CN113607689A - Fabry-Perot micro-flow cavity sensor based on double-hole microstructure optical fiber - Google Patents
Fabry-Perot micro-flow cavity sensor based on double-hole microstructure optical fiber Download PDFInfo
- Publication number
- CN113607689A CN113607689A CN202110770906.1A CN202110770906A CN113607689A CN 113607689 A CN113607689 A CN 113607689A CN 202110770906 A CN202110770906 A CN 202110770906A CN 113607689 A CN113607689 A CN 113607689A
- Authority
- CN
- China
- Prior art keywords
- optical fiber
- double
- hole
- fabry
- micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 98
- 239000007788 liquid Substances 0.000 claims abstract description 34
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 34
- 239000010453 quartz Substances 0.000 claims abstract description 32
- 239000000523 sample Substances 0.000 claims abstract description 30
- 238000001228 spectrum Methods 0.000 claims abstract description 13
- 239000002699 waste material Substances 0.000 claims abstract description 12
- 239000000835 fiber Substances 0.000 claims description 20
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 10
- 238000005459 micromachining Methods 0.000 claims description 10
- 238000003466 welding Methods 0.000 claims description 10
- 239000011247 coating layer Substances 0.000 claims description 8
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 6
- 238000005253 cladding Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 4
- 238000002360 preparation method Methods 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 4
- 238000005520 cutting process Methods 0.000 claims 4
- 239000012530 fluid Substances 0.000 claims 2
- 238000005086 pumping Methods 0.000 claims 1
- 238000004080 punching Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 230000003287 optical effect Effects 0.000 abstract description 6
- 239000000126 substance Substances 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000007526 fusion splicing Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000001427 coherent effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 201000010099 disease Diseases 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 238000009509 drug development Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000004038 photonic crystal Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/4133—Refractometers, e.g. differential
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
- G01N2021/458—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/08—Optical fibres; light guides
- G01N2201/088—Using a sensor fibre
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
技术领域technical field
本发明属于光纤传感器技术领域，具体涉及一种基于双孔微结构光纤的法布里-珀罗微流腔传感器。The invention belongs to the technical field of optical fiber sensors, in particular to a Fabry-Perot microfluidic cavity sensor based on a double-hole microstructure optical fiber.
背景技术Background technique
传感技术是信息产业中与通信技术和计算机技术并重的三大支柱产业之一，广泛应用于国防安全、生物传感、医药化工、食品安全和环境监测等领域。光纤传感器作为一个重要的分支，以其体积小、灵敏度高、抗电磁干扰、抗腐蚀、耐温耐高压等诸多优异的性能占据着传感器领域的重要地位。光纤传感器以光信号作为传输信息的媒介，通过光信号与物质的相互作用来感知不同物理量，例如应力、曲率、温度、湿度、折射率等。当周围环境物理量产生变化时，光信号的特征参数也会随之改变，如波长、相位、强度等，通过分析解调输出光信号的特征参数与被测物理量的关系，即可实现光纤传感。目前已有多种光纤传感器被研发，例如光纤法布里-珀罗传感器，光纤光栅传感器，光纤SPR传感器，光纤多模干涉仪，光子晶体光纤传感器等等。其中光纤法布里-珀罗传感器由于其高灵敏度、易集成等特点备受关注，已经成为压力、温度、折射率等传感领域的研究热点。但是目前常见的光纤法布里-珀罗传感器多为光纤外部传感，这限制了传感器的灵敏度，也容易受到外界环境的干扰，本发明采取光纤内部微流传感的方式对待测样品进行检测，由于传感器内光纤微流腔体积小，可以对微量样品进行检测，同时可以有效减少外界干扰，提高传感器灵敏度。Sensing technology is one of the three pillar industries in the information industry that attaches equal importance to communication technology and computer technology. As an important branch, fiber optic sensor occupies an important position in the sensor field due to its small size, high sensitivity, anti-electromagnetic interference, anti-corrosion, temperature and high pressure resistance and many other excellent properties. Optical fiber sensors use optical signals as a medium for transmitting information, and perceive different physical quantities, such as stress, curvature, temperature, humidity, and refractive index, through the interaction of optical signals and substances. When the physical quantity of the surrounding environment changes, the characteristic parameters of the optical signal will also change, such as wavelength, phase, intensity, etc. By analyzing the relationship between the characteristic parameters of the demodulated output optical signal and the measured physical quantity, the optical fiber sensing can be realized. . At present, a variety of fiber optic sensors have been developed, such as fiber Fabry-Perot sensors, fiber grating sensors, fiber SPR sensors, fiber multimode interferometers, photonic crystal fiber sensors, and so on. Among them, the optical fiber Fabry-Perot sensor has attracted much attention due to its high sensitivity and easy integration, and has become a research hotspot in the field of pressure, temperature, refractive index and other sensing fields. However, the common optical fiber Fabry-Perot sensors are mostly optical fiber external sensing, which limits the sensitivity of the sensor and is easily disturbed by the external environment. Due to the small volume of the optical fiber microfluidic cavity in the sensor, it is possible to detect trace samples, and at the same time, it can effectively reduce external interference and improve the sensitivity of the sensor.
发明内容SUMMARY OF THE INVENTION
本发明的目的在于克服背景技术中存在的不足，提供一种基于双孔微结构光纤的法布里-珀罗微流腔传感器，以实现高灵敏度的无干扰光纤内部折射率测量。The purpose of the present invention is to overcome the deficiencies in the background technology, and to provide a Fabry-Perot microfluidic cavity sensor based on a double-hole microstructure optical fiber, so as to achieve high-sensitivity and interference-free internal refractive index measurement of the optical fiber.
为实现上述技术目的所采用的技术方案为：The technical solutions adopted to achieve the above technical purposes are:
一种基于双孔微结构光纤的法布里-珀罗微流腔传感器，由超连续谱光源(1)、光纤环形器(2)、双孔微结构光纤法布里-珀罗微流腔传感探头(3)、光谱分析仪(4)、微流泵(5)、废液池(6)组成，所述双孔微结构光纤法布里-珀罗微流腔传感探头(3)由开孔石英毛细管(7)形成待测样品的进液口，双孔微结构光纤(8)尾端形成待测样品的出液口，进液口和出液口分别与微流泵(5)以及废液池(6)相连接。A Fabry-Perot microfluidic cavity sensor based on a double-hole microstructured optical fiber, comprising a supercontinuum light source (1), an optical fiber circulator (2), and a double-hole microstructured optical fiber Fabry-Perot microfluidic cavity A sensing probe (3), a spectrum analyzer (4), a microflow pump (5), and a waste liquid pool (6), the double-hole microstructure optical fiber Fabry-Perot microfluidic cavity sensing probe (3) ) The liquid inlet of the sample to be tested is formed by the perforated quartz capillary (7), the liquid outlet of the sample to be tested is formed by the tail end of the double-hole microstructure optical fiber (8), and the liquid inlet and the liquid outlet are respectively connected with the microfluidic pump ( 5) and the waste liquid pool (6) are connected.
进一步的，所述的双孔微结构光纤法布里-珀罗微流腔传感探头的制备方法包括以下步骤：Further, the preparation method of the double-hole microstructure optical fiber Fabry-Perot microfluidic cavity sensing probe comprises the following steps:
1)将一段石英毛细管(7)去除涂覆层，用酒精擦拭后将端面切平，使用飞秒激光器在距离端面50微米处对石英毛细管壁进行打孔，孔径控制在20微米；1) A section of quartz capillary (7) is removed from the coating, the end face is cut flat after wiping with alcohol, and the quartz capillary wall is punched at a distance of 50 microns from the end face using a femtosecond laser, and the aperture is controlled at 20 microns;
2)将一段单模光纤(9)去除涂覆层，用酒精擦拭干净后将端面切平整，然后利用光纤在线微加工平台将该单模光纤(9)与步骤1)处理后的开孔石英毛细管(7)进行熔接，熔接完成后利用光纤在线微加工平台对距离熔接点100微米处的石英毛细管(7)进行截断处理；2) Remove the coating layer from a section of single-mode optical fiber (9), wipe the end face with alcohol and cut it flat, and then use the optical fiber online micromachining platform to combine the single-mode optical fiber (9) with the open-hole quartz processed in step 1). The capillary (7) is welded, and after the welding is completed, the quartz capillary (7) at a distance of 100 microns from the welding point is cut off by using an optical fiber online micromachining platform;
3)将一段双孔微结构光纤(8)去除涂覆层，用酒精擦拭干净后将端面切平整，然后利用光纤在线微加工平台把该双孔微结构光纤(8)与步骤2)所得单模(9)-开孔石英毛细管(7)对齐熔接，熔接处理完成后，利用光纤在线微加工平台在距离熔接点1厘米处的双孔微结构光纤(8)进行截断处理；3) Remove the coating layer of a section of the double-hole microstructure optical fiber (8), wipe the end face with alcohol, and then cut the end face to be flat, and then use the optical fiber online micromachining platform to process the double-hole microstructure optical fiber (8) with the single obtained in step 2). The mold (9)-perforated quartz capillary (7) is aligned and welded, and after the welding process is completed, the double-hole microstructure optical fiber (8) at a distance of 1 cm from the welding point is truncated by using an optical fiber online micromachining platform;
4)将经过步骤3)处理后的双孔微结构光纤法布里-珀罗微流腔传感探头(3)与微流泵(5)和废液池(6)相连，使用微流泵(5)通过所述开孔石英毛细管向传感器内匀速泵入折射率匹配液，便可实现在光纤内部的微流控折射率传感测量。4) Connect the double-hole microstructure optical fiber Fabry-Perot microfluidic cavity sensing probe (3) treated in step 3) to the microfluidic pump (5) and the waste liquid pool (6), and use the microfluidic pump (5) The refractive index matching liquid is pumped into the sensor at a constant speed through the perforated quartz capillary, so that the microfluidic refractive index sensing measurement inside the optical fiber can be realized.
进一步的，步骤1)所述的石英毛细管外径为125微米，内径为75微米，步骤2)所述的单模光纤包层直径为125微米，纤芯直径为8.2微米，步骤3)所述的双孔微结构光纤包层直径为128微米，纤芯直径为9.2微米，空气孔直径为43微米，步骤4)中所述的折射率匹配液是由不同溶度的甘油配置而得，折射率范围为1.333-1.340。Further, the outer diameter of the quartz capillary described in step 1) is 125 microns, the inner diameter is 75 microns, the cladding diameter of the single-mode optical fiber described in step 2) is 125 microns, and the core diameter is 8.2 microns, step 3) described The diameter of the double-hole microstructure fiber cladding is 128 μm, the diameter of the core is 9.2 μm, and the diameter of the air hole is 43 μm. The rate range is 1.333-1.340.
一种基于双孔微结构光纤的法布里-珀罗微流腔传感器的制备方法，将超连续谱光源(1)、光纤环形器(2)、双孔微结构光纤法布里-珀罗微流腔传感探头(3)、光谱分析仪(4)依次串联，并将微流泵(5)和废液池(6)通过开孔石英毛细管(7)和双孔微结构光纤(8)尾端与传感器相连。A preparation method of a Fabry-Perot microfluidic cavity sensor based on a double-hole microstructure optical fiber, comprising a supercontinuum light source (1), an optical fiber circulator (2), and a double-hole microstructure optical fiber Fabry-Perot The microfluidic cavity sensing probe (3) and the spectrum analyzer (4) are connected in series in sequence, and the microfluidic pump (5) and the waste liquid pool (6) are passed through the perforated quartz capillary (7) and the double-hole microstructure optical fiber (8). ) is connected to the sensor.
本发明相比现有技术具有以下优点：Compared with the prior art, the present invention has the following advantages:
本发明采用法布里-珀罗结构作为传感探头，拥有较高的灵敏度，同时创新性的使用开孔石英毛细管与双孔微结构光纤相结合作为液体流通通道和检测微腔，实现了光纤内部微流检测，抗干扰性强、结构新颖、制作简单，在疾病检测、药品开发、环境监测、食品安全等诸多领域有着广泛的应用前景。The invention adopts the Fabry-Perot structure as the sensing probe, which has high sensitivity, and at the same time innovatively uses the open-hole quartz capillary combined with the double-hole microstructure optical fiber as the liquid flow channel and the detection microcavity, and realizes the optical fiber. Internal microfluidic detection, with strong anti-interference, novel structure and simple production, has broad application prospects in many fields such as disease detection, drug development, environmental monitoring, and food safety.
附图说明Description of drawings
图1为本发明提供的基于双孔微结构光纤的法布里-珀罗微流腔传感器装置图。FIG. 1 is a diagram of a Fabry-Perot microfluidic cavity sensor device based on a double-hole microstructure optical fiber provided by the present invention.
图2为本发明提供的基于双孔微结构光纤的法布里-珀罗微流腔传感器的双孔微结构光纤法布里-珀罗微流腔传感探头示意图。FIG. 2 is a schematic diagram of a dual-hole microstructure optical fiber Fabry-Perot microfluidic cavity sensing probe based on a double-hole microstructure optical fiber-based Fabry-Perot microfluidic cavity sensor provided by the present invention.
图3为本发明提供的基于双孔微结构光纤的法布里-珀罗微流腔传感器的双孔微结构光纤法布里-珀罗微流腔传感探头制作流程图。FIG. 3 is a flow chart of the fabrication of the double-hole microstructure optical fiber Fabry-Perot microfluidic cavity sensor probe based on the double-hole microstructure fiber-based Fabry-Perot microfluidic cavity sensor provided by the present invention.
具体实施方式Detailed ways
下面结合附图及具体实施方式对本发明进行进一步的说明。The present invention will be further described below with reference to the accompanying drawings and specific embodiments.
实施例1Example 1
本实例是利用一种基于双孔微结构光纤的法布里-珀罗微流腔传感器进行液体折射率的测量。当输入光由光源发出，通过光纤环形器输入端进入到由开孔石英毛细管构成的传感器微流腔内后，一部分输入光将会从微流腔的一个端面反射，另一部分光继续传播，随后从微腔的第二个端面反射回来，两束光将耦合回光纤环形器输出端纤芯中并发生干涉。当微流腔中被测物理量发生改变的时候，两束光的相位差也随之变化，从而导致干涉谱发生漂移。因此，通过观察干涉谱波峰/波谷的波长变化即可实现对微流腔内折射率的检测。This example uses a Fabry-Perot microfluidic cavity sensor based on a double-hole microstructured fiber to measure the refractive index of liquids. When the input light is emitted by the light source and enters the sensor microfluidic cavity formed by the perforated quartz capillary through the input end of the optical fiber circulator, a part of the input light will be reflected from one end face of the microfluidic cavity, and the other part of the light will continue to propagate, and then Reflected from the second end face of the microcavity, the two beams are coupled back into the core at the output end of the fiber circulator and interfere. When the measured physical quantity in the microfluidic cavity changes, the phase difference of the two beams of light also changes, which leads to the drift of the interference spectrum. Therefore, the detection of the refractive index in the microfluidic cavity can be realized by observing the wavelength change of the peak/trough of the interference spectrum.
本发明的工作原理是：从超连续谱光源中发出的光通过光纤环形器输入端传输进入到传感器微流腔内后，一束光将从由开孔石英毛细管构成的微流腔的第一个端面反射回来，另一束光到达微腔的第二个端面后也随之反射回来。两束相干光耦合回光纤环形器输出端，并在纤芯中产生干涉。当传感器微流腔中待测样品折射率发生改变时，会引起两束相干光的相位差发生改变，传感器的干涉谱也随之发生漂移。传感器的反射光输出光强I可以表示为：The working principle of the invention is as follows: after the light emitted from the supercontinuum light source is transmitted into the sensor microfluidic cavity through the input end of the optical fiber circulator, a beam of light will be transmitted from the first part of the microfluidic cavity formed by the perforated quartz capillary tube. One end face is reflected back, and another beam of light is reflected back after reaching the second end face of the microcavity. The two coherent beams are coupled back to the output of the fiber circulator and interfere in the fiber core. When the refractive index of the sample to be measured in the sensor microfluidic cavity changes, the phase difference of the two coherent beams will change, and the interference spectrum of the sensor will also drift. The reflected light output intensity I of the sensor can be expressed as:
其中，
其中L为传感器微流腔腔长，n为传感器微流腔中填充液体的折射率，λ为入射光波长。从上式中可以看出，当传感器微流腔腔长固定时，微流腔内液体折射率的改变会引起输出光信号产生变化。Where L is the cavity length of the sensor microfluidic cavity, n is the refractive index of the liquid filled in the sensor microfluidic cavity, and λ is the wavelength of the incident light. It can be seen from the above formula that when the cavity length of the sensor microfluidic cavity is fixed, the change of the refractive index of the liquid in the microfluidic cavity will cause the output optical signal to change.
结合附图1，一种基于双孔微结构光纤的法布里-珀罗微流腔传感器包括超连续谱光源(1)、光纤环形器(2)、双孔微结构光纤法布里-珀罗微流腔传感探头(3)、光谱分析仪(4)、微流泵(5)、废液池(6)，所述双孔微结构光纤法布里-珀罗微流腔传感探头(3)由开孔石英毛细管(7)形成待测样品的进液口，双孔微结构光纤(8)尾端形成待测样品的出液口，进液口和出液口分别与微流泵(5)以及废液池(6)相连接。With reference to FIG. 1, a Fabry-Perot microfluidic cavity sensor based on a double-hole microstructure optical fiber includes a supercontinuum light source (1), an optical fiber circulator (2), a double-hole microstructure fiber Fabry-Perot Luo microfluidic cavity sensing probe (3), spectrum analyzer (4), microfluidic pump (5), waste liquid pool (6), the double-hole microstructure optical fiber Fabry-Perot microfluidic cavity sensing The probe (3) is formed by the perforated quartz capillary (7) to form the liquid inlet of the sample to be tested, and the tail end of the double-hole microstructure optical fiber (8) forms the liquid outlet of the sample to be tested. The flow pump (5) and the waste liquid pool (6) are connected.
结合附图2，一种基于双孔微结构光纤的法布里-珀罗微流腔传感器的双孔微结构光纤法布里-珀罗微流腔传感探头(3)由开孔石英毛细管(7)、双孔微结构光纤(8)组成。With reference to FIG. 2, a dual-hole microstructure optical fiber Fabry-Perot microfluidic cavity sensor based on a double-hole microstructure optical fiber Fabry-Perot microfluidic cavity sensor probe (3) consists of an open-hole quartz capillary tube. (7), consisting of a double-hole microstructure optical fiber (8).
结合附图3，一种基于双孔微结构光纤的法布里-珀罗微流腔传感器的双孔微结构光纤法布里-珀罗微流腔传感探头(3)制备方法包括以下步骤：With reference to FIG. 3 , a method for preparing a double-hole microstructure optical fiber Fabry-Perot microfluidic cavity sensor probe (3) based on a double-hole microstructure optical fiber Fabry-Perot microfluidic cavity sensor includes the following steps :
步骤一：将一段石英毛细管(7)去除涂覆层，用酒精擦拭后将端面切平，使用飞秒激光器在距离端面50微米处对石英毛细管壁进行打孔，孔径控制在20微米；Step 1: Remove the coating layer from a section of the quartz capillary (7), wipe the end face with alcohol, and cut the end face flat, and use a femtosecond laser to perforate the wall of the quartz capillary tube at a distance of 50 microns from the end face, and the aperture is controlled at 20 microns;
步骤二：将一段单模光纤(9)去除涂覆层，用酒精擦拭干净后将端面切平整，然后利用光纤在线微加工平台将该单模光纤与步骤一处理后的开孔石英毛细管(7)进行熔接，熔接完成后利用光纤在线微加工平台对距离熔接点100微米处的石英毛细管(7)进行截断处理；Step 2: Remove the coating layer of a section of single-mode optical fiber (9), wipe the end face with alcohol and cut it flat, and then use the optical fiber online micromachining platform to connect the single-mode optical fiber with the perforated quartz capillary (7) processed in step 1. ) carry out fusion splicing, utilize optical fiber online micromachining platform after fusion splicing to carry out truncation processing to the quartz capillary (7) at 100 microns from the fusion point;
步骤三：将一段双孔微结构光纤(8)去除涂覆层，用酒精擦拭干净后将端面切平整，然后利用光纤在线微加工平台把该双孔微结构光纤(8)与步骤二所得单模(9)-开孔石英毛细管(7)对齐熔接，熔接处理完成后，利用光纤在线微加工平台在距离熔接点1厘米处的双孔微结构光纤(8)进行截断处理，得到双孔微结构光纤法布里-珀罗微流腔传感探头(3)。Step 3: Remove the coating layer of a section of the double-hole microstructure optical fiber (8), wipe it with alcohol, and then cut the end face to be flat, and then use the optical fiber online micromachining platform to make the double-hole microstructure fiber (8) and the single obtained in
对一种基于双孔微结构光纤的法布里-珀罗微流腔传感器的折射率分辨性能进行测试。将双孔微结构光纤法布里-珀罗微流腔传感探头(3)通过光纤环形器(2)分别与超连续谱光源(1)和光谱分析仪(4)相连。使用不同浓度的甘油配置折射率分别为1.333、1.334、1.335、1.336、1.337、1.338、1.339、1.340的折射率匹配液。将微流泵(5)与双孔微结构光纤法布里-珀罗微流腔传感探头(3)连接在一起，通过开孔石英毛细管(7)和双孔微结构光纤(8)形成的进出液口向传感器内部匀速注入液体。每次更换不同的折射率匹配液前使用酒精清洗传感器，直到传感器干涉谱恢复至初始光谱再开始下一次测量。实验全程位于室温下进行。The refractive index resolution performance of a Fabry-Perot microfluidic cavity sensor based on a double-hole microstructured fiber was tested. The double-hole microstructure optical fiber Fabry-Perot microfluidic cavity sensing probe (3) is respectively connected to the supercontinuum light source (1) and the spectrum analyzer (4) through an optical fiber circulator (2). Different concentrations of glycerol were used to prepare refractive index matching liquids with refractive indices of 1.333, 1.334, 1.335, 1.336, 1.337, 1.338, 1.339 and 1.340, respectively. The microfluidic pump (5) is connected with the double-hole microstructure optical fiber Fabry-Perot microfluidic cavity sensing probe (3), and is formed by the open-hole silica capillary (7) and the double-hole microstructure fiber (8) The liquid inlet and outlet of the sensor inject liquid into the sensor at a constant speed. Use alcohol to clean the sensor each time before changing to a different refractive index matching solution, until the sensor interference spectrum returns to the original spectrum before starting the next measurement. The whole experiment was carried out at room temperature.
综上，本发明的光纤折射率传感器结构新颖，制作简单，抗干扰性强，对折射率灵敏度高，在诸多领域有着广阔的应用前景。In conclusion, the optical fiber refractive index sensor of the present invention has novel structure, simple fabrication, strong anti-interference, high sensitivity to refractive index, and has broad application prospects in many fields.
Claims (5)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110770906.1A CN113607689B (en) | 2021-07-08 | 2021-07-08 | Fabry-Perot micro-fluidic cavity sensor based on double-hole microstructure optical fiber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110770906.1A CN113607689B (en) | 2021-07-08 | 2021-07-08 | Fabry-Perot micro-fluidic cavity sensor based on double-hole microstructure optical fiber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113607689A true CN113607689A (en) | 2021-11-05 |
| CN113607689B CN113607689B (en) | 2024-04-09 |
Family
ID=78304151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110770906.1A Active CN113607689B (en) | 2021-07-08 | 2021-07-08 | Fabry-Perot micro-fluidic cavity sensor based on double-hole microstructure optical fiber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113607689B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115452019A (en) * | 2022-08-31 | 2022-12-09 | 东北电力大学 | Note-shaped optical fiber voltage sensor based on Fabry-Perot interference principle and manufacturing method thereof |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1653216A2 (en) * | 2004-10-26 | 2006-05-03 | Acreo AB | Microfluidic device |
| CN102519499A (en) * | 2011-12-14 | 2012-06-27 | 华中科技大学 | Micro-structure fiber optic Fabry-Perot cavity quasi based quasi-distributed sensor |
| CN104482959A (en) * | 2014-11-18 | 2015-04-01 | 华中科技大学 | Optic fiber strain-stress simultaneous measurement device |
| US9677949B1 (en) * | 2013-10-29 | 2017-06-13 | Nutech Ventures | Fiber-optic sensor for strain-insensitive temperature measurements |
| CN108970652A (en) * | 2018-05-24 | 2018-12-11 | 华中科技大学 | A kind of optical fibre embedded micro flow chip and detection device based on SERS detection |
| CN109211839A (en) * | 2018-09-01 | 2019-01-15 | 哈尔滨工程大学 | A kind of binary channels side-hole fiber grating sensing device |
| CN109406408A (en) * | 2018-11-29 | 2019-03-01 | 哈尔滨工程大学 | A kind of fiber liquid analytical equipment |
| CN211043133U (en) * | 2019-05-28 | 2020-07-17 | 天津工业大学 | Seawater salinity measuring device based on multi-section conical quartz fiber mode interference structure |
| CN112629744A (en) * | 2020-12-03 | 2021-04-09 | 国网黑龙江省电力有限公司电力科学研究院 | Atmospheric pressure sensor based on cascade fiber Fabry-Perot interferometer |
-
2021
- 2021-07-08 CN CN202110770906.1A patent/CN113607689B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1653216A2 (en) * | 2004-10-26 | 2006-05-03 | Acreo AB | Microfluidic device |
| CN102519499A (en) * | 2011-12-14 | 2012-06-27 | 华中科技大学 | Micro-structure fiber optic Fabry-Perot cavity quasi based quasi-distributed sensor |
| US9677949B1 (en) * | 2013-10-29 | 2017-06-13 | Nutech Ventures | Fiber-optic sensor for strain-insensitive temperature measurements |
| CN104482959A (en) * | 2014-11-18 | 2015-04-01 | 华中科技大学 | Optic fiber strain-stress simultaneous measurement device |
| CN108970652A (en) * | 2018-05-24 | 2018-12-11 | 华中科技大学 | A kind of optical fibre embedded micro flow chip and detection device based on SERS detection |
| CN109211839A (en) * | 2018-09-01 | 2019-01-15 | 哈尔滨工程大学 | A kind of binary channels side-hole fiber grating sensing device |
| CN109406408A (en) * | 2018-11-29 | 2019-03-01 | 哈尔滨工程大学 | A kind of fiber liquid analytical equipment |
| CN211043133U (en) * | 2019-05-28 | 2020-07-17 | 天津工业大学 | Seawater salinity measuring device based on multi-section conical quartz fiber mode interference structure |
| CN112629744A (en) * | 2020-12-03 | 2021-04-09 | 国网黑龙江省电力有限公司电力科学研究院 | Atmospheric pressure sensor based on cascade fiber Fabry-Perot interferometer |
Non-Patent Citations (4)
| Title |
|---|
| O FRAZAO˜: "A hybrid Fabry–Perot /Michelson interferometer sensor using a dual asymmetric core microstructured fiber", 《MEAS. SCI. TECHNOL》 * |
| 李恩邦: "基于空心光纤多模干涉的折射率传感器研究", 《光电子.激光》, no. 10 * |
| 杨丹: "微结构光纤法珀干涉仪折射率测量方法研究", 《万方学位论文》 * |
| 王丽清: "基于微结构法布里-珀罗干涉仪的光纤光栅脉搏波解调方法", 《中国激光》, no. 10 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115452019A (en) * | 2022-08-31 | 2022-12-09 | 东北电力大学 | Note-shaped optical fiber voltage sensor based on Fabry-Perot interference principle and manufacturing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113607689B (en) | 2024-04-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108225657B (en) | Optical fiber FP air pressure sensor with optical vernier effect and preparation method thereof | |
| CN205691170U (en) | A kind of air pressure and the Fibre Optical Sensor of temperature simultaneously measuring | |
| CN104374440B (en) | A kind of micro liquid flowmeter and its making application method based on Whispering-gallery-mode | |
| CN110274884A (en) | Bimolecular sensors based on photo-thermal micro-fluidic in microstructured optical fibers | |
| CN101979963A (en) | Integral optical fiber microsensor and manufacturing method thereof | |
| CN109406408B (en) | An optical fiber liquid analysis device | |
| CN103900992B (en) | Interior outstanding core fibre grating temperature auto-compensation microfluidic sensor and interior outstanding core fibre | |
| Bing et al. | A surface-plasmon-resonance sensor based on photonic-crystal-fiber with large size microfluidic channels | |
| CN109752793A (en) | Hybrid integrated Michelson formula optical fiber micro flow chip | |
| CN103398974A (en) | Optical-fiber sensor, preparation method and measuring system | |
| CN102967388A (en) | Intrinsic F-P microcavity high-sensitivity temperature sensor based on micro-sized conical fiber probe and manufacture method thereof | |
| CN109752788A (en) | Hybrid integrated Mach-Zehnder interferometric fiber microfluidic chip | |
| CN112326060A (en) | A highly sensitive parallel dual F-P cavity optical fiber temperature sensing device | |
| CN116559117A (en) | Probe type optical fiber seawater salinity sensor based on FP interference and manufacturing method thereof | |
| CN113607689A (en) | Fabry-Perot micro-flow cavity sensor based on double-hole microstructure optical fiber | |
| CN207992054U (en) | A kind of combination microstructured optical fibers and micro-fluidic acidometer | |
| CN101520341B (en) | Microprobe refractometer based on Fabry-Rerot interferometer and manufacturing method thereof | |
| CN207263633U (en) | A kind of fibre optic interferometer gas sensor based on free-air chamber | |
| CN114111857A (en) | Vernier effect based optical fiber FPI cascaded MI sensing device | |
| CN118225734A (en) | A refractive index sensor for microflow inside optical fiber based on vernier effect | |
| CN108828263A (en) | A kind of fibre optical sensor measuring micro-fluidic speed and direction based on TFBG | |
| CN108872110A (en) | A kind of high refractive index sensitivity optical fiber microfluidic sensor and preparation method thereof | |
| CN108181271A (en) | For fibre-optical microstructure sensor of temperature and liquid refractivity sensing measurement and preparation method thereof | |
| CN111928880A (en) | Mach-Zehnder interference optical fiber based on surface plasma effect and sensor thereof | |
| CN103398982A (en) | Method and sensor for testing surface plasmon resonance of pohotonic crystal fibers |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |