CN113531946A - Dedusting tank cooling system for monocrystalline silicon production based on low-temperature jet refrigeration - Google Patents

Dedusting tank cooling system for monocrystalline silicon production based on low-temperature jet refrigeration Download PDF

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Publication number
CN113531946A
CN113531946A CN202110685373.7A CN202110685373A CN113531946A CN 113531946 A CN113531946 A CN 113531946A CN 202110685373 A CN202110685373 A CN 202110685373A CN 113531946 A CN113531946 A CN 113531946A
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China
Prior art keywords
tank
inlet
outlet
dust removal
evaporator
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Pending
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CN202110685373.7A
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Chinese (zh)
Inventor
徐英杰
毛成斌
黄松林
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Shengzhou Zhejiang University of Technology Innovation Research Institute
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Shengzhou Zhejiang University of Technology Innovation Research Institute
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Priority to CN202110685373.7A priority Critical patent/CN113531946A/en
Publication of CN113531946A publication Critical patent/CN113531946A/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B19/00Machines, plants or systems, using evaporation of a refrigerant but without recovery of the vapour
    • F25B19/02Machines, plants or systems, using evaporation of a refrigerant but without recovery of the vapour using fluid jet, e.g. of steam
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00Fluid-circulation arrangements
    • F25B41/20Disposition of valves, e.g. of on-off valves or flow control valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00Fluid-circulation arrangements
    • F25B41/20Disposition of valves, e.g. of on-off valves or flow control valves
    • F25B41/24Arrangement of shut-off valves for disconnecting a part of the refrigerant cycle, e.g. an outdoor part

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)

Abstract

A dedusting tank cooling system for monocrystalline silicon production based on low-temperature jet refrigeration belongs to the technical field of low-grade heat source utilization systems. The device comprises a constant-temperature water tank, a first water pump, a dust removal tank, a heat storage water tank, a second water pump and a generator, wherein a heat exchanger is arranged at the bottom of the dust removal tank; also includes a refrigerant pump, a condenser, an ejector and an evaporator. The system adopts multi-mode cascade refrigeration, so that the energy consumption of the system is saved, the refrigeration of a plurality of dust removal tanks can be realized in a short time, and the economic benefit is improved; the steam jet type refrigerating system has the advantages of stable heat source, few moving parts, good equipment safety, high system efficiency and the like; through the heat exchanger that sets up, heat exchange efficiency is high, has effectively guaranteed the security of dust removal jar and the high-efficient refrigeration of system.

Description

Dedusting tank cooling system for monocrystalline silicon production based on low-temperature jet refrigeration
Technical Field
The invention belongs to the technical field of low-grade heat source utilization systems, and particularly relates to a dedusting tank cooling system for monocrystalline silicon production based on low-temperature jet refrigeration.
Background
With the increasing economic level and environmental awareness of people, the problems of energy crisis, environmental pollution and the like are widely concerned by countries in the world. The traditional fossil fuel combustion not only consumes a large amount of energy, but also can damage the environment, and is also one of the 'fierce' of the greenhouse effect. Researchers are extensively dedicated to search a new energy source to replace the traditional fossil energy source, especially clean energy sources such as solar energy, and the new energy source is widely researched by people due to the advantages of environmental protection, high reserves, sustainability, economy and the like.
People have more and more extensive research on solar cells, and currently, silicon is used as a main raw material of the solar cells and is used as the raw material of the solar cells due to the characteristics of high reserves, mature preparation process, no pollution, stable performance and the like. At present, high-purity large-diameter single-crystal silicon is also mainly produced by the Czochralski method in a single-crystal furnace, which is grown under a vacuum atmosphere of 1400 ℃. However, during the crystal growth process, a large amount of oxides mainly comprising silicon monoxide dust can be produced, and a double-screw dry vacuum pump (originally, a slide valve vacuum pump is an oil pump) is adopted in a common single crystal furnace system, and the vacuum pump is sensitive to dust particles in tail gas, so that the dry pump is easily damaged when the dust particles are more than 1 um. Therefore, a dust removal tank is arranged in front of the dry pump to intercept oxides so as to ensure the normal operation of the system.
Therefore, after each production cycle of the single crystal furnace, a large amount of silicon monoxide dust can be accumulated in the dust removal tank, and the silicon monoxide is very active and flammable when meeting air, so that a filter bag in the dust removal tank is easily burnt out or scalded out at high temperature. At present, according to a crystal growth process, after a vacuum pump stops running after a furnace is stopped, a dust removing tank needs to be placed in a cool and ventilated environment to be cooled for a long time, an ash removing opening is opened, and air is slowly introduced into the tank through a valve. Although the mode is simple and convenient, the cooling is needed after each production, the production process is greatly slowed down, and the production is reduced and the economic loss is caused in the past. In addition, because a large amount of oxides are accumulated at the bottom of the dust removal tank to cause heat accumulation, all dust cannot be completely cooled even if the dust removal tank is cooled for a long time, and ash is re-combusted after opening. Therefore, a set of efficient and economic dust removal tank cooling system for monocrystalline silicon production is designed, and the design is very important.
Jet refrigeration systems can achieve thermal drive by recovering low temperature waste heat, and are currently widely studied by many scholars. Compared with the traditional compression heat pump, the system can directly recover low-temperature waste heat, and has no moving parts such as a compressor and the like, so that the system is more compact, and the performance coefficient is higher. The jet refrigerating system directly adopts a generator to recover low-temperature waste heat, a condenser discharges the waste heat, and an evaporator is used for producing cold.
Disclosure of Invention
In view of the above problems in the prior art, an object of the present invention is to provide a set of cooling system for a dust-removing tank for monocrystalline silicon production based on low-temperature jet refrigeration, the system having multiple operation modes, and the system can directly perform cooling and recover heat in the dust-removing tank, store the heat in a heat storage water tank, and then use the recovered low-temperature heat source to drive the jet refrigeration system to normally operate, thereby greatly improving the operation efficiency of the system.
The invention provides the following technical scheme: cryogenic spray formula is cryogenic dust removal jar cooling system for production of monocrystalline silicon based on, its characterized in that: the device comprises a constant-temperature water tank, a first water pump, a dust removal tank, a heat storage water tank, a second water pump and a generator, wherein a heat exchanger is arranged at the bottom of the dust removal tank;
the second outlet of the generator is connected with the first inlet of the ejector, the second inlet of the ejector is connected with the first outlet of the evaporator, the outlet of the ejector is connected with the first inlet of the condenser, the first outlet of the condenser is connected with the inlet of the refrigerant pump and the first inlet of the evaporator respectively, the outlet of the refrigerant pump is connected with the second inlet of the generator, the second outlet of the evaporator is connected with the inlet of the first water pump, and the second inlet of the evaporator is connected with the outlet of the dust removal tank.
The dedusting tank cooling system for monocrystalline silicon production based on low-temperature jet refrigeration is characterized in that a first stop valve is arranged between an outlet of the constant-temperature water tank and an inlet of a first water pump, a second stop valve is arranged between an outlet of the heat exchanger and an inlet of the heat storage water tank, and a fourth stop valve is arranged between a first outlet of the generator and the inlet of the constant-temperature water tank.
The dedusting tank cooling system for monocrystalline silicon production based on low-temperature jet refrigeration is characterized in that a throttle valve is arranged between a first outlet of a condenser and a first inlet of an evaporator, a third stop valve is arranged between a second outlet of the evaporator and an inlet of a first water pump, and a fifth stop valve is arranged between a second inlet of the evaporator and an outlet of the dedusting tank.
The dedusting tank cooling system for monocrystalline silicon production based on low-temperature jet refrigeration is characterized in that a second inlet and a second outlet of the condenser are both connected with air.
The cooling system of the dust removing tank for monocrystalline silicon production based on low-temperature jet refrigeration is characterized in that the number of the dust removing tank is one.
The cooling system of the dust removing tanks for monocrystalline silicon production based on low-temperature jet refrigeration is characterized in that the number of the dust removing tanks is a plurality of dust removing tanks which are connected in parallel.
By adopting the technology, compared with the prior art, the invention has the following beneficial effects:
1) the system adopts multi-mode cascade refrigeration, so that the energy consumption of the system is saved, the refrigeration of a plurality of dust removal tanks can be realized in a short time, and the economic benefit is improved;
2) the steam jet type refrigeration system is adopted, and the heat storage water tank recovers waste heat for heat driving, so that the steam jet type refrigeration system has the advantages of stable heat source, few moving parts, good equipment safety, high system efficiency and the like;
3) the system directly cools dust at the bottom of the dust removal tank through the heat exchanger, has high heat exchange efficiency, avoids the problem of low heat exchange efficiency caused by heat insulation through a stainless steel wall, and effectively ensures the safety of the dust removal tank and the efficient refrigeration of the system.
Drawings
FIG. 1 is a schematic diagram of a first stage cooling system according to an embodiment of the present invention;
FIG. 2 is an overall schematic of the system of the present invention.
In the figure: 1. a constant temperature water tank; 2. a first shut-off valve; 3. a first water pump; 4. a dust removal tank; 5. a second stop valve; 6. a heat storage water tank; 7. a second water pump; 8. a generator; 9. A refrigerant pump; 10. a third stop valve; 11. a fourth stop valve; 12. a fifth stop valve; 13. A throttle valve; 14. a condenser; 15. an ejector; 16. an evaporator.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
On the contrary, the invention is intended to cover alternatives, modifications, equivalents and alternatives which may be included within the spirit and scope of the invention as defined by the appended claims. Furthermore, in the following detailed description of the present invention, certain specific details are set forth in order to provide a better understanding of the present invention. It will be apparent to one skilled in the art that the present invention may be practiced without these specific details.
Referring to fig. 1 and 2, the dust removal tank cooling system for monocrystalline silicon production based on low-temperature jet refrigeration comprises a constant-temperature water tank 1, a first stop valve 2, a first water pump 3, a dust removal tank 4, a second stop valve 5, a heat storage water tank 6, a second water pump 7 and a generator 8.
Specifically, the export of constant temperature water tank 1 links to each other with the entry of first stop valve 2, the export of first stop valve 2 links to each other with the entry of first water pump 3, the export of first water pump 3 links to each other with the entry of 4 bottom intercommunication heat exchangers of dust removal jar, the export of 4 bottom intercommunication heat exchangers of dust removal jar links to each other with the entry of second stop valve 5, the export of second stop valve 5 links to each other with heat storage water tank 6, the export of heat storage water tank 6 links to each other with the entry of second water pump 7, the export of second water pump 7 links to each other with the first entry of generator 8, the first export of generator 8 links to each other with the entry of fourth stop valve 11, the export of fourth stop valve 11 links to each other with the entry of constant temperature water tank 1. When just beginning the cooling, slowly let in the air toward dust removal tank 4 is inside, and the SiO dust can slowly react with the air and give off the heat this moment, and in order to maintain the inside temperature of dust removal tank 4, cooling water flows into dust removal tank 4 from thermostatic water tank 1, can guarantee on the one hand that the inside temperature of dust removal tank 4 is unlikely to too high, and on the other hand can be with the heat through the water that flows out carry heat storage water tank 6 in save.
The system also comprises a refrigerant pump 9, a third stop valve 10, a fourth stop valve 11, a fifth stop valve 12, a throttle valve 13, a condenser 14, an ejector 15 and an evaporator 16, wherein the components are combined and connected to form an ejection refrigeration system.
Specifically, the second outlet of the generator 8 is connected to a first inlet of an ejector 15, the second inlet of the ejector 15 is connected to a first outlet of an evaporator 16, the outlet of the ejector 15 is connected to a first inlet of a condenser 14, a first outlet of the condenser 14 is connected to an inlet of a refrigerant pump 9 and an inlet of a throttle valve 13, respectively, an outlet of the refrigerant pump 9 is connected to a second inlet of the generator 8, both the second inlet and the second outlet of the condenser 14 are connected to air, and an outlet of the throttle valve 13 is connected to a first inlet of the evaporator 16.
Specifically, the second outlet of the evaporator 16 is connected to the inlet of the third stop valve 10, the outlet of the third stop valve 10 is connected to the inlet of the first water pump 3, the outlet of the dust removing tank 4 is connected to the inlet of the fifth stop valve 12, and the outlet of the fifth stop valve 12 is connected to the second inlet of the evaporator 16. When the silicon monoxide dust is basically reacted, the injection refrigeration system is started, the injection refrigeration system is driven to operate by the heat of the heat storage water tank 6, and the dust removal tank 4 absorbs the cold energy produced in the evaporator 16 and realizes temperature reduction.
Wherein, the number of dust removing tank 4 can be one or a plurality of, and when the number of dust removing tank 4 is a plurality of, a plurality of dust removing tanks 4 are arranged in parallel.
The working principle of the system of the invention is as follows:
the first stage is as follows: when the cooling is started, the first stop valve 2, the second stop valve 5 and the first water pump 3 are opened, the third stop valve 10, the fourth stop valve 11, the fifth stop valve 12, the second water pump 7 and the refrigerant pump 9 are closed, air is slowly introduced into the dust removal tank 4, at the moment, silicon monoxide dust can slowly react with the air and emit heat, in order to maintain the internal temperature of the dust removal tank 4, cooling water flows into the dust removal tank 4 from the constant temperature water tank 1, the temperature is guaranteed not to exceed 80 ℃, and meanwhile, the heat is conveyed into the heat storage water tank 6 through the flowing water to be stored.
And a second stage: after cooling for a period of time, the hot water storage tank 6 has stored enough heat, and the silicon monoxide dust does not react with the air, at this time, the first stop valve 2, the second stop valve 5 and the first water pump 3 are closed, and the third stop valve 10, the fourth stop valve 11, the fifth stop valve 12, the second water pump 7 and the refrigerant pump 9 are opened. The dust removing tank 4 is cooled by a jet refrigeration system. First, the generator 8 absorbs the low-grade heat source stored in the first-stage heat storage tank 6 to heat and vaporize the refrigerant, thereby converting the refrigerant into high-temperature and high-pressure steam. Then, high-temperature and high-pressure steam enters the ejector 15 as a primary flow and enters the mixing chamber through the nozzle to form a high-speed jet flow, so that an ejection fluid from the evaporator 16 is driven, and after being uniformly mixed, the two streams of fluid form a medium-temperature and medium-pressure gas through the diffusion chamber of the ejector 15 and flow out of the ejector 15. The gas is condensed into liquid by the condenser 14, the surplus heat is discharged to the environment and then is divided into two paths, one path is pressurized by the refrigerant pump 9 to form high-pressure liquid to flow into the generator 8 again to complete the circulation, the other path flows through the evaporator 16 to absorb the temperature of cooling water, and the gas formed after evaporation flows into the ejector 15 again as secondary fluid. And the cooling water is continuously circulated in the evaporator 16 to absorb the cold energy in the evaporator 16, and flows into the evaporator 16 after being used for cooling the dust removing tank 4.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.

Claims (6)

1. Cryogenic spray formula is cryogenic dust removal jar cooling system for production of monocrystalline silicon based on, its characterized in that: the device comprises a constant-temperature water tank (1), a first water pump (3), a dust removal tank (4), a heat storage water tank (6), a second water pump (7) and a generator (8), wherein a heat exchanger is arranged at the bottom of the dust removal tank (4), the constant-temperature water tank (1), the first water pump (3), the heat exchanger arranged at the bottom of the dust removal tank (4), the heat storage water tank (6), the second water pump (7) and the generator (8) are sequentially connected to form a loop, an outlet of the second water pump (7) is connected with a first inlet of the generator (8), and a first outlet of the generator (8) is connected with an inlet of the constant-temperature water tank (1);
the dust removal device is characterized by further comprising a refrigerant pump (9), a condenser (14), an ejector (15) and an evaporator (16), wherein a second outlet of the generator (8) is connected with a first inlet of the ejector (15), a second inlet of the ejector (15) is connected with a first outlet of the evaporator (16), an outlet of the ejector (15) is connected with a first inlet of the condenser (14), a first outlet of the condenser (14) is respectively connected with an inlet of the refrigerant pump (9) and a first inlet of the evaporator (16), an outlet of the refrigerant pump (9) is connected with a second inlet of the generator (8), a second outlet of the evaporator (16) is connected with an inlet of the first water pump (3), and a second inlet of the evaporator (16) is connected with an outlet of the dust removal tank (4).
2. The dust removing tank cooling system based on low-temperature jet refrigeration for monocrystalline silicon production as claimed in claim 1, characterized in that a first stop valve (2) is arranged between an outlet of the constant-temperature water tank (1) and an inlet of the first water pump (3), a second stop valve (5) is arranged between an outlet of the heat exchanger and an inlet of the heat storage water tank (6), and a fourth stop valve (11) is arranged between a first outlet of the generator (8) and the inlet of the constant-temperature water tank (1).
3. The dust removing tank cooling system for the production of the monocrystalline silicon based on the low-temperature jet refrigeration as claimed in claim 1, characterized in that a throttle valve (13) is arranged between the first outlet of the condenser (14) and the first inlet of the evaporator (16), a third stop valve (10) is arranged between the second outlet of the evaporator (16) and the inlet of the first water pump (3), and a fifth stop valve (12) is arranged between the second inlet of the evaporator (16) and the outlet of the dust removing tank (4).
4. The dust-removing tank cooling system for the production of monocrystalline silicon based on low-temperature jet refrigeration according to claim 1, characterized in that the second inlet and the second outlet of the condenser (14) are both connected with air.
5. The dust-removing tank cooling system for the production of monocrystalline silicon based on low-temperature jet refrigeration according to claim 1, characterized in that the number of the dust-removing tanks (4) is one.
6. The cooling system of the dedusting tank for the monocrystalline silicon production based on the low-temperature jet refrigeration as claimed in claim 1, wherein the number of the dedusting tanks (4) is several, and several dedusting tanks (4) are connected in parallel.
CN202110685373.7A 2021-06-21 2021-06-21 Dedusting tank cooling system for monocrystalline silicon production based on low-temperature jet refrigeration Pending CN113531946A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003262412A (en) * 2002-03-05 2003-09-19 Ship & Ocean Foundation Method and system for supplying refrigerant to refrigerant heater of steam injection type cooling and heat pump system
CN201666689U (en) * 2010-04-26 2010-12-08 天津商业大学 Solar energy driven water and vapor injecting refrigeration system
CN208025886U (en) * 2018-01-18 2018-10-30 北京丰联奥睿科技有限公司 A kind of detachable mechanical refrigeration and auxiliary cold source United system
JP2021076262A (en) * 2019-11-05 2021-05-20 富士電機株式会社 Ejector cooling device
CN213454414U (en) * 2020-10-09 2021-06-15 阳春科迪尔制冷设备有限公司 Natural cooling type temperature controller

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003262412A (en) * 2002-03-05 2003-09-19 Ship & Ocean Foundation Method and system for supplying refrigerant to refrigerant heater of steam injection type cooling and heat pump system
CN201666689U (en) * 2010-04-26 2010-12-08 天津商业大学 Solar energy driven water and vapor injecting refrigeration system
CN208025886U (en) * 2018-01-18 2018-10-30 北京丰联奥睿科技有限公司 A kind of detachable mechanical refrigeration and auxiliary cold source United system
JP2021076262A (en) * 2019-11-05 2021-05-20 富士電機株式会社 Ejector cooling device
CN213454414U (en) * 2020-10-09 2021-06-15 阳春科迪尔制冷设备有限公司 Natural cooling type temperature controller

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Application publication date: 20211022