CN113524061A - Vacuum chuck structure capable of continuously rotating - Google Patents
Vacuum chuck structure capable of continuously rotating Download PDFInfo
- Publication number
- CN113524061A CN113524061A CN202010294017.8A CN202010294017A CN113524061A CN 113524061 A CN113524061 A CN 113524061A CN 202010294017 A CN202010294017 A CN 202010294017A CN 113524061 A CN113524061 A CN 113524061A
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- CN
- China
- Prior art keywords
- rotary
- base
- suction
- groove
- sucking
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- Pending
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
- B25J15/0683—Details of suction cup structure, e.g. grooves or ridges
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The application provides a vacuum chuck structure that can encircle in succession, the concave suction groove of ring that the axle rotary column that mainly changes the sucking disc set up through this encircles airtight and the inside vacuum suction mouth that establishes can do 360 degrees positive contra-rotation vacuum suction effect relatively this drive seat and this base, this 360 degrees positive contra-rotation vacuum suction effect and through this encircle the absorption air flue that changes the sucking disc, and through this absorption hole give this many network forms and the suction groove of intercommunication each other all have even vacuum adsorption power way each other, can let the work piece can reach the even vacuum adsorption of bottom fixedly through this absorption power way, and can reach 360 degrees continuous positive contra-rotation's efficiency simultaneously.
Description
Technical Field
The application relates to a vacuum chuck structure that can encircle in succession, especially one kind through 360 degrees positive contra-rotation vacuum suction effect and through the absorption air flue of the sucking disc that encircles to and evenly give these many network forms and the suction groove that communicates each other all have even vacuum adsorption power way through the absorption hole, can let the work piece can reach the fixed innovative structural design who has the efficiency that reaches 360 degrees continuous positive contra-rotation concurrently of even vacuum adsorption in bottom.
Background
In general, in order to fix some workpieces, such as thin plates, acrylic or glass, a machining mechanism, a detecting mechanism or a measuring mechanism makes a relative motion between the workpiece and a machining tool, or between the workpiece and a detecting instrument or between the workpiece and the measuring instrument, the motion modes include: the workpiece is fixed and only the machining tool, the detecting instrument or the measuring instrument is rotated and matched with the feeding cutting or grinding machining or detecting or measuring instrument; or the workpiece moves or rotates, and the processing tool, the detecting instrument or the measuring instrument is fixed; or the workpiece and the processing tool or the detecting instrument or the measuring instrument move or rotate in coordination with various changes in the processing or detecting or measuring type. Whether the workpiece is moved or rotated or fixed, the workpiece must be fixed on a processing machine or an inspection machine or a measuring machine, and the fixed workpiece needs to be matched with a clamping jaw and a clamping head mechanism on the processing machine or the inspection machine or the measuring machine to clamp and position the workpiece by changing the opening size of the clamping jaw and the clamping head. However, workpieces are not suitable for positioning in a processing or inspection or measurement machine using chucks or jaws, because some workpieces are easily deformed or broken by over-gripping or fall off by under-gripping; the prior art also has a vacuum suction mode for fixing the workpiece for processing or detecting or measuring, however, the mechanism for vacuum suction of the workpiece in the prior art cannot perform continuous forward and backward rotation of 360 degrees, so that some interference situations are easily caused when a user operates the machine.
Disclosure of Invention
Based on the technical problem to be solved, the present application mainly aims to provide a vacuum chuck structure capable of continuously rotating; the problem to be solved is to improve and break through the problem that the prior art is provided with a vacuum adsorption type fixed workpiece mechanism which cannot perform 360-degree continuous forward and reverse rotation, so that a user is easy to cause some interference situations when operating a machine;
the vacuum chuck structure comprises a base, a shaft assembly part is formed in the center, at least one suction part is arranged on the inner ring periphery of the shaft assembly part, a suction head is arranged at the other end of the suction part corresponding to the outer edge position of the base in an airtight communication mode, the upper edge position and the lower edge position of the suction part arranged on the inner ring periphery of the shaft assembly part are respectively provided with a first inner ring groove and a second inner ring groove in a concave mode, and a first airtight ring and a second airtight ring are respectively embedded and assembled in the first inner ring groove and the second inner ring groove in an airtight mode; in addition, a linking part is arranged at a preset position of the base; a driving rotary seat, which comprises a stator at the bottom and a rotor at the top of the stator, wherein the stator is arranged at the top end of the base, a linking hole is arranged at the linking part of the stator corresponding to the base, and the connecting part and the linking hole are relatively screwed and locked together through a first bolt, so that the stator and the base are relatively fixed, wherein the driving rotary seat is in a Direct Drive Motor (Direct Drive Motor) shape and can Drive the rotor to operate in a Motor mode; a shaft group hole is arranged at the position of the driving rotary seat corresponding to the shaft group of the base and opposite to the center of the rotor, and a plurality of assembling parts are distributed on the top surface of the rotor; a rotary sucking disc, which is arranged on the top surface of the rotor of the rotary drive seat, the top surface of the rotary sucking disc is provided with a group arrangement part corresponding to a plurality of group connection parts arranged on the top surface of the rotor of the rotary drive seat, the group connection parts and the group arrangement parts are relatively screwed and locked and combined through a plurality of third bolts, so that the rotor of the rotary drive seat can drive the rotary sucking disc to do forward and backward rotary motion of 360 degrees, an adsorption surface is formed on the top of the rotary sucking disc, a plurality of sucking grooves which are in network shapes and are mutually communicated are arranged in the preset position groove of the adsorption surface, and a plurality of adsorption holes are arranged in the preset position in the sucking groove; a shaft rotary column is protruded downwards from the center of the bottom of the rotary sucking disc, the shaft rotary column is positioned in the shaft group hole of the driving rotary seat and the shaft group part of the base, the shaft rotary column is provided with a concave ring air-pumping groove corresponding to the shaft group part of the base and further corresponding to the position of the air-pumping part, the concave ring air-pumping groove is provided with air-tightness in the shaft group part of the base through the first air-tight ring and the second air-tight ring, wherein a plurality of vacuum suction ports are distributed in the concave ring air-pumping groove in a surrounding manner, the vacuum suction ports are communicated with the adsorption holes on the top surface of the rotary sucking disc through at least one adsorption air channel, so that the suction grooves of the rotary sucking disc can reach the adsorption and fixation of the bottom surface of the workpiece to rotate forward and reversely by 360 degrees through the adsorption holes;
therefore, the unique design of innovation makes this application through the concave suction groove of ring that the axle rotary column of this ring commentaries on classics sucking disc airtight set up and the inside vacuum suction mouth of establishing can do 360 degrees positive contra-rotation vacuum suction effect relatively this drive seat and this base, this 360 degrees positive contra-rotation vacuum suction effect and through this ring commentaries on classics sucking disc's absorption air flue to and through this absorption hole evenly give these a plurality of network forms and the suction groove of intercommunication each other all have even vacuum adsorption power way each other, can let the work piece can reach the even vacuum adsorption of bottom fixed through this absorption power way, and can reach 360 degrees continuous positive contra-rotation's efficiency simultaneously.
Other features and embodiments of the present application will be described in detail below with reference to the drawings.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is an assembled perspective view of a continuously rotatable vacuum chuck configuration of the present application;
FIG. 2 is an exploded perspective view of the continuously rotatable vacuum chuck configuration of the present application;
FIG. 3 is an exploded perspective view of another angle of the continuously rotatable vacuum chuck configuration of the present application;
FIG. 4 is a cross-sectional view of an embodiment of the present invention of a vacuum chuck structure that can be continuously cycled.
Description of the symbols
10, a base 11, a connecting part 12 and a fixing part
13, a shaft assembly part 14, a first inner ring groove 15, a second inner ring groove
17 first airtight ring 18, second airtight ring 19, suction part
20, a driving rotary seat 21, a rotor 22 and a connecting hole
23 shaft assembly hole 26, stator 27, assembly part
30, a rotating sucker 31, a circular suction groove 32, a radial suction groove
33, an adsorption surface 34, an adsorption hole 35, an adsorption air passage
36 vacuum suction port 37, annular concave air suction groove 38 and shaft rotating column
39, a set part A, a first bolt B and a second bolt
C, a vacuum suction pipe D, a workpiece E and a third bolt
F is suction head
Detailed Description
The positional relationship described in the following embodiments includes: the top, bottom, left and right, unless otherwise indicated, are based on the orientation of the elements in the drawings.
Referring to fig. 1 to 4, a preferred embodiment of a vacuum chuck structure capable of continuously rotating according to the present invention is shown, however, these embodiments are only for illustrative purposes and are not limited by the structure in the patent application; the present application is applied to the vacuum suction bottom end surface fixing of a workpiece D of a processing machine, a detecting machine or a measuring machine (not shown), which can drive the workpiece D to rotate in forward and reverse directions of 360 degrees, and the vacuum chuck structure comprises:
a base 10, a shaft assembly 13 is formed in the center, at least one suction portion 19 is arranged around the inner ring of the shaft assembly 13, the other end of the suction portion 19 is provided with a suction head F corresponding to the outer edge of the base 10 in an airtight communication manner, the other end of the suction head F is provided with a vacuum suction pipe C in an airtight connection manner, the other end of the vacuum suction pipe C is connected with a vacuum suction device (not shown), wherein the upper and lower ring edge positions of the suction portion 19 arranged around the inner ring of the shaft assembly 13 are respectively provided with a first inner ring groove 14 and a second inner ring groove 15 in a ring concave manner, and a first airtight ring 17 and a second airtight ring 18 are respectively embedded and assembled in the first inner ring groove 14 and the second inner ring groove 15 in an airtight manner; a linking part 11 is arranged at a preset position of the base 10; wherein the base 10 is provided at a predetermined position with at least one fixing portion 12, the fixing portion 12 is used for fixing to the predetermined position of the processing machine or the detecting machine or the measuring machine, and the fixing manner is to make the fixing portion 12 corresponding to the predetermined position of the processing machine or the detecting machine or the measuring machine through a second bolt B to be relatively screwed and locked;
a driving seat 20, the driving seat 20 including a stator 26 located at the bottom and a rotor 21 located at the top of the stator 26, the stator 26 being located at the top of the base 10, the stator 26 having a linking hole 22 corresponding to the linking part 11 of the base 10, so that the connecting part 11 and the linking hole 22 are relatively screwed and fixed by a first bolt a, and the stator 26 and the base 10 are relatively fixed, wherein the driving seat 20 is in a Direct Drive Motor (Direct Drive Motor) form, so that the stator 26 can Drive the rotor 21 to operate in a Motor manner; a shaft assembly hole 23 is formed through the driving seat 20 at a position corresponding to the shaft assembly portion 13 of the base 10 relative to the center of the rotor 21, and a plurality of assembly portions 27 are disposed on the top surface of the rotor 21;
a rotary suction cup 30, which is disposed on the top surface of the rotor 21 of the rotary driving seat 20, wherein the plurality of assembling portions 27 disposed on the top surface of the rotary suction cup 30 corresponding to the top surface of the rotor 21 of the rotary driving seat 20 are provided with assembling portions 39, so that the assembling portions 27 and the assembling portions 39 are relatively screwed and fastened together by a plurality of third bolts E, so that the rotor 21 of the driving seat 20 can drive the rotating chuck 30 to rotate in 360 degrees in forward and reverse directions, and a suction surface 33 is formed on the top of the rotating chuck 30, the absorption surface 33 is provided with a plurality of absorption grooves which are in a network shape and are mutually communicated at predetermined position grooves on the surface, a plurality of absorption holes 34 are arranged at predetermined positions in the absorption grooves, wherein the suction grooves which are arranged in a network shape and mutually communicated with each other on the suction surface 33 at the top of the rotary suction cup 30 comprise a plurality of annular suction grooves 31 which are in a concentric circle shape and a plurality of radial suction grooves 32 which are communicated with the annular suction grooves 31 and are in a radioactive ray shape; a shaft column 38 is protruded downward from the center of the bottom of the ring rotating chuck 30, the shaft column 38 is axially disposed in the shaft group hole 23 of the driving seat 20 and the shaft group portion 13 of the base 10, a ring concave air-extracting groove 37 is disposed in the shaft group portion 13 of the base 10 corresponding to the position of the shaft group portion 13 corresponding to the suction portion 19, the ring concave air-extracting groove 37 is hermetically disposed in the shaft group portion 13 of the base 10 through the first airtight ring 17 and the second airtight ring 18, wherein a plurality of vacuum suction ports 36 are circumferentially disposed in the ring concave air-extracting groove 37, the vacuum suction ports 36 are communicated with the suction holes 34 on the top surface of the ring rotating chuck 30 through at least one suction air channel 35, so that the suction grooves of the ring rotating chuck 30 can be sucked and fixed to the bottom end surface of the workpiece D through the suction holes 34 to rotate in a forward and reverse direction by 360 degrees.
When the vacuum suction device is actuated, the suction head F is connected with a vacuum suction pipe C in an airtight manner, the other end of the vacuum suction pipe C is connected with a vacuum suction device, the suction effect of the vacuum suction device can be used for performing 360-degree forward and reverse rotation vacuum suction effect on the annular concave suction groove 37 which is arranged in an airtight manner corresponding to the shaft rotating column 38 of the annular rotary suction disc 30 through the suction part 19 and the vacuum suction port 36 which is arranged in the annular concave suction groove, the 360-degree forward and reverse rotation vacuum suction effect can be realized through the adsorption air channel 35 of the annular rotary suction disc 30, the adsorption holes 34 are used for uniformly endowing the plurality of network forms and the mutually communicated suction grooves have uniform vacuum adsorption force channels, and the workpiece D can be fixed by uniform vacuum adsorption at the bottom and can simultaneously achieve the effect of continuous forward and reverse rotation of 360 degrees.
Therefore, the present application can perform 360 degrees positive and reverse rotation vacuum pumping action through the annular concave pumping groove 37 airtightly arranged by the shaft rotating column 38 of the rotating chuck 30 and the vacuum suction port 36 arranged inside, relative to the driving seat 20 and the base 10, the 360 degrees positive and reverse rotation vacuum pumping action and the adsorption air passage 35 through the rotating chuck 30, and the suction grooves which are uniformly given network shapes through the adsorption holes 34 and mutually communicated all have uniform vacuum adsorption force, so that the workpiece D can be uniformly vacuum-adsorbed and fixed at the bottom through the adsorption force passage, and can simultaneously achieve 360 degrees continuous positive and reverse rotation.
The above-described embodiments and/or implementations are only for illustrating the preferred embodiments and/or implementations of the technology of the present application, and are not intended to limit the implementations of the technology of the present application in any way, and those skilled in the art can make modifications or changes to other equivalent embodiments without departing from the scope of the technology disclosed in the present application, but should be construed as technology or implementations substantially the same as the present application.
Claims (3)
1. A vacuum chuck structure capable of continuously rotating is applied to the fixation of the vacuum adsorption bottom end surface of a workpiece of a processing machine or a detection machine or a measuring machine, and can drive the workpiece to rotate forward and backward by 360 degrees, and is characterized in that the vacuum chuck structure comprises:
a base, a shaft assembly part is formed in the center, at least one suction part is arranged on the inner circumference of the shaft assembly part, a suction head is arranged at the other end of the suction part corresponding to the outer edge of the base in an airtight communication mode, a first inner ring groove and a second inner ring groove are respectively arranged on the upper edge and the lower edge of the axial direction of the suction part arranged on the inner circumference of the shaft assembly part in a ring concave mode, and a first airtight ring and a second airtight ring are respectively embedded and assembled in the first inner ring groove and the second inner ring groove in an airtight mode; in addition, a linking part is arranged at a preset position of the base;
a driving rotary seat, which comprises a stator and a rotor, wherein the stator is arranged at the top end of the base, a linking hole is arranged at the linking part of the stator corresponding to the base, and the connecting part and the connecting hole are relatively screwed and locked together through a first bolt, so that the stator and the base are relatively fixed, wherein the driving rotary seat is in a direct-drive motor shape, and the stator can drive the rotor to operate in a motor mode; a shaft group hole is arranged at the position of the driving rotary seat corresponding to the shaft group of the base and opposite to the center of the rotor, and a plurality of assembling parts are distributed on the top surface of the rotor;
a rotary sucking disc, which is arranged on the top surface of the rotor of the rotary drive seat, the top surface of the rotary sucking disc is provided with a group arrangement part corresponding to a plurality of group connection parts arranged on the top surface of the rotor of the rotary drive seat, the group connection parts and the group arrangement parts are relatively screwed and locked and combined through a plurality of third bolts, so that the rotor of the rotary drive seat can drive the rotary sucking disc to do forward and backward rotary motion of 360 degrees, an adsorption surface is formed on the top of the rotary sucking disc, a plurality of sucking grooves which are in network shapes and are mutually communicated are arranged in the preset position groove of the adsorption surface, and a plurality of adsorption holes are arranged in the preset position in the sucking groove; and a shaft rotary column is protruded downwards from the center of the bottom of the rotary sucking disc, the shaft rotary column is positioned in the shaft group hole of the driving rotary seat and the shaft group part of the base, the shaft rotary column is provided with a concave ring air-pumping groove corresponding to the shaft group part of the base and further corresponding to the position of the air-pumping part, the concave ring air-pumping groove is provided with an air-tightness in the shaft group part of the base through the first air-tight ring and the second air-tight ring, a plurality of vacuum suction ports are distributed in the concave ring air-pumping groove in a surrounding manner, the vacuum suction ports are communicated with the adsorption holes on the top surface of the rotary sucking disc through at least one adsorption air channel, so that the suction grooves of the rotary sucking disc can be used for adsorbing and fixing the bottom surface of the workpiece to rotate in a forward and reverse direction of 360 degrees through the adsorption holes.
2. The structure of claim 1, wherein the sucking grooves of the sucking surface of the top of the rotating chuck are formed in a network and are connected to each other, and each sucking groove comprises a plurality of concentric circular sucking grooves and a plurality of radial sucking grooves connected to the circular sucking grooves and are in a radial pattern.
3. The vacuum chuck assembly as claimed in claim 1, wherein the base has at least one fixing portion at a predetermined position, and the fixing portion is used to fix the processing machine or the inspection machine or the measuring machine at a predetermined position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010294017.8A CN113524061A (en) | 2020-04-15 | 2020-04-15 | Vacuum chuck structure capable of continuously rotating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010294017.8A CN113524061A (en) | 2020-04-15 | 2020-04-15 | Vacuum chuck structure capable of continuously rotating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113524061A true CN113524061A (en) | 2021-10-22 |
Family
ID=78088179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010294017.8A Pending CN113524061A (en) | 2020-04-15 | 2020-04-15 | Vacuum chuck structure capable of continuously rotating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113524061A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114179046A (en) * | 2021-11-30 | 2022-03-15 | 深圳市华腾半导体设备有限公司 | Electric conduction workbench capable of realizing free rotation |
| CN114178622A (en) * | 2021-11-30 | 2022-03-15 | 深圳市华腾半导体设备有限公司 | Routing and cutting integrated machine |
| CN114918847A (en) * | 2022-05-31 | 2022-08-19 | 深圳市先地图像科技有限公司 | Vacuum adsorption device |
| TWI796060B (en) * | 2021-12-23 | 2023-03-11 | 盛詮科技股份有限公司 | Wafer suction arm |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6149727A (en) * | 1997-10-08 | 2000-11-21 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus |
| TW201639665A (en) * | 2015-05-08 | 2016-11-16 | 吳茂祥 | Rotary vacuum sucking mechanism |
| CN108747906A (en) * | 2018-07-25 | 2018-11-06 | 苏州优备精密智能装备股份有限公司 | Adjustable vacuum chuck device |
| CN108818016A (en) * | 2018-07-06 | 2018-11-16 | 益文杰 | A kind of electricapparatus equipment production clamping device |
| TWM572808U (en) * | 2018-10-19 | 2019-01-11 | 豪捷科技股份有限公司 | Spindle structure with vacuum attachment |
| CN209110888U (en) * | 2018-09-05 | 2019-07-16 | 深圳市盛世智能装备有限公司 | It is a kind of can vacuum suction rotating jig |
| CN212096041U (en) * | 2020-04-16 | 2020-12-08 | 盛方源科技股份有限公司 | Vacuum chuck structure capable of continuously rotating |
-
2020
- 2020-04-15 CN CN202010294017.8A patent/CN113524061A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6149727A (en) * | 1997-10-08 | 2000-11-21 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus |
| TW201639665A (en) * | 2015-05-08 | 2016-11-16 | 吳茂祥 | Rotary vacuum sucking mechanism |
| CN108818016A (en) * | 2018-07-06 | 2018-11-16 | 益文杰 | A kind of electricapparatus equipment production clamping device |
| CN108747906A (en) * | 2018-07-25 | 2018-11-06 | 苏州优备精密智能装备股份有限公司 | Adjustable vacuum chuck device |
| CN209110888U (en) * | 2018-09-05 | 2019-07-16 | 深圳市盛世智能装备有限公司 | It is a kind of can vacuum suction rotating jig |
| TWM572808U (en) * | 2018-10-19 | 2019-01-11 | 豪捷科技股份有限公司 | Spindle structure with vacuum attachment |
| CN212096041U (en) * | 2020-04-16 | 2020-12-08 | 盛方源科技股份有限公司 | Vacuum chuck structure capable of continuously rotating |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114179046A (en) * | 2021-11-30 | 2022-03-15 | 深圳市华腾半导体设备有限公司 | Electric conduction workbench capable of realizing free rotation |
| CN114178622A (en) * | 2021-11-30 | 2022-03-15 | 深圳市华腾半导体设备有限公司 | Routing and cutting integrated machine |
| TWI796060B (en) * | 2021-12-23 | 2023-03-11 | 盛詮科技股份有限公司 | Wafer suction arm |
| CN114918847A (en) * | 2022-05-31 | 2022-08-19 | 深圳市先地图像科技有限公司 | Vacuum adsorption device |
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Application publication date: 20211022 |
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