ceramic body 62 and forms the first and second signal extraction electrodes 63 and 64 on the lower surface thereon respectively in first to the 3rd, so can after 67, make this piezoelectric ceramic body 62 polarization in the above described manner at these electrodes 63 of formation.So, can not cause producing the depolarising phenomenon because of forming electrode 63 to 67, this is because can form electrode 63 to 67 on piezoelectric ceramic body 62 before polarization.
Respectively framework 68 and 69 is fixed on the upper and lower surface of piezoelectric ceramic body 62. Framework 68 and 69 each all make and a plate part and a pair of standing part that provides on the two ends of this plate part be provided by insulating ceramics or synthetic resin.Preferably at this standing part place is fixed on framework 68 and 69 on the piezoelectric ceramic body 62 respectively by adhesive etc.
In piezoelectric element 61 according to this preferred embodiment, on a pair of side surface of a structure, form external electrode 70 and 71, this structure forms by framework 68 and 69 is adhered on these piezoelectrics 62.Can form external electrode 70 and 71 by a kind of suitable electrode formation method.Respectively these two external electrodes 70 and 71 are electrically connected to the first and second signal extraction electrodes 63 and 64.
Preferably toast, the first and second signal extraction electrodes 63 and 64 are formed as thick film by the coating electrically conductive paste with to it.Therefore, can stably keep the first and second signal extraction electrodes 63 and 64 and external electrode 70 and 71 between status of electrically connecting.
The first and second signal extraction electrodes 63 and 64 that formed by individual layer only are set on the upper and lower surface of this piezoelectric ceramic body 62.Therefore compare with first preferred embodiment, can be reduced at the step that forms electrode on the upper and lower surface of piezoelectric ceramic body 62.
A kind of method referring now to Fig. 7 A to 7C and 8A and 8B description manufacturing piezoelectric element 61 as illustration.
Following description is made up of the step that obtains single piezoelectric element 61 from a structure parent.
At first, shown in Fig. 7 A, make the undressed motherboard 81 and 82 that is used to form piezoelectric ceramic body 62.This is undressed, and motherboard 81 and 82 is mainly made by lead zirconates and lead titanate piezoelectric ceramics powder respectively.Shape and size that thin plate 81 and 82 (making this thin plate 81 and 82 is in order to form a plurality of piezoelectric ceramic bodies 62 respectively) has to gather together piezoelectric ceramic body 62 with the form of matrix that these are undressed.It is to be noted: the zone corresponding to single piezoelectric ceramic body 62 is corresponding with a part that fences up with dotted line X among Fig. 7 A and Y.
By methods such as silk screen printings the conductive paste that contains silver or silver-palladium alloy powder is added on the upper surface of this undressed plate 81 and under about 100 a ℃ temperature, carries out drying, thereby form electrode pattern 83 to 85 in first to the 3rd.Should in electrode pattern 83 to 85 extend with the shape of strip, substantially perpendicular to the plane of this figure.
Then, undressed plate 82 is stacked on the undressed plate 81 shown in Fig. 7 B, and under about 1000 ℃ temperature, fires.Because this sintering procedure interosculates into an integral body to undressed plate 81 and 82, to form a piezoelectricity parent 86.Simultaneously, internally electrode pattern 83 to 85 toast with form female in electrode 83 to 85 (these reference numbers are identical with reference number for interior electrode pattern).
Then, as shown in Fig. 7 C, on the upper and lower surface of this piezoelectric ceramic parent 86, form the first and second parent signal extraction electrodes 87 and 88 respectively.By contain the conductive paste of silver or silver-palladium alloy powder with the coating of methods such as silk screen printing, it is being carried out dry and it is being toasted under about 800 ℃ temperature to form the first and second signal extraction electrodes 87 and 88 again under about 100 ℃ temperature.
Then this piezoelectric ceramic parent 86 is polarized.Carry out this polarization by respectively high voltage, low voltage and intermediate voltage being added on female interior electrode 83 and 85, female interior electrode 84 and first and second signal extraction electrode 87 and 88.Therefore, piezoelectric ceramic body 86 is polarized to shown in the F as the arrow A among Fig. 7 C.That is to say, first of piezoelectric ceramic body 86 that longitudinal direction extends is polarized in the mode that is similar to the piezoelectric ceramic body 62 shown in Fig. 6 to third part.
Then, shown in Fig. 8 A, respectively female framework 89 and 90 is fixed on the top and the bottom of piezoelectric ceramic parent 86.This mother's framework 89 and 90 is preferably made by insulating ceramics (as aluminium oxide) or synthetic resin.Preferably female framework 89 and 90 is fixed on this piezoelectric ceramic parent 86 by adhesive etc.
Along dotted line X and the Y direction of Fig. 8 A, on its thickness direction, the stacked parent 91 shown in Fig. 8 A is cut then, can obtain the duplexer 92 that is used for single piezoelectric element shown in Fig. 8 B thus.At the duplexer 92 that is used for this single piezoelectric element, above-mentioned piezoelectric ceramic parent 86 is cut into piezoelectric ceramic body 62.Similarly, respectively electrode 83 to 85 in female is cut into electrode 65 to 67 in first to the 3rd, respectively first and second signals is drawn female electrode 87 and 88 simultaneously and be cut into the first and second signal extraction electrodes 63 and 64.In addition, respectively female framework 89 and 90 is cut into framework 68 and 69.
Can obtain the piezoelectric element 61 shown in Fig. 6 by on a pair of side surface of above-mentioned duplexer 92, forming external electrode 70 and 71 respectively.
For instance, the piezoelectric element 61 that obtains in the above described manner can be used as a kind of acceleration transducer, this point and first preferred embodiment are similar.That is to say, this piezoelectric element 61 as above-mentioned mode can be applied to a kind of acceleration transducer, under another kind of mode, can form a kind of acceleration sensor element to this piezoelectric element 61 simultaneously by this element 61 is installed on the suitable substrate or leaves in the box.
Describe to make the method that the another kind of piezoelectric element 61 is given an example referring now to Fig. 9 A to 9C.
Not only can pass through said method, and can make piezoelectric element 61 by the method for in hypomere, describing.
At first make shown in Fig. 9 A in advance through firing, preferably have a piezoelectric ceramic motherboard 101 and 102 of the shape of rectangular slab.Then, on the single first type surface of this piezoelectric ceramic motherboard 101 and 102, form electrode pattern 102a to 104a and 102b to 104b in first to the 3rd mother respectively.Preferably form these female interior electrode pattern 102a to 104a and 102b to 104b by applying the conductive paste that contains silver or silver-palladium alloy powder with methods such as silk screen printings and it being carried out drying.
Then, as shown in Fig. 9 B, on another surface of piezoelectric ceramic plate 101 and 102, form the first and second parent signal extraction electrode figures 105 and 106 respectively.Similar with above-described method, by the coating electrically conductive paste with it is carried out drying form the first and second signal extraction electrode figures 105 and 106.Then, by heating internal electrode pattern 102a to 104b and signal extraction electrode figure 105 and 106 toasts respectively, to finish the making of these electrodes.
Moreover, first piezoelectric ceramic plate 101 is polarized along the arrow D to F among Fig. 9 B.Carry out this polarization by high voltage, low voltage and intermediate voltage being added to the interior electrode pattern 102b to 104b that on upper surface, provides, interior electrode pattern 103b and secondary signal extraction electrode 106 respectively.Second piezoelectric ceramic plate 102 is polarized along the arrow A among Fig. 9 B to C.
After polarization, preferably by thermoplastic adhesives piezoelectric ceramic plate 101 and 102 bonded to each other being in the same place, electrode pattern 102a, 104a, 102b and 104b overlap each other in making.
So, as shown in Fig. 9 C, obtain a piezoelectric ceramic parent 107.This piezoelectric ceramic parent 107 is similar at the piezoelectric ceramic parent 86 shown in configuration aspects and Fig. 7 C.Thereby, can the similar mode of a kind of and above-described method obtain the piezoelectric element 61 shown in Fig. 6 thus according to above with reference to Fig. 8 A and the described step of carrying out thereafter of 8B.
Though described and illustrated the present invention in detail, it goes without saying that above description and explanation just explanation and example, rather than limit that the spirit and scope of the present invention are only limited by attached the every of claim down.
Claims (18)
1. piezoelectric element is characterized in that comprising:
Piezoelectrics, these piezoelectrics have first, second and the third part of extending along its longitudinal direction, above-mentioned first the polarization mode to third part be make along a thickness direction first opposite with the polarised direction of second portion with the polarised direction of third part;
An interior electrode, an inside that electrode in this is arranged on these piezoelectrics is extended it on this longitudinal direction, but does not extend to the longitudinal end of these piezoelectrics; And
Be separately positioned on the first and second signal extraction electrodes on the upper and lower surface of these piezoelectrics,
Each of the above-mentioned first and second signal extraction electrodes all has first, second and the 3rd surface electrode and a connection electrode, above-mentioned first, second and the 3rd surface electrode are formed by being separately positioned on thicker film on above-mentioned first, second and the third part, that be separated from each other along this longitudinal direction, above-mentioned connection electrode by be arranged to above-mentioned first, second and the 3rd surface electrode are electrically connected mutually and cover above-mentioned first, second and the 3rd surface electrode at least in part one form than the film that approaches.
2. a kind of piezoelectric element described in the claim 1 is characterized in that, wherein in each of above-mentioned first, second and third part, all make be positioned on the above-mentioned electrode with under the zone polarize in the opposite direction.
3. a kind of piezoelectric element described in the claim 1 is characterized in that, wherein the configuration mode of above-mentioned connection electrode is the longitudinal end that does not extend to above-mentioned piezoelectrics.
4. a kind of piezoelectric element described in the claim 1 or 2 is characterized in that, wherein above-mentioned piezoelectrics are made by piezoelectric ceramic.
5. acceleration transducer is characterized in that comprising:
Piezoelectrics, these piezoelectrics have first, second and the third part of extending along its longitudinal direction, above-mentioned first the polarization mode to third part be make along a thickness direction first opposite with the polarised direction of second portion with the polarised direction of third part;
An interior electrode, the inside that this interior electrode is arranged on these piezoelectrics is extended it on this longitudinal direction, but does not extend to the longitudinal end of these piezoelectrics; And
Be separately positioned on the first and second signal extraction electrodes on the upper and lower surface of these piezoelectrics;
Each of the above-mentioned first and second signal extraction electrodes all has first, second and the 3rd surface electrode and a connection electrode, above-mentioned first, second and the 3rd surface electrode by be separately positioned on above-mentioned first, second and the third part and forms along the thicker film that this longitudinal direction is separated from each other, above-mentioned connection electrode by be arranged to above-mentioned first, second and the 3rd surface electrode are electrically connected mutually and cover above-mentioned first, second and the 3rd surface electrode at least in part one form than the film that approaches.
6. a method of making a piezoelectric element is characterized in that comprising the steps:
Make piezoelectrics, these piezoelectrics comprise that one is configured to along the interior electrode of a longitudinal direction extension of these piezoelectrics;
Along toasting on the upper and lower surface that in first, second and the third part of the above-mentioned piezoelectrics of above-mentioned longitudinal direction conductive paste is coated to above-mentioned piezoelectrics and to this conductive paste, form first, second and the 3rd surface electrode thus respectively;
By electrode in above-mentioned and first, second and the 3rd surface electrode that are arranged on the above-mentioned upper and lower surface of above-mentioned piezoelectrics above-mentioned piezoelectrics are polarized, opposite with the polarised direction of second portion along the polarised direction of first and the third part that make above-mentioned piezoelectrics on the thickness direction of above-mentioned piezoelectrics; And
Form first and second connection electrode, be used for respectively above-mentioned first, second and the 3rd surface electrode on the above-mentioned upper and lower surface that is arranged on above-mentioned piezoelectrics are electrically connected mutually, make this first and second connection electrode divide at least partly to cover in addition above-mentioned first, second and the 3rd surface electrode.
7. the method for a kind of piezoelectric element of manufacturing described in the claim 6 is characterized in that, wherein in each of above-mentioned first, second and third part, all make be positioned on the above-mentioned electrode with under the zone polarize in the opposite direction.
8. the method for a kind of piezoelectric element of manufacturing described in the claim 6, it is characterized in that, the above-mentioned steps of wherein making the piezoelectrics of electrode in above-mentioned comprising by between a pair of piezoelectric ceramic plate, form above-mentioned in electrode and this is bonded together mutually to piezoelectric ceramic plate finish.
9. a method of making a piezoelectric element is characterized in that comprising the steps:
Make a pair of piezoelectric ceramic plate;
Each all extension but do not extend to the longitudinal end of this piezoelectricity utmost point on the longitudinal direction at each piezoelectricity utmost point of electrode in electrode makes in forming on each single first type surface of above-mentioned piezoelectric ceramic plate;
Form first, second and the 3rd surface electrode, this first, second and the 3rd surface electrode comprise by the coating electrically conductive paste and to its toast and be configured in respectively along on first, second and the third part of the longitudinal direction of above-mentioned piezoelectric ceramic plate and be configured in have above-mentioned in thicker film on the surperficial facing surfaces of electrode;
Respectively by electrode in above-mentioned and above-mentioned first, second and the 3rd surface electrode to possess above-mentioned in the above-mentioned piezoelectric ceramic plate of electrode and above-mentioned first, second and the 3rd surface electrode polarize, make opposite with the polarised direction of above-mentioned second portion along the polarised direction of thickness direction above-mentioned first and third part;
On the above-mentioned surface of the above-mentioned piezoelectric ceramic plate that possesses above-mentioned first, second and the 3rd surface electrode, form the connection electrode that comprises thin film so as above-mentioned first, second and the 3rd surface electrode is electrically connected mutually and partly cover at least respectively above-mentioned first, second with the 3rd surface electrode; And
The surface of the above-mentioned a pair of piezoelectric ceramic plate that possesses above-mentioned connection electrode and the above-mentioned surface that possesses above-mentioned interior electrode are bonded together mutually to form piezoelectrics.
10. the method for a kind of piezoelectric element of manufacturing described in the claim 9 is characterized in that, wherein, above-mentioned first to each part of third part, make be positioned on each above-mentioned electrode and under the zone polarize in the opposite direction.
11. a piezoelectric element is characterized in that comprising:
Piezoelectrics, these piezoelectrics have first, second and the third part of extending along its longitudinal direction, the polarization mode of these piezoelectrics be make along its thickness direction first opposite with the polarised direction of second portion with the polarised direction of third part;
First, second and the 3rd in electrode, these three interior electrodes are arranged on the inside of above-mentioned piezoelectrics, make to extend on its above-mentioned longitudinal direction in above-mentioned first, second and third part to make it disconnected from each other simultaneously; And
Be separately positioned on the first and second signal extraction electrodes on the upper and lower surface of above-mentioned piezoelectrics.
12. a kind of piezoelectric element described in the claim 11 is characterized in that, wherein, above-mentioned first make to each part of third part be positioned on each above-mentioned electrode and under the zone polarize in the opposite direction.
13. a kind of piezoelectric element described in the claim 11 is characterized in that, wherein above-mentioned piezoelectrics are made by piezoelectric ceramic.
14. an acceleration transducer is characterized in that comprising:
Piezoelectrics, these piezoelectrics have first, second and the third part of extending along its longitudinal direction, the polarization mode of these piezoelectrics be make along its thickness direction first opposite with the polarised direction of second portion with the polarised direction of third part;
First, second and the 3rd in electrode, these three interior electrodes are arranged on the inside of above-mentioned piezoelectrics, it is extended on above-mentioned longitudinal direction in above-mentioned first, second and third part make it disconnected from each other simultaneously; And
Be separately positioned on the first and second signal extraction electrodes on the upper and lower surface of above-mentioned piezoelectrics.
15. a method of making piezoelectric element is characterized in that comprising the steps:
Make contain piezoelectric ceramic, first and second undressed plates of rectangular plate shape basically;
Along on the single surface that in first, second and the third part of the longitudinal direction of this first undressed plate conductive paste is coated to the above-mentioned first undressed plate with form respectively first, second and the 3rd in electrode pattern;
The above-mentioned second undressed plate be stacked in possess above-mentioned first, second and the 3rd on the above-mentioned surface of the above-mentioned first undressed plate of electrode pattern so that obtain a plywood;
Above-mentioned plywood is fired, thus above-mentioned piezoelectric ceramic and above-mentioned first, second are done as a whole firing so that get a sintered body with the 3rd interior electrode;
By forming the first and second signal extraction electrodes on the upper and lower surface that conductive paste is coated to above-mentioned sintered body and the above-mentioned first and second signal extraction electrodes being toasted;
By the above-mentioned first and second signal extraction electrodes and above-mentioned first, second and the 3rd in the above-mentioned sintered body of electrode pair polarize, make that the thickness direction along above-mentioned first and third part of the above-mentioned sintered body of above-mentioned longitudinal direction and above-mentioned second portion along these piezoelectrics polarizes in the opposite direction.
16. the method for a kind of piezoelectric element of manufacturing described in the claim 15, it is characterized in that, wherein, in each part of above-mentioned first, second and third part, make be positioned on each above-mentioned electrode with under the zone polarize in the opposite direction.
17. a method of making a piezoelectric element is characterized in that comprising the steps:
Make first and second piezoelectric ceramic plates of rectangular basically plate shape;
On the single surface of above-mentioned first and second piezoelectric ceramic plates, conductive paste is coated to along in first, second and the third part of longitudinal direction, thus form respectively first, second and the 3rd in electrode pattern;
Conductive paste be coated to possess above-mentioned on the surface of surperficial relative above-mentioned first and second piezoelectric ceramic plates of electrode pattern, to form the first and second signal extraction electrode figures respectively;
Above-mentioned first and second piezoelectric ceramic plates are heated, thereby electrode pattern in above-mentioned and above-mentioned signal extraction electrode figure are toasted, to form first, second and the 3rd interior electrode and signal extraction electrode respectively;
Polarize with the 3rd interior above-mentioned first and second piezoelectric ceramic plates of electrode pair by above-mentioned signal extraction electrode and above-mentioned first, second, make that the polarised direction of first and third part of above-mentioned piezoelectric ceramic plate is opposite with the polarised direction of second portion on the thickness direction of above-mentioned piezoelectric ceramic plate;
The surface that possesses above-mentioned first and second piezoelectric ceramic plates of electrode in above-mentioned first to the 3rd with possess above-mentioned in electrode surperficial bonded to each other together to obtain a piezoelectric element.
18. the method for a kind of piezoelectric element of manufacturing described in the claim 17 is characterized in that, wherein, in each part of above-mentioned first, second and third part, make be positioned on each above-mentioned electrode with under the zone polarize in the opposite direction.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP307442/94 | 1994-12-12 | ||
| JP06307442A JP3114538B2 (en) | 1994-12-12 | 1994-12-12 | Piezoelectric element and method of manufacturing the same |
| US460,660 | 1995-06-02 | ||
| US08/460,660 US5914556A (en) | 1994-09-09 | 1995-06-02 | Piezoelectric element and method of manufacturing the same |
| US460660 | 1999-12-13 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021191301A Division CN1228865C (en) | 1994-12-12 | 2002-05-09 | Piezoelectric element and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1136224A true CN1136224A (en) | 1996-11-20 |
| CN1093320C CN1093320C (en) | 2002-10-23 |
Family
ID=26565104
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN95119785A Expired - Lifetime CN1093320C (en) | 1994-12-12 | 1995-11-24 | Piezoelectric element and method of manufacturing the same |
| CNB021191301A Expired - Lifetime CN1228865C (en) | 1994-12-12 | 2002-05-09 | Piezoelectric element and its manufacture |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021191301A Expired - Lifetime CN1228865C (en) | 1994-12-12 | 2002-05-09 | Piezoelectric element and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN1093320C (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103321891A (en) * | 2013-06-19 | 2013-09-25 | 重庆中镭科技有限公司 | Vibrator of piezoelectric pump and control method |
| CN104426425A (en) * | 2013-09-06 | 2015-03-18 | 北京纳米能源与系统研究所 | Inertial power generation device with power generating unit and acceleration direction detection device |
| CN106501546A (en) * | 2015-09-07 | 2017-03-15 | Tdk株式会社 | Acceleration transducer |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6543109B2 (en) * | 2015-06-30 | 2019-07-10 | 株式会社日立パワーソリューションズ | Ultrasonic probe and ultrasonic inspection apparatus |
-
1995
- 1995-11-24 CN CN95119785A patent/CN1093320C/en not_active Expired - Lifetime
-
2002
- 2002-05-09 CN CNB021191301A patent/CN1228865C/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103321891A (en) * | 2013-06-19 | 2013-09-25 | 重庆中镭科技有限公司 | Vibrator of piezoelectric pump and control method |
| CN104426425A (en) * | 2013-09-06 | 2015-03-18 | 北京纳米能源与系统研究所 | Inertial power generation device with power generating unit and acceleration direction detection device |
| CN106501546A (en) * | 2015-09-07 | 2017-03-15 | Tdk株式会社 | Acceleration transducer |
| CN106501546B (en) * | 2015-09-07 | 2019-09-03 | Tdk株式会社 | Acceleration transducer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1093320C (en) | 2002-10-23 |
| CN1399358A (en) | 2003-02-26 |
| CN1228865C (en) | 2005-11-23 |
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