CN113612367A - High-torque vacuum magnetic coupling device easy to disassemble - Google Patents

High-torque vacuum magnetic coupling device easy to disassemble Download PDF

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Publication number
CN113612367A
CN113612367A CN202111181631.4A CN202111181631A CN113612367A CN 113612367 A CN113612367 A CN 113612367A CN 202111181631 A CN202111181631 A CN 202111181631A CN 113612367 A CN113612367 A CN 113612367A
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CN
China
Prior art keywords
rotating shaft
shaft sleeve
magnetic
assembly
pulley
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Granted
Application number
CN202111181631.4A
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Chinese (zh)
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CN113612367B (en
Inventor
李治
张学锋
赵崇凌
白雪
王勇
张学全
毕永生
吕良
王启佳
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Sky Development Co ltd Chinese Academy Of Sciences
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Sky Development Co ltd Chinese Academy Of Sciences
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Priority to CN202111181631.4A priority Critical patent/CN113612367B/en
Publication of CN113612367A publication Critical patent/CN113612367A/en
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Publication of CN113612367B publication Critical patent/CN113612367B/en
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K49/00Dynamo-electric clutches; Dynamo-electric brakes
    • H02K49/10Dynamo-electric clutches; Dynamo-electric brakes of the permanent-magnet type
    • H02K49/104Magnetic couplings consisting of only two coaxial rotary elements, i.e. the driving element and the driven element
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10Structural association with clutches, brakes, gears, pulleys or mechanical starters
    • H02K7/1004Structural association with clutches, brakes, gears, pulleys or mechanical starters with pulleys
    • H02K7/1012Machine arranged inside the pulley
    • H02K7/1016Machine of the outer rotor type

Abstract

The invention belongs to the technical field of vacuum equipment, and particularly relates to a high-torque and easy-to-disassemble vacuum magnetic coupling device which comprises a motor assembly, a flange assembly, a fixing seat assembly, a belt pulley assembly and a rotating shaft assembly. The detachable driven belt wheel composed of the semi-circular belt wheel and the connecting pin can be conveniently detached from the rotating shaft sleeve. The motor component mounting seat, the rotating shaft sleeve fixing hoop, the locking screw and the connecting screw are matched, so that the fixing seat component and the motor component are convenient to detach from the rotating shaft sleeve. The driving of the rotating shaft main body adopts a magnetic coupling technology, can transmit large torque under the condition of ultrahigh vacuum, and has the advantages of wide application range, simple structure and convenient assembly and disassembly.

Description

High-torque vacuum magnetic coupling device easy to disassemble
Technical Field
The invention belongs to the technical field of vacuum equipment, and particularly relates to a high-torque and easily-detachable vacuum magnetic coupling device.
Background
With the development and progress of society and science, the vacuum technology is applied to various industries in the society. Vacuum application refers to the use of a physical environment of rarefied gases to accomplish certain tasks. The application range of vacuum is very wide, and the application is mainly divided into low vacuum, medium vacuum, high vacuum and ultrahigh vacuum.
When scientific research and industrial production are carried out in a vacuum environment, the articles in the vacuum chamber need to be controlled and operated by a mechanical mechanism on the premise of not damaging the vacuum degree in the vacuum chamber.
At present, magnetic rotating shafts and the like produced at home and abroad have small torque, and when the magnetic rotating shafts operate in an ultrahigh vacuum environment and need to be baked, parts which are not baked are difficult to disassemble, and even the magnetic rotating shafts can be taken down only by destroying the vacuum environment.
Disclosure of Invention
The invention aims to provide a vacuum magnetic coupling device with high torque and easy disassembly, aiming at the problems that the existing magnetic rotating shaft is complex in overall structure and is not easy to install and disassemble.
The purpose of the invention is realized by the following technical scheme:
a high-torque and easy-to-disassemble vacuum magnetic coupling device comprises a motor assembly, a flange assembly, a fixing seat assembly, a belt pulley assembly and a rotating shaft assembly;
the flange assembly comprises a rotating shaft sleeve and a connecting flange which are connected together, the rotating shaft assembly is rotatably arranged in the rotating shaft sleeve, the rotating shaft assembly comprises a magnetic-conducting steel core and a rotating shaft main body made of non-magnetic materials, the magnetic-conducting steel core and the rotating shaft main body are connected together, and a plurality of magnetic-conducting protruding parts are uniformly arranged on the periphery of the magnetic-conducting steel core;
one end of the fixed seat assembly is detachably arranged on the outer peripheral surface of the rotating shaft sleeve, and the motor assembly is arranged at the other end of the fixed seat assembly;
the belt pulley component comprises a transmission belt, a driving belt pulley and a detachable driven belt pulley, the driving belt pulley is driven by the motor component, the driving belt wheel and the detachable driven belt wheel are connected through the transmission belt, a plurality of magnetic steels are uniformly arranged on the inner side surface of the detachable driven belt wheel, the magnetic steel is arranged at a position corresponding to the magnetic conductive bulge of the magnetic conductive steel core, the magnetic pole ends of the magnetic steel are arranged along the radial direction of the detachable driven pulley, the magnetic pole arrangement of one end of each adjacent two magnetic steels close to the rotating shaft sleeve is opposite, a plurality of roller supporting pieces are uniformly arranged on the detachable driven belt wheel, the peripheral surfaces of the roller supporting pieces are abutted against the peripheral surface of the rotating shaft sleeve, the roller supporting piece can roll on the outer peripheral surface of the rotating shaft sleeve, so that the detachable driven belt wheel rotates outside the rotating shaft sleeve;
the motor assembly drives the driving belt wheel to rotate, the driving belt drives the detachable driven belt wheel to rotate, and the magnetic steel on the detachable driven belt wheel and the magnetic conduction bulge of the magnetic conduction steel core form magnetic coupling so as to drive the rotating shaft main body to rotate.
But split driven pulleys includes semicircle band pulley and two connecting pins of two symmetries, the semicircle band pulley reaches the connecting pin all adopts magnetic material to make, the both ends face of semicircle band pulley seted up respectively with the connecting pin is agreed with connecting groove mutually, two corresponding connecting groove of semicircle band pulley respectively with same the connecting pin joint, form but split driven pulleys is whole.
The roller supporting pieces are respectively and uniformly installed on the upper side surface and the lower side surface of the semicircular arc belt wheel in a rotating mode.
The inner side surface of the semi-arc belt wheel is evenly provided with a magnetic steel mounting groove, and the magnetic steel is clamped in the magnetic steel mounting groove respectively.
The fixing seat assembly comprises a motor assembly mounting seat, a rotating shaft sleeve fixing seat and a rotating shaft sleeve fixing hoop, one end of the rotating shaft sleeve fixing seat and the rotating shaft sleeve fixing hoop are clamped on the outer peripheral face of the rotating shaft sleeve respectively, one end of the rotating shaft sleeve fixing seat and the rotating shaft sleeve fixing hoop are fixed together through a locking screw, the other end of the rotating shaft sleeve fixing seat is fixed together through a connecting screw and the motor assembly mounting seat, and the motor assembly is mounted on the motor assembly mounting seat.
The other end of the rotating shaft sleeve fixing seat is provided with an adjusting groove, and the connecting screw penetrates through the adjusting groove and is fixed with the motor assembly mounting seat through threads.
The motor assembly comprises a servo motor and a speed reducer, the speed reducer is installed at the other end of the fixing seat assembly, the output end of the servo motor is connected with the input end of the speed reducer, and the driving belt wheel is installed at the output end of the speed reducer.
The rotating shaft main body is installed inside the rotating shaft sleeve through a deep groove ball bearing.
The invention has the advantages and positive effects that:
1. the driving of the rotating shaft main body adopts a magnetic coupling technology, can transmit large torque under the condition of ultrahigh vacuum, and has wide application range;
2. the invention aims at the ultrahigh vacuum pumping ultimate vacuum stage, when the external of the vacuum chamber equipment is integrally baked, the belt pulley assembly, the fixing seat assembly and the motor assembly which are not resistant to baking are easy to disassemble, and the internal vacuum environment is not damaged;
3. the invention can adjust the rotating speed of the internal rotating shaft part outside the vacuum chamber equipment through the servo motor, continuously and variably adjusts the speed and has wide application range.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic overall front view of the present invention;
FIG. 3 is a front view of the flange assembly of the present invention;
FIG. 4 is a front view of the axle assembly of the present invention;
FIG. 5 is a schematic structural view of the pulley assembly of the present invention;
FIG. 6 is a schematic view of a connection structure of the motor assembly and the fixing base assembly according to the present invention;
fig. 7 is an enlarged view of fig. 2 at a.
In the figure: the device comprises a rotating shaft sleeve 1, a connecting flange 2, a rotating shaft main body 3, a magnetic conductive steel core 4, a magnetic conductive boss 401, a transmission belt 5, a driving belt wheel 6, a detachable driven belt wheel 7, a semi-arc belt wheel 701, a connecting pin 702, a magnetic steel mounting groove 703, magnetic steel 8, a roller support 9, a motor assembly mounting seat 10, a rotating shaft sleeve fixing seat 11, an adjusting groove 1101, a rotating shaft sleeve fixing hoop 12, a locking screw 13, a connecting screw 14, a servo motor 15, a speed reducer 16 and a deep groove ball bearing 17.
Detailed Description
The invention is described in further detail below with reference to figures 1-7.
A high-torque and easy-to-disassemble vacuum magnetic coupling device is shown in figures 1-2 and comprises a motor assembly, a flange assembly, a fixing seat assembly, a belt pulley assembly and a rotating shaft assembly.
The flange assembly, as shown in fig. 3, includes a rotating shaft sleeve 1 and a connecting flange 2 connected together, the rotating shaft assembly is rotatably installed inside the rotating shaft sleeve 1, and the connecting flange 2 is used for connecting the vacuum chamber equipment. In this embodiment, the rotating shaft sleeve 1 and the connecting flange 2 are made of common non-magnetic stainless steel materials and welded together. As shown in fig. 4, the rotating shaft assembly includes a magnetic steel core 4 and a rotating shaft body 3 made of a non-magnetic material, which are connected together, and a plurality of magnetic protrusions 401 are uniformly disposed on the periphery of the magnetic steel core 4. The rotary shaft body 3 is used for connecting rotary shaft members in the vacuum chamber apparatus. In this embodiment, the rotating shaft body 3 is made of a common non-magnetic stainless steel material, the magnetic steel core 4 is made of a common magnetic stainless steel material, and the rotating shaft body 3 and the magnetic steel core 4 are welded together.
One end of the fixing seat component is detachably arranged on the outer peripheral surface of the rotating shaft sleeve 1, and the motor component is arranged at the other end of the fixing seat component.
The belt pulley assembly, as shown in fig. 5, comprises a transmission belt 5, a driving pulley 6 and a detachable driven pulley 7, the driving pulley 6 is driven by a motor assembly, the driving pulley 6 and the detachable driven pulley 7 are connected by the transmission belt 5, a plurality of magnetic steels 8 are uniformly arranged on the inner side surface of the detachable driven pulley 7, the arrangement positions of the magnetic steels 8 correspond to the magnetic conductive convex part 401 of the magnetic conductive steel core 4, the magnetic pole ends of the magnetic steels 8 are arranged along the radial direction of the detachable driven pulley 7, the arrangement of the magnetic poles of one ends of the two adjacent magnetic steels 8 close to the rotating shaft sleeve 1 is opposite, a plurality of roller supporting pieces 9 are uniformly arranged on the detachable driven belt wheel 7, the peripheral surfaces of the roller supporting pieces 9 are all abutted against the peripheral surface of the rotating shaft sleeve 1, and the roller support 9 can roll on the outer circumferential surface of the rotating shaft sleeve 1 to rotate the detachable driven pulley 7 outside the rotating shaft sleeve 1.
The motor assembly drives the driving belt wheel 6 to rotate, the driving belt wheel 5 drives the detachable driven belt wheel 7 to rotate, and the magnetic steel 8 on the detachable driven belt wheel 7 and the magnetic conduction bulge 401 of the magnetic conduction steel core 4 form magnetic coupling so as to drive the rotating shaft main body 3 to rotate.
Specifically, as shown in fig. 5, the detachable driven pulley 7 includes two symmetrical semi-circular pulleys 701 and two connecting pins 702, both the semi-circular pulleys 701 and the connecting pins 702 are made of magnetic conductive materials, two end faces of each semi-circular pulley 701 are respectively provided with a connecting groove engaged with the connecting pin 702, and the corresponding connecting grooves of the two semi-circular pulleys 701 are respectively engaged with the same connecting pin 702 to form the detachable driven pulley 7 as a whole. In this embodiment, the semi-circular pulley 701 and the two connecting pins 702 are both made of 1Cr17 material, which can ensure strength, and at the same time, can be magnetically conductive and rustproof, and can be implemented by using other cast iron for external chrome plating. After the semi-arc belt wheel 701, the connecting pin 702 and the magnetic steel 8 are connected, a closed-loop magnetic field is integrally formed, the magnetic field can be kept stable, and the two semi-arc belt wheels 701 can be directly separated during disassembly.
Specifically, as shown in fig. 5, the roller support members 9 are rotatably attached to both upper and lower side surfaces of the semi-circular pulley 701 so as to be rotatable on the outer peripheral surface of the rotating shaft sleeve 1. In the embodiment, four roller supporting pieces 9 are respectively arranged on the upper side and the lower side of the detachable driven belt wheel 1, and the roller supporting pieces 9 adopt deep groove ball bearings or copper sleeves and the like.
Specifically, as shown in fig. 5, magnetic steel mounting grooves 703 are uniformly formed in the inner side surface of the semi-arc pulley 701, and the magnetic steels 8 are respectively clamped into the magnetic steel mounting grooves 703, so that the uniform distribution of the magnetic steels 8 can be ensured. In the embodiment, 12 magnetic steels 8 magnetized with 1000 gauss are uniformly arranged to carry out external coupling, and the functions can be realized by changing the uniform distribution quantity and the magnetizing quantity of the magnetic steels under different conditions.
Specifically, as shown in fig. 1, fig. 2 and fig. 6, the fixing seat assembly includes a motor assembly mounting seat 10, a rotating shaft sleeve fixing seat 11 and a rotating shaft sleeve fixing hoop 12, one end of the rotating shaft sleeve fixing seat 11 and the rotating shaft sleeve fixing hoop 12 are respectively clamped on the outer circumferential surface of the rotating shaft sleeve 1, and one end of the rotating shaft sleeve fixing seat 11 and the rotating shaft sleeve fixing hoop 12 are fixed together through a locking screw 13, an adjusting groove 1101 is formed at the other end of the rotating shaft sleeve fixing seat 11, a connecting screw 14 passes through the adjusting groove 1101 and is fixed together with the motor assembly mounting seat 10 through a thread, and the motor assembly is mounted on the motor assembly mounting seat 10. The motor component mounting seat 10, the rotating shaft sleeve fixing seat 11, the rotating shaft sleeve fixing hoop 12, the locking screw 13 and the connecting screw 14 are matched, so that the fixing seat component is convenient to disassemble and assemble. The setting of adjustment tank 1101 conveniently adjusts the fixed position between motor component mounting base 10 and the axis of rotation sleeve fixing base 11, and then adjusts the whole length that motor component mounting base 10 and axis of rotation sleeve fixing base 11 constitute, can strain and adjust according to the drive belt 5 of different length.
Specifically, as shown in fig. 6, the motor assembly includes a servo motor 15 and a speed reducer 16, the speed reducer 16 is mounted on the other end of the fixed base assembly, an output end of the servo motor 15 is connected to an input end of the speed reducer 16, and the driving pulley 6 is mounted on an output end of the speed reducer 16. In this embodiment, the servo motor 15 is a 57HS22A Rasai stepping motor, and the reducer 16 is a DH060-10 Pinhong planetary reducer.
Specifically, as shown in fig. 2, 4 and 7, the turning shaft main body 3 is mounted inside the turning shaft sleeve 1 through the deep groove ball bearings 17, and the deep groove ball bearings 17 support the turning shaft main body 3 so that the turning shaft main body 3 does not contact with the inner wall of the turning shaft sleeve 1, thereby ensuring stable rotation of the turning shaft main body 3. In this embodiment, a gap is formed between the upper end surface of the uppermost deep groove ball bearing 17 and the inner wall of the rotating shaft sleeve 1 adjacent to the uppermost deep groove ball bearing, and the gap is 0.5mm in this embodiment, so that machining errors can be reduced, the uppermost deep groove ball bearing 17 is not subjected to axial force, the machining deformation of the deep groove ball bearing 17 and the deformation during heat conduction are prevented from affecting the rotation of the rotating shaft main body 3, the stable operation of the bearings at various positions is ensured, the rotating shaft main body 3 can stably rotate, and the service life is prolonged.
The working principle is as follows:
the motor component drives the driving belt wheel 6 to rotate, the detachable driven belt wheel 6 is driven to rotate through the driving belt 5, magnetic coupling is formed between the magnetic steel 8 on the detachable driven belt wheel 7 and the magnetic conduction bulge 401 of the magnetic conduction steel core 4, and then torque is transmitted to the inside of the rotating shaft sleeve 1 and drives the rotating shaft main body 3 to rotate, so that the rotation control of the rotating shaft main body 3 can be realized; when the whole outside of the vacuum chamber equipment is baked, the belt pulley assembly, the fixed seat assembly and the motor assembly which are not resistant to baking can be simply disassembled; the detachable driven pulley 7 composed of the semi-circular pulley 701 and the connecting pin 702 can be conveniently detached from the rotating shaft sleeve 1; the motor component mounting seat 10, the rotating shaft sleeve fixing seat 11, the rotating shaft sleeve fixing hoop 12, the locking screw 13 and the connecting screw 14 are arranged in a matched mode, so that the fixing seat component and the motor component are convenient to detach from the rotating shaft sleeve 1.

Claims (8)

1. The utility model provides a quick detachable vacuum magnetic coupling device of high moment of torsion which characterized in that: the device comprises a motor assembly, a flange assembly, a fixing seat assembly, a belt pulley assembly and a rotating shaft assembly;
the flange assembly comprises a rotating shaft sleeve (1) and a connecting flange (2) which are connected together, the rotating shaft assembly is rotatably arranged in the rotating shaft sleeve (1), the rotating shaft assembly comprises a magnetic conduction steel core (4) and a rotating shaft main body (3) made of non-magnetic conduction materials, which are connected together, and a plurality of magnetic conduction protruding parts (401) are uniformly arranged on the periphery of the magnetic conduction steel core (4);
one end of the fixed seat component is detachably arranged on the outer peripheral surface of the rotating shaft sleeve (1), and the motor component is arranged at the other end of the fixed seat component;
the belt pulley component comprises a transmission belt (5), a driving pulley (6) and a detachable driven pulley (7), the driving pulley (6) is driven by the motor component, the driving pulley (6) and the detachable driven pulley (7) are connected by the transmission belt (5), a plurality of magnetic steels (8) are uniformly arranged on the inner side surface of the detachable driven pulley (7), the arrangement positions of the magnetic steels (8) correspond to the magnetic conduction bulge parts (401) of the magnetic conduction steel core (4), the magnetic pole ends of the magnetic steels (8) are arranged along the radial direction of the detachable driven pulley (7) and are adjacent to the magnetic pole of one end of the rotating shaft sleeve (1) and are opposite to each other, a plurality of roller supporting pieces (9) are uniformly arranged on the detachable driven pulley (7), and the outer peripheral surfaces of the roller supporting pieces (9) are abutted to the outer peripheral surface of the rotating shaft sleeve (1), the roller support (9) can roll on the outer peripheral surface of the rotating shaft sleeve (1) so as to enable the detachable driven pulley (7) to rotate outside the rotating shaft sleeve (1);
the motor component drives the driving belt wheel (6) to rotate, the driving belt (5) drives the detachable driven belt wheel (7) to rotate, and the magnetic steel (8) on the detachable driven belt wheel (7) and the magnetic conduction bulge (401) of the magnetic conduction steel core (4) form magnetic coupling to further drive the rotation shaft main body (3) to rotate.
2. The high-torque quick disconnect vacuum magnetic coupling device of claim 1, wherein: but split driven pulley (7) include semicircle band pulley (701) and two connecting pin (702) of two symmetries, semicircle band pulley (701) reach connecting pin (702) all adopt magnetic material to make, the both ends face of semicircle band pulley (701) seted up respectively with connecting pin (702) the connecting groove that agrees with mutually, two the corresponding connecting groove of semicircle band pulley (701) respectively with same connecting pin (702) joint, formation but split driven pulley (7) are whole.
3. The high-torque quick disconnect vacuum magnetic coupling device of claim 2, wherein: the roller supporting pieces (9) are respectively and uniformly installed on the upper side surface and the lower side surface of the semi-circular belt wheel (701) in a rotating mode.
4. The high-torque quick disconnect vacuum magnetic coupling device of claim 2, wherein: the inner side surface of the semi-arc belt wheel (701) is evenly provided with a magnetic steel mounting groove (703), and the magnetic steel (8) is respectively clamped in the magnetic steel mounting groove (703).
5. The high-torque quick disconnect vacuum magnetic coupling device of claim 1, wherein: the fixing base assembly comprises a motor assembly mounting base (10), a rotating shaft sleeve fixing base (11) and a rotating shaft sleeve fixing hoop (12), one end of the rotating shaft sleeve fixing base (11) is clamped on the outer peripheral face of the rotating shaft sleeve (1) respectively, one end of the rotating shaft sleeve fixing base (11) is fixed with the rotating shaft sleeve fixing hoop (12) through a locking screw (13), the other end of the rotating shaft sleeve fixing base (11) is fixed with the motor assembly mounting base (10) through a connecting screw (14), and the motor assembly is mounted on the motor assembly mounting base (10).
6. The high-torque quick disconnect vacuum magnetic coupling device of claim 5, wherein: the other end of the rotating shaft sleeve fixing seat (11) is provided with an adjusting groove (1101), and the connecting screw (14) penetrates through the adjusting groove (1101) and is fixed with the motor assembly mounting seat (10) through threads.
7. The high-torque quick disconnect vacuum magnetic coupling device of claim 1, wherein: the motor assembly comprises a servo motor (15) and a speed reducer (16), the speed reducer (16) is installed at the other end of the fixing seat assembly, the output end of the servo motor (15) is connected with the input end of the speed reducer (16), and the driving belt wheel (6) is installed at the output end of the speed reducer (16).
8. The high-torque quick disconnect vacuum magnetic coupling device of claim 1, wherein: the rotating shaft main body (3) is installed inside the rotating shaft sleeve (1) through a deep groove ball bearing (17).
CN202111181631.4A 2021-10-11 2021-10-11 High-torque vacuum magnetic coupling device easy to disassemble Active CN113612367B (en)

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Application Number Priority Date Filing Date Title
CN202111181631.4A CN113612367B (en) 2021-10-11 2021-10-11 High-torque vacuum magnetic coupling device easy to disassemble

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Application Number Priority Date Filing Date Title
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CN113612367B CN113612367B (en) 2021-12-10

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2840500Y (en) * 2005-10-24 2006-11-22 叶蒙妹 Magnetic driving equipment
CN101056037A (en) * 2007-05-31 2007-10-17 上海交通大学 Multi-axis direct driving magnetic force transfer device
CN201875091U (en) * 2010-12-13 2011-06-22 中国科学院沈阳科学仪器研制中心有限公司 Magnetic coupling drive mechanism
CN105939073A (en) * 2015-03-04 2016-09-14 美国轮轴制造公司 Actuator assembly with a magnetic coupling
US20180166946A1 (en) * 2013-02-20 2018-06-14 Raymond James Walsh Flywheel energy storage device with induction torque transfer
CN208723701U (en) * 2018-09-30 2019-04-09 郑州科锐真空设备有限公司 A kind of electronic magnetic coupling drive and the vacuum equipment using the driver
CN111446839A (en) * 2020-05-18 2020-07-24 祝显胜 Magnetic coupling transmission device
CN112332633A (en) * 2020-11-03 2021-02-05 浙江大学 Accurate rotating speed control device and method of piezoelectric actuated permanent magnet speed regulator

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2840500Y (en) * 2005-10-24 2006-11-22 叶蒙妹 Magnetic driving equipment
CN101056037A (en) * 2007-05-31 2007-10-17 上海交通大学 Multi-axis direct driving magnetic force transfer device
CN201875091U (en) * 2010-12-13 2011-06-22 中国科学院沈阳科学仪器研制中心有限公司 Magnetic coupling drive mechanism
US20180166946A1 (en) * 2013-02-20 2018-06-14 Raymond James Walsh Flywheel energy storage device with induction torque transfer
CN105939073A (en) * 2015-03-04 2016-09-14 美国轮轴制造公司 Actuator assembly with a magnetic coupling
CN208723701U (en) * 2018-09-30 2019-04-09 郑州科锐真空设备有限公司 A kind of electronic magnetic coupling drive and the vacuum equipment using the driver
CN111446839A (en) * 2020-05-18 2020-07-24 祝显胜 Magnetic coupling transmission device
CN112332633A (en) * 2020-11-03 2021-02-05 浙江大学 Accurate rotating speed control device and method of piezoelectric actuated permanent magnet speed regulator

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