CN117008089A - Optical transceiver based on planar waveguide chip and laser radar - Google Patents
Optical transceiver based on planar waveguide chip and laser radar Download PDFInfo
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- 230000010354 integration Effects 0.000 abstract description 5
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/484—Transmitters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/486—Receivers
- G01S7/4865—Time delay measurement, e.g. time-of-flight measurement, time of arrival measurement or determining the exact position of a peak
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- Computer Networks & Wireless Communication (AREA)
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- Radar, Positioning & Navigation (AREA)
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- Optical Radar Systems And Details Thereof (AREA)
Abstract
The application provides an optical transceiver based on a planar waveguide chip and a laser radar, wherein the optical transceiver is applied to the laser radar and comprises: a provided substrate; the planar waveguide chip comprises at least one receiving-transmitting waveguide structure, wherein the receiving-transmitting waveguide structure comprises a first waveguide structure for emitting laser and at least two second waveguide structures for receiving echoes, and the two sides of the first waveguide structure are respectively provided with the second waveguide structures. The application improves the problem that the scanning system of the laser radar has delay detection angles relative to the horizontal direction and the vertical direction of the target, improves the ranging performance of the laser radar, improves the integration level of the laser radar, improves the reliability, reduces the cost of the laser radar, improves the resolution capability of the laser radar to the target, and further improves the detection performance of the laser radar.
Description
Technical Field
The application belongs to the technical field of laser radar detection, and particularly relates to an optical transceiver device based on a planar waveguide chip and a laser radar.
Background
The 4D (Four Dimensional) perception sensor module that frequency modulation continuous wave (Frequency Modulated Continuous Wave, FMCW) laser radar possessed can range and speed simultaneously, can provide more environment target information in fields such as wisdom traffic, autopilot, auxiliary driving, navigation, survey and drawing, weather, aerospace, robot. Compared with a Time of flight (ToF) speed and distance measuring method, the FMCW laser detection and ranging radar (Light Detection and Ranging, liDAR) can obtain speed dimension information in 1 frame of detection data, so that an FMCW laser detection and distance measuring system can recognize objects in the environment more quickly and can transmit the objects to an information processing system at a faster speed so as to perform adaptive operation in advance.
Since light is transmitted in space in a time required for the vibrating mirror in the scanning module to vibrate periodically, and the scanning system with the two-dimensional MEMS (Micro-Electro-Mechanical System) vibrating mirror or the 2 one-dimensional MEMS vibrating mirrors has the condition of detecting light angle hysteresis in two directions, the laser radar with the two-dimensional MEMS vibrating mirror or the 2 one-dimensional MEMS vibrating mirrors can generate detecting light angle hysteresis in two directions, so that echo receiving efficiency is low, and detection performance of the laser radar is affected.
Disclosure of Invention
The embodiment of the application provides an optical transceiver device based on a planar waveguide chip and a laser radar, aiming at solving the problem that the laser radar with two-dimensional MEMS galvanometers or 2 one-dimensional MEMS galvanometers has low echo receiving efficiency due to the fact that the angle of detection light in two directions is lagged.
An embodiment of the present application provides an optical transceiver device based on a planar waveguide chip, which is applied to a laser radar, and includes:
a substrate;
the planar waveguide chip is arranged on the upper surface of the substrate and comprises at least one receiving-transmitting waveguide structure, the receiving-transmitting waveguide structure comprises a first waveguide structure used for transmitting laser and at least two second waveguide structures used for receiving echoes and outputting the echoes, and the second waveguide structures are arranged on two sides of the first waveguide structure.
In one of the embodiments of the present application,
at least one second waveguide structure in the same transceiver waveguide structure has a preset inclination angle relative to the first waveguide structure.
In one of the embodiments of the present application,
the preset inclination angle is less than or equal to 0.1 degree.
In one of the embodiments of the present application,
the first waveguide structure is a single-mode waveguide structure;
Each second waveguide structure is at least one waveguide structure of a multimode-to-single mode waveguide structure, a large-mode-to-single mode waveguide structure, a few-mode-to-single mode waveguide structure and a single-mode waveguide structure.
In one of the embodiments of the present invention,
the distance between the output end of the first waveguide structure and the input end of the adjacent second waveguide structure is K, wherein K is equal to or less than 0.1 XW and equal to or less than 0.2 XW, and W is the waveguide width of the first waveguide structure.
In one of the embodiments of the present invention,
the planar waveguide chip comprises a plurality of the receiving-transmitting waveguide structures, and the receiving-transmitting waveguide structures are arranged in an array mode.
In one of the embodiments of the present invention,
each of the transceiver waveguide structures of the array layout is arranged in a periodic manner, wherein a spacing between adjacent transceiver waveguide structures is greater than or equal to one half of a waveguide width of the first waveguide structure.
In one of the embodiments of the present invention,
the optical transceiver further comprises a transceiver lens, and the transceiver lens is arranged at the transmitting end of the first waveguide structure in the transceiver waveguide structure.
In one of the embodiments of the present invention,
the receiving and transmitting lens meets a first preset condition, and the first preset condition is that:
The diameter of the echo light spot in the first target distance is larger than X times of the diameter of the single-mode waveguide of the first waveguide structure, wherein X is larger than or equal to 1.0 and smaller than or equal to 2.0, and the first target distance is smaller than or equal to 100m.
In one of the embodiments of the present invention,
the receiving and transmitting lens also meets a second preset condition, and the second preset condition is that:
f-δf≦L 1 either +.f+δf, or L 2 ＝f；
Wherein L is 1 The first lens distance is a vertical distance between the end face of the transmitting end of the first waveguide structure and the center of the receiving-transmitting lens in the receiving-transmitting waveguide structure, and the receiving-transmitting lens at the first lens distance is used for receiving echoes of a first target distance;
L 2 the second lens distance is a vertical distance between the end face of the transmitting end of the first waveguide structure and the center of the receiving-transmitting lens in the receiving-transmitting waveguide structure, and the receiving-transmitting lens at the second lens distance is used for receiving echoes of a second target distance;
f is the focal length of the receiving and transmitting lens;
δf is the defocus distance.
In one of the embodiments of the present invention,
the second target distance >100m;
f>1mm；
in one of the embodiments of the present invention,
the transceiver lens is matched with at least one transceiver waveguide structure to form a lens transceiver field of view.
A second aspect of an embodiment of the present application provides a lidar, including: the optical transceiver of any one of the first aspects, comprising a laser emitting module, a scanning module, a plurality of detection modules, a signal processing module, and a plurality of spliced together;
the laser emission module is used for outputting laser, splitting the laser to obtain N paths of laser and M paths of local oscillation light, respectively transmitting the N paths of laser to the optical transceiver modules, respectively transmitting the M paths of laser to the detection modules, wherein M, N is a positive integer, N is not less than 2, and M is not less than 2;
the optical transceiver is used for accessing each path of laser and transmitting each path of laser to the scanning module respectively;
the scanning module is used for accessing each path of laser and emitting each path of laser to a target for scanning, and the scanning module is also used for receiving echoes reflected by the target;
the optical transceiver is further configured to access the echoes transmitted by the scanning module, and transmit the echoes to the corresponding detection modules respectively;
the detection module comprises M detection units, each detection unit is connected with one path of local oscillation light in M paths, and is used for connecting the echo output by the corresponding optical transceiver, and mixing the echo with one path of local oscillation light to obtain a corresponding beat frequency electric signal;
The signal processing module is used for accessing each beat frequency electric signal and processing the beat frequency electric signals to obtain detection information of the target.
It will be appreciated that the advantages of the second aspect may be found in the relevant description of the first aspect, and will not be described in detail herein.
Compared with the prior art, the embodiment of the application has the beneficial effects that:
the embodiment of the application provides an optical transceiver based on a planar waveguide chip, which is applied to a laser radar, because the time that laser is reflected after meeting a target from output is detected, a delay angle is formed by a vibrating mirror in a scanning module, so that the echo after the reflection of the target is different from an optical path of the laser emission, the echo reflected by the vibrating mirror with the delay angle is imaged on the left side or the right side of a first waveguide structure after passing through a transceiver lens, the first waveguide structure for emitting laser and the transceiver waveguide structures formed by at least two second waveguide structures for receiving the echo are packaged on the upper surface of a substrate to form the planar waveguide chip, and the two sides of the first waveguide structure in the transceiver waveguide structure are respectively provided with the second waveguide structures, so that the arrangement direction of the first waveguide structure and the second waveguide structure in the transceiver waveguide structure corresponds to the vibration direction of the vibrating mirror on an optical path, and the two directions of the two sides of the second waveguide structure can compensate and receive partial echo signals lost due to the delay angle of the vibrating mirror, thereby improving the efficiency of receiving echo signals of the laser radar and improving the detection performance of the laser radar.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments or the description of the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic view of a 45 ° view angle of an optical transceiver device based on a planar waveguide chip according to an embodiment of the present application;
fig. 2 is a schematic view of a 45 ° view angle of another optical transceiver device based on a planar waveguide chip according to an embodiment of the present application;
fig. 3 is a schematic top view of a 1 st optical transceiver based on a planar waveguide chip according to an embodiment of the present application;
fig. 4 is a schematic top view of a 2 nd optical transceiver based on a planar waveguide chip according to an embodiment of the present application;
fig. 5 is a schematic top view of a 3 rd optical transceiver device based on a planar waveguide chip according to an embodiment of the present application;
fig. 6 is a schematic top view of a 4 th optical transceiver device based on a planar waveguide chip according to an embodiment of the present application;
Fig. 7 is a schematic top view of a fifth optical transceiver device based on a planar waveguide chip according to an embodiment of the present application;
fig. 8 is a schematic top view of a planar waveguide chip-based optical transceiver device of a 6 th embodiment of the present application;
FIG. 9 is a schematic side view of an optical transceiver device based on a planar waveguide chip according to an embodiment of the present application;
fig. 10 is a schematic top view of a transmitting-receiving lens disposed at a transmitting end of an optical transceiver device based on a planar waveguide chip according to an embodiment of the present application;
FIG. 11 is a schematic top view of a transmitting-receiving lens disposed at a transmitting end of another optical transceiver device based on a planar waveguide chip according to an embodiment of the present application;
fig. 12 is a schematic structural diagram of a lidar according to an embodiment of the present application.
The reference numerals:
1. a laser emitting module; 2. an optical transceiver; 3. a scanning module; 4. a detection module;
21. a substrate; 22. a planar waveguide chip; 221. a first waveguide structure; 222. a second waveguide structure;
23. and a transmitting/receiving lens.
Detailed Description
In the following description, for purposes of explanation and not limitation, specific details are set forth such as the particular system architecture, techniques, etc., in order to provide a thorough understanding of the embodiments of the present application. It will be apparent, however, to one skilled in the art that the present application may be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known systems, devices, modules, circuits, and methods are omitted so as not to obscure the description of the present application with unnecessary detail.
It should be understood that the terms "comprises" and/or "comprising," when used in this specification and the appended claims, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
Furthermore, the terms "first," "second," "third," and the like in the description of the present specification and in the appended claims, are used for distinguishing between descriptions and not necessarily for indicating or implying a relative importance.
Reference in the specification to "one embodiment" or "some embodiments" or the like means that a particular feature, structure, or characteristic described in connection with the embodiment is included in one or more embodiments of the application. Thus, appearances of the phrases "in one embodiment," "in some embodiments," "in other embodiments," and the like in the specification are not necessarily all referring to the same embodiment, but mean "one or more but not all embodiments" unless expressly specified otherwise. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless expressly specified otherwise.
The technical scheme of the application is described below through specific examples.
The scanning module provided by the embodiment of the application comprises a galvanometer (also called as a scanning galvanometer), wherein the galvanometer comprises a mechanical galvanometer and a MEMS (Micro-Electro-Mechanical System, micro-electromechanical system) galvanometer, and the MEMS galvanometer can comprise, but is not limited to, a one-dimensional MEMS galvanometer and a two-dimensional MEMS galvanometer.
In one embodiment, the scanning module comprises a mechanical galvanometer or a one-dimensional MEMS galvanometer, the mechanical galvanometer and the one-dimensional MEMS galvanometer can reflect the laser beam emitted to the reflecting mirror to a horizontal view field which is in a horizontal direction relative to the target, or reflect the laser beam emitted to the reflecting mirror to a vertical view field which is in a vertical direction relative to the target, and the scanning module with the mechanical galvanometer and the one-dimensional MEMS galvanometer can realize scanning detection on a certain view field angle.
The laser is output from the laser emission module and passes through the optical transceiver, is emitted to the target through the mechanical galvanometer or the one-dimensional MEMS galvanometer in the scanning module, and the echo signal reflected from the target passes through the scanning module and is transmitted to the detection module from the optical transceiver. In the transmission time of laser emitted by the laser radar from the emission to the target and then reflected back from the target, the mechanical galvanometer or the one-dimensional MEMS galvanometer in the scanning module forms a certain angle in the direction of one dimension, so that the hysteresis angle of the mechanical galvanometer or the one-dimensional MEMS galvanometer in the direction of one dimension is formed. The lag angle of the mechanical vibrating mirror or the one-dimensional MEMS vibrating mirror in the dimension direction enables the reflected echo signals not to return to the optical transceiver along the reverse optical path of the emergent optical path, so that the echoes reflected by the target cannot be efficiently received by the same receiving waveguide on the optical transceiver, and the detection performance of the laser radar is affected.
In another embodiment, the scanning module comprises a two-dimensional MEMS galvanometer, the two-dimensional MEMS galvanometer comprises a first shaft and a second shaft, the first shaft and the second shaft are perpendicular to each other, the first shaft drives a reflecting mirror in the scanning galvanometer to vibrate, and laser beams emitted to the reflecting mirror can be reflected to a horizontal view field in a horizontal direction relative to a target; the second shaft drives the reflecting mirror in the scanning vibrating mirror to vibrate, so that the laser beam emitted to the reflecting mirror is reflected to a vertical view field in a vertical direction relative to the target, and the reflecting mirror can realize scanning detection of a certain view field angle under the combined driving action of the first shaft and the second shaft.
In yet another embodiment, when the scanning module includes two one-dimensional MEMS galvanometers, optical axes of the two one-dimensional MEMS galvanometers are perpendicular to each other, one of the one-dimensional MEMS galvanometers can reflect the laser beam emitted to the reflector onto a horizontal field of view in a horizontal direction with respect to the target; the other one-dimensional MEMS galvanometer reflects the laser beam emitted to the reflector to a vertical view field in a vertical direction relative to the target, and the scanning module can realize scanning detection of a certain view field angle under the combined action of the two one-dimensional MEMS galvanometers.
When the scanning module comprises a two-dimensional MEMS galvanometer or two one-dimensional MEMS galvanometers, laser is output from the laser transmitting module and passes through the optical transceiver, the laser is emitted to a target through the two-dimensional MEMS galvanometer or the two one-dimensional MEMS galvanometers in the scanning module, and echo signals reflected from the target pass through the scanning module and are transmitted to the detection module from the optical transceiver. In the transmission time of laser emitted by the laser radar from the emission to the target and then reflected back from the target, the two-dimensional MEMS galvanometer or the two one-dimensional MEMS galvanometers in the scanning module form a certain angle during the periodic vibration in two vertical directions, so that the lag angle of the two-dimensional MEMS galvanometer or the two one-dimensional MEMS galvanometers in the vertical directions and the horizontal directions relative to the target is formed. The lag angle of the two-dimensional MEMS galvanometer or the two one-dimensional MEMS galvanometers in two directions enables reflected echo signals not to return to the optical transceiver along the reverse optical path of the emergent optical path, so that echoes reflected by the target cannot be simultaneously and efficiently received by the same receiving waveguide structure on the optical transceiver, wherein the lag angle of the galvanometer in the horizontal direction relative to the target is larger than the lag angle in the vertical direction relative to the target, thereby causing the overall receiving efficiency of the echoes to be low and further affecting the detection performance of the laser radar.
As shown in fig. 1 and 2, a first aspect of the present embodiment provides an optical transceiver 2 based on a planar waveguide chip, which is applied to a laser radar, and includes:
a substrate 21 provided;
the planar waveguide chip 22 is disposed on the substrate 21, and the planar waveguide chip includes at least one transceiver waveguide structure, and the transceiver waveguide structure includes a first waveguide structure 221 for emitting laser light and at least two second waveguide structures 222 for receiving echoes and outputting the echoes, and the second waveguide structures 222 are disposed on both sides of the first waveguide structure 221.
In this embodiment, a transceiver waveguide structure formed by a first waveguide structure 221 for emitting laser and at least two second waveguide structures 222 for receiving echoes is encapsulated on the upper surface of a substrate 21 to form a planar waveguide chip 22, and the two sides of the first waveguide structure 221 in the transceiver waveguide structure are provided with the second waveguide structures 222, so that the arrangement directions of the first waveguide structure 221 and the second waveguide structure 222 in the transceiver waveguide correspond to the vibration directions of the vibrating mirrors on the light path, and the second waveguide structure 222 can compensate and receive partial echo signals lost due to the lag angle of the vibrating mirrors on the left side and the right side of the first waveguide structure 221, thereby improving the efficiency of receiving echo signals by the laser radar and improving the detection performance of the laser radar.
In particular, the substrate 21 has a function of mechanical support, and the substrate material may be any of silicon dioxide, silicon, and a transparent polymer, or may be other infrared-transmitting materials. The planar waveguide chip 22 is disposed on the upper surface of the substrate 21, where the planar waveguide chip 22 is formed by at least one transceiver waveguide structure, each transceiver waveguide structure includes a first waveguide structure 221 and at least two second waveguide structures 222, where the lasers output laser beams with the same wavelength or different wavelengths to the first waveguide structure 221, and emit the laser beams through the first waveguide structure 221, the direction of the optical path of the laser beam emission is shown in fig. 3, the second waveguide structures 222 on two sides of the first waveguide structure 221 are used to receive the echoes reflected by the target from the emitted laser beams, and the direction of the optical path of the received echoes is shown in fig. 3.
The first waveguide structure 221 and the at least two second waveguide structures 222 in one transceiving waveguide structure can be regarded as a channel for transceiving, the at least two second waveguide structures 222 are respectively arranged at two sides of the first waveguide structure 221, optionally, one second waveguide structure 222 is arranged at one side of the first waveguide structure 221, and at least one second waveguide structure 222 is arranged at the other side of the first waveguide structure 221.
Only 1 transceiving waveguide structure is a single-channel transceiving waveguide structure, and the single-channel transceiving waveguide structure is distributed in the middle of the upper surface of the substrate 21 to form a planar waveguide chip 22; when there are 2 or more transceiver waveguide structures, the array of the multi-channel transceiver waveguide structures is formed, and the planar waveguide chip 22 is formed by arranging the 2 or more transceiver waveguide structures in an array manner. The receiving-transmitting waveguide structure forms the planar waveguide chip 22, and then the planar waveguide chip 22 and the substrate 21 are packaged together, so that the transmitting component and the receiving component are integrally packaged, the integration level of the laser radar is improved, and the reliability is improved.
In one embodiment, the first waveguide structure 221 is a single-mode waveguide structure, the waveguide widths of the input end and the output end of the single-mode waveguide structure are the same, the input and output directions of the optical path of laser emission are as shown in fig. 3, so that the laser energy emitted conveniently concentrates power, the emitted angular power is increased, the area of an emitted light spot is reduced, and the resolution of the laser radar is improved. Each second waveguide structure 222 is at least one waveguide structure of a multimode to single mode waveguide structure, a large mode to single mode waveguide structure, a few mode to single mode waveguide structure, and a single mode waveguide structure. For example, the second waveguide structure 222 disposed at one side of the first waveguide structure 221 is a multimode to single mode waveguide structure, and the second waveguide structure 222 disposed at the other side of the first waveguide structure 221 is a large mode to single mode waveguide structure. The waveguide structure of the second waveguide structure 222 may be arbitrarily selected according to the ranging performance and resolution requirements of the lidar. Taking the multimode single-mode waveguide structure as an example, the multimode single-mode waveguide structure comprises an input end of the multimode waveguide structure and an output end of the single-mode waveguide structure, the input and output directions of an optical path for receiving the echo are shown in fig. 3, the waveguide width of the multimode single-mode waveguide structure is gradually reduced from the input end of the multimode waveguide structure to the output end of the single-mode waveguide structure, the waveguide width of the output end of the single-mode waveguide structure in the multimode single-mode waveguide structure is the same as the waveguide width of the output end of the single-mode waveguide structure, the input end of the multimode waveguide structure in the multimode single-mode waveguide structure is beneficial to increasing the receiving caliber of the echo, and the echo is output through the second waveguide structure 222 after being incident on the planar waveguide chip 22.
As shown in fig. 3, 4 and 5, in one embodiment, the first waveguide structure 221 and the second waveguide structures 222 on both sides of each transceiver waveguide structure can be closely arranged, and also can be arranged at a preset interval, preferably, the interval between the output end of the first waveguide structure 221 and the input end of the second waveguide structure 222 on both sides is K, where 0.1×w+.k+.0.2×w, W is the waveguide width of the first waveguide structure 221.
In one embodiment, the spacing K between the output end of the first waveguide structure 221 and the input end of the second waveguide structure 222 is 1 μm.
In one embodiment, the second waveguide structure 222 can be further disposed as a plurality of second waveguide structures 222 on either side of the first waveguide structure 221, or the second waveguide structure 222 is disposed as a plurality of second waveguide structures 222 on both sides of the first waveguide structure 221, and a space between input ends of each second waveguide structure 222 is K, where 0.1×w+.k+.0.2×w, W is a waveguide width of the first waveguide structure 221.
In one embodiment, the number of the plurality of second waveguide structures 222 located at either side of the first waveguide structure 221 may be 2, 3, 4, 5, or the number of the plurality of second waveguide structures 222 located at both sides of the first waveguide structure 221 may be two, three, four, five. Because the output end of the first waveguide structure 221 and the input end of the second waveguide structure 222 in the same transceiver waveguide structure are arranged at a relatively short distance, the first waveguide structure 221 in the transceiver waveguide structure can output laser, the second waveguide structure 222 can receive echo and output the echo, and the function of a space optical circulator can be realized, so that the space optical circulator can be omitted, the integration level and the reliability are improved, and the volume and the cost of the laser radar are reduced.
As shown in fig. 6 and fig. 7, in an embodiment, taking the second waveguide structure 222 as an example of a multimode-to-single mode waveguide structure, a plurality of transceiver waveguide structures are arranged according to a periodic array to form the planar waveguide chip 22, or each transceiver waveguide structure is arranged irregularly to form the planar waveguide chip 22, so that the transceiver field of view and the direction of each path can be adjusted in a targeted manner according to the requirement of the laser radar, and the measurement accuracy of the laser radar is improved. The pitch between the transceiver waveguide structures is greater than or equal to one half the width of the first waveguide structure 221. Optionally, a spacing between an input end of a multimode waveguide structure in a transceiver waveguide structure and an output end of a single mode waveguide structure in an adjacent another transceiver waveguide structure is greater than or equal to 3 μm.
Since the second waveguide structures 222 at two sides of the first waveguide structure 221 are offset at a distance in two directions relative to the whole first waveguide structure 221, the arrangement directions of the first waveguide structure 221 and the second waveguide structure 222 in the transceiver waveguide correspond to the vibration direction of the vibrating mirror on the light path, and the lost echo signals can be compensated and received by the input ends of the multimode waveguide structures in the plurality of second waveguide structures 222 after offset due to the lag angle of the vibrating mirror, the receiving efficiency of the echo signals is improved, the problem that part of echo signals are lost due to the lag of the detection light angle of the laser radar is effectively improved, and the detection performance of the laser radar is further improved.
As shown in fig. 9, the first waveguide structure 221 and the second waveguide structure 222 are located on the same plane parallel to the substrate 21, so that the manufacturing and production are facilitated, and meanwhile, the first waveguide structure 221 and the second waveguide structure 222 are located on the same plane, so that the influence caused by the angle hysteresis effect of the probe light is improved, the planar waveguide chip has the advantages of small size and low manufacturing cost, and the production efficiency of the planar waveguide chip can be improved.
Further, in one embodiment, as shown in fig. 5 and 8, the first waveguide structure 221 and the second waveguide structures 222 on both sides are located on the same plane parallel to the substrate 21, and at least one second waveguide structure 222 on both sides of the first waveguide structure 221 has a preset inclination angle with respect to the first waveguide structure 221. According to the principle of the lag effect of the scanning receiving angle and the structural arrangement of the laser radar scanning module, the specific angle of the lag angle of the vibrating mirror can be obtained, and the angle of the preset dip angle is equal to the lag angle of the vibrating mirror when the detection laser of the scanning module emits to the furthest target and then reflects the echo, so that the echo signal can be further received by the input end of the second waveguide structure 222, the receiving efficiency of the echo signal of the distant target is improved, and the detection performance of the laser radar is improved. Optionally, the predetermined inclination angle is less than or equal to 0.2 degrees. The degree of the specific preset inclination angle is set according to the hysteresis angle of the vibrating mirror when the laser radar detects the most distant target to reflect the echo, and further, the preset inclination angle is set to be less than or equal to 0.1 degree.
As shown in fig. 10 and 11, in one embodiment, the optical transceiver 2 further includes a transceiver lens 23, where the transceiver lens 23 is disposed at a transmitting end of the first waveguide structure 221 in the transceiver waveguide structure, so that the first waveguide structure 221 and the plurality of second waveguide structures 222 of each transceiver waveguide structure in the planar waveguide chip share one transceiver lens 23, that is, the transmitting optical path and the receiving optical path adopt the same optical path, which reduces hardware configuration of the laser radar and reduces cost of the laser radar.
In one embodiment, the transceiver lens 23 satisfies a first preset condition, the first preset condition being:
the diameter of the echo light spot within the first target distance is larger than X times the diameter of the single-mode waveguide structure of the first waveguide structure 221, and 1.0 +.x +.2.0, optionally, the diameter of the echo light spot within the first target distance is set to be larger than 1.4 times the diameter of the single-mode waveguide structure in the first waveguide structure 221, and the specific multiple is set according to the ranging performance of the laser radar.
In another embodiment, the transceiver lens 23 further satisfies a second preset condition, where the second preset condition is:
f-δf≦L 1 either +.f+δf, or L 2 ＝f。
Wherein L is 1 The first lens distance is a perpendicular distance between the transmitting end face of the first waveguide structure 221 and the center of the transceiver lens in the planar waveguide chip, and the transceiver lens at the first lens distance is used for receiving the echo reflected by the target within the first target distance.
L 2 The second lens distance is a perpendicular distance between the transmitting end face of the first waveguide structure 221 and the center of the transceiver lens in the planar waveguide chip, and the transceiver lens at the second lens distance is used for receiving the echo reflected by the target in the second target distance.
f is the focal length of the transceiver lens 23.
δf is the defocus distance.
In some embodiments, as shown in fig. 10 and 11, when the transceiver lens 23 disposed at the transmitting end of the first waveguide structure 221 of the transceiver waveguide structures is a single transceiver collimating lens, that is, one corresponding transceiver collimating lens is disposed on each planar waveguide chip 22, and the transceiver lens 23 is disposed at a mounting position corresponding to the planar waveguide chip 22, where the mounting position of the transceiver lens satisfies the first lens distance L 1 Or satisfy the first lens distance L 2 . For the plurality of planar waveguide chips 22, the position of the corresponding transmit-receive collimating lens set by each planar waveguide chip 22 is set according to the range performance and resolution requirements of the laser radar, or the first lens distance L is satisfied 1 Or satisfy the first lens distance L 2 。
In one embodiment, the transceiver lens 23 is a lens group, that is, each planar waveguide chip 22 is provided with a plurality of corresponding transceiver lenses 23, and when the target is located within the first target distance, the light reflected by the target is approximately parallel light, and is provided with The mounting position of the transceiver lens 23 is such that the imaging distance of the echo reflected by the object is slightly smaller than or slightly larger than the focal length, so that the mounting position of the transceiver lens for receiving the echo reflected by the object within the first object distance is in an out-of-focus position, i.e. the mounting position of a part of the transceiver lenses in the transceiver lens group satisfies the first lens distance L 1 . The mounting position of a part of the transmitting/receiving lenses 23 in the transmitting/receiving lens group can also satisfy the first lens distance L 2 The transceiver lens 23 in the focal position is configured to receive echoes reflected back from objects located within a second object distance.
Since the interval time between the laser emission and the echo is short when the target is located within the first target distance, the angle formed by the periodic vibration of the vibrating mirror in the interval time is small, so that the hysteresis angle of the vibrating mirror is small, the efficiency of receiving the echo by the second waveguide structure 222 is high, and the intensity of the echo reflected by the target meets the energy threshold requirement of the detector. The first preset condition is set to be that the diameter of the echo light spot in the first target distance is larger than 1.4 times of the diameter of the single-mode waveguide structure in the first waveguide structure 221, so that the deflected light spot can be partially received by the second waveguide structure 222 beside the first waveguide structure 221, the echo receiving efficiency is improved, the ranging performance of the target in the first target distance is improved, and the detection capability of the laser radar on the target in the first target distance is improved.
When the target is located in the second target distance, the target is located in a larger distance from the laser radar than the first target distance, so that the intensity of echo signals reflected by the target is lower than that of echo signals reflected by the target in the first target distance, the installation position of the receiving and transmitting lens for receiving echoes reflected by the target in the second target distance is set at a focusing position, and the imaging distance of echoes reflected by the target is a focal length so as to enhance the energy intensity of echo signals. Meanwhile, as the target is located in the second target distance, the lag angle of the vibrating mirror caused by the detection light lag angle effect is larger than that of the vibrating mirror of the target located in the first target distance, and the mounting position of the receiving and transmitting lens is arranged at the focusing position, so that the echo signal is favorably received by the second waveguide structure, the echo receiving efficiency is improved, the ranging performance of the target in the first target distance is further improved, and the detection capability of the laser radar on the target in the second target distance is improved.
In some embodiments, the transceiver lens 23 includes a plurality of transceiver lenses and forms a transceiver lens group, and a second lens distance L of a portion of the transceiver lenses may be set 2 Setting a first lens distance L of another part of the receiving and transmitting lenses 1 Either +.f+δf or a first lens distance L of another part of the receiving and transmitting lens is set 1 And f- δf. Preferably, the first target distance is less than or equal to 100m, and the second target distance>100m，f>1mm，Preferably, the focal length f can be set to any one of 18mm, 20mm, 30mm, 50mm, or 100 mm; preferably, the width of the planar waveguide chip is less than or equal to 2mm, the diameter of the transceiver lens 23 is less than or equal to 20mm, and the specific parameter setting is not limited to the above range, and is set according to the detection requirement of the laser radar in practical implementation.
In one embodiment, each transceiver lens 23 is matched to at least one transceiver waveguide structure to form a lens transceiver field of view. The transceiver lens 23 and the transceiver waveguide structure can form a monoscopic transceiver channel, and can also form a multi-field transceiver channel. Because the optical transceiver device 2 based on the planar waveguide chip is adopted, the optical hysteresis effect of detection can be effectively improved, so that a transceiver lens is matched with a transceiver waveguide structure to form a monoscopic transceiver channel so as to form a lens transceiver field, or a transceiver lens group is matched with a plurality of transceiver waveguide structures to form a multi-field transceiver channel so as to form a lens transceiver field, or a transceiver lens group is matched with a planar waveguide chip with a transceiver waveguide structure to form a monoscopic transceiver channel so as to form a lens transceiver field, or a transceiver lens group is matched with a planar waveguide chip with a plurality of transceiver waveguide structures to form a multi-field transceiver channel so as to form a lens transceiver field.
For example, if a single transceiver lens pairs m transceiver waveguide fields of view, n transceiver lenses can form n×m transceiver field of view channels, where n×m transceiver field of view channels are formed by splicing n lens transceiver fields of view, where m and n are positive integers, m is equal to or greater than 1, and n is equal to or greater than 1. The greater the number of transceiving waveguide structures contained in each lens transceiving field of view, the higher the resolution of the lens transceiving field of view scanning area, and the more lens transceiving fields of view are combined, the higher the resolution, the lower the resolution or the combination of higher and lower resolution is adopted for scanning when any region of interest (Region Of Interest, ROI) is scanned.
The laser radar in the prior art needs to use a free space optical circulator, but the free space optical circulator has high cost, and the mode of receiving, transmitting and separating installation has the problem of insufficient reliability under the extreme temperature environment of a vehicle-mounted scene.
Compared with the prior art, the embodiment has the beneficial effects that:
the embodiment of the application provides an optical transceiver based on a planar waveguide chip, which is applied to a laser radar, because the time that laser is reflected after meeting a target from output is detected, a delay angle is formed by a vibrating mirror in a scanning module, so that the echo after the reflection of the target is different from an optical path of laser emission, the echo reflected by the vibrating mirror with the delay angle is imaged on the left side or the right side of a first waveguide structure after passing through a transceiver lens, the transceiver waveguide structure formed by the first waveguide structure for emitting laser and at least two second waveguide structures for receiving the echo is packaged on the upper surface of a substrate to form the planar waveguide chip, and the two sides of the first waveguide structure in the transceiver waveguide structure are respectively provided with the second waveguide structure, so that the arrangement direction of the first waveguide structure and the second waveguide structure in the transceiver waveguide structure corresponds to the fast axis vibration direction of the vibrating mirror on the optical path, and the two directions of the two sides of the second waveguide structure can compensate and receive partial echo signals lost due to the delay angle of the vibrating mirror, thereby improving the efficiency of receiving echo signals of the laser radar and improving the detection performance of the laser radar.
As shown in fig. 12, a second aspect of an embodiment of the present application provides a lidar, including: a laser emitting module 1, a scanning module 3, a plurality of detecting modules 4, a signal processing module (not shown in the figure), and a plurality of optical transceiver devices 2 according to any one of the first aspects, which are spliced together;
the laser emission module 1 is used for outputting laser, splitting the laser to obtain N paths of laser and M paths of local oscillation light, respectively transmitting the N paths of laser to each optical transceiver 2, and respectively transmitting the M paths of local oscillation light to each detection module 4, wherein M, N is a positive integer, N is not less than 2, and M is not less than 2;
the optical transceiver 2 is used for accessing each path of laser and transmitting each path of laser to the scanning module 3 respectively;
the scanning module 3 is used for accessing each path of laser and emitting each path of laser to a target for scanning, and the scanning module 3 is also used for receiving echoes reflected by the target;
the optical transceiver 2 is further used for accessing the echoes transmitted by the scanning module 3 and transmitting the echoes to the corresponding detection modules 4 respectively;
the detection module 4 comprises M detection units (not shown in the figure), each detection unit is connected with one local oscillation light in M paths, and is used for connecting an echo output by the corresponding optical transceiver 2 and mixing the echo with the connected local oscillation light to obtain a corresponding beat frequency electric signal;
The signal processing module is used for accessing each beat frequency electric signal and processing the beat frequency electric signals to obtain detection information of the target.
In one embodiment, as shown in fig. 12, the optical transceiver 2 includes a planar waveguide chip 22 and a transceiver lens 23; the scanning module 3 comprises a galvanometer. When the laser radar detects a target, the laser emitting module 1 outputs laser, splits the laser to obtain N paths of laser and M paths of local oscillation light, and respectively transmits the N paths of laser to the first waveguide structures 221 of the optical transceiver devices 2 to serve as emitting paths, and simultaneously respectively transmits the M paths of local oscillation light to the detection modules 4, wherein M, N is a positive integer, N is equal to or greater than 2, and M is equal to or greater than 2.
In one embodiment, N laser beams are transmitted to each optical transceiver 2, and each optical transceiver 2 is further split into each first waveguide 221 as an emission path. When multiple laser beams of N laser beams are transmitted to the same optical transceiver 2, and each optical transceiver 2 corresponds to the detection module 4, the detection module 4 includes multiple detection units, and M Lu Benzhen light is transmitted to one detection unit of the detection module 4, so that the value of N and the value of M may not be equal, for example, as shown in fig. 12, n=4, and m=3. Since the lens transceiving fields formed by matching the optical transceiving device 2 with the transceiving lens 23 are to be subjected to field stitching, the field stitching requires at least 2 transceiving lens transceiving fields, and each optical transceiving device 2 corresponds to one detection module 4, and the detection modules 4 comprise a plurality of detection units, N, M is larger than 2.
After the first waveguide structure 221 in each optical transceiver 2 emits laser, the laser is converted into parallel light through the collimating transceiver lens 23, the scanning module 3 is connected with the parallel light, and the parallel light is emitted to a target through the vibrating mirror of the scanning module 3 for scanning, so that detection of the target around the laser radar is realized.
The laser emitted by the first waveguide structure 221 in each optical transceiver 2 encounters the target and then is reflected to form an echo, the scanning module 3 receives the echo reflected by the target, at this time, the vibrating mirror of the scanning module 3 forms an angle in periodic vibration, the echo is transmitted back from the vibrating mirror with a lag angle, and after passing through the transceiver lens 23, the echo enters the input end of the second waveguide structure 222 with an integral offset distance between the two sides of the first waveguide structure 221 in the optical transceiver 2, so that the receiving efficiency of the echo is improved. The optical transceiver 2 transmits the echoes to the corresponding detection units of the detection module 4, and the output end of the second waveguide structure 222 is correspondingly connected with one detection unit.
The detection unit of the detection module 4 is connected to the echo output by the second waveguide structure 222 in the corresponding optical transceiver 2, and mixes each echo with one local oscillation light connected to the echo to obtain a corresponding beat frequency electric signal. The signal processing module is connected with each beat frequency electric signal and processes the beat frequency electric signals to obtain detection information of the target.
Optionally, the detection information includes at least one of three-dimensional distance information, speed information, azimuth information, shape information, and reflectivity information.
Since the laser emitted by the first waveguide structure 221 in the plurality of optical transceiver devices 2 is transmitted to the reflection area of the galvanometer from each angle, so as to form the splice of the large-angle receiving view field, after the detection laser with large angle and high density is emitted to the target, more echo signals can be reflected back at large angle, more echo signals can obtain denser point cloud detection information after being processed, and high-resolution scanning of the target is realized.
Optionally, the laser emission module 1 comprises a driving circuit, a laser, an optical amplifier, a first beam splitter and a second beam splitter, wherein the laser outputs laser based on a driving signal output by the driving circuit, and the first beam splitter splits the laser to obtain single-path laser and M paths of local oscillation light; the amplifier amplifies the single-path laser; the second beam splitter splits the amplified single-path laser again to obtain N-path laser, and transmits the N-path laser to the optical transceiver 2 respectively. The beam splitting M Lu Benzhen light output by the laser is beneficial to obtaining more accurate beat frequency when mixing M paths of local oscillation light and echoes, and improves the detection accuracy of the laser radar, and the laser output by the laser is amplified and then split into the light transceiving devices 2 by adopting the plurality of light transceiving devices 2, so that the output power of the laser is not reduced, and the range finding range of the laser radar is maintained.
Optionally, the input end of the detection unit of the detection module 4 is coupled to the output end of the second waveguide structure 222 in the optical transceiver 2; the output end of the detection module 4 is coupled with the input end of the signal processing module, wherein the detection module 4 is coupled with the planar waveguide chip 22 in the optical transceiver 2, and the coupling mode of the detection module 4 and the planar waveguide chip comprises at least one of direct end face packaging coupling, optical fiber coupling or space optical coupling, so that the integration level of the laser radar is improved.
The signal processing module converts the current signal into a voltage signal and performs secondary amplification, and the signal processing module also collects the amplified data and processes the collected original data to obtain at least one of three-dimensional distance information, speed information, azimuth information, shape information and reflectivity information of the current target. Due to the adoption of the spliced light receiving and transmitting device in any one of the first aspect, the echo receiving efficiency of the laser radar is improved, the problem that part of echo signals of the laser radar are lost due to the angle hysteresis effect of detection light is effectively solved, the ranging performance of the laser radar is improved, and the detection resolution capability of targets is also improved.
Optionally, the detection module 4 is further provided with a photoelectric detector and a local oscillation light input optical path, and the echo signal and the local oscillation light perform coherent detection and mixing on the photoelectric detector. The photodetector is a photodetector that senses various wavelengths, such as laser light having at least one of a wavelength of 905nm, 1000nm, or 1550 nm.
Optionally, the detection module 4 is disposed in a silicon optical detector chip, and the silicon optical detector chip is coupled with the planar waveguide chip through an optical fiber, and can also be directly coupled with the planar waveguide chip, and can also be spatially optically coupled with the planar waveguide chip, so that the integration level of the laser radar is improved.
Corresponding to the planar waveguide chip-based optical transceiver device 2 of the above embodiment, a third aspect of the present application provides a method for manufacturing a planar waveguide chip-based optical transceiver device, including:
forming a substrate 21;
a planar waveguide chip 22 is formed on the upper surface of the substrate 21, and the planar waveguide chip 22 includes at least one transceiving waveguide structure including a first waveguide structure 221 for emitting laser light and at least two second waveguide structures 222 for receiving echoes and outputting the echoes, and both sides of the first waveguide structure 221 are provided with the second waveguide structures 222.
It will be appreciated that the advantages of the second to third aspects may be found in the relevant description of the first aspect, and are not described in detail herein.
In the foregoing embodiments, the descriptions of the embodiments are emphasized, and in part, not described or illustrated in any particular embodiment, reference is made to the related descriptions of other embodiments.
In the embodiments provided in the present application, it should be understood that the disclosed apparatus or module may be implemented in other manners. For example, the above-described embodiments of an apparatus or module are merely illustrative, e.g., the division of the module or unit is merely a logical function division, and there may be additional divisions when actually implemented, e.g., multiple units or components may be combined or integrated into another system, or some features may be omitted or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed may be an indirect coupling or communication connection via interfaces, devices or units, which may be in electrical, mechanical or other forms.
The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
The above embodiments are only for illustrating the technical solution of the present application, and not for limiting the same; although the application has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present application, and are intended to be included in the scope of the present application.
Claims (13)
1. An optical transceiver based on a planar waveguide chip, applied to a laser radar, comprising:
a substrate;
the planar waveguide chip is arranged on the upper surface of the substrate and comprises at least one receiving-transmitting waveguide structure, the receiving-transmitting waveguide structure comprises a first waveguide structure used for transmitting laser and at least two second waveguide structures used for receiving echoes and outputting the echoes, and the second waveguide structures are arranged on two sides of the first waveguide structure.
2. The optical transceiver of claim 1, wherein,
at least one second waveguide structure in the same transceiver waveguide structure has a preset inclination angle relative to the first waveguide structure.
3. The optical transceiver device of claim 2, wherein,
the preset inclination angle is less than or equal to 0.1 degree.
4. The optical transceiver of claim 1, wherein,
the first waveguide structure is a single-mode waveguide structure;
each second waveguide structure is at least one waveguide structure of a multimode-to-single mode waveguide structure, a large-mode-to-single mode waveguide structure, a few-mode-to-single mode waveguide structure and a single-mode waveguide structure.
5. The optical transceiver device according to any one of claims 1 to 4, wherein,
the distance between the output end of the first waveguide structure and the input end of the adjacent second waveguide structure is K, wherein K is less than or equal to 0.1 XW and less than or equal to 0.2 XW, and W is the waveguide width of the first waveguide structure.
6. The optical transceiver device of claim 5, wherein,
the planar waveguide chip comprises a plurality of the receiving-transmitting waveguide structures, and the receiving-transmitting waveguide structures are arranged in an array mode.
7. The optical transceiver device of claim 6, wherein,
each of the transceiver waveguide structures of the array layout is arranged in a periodic manner, wherein a spacing between adjacent transceiver waveguide structures is greater than or equal to one half of a waveguide width of the first waveguide structure.
8. The optical transceiver device according to any one of claims 1 to 4, 6 to 7,
the optical transceiver further comprises a transceiver lens, and the transceiver lens is arranged at the transmitting end of the first waveguide structure in the transceiver waveguide structure.
9. The optical transceiver of claim 8, wherein,
the receiving and transmitting lens meets a first preset condition, and the first preset condition is that:
the diameter of the echo light spot in the first target distance is larger than X times of the diameter of the single-mode waveguide of the first waveguide structure, wherein X is larger than or equal to 1.0 and smaller than or equal to 2.0, and the first target distance is smaller than or equal to 100m.
10. The optical transceiver of claim 8, wherein,
the receiving and transmitting lens also meets a second preset condition, and the second preset condition is that:
f-δf≦L 1 either +.f+δf, or L 2 ＝f；
Wherein L is 1 The first lens distance is a vertical distance between the end face of the transmitting end of the first waveguide structure and the center of the receiving-transmitting lens in the receiving-transmitting waveguide structure, and the receiving-transmitting lens at the first lens distance is used for receiving echoes of a first target distance;
L 2 the second lens distance is a vertical distance between the end face of the transmitting end of the first waveguide structure and the center of the receiving-transmitting lens in the receiving-transmitting waveguide structure, and the receiving-transmitting lens at the second lens distance is used for receiving echoes of a second target distance;
f is the focal length of the receiving and transmitting lens;
δf is the defocus distance.
11. The optical transceiver device of claim 10, wherein,
the second target distance >100m;
f>1mm；
12. the optical transceiver of claim 8, wherein,
the transceiver lens is matched with at least one transceiver waveguide structure to form a lens transceiver field of view.
13. A lidar, comprising: a laser emitting module, a scanning module, a plurality of detection modules, a signal processing module, and a plurality of optical transceiver devices as defined in any one of claims 1 to 12 spliced together;
the laser emission module is used for outputting laser, splitting the laser to obtain N paths of laser and M paths of local oscillation light, respectively transmitting the N paths of laser to the optical transceiver modules, respectively transmitting the M paths of laser to the detection modules, wherein M, N is a positive integer, N is not less than 2, and M is not less than 2;
the optical transceiver is used for accessing each path of laser and transmitting each path of laser to the scanning module respectively;
the scanning module is used for accessing each path of laser and emitting each path of laser to a target for scanning, and the scanning module is also used for receiving echoes reflected by the target;
The optical transceiver is further configured to access the echoes transmitted by the scanning module, and transmit the echoes to the corresponding detection modules respectively;
the detection module comprises M detection units, each detection unit is connected with one path of local oscillation light in M paths, and is used for connecting the echo output by the corresponding optical transceiver, and mixing the echo with one path of local oscillation light to obtain a corresponding beat frequency electric signal;
the signal processing module is used for accessing each beat frequency electric signal and processing the beat frequency electric signals to obtain detection information of the target.
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