CN113514508A - Humidity sensor and humidity detection device - Google Patents
Humidity sensor and humidity detection device Download PDFInfo
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- CN113514508A CN113514508A CN202010280375.3A CN202010280375A CN113514508A CN 113514508 A CN113514508 A CN 113514508A CN 202010280375 A CN202010280375 A CN 202010280375A CN 113514508 A CN113514508 A CN 113514508A
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- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
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Abstract
The invention discloses a humidity sensor and a humidity detection device, relates to the technical field of sensors, and aims to solve the problems that fine particles such as dust and the like can be deposited on the surface of a humidity-sensitive material along with the use of the humidity sensor, so that the sensitivity and the accuracy of the humidity sensor are influenced, and if water drops are sputtered on the humidity-sensitive material, the humidity sensor can be directly failed. The humidity sensor includes: a housing having a window; the humidity chip and the dustproof ventilating structure are arranged in the shell; the humidity-sensitive detection part is integrated on the humidity chip, the humidity chip is provided with a mounting plane facing the window, and the dustproof ventilating structure is arranged on the mounting plane; the orthographic projection of the humidity-sensitive detection piece on the installation plane is at least overlapped with the orthographic projection of the window on the installation plane, and the dustproof ventilating structure is arranged on the orthographic projection of the installation plane and at least overlapped with the orthographic projection of the window on the installation plane. The sensor disclosed by the invention can ensure sensitivity, accuracy and long-term stability.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a humidity sensor and a humidity detection device.
Background
In production and life, a humidity sensor is often needed to acquire humidity data, at present, the humidity sensor adopts a humidity-sensitive material to detect the humidity in the air, and the humidity-sensitive material is required to be in contact with the air to sense the humidity change in the air, so a window is required to be arranged on the humidity sensor, and the humidity-sensitive material is in contact with the air through the window.
Most of the existing humidity sensors adopt a scheme that a humidity-sensitive material directly contacts with air through the window, but in the scheme, fine particles such as dust and the like can be deposited on the surface of the humidity-sensitive material along with the use of the humidity sensor, so that the sensitivity and the accuracy of the humidity sensor are influenced. Even more, the moisture sensitive material is directly exposed under the window, which may directly cause the moisture sensor to fail if water droplets are sputtered on the moisture sensitive material.
Disclosure of Invention
The invention aims to provide a humidity sensor and a humidity detection device, which are used for solving the problem that fine particles such as dust and the like are deposited on the surface of a humidity-sensitive material along with the use of the humidity sensor, so that the sensitivity and the accuracy of the humidity sensor are influenced. And the moisture sensitive material is directly exposed under the window, which may directly cause the moisture sensor to fail if water droplets are sputtered on the moisture sensitive material.
In order to achieve the above object, the present invention provides a humidity sensor comprising:
a housing having a window;
the humidity chip and the dustproof and breathable structure are arranged in the shell;
the humidity-sensitive detection piece is integrated on the humidity chip, and the dustproof ventilating structure is arranged on one side, facing the window, of the humidity-sensitive detection piece; the humidity chip is provided with a mounting plane facing the window, the orthographic projection of the humidity sensitive detection piece on the mounting plane is at least overlapped with the orthographic projection of the window on the mounting plane, and the dustproof ventilating structure is arranged on the orthographic projection of the mounting plane and at least overlapped with the orthographic projection of the window on the mounting plane.
Compared with the prior art, in the humidity sensor provided by the invention, the humidity chip is integrated with the humidity-sensitive detection piece and is provided with the mounting plane facing the window. The orthographic projection of the humidity-sensitive detection piece on the installation plane is at least overlapped with the orthographic projection of the window on the installation plane, which shows that the humidity-sensitive detection piece is completely arranged below the window and can effectively detect the humidity of the outside air. The dustproof ventilating structure is arranged on one side, facing the window, of the humidity-sensitive detection piece, and at least the orthographic projection of the dustproof ventilating structure on the installation plane is overlapped with the orthographic projection of the window on the installation plane, so that the dustproof ventilating structure at least partially covers the humidity-sensitive detection piece. At the moment, fine particles such as dust and the like cannot be deposited on the part of the humidity-sensitive detection piece covered by the dustproof ventilating structure, and the humidity-sensitive detection piece can normally detect the air humidity, so that the humidity sensor provided by the invention can have higher sensitivity and accuracy within a longer time. In addition, because the dustproof ventilation structure can at least partially cover the humidity-sensitive detection piece, the influence of water drop sputtering on the humidity-sensitive detection piece can be reduced by the part of the humidity-sensitive detection piece covered by the dustproof ventilation structure, so that the detection stability and the service life of the humidity-sensitive detection piece are improved.
The invention also provides a humidity detection device which comprises the humidity sensor.
Compared with the prior art, the humidity detection device provided by the invention has the same beneficial effects as the humidity sensor in the technical scheme, and the details are not repeated herein.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic diagram of a humidity sensor according to an embodiment of the present invention;
FIG. 2 is a schematic view of another humidity sensor in accordance with an embodiment of the present invention;
FIG. 3 is a schematic diagram of another humidity sensor in an embodiment of the present invention.
Reference numerals:
10-shell, 101-window, 20-humidity chip, 201-mounting plane, 30-dustproof breathable structure, 301-dustproof breathable film, 302-supporting part, 303-adhesive layer and 40-base.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In production and life, a humidity sensor is often needed to acquire humidity data, and most humidity sensors adopt a capacitor taking a humidity-sensitive material as a medium to detect the humidity in the air. Generally, when the humidity of air changes, the dielectric constant of the humidity sensitive material changes, which in turn changes the capacitance. The humidity sensor determines the humidity of the air by detecting a change in capacitance of the capacitor. Because the humidity sensitive material can sense the humidity change in the air only by contacting with the air, the packaging shell of the humidity sensor chip is different from the traditional chip packaging form in that a window is required to be arranged on the packaging shell of the humidity sensor chip, so that the humidity sensitive material is contacted with the air through the window.
At present, humidity sensors adopt a scheme that humidity sensitive materials are in direct contact with air to realize air humidity detection. However, fine particles such as dust in the air are easily deposited on the surface of the humidity-sensitive material of the humidity sensor through the window formed in the packaging shell of the humidity sensor chip, so that after the humidity sensor is used for a certain time, more fine particles such as dust are deposited on the surface of the humidity-sensitive material of the humidity sensor, the moisture absorption and dehumidification performances of the humidity-sensitive material are seriously affected, and the sensitivity and the reading deviation of the humidity sensor are reduced. Furthermore, if water droplets are directly splashed on the surface of the humidity-sensitive material, the detection of the humidity sensor may be directly disabled.
For the above reasons, embodiments of the present invention provide a humidity sensor. Referring to fig. 1, the humidity sensor includes a housing 10 having a window 101, and a humidity chip 20 disposed in the housing 10, the humidity chip 20 having a humidity sensitive detecting member integrated thereon. The humidity-sensitive detecting member detects the humidity of air through a window 101 provided in the housing 10. However, in order to prevent the humidity detecting member from depositing dust or other fine particles along with the use of the humidity sensor, thereby affecting the sensitivity and accuracy of the humidity sensor, the humidity sensor may further include a dust-proof air-permeable structure 30. The dust-proof air-permeable structure 30 may be integrated in the humidity sensor. It should be appreciated that the humidity sensor may be packaged in a form that integrates the dust-proof air-permeable structure 30 to improve the long-term stability of the humidity sensor.
In one example, the dustproof and air-permeable structure 30 is disposed on a mounting plane 201 of the humidity chip 20, and the mounting plane 201 is a plane of the humidity chip 20 facing the window 101. The relationship between the detection member and the window 101 may be: the orthographic projection of the moisture-sensitive detection piece on the mounting plane 201 at least coincides with the orthographic projection of the window 101 on the mounting plane 201.
The relation between the dust-proof air-permeable structure 30 and the window 101 may be such that an orthographic projection of the dust-proof air-permeable structure 30 provided on the mounting plane 201 at least overlaps with an orthographic projection of the window 101 on the mounting plane 201. In this setting, this dustproof ventilative structure 30 can at least partially cover the moisture-sensitive detection piece, and then this moisture-sensitive detection piece by the part that dustproof ventilative structure 30 covered can not cover fine particle such as dust, still has effective detection area in this moisture-sensitive detection piece, has guaranteed this humidity transducer's sensitivity and accuracy. Furthermore, because this dustproof ventilation structure 30 can partially cover humidity sensitive detection piece at least, so this humidity sensitive detection piece quilt the part that dustproof ventilation structure 30 covered can not receive the influence that the water droplet spattered, still has effective detection area in this humidity sensitive detection piece, and this humidity transducer can not become invalid, has guaranteed this humidity transducer's validity and life. Therefore, the humidity sensor provided by the invention has the stability of long-term detection and longer service life.
In order to further improve the sensitivity and accuracy of the humidity sensor detection, as shown in fig. 1-3, the relationship between the dust-proof air-permeable structure 30 and the window 101 may be: the dust-proof ventilation structure 30 is arranged on the orthographic projection of the installation plane 201 to cover the orthographic projection of the window 101 on the installation plane 201. At this moment, the dustproof and breathable structure 30 completely covers the window 101, so that dust or other tiny particles are basically not adsorbed on the humidity-sensitive detection piece, and the sensitivity and accuracy of the humidity sensor are further ensured.
In order to make the humidity-sensitive detecting member make good contact with the air through the dustproof ventilation structure 30, no air dead zone is formed, and a certain gap is required between the humidity-sensitive detecting member and the effective shielding part of the dustproof ventilation structure 30. At this time, even if the moisture contained in the air is precipitated in the form of water drops in the dustproof ventilation structure 30, the water drops can be prevented from directly penetrating through the dustproof ventilation structure 30 and falling to the surface of the humidity-sensitive detection element, so that the adverse effect on the humidity-sensitive detection element caused by the water drops in the air or other substances with high humidity can be effectively reduced. Of course, the material of the dustproof ventilation structure 30 may be properly selected, so that the water drops precipitated on the dustproof ventilation structure 30 can be partially or completely blocked by the dustproof ventilation structure 30, thereby avoiding the possibility that the water drops directly fall from the dustproof ventilation structure 30, and further reducing the adverse effect of the water drops in the air or other substances with high humidity on the humidity-sensitive detection element.
When the effective shielding part of the humidity-sensitive detecting part and the dustproof ventilation structure 30 needs to be spaced by a certain gap, the dustproof ventilation structure 30 can comprise a supporting part 302 and a dustproof ventilation film 301, and the supporting part 302 is used for enabling the dustproof ventilation film 301 (the effective shielding part of the dustproof ventilation structure 30) and the humidity-sensitive detecting part to be spaced by a certain gap, so that the humidity-sensitive detecting part can be in good contact with air. Specifically, the supporting member 302 is disposed on the mounting plane 201, and a contact portion between the supporting member 302 and the mounting plane 201 may be a portion that does not block the moisture-sensitive detecting member at all, or a portion that blocks the moisture-sensitive detecting member.
Referring to fig. 1, in a case where the contact portion of the supporting member 302 with the mounting plane 201 does not block the humidity sensitive detecting member at all, the number of the supporting members 302 may be two, respectively located at both sides of the humidity sensitive detecting member. Referring to fig. 2, in the case where the contact portion of the supporting member 302 with the mounting plane 201 partially blocks the moisture sensitive detection member, the number of the supporting members 302 may be one, and the supporting member 302 is located on the orthographic projection of the moisture sensitive detection member on the mounting plane 201. It can be understood that the number of the supporting members 302 may also be multiple, and the supporting members 302 are uniformly disposed around the dust-proof air-permeable membrane 301 for preventing deformation of the dust-proof air-permeable membrane 301 during attachment. The number and position of the supporting members 302 are not particularly limited in the present invention.
As a specific example, the arrangement between the dustproof and breathable film 301 and the supporting member 302 is as follows: this dustproof ventilated membrane 301 is established this support piece 302 orientation on the plane of window 101, can understand, this support piece 302 forms certain clearance between dustproof ventilated membrane 301 and humidity sensitive detection piece this moment, and this clearance can guarantee this humidity sensitive detection piece not contact with this dustproof ventilated membrane 301, and then has guaranteed the good contact of this humidity sensitive detection piece and air. It can be understood that when water drops or other substances with high humidity dropping from the air are deposited on the dust-proof air-permeable membrane 301, if the gap is not formed between the dust-proof air-permeable membrane 301 and the humidity-sensitive detection member, the water drops or other substances with high humidity on the dust-proof air-permeable membrane 301 may enter the humidity-sensitive detection member through the dust-proof air-permeable membrane 301, thereby causing the failure of a part of the humidity-sensitive detection member. That is, the support member 302 is disposed between the dustproof and breathable film 301 and the humidity-sensitive detection member, so that the effectiveness of the humidity-sensitive detection member can be further ensured.
In order to further ensure good contact between the moisture-sensitive detection element and the air, an air hole can be formed in the dustproof air-permeable membrane 301, and the size of the air hole can be selected according to the function of the dustproof air-permeable membrane 301. For example: the size of the air holes can be air with humidity, wet substances in the air can not be filtered, and the air holes have a blocking effect on dust or other tiny particles, water drops or other substances with high humidity. Because this dustproof bleeder vent can see through the air that has humidity, can not filter the moist material in the air, so set up this dustproof ventilated membrane 301 and can not influence the reliability that the humidity sensitive detects the piece in humidity transducer. Of course, the dust-proof air-permeable membrane 301 may be made of a hydrophobic material so that the air holes of the dust-proof air-permeable membrane 301 have a hydrophobic effect, and thus, even if water is precipitated in the dust-proof air-permeable membrane 301 in the form of water droplets, the possibility of the water falling through the air holes and through the dust-proof air-permeable membrane 301 is reduced.
In order to improve the stability of the dustproof ventilation structure 30, the dustproof ventilation structure 30 may be fixed on a side of the humidity sensitive detection element of the humidity chip 20 facing the window 101, and referring to fig. 3, specifically, the dustproof ventilation structure may be: an adhesive layer 303 is disposed on a side of the supporting member 302 of the dustproof and breathable structure 30 away from the dustproof and breathable film 301, and the adhesive layer 303 is used for adhering the supporting member 302 and the humidity chip 20, so as to prevent the dustproof and breathable structure 30 from moving on the humidity chip 20, thereby affecting the reliability of the humidity sensor.
As an alternative example, the adhesive layer 303 may be a hot melt adhesive, in the case that the adhesive layer 303 is a hot melt adhesive, before the humidity sensor is packaged, the dustproof and breathable structure 30 is disposed at a suitable position of the humidity chip 20, and when the humidity sensor is packaged, the hot melt adhesive may bond the support member 302 with the humidity chip 20, so as to fix the dustproof and breathable structure 30 with the humidity chip 20, thereby improving the reliability of the humidity sensor. And, the mode that uses the hot melt adhesive to fix support piece 302 and humidity chip 20 when encapsulating this humidity transducer, can fix dustproof ventilative structure 30 and humidity chip 20, improved the whole efficiency of preparation this transducer. And the hot melt adhesive is arranged in the dustproof breathable structure 30, so that the dustproof breathable structure 30 can be fixed with the humidity chip 20 by heating.
As another optional example, the adhesive layer 303 may also be a light-cured adhesive layer 303, in a case that the adhesive layer 303 is the light-cured adhesive layer 303, before the humidity sensor is packaged, the dust-proof air-permeable structure 30 and the humidity chip 20 are placed in a light-curing device, and the light-cured adhesive layer 303 is cured by the light-curing device, so that the support 302 in the dust-proof air-permeable structure 30 is adhered to the humidity chip 20, thereby fixing the dust-proof air-permeable structure 30 and the humidity chip 20, and improving the reliability of the humidity sensor.
As an alternative implementation, the humidity sensor typically detects the humidity in the air using a humidity sensitive detection member, which therefore has a detection area. In order to improve the detection reliability and accuracy of the humidity-sensitive detection element, the position relationship between the detection region and the dust-proof air-permeable membrane 301 may be such that the orthographic projection of the dust-proof air-permeable membrane 301 on the mounting plane 201 covers the orthographic projection region of the detection region on the mounting plane 201. Under the condition that the orthographic projection of the dustproof breathable film 301 on the installation plane 201 covers the orthographic projection area of the detection area on the installation plane 201, the dustproof breathable film 301 can basically prevent dust or other tiny particles and water drops or other substances with larger moisture from entering the detection area, so that the whole effectiveness of the detection area is ensured, and the reliability of the humidity sensor is improved.
It should be noted that, the material of the humidity-sensitive detecting element may be a polymer humidity-sensitive material, and when the material of the humidity-sensitive detecting element is a polymer humidity-sensitive material, the humidity-sensitive detecting element may be integrated into the humidity chip 20, specifically, the specific position where the humidity-sensitive detecting element is integrated into the humidity chip 20 may be: the humidity sensitive detecting member is located on a side of the humidity chip 20 close to the mounting plane 201, or on the mounting plane 201. Wherein, the macromolecule humidity sensitive material can be polyimide, and can also be other molecule humidity sensitive materials.
In addition, referring to fig. 3, the humidity sensor may further include a base 40 disposed in the housing 10, and the humidity chip 20 is disposed on the base 40. After the humidity sensor is packaged, the base 40 is arranged on a packaging shell of the humidity sensor, and then the humidity chip 20 is arranged on the base 40, so that the structural stability of the humidity chip 20 can be ensured, and the reliability of the humidity sensor is improved.
The embodiment of the invention also provides a humidity detection device which comprises the humidity sensor described in the embodiment. The beneficial effects of this humidity detection device can refer to the beneficial effects of the humidity sensor in the foregoing.
In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.
Claims (10)
1. A humidity sensor, comprising:
a housing having a window;
the humidity chip and the dustproof and breathable structure are arranged in the shell;
the humidity sensitive detection piece is integrated on the humidity chip, the humidity chip is provided with a mounting plane facing the window, and the dustproof breathable structure is arranged on the mounting plane;
the orthographic projection of the humidity-sensitive detection piece on the installation plane is at least overlapped with the orthographic projection of the window on the installation plane, and the dustproof breathable structure is arranged on the orthographic projection of the installation plane and at least overlapped with the orthographic projection of the window on the installation plane.
2. The humidity sensor according to claim 1, wherein an orthographic projection of said dust-proof air-permeable structure on said mounting plane covers an orthographic projection of said window on said mounting plane.
3. The humidity sensor according to claim 1, wherein said dust-proof and air-permeable structure comprises a support member and a dust-proof and air-permeable membrane, said support member being disposed on said mounting plane, said dust-proof and air-permeable membrane being disposed on a surface of said support member facing said window.
4. The humidity sensor according to claim 3, wherein said dust-proof and air-permeable film has air holes.
5. The humidity sensor according to claim 3, wherein said humidity-sensitive detection member has a detection region, and an orthogonal projection of said dust-proof air-permeable membrane on said mounting plane covers an orthogonal projection region of said detection region on said mounting plane.
6. The humidity sensor according to claim 3, wherein said dust-proof and air-permeable structure further comprises an adhesive layer for adhering to said support member and humidity chip; the tie coat is established the support piece deviates from one side of dustproof ventilated membrane.
7. The humidity sensor of claim 6, wherein said adhesive layer is a hot melt adhesive layer or a photo-cured adhesive layer.
8. The humidity sensor according to claim 1, wherein the humidity sensitive detecting member is made of a polymer humidity sensitive material.
9. The humidity sensor of claim 1, further comprising a base disposed within said housing, said humidity chip being disposed on said base.
10. A humidity sensing device comprising the humidity sensor according to any one of claims 1 to 9.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010280375.3A CN113514508A (en) | 2020-04-10 | 2020-04-10 | Humidity sensor and humidity detection device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010280375.3A CN113514508A (en) | 2020-04-10 | 2020-04-10 | Humidity sensor and humidity detection device |
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| CN113514508A true CN113514508A (en) | 2021-10-19 |
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| CN202010280375.3A Pending CN113514508A (en) | 2020-04-10 | 2020-04-10 | Humidity sensor and humidity detection device |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20100090221A (en) * | 2009-02-05 | 2010-08-13 | (주)웨이버스 | Temperature controlling apparatus |
| CN104101689A (en) * | 2014-07-23 | 2014-10-15 | 孝感华工高理电子有限公司 | Humidity sensor |
| CN108776159A (en) * | 2018-08-27 | 2018-11-09 | 广州西博臣科技有限公司 | A kind of novel high polymer impedance type humidity sensor |
| CN110146555A (en) * | 2019-05-30 | 2019-08-20 | 河海大学常州校区 | A kind of humidity sensor based on redox graphene humidity sensitive thin film, method of preparation and use |
| CN209727154U (en) * | 2019-03-23 | 2019-12-03 | 深圳市慧传科技有限公司 | A kind of Temperature Humidity Sensor |
| CN110836912A (en) * | 2019-11-04 | 2020-02-25 | 候明高 | Humidity sensor packaging structure |
-
2020
- 2020-04-10 CN CN202010280375.3A patent/CN113514508A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20100090221A (en) * | 2009-02-05 | 2010-08-13 | (주)웨이버스 | Temperature controlling apparatus |
| CN104101689A (en) * | 2014-07-23 | 2014-10-15 | 孝感华工高理电子有限公司 | Humidity sensor |
| CN108776159A (en) * | 2018-08-27 | 2018-11-09 | 广州西博臣科技有限公司 | A kind of novel high polymer impedance type humidity sensor |
| CN209727154U (en) * | 2019-03-23 | 2019-12-03 | 深圳市慧传科技有限公司 | A kind of Temperature Humidity Sensor |
| CN110146555A (en) * | 2019-05-30 | 2019-08-20 | 河海大学常州校区 | A kind of humidity sensor based on redox graphene humidity sensitive thin film, method of preparation and use |
| CN110836912A (en) * | 2019-11-04 | 2020-02-25 | 候明高 | Humidity sensor packaging structure |
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