CN113601430A - Bearing platform and bearing device - Google Patents

Abstract

Bearing platform and load-bearing device, wherein, bearing platform includes: the adsorption device comprises a platform body and a plurality of adsorption parts penetrating through the platform body; the adsorption parts are not communicated with each other, and at least one adsorption part is suitable for receiving materials. By adopting the scheme, materials with different sizes can be matched, so that the flexibility and universality of the bearing platform are improved.

Description

Bearing platform and bearing device

Technical Field

The embodiment of the specification relates to the technical field of mechanical manufacturing, in particular to a bearing platform and a bearing device.

Background

In the machine manufacturing process, the material needs to be fixed on a bearing platform matched with the size of the material so as to implement corresponding procedures (such as processing, detection and the like). However, in consideration of accurate fixation, the existing bearing platform is designed for one material size, so that structural limitations of the existing bearing platform are caused, the existing bearing platform cannot adapt to other material sizes, and only a new bearing platform can be designed.

With the development of mechanical manufacturing technology, the size of materials is also rapidly updated, and the solution of matching new material sizes by designing a new bearing platform obviously cannot meet diversified size requirements.

From the above, the problem of how to match the carrying platform with materials of different sizes is to be solved by the skilled person.

Disclosure of Invention

In view of this, embodiments of the present disclosure provide a bearing platform, a bearing device, and a material fixing method, which can match materials with different sizes.

An embodiment of the present specification provides a bearing platform, where the bearing platform includes: the adsorption device comprises a platform body and a plurality of adsorption parts penetrating through the platform body; wherein, a plurality of each other not communicate between the adsorption parts, and at least one adsorption part is suitable for receiving the material.

Optionally, the adsorption part includes: an adsorption region on the surface of the platform body and a channel inside the platform body; the adsorption area is communicated with the channel and is suitable for being covered by materials; the channel is provided with an opening on the surface of the platform body.

Alternatively, the plurality of adsorption regions may have the same center in a shape formed on the surface of the stage body.

Optionally, the adsorption region comprises at least one groove, and at least one of the grooves communicates with a respective channel.

Optionally, the adsorption region includes a plurality of grooves, and the grooves are communicated with each other through a groove.

Optionally, the groove radial axis of at least one of the adsorption regions intersects with the groove radial axes of the other adsorption regions.

Optionally, the radial axis of the groove of the adsorption area positioned in the middle of the surface of the platform body is parallel to the radial axis of the channel communicated with the adsorption area; and the radial axis of the groove of the adsorption area is intersected with the radial axis of the channel communicated with the adsorption area.

Optionally, the grooves of each adsorption region are symmetrically distributed.

Optionally, the grooves of the plurality of adsorption regions may have the same center in the shape formed on the surface of the stage body.

Optionally, a plurality of said channels are symmetrically distributed in said platform body.

An embodiment of the present specification further provides a bearing device, including: the load-bearing platform and gas circuit control unit of any preceding embodiment, wherein:

the bearing platform is suitable for bearing materials with different sizes;

the air path control component is suitable for extracting air of the adsorption part corresponding to the material in the bearing platform.

By adopting the bearing platform provided by the embodiment of the specification, as the plurality of adsorption parts penetrating through the platform body are not communicated with each other, the plurality of adsorption parts have better independence, and the adsorption parts are selected to be used according to the size of the material to be placed, so that the materials with different sizes can be matched, the bearing platform does not need to be replaced, the flexibility and universality of the bearing platform are improved, the design cost and the manufacturing cost of the bearing platform are saved, and the structural complexity and the maintenance difficulty of the bearing platform are reduced; in addition, the frequency of replacing the bearing platform in the mechanical manufacturing process is reduced, so that the use efficiency of the bearing platform is improved, random errors caused by frequent replacement of the bearing platform can be avoided, corresponding procedures can be performed more conveniently, and the production efficiency is improved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present specification, the drawings needed to be used in the embodiments of the present specification or in the description of the prior art will be briefly described below, it is obvious that the drawings described below are only some embodiments of the present specification, and it is also possible for a person skilled in the art to obtain other drawings based on these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a load-bearing platform according to an embodiment of the present disclosure.

Fig. 2 is a schematic structural diagram of another load-bearing platform provided in the embodiment of the present disclosure.

FIG. 3a is a schematic view of a suction area of a suction portion of the loading platform shown in FIG. 2.

Fig. 3b is a perspective cross-sectional view of the corresponding channel of the suction zone shown in fig. 3 a.

Fig. 3c is a cross-sectional view corresponding to the perspective cross-sectional view shown in fig. 3 b.

FIG. 4a is a schematic view of a suction area of another suction portion of the loading platform shown in FIG. 2.

Fig. 4b is a perspective cross-sectional view of the corresponding channel of the suction zone shown in fig. 4 a.

Fig. 5a is a schematic view of a suction area of another suction portion of the loading platform shown in fig. 2.

Fig. 5b is a perspective cross-sectional view of the corresponding channel of the suction zone shown in fig. 5 a.

Fig. 6 is a schematic structural diagram of another loading platform provided in the embodiments of the present disclosure.

Fig. 7 is a perspective view of the load-bearing platform shown in fig. 6.

Fig. 8 is a schematic structural diagram of a carrying device according to an embodiment of the present disclosure.

Fig. 9 is a state diagram of a process of using the carrying device shown in fig. 8.

Fig. 10 is a state diagram of another process for using the carrying device shown in fig. 8.

Fig. 11 is a state diagram of another process for using the carrying device shown in fig. 8.

Detailed Description

As can be seen from the background, solutions that match new material sizes by designing new load-bearing platforms have been unable to meet the diverse size requirements.

In order to solve the above problem, the present specification provides a load-bearing platform, including: the platform body and wear to locate a plurality of absorption portions of platform body. Wherein, a plurality of each other not communicate between the adsorption parts, and at least one adsorption part is suitable for receiving the material.

Because wear to locate each other not communicate between a plurality of adsorption parts of platform body, consequently, a plurality of adsorption parts have better independence, can select the adsorption part to use according to the size of the material that will place. For example, for a smaller-sized material, the material may be associated with one adsorption portion; for the material with larger size, different parts of the material can correspond to different adsorption parts, so that the adsorption parts can jointly bear the material.

It should be noted that the adjectives "smaller", "larger", and the like in the present specification are only used for describing a comparative relationship of relative sizes, and the adjectives do not limit the sizes of the material, the adsorption part, and the stage body.

Therefore, the bearing platform provided by the specification can be matched with materials of different sizes through a plurality of independent adsorption parts without replacement, so that the flexibility and universality of the bearing platform are improved, the design cost and the manufacturing cost of the bearing platform are saved, and the structural complexity and the maintenance difficulty of the bearing platform are reduced.

In addition, by adopting the bearing platform in the embodiment of the specification, the frequency of replacing the bearing platform in the mechanical manufacturing process can be reduced, so that the use efficiency of the bearing platform is improved, random errors caused by frequent replacement of the bearing platform can be avoided, corresponding procedures can be performed more conveniently, and the production efficiency is improved.

In specific implementation, the bearing platform provided in the embodiments of the present disclosure may be widely applied to various machine manufacturing scenarios, for example, a semiconductor-related machine manufacturing scenario, an insulator-related machine manufacturing scenario, a conductor-related machine manufacturing scenario, and the like. Accordingly, the carrier platform provided in the embodiments of the present disclosure can receive materials of various materials, for example, various semiconductor materials (such as bare chips, wafers, etc.), various insulator materials (such as glass, rubber, etc.), various conductor materials (such as steel materials, iron materials, etc.), etc. The specification does not specifically limit the specific application scenario and material type of the load-bearing platform.

To make the conception, implementation and advantages of the present invention more obvious and understandable to those skilled in the art, the following description will explain the technical solution in detail by taking semiconductor related mechanical manufacturing as an example, and combining the drawings and the detailed description. However, it is understood that the load-bearing platform provided herein can be applied to other types of machinery manufacturing depending on the specific application scenario, as would be apparent to one of ordinary skill in the art.

Referring to fig. 1, a structural schematic diagram of a load-bearing platform provided in an embodiment of the present disclosure is shown. In the embodiment of the present specification, as shown in fig. 1, the load-bearing platform 10 may include: the platform comprises a platform body 11, and an adsorption part 12 and an adsorption part 13 which are arranged on the platform body 11 in a penetrating way. Wherein, each of the adsorption parts 12 and 13 is not communicated with each other, and at least one of the adsorption parts 12 and 13 is suitable for receiving materials.

Specifically, the adsorption part 12 may include: an adsorption region 121 on the surface of the stage body 11 and a passage 122 inside the stage body 11. The adsorption area 121 is communicated with the through hole 122, and the adsorption area 121 can be covered by materials; the passage 122 is provided with an opening 122a on the surface of the platform body 11.

Similarly, the adsorption part 13 may include: an adsorption region 131 on the surface of the stage body 11 and a passage 132 inside the stage body 11. The adsorption area 131 is communicated with the through hole 132, and the adsorption area 131 can be covered by materials; the channel 132 is provided with an opening 132a on the surface of the platform body 11.

In practical application, the material can be placed on the surface of the platform body with the adsorption area, and the corresponding adsorption part is started according to the contact condition of the material and the adsorption area. Referring to fig. 1, if only the adsorption area 121 is covered with the material, air in the adsorption area 121 and the passage 122 may be drawn through the opening 122a to provide an adsorption force to the material. If only the adsorption region 131 is covered with the material, air in the adsorption region 131 and the channel 132 may be drawn through the opening 132a to provide an adsorption force to the material. If both the adsorption area 121 and the adsorption area 131 are covered with the material, air of at least one set of the adsorption area 121 and the passage 122, and the adsorption area 131 and the passage 132 may be drawn through at least one of the openings 122a and 132a, thereby providing an adsorption force to the material.

It is understood that the shapes of the adsorption regions 121 and 131 formed on the surface of the stage body 11 are circular rings in this example, but this example is only illustrative. In practical application, the shape of the adsorption region formed on the surface of the platform body may be determined according to specific application scenarios and requirements, for example, the adsorption region may be in a regular shape such as a circular ring, a circular shape, a square shape, or the like, or the adsorption region may be in an irregular shape.

It is also understood that, in the present example, the circular rings formed on the surface of the platform body 11 by the adsorption regions 121 and 131 have the same center, that is, the adsorption regions 121 and 131 form concentric circular rings on the surface of the platform body 11. However, this example is only a schematic illustration, and in practical applications, the position relationship of the shapes formed on the surface of the platform body by the plurality of adsorption regions is determined according to specific application scenarios and requirements. For example, the shapes of the plurality of adsorption regions formed on the surface of the platform body may have the same center or different centers, which is not particularly limited in this specification.

In a specific implementation, the adsorption region may include at least one groove, and at least one of the grooves communicates with a corresponding channel. Further, when the suction area includes a plurality of grooves, the grooves may communicate with each other in order to simplify the structure of each suction portion and facilitate the subsequent suction operation.

The communication mode between the grooves and the corresponding channels in the same adsorption area can be set according to specific application scenes and requirements, so that each groove can be directly communicated with the channel or indirectly connected with the channel. And when a plurality of grooves exist in the same adsorption area, the communication mode among the grooves can be set according to specific application scenes and requirements. The present specification does not specifically limit the communication manner between the grooves and the channels, or the communication manner between a plurality of grooves in the same adsorption region.

For example, the grooves and the corresponding passages in the same adsorption region communicate through the through-holes.

For another example, the depth of at least a part of the grooves in the same adsorption region is not less than the distance from the top end of the channel to the surface of the loading platform, so that the at least a part of the grooves can be directly communicated with the corresponding channel, and if other grooves exist, the other grooves can be indirectly communicated with the corresponding channel due to the communication between the grooves.

For example, when the same adsorption region includes a plurality of grooves, the grooves may be communicated with each other by at least one of communication methods such as grooves and overlapping groove regions.

In specific implementation, according to specific application scenarios and requirements, the grooves of the plurality of adsorption regions may have the same center or different centers in the shape formed on the surface of the platform body. This specification does not specifically limit this.

In specific implementation, the positional relationship of the grooves of the plurality of adsorption regions may be set according to specific application scenarios and requirements. For example, the channel diameter axis of at least one adsorption region may intersect the channel diameter axis of other said adsorption regions. For another example, grooves having radial axes parallel to each other are present in the plurality of adsorption regions.

In specific implementation, in order to make the adsorption parts provide uniform adsorption force to the materials, the adsorption parts can adopt a symmetrical structure. For example, the pattern formed on the platform body by the adsorption area is a symmetrical pattern; for another example, the grooves of each adsorption region are symmetrically distributed; also for example, a plurality of channels are symmetrically distributed in the platform body.

In specific implementation, the position relationship between the grooves of each adsorption region and the channels communicated with the grooves can be set according to specific application scenes and requirements. For example, the radial axis of the grooves of the adsorption region may intersect the radial axis of the channels with which they communicate; for another example, the radial axis of the grooves of the adsorption region may be parallel to the radial axis of the channels through which they communicate. This specification does not specifically limit this.

In a specific implementation, in order to effectively reduce the number of channels, for an adsorption region located in the middle of the surface of the platform body, the radial axis of a groove of the adsorption region may be parallel to the radial axis of a channel communicated with the adsorption region; for adsorption regions located outside the surface of the platen body, the radial axis of the grooves may intersect the radial axis of the channels with which they communicate. Thus, for the adsorption region in which the radial axis of the groove is parallel to the radial axis of the channel communicating therewith, the number of the channels communicating therewith can be reduced to one.

It is to be understood that the terms "middle portion", "outer portion", and the like, which are used in this specification, are only used to describe the relative positional relationship between the plurality of adsorption regions, and do not limit the position of the adsorption region on the platform body.

In order to facilitate understanding and implementation for a person skilled in the art, the bearing platform with the groove is schematically illustrated by the attached drawings.

For example, with continued reference to FIG. 1, the suction area 121 includes an annular recess 121-1, and the annular recess 121-1 communicates with the channel 122 through a through hole 121-a. Similarly, in the adsorption region 131, the circular groove 131-1 communicates with the channel 132 through a through hole 131-a.

For another example, as shown in fig. 2, the carrying platform 20 may include: a platform body 21, and a plurality of suction portions (i.e., suction portions 22, 23, and 24 in fig. 2) provided through the platform body 21. Wherein, each other is not communicated between a plurality of absorption portions 22-24, and at least one absorption portion in a plurality of absorption portions 22-24 is suitable for receiving the material.

The plurality of adsorption sections 22 to 24 may include: the suction areas 221, 231 and 241 on the surface of the platform body 21 can be specifically shown in fig. 3a, 4a and 5 a. The suction region 221 of the suction unit 22 and the suction region 231 of the suction unit 23 are formed in circular ring shapes having different sizes on the surface of the stage body 21, and the suction region 241 of the suction unit 24 is formed in a circular ring shape on the surface of the stage body 21. In addition, referring to fig. 2, 3a, 4a and 5a in combination, the plurality of adsorption regions 221 to 241 have the same center in the shape formed on the surface of the stage body 21.

The plurality of adsorption sections 22 to 24 may further include: passages 222-242 in the platform body 21. For ease of understanding and description, the loading platform 20 is cut along the channel 222 of the suction portion 22, the channel 232 of the suction portion 23 and the channel 242 of the suction portion 24, respectively, to obtain the perspective cross-sectional views shown in fig. 3b, 4b and 5 b. Referring to FIGS. 2, 3b, 4b and 5b, the channels 222-242 each have an opening 222-a, an opening 232-a and an opening 242-a on the surface of the platform body 21.

Referring to fig. 2, 3a to 5b in combination, for the adsorption part 22, the adsorption region 221 thereof may include a plurality of grooves 221-1 to 221-4. The plurality of grooves 221-1 to 221-4 are communicated with each other by symmetrically distributed grooves 221-A to 221-D. Wherein the radial axis of the groove 221-A is parallel to the radial axis of the groove 221-C; the radial axis of the groove 221-B is parallel to the radial axis of the groove 221-D; the radial axes of the grooves 221-a to 221-D intersect the radial axis of the channel 232.

The depth of the grooves 221-1 to 221-4 is smaller than the distance from the top of the channel 222 to the surface of the loading platform 21, the grooves 221-2 communicate with the channel 222 through the through holes 221-a and 221-b, and the remaining grooves 221-1, 221-3 and 221-4 communicate with the channel 222 indirectly through the grooves 221-A to 221-D.

In order to further understand the technical solution of the present example, the perspective cross-sectional view of fig. 3b is simplified, as shown in fig. 3c, only the cross-section of the component related to the absorption portion 22 in the carrying platform 20 is shown simply, and the cross-section of other components in the carrying platform 20 (such as the cross-section of the component related to the absorption portion 23, the cross-section of the component related to the absorption portion 24, etc.) is not shown. It is apparent that the bottom of the grooves 221-1 to 221-4 is spaced apart from the top of the channel 222, and the groove 221-2 communicates with the channel 222 through the through-holes 221-a and 221-b.

As for adsorption part 23, adsorption region 231 thereof includes the same or similar components as those of adsorption region 221. For example, a plurality of recesses 231-1 to 231-4, a plurality of trenches 231-A to 231-D, a plurality of vias 231-a to 231-b, etc. The structural relationship of the adsorption region 231 can refer to the description of the adsorption region 221, and is not described herein again.

As shown in fig. 5a, for the adsorption part 24, the adsorption region 241 thereof may include a plurality of grooves 241-1 to 241-8. The plurality of grooves 241-1 to 241-4 are communicated with each other through the grooves 241-A and 241-B. Wherein, the grooves 241-A to 241-B are crossed and symmetrically distributed; the radial axis of the groove 241-a is parallel to the radial axis of the channel 242.

The depth from the groove 241-1 to the groove 241-8 is smaller than the distance from the top end of the channel 242 to the surface of the bearing platform 21, and the groove 241-3 is communicated with the channel 242 through a through hole 241-a and a through hole 241-c; a through hole 241-B is formed at the intersection point between the groove 241-A and the groove 241-B, so that the groove 241-A and the groove 241-B are both communicated with the channel 242; the remaining grooves 231-1, 231-2, 231-4 through 221-8 are in indirect communication with the channel 242 via groove 241-A and groove 241-B.

The grooves 221-1 to 221-4 of the adsorption region 221, the grooves 231-1 to 231-4 of the adsorption region 231, and the grooves 241-1 to 241-8 of the adsorption region 241 have the same center in the shape formed on the surface of the stage body 21.

Also for example, as shown in fig. 6 and 7, the load-bearing platform 30 may include: a platform body 31 and a plurality of suction portions (not shown in fig. 6 and 7) penetrating the platform body 31. Wherein, each other is not communicated between a plurality of absorption portions, and at least one absorption portion in a plurality of absorption portions is suitable for accepting the material.

The plurality of adsorption portions may include: the specific implementation of the absorption regions 321, 331 and 341 on the surface of the platform body 31 can be described with reference to fig. 2 to 5b and related embodiments, which are not repeated herein.

The plurality of adsorption portions may further include: a channel 322-1, a channel 322-2, a channel 332-1, a channel 332-2, and a channel 342 inside the platform body 31. Wherein, the channel 322-1 and the channel 322-2 are respectively communicated with the adsorption area 321, and the channel 322-1 and the channel 322-2 are respectively provided with an opening 322-a and an opening 322-b on the surface of the platform body 31; the channel 332-1 and the channel 332-2 are respectively communicated with the adsorption area 331, and the channel 332-1 and the channel 332-2 are respectively provided with an opening 332-a and an opening 332-b on the surface of the platform body 31; the channel 342 communicates with the adsorption region 341, and the channel 342 has an opening 342-a on the surface of the platen body 31. Specifically, refer to fig. 2 to fig. 5b and the related description, which are not repeated herein.

In specific implementation, in order to facilitate installation and fixation of the bearing platform, the bearing platform may further include a joining portion, and specific components of the joining portion may be set according to specific application scenarios and requirements, for example, the joining portion may be a through hole (as shown in fig. 6 and 7, 4 through holes are respectively formed in four corners of the platform body 31), a nut, a screw, a clamp, and the like, and the specific components of the joining portion are not limited in this specification.

It should be understood that the above examples are only schematic illustrations, and in practical applications, those skilled in the art may adaptively select and/or modify the carrying platform provided in the embodiments of the present disclosure according to actual needs and application scenarios. For example, the number of components in the load-bearing platform is changed. As another example, the dimensions of some of the components in the load-bearing platform are adjusted. Also for example, the structure of some components in the load-bearing platform may be equally replaced, etc. Based on this, more embodiments of the carrying platform can be extended, and the examples in this specification do not limit these extension schemes.

The present specification further provides a carrying device corresponding to the carrying platform described in any of the above embodiments, which is introduced below. It should be understood that the contents of the carrier described below may be referred to in correspondence with the contents of the carrier platform described above.

In a specific implementation, the carrying device may include: bearing platform and gas circuit control part.

The bearing platform is suitable for bearing materials with different sizes, and the structure, the function, the principle and the like of the bearing platform can refer to the description and the attached drawings of the relevant parts, and are not repeated herein; the air path control component is suitable for extracting air of the adsorption part corresponding to the material in the bearing platform.

Adopt above-mentioned load-bearing platform in load-bearing device, owing to wear to locate in the load-bearing platform each other not communicate between a plurality of adsorption parts of platform body, consequently, a plurality of adsorption parts have better independence, select the adsorption part to use according to the size of the material that will place, can match not unidimensional material, need not to change load-bearing platform, have improved load-bearing platform's flexibility and universality, have practiced thrift load-bearing platform's design cost and manufacturing cost to and reduced load-bearing platform's structural complexity and the maintenance degree of difficulty.

In addition, by adopting the bearing platform in the embodiment of the specification, the frequency of replacing the bearing platform in the mechanical manufacturing process is reduced, so that the use efficiency of the bearing platform is improved, random errors caused by frequent replacement of the bearing platform can be avoided, corresponding procedures can be performed more conveniently, and the production efficiency is improved.

Therefore, through the matching of the gas circuit control part and the bearing platform, the effect of fixing materials can be realized through air exhaust under the condition that the bearing device is ensured to have reliable sealing performance, the operation is simple, and the applicability is strong.

In specific implementation, specific components of the gas path control component may be determined according to specific application scenarios and requirements. For example, the air path control component may include a plurality of air path switches, each of which is coupled to each of the adsorbers. Through the gas circuit switch, can switch gas circulation route to the air of corresponding absorption portion of extraction makes corresponding absorption portion provide the adsorption affinity for the material.

In the concrete implementation, to the condition that there are a plurality of passageways in same absorption portion, can carry out the gas circuit integration through the branching unit for a plurality of passageways of same absorption portion can only communicate with a gas circuit switch, reduce gas circuit switch quantity, and simplify the structure of gas circuit control part, the gas circuit control operation of being convenient for.

It should be noted that the carrying device may actually include other components, such as a fixing bracket, a driving part (e.g., a suction pump), and the like. In order to facilitate the description of the technical solutions and highlight the innovative parts of the present description, the components of the carrying device that can be realized by the prior art are omitted in the present description.

In order to facilitate those skilled in the art to understand and implement the technical solution of the carrying device provided in the present specification, the following description is schematically made through specific application scenarios and accompanying drawings.

Fig. 8 is a schematic structural diagram of a carrying device provided in an embodiment of the present disclosure. In this embodiment, the carrying device 80 may include: a load-bearing platform 30 and an air path control member 82. The structure, function, principle, and the like of the bearing platform 30 can refer to the description and the drawings of the relevant parts, and are not repeated herein.

Referring to fig. 6 to 8 in combination, the air path control part 82 may include: a plurality of air channel switches 821-1 to 821-3 and a plurality of shunts 822-1 and 822-2. Wherein, the air channel switch 821-1 is coupled with a first end of the shunt 822-1 through an air tube, and two second ends of the shunt 822-1 are coupled with the opening 332-a of the channel 332-1 and the opening 332-b of the channel 332-2 through connectors, respectively; air path switch 821-2 is coupled to opening 342-a of passage 342 via a fitting; air path switch 821-3 is coupled to a first end of splitter 822-2 via an air tube, and two second ends of splitter 822-2 are coupled to opening 322-a of channel 322-1 and opening 322-b of channel 322-2 via connectors, respectively.

From this, according to the contact condition of material and adsorption zone, can open corresponding gas circuit switch, extract the air of corresponding absorption portion to provide the adsorption affinity for the material. The operation of the carrier 80 is illustrated below with different sized materials.

For example, as shown in fig. 9, when the material 8a is placed on the surface of the platform body 31 where the adsorption region exists, and covers the adsorption region 341, the air path switch 821-2 may be opened, and air in the adsorption region 341 and the channel 342 may be extracted through the opening 342-a, so as to provide an adsorption force for the material 8a, and the material 8a is adsorbed on the loading platform 30.

For another example, as shown in fig. 10, when the material 8b is placed on the surface of the platform body 31 where the adsorption region exists to cover the adsorption region 341 and the adsorption region 331, the air path switch 821-1 and the air path switch 821-2 may be opened to draw air in the adsorption region 331, the channel 332-1, the channel 332-2, the adsorption region 341, and the channel 342 through the opening 332-a, the opening 332-b, and the opening 342-a, so as to provide an adsorption force for the material 8b, and the material 8b is adsorbed on the loading platform 30.

For example, as shown in fig. 11, when the material 8c is placed on the surface of the platform body 31 where the adsorption area exists, and covers the adsorption area 321 and the adsorption area 331, the air path switch 821-1 and the air path switch 821-3 may be opened, and the air in the adsorption area 331, the channel 332-1, the channel 332-2, the adsorption area 321, the channel 322-1, and the channel 322-2 may be drawn through the opening 332-a, the opening 332-b, the opening 322-a, and the opening 322-b, so as to provide an adsorption force for the material 8c, and the material 8c is adsorbed on the loading platform 30.

Although the embodiments of the present specification are disclosed above, the embodiments of the present specification are not limited thereto. Various changes and modifications may be effected by one skilled in the art without departing from the spirit and scope of the embodiments herein described, and it is intended that the scope of the embodiments herein described be limited only by the scope of the appended claims.

Claims (11)

1. A load-bearing platform, comprising: the adsorption device comprises a platform body and a plurality of adsorption parts penetrating through the platform body; wherein, a plurality of each other not communicate between the adsorption parts, and at least one adsorption part is suitable for receiving the material.

2. The load-bearing platform of claim 1, wherein the suction portion comprises: an adsorption region on the surface of the platform body and a channel inside the platform body; the adsorption area is communicated with the channel and is suitable for being covered by materials; the channel is provided with an opening on the surface of the platform body.

3. The load-bearing platform of claim 2, wherein the plurality of suction regions are formed in the platform body surface in a shape having the same center.

4. The load-bearing platform of claim 2 or 3, wherein the suction area comprises at least one groove, and wherein at least one groove communicates with a corresponding channel.

5. The load-bearing platform of claim 4, wherein the suction area comprises a plurality of grooves, and the grooves are in communication with each other through a groove.

6. The load-bearing platform of claim 5, wherein the channel radial axis of at least one of said suction regions intersects the channel radial axis of the other of said suction regions.

7. The load-bearing platform of claim 5, wherein the adsorption region located in the middle of the surface of the platform body has a channel radial axis parallel to a radial axis of a channel communicated with the adsorption region; and the radial axis of the groove of the adsorption area is intersected with the radial axis of the channel communicated with the adsorption area.

8. The load-bearing platform of claim 5, wherein the grooves of each of the suction areas are symmetrically distributed.

9. The load-bearing platform of claim 4, wherein the grooves of the plurality of suction regions are formed in the surface of the platform body in a shape having the same center.

10. Load carrying platform according to claim 2 or 3, characterized in that a plurality of said channels are symmetrically distributed in the platform body.

11. A load bearing device, comprising: the load-bearing platform and air path control component of any one of claims 1 to 10, wherein:

the bearing platform is suitable for bearing materials with different sizes;

the air path control component is suitable for extracting air of the adsorption part corresponding to the material in the bearing platform.

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