CN208723701U - A kind of electronic magnetic coupling drive and the vacuum equipment using the driver - Google Patents
A kind of electronic magnetic coupling drive and the vacuum equipment using the driver Download PDFInfo
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- CN208723701U CN208723701U CN201821615209.9U CN201821615209U CN208723701U CN 208723701 U CN208723701 U CN 208723701U CN 201821615209 U CN201821615209 U CN 201821615209U CN 208723701 U CN208723701 U CN 208723701U
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- China
- Prior art keywords
- installing pipe
- card case
- transmission shaft
- drive mechanism
- strong card
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Abstract
The utility model relates to a kind of electronic magnetic coupling drive and use the vacuum equipment of the driver, electronic magnetic coupling drive includes installing pipe, transmission shaft is equipped with inside installing pipe, transmission shaft is equipped with the stressed member of magnetic conduction, strong card case is correspondingly provided in installing pipe with stressed member, strong card case includes annular outer cover, mounting plate is provided in annular outer cover, magnet is provided on mounting plate, installing pipe is equipped with the rotary drive mechanism for driving strong card case rotation, the driver further includes the horizontal drive mechanism for driving strong card case and rotary drive mechanism to move along transmission shaft axial direction.Rotary drive mechanism can drive strong card case to rotate, so that transmission shaft rotates, horizontal drive mechanism can drive strong card case and rotary drive mechanism to move horizontally, moving horizontally for transmission shaft can be achieved, the function of driver is increased, while the control precision of the driver can be increased manually by driving mechanism replacement.
Description
Technical field
The utility model relates to the drivers on vacuum equipment, are specifically related to a kind of electronic magnetic coupling drive and use
The vacuum equipment of the driver.
Background technique
Vacuum equipment can be used in vacuum coating, semiconductor and aerospace field, vacuum equipment generally comprises very
Cavity body and the driver being set on vacuum cavity, traditional driver is generally using manual operation, as Authorization Notice No. is
The Chinese utility model patent of 204546080 U of CN discloses a kind of magnetic coupling vacuum linear rotating driver, including handle,
Strong card case, external main line, that is, installing pipe, internal mobile pipeline, that is, transmission shaft and angle demodulator, handle are set to strong magnetic card
It puts on, structure is simple, can drive the movement of internal mobile pipeline by the mobile strong card case of handle in operation.But it uses
Manual operation, the bad control of operation precision, and work also result in heavy workload for a long time, body is tired out, in addition above-mentioned
Driver functions are single, can only carry out the movement in horizontal direction, can not rotating drive shaft carry out collet angular adjustment etc., nothing
Method meets the requirements acted in actual production more.
Utility model content
The purpose of the utility model is to provide a kind of electronic magnetic coupling drives, to solve driver hand in the prior art
Dynamic operation precision is difficult to control, has a single function the problem of being unable to satisfy the requirement of multiplexing work in actual production；Meanwhile this is practical new
The purpose of type, which also resides in, provides a kind of vacuum equipment using the driver.
To achieve the above object, a kind of electronic magnetic coupling drive of the utility model adopts the following technical scheme that one kind
Electronic magnetic coupling drive, including installing pipe, the end of installing pipe are provided with the Method for Installation for being tightly connected with vacuum cavity
Orchid, the installing pipe are internally provided with transmission shaft, and the end of transmission shaft is provided with collet, is provided with magnetic conduction on the transmission shaft
Stressed member is correspondingly arranged on strong card case in installing pipe with stressed member, and strong card case axially can be rotated and horizontally-guided is installed on
On the outside of installing pipe, strong card case includes annular outer cover, and mounting plate is provided in annular outer cover, and magnet is provided on mounting plate, is pacified
The rotary drive mechanism for driving strong card case rotation to drive stressed member rotation under magneticaction, the driving are provided in tubulature
Device further includes the horizontal drive mechanism for driving strong card case and rotary drive mechanism to move along transmission shaft axial direction.
The rotary drive mechanism includes the installation shell for the rotational installation of strong card case, installs and is provided with first on shell
Motor is provided with driving pulley on the output end of first motor, and one end of the annular outer cover of strong card case is connected with driven pulley,
Transmission belt is provided between driving pulley and driven pulley.
The driver further includes the pedestal for being used to support installing pipe, and guiding is provided on pedestal along the length direction of installing pipe
The guide groove of extension, the lower end for installing shell are connected with the guide pad cooperated with guide groove guiding movement, horizontal drive mechanism packet
The second motor for including the lead screw for being axially parallel to installation tube axis direction being rotatably dispose on pedestal and driving lead screw rotation, leads
It connect to block with threads of lead screw to form screw slider structure.
The transmission shaft is set in installing pipe by rotational structure, and rotational structure includes bearing block and is set to bearing block
Interior bearing, on bearing block it is circumferentially arranged have multiple axis perpendicular to drive shaft axis and inner wall for installing pipe match
The idler wheel of conjunction.
A kind of vacuum equipment of the utility model adopts the following technical scheme that a kind of vacuum equipment, including vacuum cavity and
The electronic magnetic coupling drive being set on vacuum cavity, electronic magnetic coupling drive include installing pipe, and the end of installing pipe is set
It is equipped with the mounting flange for being tightly connected with vacuum cavity, the installing pipe is internally provided with transmission shaft, the end of transmission shaft
It is provided with collet, is provided with the stressed member of magnetic conduction on transmission shaft, is correspondingly arranged on strong card case, Qiang Ci with stressed member in installing pipe
Cutting ferrule axially can be rotated and horizontally-guided is installed on the outside of installing pipe, and strong card case includes annular outer cover, is arranged in annular outer cover
There is mounting plate, magnet is provided on mounting plate, the strong card case rotation of driving is provided in installing pipe to drive under magneticaction
Stressed member rotation rotary drive mechanism, the driver further include drive strong card case and rotary drive mechanism along transmission shafts to
The mobile horizontal drive mechanism in direction.
The rotary drive mechanism includes the installation shell for the rotational installation of strong card case, installs and is provided with first on shell
Motor is provided with driving pulley on the output end of first motor, and one end of the annular outer cover of strong card case is connected with driven pulley,
Transmission belt is provided between driving pulley and driven pulley.
The driver further includes the pedestal for being used to support installing pipe, and guiding is provided on pedestal along the length direction of installing pipe
The guide groove of extension, the lower end for installing shell are connected with the guide pad cooperated with guide groove guiding movement, horizontal drive mechanism packet
The second motor for including the lead screw for being axially parallel to installation tube axis direction being rotatably dispose on pedestal and driving lead screw rotation, leads
It connect to block with threads of lead screw to form screw slider structure.
The transmission shaft is set in installing pipe by rotational structure, and rotational structure includes bearing block and is set to bearing block
Interior bearing, on bearing block it is circumferentially arranged have multiple axis perpendicular to drive shaft axis and inner wall for installing pipe match
The idler wheel of conjunction.
The utility model has the beneficial effects that rotary drive mechanism can drive strong card case to rotate around installing pipe, strong magnetic card
Set by magnetic force drive stressed member rotation, stressed member drive transmission shaft rotate, horizontal drive mechanism can drive strong card case and
Rotary drive mechanism moves horizontally, and moving horizontally for strong card case drives stressed member to move horizontally, and stressed member drives transmission shaft again
It moves horizontally, it can be achieved that moving horizontally and rotating for transmission shaft, increases its function, solves the driver function of the prior art
The problem of single capable of being unable to satisfy the requirement that multiplexing is made in actual production, while being replaced that the drive can be increased manually by driving mechanism
The control precision of dynamic device.
Detailed description of the invention
Fig. 1 is that the structure of the electronic magnetic coupling drive in a kind of one embodiment of vacuum equipment of the utility model is shown
It is intended to；
Fig. 2 is the schematic diagram of internal structure of electronic magnetic coupling drive；
Fig. 3 is partial enlarged view of the Fig. 2 at A；
Fig. 4 is the structural schematic diagram of mounting plate in strong card case；
Fig. 5 is the structural schematic diagram of stressed member；
Fig. 6 is the structural schematic diagram of rotational structure.
Specific embodiment
A kind of embodiment of vacuum equipment of the utility model, as shown in figs 1 to 6, including vacuum cavity (is not given in figure
Out) and the electronic magnetic coupling drive that is set on vacuum cavity, electronic magnetic coupling drive includes pedestal 1, is arranged on pedestal 1
There is installing pipe 2, the end of installing pipe 2 is provided with the mounting flange 21 for being tightly connected with vacuum cavity, passes through mounting flange
21 complete to be tightly connected with vacuum cavity.Installing pipe 2 is internally provided with transmission shaft 10, and the end of transmission shaft 10 is provided with collet.
It is provided with the stressed member 11 of magnetic conduction on transmission shaft 10, is correspondingly arranged on strong card case 13, strong magnetic card with stressed member 11 in installing pipe 2
Set 13 axially can be rotated and horizontally-guided is installed on 2 outside of installing pipe, and strong card case 13 includes annular outer cover 22, annular outer cover 22
In be provided with mounting plate 14, it is circumferentially arranged on mounting plate 14 to have multiple mounting grooves 17 for magnet installation, pacify in the present embodiment
The quantity of loading board 14 is two and is spaced setting, and the quantity of the mounting groove 17 on each mounting plate is six.It is provided in installing pipe 2
Rotary drive mechanism of the strong rotation of card case 13 to drive stressed member 11 to rotate under magneticaction is driven, which further includes
The horizontal drive mechanism for driving strong card case 13 and rotary drive mechanism to move along 10 axial direction of transmission shaft.Stressed member 11 uses
Electromagnetic pure iron material, structure is simple, and can be with high temperature resistant, and middle stressed member uses strong magnetic material compared with the prior art, works as installation
Demagnetization phenomenon is had when temperature reaches 180 DEG C or more in managing, is not available product.
Rotary drive mechanism includes the installation shell 7 for the rotational installation of strong card case 13, and strong card case 13 passes through bearing 16
It is rotatablely installed in installation shell 7, installs and be provided with first motor 8 on shell 7, be provided with master on the output end of first motor 8
Movable belt pulley 22, one end of the annular outer cover 22 of strong card case 13 are connected with driven pulley 15, driving pulley 22 and driven pulley 15
Between be provided with transmission belt 9.It is provided with the guide groove 5 that guiding extends along the length direction of installing pipe on pedestal 1, shell 7 is installed
Lower end be connected with 5 guiding movement of guide groove cooperation guide pad 4, horizontal drive mechanism include be rotatably dispose on pedestal 1
The lead screw 3 for being axially parallel to installation tube axis direction and the second motor 6 for rotating of driving lead screw 3, guide pad 4 and 3 spiral shell of lead screw
Line is connected to form screw slider structure.Transmission shaft 10 is set in installing pipe 2 by rotational structure 12, and rotational structure includes axis
The bearing for holding seat 19 and being set in bearing block 19, it is circumferentially arranged on bearing block 19 to have multiple axis perpendicular to drive shaft axis
And idler wheel 20 for cooperating with the inner wall of installing pipe.
In use, rotary drive mechanism can drive strong card case 13 to rotate around installing pipe 2, strong card case 13 passes through magnetic force
Stressed member 11 is driven to rotate, stressed member 11 drives transmission shaft 10 to rotate, and horizontal drive mechanism can drive strong card case 13 and rotation
Turn driving mechanism to move horizontally, moving horizontally for strong card case 13 drives stressed member 11 to move horizontally, and stressed member 11 drives biography again
Moving axis 10 moves horizontally, it can be achieved that moving horizontally and rotating for transmission shaft 10, increases its function, solve the prior art
Driver functions are single the problem of being unable to satisfy the requirement that multiplexing is made in actual production, while being replaced by driving mechanism manually can be with
Increase the control precision of the driver.
In the other embodiments of the utility model, stressed member can also use the ferroalloy of magnetic conduction；The quantity of mounting plate
It may be one or three or more；The quantity of each mounting plate upper installing hole can be adjusted according to actual needs；First electricity
It can also be driven by driving gear and driven gear between machine and the annular outer cover of strong card case.
A kind of electronic magnetic coupling in the embodiment of electronic magnetic coupling drive and a kind of above-mentioned each embodiment of vacuum equipment
The structure for closing driver is identical, and details are not described herein again.
Claims (8)
1. a kind of electronic magnetic coupling drive, including installing pipe, the end of installing pipe is provided with to be connected for sealing with vacuum cavity
The mounting flange connect, the installing pipe are internally provided with transmission shaft, and the end of transmission shaft is provided with collet, it is characterised in that: institute
It states the stressed member for being provided with magnetic conduction on transmission shaft, is correspondingly arranged on strong card case in installing pipe with stressed member, strong card case is axial
It can be rotated and horizontally-guided be installed on the outside of installing pipe, strong card case includes annular outer cover, it is provided with mounting plate in annular outer cover,
It is provided with magnet on mounting plate, the strong card case rotation of driving is provided in installing pipe to drive stressed member rotation under magneticaction
Rotary drive mechanism, which further includes that strong card case and rotary drive mechanism is driven to move along transmission shaft axial direction
Horizontal drive mechanism.
2. electronic magnetic coupling drive according to claim 1, it is characterised in that: the rotary drive mechanism includes for strong
The installation shell of card case rotational installation is installed and is provided with first motor on shell, is provided with master on the output end of first motor
Movable belt pulley, one end of the annular outer cover of strong card case are connected with driven pulley, and biography is provided between driving pulley and driven pulley
Dynamic band.
3. electronic magnetic coupling drive according to claim 2, it is characterised in that: the driver further includes being used to support peace
The pedestal of tubulature is provided with the guide groove that guiding extends along the length direction of installing pipe on pedestal, installs the lower end connection of shell
There is the guide pad with the cooperation of guide groove guiding movement, horizontal drive mechanism includes being rotatably dispose on pedestal to be axially parallel to peace
The lead screw of tubulature axis direction and the second motor of driving lead screw rotation, guide pad are connect to form screw slider with threads of lead screw
Structure.
4. electronic magnetic coupling drive according to any one of claim 1-3, it is characterised in that: the transmission shaft passes through
Rotational structure is set in installing pipe, and rotational structure includes bearing block and the bearing that is set in bearing block, along week on bearing block
To being provided with multiple axis perpendicular to idler wheel drive shaft axis and for cooperating with the inner wall of installing pipe.
5. a kind of vacuum equipment, including vacuum cavity and the electronic magnetic coupling drive being set on vacuum cavity, electronic magnetic coupling
Closing driver includes installing pipe, and the end of installing pipe is provided with the mounting flange for being tightly connected with vacuum cavity, feature
Be: the installing pipe is internally provided with transmission shaft, and the end of transmission shaft is provided with collet, be provided on transmission shaft magnetic conduction by
Power part is correspondingly arranged on strong card case in installing pipe with stressed member, and strong card case axially can be rotated and horizontally-guided is installed on
On the outside of tubulature, strong card case includes annular outer cover, and mounting plate is provided in annular outer cover, and magnet is provided on mounting plate, is installed
The rotary drive mechanism for driving strong card case rotation to drive stressed member rotation under magneticaction, the driver are provided on pipe
It further include the horizontal drive mechanism for driving strong card case and rotary drive mechanism to move along transmission shaft axial direction.
6. vacuum equipment according to claim 5, it is characterised in that: the rotary drive mechanism includes turning for strong card case
The installation shell of dynamic installation is installed and is provided with first motor on shell, driving pulley is provided on the output end of first motor, by force
One end of the annular outer cover of card case is connected with driven pulley, and transmission belt is provided between driving pulley and driven pulley.
7. vacuum equipment according to claim 6, it is characterised in that: the driver further includes the bottom for being used to support installing pipe
, the guide groove that guiding extends along the length direction of installing pipe is provided on pedestal, the lower end for installing shell is connected with and is oriented to
The guide pad of slot guiding movement cooperation, horizontal drive mechanism includes being rotatably dispose on pedestal to be axially parallel to installing pipe axis
The lead screw in direction and the second motor of driving lead screw rotation, guide pad are connect to form screw slider structure with threads of lead screw.
8. the vacuum equipment according to any one of claim 5-7, it is characterised in that: the transmission shaft passes through rotation knot
Structure is set in installing pipe, and rotational structure includes bearing block and the bearing that is set in bearing block, circumferentially arranged on bearing block
There are multiple axis perpendicular to idler wheel drive shaft axis and for cooperating with the inner wall of installing pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821615209.9U CN208723701U (en) | 2018-09-30 | 2018-09-30 | A kind of electronic magnetic coupling drive and the vacuum equipment using the driver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821615209.9U CN208723701U (en) | 2018-09-30 | 2018-09-30 | A kind of electronic magnetic coupling drive and the vacuum equipment using the driver |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208723701U true CN208723701U (en) | 2019-04-09 |
Family
ID=65983071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821615209.9U Active CN208723701U (en) | 2018-09-30 | 2018-09-30 | A kind of electronic magnetic coupling drive and the vacuum equipment using the driver |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208723701U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113612367A (en) * | 2021-10-11 | 2021-11-05 | 中国科学院沈阳科学仪器股份有限公司 | High-torque vacuum magnetic coupling device easy to disassemble |
-
2018
- 2018-09-30 CN CN201821615209.9U patent/CN208723701U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113612367A (en) * | 2021-10-11 | 2021-11-05 | 中国科学院沈阳科学仪器股份有限公司 | High-torque vacuum magnetic coupling device easy to disassemble |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190807 Address after: 454000 Jiaozuo City Demonstration Zone, Henan Province, Jiaozuo High-tech Entrepreneurship Service Center 1 Floor Patentee after: Henan Jingkeli Vacuum Technology Co., Ltd. Address before: No. 301, Building 3, No. 3169, Lianhua Street, Zhengzhou High-tech Industrial Development Zone, 450000 Henan Province Patentee before: Zhengzhou CREE Vacuum Equipment Co., Ltd. |
|
| TR01 | Transfer of patent right |