CN102312201A - Preparation method of Al-doped zinc oxide transparent conductive thin film - Google Patents
Preparation method of Al-doped zinc oxide transparent conductive thin film Download PDFInfo
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- CN102312201A CN102312201A CN2010102144127A CN201010214412A CN102312201A CN 102312201 A CN102312201 A CN 102312201A CN 2010102144127 A CN2010102144127 A CN 2010102144127A CN 201010214412 A CN201010214412 A CN 201010214412A CN 102312201 A CN102312201 A CN 102312201A
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Al mole doping | Resistivity (Ω cm) | Electron density (cm -3) | Hall mobility (cm 2V -1s -1) |
1% | 6.34×10 -4 | 1.84×10 20 | 53.1 |
2% | 2.18×10 -4 | 9.20×10 20 | 31.0 |
5% | 3.05×10 -4 | 5.09×10 20 | 40.2 |
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CN102312201A true CN102312201A (en) | 2012-01-11 |
CN102312201B CN102312201B (en) | 2013-10-02 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120211355A1 (en) * | 2011-02-22 | 2012-08-23 | Korea Institute Of Science & Technology | Transparent conductive composition, target, transparent conductive thin film using the target and method for fabricating the same |
CN103046013A (en) * | 2012-12-30 | 2013-04-17 | 青海天誉汇新能源开发有限公司 | Method for preparing photovoltaic cell transparent oxide film with flexible substrate |
CN103325888A (en) * | 2013-06-21 | 2013-09-25 | 哈尔滨工业大学深圳研究生院 | Transparent conductive thin film manufacturing method based on silicon-based thin film substrate |
CN103706792A (en) * | 2013-12-30 | 2014-04-09 | 北京科技大学 | Al-doped ZnO texture thermoelectric material manufacturing method |
CN104120323B (en) * | 2013-04-27 | 2017-05-03 | 深圳光启高等理工研究院 | Thin-film resistor, sputtering target material and preparation method |
Citations (6)
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CN1929091A (en) * | 2006-09-26 | 2007-03-14 | 中国科学院上海硅酸盐研究所 | Preparation of ZnO base thin-magnetic semi-conductor film using electric-magnetic field restricted jigger coupling plasma sputtering sedimentation |
CN101440470A (en) * | 2008-12-17 | 2009-05-27 | 石家庄同人伟业科技有限公司 | Preparation of AZO target material for thin-film solar cell |
US20090242385A1 (en) * | 2008-03-28 | 2009-10-01 | Tokyo Electron Limited | Method of depositing metal-containing films by inductively coupled physical vapor deposition |
CN101575697A (en) * | 2009-06-09 | 2009-11-11 | 北京科技大学 | ZnO-based transparent conductive film co-doped with Al-F and preparation method thereof |
CN101619445A (en) * | 2009-07-31 | 2010-01-06 | 北京科技大学 | Method for preparing transparent conductive film material |
CN101661808A (en) * | 2009-09-15 | 2010-03-03 | 中国科学院上海硅酸盐研究所 | Multi-doping zinc-oxide-base wide-bandgap conducting material and preparation method thereof |
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Patent Citations (6)
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CN1929091A (en) * | 2006-09-26 | 2007-03-14 | 中国科学院上海硅酸盐研究所 | Preparation of ZnO base thin-magnetic semi-conductor film using electric-magnetic field restricted jigger coupling plasma sputtering sedimentation |
US20090242385A1 (en) * | 2008-03-28 | 2009-10-01 | Tokyo Electron Limited | Method of depositing metal-containing films by inductively coupled physical vapor deposition |
CN101440470A (en) * | 2008-12-17 | 2009-05-27 | 石家庄同人伟业科技有限公司 | Preparation of AZO target material for thin-film solar cell |
CN101575697A (en) * | 2009-06-09 | 2009-11-11 | 北京科技大学 | ZnO-based transparent conductive film co-doped with Al-F and preparation method thereof |
CN101619445A (en) * | 2009-07-31 | 2010-01-06 | 北京科技大学 | Method for preparing transparent conductive film material |
CN101661808A (en) * | 2009-09-15 | 2010-03-03 | 中国科学院上海硅酸盐研究所 | Multi-doping zinc-oxide-base wide-bandgap conducting material and preparation method thereof |
Non-Patent Citations (1)
Title |
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S.J. JUNG.ET.AL.: "Process control for low temperature reactive deposition of Al doped ZnO films by ICP-assisted DC magnetron sputtering", 《SURFACE & COATINGS TECHNOLOGY》, vol. 200, 22 April 2005 (2005-04-22) * |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120211355A1 (en) * | 2011-02-22 | 2012-08-23 | Korea Institute Of Science & Technology | Transparent conductive composition, target, transparent conductive thin film using the target and method for fabricating the same |
CN103046013A (en) * | 2012-12-30 | 2013-04-17 | 青海天誉汇新能源开发有限公司 | Method for preparing photovoltaic cell transparent oxide film with flexible substrate |
CN104120323B (en) * | 2013-04-27 | 2017-05-03 | 深圳光启高等理工研究院 | Thin-film resistor, sputtering target material and preparation method |
CN103325888A (en) * | 2013-06-21 | 2013-09-25 | 哈尔滨工业大学深圳研究生院 | Transparent conductive thin film manufacturing method based on silicon-based thin film substrate |
CN103325888B (en) * | 2013-06-21 | 2017-02-08 | 哈尔滨工业大学深圳研究生院 | Transparent conductive thin film manufacturing method based on silicon-based thin film substrate |
CN103706792A (en) * | 2013-12-30 | 2014-04-09 | 北京科技大学 | Al-doped ZnO texture thermoelectric material manufacturing method |
CN103706792B (en) * | 2013-12-30 | 2015-08-26 | 北京科技大学 | A kind of preparation method of Al doping ZnO texture thermoelectric material |
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CN102312201B (en) | 2013-10-02 |
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Effective date of registration: 20220802 Address after: 200050 No. 1295 Dingxi Road, Shanghai, Changning District Patentee after: SHANGHAI INSTITUTE OF CERAMICS, CHINESE ACADEMY OF SCIENCES Address before: 200050 No. 1295 Dingxi Road, Shanghai, Changning District Patentee before: SHANGHAI INSTITUTE OF CERAMICS, CHINESE ACADEMY OF SCIENCES Patentee before: RESEARCH AND DEVELOPMENT CENTER, SHANGHAI INSTITUTE OF CERAMICS |