JP6028833B2 - Adsorption holding device for dicing machine - Google Patents

Description

  The present invention relates to a suction holding device for a dicing device, and more particularly to a suction holding device for a dicing device that holds a plurality of workpieces (workpieces) by vacuum suction.

  A dicing apparatus that performs cutting on a workpiece includes a blade that rotates at high speed with a spindle, a device that holds and holds the workpiece, a device that changes the relative position between the blade and the workpiece, and the like.

  A conventional example of a suction holding device of this kind of dicing apparatus is shown in FIGS. As shown in the figure, the suction holding device is integrally provided on a circular table 51 having a single suction port 50, a rotational drive unit 52 that rotationally drives the circular table 51, and an outer peripheral part of the circular table 51. In addition, a pipe block 54 to which a pipe joint 53 communicating with the suction port 50 is connected, and a moving body 55 on which these units are mounted and moved in the cutting direction are provided.

  The pipe joint 52 communicates with the suction port 50 through an exhaust path 56. Further, a vacuum pump (not shown) is connected to the pipe joint 52 via a pipe (not shown), and by generating a suction force at the suction port 50 of the circular table 51 by driving the vacuum pump, It is comprised so that a workpiece | work can be hold | maintained on the circular table 51 (refer patent document 1, 2 as a related prior art document). Further, there is also known one in which a plurality of suction ports are formed so as to hold a plurality of workpieces (see Patent Document 3).

JP 2001-85449 A JP-A-10-321562 Japanese Patent No. 4574424

  As described above, in a dicing apparatus for cutting a substrate (workpiece), a vacuum pump is connected to a pipe joint of a pipe block in order to generate a suction force at the suction port in order to suck and hold the board on a circular table. Yes. However, the surface shape of the substrate may be warped. In this case, since the substrate is not in close contact with the suction surface of the circular table, the degree of vacuum at the suction port is lowered, and the substrate may not be sucked.

  In order to increase the suction force to the substrate, the suction force of the vacuum pump may be increased, but in this case, the vacuum pump becomes larger and the cost is increased. Further, as another method for increasing the adsorption force, it is conceivable to increase the passage area (cross-sectional area) of the entire pipe by increasing the number of pipes or increasing the diameter of the pipe.

  In this case, the pipe is connected to a pipe joint that rotates integrally with the circular table. However, when the pipe is connected to the center of rotation of the circular table, the rotating part must pass through, and the pipe is connected to the through part. Will be disposed. As a result, the number and diameter of the pipes depend on the size of the opening diameter of the through portion. Therefore, when a plurality of pipes are arranged, the passage area per pipe is reduced, and the adsorption force is also reduced accordingly.

  In addition, when a plurality of pipes are bundled and connected to the outer peripheral portion of the circular table, the pipes are twisted due to the increase in the number of pipes, or the pipes are rubbed due to friction between the pipes. In addition, the range of the rotation angle of the circular table is limited by the piping, or when the circular table rotates, it receives resistance from the piping and prevents the circular table from rotating. It may come off from the pipe joint.

  Therefore, in view of the above problems, the present invention prevents twisting and breakage of piping, can hold a plurality of workpieces independently, eliminates the limitation on the rotation angle of the circular table, and does not increase the size of the vacuum generation source. The technical problem to be solved in order to make it possible to increase the adsorption force arises, and the present invention aims to solve this problem.

The present invention has been proposed in order to achieve the above object, and the invention according to claim 1 is a circular table having a plurality of suction ports for sucking and holding a plurality of workpieces, respectively, and rotating the circular table. In a suction holding device of a dicing device having a rotation drive unit and a piping block connectable to a vacuum generation source, the piping block communicates with a plurality of exhaust paths including the suction port, and is connected to the vacuum generation source. A suction holding device for a dicing apparatus is provided , comprising a plurality of arc-shaped exhaust chambers that communicate with each other, wherein the exhaust chambers communicate independently with each exhaust path .

  According to this configuration, a vacuum pump is connected to the piping block, and suction force is applied to each suction port on the side of the circular table via the piping, the exhaust chamber, and the exhaust path. Therefore, an independent suction force is generated at each of the plurality of suction ports. In addition, by forming each exhaust chamber on the piping block side in an arc shape, even if the circular table rotates within a range corresponding to the central angle of the arc shape of the exhaust chamber, the exhaust path and exhaust chamber on the circular table side Thus, a stable vacuum suction action is induced at each suction port.

  The invention according to claim 2 is characterized in that the piping block has an outer diameter substantially equal to the outer diameter of the circular table and is arranged on the lower surface side of the circular table. An adsorption holding device for a dicing apparatus is provided.

  According to this configuration, since the piping block has an outer diameter substantially equal to the outer diameter of the circular table and is disposed on the lower surface side of the circular table, the dead space under the circular table is effectively used. Thus, the piping block can be arranged and the piping can be laid.

  According to a third aspect of the present invention, the piping block has an inner diameter substantially equal to an outer diameter of the circular table and is disposed on the outer peripheral side of the circular table. An adsorption holding device for an apparatus is provided.

  According to this configuration, the piping block has an inner diameter substantially equal to the outer diameter of the circular table and is disposed on the outer peripheral side of the circular table. The area for formation can be increased.

  According to a fourth aspect of the present invention, there is provided the suction holding device for a dicing apparatus according to the first aspect, wherein the plurality of exhaust chambers are provided in a line along the circumferential direction of the piping block.

  According to this configuration, since the plurality of arc-shaped exhaust chambers are provided in a line along the circumferential direction of the piping block, the effective rotation angle of the circular table is determined according to the center angle of the arc shape of the exhaust chamber. (Hereinafter referred to as “attractable rotation range”) increases. For example, when there are two exhaust chambers, the central angle is about 180 degrees, so even if the circular table is rotated about 180 degrees at the maximum, communication between the exhaust path on the circular table side and the exhaust chamber on the piping block side is maintained. Therefore, the work can be sucked and held.

  According to a fifth aspect of the present invention, there is provided the suction holding apparatus for a dicing apparatus according to the first aspect, wherein the plurality of exhaust chambers are arranged in a plurality of stages in the radial direction of the piping block.

  According to this configuration, since the plurality of exhaust chambers are arranged in a plurality of stages in the radial direction of the piping block, even if the number of exhaust chambers (the number of suction ports) increases, the exhaust chambers are arranged in a plurality of stages. By dividing and arranging in one row, the size of the central angle of each exhaust chamber is maintained.

  According to the first aspect of the present invention, the piping does not rotate with the rotation of the circular table. Therefore, even if the number of piping is increased, there is no risk of causing rubbing or breakage of the piping, and the effective rotation angle range of the circular table. However, when the circular table rotates, the circular table is prevented from receiving a resistance force from the piping and preventing the circular table from rotating.

  In addition, by generating independent suction force at each suction port, multiple workpieces can be sucked and held separately. In this case, the number and diameter of pipes can be set arbitrarily, so the vacuum pump must be enlarged. Without increasing the adsorption power.

  According to the second aspect of the present invention, since the piping block can be disposed and the piping can be laid by effectively using the dead space below the circular table, in addition to the effect of the first aspect, the piping block and There is no need to specially occupy space for the piping arrangement, and the suction holding device as a whole can be compactly designed.

  According to the third aspect of the invention, since the area for forming the exhaust chamber is increased by increasing the outer diameter of the piping block, in addition to the effect of the invention of the first aspect, according to the size of the exhaust chamber. Thus, it is possible to adopt a pipe joint having a large pipe area, thereby further increasing the suction force of the suction port.

  According to the invention described in claim 4, since the rotational range in which the circular table can be sucked is expanded in accordance with the center angle of the arc shape of the exhaust chamber, in addition to the effect of the invention described in claim 1, for example, the exhaust chamber has 2 If so, the center angle of each exhaust chamber can be set to a maximum of about 180 degrees, so that even if the circular table is rotated about a maximum of about 180 degrees, the work suction function can be reliably exhibited.

  According to the fifth aspect of the present invention, even if the number of exhaust chambers increases according to the number of suction ports, the exhaust chambers are arranged in a plurality of stages and arranged in a row, so that a circular according to the central angle of each exhaust chamber is provided. Since the rotation range in which the table can be sucked can be maintained, in addition to the effect of the first aspect of the invention, the number of suction ports can be increased without reducing the suckable rotation range.

The perspective view which shows the adsorption | suction holding | maintenance apparatus of the dicing apparatus which concerns on Example 1 of this invention. The top view of FIG. The top view of the piping block of FIG. The side view of FIG. FIG. 2 is a side sectional view of FIG. 1. The perspective view which shows the suction holding | maintenance apparatus of the dicing apparatus which concerns on Example 2 of this invention. The top view of FIG. The side view of FIG. Side surface sectional drawing of FIG. The perspective view which shows the suction holding | maintenance apparatus of the dicing apparatus which concerns on Example 3 of this invention. The top view of FIG. The top view of the piping block of FIG. The side view of FIG. Side surface sectional drawing of FIG. The perspective view which shows a prior art example. The top view of FIG. The side view of FIG. FIG. 16 is a side sectional view of FIG. 15.

The present invention achieves the object of increasing the suction force while preventing the twisting and breakage of the piping, allowing the plurality of workpieces to be sucked and held independently, and eliminating the limitation of the effective rotation angle of the circular table. An adsorption holding device for a dicing apparatus, comprising: a circular table having a plurality of suction ports for sucking and holding a plurality of workpieces; a rotation driving unit for rotating the circular table; and a piping block connectable to a vacuum generation source. in the piping block is communicated with a plurality of exhaust paths including said suction port, comprising a plurality of exhaust chambers arcuate communicating with the vacuum source, the exhaust chamber, respectively independently each exhaust path Realized by being in communication.

  A preferred embodiment of the present invention will be described below with reference to FIGS. In FIG. 1 showing a suction holding device of a dicing apparatus according to the present embodiment, reference numeral 1 denotes a short cylindrical circular table (suction table) for sucking and holding a substrate (workpiece) that is a workpiece. It is rotatably provided around the shaft core C. A hollow motor (rotation drive unit) 2 is disposed below the circular table 1, and the circular table 1 is driven to rotate around the axis C by the hollow motor 2.

  The hollow motor 2 is mounted and fixed on a pedestal 4 on a carriage (moving body) 3, and the carriage 3 can reciprocate along a rail 6 in a workpiece cutting direction X. A piping block 8 is supported and fixed on the carriage 3 by a plurality of support frames 7.

  As shown in FIG. 2, four suction ports 9 are formed in the central portion of the suction surface 11 of the circular table 1, and these suction ports 9 are symmetric with respect to the axis C in plan view. Is formed. Further, as illustrated in FIG. 5, four exhaust paths 10 corresponding to the respective suction ports 9 are formed in the radial direction inside the circular table 1. It communicates with the mouth 9 independently. The outer end side of the exhaust path 10 extends to the outer peripheral portion of the circular table 1.

  The piping block 8 is provided on the lower surface side of the circular table 1. The piping block 8 is formed in an annular shape in plan view, and the outer peripheral shape portion thereof corresponds to the outer peripheral portion on the circular table 1 side. That is, the piping block 8 has an outer diameter substantially equal to the outer diameter of the circular table 1 and is disposed concentrically with the lower surface of the circular table 1.

  As shown in FIG. 3, four exhaust chambers (suction chambers) 12 are formed in the piping block 8, and the exhaust chamber 12 has a quadrilateral arc shape in plan view with a central angle of about 90 degrees. The four exhaust chambers 12 are arranged in a line at an equal pitch along the circumferential direction of the circular table 1.

  As shown in FIG. 5, the upper side of each exhaust chamber 12 communicates independently with the suction port 9 on the circular table 1 side via each exhaust path 10. Therefore, the four exhaust systems including the exhaust paths 10 and the suction ports 9 form independent exhaust suction circuits.

  A pipe joint 13 is connected to the vicinity of the central portion of the bottom surface of the exhaust chamber 12, and the pipe joint 13 is attached downward as shown in FIG. Accordingly, each pipe joint 13 communicates with each suction port 9 via the exhaust path 10.

  Furthermore, one end of a pipe (not shown) is attached to each pipe joint 13, and the other end of each pipe is connected to a vacuum pump (vacuum generation source) (not shown). Accordingly, an exhaust suction force can be independently applied to each exhaust chamber 12 via the pipe by driving a vacuum pump.

  According to this embodiment, the bottom surface of each exhaust chamber 12 of the piping block 8 is driven by the vacuum pump by attaching the piping joint 13 to the lower surface of the outer peripheral portion of the circular table 1, that is, the lower surface of the piping block 8. An exhaust suction force is applied to the part. The exhaust suction force causes the vacuum suction force to be independently generated at the four suction ports 9 via the respective exhaust paths 10.

  As a result, each of the suction ports 9 can suction and hold four substrates (workpieces) independently. The pipe joint 13 to which the pipe is connected is placed and fixed on the base 4 of the carriage 3. Therefore, when the circular table 1 is rotated, the pipe does not rotate, and there is no possibility that the pipe is rubbed or damaged.

  Further, by forming each exhaust chamber 12 in a quarter arc shape, even if the circular table 1 rotates by a predetermined range, the communication state between the exhaust path 10 on the circular table 1 side and the exhaust chamber 12 on the piping block 8 side is maintained. Maintaining this, a stable suction force is generated at each suction port 9. At this time, even if the circular table 1 is rotated about 90 degrees, the rotation of the circular table 1 is not hindered by the piping.

  Further, vacuum suction force is generated in each suction port 9 through each pipe by evacuation by a vacuum pump. Therefore, by connecting a pipe having a large pipe area to the pipe joint 13, A large adsorption force can be generated. Therefore, even if the substrate is warped, the substrate can be adsorbed more reliably.

  In the illustrated example, the piping block 8 has an outer diameter substantially equal to the outer diameter of the circular table 1 and is disposed on the lower surface side of the circular table 1. Therefore, the piping block 8 and piping can be arrange | positioned using the dead space of the lower side of the circular table 1 effectively.

  A second embodiment of the present invention is shown in FIGS. The second embodiment is characterized in that a plurality of arc-shaped exhaust chambers 12 are formed on the inner surface of the piping block 18 so that exhaust suction can be performed from the inner surface of the piping block 18. In addition, about the component substantially the same as the said Example 1, the code | symbol same as it is attached | subjected and the detailed description shall be abbreviate | omitted.

  As in the first embodiment, the hollow motor 2 for driving the circular table 1 is mounted and fixed on the pedestal 4 of the carriage 3, and an annular pipe is mounted on the carriage 3 by a plurality of support frames 7. The block 18 is supported and fixed.

  As shown in FIG. 9, four exhaust paths 20 corresponding to the four suction ports 9 are formed in the circular table 1 in the radial direction, and the inner ends of the exhaust paths 20 correspond to the respective suction paths. The ports 9 communicate with each other independently in a one-to-one correspondence. The outer end of the exhaust path 20 is open to the outer surface of the circular table 1.

  The annular pipe block 18 is provided outside the circular table 1, and the pipe block 18 has an inner diameter substantially equal to the outer diameter of the circular table 1 and is arranged concentrically with the circular table 1. Yes. Four exhaust chambers 22 having a quadrilateral arc shape in plan view formed on the inner peripheral side surface of the piping block 18 are arranged in a line at an equal pitch along the circumferential direction of the piping block 18.

  As shown in FIG. 9, the inside of each exhaust chamber 22 communicates independently with the suction port 9 on the circular table 1 side via each exhaust path 20. Therefore, each of the four exhaust systems including the exhaust paths 20 and the suction ports 9 forms an independent exhaust suction circuit.

  Each pipe joint 13 attached to the bottom surface of the exhaust chamber 22 communicates with each suction port 9 via the exhaust path 20, and a vacuum pump (not shown) is connected to the pipe joint 13 via a pipe (not shown). Connected to each separately.

  According to this embodiment, the piping joint 13 is arranged on the outer peripheral side surface side of the circular table 1, that is, the inner side surface of the piping block 18, so that the side surface of each exhaust chamber 22 of the piping block 18 is driven by the vacuum pump. Exhaust suction force is generated in the portion, and this exhaust suction force is independently and separately applied to the four suction ports 9 via the respective exhaust passages 20. As a result, the same effects as those of the first embodiment can be obtained, such that each suction port 9 can independently hold and hold four workpieces (substrates).

  In particular, since the piping block 18 is disposed outside the circular table 1, the area for forming the plurality of exhaust chambers 22 is increased by increasing the outer diameter of the piping block 18. As a result, the pipe joint 13 and the pipe having a large pipe area can be adopted according to the size of the exhaust chamber 22, and the adsorption power can be further increased.

  A third embodiment of the present invention will be described with reference to FIGS. A feature of the third embodiment is that a plurality of exhaust chambers are formed in two stages in the radial direction on the upper surface of the piping block so that exhaust suction can be performed from the lower surface side of the circular table. In addition, about the component substantially the same as the said Example, the code | symbol same as it is attached | subjected and the detailed description shall be abbreviate | omitted.

  As in the first embodiment, the hollow motor 2 that is the drive unit of the circular table 1 is fixed on the base 4 of the carriage 3. As shown in FIG. 14, four exhaust paths 30 are formed in the radial direction in the circular table 1, and these exhaust paths 30 are radially arranged with an equal pitch in the circumferential direction of the circular table 1. It is installed. Two of the four exhaust paths 30 that are symmetrical to each other are set longer than the remaining two. The inner end side of each exhaust path 30 communicates with each of the four suction ports 9 independently.

  The annular pipe block 28 is arranged concentrically with the circular table 1, and the inner diameter of the pipe block 28 is set slightly larger than the outer diameter of the hollow motor 2. Further, a total of four exhaust chambers 32A and two exhaust chambers 32B having a semicircular shape in plan view are formed on the upper surface of the piping block 28.

  The exhaust chamber 32 </ b> A and the exhaust chamber 32 </ b> B are arranged in two stages in the radial direction of the piping block 28. Of these, the exhaust chamber 32A is provided outside the exhaust chamber 32B. Further, the two exhaust chambers 32A and the two exhaust chambers 32B have a symmetrical positional relationship with each other. Further, the exhaust chamber 32A is disposed with a phase difference of 90 degrees in the circumferential direction with respect to the exhaust chamber 32B.

  The four exhaust chambers 32 </ b> A and 32 </ b> B are individually communicated with the respective suction ports 9 of the circular table 1 through the pipe joints 13 connected to the respective bottom portions. Accordingly, the four exhaust systems including the exhaust chambers 32A and 32B and the suction ports 9 form an exhaust suction circuit independent of each other.

  According to the third embodiment, by connecting the four pipe joints 13 to the lower surface side of the outer peripheral portion of the circular table 1, that is, the lower surface side of the pipe block 28, each exhaust chamber of the pipe block 28 is driven by the vacuum pump. Exhaust air is sucked from the bottom surfaces of 32A and 32B, and this suction force is generated independently at each of the four suction ports 9 via the respective exhaust passages 30. As a result, the same effects as those of the first embodiment can be expected, such as the suction ports 9 being able to suck and hold four workpieces independently.

  Further, since the central angle of the exhaust chambers 32A and 32B is 180 degrees, the suckable rotation range of the circular table 1 is expanded to about 180 degrees. That is, even when the circular table 1 is rotated about 180 degrees, the communication state between the exhaust passages 30 on the circular table 1 side and the exhaust chambers 32A and 32B on the piping block 28 side is maintained, so that the work suction function is achieved. Persisted.

As described above, according to the present invention, a vacuum pump is connected to a plurality of pipe joints of a pipe block through a pipe, and this vacuum pump causes each suction on the circular table side through the pipe, the exhaust chamber, the exhaust path, and the like. A suction force is applied to the mouth. Therefore, an independent suction force is generated at each of the plurality of suction ports, and a plurality of workpieces can be sucked and held separately. In this case, since the number and diameter of the pipes can be set arbitrarily, the suction force can be increased without increasing the size of the vacuum pump.
In addition, since the plurality of exhaust chambers on the piping block side are formed in an arc shape, even if the circular table rotates within a range corresponding to the center angle of the arc shape of the exhaust chamber, the exhaust path on the circular table side and the exhaust gas are exhausted. Communication with the room is maintained. Therefore, a stable vacuum suction action is maintained at each suction port.

  In this case, since the piping block is fixed to the moving body, the piping does not rotate together with the circular table. Therefore, even if the number of pipes is increased, there is no risk of rubbing or damaging the pipes. In addition, the rotational rotation range of the circular table is restricted, or when the circular table rotates, the resistance force from the pipe Accordingly, the rotation of the circular table is not hindered.

  In addition, when a piping block having an outer diameter substantially equal to the outer diameter of the circular table is arranged on the lower surface side of the circular table, the dead space under the circular table is effectively used to arrange the piping block and the piping. Can be laid. Therefore, it is not necessary to secure a special space for the piping block and the piping, and the suction holding device as a whole can be compactly designed.

  Furthermore, as shown in Example 2, when a piping block having an inner diameter substantially equal to the outer diameter of the circular table is used and arranged on the outer peripheral side of the circular table, the outer diameter of the piping block is increased. The area for forming the exhaust chamber can be increased. Therefore, a pipe joint having a large pipe area can be adopted according to the size of the exhaust chamber, and the suction force of the suction port can be further increased.

  In addition, by providing a plurality of arc-shaped exhaust chambers in a line along the circumferential direction of the piping block, the rotational rotation range of the circular table can be increased according to the center angle of the arc shape of the exhaust chamber.

  Further, as shown in the third embodiment, the plurality of exhaust chambers according to the present invention can be arranged in a plurality of stages in the radial direction of the piping block. With this configuration, even if the number of exhaust chambers (the number of suction ports) increases, the central angle of each exhaust chamber is maintained by dividing the exhaust chambers into a plurality of stages and arranging them in a row. Therefore, the number of suction ports can be increased without reducing the suctionable rotation range of the circular table.

  The present invention is not limited to the contents of the above embodiments, and various modifications can be made without departing from the spirit of the present invention, and the present invention naturally extends to the modifications. It is.

  For example, the plurality of exhaust chambers may be formed in a plurality of stages in the thickness direction of the piping block, and the plurality of piping joints may be connected to different locations in the thickness direction or the circumferential direction of the piping block. it can. Further, when a plurality of exhaust chambers are arranged in a plurality of stages in the radial direction of the piping block, the positions of the exhaust chambers in each stage may be set so as to be in phase in the circumferential direction of the piping block.

  The device of the present invention is an exhaust suction type dicing device that can hold a plurality of workpieces, as long as it is a suction holding device, the structure of the circular table, the rotation drive unit, etc., the number of suction ports, pipe joints, etc. It is possible to use it effectively for the type.

1 Circular table 2 Hollow motor (rotary drive)
3 Carriage (moving body)
4 Base 5 Fixed frame 6 Rail 7 Support frame 8 Piping block 9 Suction port 10 Exhaust path 12 Exhaust chamber (suction chamber)
13 Piping joint 18 Piping block (suction block)
20 Exhaust path 22 Exhaust chamber 30 Exhaust path 28 Piping blocks 32A, 32B Exhaust chamber

Claims (5)

In a suction holding device for a dicing machine, comprising: a circular table having a plurality of suction ports for sucking and holding a plurality of workpieces; a rotation drive unit for rotating the circular table; and a piping block connectable to a vacuum generation source. ,
The pipe block, in communication with the plurality of exhaust paths including said suction port, comprising a plurality of exhaust chambers arcuate communicating with the vacuum source,
The suction holding device of the dicing apparatus, wherein the exhaust chamber is communicated with each exhaust path independently .   2. The suction holding device for a dicing apparatus according to claim 1, wherein the piping block has an outer diameter substantially equal to an outer diameter of the circular table and is disposed on a lower surface side of the circular table.   The suction holding device for a dicing apparatus according to claim 1, wherein the piping block has an inner diameter substantially equal to an outer diameter of the circular table, and is disposed outside the circular table.   The suction holding device for a dicing apparatus according to claim 1, wherein the plurality of exhaust chambers are provided in a line along a circumferential direction of the piping block.   The suction holding device for a dicing apparatus according to claim 1, wherein the plurality of exhaust chambers are arranged in a plurality of stages in a radial direction of the piping block.

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