CN113533308A - Device and method for detecting elements in radioactive sample - Google Patents

Device and method for detecting elements in radioactive sample Download PDF

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Publication number
CN113533308A
CN113533308A CN202110657836.9A CN202110657836A CN113533308A CN 113533308 A CN113533308 A CN 113533308A CN 202110657836 A CN202110657836 A CN 202110657836A CN 113533308 A CN113533308 A CN 113533308A
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phase difference
nuclear radiation
cable
radiation shielding
phase
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朱小炜
夏晓峰
张建
张权
胡建坤
张秀丽
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Hangzhou Puju Medical Technology Co ltd
Hangzhou Puyu Technology Development Co Ltd
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Hangzhou Puyu Technology Development Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/73Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
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  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
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  • Engineering & Computer Science (AREA)
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Abstract

The invention provides a device and a method for detecting elements in a radioactive sample, wherein the device comprises a torch tube, an ignition coil and a power generator; the ignition coil is arranged in a nuclear radiation shielding chamber, and the power generator is arranged outside the nuclear radiation shielding chamber; a first cable connected to one end of the ignition coil and connected to one end of the power generator after passing through a wall of the nuclear radiation shielding chamber; the second cable is connected with the other end of the ignition coil and is connected with the other end of the power generator after penetrating through the wall of the nuclear radiation shielding chamber; the phase detection unit is used for obtaining a first phase difference between signals of the first cable at the indoor part and the outdoor part of the nuclear radiation shielding room and a second phase difference between signals of the second cable at the indoor part and the outdoor part of the nuclear radiation shielding room; the phase shifters are respectively arranged on the first cable and the second cable and are positioned outside the nuclear radiation shielding chamber. The invention has the advantages of good reliability and the like.

Description

Device and method for detecting elements in radioactive sample
Technical Field
The invention relates to element detection, in particular to a device and a method for detecting elements in radioactive samples.
Background
The nuclear industry shielded room type ICP-AES (inductively coupled plasma atomic emission spectrometry) needs to simultaneously detect non-volatile elements such as Ag, Cr, Mo, Rh, Tc and the like in a high-radioactivity sample, and the shielded room is a gamma thermal room. After the ICP-AES and the shielding chamber are combined, the biological shielding and radioactivity containing function is required, the beta, gamma and other radiation from the sample can be effectively shielded, and the radiation protection requirement is met. Electronic devices that can effectively resist and isolate radiation such as beta, gamma, etc. are very expensive and difficult to operate and maintain, so it is critical to reduce the number of electronic components of ICP-AES inside the shielded room as much as possible.
In order to solve the above technical problems, the prior art adopts the following scheme: a matching box of a high-frequency ion source generator of the ICP-AES is placed in a shielding chamber. The matching box comprises a radio frequency ceramic vacuum capacitor and a motor, power transmission is connected with a power amplifier of the generator through a coaxial line, the motor control is manually adjusted through mechanical transmission or controlled by an external circuit, the matching box does not comprise a circuit for detecting current and voltage phases, and the load is manually finely adjusted to meet ignition conditions when different samples are fed every time. The ignition is difficult, the automatic nuclide analysis is not facilitated, meanwhile, the price of a radiation-resistant motor and a ceramic capacitor is 10-20 times of that of the conventional grade, the weight is large, a mechanical arm is not enough to perform replacement operation, and the maintenance is very troublesome.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides a device for detecting elements in radioactive samples.
The purpose of the invention is realized by the following technical scheme:
the detection device of the elements in the radioactive sample comprises a torch tube, an ignition coil and a power generator; the detection device further comprises:
the ignition coil is arranged in the nuclear radiation shielding chamber, and the power generator is arranged outside the nuclear radiation shielding chamber;
a first cable and a second cable, the first cable being connected to one end of the ignition coil and to one end of the power generator after passing through a wall of the nuclear radiation shielding chamber; the second cable is connected with the other end of the ignition coil and is connected with the other end of the power generator after penetrating through the wall of the nuclear radiation shielding chamber;
a phase detection unit for obtaining a first phase difference between signals of the first cable at an indoor and an outdoor part of the nuclear radiation shielding room and a second phase difference between signals of the second cable at the indoor and the outdoor parts of the nuclear radiation shielding room;
and the phase shifter is respectively arranged on the first cable and the second cable and is positioned outside the nuclear radiation shielding chamber.
Another object of the present invention is to provide a method for detecting an element in a radioactive sample using the apparatus for detecting an element in a radioactive sample, which is achieved by the following technical solutions:
the method for detecting the elements in the radioactive sample comprises the following steps:
inquiring a mapping relation in a memory, wherein the mapping relation is the output power P of the power generatoriIs out of phase with the first phase by alphaiSecond phase difference betaiAnd frequency f of the power generatoriThe corresponding relation between the two;
adjusting the output power and frequency of the power generator, and the first phase difference and the second phase difference according to the mapping relation; the power generator is arranged outside the nuclear radiation shielding chamber and is connected with an ignition coil in the nuclear radiation shielding chamber through a first cable and a second cable; the first phase difference is the phase difference between signals on a first cable respectively positioned at the inner side and the outer side of the nuclear radiation shielding room, and the second phase difference is the phase difference between signals on a second cable respectively positioned at the inner side and the outer side of the nuclear radiation shielding room;
the ignition coil is fired to analyze the radioactive sample within the nuclear radiation shielded chamber.
Compared with the prior art, the invention has the beneficial effects that:
1. the structure is simple, and the cost is low;
only an ignition coil is needed to be arranged in the nuclear radiation shielding chamber and the cable is lengthened, and the signal generator, the phase detection unit, the shifter and the like are arranged on the outer side or in the wall of the nuclear radiation shielding chamber, so that the performance requirement on devices is lowered, and the cost and the reliability are correspondingly lowered;
2. the reliability is good;
establishing a mapping relation, specifically a corresponding relation between the output power Pi of the power generator and the first phase difference alpha i, the second phase difference beta i and the frequency fi of the power generator, and before ignition, obtaining corresponding ignition parameters such as phase difference, frequency and the like by inquiring the mapping relation, thereby improving the success rate of ignition;
the load matching problem of the coil is solved, and the efficiency meets the detection requirement.
Drawings
The disclosure of the present invention will become more readily understood with reference to the accompanying drawings. As is readily understood by those skilled in the art: these drawings are only for illustrating the technical solutions of the present invention and are not intended to limit the scope of the present invention. In the figure:
fig. 1 is a schematic structural view of a device for detecting an element in a radioactive sample according to an embodiment of the present invention.
Detailed Description
Fig. 1 and the following description depict alternative embodiments of the invention to teach those skilled in the art how to make and reproduce the invention. Some conventional aspects have been simplified or omitted for the purpose of explaining the technical solution of the present invention. Those skilled in the art will appreciate that variations or substitutions from these embodiments will be within the scope of the invention. Those skilled in the art will appreciate that the features described below can be combined in various ways to form multiple variations of the invention. Thus, the present invention is not limited to the following alternative embodiments, but is only limited by the claims and their equivalents.
Example 1:
fig. 1 is a schematic structural diagram of an apparatus for detecting an element in a radioactive sample according to an embodiment of the present invention, and as shown in fig. 1, the apparatus for detecting an element in a radioactive sample includes:
a torch tube, an ignition coil 61 and a power generator 11, which are all the prior art in the field of ICP-AES detection;
the ignition coil is arranged in the nuclear radiation shielding chamber, and the power generator is arranged outside the nuclear radiation shielding chamber;
a first cable 71 and a second cable 72, the first cable 71 being connected to one end of the ignition coil 61 and to one end of the power generator 11 after passing through a wall of the nuclear radiation shielding chamber; the second cable 72 is connected to the other end of the ignition coil 11 and to the other end of the power generator 11 after passing through the wall of the nuclear radiation shielding chamber;
a phase detection unit for obtaining a first phase difference between signals of the first cable 71 at an indoor and an outdoor portion of the nuclear radiation shielding room, and a second phase difference between signals of the second cable 72 at the indoor and the outdoor portion of the nuclear radiation shielding room;
phase shifters disposed on the first and second cables 71 and 72, respectively, outside the nuclear radiation shielded room.
In order to accurately obtain the phase difference on the first cable and the second cable, further, the phase detecting unit includes:
the nuclear radiation shielding room comprises a first coupling module and a second coupling module, wherein the first coupling module is used for coupling out signals on a cable outside the nuclear radiation shielding room, and the second coupling module is used for coupling out signals on a cable inside the nuclear radiation shielding room; the second coupling module is disposed within a wall of the nuclear radiation shielded room;
the phase discriminator is arranged outside the nuclear radiation shielding chamber and is respectively connected with the first coupling module and the second coupling module.
In order to accurately obtain the phase difference on the first cable and the second cable, further, the phase detecting unit includes:
and the input end of the frequency filter is respectively connected with the first coupling module and the second coupling module, and the output end of the frequency filter is connected with the phase discriminator.
In order to accurately obtain the ignition parameter, further, the detecting device further includes:
a memory for storing the output power P of the power generatoriIs out of phase with the first phaseiSecond phase difference betaiAnd the frequency f of the power generatoriI is 1, 2 … N, and N is an integer not less than 2.
In order to accurately obtain the mapping relationship, further, the obtaining manner of the mapping relationship is:
the power generator keeps the same frequency and outputs different powers P in sequence1、P2…PNN is an integer not less than 2; at each output power PiThen, the phase shifter is adjusted so that the absolute value | α of the first phase differencei| and absolute value | β of second phase differenceiSimultaneously taking a minimum value;
at each output power PiAdjusting the frequency of the power generator so as to be equal to the power PiCorresponding first phase difference alphaiIs zero and the power PiAbsolute value | β of the corresponding second phase differenceiL takes a minimum value, or, so that with the power PiAbsolute value | α of corresponding first phase differenceiL takes a minimum value, with the power PiCorresponding second phase difference betaiIs zero.
In order to adjust the phase difference over the first and second cables, further, a phase shifter is arranged on the cable between the first and second coupling modules.
In order to improve the working performance, further, the detection device further comprises:
a conduit passing through the nuclear radiation shielded room, the first and second cables passing through the conduit;
and a refrigerant supply unit, such as cooling water, wherein the refrigerant supplied by the refrigerant supply unit enters the pipeline and circulates.
The method for detecting elements in a radioactive sample in the embodiment of the present invention, that is, the working method of the detection apparatus in the embodiment of the present invention, includes:
inquiring a mapping relation in a memory, wherein the mapping relation is the output power P of the power generatoriIs out of phase with the first phase by alphaiSecond phase difference betaiAnd frequency f of the power generatori1, 2 … N, N is an integer not less than 2;
adjusting the output power and frequency of the power generator, and the first phase difference and the second phase difference according to the mapping relation; the power generator is arranged outside the nuclear radiation shielding chamber and is connected with an ignition coil in the nuclear radiation shielding chamber through a first cable and a second cable; the first phase difference is the phase difference between signals on a first cable respectively positioned at the inner side and the outer side of the nuclear radiation shielding room, and the second phase difference is the phase difference between signals on a second cable respectively positioned at the inner side and the outer side of the nuclear radiation shielding room;
the ignition coil is fired to analyze the radioactive sample within the nuclear radiation shielded chamber.
In order to reduce the difficulty of adjustment, further, in the mapping relationship, when the first phase difference is zero, the absolute value of the second phase difference takes a minimum value, or when the absolute value of the first phase difference takes a minimum value, the second phase difference is zero.
Example 2:
an application example of the apparatus and method for detecting an element in a radioactive sample according to embodiment 1 of the present invention.
In this application example, as shown in fig. 1, the lengths of the first cable 71 and the second cable 72 are not less than 1.2m, such as 1.5 m; in the ICP-AES, the torch tube, the ignition coil 61 are located inside the nuclear radiation shielding chamber, and the power generator 11, the phase detection unit, the phase shifter, the frequency filter, the memory and the capacitance matching box are all located outside the nuclear radiation shielding chamber, such as outside or inside the wall of the nuclear radiation shielding chamber;
the phase detection unit comprises a first coupling module and a second coupling module, wherein the first coupling module comprises a first coupler 21 and a second coupler 22 which are respectively coupled out of the phases of signals on a first cable 71 and a second cable 72 which are positioned outside the nuclear radiation shielding room, and the second coupling module comprises a third coupler 23 and a fourth coupler 24 which are respectively coupled out of the phases of signals on the first cable 71 and the second cable 72 which are positioned inside or adjacent to the nuclear radiation shielding room; the second coupling module is disposed within a wall of the nuclear radiation shielded room; the output signals of the four couplers are respectively sent to the phase discriminator after passing through the frequency filters 31-34; the phase detector comprises a first phase detector 41 and a second phase detector 42, the first phase detector 41 obtains a first phase difference between signals of the first cable 71 respectively positioned on the indoor and outdoor parts of the nuclear radiation shielding room, and the second phase detector 42 obtains a second phase difference between signals of the second cable 72 respectively positioned on the indoor and outdoor parts of the nuclear radiation shielding room;
the first phase shifter 51 is disposed on the first cable 71 between the first coupler 21 and the third coupler 23; the second phase shifter 52 is disposed on the second cable 72 between the second coupler 22 and the fourth coupler 24.
A memory for storing the output power P of the power generatoriIs out of phase with the first phaseiSecond phase difference betaiAnd the frequency f of the power generatoriThe mapping relation between the two is that i is 1, 2 … N, and N is an integer not less than 2;
the pipeline penetrates through the nuclear radiation shielding chamber, and the first cable, the second cable and the ignition coil are all arranged in the pipeline; the refrigerant such as cooling water provided by the refrigerant providing unit enters the pipeline and circulates, thereby reducing the temperature of the cable and the ignition coil.
In order to obtain the mapping relationship by using the detection device, the specific method is as follows:
the power generator maintains the same frequency, e.g. 27.12MHz, and the power generator outputs different powers P in sequence1、P2…PNSuch as600W, 610W … 1600W, N is an integer not less than 2; at each output power PiThen, the phase shifter is adjusted so that the absolute value | α of the first phase differencei| and absolute value | β of second phase differenceiSimultaneously taking a minimum value;
at each output power PiAt the above-mentioned different power P1、P2…PNAdjusting the frequency of the power generator to the power P in the frequency range of 25-29MHziCorresponding first phase difference alphaiIs zero and the power PiAbsolute value | β of the corresponding second phase differenceiL takes a minimum value, or, so that with the power PiAbsolute value | α of corresponding first phase differenceiL takes a minimum value, with the power PiCorresponding second phase difference betaiIs zero.
As can be seen from the above, in the detection device of the present patent, only the ignition coil is located inside the nuclear radiation shielding chamber with respect to the ignition portion, and other portions, such as the power generator, the phase detection unit, the phase shifter, the frequency filter, the memory and the capacitance matching box, are located outside the nuclear radiation shielding chamber.
The method for detecting elements in a radioactive sample in the embodiment of the present invention, that is, the working method of the detection apparatus in the embodiment of the present invention, includes:
inquiring a mapping relation in a memory, wherein the mapping relation is the output power P of the power generatoriIs out of phase with the first phase by alphaiSecond phase difference betaiAnd frequency f of the power generatori1, 2 … N, N is an integer not less than 2;
adjusting the output power and frequency of the power generator, and the first phase difference and the second phase difference according to the mapping relation; the power generator is arranged outside the nuclear radiation shielding chamber and is connected with an ignition coil in the nuclear radiation shielding chamber through a first cable and a second cable; the first phase difference is the phase difference between signals on a first cable respectively positioned at the inner side and the outer side of the nuclear radiation shielding room, and the second phase difference is the phase difference between signals on a second cable respectively positioned at the inner side and the outer side of the nuclear radiation shielding room;
the ignition coil is fired to analyze the radioactive sample within the nuclear radiation shielded chamber.
As can be seen from the above, in view of storing the mapping relationship in the memory, when ignition is required, the mapping relationship is queried, so that the preferred ignition parameter can be obtained, and the ignition success rate is significantly improved.

Claims (10)

1. The detection device of the elements in the radioactive sample comprises a torch tube, an ignition coil and a power generator; characterized in that, the detection device further comprises:
the ignition coil is arranged in the nuclear radiation shielding chamber, and the power generator is arranged outside the nuclear radiation shielding chamber;
a first cable and a second cable, the first cable being connected to one end of the ignition coil and to one end of the power generator after passing through a wall of the nuclear radiation shielding chamber; the second cable is connected with the other end of the ignition coil and is connected with the other end of the power generator after penetrating through the wall of the nuclear radiation shielding chamber;
a phase detection unit for obtaining a first phase difference between signals of the first cable at an indoor and an outdoor part of the nuclear radiation shielding room and a second phase difference between signals of the second cable at the indoor and the outdoor parts of the nuclear radiation shielding room;
and the phase shifter is respectively arranged on the first cable and the second cable and is positioned outside the nuclear radiation shielding chamber.
2. The apparatus for detecting an element in a radioactive sample according to claim 1, wherein said phase detecting unit comprises:
the nuclear radiation shielding room comprises a first coupling module and a second coupling module, wherein the first coupling module is used for coupling out signals on a cable outside the nuclear radiation shielding room, and the second coupling module is used for coupling out signals on a cable inside the nuclear radiation shielding room; the second coupling module is disposed within a wall of the nuclear radiation shielded room;
the phase discriminator is arranged outside the nuclear radiation shielding chamber and is respectively connected with the first coupling module and the second coupling module.
3. The apparatus for detecting an element in a radioactive sample according to claim 2, wherein said phase detecting unit comprises:
and the input end of the frequency filter is respectively connected with the first coupling module and the second coupling module, and the output end of the frequency filter is connected with the phase discriminator.
4. The apparatus for detecting an element in a radioactive sample according to claim 1, further comprising:
a memory for storing the output power P of the power generatoriIs out of phase with the first phaseiSecond phase difference betaiAnd the frequency f of the power generatoriI is 1, 2 … N, and N is an integer not less than 2.
5. The apparatus according to claim 4, wherein the mapping is obtained by:
the power generator keeps the same frequency and outputs different powers P in sequence1、P2…PNN is an integer not less than 2; at each output power PiThen, the phase shifter is adjusted so that the absolute value | α of the first phase differencei| and absolute value | β of second phase differenceiSimultaneously taking a minimum value;
at each output power PiAdjusting the frequency of the power generator so as to be equal to the power PiCorresponding first phase difference alphaiIs zero and the power PiAbsolute value | β of the corresponding second phase differenceiGet |Minimum value, or, so as to be equal to said power PiAbsolute value | α of corresponding first phase differenceiL takes a minimum value, with the power PiCorresponding second phase difference betaiIs zero.
6. The apparatus of claim 2, wherein a phase shifter is disposed on the cable between the first and second coupling modules.
7. The apparatus for detecting an element in a radioactive sample according to claim 1, further comprising:
a conduit passing through the nuclear radiation shielded room, the first and second cables passing through the conduit;
and the refrigerant provided by the refrigerant providing unit enters the pipeline and circulates.
8. The apparatus according to claim 1, wherein the first and second wires have a length of not less than 1.2 m.
9. The method for detecting the elements in the radioactive sample comprises the following steps:
inquiring a mapping relation in a memory, wherein the mapping relation is the output power P of the power generatoriIs out of phase with the first phase by alphaiSecond phase difference betaiAnd frequency f of the power generatori1, 2 … N, N is an integer not less than 2;
adjusting the output power and frequency of the power generator, and the first phase difference and the second phase difference according to the mapping relation; the power generator is arranged outside the nuclear radiation shielding chamber and is connected with an ignition coil in the nuclear radiation shielding chamber through a first cable and a second cable; the first phase difference is the phase difference between signals on a first cable respectively positioned at the inner side and the outer side of the nuclear radiation shielding room, and the second phase difference is the phase difference between signals on a second cable respectively positioned at the inner side and the outer side of the nuclear radiation shielding room;
the ignition coil is fired to analyze the radioactive sample within the nuclear radiation shielded chamber.
10. The method according to claim 9, wherein in the mapping, when the first phase difference is zero, the absolute value of the second phase difference takes a minimum value, or when the absolute value of the first phase difference takes a minimum value, the second phase difference is zero.
CN202110657836.9A 2021-06-15 2021-06-15 Device and method for detecting elements in radioactive sample Pending CN113533308A (en)

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Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5383019A (en) * 1990-03-23 1995-01-17 Fisons Plc Inductively coupled plasma spectrometers and radio-frequency power supply therefor
JP2000123782A (en) * 1998-10-16 2000-04-28 Yokogawa Analytical Systems Inc High-frequency inductively coupled plasma analyzer
JP3137622B1 (en) * 1999-11-16 2001-02-26 株式会社東芝 Exhaust gas radiation monitor and exhaust gas radiation monitor system
US20020023899A1 (en) * 2000-08-25 2002-02-28 Khater Marwan H. Transmission line based inductively coupled plasma source with stable impedance
CN1620712A (en) * 2001-12-21 2005-05-25 应用材料有限公司 Self-ionized and inductively-coupled plasma for sputtering and resputtering
US20110133650A1 (en) * 2009-12-09 2011-06-09 Jehara Corporation Apparatus for generating plasma
CN104637767A (en) * 2013-11-15 2015-05-20 中微半导体设备(上海)有限公司 Inductance coil and inductance coupling plasma processing device
US20150191823A1 (en) * 2014-01-06 2015-07-09 Applied Materials, Inc. High efficiency inductively coupled plasma source with customized rf shield for plasma profile control
CN105122042A (en) * 2013-03-13 2015-12-02 拉多姆公司 Microwave plasma spectrometer using dielectric resonator
CN204859882U (en) * 2015-08-25 2015-12-09 广州市广锴环保科技有限公司 Electromagnetic radiation shield assembly
US20160217978A1 (en) * 2013-09-12 2016-07-28 Meyer Burger (Germany) Ag Plasma Generation Device
CN106290155A (en) * 2016-08-02 2017-01-04 钢研纳克检测技术有限公司 One is applied to ICP spectrogrph light source shield structure
CN107240542A (en) * 2016-03-28 2017-10-10 朗姆研究公司 Faraday shield with radio frequency powered includes the lining treatment system of coil
CN107369604A (en) * 2016-05-12 2017-11-21 北京北方华创微电子装备有限公司 Reaction chamber and semiconductor processing equipment
CN107591310A (en) * 2017-09-30 2018-01-16 北京普析通用仪器有限责任公司 A kind of graphite furnace Electrothermal vaporization feeding device ion gun and its plasma mass spectrograph
CN109950124A (en) * 2019-04-17 2019-06-28 大连民族大学 A kind of radio-frequency coil for eliminating inductivity coupled plasma mass spectrometry secondary discharge
CN110856331A (en) * 2019-11-17 2020-02-28 北京东方计量测试研究所 Uniform radio frequency plasma source for space plasma environment simulation

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5383019A (en) * 1990-03-23 1995-01-17 Fisons Plc Inductively coupled plasma spectrometers and radio-frequency power supply therefor
JP2000123782A (en) * 1998-10-16 2000-04-28 Yokogawa Analytical Systems Inc High-frequency inductively coupled plasma analyzer
JP3137622B1 (en) * 1999-11-16 2001-02-26 株式会社東芝 Exhaust gas radiation monitor and exhaust gas radiation monitor system
US20020023899A1 (en) * 2000-08-25 2002-02-28 Khater Marwan H. Transmission line based inductively coupled plasma source with stable impedance
CN1620712A (en) * 2001-12-21 2005-05-25 应用材料有限公司 Self-ionized and inductively-coupled plasma for sputtering and resputtering
US20110133650A1 (en) * 2009-12-09 2011-06-09 Jehara Corporation Apparatus for generating plasma
CN105122042A (en) * 2013-03-13 2015-12-02 拉多姆公司 Microwave plasma spectrometer using dielectric resonator
US20160217978A1 (en) * 2013-09-12 2016-07-28 Meyer Burger (Germany) Ag Plasma Generation Device
CN104637767A (en) * 2013-11-15 2015-05-20 中微半导体设备(上海)有限公司 Inductance coil and inductance coupling plasma processing device
US20150191823A1 (en) * 2014-01-06 2015-07-09 Applied Materials, Inc. High efficiency inductively coupled plasma source with customized rf shield for plasma profile control
CN204859882U (en) * 2015-08-25 2015-12-09 广州市广锴环保科技有限公司 Electromagnetic radiation shield assembly
CN107240542A (en) * 2016-03-28 2017-10-10 朗姆研究公司 Faraday shield with radio frequency powered includes the lining treatment system of coil
CN107369604A (en) * 2016-05-12 2017-11-21 北京北方华创微电子装备有限公司 Reaction chamber and semiconductor processing equipment
CN106290155A (en) * 2016-08-02 2017-01-04 钢研纳克检测技术有限公司 One is applied to ICP spectrogrph light source shield structure
CN107591310A (en) * 2017-09-30 2018-01-16 北京普析通用仪器有限责任公司 A kind of graphite furnace Electrothermal vaporization feeding device ion gun and its plasma mass spectrograph
CN109950124A (en) * 2019-04-17 2019-06-28 大连民族大学 A kind of radio-frequency coil for eliminating inductivity coupled plasma mass spectrometry secondary discharge
CN110856331A (en) * 2019-11-17 2020-02-28 北京东方计量测试研究所 Uniform radio frequency plasma source for space plasma environment simulation

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
王超;金星;石宝松;杜江;: "ICP光源中射频功率测量装置的设计", 化工自动化及仪表, no. 05, pages 01 - 04 *

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