CN113594356A - Ferroelectric oxide and MAxFA1-xPbI30-3 composite film material - Google Patents

Ferroelectric oxide and MAxFA1-xPbI30-3 composite film material Download PDF

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CN113594356A
CN113594356A CN202010366737.0A CN202010366737A CN113594356A CN 113594356 A CN113594356 A CN 113594356A CN 202010366737 A CN202010366737 A CN 202010366737A CN 113594356 A CN113594356 A CN 113594356A
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pbi
precursor solution
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吕兴杰
赵泽恩
袁国亮
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Nanjing University of Science and Technology
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Nanjing University of Science and Technology
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Abstract

本发明提供了一种铁电氧化物与MAxFA1‑ xPbI3 0‑3复合的薄膜材料,以平均粒径12~18 nm的0维铁电材料,将该0维铁电材料均匀分布于MAxFA1‑xPbI3形成的3维连通的骨架之中,得到所述的薄膜材料。与现有卤素钙钛矿薄膜相比,铁电氧化物与MAxFA1‑xPbI30‑3复合的薄膜材料内部具有大量纳米铁电畴,能有效降低光生电子‑空穴对的复合,提高材料的光伏性能,形成了一类全新的MAxFA1‑xPbI3铁电半导体材料。

Figure 202010366737

The invention provides a composite thin film material of a ferroelectric oxide and MA x FA 1- x PbI 3 0-3. The 0-dimensional ferroelectric material with an average particle size of 12-18 nm is used to make the 0-dimensional ferroelectric material uniform. Distributed in the 3-dimensional connected framework formed by MA x FA 1-x PbI 3 to obtain the thin film material. Compared with the existing halogen perovskite films, the composite film of ferroelectric oxide and MA x FA 1‑x PbI 3 0‑3 has a large number of nano-ferroelectric domains inside, which can effectively reduce the recombination of photogenerated electron-hole pairs , improving the photovoltaic performance of the material, forming a new class of MA x FA 1‑x PbI 3 ferroelectric semiconductor materials.

Figure 202010366737

Description

Ferroelectric oxide and MAxFA1-xPbI30-3 composite film material
Technical Field
The invention relates to MAxFA1-xPbI3A film, especially a ferroelectric adjustable MAxFA1-xPbI3A film and a preparation method thereof belong to the technical field of perovskite.
Background
The 0-dimensional ferroelectric material has the characteristics of wide absorption range and high absorption coefficient, so that the 0-dimensional ferroelectric material can be used as a good light absorber. Thus for MAxFA1-xPbI3The (MA: methyl ammonium, FA: formamidine) thin film material is doped with 0-dimensional ferroelectric materialFurther increasing the light absorption range of the material and generating a built-in electric field to reduce the recombination of electron-hole pairs. Therefore, MA isxFA1-xPbI3The film is combined with 0-dimensional ferroelectric material to form a brand new MAxFA1-xPbI3Ferroelectric semiconductor material, which will improve the existing MAxFA1-xPbI3A simple and easy method for making film ferroelectric.
The 0-3 composite material represents a composite system formed by uniformly distributing nano ferroelectrics (0 dimension) in 3-dimension communicated polymers. The 0-3 composite material is favored by the advantages of easy molding and processing (only the nano ferroelectric powder and the film are mixed together, and the finished product can be obtained by a polymer processing method), good flexibility, easy preparation of a large-area sensor, good comprehensive performance and the like. In the prior art, there are references to increasing MAPbI by composite ferroelectric materials3The properties of the film. The effect of improving the ferroelectric property is achieved by using a ferroelectric material as a main body, the compounding mode is basically 3-3 compounding, the 0-3 compounding mode is not involved, the changes of the structure and the property of the film due to the addition of the 0-dimensional nano material and the MAPbI caused by the changes are not researched3Important improvements in thin film photovoltaic performance.
The relevant articles mainly include:
1.Xu,Haowen.Morphology control of organic halide perovskites by adding BiFeO3nanostructures for efficient solar cell.Scientific reports[J]2019,9,1-8, et al, in MAPbI3In the spinning and coating process of the precursor solution, BiFeO is added3The nano structure is added into a precursor solvent to obtain BiFeO3-MAPbI3A composite film. BiFeO3-MAPbI3Film vs MAPbI3The absorption strength of the film is increased, the carrier mobility and the diffusion length are increased, and the photovoltaic current is enhanced.
In this article due to BiFeO3Occupying the bulk of the film material and thus causing large grains in the grown film.
2. The invention discloses a ferroelectric enhanced solar cell and a preparation method thereof (patent application No. CN 209698251A). The invention discloses a ferroelectric enhanced solar cell and a preparation method thereof.A ferroelectric nano material with good crystallinity, such as nano particles, is used for replacing a common film, so that a functional layer has higher remanent polarization strength and cannot influence the transmission of current carriers, and an inorganic ferroelectric material treated by a specific artificial polarization process can also effectively promote the separation and the transmission of the current carriers.
The patent prepares a ferroelectric enhanced solar cell by a method of replacing a thin film by large ferroelectric particles, wherein the large-sized particles are combined in a 3-3 composite mode, and the advantage of flexibility of the thin film material is lost.
In view of the foregoing, many inconsistencies and difficulties are always encountered in designing and preparing composite materials. The more prominent problems are that: it is difficult to produce large-area ferroelectric thin films with good comprehensive properties. At present, the ferroelectric composite material with the best electrical combination property is generally prepared by a hot pressing or sputtering process, and the area of a ferroelectric film prepared by the hot pressing or sputtering method is limited, so that the ferroelectric composite material is not suitable for simple preparation of the composite ferroelectric material. And the main matrix MAPbI of the 0-3 ferroelectric composite material compounded with the nano ferroelectric3The film-forming property of the film is poor, and the film is not suitable for preparing large-area thin film devices. Therefore, it is still difficult to obtain a large-area ferroelectric thin film having excellent overall properties.
Disclosure of Invention
In order to solve the above problems, the present invention provides a ferroelectric oxide and MAxFA1-xPbI30-3 composite film material and a preparation method thereof.
The technical solution for realizing the purpose of the invention is as follows: ferroelectric oxide and MAxFA1-xPbI30-3 composite film material, 0-dimensional ferroelectric material with average particle diameter of about 15nm is uniformly distributed in MAxFA1-xPbI3And obtaining the 0-3 composite film material in the formed 3-dimensional communicated framework.
Preferably, the 0-dimensional ferroelectric material is BaTiO3、Bi2FeCrO6、BiMnO3、BiCrO3、YMnO3Or HoMnO3Any one of them.
The above ferroelectric oxide and MAxFA1-xPbI3A process for preparing 0-3 composite film material by preparing MAxFA1-xPbI3(x is more than or equal to 0.2 and less than or equal to 0.5) adding 4-6 mu L of 0-dimensional ferroelectric material toluene saturated solution in the process of film, and specifically comprising the following steps:
(1) preparing a 0-dimensional ferroelectric material by a hydrothermal method, and dissolving the 0-dimensional ferroelectric material in toluene to prepare a saturated solution to obtain a precursor solution B;
(2) weighing FAI, MAI and PbI according to the molar ratio of the film material2Dissolving in gamma-butyrolactone (GBL) to obtain a saturated precursor solution A;
(3) and (3) spin-coating 20-40 mu L of precursor solution A on an ITO glass substrate for 15 seconds at a speed of 900 rpm and 25 seconds at a speed of 4000 rpm, dripping 4-6 mu L of precursor solution B on the surface of the substrate before the second spin-coating, standing for 15 seconds, and finally annealing at 90 ℃ for 10 minutes to remove the organic solvent.
Preferably, the 0-dimensional ferroelectric material is prepared by a hydrothermal method, the reaction process is divided into two sections of temperature rise, firstly, the temperature rise speed is 2 ℃/min, the temperature is raised from room temperature to 200 ℃, the temperature is kept for 3 hours, then, the temperature rise speed is 2 ℃/min, the temperature is raised to a fixed temperature, and the temperature is kept for 2 hours.
Preferably, before spin coating, the ITO glass substrate with the ozone-treated surface is adhered to a spin coater and preheated at 70 ℃ for 5 minutes.
Specifically, the surface ozonization process comprises the following steps: adjusting the air flow rate to 600mL/min, stabilizing the voltage at 180V, placing the substrate in a reaction bottle, controlling the reaction temperature to be 25 ℃, and treating for 30 minutes.
Preferably, the annealing is performed in a high purity nitrogen atmosphere having a purity greater than 99.999%.
Preferably, the annealing is initiated at 60 ℃ and the temperature is raised to 90 ℃ at a heating rate of 2 ℃/min.
Compared with the prior art, the invention has the beneficial effects that:
(1)the method is simple and efficient, and avoids the large particle doping method from carrying out MA treatmentxFA1-xPbI3(x is more than or equal to 0.2 and less than or equal to 0.5) the defect concentration is increased and the mobility is reduced caused by the film.
(2) The invention is a film with adjustable ferroelectricity, the adopted material has simple preparation process, easy operation, sufficient raw material source, low production cost, high yield and good repeatability; is not easy to dissolve in common solvent, the thermal decomposition temperature point is relatively high, and the crystal particles are uniform.
Drawings
FIG. 1 is a flow chart of the steps of the present invention.
Figure 2 is an XRD pattern of example 1 of the invention.
FIG. 3 is a P-E spectrum at 1kHz for example 1 of the present invention.
FIG. 4 is a dark current-voltage spectrum of example 1 of the present invention.
FIG. 5 is a plot of remanent polarization at 1kHz for all examples of the invention.
Fig. 6 is a hole mobility map calculated by the SCLC method for all examples of the present invention.
Detailed Description
In order to better illustrate the present invention and facilitate the understanding of the technical solutions of the present invention, the present invention is further described in detail with reference to the following examples. The following examples are merely illustrative of the present invention and do not represent or limit the scope of the claims, which are defined by the claims.
With reference to FIG. 1, the ferroelectric oxide and MA described abovexFA1-xPbI3The 0-dimensional ferroelectric material with the average grain diameter of about 15nm is uniformly distributed in the MA by the preparation method of the 0-3 composite film materialxFA1-xPbI3The ferroelectric property regulation and control of the film material is realized in the formed 3-dimensional communicated framework, and the method comprises the following steps:
step 1, weighing the 0-dimensional ferroelectric material (BaTiO) according to stoichiometric ratio3、Bi2FeCrO6、BiMnO3、BiCrO3、YMnO3Or HoMnO3) Adding NaOH solution with concentration of 5mol/L dropwise into corresponding nitrate raw material under magnetic stirring condition until solute is just completely dissolved to form saturated solution, and keeping stirring for 30 minutes. Then adding a certain amount of HNO with the concentration of 3mol/L into the solution3And (3) stabilizing the pH value of the solution at a fixed value.
And 2, pouring the solution into a PTFE (polytetrafluoroethylene) lining, sealing the reaction kettle and moving the reaction kettle into an oven. The reaction process is divided into two sections of temperature rise, firstly, the temperature rises from room temperature to 200 ℃ at the temperature rise speed of 2 ℃/min, the temperature is kept for 3 hours, then, the temperature rises to a fixed temperature at the temperature rise speed of 2 ℃/min, the temperature is kept for 2 hours, and then, the reaction is naturally cooled to the room temperature.
And 3, taking out the product from the PTFE lining, putting the product into a high-speed centrifuge, adding a proper amount of absolute ethyl alcohol for centrifugal washing, then alternately cleaning the product for 3 times by using deionized water and the absolute ethyl alcohol, putting the precipitate into a drying box at 60 ℃ for heat preservation for 6 hours to obtain a 0-dimensional ferroelectric material, dissolving the 0-dimensional ferroelectric material in a toluene solution to prepare a saturated solution, and obtaining a precursor solution B.
Step 4, weighing FAI, MAI and PbI according to molar ratio2And dissolved in gamma-butyrolactone (GBL) and dissolved by magnetic stirring at 65 ℃ to prepare a saturated precursor solution A.
And 5, adhering the ITO glass substrate subjected to surface ozone treatment on a spin coater, preheating for 5 minutes at 70 ℃, and spin-coating 20-40 mu L of precursor solution A on the substrate under the conditions of spin-coating for 15 seconds at the speed of 900 rpm and spin-coating for 25 seconds at the speed of 4000 rpm. And dripping 4-6 mu L of precursor solution B on the surface of the substrate in the gap between two spin coating processes, namely after the first spin coating and before the second spin coating, and standing for 15 seconds. And finally, annealing for 10 minutes at 90 ℃ to remove the organic solvent, wherein the annealing atmosphere is high-purity nitrogen with the purity of more than 99.999 percent. The initial temperature of annealing is 60 ℃, the temperature is raised to 90 ℃ at the heating rate of 2 ℃/min, and the MA with adjustable ferroelectricity is obtainedxFA1-xPbI3A film.
Example 1
Ferroelectric oxide and MAxFA1-xPbI30-3 composite filmThe molecular formula of the film is MA0.2FA0.8PbI3X is 0.2, and the added 0-dimensional ferroelectric material is BaTiO3The method comprises the following steps:
step 1, weighing Ba (NO) according to the stoichiometric ratio of 1:13)2And TiCl4A NaOH solution with a concentration of 5mol/L was added dropwise with magnetic stirring until the solute was just completely dissolved to form a saturated solution, and stirring was maintained for 30 minutes. Then adding a certain amount of HNO with the concentration of 3mol/L into the solution3The pH value of the solution is stabilized at 10.5.
And 2, pouring the solution into a PTFE (polytetrafluoroethylene) lining, sealing the reaction kettle and moving the reaction kettle into an oven. The reaction process is divided into two sections of temperature rise, firstly, the temperature rises from room temperature to 200 ℃ at the temperature rise speed of 2 ℃/min, the temperature is preserved for 3 hours, then, the temperature rises to 220 ℃ at the temperature rise speed of 2 ℃/min, the temperature is preserved for 2 hours, and then, the reaction is naturally cooled to the room temperature.
Step 3, taking out the product from the PTFE lining, putting the product into a high-speed centrifuge, adding a proper amount of absolute ethyl alcohol for centrifugal washing, then alternately cleaning the product for 3 times by using deionized water and absolute ethyl alcohol, putting the precipitate into a drying oven at 60 ℃ and preserving the heat for 6 hours to obtain a 0-dimensional ferroelectric material BaTiO3
Step 4, weighing FAI, MAI and PbI according to the molar ratio of 0.2:0.8:12Dissolving in gamma-butyrolactone (GBL), and magnetically stirring at 65 deg.C to obtain saturated precursor solution A; adding 0-dimensional ferroelectric material BaTiO3Dissolving in toluene solution to prepare saturated solution and obtain precursor solution B.
And 5, adhering the ITO glass substrate with the surface treated by ozone on a spin coater, preheating for 5 minutes at 70 ℃, and spin-coating 20 mu L of precursor solution A on the substrate under the conditions of spin-coating for 15 seconds at the speed of 900 rpm and spin-coating for 25 seconds at the speed of 4000 rpm. Wherein 4 mul of precursor solution B is dripped on the surface of the substrate in the gap between two spin coating processes and is kept still for 15 seconds. And finally, annealing for 10 minutes at 90 ℃ to remove the organic solvent, wherein the annealing atmosphere is high-purity nitrogen with the purity of more than 99.999 percent. The initial temperature of annealing is 60 ℃, the temperature is raised to 90 ℃ at the heating rate of 2 ℃/min, and the product is obtainedObtain ferroelectric adjustable MA0.2FA0.8PbI3A film. The XRD diffraction pattern of the sample is shown in fig. 2.
The ferroelectric properties of the film of example 1 were studied, using the following specific steps: a proper amount of sample of the composite film is selected, the sample is processed into an original sample to be measured with the thickness of 0.6mm on a tablet press, and conductive silver adhesive is coated on the upper side and the lower side of the tablet press. The test was then performed separately on a Precision Premier II ferroelectric tester. Our investigations of the resulting film found that: the relation curve of the polarization strength P of the composite film and the externally applied electric field strength E shows that the composite film has obvious ferroelectric effect, and the measured ferroelectric hysteresis loop of the film material is shown in figure 3.
Au electrodes with the thickness of 100nm are respectively evaporated on two sides of the film, the hole mobility of the film is tested by an SCLC method, and the obtained dark current-voltage curve is shown in figure 4.
Example 2
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this embodiment, FAI, MAI, and PbI used for preparing the precursor solution a in step 42Is 0.5:0.5: 1.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film x value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 3
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: the amount of the precursor solution A spin-coated in step 5 in this example was 40. mu.L.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 4
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this embodiment, FAI, MAI, and PbI used for preparing the precursor solution a in step 42The molar ratio of (1) to (2) is 0.5:0.5:1, and the amount of spin coating of the precursor solution A in the step 5 is 40. mu.L.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 5
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: the spin coating amount of the precursor solution B in step 5 in this example was 6. mu.l.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 6
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this embodiment, FAI, MAI, and PbI used for preparing the precursor solution a in step 42The molar ratio of (3) was 0.5:0.5:1, and the amount of spin coating of the precursor solution B in step 5 was 6. mu.l.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 7
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, the precursor solution A is spin-coated in step 5The amount was 40. mu.L, and the spin-coating amount of the precursor solution B was 6. mu.L.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 8
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this embodiment, FAI, MAI, and PbI used for preparing the precursor solution a in step 42The molar ratio of (1) to (2) is 0.5:0.5:1, the spin coating amount of the precursor solution A in the step 5 is 40 mul, and the spin coating amount of the precursor solution B is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 9
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, Bi (NO) was weighed in a stoichiometric ratio of 2:1:1 in step 13)3、Fe(NO3)2And Cr (NO)3)3
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 10
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, Bi (NO) is stoichiometrically referred to in step 13)3、Fe(NO3)2And Cr (NO)3)3FAI, MAI and MAI for preparing the precursor solution A in the step 4PbI2Is 0.5:0.5: 1.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 11
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3、Fe(NO3)2And Cr (NO)3)3And the spin coating amount of the precursor solution A in the step 5 is 40 mu L.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 12
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3、Fe(NO3)2And Cr (NO)3)3FAI, MAI and PbI used for preparing the precursor solution A in the step 42The molar ratio of (1) to (2) is 0.5:0.5:1, and the amount of spin coating of the precursor solution A in the step 5 is 40. mu.L.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 13
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3、Fe(NO3)2And Cr (NO)3)3And the spin coating amount of the precursor solution B in the step 5 is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 14
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3、Fe(NO3)2And Cr (NO)3)3FAI, MAI and PbI used for preparing the precursor solution A in the step 42The molar ratio of (3) was 0.5:0.5:1, and the amount of spin coating of the precursor solution B in step 5 was 6. mu.l.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 15
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3、Fe(NO3)2And Cr (NO)3)3In the step 5, the spin coating amount of the precursor solution A is 40 mul, and the spin coating amount of the precursor solution B is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 16
This example is a ferroelectric oxide and MAxFA1-xPbI30-3 composite film material and preparation method and implementation thereofExample 1 the same, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3、Fe(NO3)2And Cr (NO)3)3FAI, MAI and PbI used for preparing the precursor solution A in the step 42The molar ratio of (1) to (2) is 0.5:0.5:1, the spin coating amount of the precursor solution A in the step 5 is 40 mul, and the spin coating amount of the precursor solution B is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 17
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, Bi (NO) is stoichiometrically referred to in step 13)3And Mn (NO)3)2
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 18
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, Bi (NO) is stoichiometrically referred to in step 13)3And Mn (NO)3)2FAI, MAI and PbI used for preparing the precursor solution A in the step 42Is 0.5:0.5: 1.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 19
This example is a ferroelectric oxide and MAxFA1-xPbI30-3 timesThe resultant film material and its preparation were the same as in example 1, except that: in this example, Bi (NO) was weighed in a stoichiometric ratio of 1:1 in step 13)3And Mn (NO)3)2And the spin coating amount of the precursor solution A in the step 5 is 40 mu L.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 20
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3And Mn (NO)3)2FAI, MAI and PbI used for preparing the precursor solution A in the step 42The molar ratio of (1) to (2) is 0.5:0.5:1, and the amount of spin coating of the precursor solution A in the step 5 is 40. mu.L.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 21
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3And Mn (NO)3)2And the spin coating amount of the precursor solution B in the step 5 is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 22
This example is a ferroelectric oxide and MAxFA1-xPbI30-3 composite film material and its preparationThe preparation process is the same as in example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3And Mn (NO)3)2FAI, MAI and PbI used for preparing the precursor solution A in the step 42The molar ratio of (3) was 0.5:0.5:1, and the amount of spin coating of the precursor solution B in step 5 was 6. mu.l.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 23
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3And Mn (NO)3)2In the step 5, the spin coating amount of the precursor solution A is 40 mul, and the spin coating amount of the precursor solution B is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 24
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3And Mn (NO)3)2FAI, MAI and PbI used for preparing the precursor solution A in the step 42The molar ratio of (1) to (2) is 0.5:0.5:1, the spin coating amount of the precursor solution A in the step 5 is 40 mul, and the spin coating amount of the precursor solution B is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 25
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, Bi (NO) was weighed in a stoichiometric ratio of 1:1 in step 13)3And Cr (NO)3)3
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 26
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, Bi (NO) is stoichiometrically referred to in step 13)3And Cr (NO)3)3FAI, MAI and PbI used for preparing the precursor solution A in the step 42Is 0.5:0.5: 1.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 27
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3And Cr (NO)3)3And the spin coating amount of the precursor solution A in the step 5 is 40 mu L.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 28
This example is a ferroelectric oxide and MAxFA1-xPbI30-3 timesThe resultant film material and its preparation were the same as in example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3And Cr (NO)3)3FAI, MAI and PbI used for preparing the precursor solution A in the step 42The molar ratio of (1) to (2) is 0.5:0.5:1, and the amount of spin coating of the precursor solution A in the step 5 is 40. mu.L.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 29
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3And Cr (NO)3)3And the spin coating amount of the precursor solution B in the step 5 is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 30
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3And Cr (NO)3)3FAI, MAI and PbI used for preparing the precursor solution A in the step 42The molar ratio of (3) was 0.5:0.5:1, and the amount of spin coating of the precursor solution B in step 5 was 6. mu.l.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 31
This example is an ironElectrooxidation and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3And Cr (NO)3)3In the step 5, the spin coating amount of the precursor solution A is 40 mul, and the spin coating amount of the precursor solution B is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 32
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is to weigh Bi (NO) in a stoichiometric ratio3)3And Cr (NO)3)3FAI, MAI and PbI used for preparing the precursor solution A in the step 42The molar ratio of (1) to (2) is 0.5:0.5:1, the spin coating amount of the precursor solution A in the step 5 is 40 mul, and the spin coating amount of the precursor solution B is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 33
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, Y (NO) is stoichiometrically used in step 13)3And Mn (NO)3)2
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 34
This example is a ferroelectricOxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, in step 1, Y (NO) was weighed in a stoichiometric ratio of 1:13)3And Mn (NO)3)2FAI, MAI and PbI used for preparing the precursor solution A in the step 42Is 0.5:0.5: 1.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 35
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is called Y (NO) in stoichiometric ratio3)3And Mn (NO)3)2And the spin coating amount of the precursor solution A in the step 5 is 40 mu L.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 36
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is called Y (NO) in stoichiometric ratio3)3And Mn (NO)3)2FAI, MAI and PbI used for preparing the precursor solution A in the step 42The molar ratio of (1) to (2) is 0.5:0.5:1, and the amount of spin coating of the precursor solution A in the step 5 is 40. mu.L.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 37
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is called Y (NO) in stoichiometric ratio3)3And Mn (NO)3)2And the spin coating amount of the precursor solution B in the step 5 is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 38
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is called Y (NO) in stoichiometric ratio3)3And Mn (NO)3)2FAI, MAI and PbI used for preparing the precursor solution A in the step 42The molar ratio of (3) was 0.5:0.5:1, and the amount of spin coating of the precursor solution B in step 5 was 6. mu.l.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 39
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is called Y (NO) in stoichiometric ratio3)3And Mn (NO)3)2In the step 5, the spin coating amount of the precursor solution A is 40 mul, and the spin coating amount of the precursor solution B is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 40
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is called Y (NO) in stoichiometric ratio3)3And Mn (NO)3)2FAI, MAI and PbI used for preparing the precursor solution A in the step 42The molar ratio of (1) to (2) is 0.5:0.5:1, the spin coating amount of the precursor solution A in the step 5 is 40 mul, and the spin coating amount of the precursor solution B is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
EXAMPLE 41
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in step 1 of this example, Ho (NO) was weighed in a stoichiometric ratio of 1:13)3And Mn (NO)3)2
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 42
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, Ho (NO) is used as the stoichiometric ratio in step 13)3And Mn (NO)3)2FAI, MAI and PbI used for preparing the precursor solution A in the step 42Is 0.5:0.5: 1.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 43
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is stoichiometrically referred to as Ho (NO)3)3And Mn (NO)3)2And the spin coating amount of the precursor solution A in the step 5 is 40 mu L.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 44
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is stoichiometrically referred to as Ho (NO)3)3And Mn (NO)3)2FAI, MAI and PbI used for preparing the precursor solution A in the step 42The molar ratio of (1) to (2) is 0.5:0.5:1, and the amount of spin coating of the precursor solution A in the step 5 is 40. mu.L.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 45
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is stoichiometrically referred to as Ho (NO)3)3And Mn (NO)3)2And the spin coating amount of the precursor solution B in the step 5 is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 46
This implementationExample A ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is stoichiometrically referred to as Ho (NO)3)3And Mn (NO)3)2FAI, MAI and PbI used for preparing the precursor solution A in the step 42The molar ratio of (3) was 0.5:0.5:1, and the amount of spin coating of the precursor solution B in step 5 was 6. mu.l.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 47
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is stoichiometrically referred to as Ho (NO)3)3And Mn (NO)3)2In the step 5, the spin coating amount of the precursor solution A is 40 mul, and the spin coating amount of the precursor solution B is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3The film X value, the spin coating amount of the precursor solution A, the type of the 0-dimensional ferroelectric material and the spin coating amount of the precursor solution B.
Example 48
This example is a ferroelectric oxide and MAxFA1-xPbI3The 0-3 composite film material and the preparation method thereof are the same as the example 1, except that: in this example, step 1 is stoichiometrically referred to as Ho (NO)3)3And Mn (NO)3)2FAI, MAI and PbI used for preparing the precursor solution A in the step 42The molar ratio of (1) to (2) is 0.5:0.5:1, the spin coating amount of the precursor solution A in the step 5 is 40 mul, and the spin coating amount of the precursor solution B is 6 mul.
The conditions of the important parameters involved in this example are shown in Table 1, including MAxFA1-xPbI3Film X value, precursor solution A spin coating amount and 0-dimensional ironThe type of the electric material and the spin coating amount of the precursor solution B.
FIG. 5 is a graph of remanent polarization at 1kHz for examples 1-48 of the present invention. FIG. 6 is a spectrum of hole mobility calculated by SCLC method according to examples 1-48 of the present invention.
Table 1 examples conditions of the respective reactions and parameters
Figure BDA0002476953240000161
Figure BDA0002476953240000171
Figure BDA0002476953240000181
The embodiments of the present invention have been described in detail with reference to the above examples, but the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art.

Claims (8)

1.一种铁电氧化物与MAxFA1-xPbI3 0-3复合的薄膜材料,其特征在于,以平均粒径12~18nm的0维铁电材料,将该0维铁电材料均匀分布于MAxFA1-xPbI3形成的3维连通的骨架之中,得到所述的0-3复合的薄膜材料。1. a thin film material of ferroelectric oxide and MA x FA 1-x PbI 3 0-3 composite, it is characterized in that, with the 0-dimensional ferroelectric material of average particle diameter 12~18nm, this 0-dimensional ferroelectric material It is uniformly distributed in the 3-dimensional connected framework formed by MA x FA 1-x PbI 3 to obtain the 0-3 composite thin film material. 2.如权利要求1所述的薄膜材料,其特征在于,所述的0维铁电材料为BaTiO3、Bi2FeCrO6、BiMnO3、BiCrO3、YMnO3或HoMnO3中任意一种。2 . The thin film material according to claim 1 , wherein the 0-dimensional ferroelectric material is any one of BaTiO 3 , Bi 2 FeCrO 6 , BiMnO 3 , BiCrO 3 , YMnO 3 or HoMnO 3 . 3 . 3. 一种如权利要求1或2所述的薄膜材料的制备方法,其特征在于,在制备MAxFA1-xPbI3薄膜过程中,将0维铁电材料加入到甲苯溶液中得到饱和溶液,然后取4~6 μL的饱和溶液通过旋涂法获得所述的薄膜材料。3. a preparation method of film material as claimed in claim 1 or 2, is characterized in that, in preparation MA x FA 1-x PbI 3 thin film process, 0 dimension ferroelectric material is added in toluene solution to obtain saturated solution, and then take 4-6 μL of saturated solution to obtain the thin film material by spin coating method. 4.如权利要求3所述的方法,其特征在于,包括如下步骤:4. method as claimed in claim 3, is characterized in that, comprises the steps: (1)采用水热法制备0维铁电材料,并将其溶于甲苯溶液中制成饱和溶液,获得前驱体溶液B;(1) Prepare a 0-dimensional ferroelectric material by a hydrothermal method, dissolve it in a toluene solution to make a saturated solution, and obtain a precursor solution B; (2)按所述薄膜材料的摩尔比称取FAI、MAI和PbI2,溶解在γ-丁内酯中,获得饱和的前驱体溶液A;(2) Weighing FAI, MAI and PbI 2 according to the molar ratio of the film material, and dissolving them in γ-butyrolactone to obtain a saturated precursor solution A; (3)在ITO玻璃基片上,将20~40 μL前驱体溶液A先后以900转/分的速度旋涂15秒和4000转/分的速度旋涂25秒,其中,在进行第二次旋涂之前,在基片表面滴加4~6 μL前驱体溶液B,并静止15秒,最后在90℃退火10分钟除去有机溶剂。(3) On the ITO glass substrate, 20-40 μL of precursor solution A was spin-coated at a speed of 900 rpm for 15 seconds and then at a speed of 4000 rpm for 25 seconds. Before coating, 4-6 μL of precursor solution B was dropped on the surface of the substrate, and kept for 15 seconds, and finally annealed at 90 °C for 10 minutes to remove the organic solvent. 5.如权利要求4所述的方法,其特征在于,采用水热法制备0维铁电材料,反应过程分为两段升温,首先以2℃/min的升温速度从室温升至200℃,并保温3小时,再以2℃/min的升温速度升至固定温度,保温2小时。5. method as claimed in claim 4 is characterized in that, adopts hydrothermal method to prepare 0-dimensional ferroelectric material, reaction process is divided into two sections of temperature rise, at first rise to 200 ℃ from room temperature with the heating rate of 2 ℃/min , and kept for 3 hours, then raised to a fixed temperature at a heating rate of 2 °C/min, and kept for 2 hours. 6.如权利要求4所述的方法,其特征在于,旋涂前,先将表面臭氧处理的ITO玻璃基片粘在旋涂仪上,然后在70℃下预热5分钟。6. The method according to claim 4, characterized in that, before spin coating, the ITO glass substrate with surface ozone treatment is adhered to a spin coater, and then preheated at 70° C. for 5 minutes. 7.如权利要求4所述的方法,其特征在于,退火在纯度大于99.999%的高纯氮气气氛下进行。7. The method of claim 4, wherein the annealing is performed in a high-purity nitrogen atmosphere with a purity greater than 99.999%. 8.如权利要求4所述的方法,其特征在于,退火的起始温度为60℃,以2℃/min的加热速率升温至90℃。8 . The method of claim 4 , wherein the initial temperature of annealing is 60° C., and the temperature is raised to 90° C. at a heating rate of 2° C./min. 9 .
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