CN113548228A - Large-size plane ITO target material isostatic pressing method - Google Patents
Large-size plane ITO target material isostatic pressing method Download PDFInfo
- Publication number
- CN113548228A CN113548228A CN202110765787.0A CN202110765787A CN113548228A CN 113548228 A CN113548228 A CN 113548228A CN 202110765787 A CN202110765787 A CN 202110765787A CN 113548228 A CN113548228 A CN 113548228A
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- CN
- China
- Prior art keywords
- target material
- target
- isostatic pressing
- pressing method
- vacuum
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B23/00—Packaging fragile or shock-sensitive articles other than bottles; Unpacking eggs
- B65B23/20—Packaging plate glass, tiles, or shingles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B31/00—Packaging articles or materials under special atmospheric or gaseous conditions; Adding propellants to aerosol containers
- B65B31/04—Evacuating, pressurising or gasifying filled containers or wrappers by means of nozzles through which air or other gas, e.g. an inert gas, is withdrawn or supplied
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B35/00—Supplying, feeding, arranging or orientating articles to be packaged
- B65B35/10—Feeding, e.g. conveying, single articles
- B65B35/16—Feeding, e.g. conveying, single articles by grippers
- B65B35/18—Feeding, e.g. conveying, single articles by grippers by suction-operated grippers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B5/00—Packaging individual articles in containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, jars
- B65B5/04—Packaging single articles
- B65B5/045—Packaging single articles in bags
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B61/00—Auxiliary devices, not otherwise provided for, for operating on sheets, blanks, webs, binding material, containers or packages
- B65B61/20—Auxiliary devices, not otherwise provided for, for operating on sheets, blanks, webs, binding material, containers or packages for adding cards, coupons or other inserts to package contents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B67/00—Apparatus or devices facilitating manual packaging operations; Sack holders
- B65B67/02—Packaging of articles or materials in containers
- B65B67/04—Devices facilitating the insertion of articles or materials into bags, e.g. guides or chutes
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Packages (AREA)
Abstract
The invention provides a large-size plane ITO target material isostatic pressing method, which comprises the following steps of 1, adsorbing a target material by using a vacuum chuck and placing the target material on an air bearing table; step 2, opening the air floating table to enable the target material to keep a floating state; step 3, sequentially sleeving the target materials into two PE bags, vacuumizing, and carrying out double vacuum packaging; step 4, adsorbing, transferring and placing the packaged target material on an aluminum plate by using a vacuum chuck, covering the aluminum plate on the upper side of the target material, and binding and fixing by using an adhesive tape; and 5, placing the fixed target material into a hanging basket, and carrying out cold isostatic pressing preparation. The vacuum chuck is adopted to adsorb and transfer the target, the target is placed in the air in a suspension mode through the air floating platform, the follow-up vacuum packaging of the target is facilitated, manual carrying of the target is reduced, the target breakage is reduced, and therefore the quality of target products is improved.
Description
Technical Field
The invention relates to the technical field of target processing production, in particular to an isostatic pressing method for a large-size planar ITO target.
Background
The rapid development of the flat panel display industry places higher demands on the materials used. Larger size, higher density, lower resistivity, and higher utilization are required for ITO targets. One of the major difficulties in the preparation process of the ITO target is large size, and the difficulties mainly include oil pressure forming, isostatic pressing forming, process shipping and the like. When the blank is subjected to isostatic pressing, the large-size blank has low strength, the target material is thin, the target material needs to be turned manually in a general normal shipping or packaging process, and the blank is very easy to crack or be damaged in the turning process. The cracking of the green body can directly cause the target material to be scrapped, so that a large amount of production cost loss is caused, and the yield is influenced or the order cannot be completed directly. It becomes important to solve this problem.
Disclosure of Invention
The invention aims to provide an isostatic pressing method for large-size planar ITO target materials, which is characterized in that the target materials are moved in a vacuum chuck adsorption and transportation mode, the target materials are placed on an air floating platform, and are suspended on the air floating platform under the buoyancy action of the air floating platform, so that the subsequent operation of vacuumizing a target material packaging bag is facilitated, the operation of carrying and moving the target materials manually is reduced, the stress of the target materials is reduced, and the problem that the target materials are easy to crack in the transportation process in the background technology is solved.
The invention provides a large-size plane ITO target material isostatic pressing method, which comprises the following steps of 1, adsorbing a target material by using a vacuum chuck and placing the target material on an air bearing table; step 2, opening the air bearing table to keep the target material in a suspension state; step 3, sequentially sleeving the target materials into two PE bags, vacuumizing, and carrying out double vacuum packaging; step 4, adsorbing, transferring and placing the packaged target material on an aluminum plate by using a vacuum chuck, covering the aluminum plate on the upper side of the target material, and binding and fixing by using an adhesive tape; and 5, placing the fixed target material into a hanging basket, and carrying out cold isostatic pressing preparation.
The further improvement lies in that: the vacuum sucker adopts a sponge vacuum sucker, and the pressure of the vacuum sucker is 0.3-0.6 mpa.
The further improvement lies in that: the pressure of the air floating platform is 0.2-0.5mpa, and the floating height of the target material is 0.2-0.5 mm.
The further improvement lies in that: the PE bag is a vacuum seven-layer composite PE bag.
The further improvement lies in that: before the target material is subjected to double vacuum packaging, corner protectors are sleeved on all corners of the target material, and the size of each corner protector is 30 x 30 mm.
The further improvement lies in that: an elastic cushion layer is arranged on the inner side surface of the aluminum plate.
The invention has the beneficial effects that: the sponge vacuum chuck is adopted to absorb the target material for translation and transportation, so that the manual transportation process is reduced; the target material is placed on the air floating platform, and is suspended on the air floating platform under the buoyancy action of the air floating platform, so that subsequent operators can conveniently use the packaging bag for packaging, the operators can quickly and directly sleeve the packaging bag on the target material, the target material can move without being subjected to too much force, the packaging bag can be smoothly sleeved, the target material is effectively prevented from being cracked under stress during packaging, and meanwhile, the packaging efficiency is greatly improved; the corner protector is sleeved on the target corner, so that the sharp part of the target corner is prevented from cutting the packaging bag, and the sealing performance of vacuum packaging is improved; the target material is clamped and fixed by the upper aluminum plate and the lower aluminum plate, the target material is prevented from warping and cracking in the isostatic pressing process, the elastic cushion layer is arranged on the inner side of the aluminum plate, the stress of the target material is uniform, and the isostatic pressing effect of the target material is improved.
Detailed Description
For the purpose of enhancing understanding of the present invention, the present invention will be further described in detail with reference to the following examples, which are provided for illustration only and are not to be construed as limiting the scope of the present invention.
The embodiment provides a large-size plane ITO target isostatic pressing method, which comprises the following steps of 1, adsorbing a target material by using a vacuum chuck and placing the target material on an air bearing table, wherein the vacuum chuck adopts a sponge vacuum chuck, and the pressure of the vacuum chuck is 0.5 mpa;
step 2, opening an air floating table to keep the target in a suspension state, wherein the pressure of the air floating table is 0.4mpa, and the floating height of the target is 0.4 mm;
step 3, sleeving a corner protector on each corner of the target, wherein the size of the corner protector is 30 x 30 mm;
step 4, sleeving the target material into a PE bag and carrying out primary vacuum packaging, sleeving the target material subjected to primary vacuum packaging into another PE belt again and carrying out secondary vacuum packaging, wherein the PE bag is a vacuum seven-layer composite PE bag;
step 5, adsorbing, transferring and placing the packaged target material on an aluminum plate by using a vacuum chuck, covering the aluminum plate on the upper side of the target material, binding and fixing by using an adhesive tape, and arranging an elastic cushion layer on the inner side surface of the aluminum plate;
and 6, placing the fixed target material into a hanging basket, and carrying out cold isostatic pressing preparation.
The vacuum chuck is adopted to adsorb the target material, the vacuum chuck is moved to electrically move the target material for translation and transportation, the target material is placed on the air floating platform, the target material is placed in a suspended manner through the work of the air floating platform, the target material slightly floats upwards, so that a subsequent worker can conveniently and quickly sleeve the packaging bag on the target material, the target material can be moved under the condition of not bearing too large force, the packaging bag can be smoothly sleeved, and the target material is not cracked due to abnormal stress of the target material; after the target is packaged, the aluminum plate is clamped and fixed from the upper side and the lower side, and the elastic cushion layer is arranged on the inner side of the aluminum plate, so that the target is stressed more when subjected to cold isostatic pressing, and the generation of warping and cracking of the target is effectively reduced.
Claims (6)
1. A large-size plane ITO target material isostatic pressing method is characterized by comprising the following steps of 1, adsorbing a target material by using a vacuum chuck and placing the target material on an air bearing table; step 2, opening the air bearing table to keep the target material in a suspension state; step 3, sequentially sleeving the target materials into two PE bags, vacuumizing, and carrying out double vacuum packaging; step 4, adsorbing, transferring and placing the packaged target material on an aluminum plate by using a vacuum chuck, covering the aluminum plate on the upper side of the target material, and binding and fixing by using an adhesive tape; and 5, placing the fixed target material into a hanging basket, and carrying out cold isostatic pressing preparation.
2. The isostatic pressing method for large-size planar ITO target material according to claim 1, wherein: the vacuum sucker adopts a sponge vacuum sucker, and the pressure of the vacuum sucker is 0.3-0.6 mpa.
3. The isostatic pressing method for large-size planar ITO target material according to claim 1, wherein: the pressure of the air floating platform is 0.2-0.5mpa, and the floating height of the target material is 0.2-0.5 mm.
4. The isostatic pressing method for large-size planar ITO target material according to claim 1, wherein: the PE bag is a vacuum seven-layer composite PE bag.
5. The isostatic pressing method for large-size planar ITO target material according to claim 1, wherein: before the target material is subjected to double vacuum packaging, corner protectors are sleeved on all corners of the target material, and the size of each corner protector is 30 x 30 mm.
6. The isostatic pressing method for large-size planar ITO target material according to claim 1, wherein: an elastic cushion layer is arranged on the inner side surface of the aluminum plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110765787.0A CN113548228A (en) | 2021-07-07 | 2021-07-07 | Large-size plane ITO target material isostatic pressing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110765787.0A CN113548228A (en) | 2021-07-07 | 2021-07-07 | Large-size plane ITO target material isostatic pressing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113548228A true CN113548228A (en) | 2021-10-26 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110765787.0A Pending CN113548228A (en) | 2021-07-07 | 2021-07-07 | Large-size plane ITO target material isostatic pressing method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113548228A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115196109A (en) * | 2022-07-13 | 2022-10-18 | 有研亿金新材料有限公司 | Core assembly of full-automatic large-size target packaging machine and use method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19507387A1 (en) * | 1995-03-03 | 1996-09-05 | Robert Dipl Ing Deichsel | Handling system for assembling sheets of glass into packages |
| CN205328207U (en) * | 2015-11-16 | 2016-06-22 | 钟伟 | Glass substrate's air supporting conveyer |
| CN106927258A (en) * | 2017-01-26 | 2017-07-07 | 江苏东旭亿泰智能装备有限公司 | A kind of conveyer and its transfer approach for glass substrate |
| CN207594064U (en) * | 2017-12-14 | 2018-07-10 | 洛阳晶联光电材料有限责任公司 | A kind of large scale planar targets isostatic cool pressing auxiliary clamp |
| CN207670742U (en) * | 2017-11-20 | 2018-07-31 | 济源豫金靶材科技有限公司 | A kind of target production vacuum packing machine |
| TW201827934A (en) * | 2017-01-25 | 2018-08-01 | 上海微電子裝備（集團）股份有限公司 | Workpiece table substrate transfer device and pre-alignment method including a detecting feedback device and an air floating rail device |
-
2021
- 2021-07-07 CN CN202110765787.0A patent/CN113548228A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19507387A1 (en) * | 1995-03-03 | 1996-09-05 | Robert Dipl Ing Deichsel | Handling system for assembling sheets of glass into packages |
| CN205328207U (en) * | 2015-11-16 | 2016-06-22 | 钟伟 | Glass substrate's air supporting conveyer |
| TW201827934A (en) * | 2017-01-25 | 2018-08-01 | 上海微電子裝備（集團）股份有限公司 | Workpiece table substrate transfer device and pre-alignment method including a detecting feedback device and an air floating rail device |
| CN106927258A (en) * | 2017-01-26 | 2017-07-07 | 江苏东旭亿泰智能装备有限公司 | A kind of conveyer and its transfer approach for glass substrate |
| CN207670742U (en) * | 2017-11-20 | 2018-07-31 | 济源豫金靶材科技有限公司 | A kind of target production vacuum packing machine |
| CN207594064U (en) * | 2017-12-14 | 2018-07-10 | 洛阳晶联光电材料有限责任公司 | A kind of large scale planar targets isostatic cool pressing auxiliary clamp |
Non-Patent Citations (1)
| Title |
|---|
| 曲选辉: "《粉末冶金原理与工艺》", 31 May 2013, 冶金工业出版社 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115196109A (en) * | 2022-07-13 | 2022-10-18 | 有研亿金新材料有限公司 | Core assembly of full-automatic large-size target packaging machine and use method thereof |
| CN115196109B (en) * | 2022-07-13 | 2024-03-29 | 有研亿金新材料有限公司 | Core component of full-automatic large-size target packaging machine and application method thereof |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20211026 |
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| RJ01 | Rejection of invention patent application after publication |