CN113589317A - Laser radar and two-dimensional scanning method - Google Patents

Laser radar and two-dimensional scanning method Download PDF

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Publication number
CN113589317A
CN113589317A CN202110866422.7A CN202110866422A CN113589317A CN 113589317 A CN113589317 A CN 113589317A CN 202110866422 A CN202110866422 A CN 202110866422A CN 113589317 A CN113589317 A CN 113589317A
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China
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receiving
lidar
chip
arranged along
opas
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CN202110866422.7A
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李中宇
贾晓宁
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Beijing Moore Core Light Technology Co ltd
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Beijing Moore Core Light Technology Co ltd
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Priority to CN202110866422.7A priority Critical patent/CN113589317A/en
Publication of CN113589317A publication Critical patent/CN113589317A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • G01S17/89Lidar systems specially adapted for specific applications for mapping or imaging

Abstract

The application discloses a laser radar and a two-dimensional scanning method. The laser radar comprises a transmitting component and a receiving component; the transmitting assembly comprises at least one group of optical phased array OPAs, and the group of OPAs comprise a plurality of OPA units arranged along a first direction; the receive components include at least one set of receive arrays, such as an FMCW array, an APD array, a SPAD array, or the like. The group of receiving arrays comprises a plurality of receiving units arranged along a second direction; the first direction is perpendicular to the second direction. The emitting component can realize the scanning of the first direction through the one-dimensional OPA, and the receiving component can realize the resolution of the light beam in the second direction through the one-dimensional receiving array, thereby realizing the two-dimensional light beam scanning. The two-dimensional light beam scanning can be realized only by the light source with single wavelength, and the two-dimensional OPA unit is not required to be arranged, so that the volume and the quantity of consumables are greatly reduced, the cost is saved, and the process difficulty is also reduced.

Description

Laser radar and two-dimensional scanning method
Technical Field
The application relates to the technical field of scanning, in particular to a laser radar and a two-dimensional scanning method.
Background
The laser radar realizes the real-time sensing of the environment and the obstacle avoidance function by analyzing a laser signal to draw a three-dimensional point cloud picture, and is widely applied to the fields of automatic driving, logistics transportation, high-precision maps, intelligent transportation, robots, industrial automation, unmanned aerial vehicles, surveying and mapping and the like at present. The laser radar is the eye of automatic driving due to the characteristics of strong anti-interference performance, clear imaging and the like, and is regarded as one of the most important sensors in automatic driving. The laser radar can be divided into a mechanical laser radar which integrally rotates, a semi-solid laser radar which is static in a transceiving module and rotates in a light path, and a solid laser radar according to a scanning mode. Pure solid state lidar does not include any scanning devices that require physical movement. The optical phased array scanning scheme based on the integrated optical technology reported in recent years becomes a research hotspot due to the characteristics of small volume, light weight, high speed, difficulty in interference and the like.
A Photonic Integrated Circuit (PIC) chip refers to a chip fabricated using Photonic integration technology, and may also be referred to as an optical chip. The photonic integration technology can be compatible with the existing Complementary Metal-Oxide-Semiconductor (CMOS) standard technology, and can be integrated with a microelectronic integrated circuit, so that the integrated optical chip becomes a research hotspot and has wide application in the fields of communication, sensing, calculation, quantum, biology and the like.
In the Optical Phased Array (OPA) implemented lidar, a Phased Array transmitter is composed of a plurality of transmitting and receiving units, the individual control of each unit light wave is realized by changing the voltage loaded on different units and further changing the characteristics (such as light intensity and phase) of the light wave emitted by different units, the phase relation between the light waves emitted from each Phased Array unit is adjusted to generate mutually intensified interference in a set direction so as to realize high-intensity light beams, and the light waves emitted from each unit in other directions are mutually cancelled, so that the radiation intensity is close to zero. Under the control of program, each phase control unit can make one or more high-intensity light beams point to realize random space domain scanning according to designed program. Compared with the traditional mechanical scanning technology, the optical phased array scanning technology based on the integrated optical technology has three advantages:
1) the scanning speed is high: the scanning speed of the optical phased array depends on the electronic characteristics of the used materials and the structure of the device, and can generally reach over MHz magnitude. 2) The scanning precision or the pointing precision is high: the scanning accuracy of the optical phased array depends on the accuracy of the control electrical signal (generally, a voltage signal), and can be more than mu rad (one thousandth). 3) The controllability is good: the light beam pointing of the optical phased array is completely controlled by an electric signal, any pointing can be achieved within an allowed angle range, high-density scanning can be performed on an interested target area, sparse scanning can be performed on other areas, and the optical phased array is very useful for automatic driving environment perception.
In general, lidar requires scanning in both horizontal and vertical directions. The two-dimensional light beam scanning scheme implemented by the OPA technology is mainly divided into two types: one is to perform phased array in two dimensions to realize two-dimensional scanning; the other is scanning in one dimension by an optical phased array and the other by wavelength switching of the light source.
The first scheme requires two-dimensionally arranged OPA units for phased array in two dimensions, the number of OPA units increases exponentially with the size of the array, for example, if two dimensions are set to N, N is required2An OPA unit. However, the difficulty of large-scale two-dimensional OPA array process is high, and the consumption of the number of OPA units also causes higher cost. In the second scheme, the light source with multiple wavelengths is high in price and large in size, and the requirements of the market on low cost and small size of the laser radar are difficult to meet.
Disclosure of Invention
Based on the problems, the application provides a laser radar and a two-dimensional scanning method, so that the cost for implementing two-dimensional scanning by the laser radar based on the OPA is saved, the process difficulty is reduced, and the volume of the laser radar is reduced.
The embodiment of the application discloses the following technical scheme:
the present application provides in a first aspect a lidar comprising: a transmitting component and a receiving component;
the transmission assembly includes: at least one group of optical phased array OPAs, wherein one group of OPAs comprises a plurality of OPA units arranged along a first direction; the receiving component comprises: at least one group of receiving arrays, wherein one group of receiving arrays comprises a plurality of receiving units arranged along a second direction; the first direction is vertical to the second direction;
the emitting component is used for emitting detection light waves to the outside and scanning in a first direction through a plurality of OPA units arranged along the first direction;
the receiving assembly is used for collecting the detection light waves returned from the outside, and the light distribution in the second direction is distinguished through a plurality of receiving units arranged along the second direction.
Optionally, the transmit assembly comprises a set of OPAs and the receive assembly comprises a set of receive arrays.
Optionally, the transmitting assembly comprises a set of OPAs and the receiving assembly comprises a plurality of sets of receiving arrays;
each group of receiving arrays in the plurality of groups of receiving arrays are arranged along the first direction.
Optionally, the transmitting assembly comprises a plurality of sets of OPAs and the receiving assembly comprises a set of receiving arrays;
each of the plurality of sets of OPAs is arranged along the second direction.
Optionally, the transmitting assembly comprises a plurality of sets of OPAs and the receiving assembly comprises a plurality of sets of receiving arrays;
each group of OPAs in the plurality of groups of OPAs are arranged along the second direction, and each group of receiving arrays in the plurality of groups of receiving arrays are arranged along the first direction.
Optionally, the transmitting component is integrated on a first chip, and the first chip is used as a transmitting chip in the laser radar; the receiving component is integrated on a second chip, and the second chip is used as a receiving chip of the laser radar.
Optionally, the lidar further comprises: the light beam adjusting assembly is arranged on an optical transmission path from the first chip to the second chip; the beam shaping assembly is used for shaping a beam on the optical transmission path.
Optionally, the beam modification assembly comprises: a lens.
Optionally, the intrinsic materials of the transmitting component and the receiving component are the same, the transmitting component and the receiving component are integrated on a third chip, and the third chip is used as both a transmitting chip and a receiving chip of the lidar.
Optionally, the receiving array is any one of:
a frequency modulated continuous wave FMCW array, an avalanche photodiode APD array, or a single photon avalanche diode SPAD array.
Optionally, the emitting component is further configured to receive the first electrical signal, and specifically emit a detection light wave to the outside according to the first electrical signal;
the receiving component is also used for converting the collected detection light waves returned from the outside into second electric signals to be output.
A second aspect of the present application provides a two-dimensional scanning method, which is applied to the laser radar introduced in the first aspect, and the method includes:
emitting a detection light wave to the outside by using an emitting component, and scanning in a first direction by using a plurality of OPA units arranged along the first direction;
and collecting the detection light wave returned from the outside by using the receiving assembly, and distinguishing the light distribution in the second direction by using a plurality of receiving units arranged along the second direction.
Optionally, the two-dimensional scanning method further comprises:
and providing the first electric signal to the transmitting assembly so that the transmitting assembly transmits the detection light wave to the outside according to the first electric signal.
Optionally, the two-dimensional scanning method further comprises:
and outputting a second electric signal converted by the receiving assembly according to the detection light wave returned from the outside.
Compared with the prior art, the method has the following beneficial effects:
the laser radar that this application embodiment provided includes: a transmitting component and a receiving component; the transmission assembly includes: at least one group of optical phased array OPAs, one group of OPAs comprising a plurality of OPA units arranged along a first direction; the receiving assembly comprises at least one group of receiving arrays, and each group of receiving arrays comprises a plurality of receiving units arranged along the second direction; the first direction is perpendicular to the second direction. The emitting component is used for emitting detection light waves to the outside and scanning in a first direction through a plurality of OPA units arranged along the first direction; the receiving assembly is used for collecting the detection light waves returned from the outside, and the light distribution in the second direction is distinguished through a plurality of receiving units arranged along the second direction. In the laser radar provided by the technical scheme of the application, the transmitting assembly can realize the scanning of the first direction through the one-dimensional OPA, and the receiving assembly can realize the resolution of the light beam in the second direction through the one-dimensional receiving array, so that the two-dimensional light beam scanning is realized. In the technical scheme, two-dimensional light beam scanning can be realized only by the light source with single wavelength, and a two-dimensional OPA unit is not required to be arranged, so that the volume and the quantity of consumables are greatly reduced, the cost is saved, and the process difficulty is reduced.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive exercise.
Fig. 1 is a schematic structural diagram of a laser radar according to an embodiment of the present disclosure;
fig. 2 is a schematic structural diagram of a laser radar according to a first implementation manner provided in an embodiment of the present application;
fig. 3 is a schematic structural diagram of a laser radar according to a second implementation manner provided in an embodiment of the present application;
fig. 4 is a schematic structural diagram of a laser radar according to a third implementation manner provided in an embodiment of the present application;
fig. 5 is a schematic structural diagram of a laser radar according to a fourth implementation manner provided in an embodiment of the present application;
fig. 6 is a flowchart of a two-dimensional scanning method according to an embodiment of the present application;
fig. 7 is a flowchart of another two-dimensional scanning method according to an embodiment of the present application.
Detailed Description
As described above, current lidar requires scanning in both the horizontal and vertical directions. The two-dimensional light beam scanning scheme implemented by the OPA technology is mainly divided into two types: one is to perform phased array in two dimensions to realize two-dimensional scanning; the other is scanning in one dimension by an optical phased array and the other by wavelength switching of the light source. Both of these solutions have the problems of high cost and large volume.
The inventor researches and provides a novel laser radar and a two-dimensional scanning method. In the technical scheme, two-dimensional light beam scanning can be realized only by the light source with single wavelength, and a two-dimensional OPA unit is not required to be arranged, so that the volume and the quantity of consumables are greatly reduced, the cost is saved, and the process difficulty is reduced.
In order to make the technical solutions of the present application better understood, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Fig. 1 is a schematic structural diagram of a laser radar according to an embodiment of the present application. As shown in fig. 1, the lidar includes a transmitting assembly and a receiving assembly. For the sake of convenience of the following description, two mutually perpendicular directions, i.e., a first direction (a direction indicated by an arrow s2 or a direction opposite to the direction indicated by s 2) and a second direction (a direction indicated by s1 or a direction opposite to the direction indicated by s 1) are illustrated in fig. 1. The transmitting assembly comprises a plurality of optical phased array OPA units which are arranged along a first direction. The receiving assembly comprises a plurality of receiving units arranged along the second direction.
The laser radar provided by the technical scheme can realize two-dimensional scanning. The most significant difference between the two-dimensional scanning mechanism and the two-dimensional scanning lidar in the prior art is the arrangement of the receiving component. In the laser radar, the transmitting assembly is used for transmitting a detection light wave to the outside, and the detection light wave is scanned in a first direction through a plurality of OPA units arranged along the first direction. And since the receiving assembly includes a plurality of receiving units arranged along the second direction, the distribution of light can be resolved in the second direction by the receiving units. That is, in the laser radar provided in the embodiment of the present application, the receiving assembly is configured to collect a detection light wave returned from the outside, and the light distribution in the second direction is resolved by the plurality of receiving units arranged along the second direction. And then the receiving units arranged in the second direction and the single-wavelength light source emitted by the emitting component can realize the two-dimensional scanning of the laser radar.
In the technical scheme, two-dimensional light beam scanning can be realized only by the light source with single wavelength, the two-dimensional OPA unit is not required to be arranged, and the receiving units arranged along the second direction are skillfully used for receiving the retroreflected laser, so that the volume and the number of consumables are greatly reduced, the cost is saved, and the process difficulty is also reduced. The requirement for the two-dimensional scanning function of the laser radar in various application scenes is met.
In the transmission subassembly, include: at least one group of optical phased array OPAs, wherein one group of OPAs comprises a plurality of OPA units arranged along a first direction; the receiving component comprises: and the receiving arrays comprise a plurality of receiving units arranged along the second direction.
The receiving array may be any one of:
frequency Modulated Continuous Wave (FMCW) arrays, Avalanche Photodiode (APD) arrays, or Single-Photon Avalanche Diode (SPAD) arrays.
When the receiving array is an FMCW array, the receiving unit is an FMCW unit. When the receiving array is an APD array, the receiving cells are APDs. When the array micro SPAD array is received, the receiving unit is a SPAD unit.
Several alternative implementations of lidar are described below:
referring to fig. 2, in a first implementation of the lidar, the transmit assembly includes a set of OPAs and the receive assembly includes a set of receive arrays.
Referring to fig. 3, in a second implementation of the lidar, the transmit assembly includes a set of OPAs and the receive assembly includes a plurality of sets of receive arrays; each group of receiving arrays in the plurality of groups of receiving arrays are arranged along the first direction.
Referring to fig. 4, in a third implementation of the lidar, the transmit assembly includes multiple sets of OPAs and the receive assembly includes a set of receive arrays; each of the plurality of sets of OPAs is arranged along the second direction.
Referring to fig. 5, in a fourth implementation of the lidar, the transmit assembly includes multiple sets of OPAs and the receive assembly includes multiple sets of receive arrays; each group of OPAs in the plurality of groups of OPAs are arranged along the second direction, and each group of receiving arrays in the plurality of groups of receiving arrays are arranged along the first direction.
In the lidar shown in fig. 4 and 5, the transmit assembly includes multiple sets of OPAs. The arrangement of multiple sets of OPAs in the emitting assembly enables the distribution of light in free space to be shortened in size in the second direction, and laser energy is more concentrated. In the lidar shown in fig. 3 and 5, the receive assembly includes multiple sets of receive arrays. The multiple groups of receiving arrays are arranged on the receiving assembly, so that light can be distinguished more finely, and more accurate detection results can be obtained.
In the laser radar provided by the embodiment of the application, the transmitting assembly and the receiving assembly can be respectively integrated on different chips. For example, the transmitting component is integrated on a first chip, and the first chip is used as a transmitting chip in the laser radar; the receiving component is integrated on a second chip, and the second chip is used as a receiving chip of the laser radar.
In order to achieve better two-dimensional scanning effect, a beam adjusting component can be arranged between the first chip and the second chip, so that the beam adjusting component shapes the beam on the optical transmission path. After the shaping, the receiving assembly arranged on the second chip can receive the light beam with better quality, so that the receiving unit can realize more accurate resolution capability. In some implementations, the beam adjustment assembly can include: a lens. The number of lenses and the specific parameters of the lenses are not limited herein.
In the laser radar provided by the embodiment of the application, the transmitting component and the receiving component can also be respectively integrated on the same chip. This is because the intrinsic materials of the transmit and receive components are the same (e.g., both silicon as intrinsic material) and therefore integration on the same chip is achievable. For example, the transmitting component and the receiving component are integrated on a third chip, and the third chip is used as both the transmitting chip and the receiving chip of the lidar. Through with transmitting assembly and receiving assembly integration on same chip, further reduced laser radar's chip size, promoted the integrated degree, be favorable to realizing more miniature laser radar.
In the laser radar provided in the above embodiment, the transmitting component is further configured to receive the first electrical signal, and specifically transmit the detection light wave to the outside according to the first electrical signal. I.e. the transmission assembly is electrically controlled, enabling the conversion of electrical signals into optical signals. The receiving component is also used for converting the collected detection light waves returned from the outside into second electric signals to be output. I.e. the receiving component is capable of converting an optical signal into an electrical signal.
The scheme realizes the solid-state laser radar, OPA is the best technology for realizing the long-distance all-solid-state light beam scanning, can be processed on a silicon wafer by a standard CMOS process, and has obvious advantages in reliability, cost and mass production. Only a single wavelength light source is needed to achieve two-dimensional beam scanning, and the chip array has a size of N (N OPA units, N being a positive integer) + S (S receiving units, where S can be set according to resolution requirements, e.g., S ═ N) instead of N2And the method has higher practicability, and reduces the process difficulty and the cost consumption.
In addition, due to the arrangement of the receiving assembly, when the FMCW unit is used as the receiving unit, the FMCW mode is adopted as the signal modulation mode, and the anti-interference capability and the sensitivity of laser radar detection are improved.
Based on the method provided by the foregoing embodiment, correspondingly, the present application further provides a two-dimensional scanning method. The method has particular application to any form of lidar provided in the preceding embodiments. Fig. 6 is a flowchart of a two-dimensional scanning method according to an embodiment of the present application.
The two-dimensional scanning method as shown in fig. 6 includes:
step 601: the detection light wave is emitted to the outside by the emitting component and is scanned in the first direction by the plurality of OPA units which are arranged along the first direction.
Step 602: and collecting the detection light wave returned from the outside by using the receiving assembly, and distinguishing the light distribution in the second direction by using a plurality of receiving units arranged along the second direction.
In the method, two-dimensional light beam scanning can be realized only by a light source with a single wavelength, and a two-dimensional OPA unit is not required to be arranged, so that the volume and the quantity of consumables are greatly reduced, the cost is saved, and the process difficulty is reduced.
Fig. 7 illustrates another two-dimensional scanning method. The two-dimensional scanning method shown in fig. 7 includes:
step 701: and providing the first electric signal to the transmitting assembly so that the transmitting assembly transmits the detection light wave to the outside according to the first electric signal.
By means of the first electrical signal, the transmitting function of the transmitting assembly is switched on. And the emission performance of the emission assembly is controlled by the first electrical signal.
Step 702: the detection light wave is emitted to the outside by the emitting component and is scanned in the first direction by the plurality of OPA units which are arranged along the first direction.
After the transmitting assembly receives the first electric signal, all OPA units in the transmitting assembly work to realize scanning of the laser radar in the first direction.
Step 703: and collecting the detection light wave returned from the outside by using the receiving assembly, and distinguishing the light distribution in the second direction by using a plurality of receiving units arranged along the second direction.
The larger the number of receiving units arranged in the second direction, the finer the scanning is achieved in the second direction.
Step 704: and outputting a second electric signal converted by the receiving assembly according to the detection light wave returned from the outside.
The receiving component converts the detection light wave into a second electric signal which can reflect the light intensity of the corresponding position. And a detection image of the scanned area can be formed according to the data of the second electric signal.
It should be noted that, in the present specification, all the embodiments are described in a progressive manner, and the same and similar parts among the embodiments may be referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the apparatus and system embodiments, since they are substantially similar to the method embodiments, they are described in a relatively simple manner, and reference may be made to some of the descriptions of the method embodiments for related points. The above-described embodiments of the apparatus and system are merely illustrative, and the units described as separate parts may or may not be physically separate, and the parts suggested as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.
The above description is only one specific embodiment of the present application, but the scope of the present application is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present application should be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims (14)

1. A lidar, comprising: a transmitting component and a receiving component;
the transmission assembly includes: at least one group of optical phased array OPAs, wherein one group of OPAs comprises a plurality of OPA units arranged along a first direction; the receiving component comprises: at least one group of receiving arrays, wherein one group of receiving arrays comprises a plurality of receiving units arranged along a second direction; the first direction is perpendicular to the second direction;
the emitting component is used for emitting detection light waves to the outside, and scanning is carried out in a first direction through the OPA units arranged along the first direction;
the receiving assembly is used for collecting detection light waves returned from the outside, and light distribution in the second direction is distinguished through the plurality of receiving units arranged along the second direction.
2. The lidar of claim 1, wherein the transmit assembly comprises a set of OPAs and the receive assembly comprises a set of receive arrays.
3. The lidar of claim 1, wherein the transmit assembly comprises a set of OPAs and the receive assembly comprises a plurality of sets of receive arrays;
each group of receiving arrays in the plurality of groups of receiving arrays are arranged along the first direction.
4. The lidar of claim 1, wherein the transmit assembly comprises a plurality of sets of OPAs and the receive assembly comprises a set of receive arrays;
each of the plurality of sets of OPAs is arranged along the second direction.
5. The lidar of claim 1, wherein the transmit assembly comprises a plurality of sets of OPAs and the receive assembly comprises a plurality of sets of receive arrays;
each group of OPAs in the plurality of groups of OPAs is arranged along the second direction, and each group of receiving arrays in the plurality of groups of receiving arrays is arranged along the first direction.
6. The lidar of claim 1, wherein the transmitting component is integrated on a first chip, the first chip being a transmitting chip in the lidar; the receiving component is integrated on a second chip, and the second chip is used as a receiving chip of the laser radar.
7. The lidar of claim 6, further comprising: a beam steering assembly disposed in an optical transmission path from the first chip to the second chip; the beam shaping component is used for shaping the beam on the optical transmission path.
8. The lidar of claim 7, wherein the beam steering assembly comprises: a lens.
9. The lidar of claim 1, wherein the intrinsic materials of the transmit and receive components are the same, and wherein the transmit and receive components are integrated on a third chip that functions as both a transmit chip and a receive chip of the lidar.
10. Lidar according to any of claims 1 to 9, wherein said receiving array is any of:
a frequency modulated continuous wave FMCW array, an avalanche photodiode APD array, or a single photon avalanche diode SPAD array.
11. Lidar according to any of claims 1 to 9,
the transmitting component is also used for receiving a first electric signal and specifically transmitting a detection light wave to the outside according to the first electric signal;
the receiving component is also used for converting the collected detection light waves returned from the outside into second electric signals to be output.
12. A two-dimensional scanning method, applied to the lidar according to any one of claims 1 to 11, the method comprising:
emitting a detection light wave to the outside by the emitting component, and scanning in a first direction by the plurality of OPA units arranged along the first direction;
and collecting the detection light wave returned from the outside by the receiving assembly, and distinguishing the light distribution in the second direction by the plurality of receiving units arranged along the second direction.
13. The method of claim 12, further comprising:
and providing a first electric signal to the transmitting assembly so that the transmitting assembly transmits the detection light wave to the outside according to the first electric signal.
14. The method of claim 12 or 13, further comprising:
and outputting a second electric signal converted by the receiving assembly according to the detection light wave returned from the outside.
CN202110866422.7A 2021-07-29 2021-07-29 Laser radar and two-dimensional scanning method Pending CN113589317A (en)

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CN115184903A (en) * 2022-09-09 2022-10-14 北京摩尔芯光半导体技术有限公司 Laser radar receiving and transmitting assembly and laser radar device
CN115184903B (en) * 2022-09-09 2022-11-29 北京摩尔芯光半导体技术有限公司 Laser radar receiving and transmitting assembly and laser radar device
CN116908812A (en) * 2023-09-14 2023-10-20 苏州旭创科技有限公司 Semi-solid laser radar system
CN116908812B (en) * 2023-09-14 2023-12-22 苏州旭创科技有限公司 Semi-solid laser radar system
CN117092619A (en) * 2023-10-18 2023-11-21 吉林大学 Coherent laser radar transceiver chip and preparation method
CN117092619B (en) * 2023-10-18 2024-01-12 吉林大学 Coherent laser radar transceiver chip and preparation method

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