CN113587830B - Device and method for measuring inner diameter of circular hole at non-contact 3 points - Google Patents

Device and method for measuring inner diameter of circular hole at non-contact 3 points Download PDF

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CN113587830B
CN113587830B CN202110883597.9A CN202110883597A CN113587830B CN 113587830 B CN113587830 B CN 113587830B CN 202110883597 A CN202110883597 A CN 202110883597A CN 113587830 B CN113587830 B CN 113587830B
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workpiece
laser
round hole
laser displacement
inner diameter
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CN113587830A (en
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陈欣
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Shanghai Baiku Information Technology Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/08Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/12Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters

Abstract

The invention belongs to the technical field of material measurement, and discloses a device and a method for measuring the inner diameter of a round hole at a non-contact 3-point mode. The invention adopts non-contact point measurement based on the quadrangular frustum reflector, the sensor probe does not need to be arranged in the measured aperture, the invention is suitable for measuring the inner diameter of a small-aperture workpiece, and the surface of the workpiece is prevented from being damaged by non-contact; when the measured workpiece is placed, the strict centering operation of the workpiece and the quadrangular frustum reflector is not needed, and the measuring efficiency is improved.

Description

Device and method for measuring inner diameter of circular hole at non-contact 3 points
Technical Field
The invention belongs to the technical field of material measurement, and particularly relates to a device and a method for measuring the inner diameter of a circular hole at a non-contact 3 point.
Background
In the process of precisely machining an inner hole of a circular hole workpiece, the diameter of the inner hole is an important performance index for measuring the machining quality of the workpiece, and in order to ensure the machining precision, the inner hole diameter needs to be rapidly and nondestructively detected, most of the diameter detection of small hole workpieces at present adopt a plug gauge, a three-jaw inside micrometer, a three-coordinate measuring machine and the like, but the methods belong to contact measurement, easily cause damage to the surface of the workpiece, need manual operation, have low measurement efficiency and are difficult to realize rapid and nondestructive automatic detection, although a pneumatic measuring instrument is a non-contact type inside diameter detection method, the pneumatic measuring instrument is limited by short working distance and is easy to contact with the workpiece to be detected so as to cause surface damage, an image measuring instrument is non-contact measurement, but is limited by detection range and resolution, and the general precision is difficult to reach below 5 micrometers, and the instrument has a large volume, and is difficult to realize automatic measurement in an industrial field, so a high-precision device and a method for measuring the inner diameter of the circular hole workpiece on line need to be developed to realize the field rapid nondestructive measurement of the inner diameter of the circular hole workpiece.
The technical scheme is that for small-hole workpieces with the inner diameter of five millimeters to tens of millimeters, a conventional diameter detection instrument cannot extend into an inner hole, so that the measurement is difficult, and Japanese patent (JP Kokai 2011-196899A,2011.10.06) discloses a 3-point inner diameter measurement device based on a triangular reflector.
The CN105043278B patent discloses a method for measuring the inner diameter of a circular hole at 3 or 4 non-contact points, wherein 3 or 4 laser displacement sensors are arranged in a workpiece to be measured at certain intervals, the measurement optical axis of the laser displacement sensor is adjusted to meet certain preset conditions, and then the radius of the circular hole to be measured is obtained according to an external triangle formula; the above 2 patents all assume that the extension lines of the laser measurement optical axes on the radial cross section of the workpiece can intersect at a point through optical axis adjustment, but in practical situations, the laser measurement optical axes are difficult to completely meet the condition of intersecting at a point through adjustment, and a small laser optical axis deflection angle error has a great influence on the measurement result.
Disclosure of Invention
The invention aims to solve the problems, and provides a device and a method for measuring the inner diameter of a round hole at 3 points in a non-contact manner.A measuring probe group consisting of 3 laser displacement sensors is constructed, and the direction of a measuring optical axis of the laser displacement sensors is adjusted by using an inclined table and a translation table, so that laser is shot into 3 surfaces of a quadrangular frustum reflector and then shot into the spherical center points of 3 round balls on the inner wall of a standard round hole workpiece; and rotating the standard circular hole workpiece to enable the laser to be reflected by the quadrangular frustum pyramid and then to irradiate 3 points on the inner wall of the workpiece, obtaining the measurement values of 3 displacement sensors, calculating the deflection angle errors of 3 laser measurement optical axes, and finally calculating to obtain an accurate inner diameter measurement result.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a device of round hole internal diameter is measured to non-contact 3 points, includes three laser displacement sensor, standard round hole work piece or is surveyed the round hole work piece, and is three the equal fixed mounting in laser displacement sensor's the outside has the sensor support frame, and is three the equal fixed mounting in bottom of sensor support frame has two-axis tilt table, and is three the equal fixed mounting in bottom of two-axis tilt table has two-axis translation platform, is located the regional bottom in laser displacement sensor dog-ear middle part has placed the work piece and has born the seat, the top fixed mounting that the work piece bore the seat has by surveying the round hole work piece, the work piece bears the inside middle part fixed mounting of seat and has the speculum that the top is provided with four arris platform speculum and bears the seat, standard round hole work piece inner wall side circumference angle is 0 °, 90 and 180 fixed mounting has 3 diameters for known ball on the position.
As a preferred technical scheme of the present invention, the three laser displacement sensors have completely identical size and structure, and form an inverted T-shaped structure, the three laser displacement sensors form a probe measurement group, the laser displacement sensors, the sensor support frame, the two-axis tilting table and the two-axis translation table form a simple detection device, the detection device is provided with three groups, and the emission direction and position of the optical axis measured by the laser displacement sensors can be adjusted by the two-axis tilting table and the two-axis translation table.
As a preferred technical scheme of the invention, the bottom of the three groups of detection devices, the reflector bearing seat and the workpiece bearing seat is provided with a bottom plate, and the surface of the bottom plate is flat and has no concave-convex surface.
As a preferred technical scheme of the present invention, four lateral peripheral surfaces of the quadrangular frustum pyramid reflector are provided with inclined isosceles trapezoid surfaces having the same size, an included angle between each inclined isosceles trapezoid surface and a horizontal surface of the bottom plate is forty-five degrees, a normal included angle between two adjacent inclined isosceles trapezoid surfaces is ninety degrees, and the inclined isosceles trapezoid surfaces of the quadrangular frustum pyramid reflector can reflect a laser beam.
As a preferable technical scheme of the invention, the method comprises the following steps:
1) constructing a measuring probe group consisting of 3 laser displacement sensors;
2) placing a standard round hole workpiece, and adjusting the heights of the reflector bearing seat and the workpiece bearing seat to ensure that the center of the reflecting surface of the quadrangular frustum reflector is over against the inner wall of the round hole workpiece;
3) adjusting the direction of the measuring optical axis of the laser displacement sensor by using the tilting table and the translation table to enable the laser to be along a circleThe axial direction of the hole workpiece is shot from the outside of the workpiece to 3 surfaces of a quadrangular frustum reflector and then shot to the spherical center points of 3 round balls on the inner wall of the standard round hole workpiece; as shown in FIG. 3, the incident points of the 3 laser beams on the quadrangular prism reflector are d 1 ,d 2 ,d 3 Horizontally shoot to the spherical center point S of the sphere after 90-degree reflection 1 ,S 2 ,S 3
4) Rotating the standard circular hole workpiece to enable the laser to be reflected by the quadrangular frustum and then to avoid the round ball to shoot to the inner wall of the workpiece;
5) reading the measured values of 3 laser displacement sensors;
6) calculating deflection angle errors of 3 laser measurement optical axes;
7) taking down the standard round hole workpiece, placing the round hole workpiece to be measured, as shown in fig. 4, reflecting the laser by the quadrangular frustum pyramid, then irradiating the laser to 3 points A, B and C on the inner wall of the workpiece, and obtaining the inner diameter of the round hole workpiece to be measured according to the 3-point circle-setting principle;
as shown in fig. 4, the center of the sphere S 1 And S 3 The line of (A) is the X axis through S 2 The perpendicular line of the X axis is the Y axis, a rectangular coordinate system is established, and 3 sphere center points S are obtained because the inner diameter of the standard round hole workpiece and the diameters and the positions of the embedded 3 spheres are known 1 ,S 2 ,S 3 XY coordinate values in the horizontal section of (A) are (X) S1 ,Y S1 ),(X S2 ,Y S2 ),(X S3 ,Y S3 ) The injection points of the 3 beams of laser injected into the quadrangular frustum pyramid reflector are d 1 ,d 2 ,d 3 Over S 1 ,S 2 ,S 3 Point backward to the inner wall of the workpiece, the intersection points with the inner wall are respectively A, B and C points, and the deviation angle error of 3 laser measurement optical axes is defined as alpha 1 Is S 1 The included angle between A and the X axis; alpha (alpha) ("alpha") 2 Is S 2 The included angle between B and Y axis; alpha is alpha 3 Is S 3 The included angle between the C axis and the X axis is set as m according to the measured values of 3 laser displacement sensors 1 ,m 2 ,m 3 Then, the coordinates of points a, B, and C can be expressed by the following formula:
Figure GDA0003725323220000041
substituting the formula into the following formula to obtain the deflection angle errors alpha of 3 laser measurement optical axes 12 And alpha 3
Figure GDA0003725323220000042
Wherein, X 0 ,Y 0 Is the coordinate of the center of a circle of the position of the standard workpiece,
the basic method for calculating the inner diameter of the round hole workpiece to be measured in the step 7) is as follows:
the intersection points of the laser beam and the workpiece to be measured are set as A, B and C, and the coordinates of the intersection points can be obtained by the formula (1). Then, the radius r of the workpiece to be measured can be obtained by the following formula p
Figure GDA0003725323220000043
Compared with the prior art, the invention has the following beneficial effects:
1. the invention adopts non-contact 3-point measurement based on the quadrangular frustum reflector, the sensor probe is not required to be arranged in the measured aperture, the method is suitable for measuring the inner diameter of a small-aperture workpiece, and the surface of the workpiece is prevented from being damaged in a non-contact manner; when the measured workpiece is placed, the strict centering operation of the workpiece and the quadrangular frustum reflector is not needed, and the measuring efficiency is improved.
2. The invention discloses a method for using a standard round hole workpiece, wherein the fixed position of the standard workpiece is provided with 3 round balls, so that the direction of a measuring optical axis of a laser displacement sensor can be conveniently adjusted by using an inclined platform and a translation platform, the deflection angle error of the laser measuring optical axis can be calculated based on the standard workpiece with a known radius, and the measuring precision of the workpiece to be measured is finally improved.
Drawings
FIG. 1 is a schematic view of a non-contact 3-point device for measuring the inner diameter of a circular hole according to the present invention;
FIG. 2 is a schematic top view from a top down perspective of a standard round hole workpiece according to the present invention;
FIG. 3 is a schematic top view of 3 laser beams of 3 displacement sensors of the present invention directed along the axis of a circular hole workpiece from the outside of the workpiece to 3 facets of a quadrangular frustum of a prism;
FIG. 4 is a schematic top view of 3 laser beams of the 3 displacement sensors of the present invention finally emitted to 3 points on the inner wall of the circular hole workpiece;
FIG. 5 is a flow chart of the measurement steps of the present invention.
In the figure: 1. a laser displacement sensor; 2. a sensor support frame; 3. a biaxial inclination table; 4. a biaxial translation stage; 5. a quadrangular frustum pyramid reflector; 6. a reflector carrying seat; 7. standard round hole workpieces or round hole workpieces to be measured; 8. a workpiece bearing seat; 9. a ball; 10. a laser beam.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in figures 1 to 5, the invention provides a device and a method for measuring the inner diameter of a circular hole at a non-contact 3 point, which comprises three laser displacement sensors 1 and a standard circular hole workpiece or a measured circular hole workpiece 7, wherein the outer sides of the three laser displacement sensors 1 are fixedly provided with sensor support frames 2, the bottoms of the three sensor support frames 2 are fixedly provided with two-axis inclined tables 3, the bottoms of the three two-axis inclined tables 3 are fixedly provided with two-axis translation tables 4, the bottom of the middle area of the break angle of the laser displacement sensor 1 is provided with a workpiece bearing seat 8, the top of the workpiece bearing seat 8 is fixedly provided with the measured circular hole workpiece 7, the middle part inside the workpiece bearing seat 8 is fixedly provided with a reflector bearing seat 6 the top of which is provided with a four-edge table reflector 5, the circumferential angles of the side surface of the inner wall of the standard circular hole workpiece 7 are 0 degree, 90 degree and 180 degree positions are fixedly provided with 3 circular balls 9 with known diameters, the standard round hole workpiece 7 is the standard round hole workpiece 7, the workpiece bearing seat 8 is arranged below, the standard round hole workpiece 7 and the round hole workpiece 7 to be measured are both positioned on the workpiece bearing seat 8, and the workpiece bearing seat 8 is used for placing either the standard round hole workpiece 7 or the round hole workpiece 7 to be measured.
Wherein, three laser displacement sensor 1's big or small structure is identical completely and the three has constituteed a structure of falling T, three laser displacement sensor 1 has constituteed probe measurement group, laser displacement sensor 1, sensor support frame 2, two axle sloping platforms 3 and two axle translation platforms 4 have constituteed a simple and easy detection device and this detection device is provided with three groups altogether, this laser displacement sensor 1 measures the outgoing direction and the position accessible two axle sloping platforms 3 and the adjustment of two axle translation platforms 4 of optical axis.
Wherein, the bottom of the three groups of detection devices, the reflector bearing seat 6 and the workpiece bearing seat 8 is provided with a bottom plate, and the surface of the bottom plate is smooth and has no concave-convex surface.
Wherein, the peripheral four sides in four terrace with edge speculum 5 side direction all is provided with the slope isosceles trapezoid face that the size is unanimous, and this slope isosceles trapezoid face personally submits forty-five degrees contained angles with the level of bottom plate, and the normal contained angle of two adjacent slope isosceles trapezoid faces is ninety degrees, and the slope isosceles trapezoid face of four terrace with edge speculum 5 can reflect laser beam 10.
The method comprises the following steps:
1) constructing a measuring probe group consisting of 3 laser displacement sensors;
2) placing a standard round hole workpiece, and adjusting the heights of the reflector bearing seat and the workpiece bearing seat to ensure that the center of the reflecting surface of the quadrangular frustum reflector is over against the inner wall of the round hole workpiece;
3) the direction of a measuring optical axis of a laser displacement sensor is adjusted by using an inclined table and a translation table, so that laser irradiates to 3 surfaces of a quadrangular frustum reflector from the outside of a workpiece along the axis direction of the round hole workpiece and then irradiates to the spherical center points of 3 round balls on the inner wall of the standard round hole workpiece; as shown in FIG. 3, the incident points of the 3 laser beams on the quadrangular prism reflector are d 1 ,d 2 ,d 3 Horizontally shoot to the spherical center point S of the sphere after 90-degree reflection 1 ,S 2 ,S 3
4) Rotating the standard circular hole workpiece to enable the laser to be reflected by the quadrangular frustum and then to avoid the round ball to shoot to the inner wall of the workpiece;
5) reading 3 laser displacement sensor measurement values;
6) calculating deflection angle errors of 3 laser measurement optical axes;
7) taking down the standard round hole workpiece, placing the round hole workpiece to be measured, as shown in fig. 4, reflecting the laser by the quadrangular frustum pyramid, then irradiating the laser to 3 points A, B and C on the inner wall of the workpiece, and obtaining the inner diameter of the round hole workpiece to be measured according to the 3-point circle-setting principle;
as shown in fig. 4, the center of the sphere S 1 And S 3 The line of (A) is the X axis through S 2 The vertical line of the X axis is the Y axis, a rectangular coordinate system is established, and 3 sphere center points S are obtained because the inner diameter of the standard round hole workpiece and the diameters and the positions of the embedded 3 spheres are known 1 ,S 2 ,S 3 XY coordinate values in the horizontal section of (2) are (X) S1 ,Y S1 ),(X S2 ,Y S2 ),(X S3 ,Y S3 ) The injection points of the 3 beams of laser injected into the quadrangular frustum pyramid reflector are respectively d 1 ,d 2 ,d 3 Over S 1 ,S 2 ,S 3 Point backward to the inner wall of the workpiece, the intersection points with the inner wall are respectively A, B and C points, and the deviation angle error of 3 laser measurement optical axes is defined as alpha 1 Is S 1 The included angle between A and the X axis; alpha is alpha 2 Is S 2 The included angle between B and Y axis; alpha is alpha 3 Is S 3 The included angle between the C axis and the X axis is set as m according to the measured values of 3 laser displacement sensors 1 ,m 2 ,m 3 Then, the coordinates of points a, B, and C can be expressed by the following formula:
Figure GDA0003725323220000071
substituting the formula into the following formula to obtain the deflection angle errors alpha of 3 laser measurement optical axes 12 And alpha 3
Figure GDA0003725323220000072
Wherein, X 0 ,Y 0 Is the coordinate of the center of a circle of the position of the standard workpiece,
the basic method for calculating the inner diameter of the round hole workpiece to be measured in the step 7 is as follows:
the intersection point of the laser beam and the workpiece is defined as A, B, C, and the coordinate thereof can be obtained by formula (1), and the radius r of the workpiece can be obtained by the following formula p
Figure GDA0003725323220000073
It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (5)

1. The utility model provides a device of 3 some measurement round hole internal diameters of non-contact, includes three laser displacement sensor (1), standard round hole work piece or surveyed round hole work piece (7), its characterized in that: three equal fixed mounting in the outside of laser displacement sensor (1) has sensor support frame (2), and is three the equal fixed mounting in bottom of sensor support frame (2) has two-axis sloping platform (3), and is three the equal fixed mounting in bottom of two-axis sloping platform (3) has two-axis translation platform (4), is located the work piece bears seat (8) has been placed to the regional bottom in laser displacement sensor (1) dog-ear middle part, the top fixed mounting that the work piece bears seat (8) has by survey round hole work piece (7), the inside middle part fixed mounting that the work piece bears seat (8) has the speculum of top setting up four arris platform speculum (5) to bear seat (6), standard round hole work piece (7) inner wall side angle is 0 °, 90 and 180 fixed mounting has 3 diameters to be known ball (9) on the position.
2. The device for measuring the inner diameter of the circular hole in a non-contact 3-point manner according to claim 1, wherein: it is three the big or small structure of laser displacement sensor (1) is identical and the three has constituteed a structure of falling T shape, and is three laser displacement sensor (1) has constituteed probe measurement group, laser displacement sensor (1), sensor support frame (2), two axle tilting table (3) and two axle translation platform (4) have constituteed a simple and easy detection device and this detection device and have been provided with three groups altogether, should laser displacement sensor (1) measures the outgoing direction and the two axle tilting table of position accessible (3) and the adjustment of two axle translation platform (4) of optical axis.
3. The device for measuring the inner diameter of the circular hole at a non-contact 3 point as claimed in claim 2, wherein: and the bottom of the three groups of detection devices, the reflector bearing seat (6) and the workpiece bearing seat (8) is provided with a bottom plate, and the surface of the bottom plate is smooth and has no concave-convex surface.
4. The apparatus for non-contact 3-point measurement of the inner diameter of a circular hole according to claim 1, wherein: the peripheral four sides of four terrace with edge speculum (5) side direction all are provided with the slope isosceles trapezoid face that the size is unanimous, should the slope isosceles trapezoid face personally submits forty-five degrees contained angles, adjacent two the normal contained angle of slope isosceles trapezoid face is ninety degrees, the slope isosceles trapezoid face of four terrace with edge speculum (5) can reflect laser beam (10).
5. The method for measuring an inner diameter of a circular hole by using a device for measuring the inner diameter of the circular hole in a non-contact 3-point manner as claimed in any one of claims 1 to 4, wherein the method comprises the following steps: the method comprises the following steps:
1) constructing a measuring probe group consisting of 3 laser displacement sensors;
2) placing a standard round hole workpiece, and adjusting the heights of the reflector bearing seat and the workpiece bearing seat to ensure that the center of the reflecting surface of the quadrangular frustum reflector is over against the inner wall of the round hole workpiece;
3) adjusting the direction of a measuring optical axis of a laser displacement sensor by using an inclined table and a translation table, and enabling laser to irradiate 3 surfaces of a quadrangular frustum reflector from the outside of a workpiece along the axial direction of the round hole workpiece and then irradiate spherical center points of 3 round balls on the inner wall of a standard round hole workpiece; the injection points of the 3 beams of laser injected into the quadrangular frustum pyramid reflector are d 1 , d 2 , d 3 Horizontally shoot to the spherical center point S of the sphere after 90-degree reflection 1 , S 2 , S 3
4) Rotating the standard circular hole workpiece to enable the laser to be reflected by the quadrangular frustum and then to avoid the round ball to shoot to the inner wall of the workpiece;
5) reading the measured values of 3 laser displacement sensors;
6) calculating deflection angle errors of 3 laser measurement optical axes;
7) and taking down the standard round hole workpiece, placing the round hole workpiece to be measured, reflecting the laser by the quadrangular frustum pyramid, and then irradiating the laser to 3 points A, B and C on the inner wall of the workpiece, and obtaining the inner diameter of the round hole workpiece to be measured according to the 3-point rounding principle.
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Publication number Priority date Publication date Assignee Title
JPH0495807A (en) * 1990-08-13 1992-03-27 Nippon Telegr & Teleph Corp <Ntt> Measuring apparatus for inner diameter of pipe
JP2011196899A (en) * 2010-03-23 2011-10-06 Kurimoto Ltd Inner diameter measuring device
CN103968768A (en) * 2014-04-08 2014-08-06 沈阳理工大学 Device and method for precisely measuring inner diameters of workpieces in non-contact manner
CN105043278A (en) * 2015-05-06 2015-11-11 天津大学 Non-contact and multi-point measurement method for measuring internal diameter of circular hole
CN107478167A (en) * 2017-08-04 2017-12-15 江苏科技大学 A kind of inner diameter of cylinder sleeve measurement apparatus and measuring method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0495807A (en) * 1990-08-13 1992-03-27 Nippon Telegr & Teleph Corp <Ntt> Measuring apparatus for inner diameter of pipe
JP2011196899A (en) * 2010-03-23 2011-10-06 Kurimoto Ltd Inner diameter measuring device
CN103968768A (en) * 2014-04-08 2014-08-06 沈阳理工大学 Device and method for precisely measuring inner diameters of workpieces in non-contact manner
CN105043278A (en) * 2015-05-06 2015-11-11 天津大学 Non-contact and multi-point measurement method for measuring internal diameter of circular hole
CN107478167A (en) * 2017-08-04 2017-12-15 江苏科技大学 A kind of inner diameter of cylinder sleeve measurement apparatus and measuring method

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