CN113549891A - Continuous feeding and discharging device and method for deposition furnace - Google Patents
Continuous feeding and discharging device and method for deposition furnace Download PDFInfo
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- CN113549891A CN113549891A CN202110944533.5A CN202110944533A CN113549891A CN 113549891 A CN113549891 A CN 113549891A CN 202110944533 A CN202110944533 A CN 202110944533A CN 113549891 A CN113549891 A CN 113549891A
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- deposition furnace
- automatic
- furnace
- lifting mechanism
- deposition
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- 230000008021 deposition Effects 0.000 title claims abstract description 52
- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000007599 discharging Methods 0.000 title claims abstract description 17
- 239000000463 material Substances 0.000 claims abstract description 25
- 238000009413 insulation Methods 0.000 claims abstract description 19
- 230000007246 mechanism Effects 0.000 claims abstract description 18
- 230000003028 elevating effect Effects 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 230000008569 process Effects 0.000 claims description 9
- 230000000694 effects Effects 0.000 claims description 6
- 238000004062 sedimentation Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000001737 promoting effect Effects 0.000 claims description 2
- 230000007306 turnover Effects 0.000 claims description 2
- 230000009471 action Effects 0.000 abstract description 4
- 239000002699 waste material Substances 0.000 abstract description 2
- 239000002131 composite material Substances 0.000 description 8
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 7
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 7
- 230000001965 increasing effect Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000002679 ablation Methods 0.000 description 1
- 238000003889 chemical engineering Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D2003/0034—Means for moving, conveying, transporting the charge in the furnace or in the charging facilities
- F27D2003/0051—Means for moving, conveying, transporting the charge in the furnace or in the charging facilities comprising means to pick up the charge and put it down
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Furnace Charging Or Discharging (AREA)
Abstract
The invention discloses a device and a method for continuously feeding and discharging materials of a deposition furnace, wherein the deposition furnace is arranged in a freely telescopic heat insulation barrel, and the device also comprises an automatic material tray and a lead screw lifting mechanism, wherein the automatic material tray is lifted and descended under the action of the lead screw lifting mechanism, and is lifted to the bottom position of the deposition furnace when lifted, and the freely telescopic heat insulation barrel is contracted and extended under the action of the lead screw lifting mechanism. The invention mainly solves the problem of continuous operation of the deposition furnace, can effectively improve the working efficiency of the deposition furnace and reduce the waste of manpower and resources.
Description
Technical Field
The invention belongs to the technical field of power electronics, and particularly relates to a device and a method for continuous feeding and discharging of a deposition furnace.
Background
The carbon-carbon composite material serving as a novel material in the market has incomparable advantages of the traditional material, such as low density, high specific gravity, ablation resistance, small thermal expansion coefficient, excellent thermal shock property, excellent frictional wear performance and the like. The composite material is widely applied to the fields of aviation, aerospace, chemical engineering, medical treatment and machinery at present, and plays a certain role in social development. However, the price is always high due to the problem of production cost, and the problem limits the further application of the carbon-carbon composite material. As the key production equipment of the current carbon-carbon composite material, the performance of the deposition furnace has a decisive role in the production of the carbon-carbon composite material. Especially, the production efficiency of the deposition furnace is a key factor for reducing the production cost of the carbon-carbon composite material and improving the cost performance of the carbon-carbon composite material. Conventional deposition furnaces on the market today use a periodic, i.e. discontinuous production, typically one production cycle comprising: charging, deposition operation and discharging. Charging: manually building and molding carbon prefabricated body products to be deposited according to a certain arrangement mode, and feeding the carbon prefabricated body products into a deposition furnace or directly building the carbon prefabricated body products in the deposition furnace; operation: manually operating equipment to finish the processes of temperature rise, deposition and temperature reduction of the deposition furnace; discharging: and (5) after the deposition furnace is cooled to a certain degree, manually finishing the discharging of the product according to the reverse steps of the construction operation. In order to improve the production efficiency, the method of more manufacturers is to increase the volume of the deposition furnace and produce more products in one production period, so as to reduce the production cost of single products.
For the conventional deposition furnace in the current market, the charging and discharging operations are finished manually, so that the efficiency is low, and in the discharging operation, the operation can be performed only when the temperature in the furnace is reduced to the temperature which can be borne by personnel, so that the time cost is high, and a large amount of heat energy is wasted. For increasing the volume of the deposition furnace, the method has the disadvantages that the volume is increased, the manufacturing cost of the deposition furnace is increased, the sealing performance of the furnace body is required to be higher, and the uncontrollable possibility of the deposition operation process is increased due to the increase of the volume of the deposition furnace. If a problem occurs in the deposition operation, the loss is larger than that of the conventional deposition furnace.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a device and a method for continuously feeding and discharging materials of a deposition furnace. The invention mainly solves the problem of continuous operation of the deposition furnace, can effectively improve the working efficiency of the deposition furnace and reduce the waste of manpower and resources.
The invention can be realized by the following technical scheme:
the utility model provides a device of serialization business turn over material of sedimentation furnace, in a free flexible heat-insulating barrel is arranged in to the sedimentation furnace, still include an automatic charging tray and lead screw elevating system, automatic charging tray is in accomplish under lead screw elevating system's the effect and promote and descend, when promoting, promote to the stove bottom position of sedimentation furnace, just free flexible heat-insulating barrel is in accomplish shrink and extension under lead screw elevating system's the effect.
Furthermore, the freely telescopic heat insulation barrel comprises a plurality of outer layers and inner layer structures.
Further, lead screw elevating system includes the elevating screw, guide post and the elevating system that freely flexible bucket both sides correspond, automatic charging tray is arranged in elevating system is last, elevating system is along elevating screw and guide post up-and-down motion.
A continuous feeding and discharging method realized by the continuous feeding and discharging device of the deposition furnace comprises the following steps:
1) conveying the automatic tray to a fixed position by automatic conveying equipment;
2) the lifting mechanism lifts the automatic material tray to the position of the deposition furnace and serves as the bottom of the deposition furnace, and in the lifting process, the freely telescopic heat insulation barrel contracts to form a space so as to ensure that the automatic material tray is stably lifted;
3) after the deposition operation is finished, the automatic material tray returns through the lifting mechanism, and in the process, the freely telescopic heat insulation barrel extends;
4) and sending out the automatic material tray by automatic transmission equipment, and carrying out the next production cycle.
Advantageous effects
The invention changes the discontinuous production mode of the conventional deposition furnace into the continuous production mode, thereby improving the production efficiency of the deposition furnace and reducing the production cost of the carbon-carbon composite material. The method and the device can be applied to the production of the novel deposition furnace, and can also be used for modifying and upgrading the used deposition furnace, so that the method and the device are flexible to use and improve the productivity. After the deposition operation is finished, the deposition furnace can be directly discharged without a cooling process, so that the time cost is reduced, the heat of the deposition furnace cannot be lost too much, and the deposition furnace has important significance for energy conservation and environmental protection.
Drawings
FIG. 1 is a schematic structural view of the present invention;
in FIG. 1, a deposition furnace; 2, an outer layer of the telescopic heat-insulating barrel; 3, a middle layer of the telescopic heat insulation barrel; 4, telescoping the inner layer of the heat insulation barrel; 5, lifting a screw rod; 6, a guide post; 7, a lifting mechanism; and 8, automatic material tray.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification.
Examples
As shown in figure 1, the device for continuously feeding and discharging materials of the deposition furnace of the invention comprises a deposition furnace 1 arranged in a freely telescopic heat insulation barrel, and further comprises an automatic material tray 8 and a lead screw lifting mechanism, wherein the automatic material tray 8 is lifted and lowered under the action of the lead screw lifting mechanism, and is lifted to the bottom position of the deposition furnace 1 when lifted, and the freely telescopic heat insulation barrel is contracted and extended under the action of the lead screw lifting mechanism.
In the embodiment, the number of the freely telescopic heat insulation barrel is 3, the freely telescopic heat insulation barrel is of an outer layer sleeved inner layer structure and comprises an outer layer 2 of the telescopic heat insulation barrel; a middle layer 3 of the telescopic heat insulation barrel; the inner layer 4 of the telescopic heat insulation barrel. The number of the telescopic heat insulation barrels can also be designed according to the requirement. The shape of the telescopic heat-insulating barrel may be a cylindrical shape as shown in the present embodiment, or may be various shapes such as a square shape and an octagonal shape.
Wherein lead screw elevating system includes elevating screw 5, guide post 6 and elevating system 7 that freely flexible bucket both sides correspond, and on elevating system 7 was arranged in to automatic charging tray 8, elevating system 7 moved up and down along elevating screw 5 and guide post 6.
The method steps realized by the device are as follows:
1. the automatic tray 8 is conveyed to a fixed position by an automatic conveying device (the automatic conveying device is out of the scope of the patent and is not explained);
2. the automatic material tray 8 is lifted to the position of the deposition furnace 1 by the lifting mechanism 7, the automatic material tray 8 serves as the furnace bottom, and in the lifting process, the outer layer 2 of the telescopic heat-insulating barrel, the middle layer 3 of the telescopic heat-insulating barrel and the inner layer 4 of the telescopic heat-insulating barrel contract in space, so that the automatic material tray 8 is ensured to be stably lifted;
3. after the deposition operation is finished, the automatic material tray 8 returns through the lifting mechanism 7, and in the process, the freely telescopic heat insulation barrel extends to isolate the temperature in the furnace and the heat of the deposited prefabricated body, so that the lifting screw 5, the guide column 6 and the lifting mechanism 7 are protected from being heated by heat radiation to influence the performance;
4. the automatic tray 8 is sent out by the automatic transmission equipment and the next production cycle is carried out.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (4)
1. The utility model provides a device of serialization business turn over material of sedimentation furnace, its characterized in that, in a free flexible heat-insulating barrel was arranged in to the sedimentation furnace, still included an automatic charging tray and lead screw elevating system, automatic charging tray is in accomplish under lead screw elevating system's the effect and promote and descend, promote when promoting to the stove bottom position of sedimentation furnace, just free flexible heat-insulating barrel is in accomplish under lead screw elevating system's the effect and contract and extend.
2. The continuous feeding and discharging device of the deposition furnace as claimed in claim 1, wherein the freely retractable thermal insulation barrel comprises a plurality of outer layers and inner layers.
3. The continuous feeding and discharging device of the deposition furnace as claimed in claim 1, wherein the screw lifting mechanism comprises a lifting screw, a guide post and a lifting mechanism corresponding to two sides of the freely retractable barrel, the automatic material tray is placed on the lifting mechanism, and the lifting mechanism moves up and down along the lifting screw and the guide post.
4. A continuous feeding and discharging method realized by the continuous feeding and discharging device of the deposition furnace, which is characterized by comprising the following steps:
1) conveying the automatic tray to a fixed position by automatic conveying equipment;
2) the lifting mechanism lifts the automatic material tray to the position of the deposition furnace and serves as the bottom of the deposition furnace, and in the lifting process, the freely telescopic heat insulation barrel contracts to form a space so as to ensure that the automatic material tray is stably lifted;
3) after the deposition operation is finished, the automatic material tray returns through the lifting mechanism, and in the process, the freely telescopic heat insulation barrel extends;
4) and sending out the automatic material tray by automatic transmission equipment, and carrying out the next production cycle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110944533.5A CN113549891A (en) | 2021-08-17 | 2021-08-17 | Continuous feeding and discharging device and method for deposition furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110944533.5A CN113549891A (en) | 2021-08-17 | 2021-08-17 | Continuous feeding and discharging device and method for deposition furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113549891A true CN113549891A (en) | 2021-10-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110944533.5A Pending CN113549891A (en) | 2021-08-17 | 2021-08-17 | Continuous feeding and discharging device and method for deposition furnace |
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Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0735992U (en) * | 1993-12-15 | 1995-07-04 | 株式会社神戸製鋼所 | Hot isotropic pressure press |
| CN2903095Y (en) * | 2006-04-07 | 2007-05-23 | 烟台冶金新材料研究所 | Carbon tube type multiple material post large gas phase deposition furnace for mfg. airplane carbon braking disc |
| CN102181845A (en) * | 2011-04-19 | 2011-09-14 | 西安电炉研究所有限公司 | Chemical vapor deposition furnace |
| CN102808222A (en) * | 2012-08-23 | 2012-12-05 | 益阳祥瑞科技有限公司 | Tube-in-tube single crystal furnace heat insulation cylinder with different density layers |
| CN104342631A (en) * | 2013-07-24 | 2015-02-11 | 广东先导稀材股份有限公司 | Chemical vapor deposition furnace |
| CN205556844U (en) * | 2015-10-13 | 2016-09-07 | 江苏华盛天龙光电设备股份有限公司 | Furnace body of single crystal furnace |
| CN209555366U (en) * | 2019-01-16 | 2019-10-29 | 湖南金创新材料有限公司 | A kind of multistation chemical vapor deposition stove |
| CN110923806A (en) * | 2019-12-24 | 2020-03-27 | 西安奕斯伟硅片技术有限公司 | Single crystal furnace and preparation method of single crystal silicon rod |
| CN112553604A (en) * | 2020-12-18 | 2021-03-26 | 上海骐杰碳素材料有限公司 | Continuous chemical vapor deposition furnace and working method thereof |
| CN213327325U (en) * | 2020-09-29 | 2021-06-01 | 泸州市亿丰玻璃制品有限公司 | Air ducting of tempering furnace for producing hollow tempered glass |
| CN113106428A (en) * | 2021-04-07 | 2021-07-13 | 锦州同创真空冶金科技有限公司 | Vacuum induction chemical vapor deposition furnace |
| CN215365973U (en) * | 2021-08-17 | 2021-12-31 | 上海康碳复合材料科技有限公司 | Device for continuously feeding and discharging materials of deposition furnace |
-
2021
- 2021-08-17 CN CN202110944533.5A patent/CN113549891A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0735992U (en) * | 1993-12-15 | 1995-07-04 | 株式会社神戸製鋼所 | Hot isotropic pressure press |
| CN2903095Y (en) * | 2006-04-07 | 2007-05-23 | 烟台冶金新材料研究所 | Carbon tube type multiple material post large gas phase deposition furnace for mfg. airplane carbon braking disc |
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