CN113504218A - Laser-induced breakdown spectroscopy-atmospheric pressure glow discharge combined device - Google Patents
Laser-induced breakdown spectroscopy-atmospheric pressure glow discharge combined device Download PDFInfo
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- CN113504218A CN113504218A CN202110607341.5A CN202110607341A CN113504218A CN 113504218 A CN113504218 A CN 113504218A CN 202110607341 A CN202110607341 A CN 202110607341A CN 113504218 A CN113504218 A CN 113504218A
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- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
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- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
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Abstract
The invention provides a laser-induced breakdown spectroscopy-atmospheric pressure glow discharge combined device, which comprises a laser-induced breakdown spectroscopy system, an atmospheric pressure glow discharge system and a sample cavity, wherein a solid sample is placed at the bottom of the sample cavity; the laser-induced breakdown spectroscopy system is used for denudating a solid sample into aerosol particles and generating laser-induced breakdown plasma to form a laser-induced breakdown plasma discharge area on the surface of the solid sample; the atmospheric pressure glow discharge system forms an atmospheric pressure glow discharge area on the surface of the solid sample in a mode of generating atmospheric pressure glow discharge plasma in an atmospheric environment; the laser-induced breakdown plasma discharge area and the atmospheric pressure glow discharge area are overlapped on the surface of the solid sample, and the aerosol particles are excited in the sample cavity together.
Description
Technical Field
The invention belongs to the field of atomic spectrum analysis, relates to the technical field of atomic emission spectrum excitation sources, and more particularly relates to a laser-induced breakdown spectroscopy-atmospheric pressure glow discharge combined device which can be applied to the field of atomic emission spectroscopy of solid sample micro-area analysis.
Background
Laser-induced breakdown spectroscopy (LIBS) is a spectroscopic detection technique that can perform nondestructive or micro-damage, multi-element synchronization, rapid, in-situ analysis on solid, liquid, gas and other multi-state substances; based on these advantages, LIBS technology is widely used in the fields of environmental monitoring, industry, antique detection, agriculture and food chemistry, extraterrestrial geological exploration, and the like. An obvious problem existing in the conventional LIBS technology is that the detection sensitivity is low, so that the LIBS technology is easily limited in the aspect of trace element analysis.
Atmospheric Pressure Glow Discharge (APGD) is stable plasma with a millimeter-scale size generated in an Atmospheric environment, and has the advantages of simple structure, low power consumption and stable discharge; in addition, the APGD discharge unit is small in size, can be conveniently moved and placed, and is an ideal secondary excitation source.
If the atmospheric pressure glow discharge and the laser-induced breakdown spectroscopy are appropriately combined for use, there is a possibility that the detection sensitivity and the application range of the laser-induced breakdown spectroscopy are improved, but a detection device combining the atmospheric pressure glow discharge and the laser-induced breakdown spectroscopy is not available on the market at present.
Disclosure of Invention
The problems to be solved by the invention are as follows:
aiming at the problems, the invention aims to provide a laser-induced breakdown spectroscopy-atmospheric pressure glow discharge combined device which can improve the element sensitivity in the traditional laser-induced breakdown spectroscopy detection and expand the detection capability and application range of the laser-induced breakdown spectroscopy.
Means for solving the problems:
the invention provides a laser-induced breakdown spectroscopy-atmospheric pressure glow discharge combined device, which comprises a laser-induced breakdown spectroscopy system, an atmospheric pressure glow discharge system and a sample cavity, wherein a solid sample is placed at the bottom of the sample cavity; the laser-induced breakdown spectroscopy system is used for denudating a solid sample into aerosol particles and generating laser-induced breakdown plasma to form a laser-induced breakdown plasma discharge area on the surface of the solid sample; the atmospheric pressure glow discharge system forms an atmospheric pressure glow discharge area on the surface of the solid sample in a mode of generating atmospheric pressure glow discharge plasma under an atmospheric environment; the laser-induced breakdown plasma discharge area and the atmospheric pressure glow discharge area are overlapped on the surface of the solid sample, and the aerosol particles are excited in the sample cavity together.
According to the invention, the laser-induced breakdown plasma and the atmospheric pressure glow discharge plasma jointly excite the aerosol particles in the sample cavity, so that the detection sensitivity of the traditional laser-induced breakdown spectroscopy system is improved.
Preferably, in the present invention, the laser-induced breakdown spectroscopy system includes a laser emitting device, a three-dimensional moving platform, a timing control system and a detection system; the device comprises a laser emitting device, a three-dimensional mobile platform, a time sequence control system and a detection system, wherein the laser emitting device is used for emitting high-energy laser beams to degrade a solid sample and generate laser-induced breakdown plasma, the three-dimensional mobile platform is used for placing a sample cavity, the time sequence control system is used for setting parameters for collecting characteristic atomic emission spectrums, the detection system comprises optical fibers and an enhanced charge-coupled device, the characteristic atomic emission spectrums are collected through the optical fibers, and spectrum signals are sent to a spectrometer for distinguishing and processing. By means of the method, the position of the three-dimensional moving platform is adjusted, so that laser emitted by the laser emitting device is focused on the solid sample located at the sampling point position of the atmospheric pressure glow discharge area, the solid sample is ablated, aerosol particles and laser-induced breakdown plasma are generated, and the laser-induced breakdown plasma discharge area and the atmospheric pressure glow discharge area are enabled to be overlapped in time and space. Parameters such as spectrometer delay time and the like are set through the time sequence control system, the detection system collects characteristic atomic emission spectra emitted by the plasma through the optical fiber according to the parameters, and the spectral signals are sent to a spectrometer for analyzing the spectral signals to be resolved and processed.
Preferably, in the present invention, the atmospheric pressure glow discharge system comprises a high voltage direct current power supply, a current stabilizing resistor, an anode metal rod, a cathode metal tube, a gas flow controller, an inert gas source containing inert gas, a wire and a gas tube for transmitting inert gas; the anode of the high-voltage direct-current power supply is connected with the anode metal rod through a wire, the cathode of the high-voltage direct-current power supply is connected with the cathode metal tube after being connected with the current stabilizing resistor through a wire, the gas flow controller is provided with a gas inlet and a gas outlet, the gas inlet is connected with the inert gas source through a gas tube, and the gas outlet is connected with the cathode metal tube through a gas tube. With this, the atmosphere glow discharge system generates atmosphere glow discharge in an inert gas atmosphere using the inert gas as a discharge medium for the atmosphere glow discharge.
Preferably, in the present invention, the sample chamber includes a high temperature resistant chamber, a high temperature resistant insulating spacer, a plurality of fixing nuts, and a pair of quartz tubes; openings are respectively arranged on two sides of the high-temperature resistant cavity, one opening is used for inserting the air pipe and a lead connected with the negative electrode of the high-voltage direct current power supply, and the other opening is used for inserting a lead connected with the positive electrode of the high-voltage direct current power supply; the high-temperature-resistant insulating gasket is fixed at the bottom of the high-temperature-resistant chamber, the fixing nuts are coaxially arranged on two sides of the high-temperature-resistant insulating gasket, the pair of quartz tubes are respectively fixed in the fixing nuts in a mode of being located on two sides of the high-temperature-resistant insulating gasket, and the cathode metal tube and the anode metal rod are respectively arranged inside the pair of quartz tubes. With this, the two electrodes of the atmospheric pressure glow discharge system are respectively located at two sides of the sample chamber, and atmospheric pressure glow discharge occurs in the sample chamber, so that a discharge area of the atmospheric pressure glow discharge plasma is located on the surface of the solid sample.
Preferably, in the present invention, the high temperature chamber includes a high temperature cover with an opening, and the laser emitted by the laser emitting device enters the interior of the high temperature chamber through the opening of the high temperature cover; the optical fiber is arranged outside the cavity and collects the emitted light of the plasma in the cavity through the opening. By means of the method, the optical fiber acquires characteristic atomic emission spectrum for resolution and processing.
Preferably, in the present invention, the inert gas is He, Ar and H2-He mixed gas. With the help of the above, the inert gas can not only cool the two electrodes of the atmospheric pressure glow discharge system, but also serve as a discharge medium of the atmospheric pressure glow discharge, thereby improving the sensitivity of the detection element of the aerosol particles.
Preferably, in the invention, a gap for placing the solid sample is arranged between the anode metal rod and the cathode metal tube and between the high-temperature-resistant insulating gasket and the cathode metal tube, the height of the gap is 2-5 mm, and the distance between the anode metal rod and the cathode metal tube is 3-15 mm. By means of the method, the two electrodes of the atmospheric pressure glow system are placed on the solid sample, the atmospheric pressure glow discharge plasma is enabled to be tightly attached to the surface of the solid sample, and the anode metal rod and the cathode metal tube can move coaxially and freely, so that the distance between the two electrodes of the atmospheric pressure glow discharge system is adjusted according to different experimental requirements.
Preferably, in the invention, the diameter range of the metal rod anode is 1.5-4.5 mm, the inner diameter range of the metal tube cathode is 1-2.5 mm, and the outer diameter range is 1.5-4.5 mm.
Preferably, in the present invention, the sample chamber is made of ceramic, quartz, or polytetrafluoroethylene, and the sample chamber isolates the region where the atmospheric glow discharge occurs from the laser emitting device, so that the adverse effects of heat and electricity generated by the atmospheric glow discharge system on the instrument are prevented by using the advantages of good insulation, high temperature resistance, and low thermal conductivity of the sample chamber.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a combination of a laser-induced breakdown spectroscopy system apparatus and an atmospheric pressure glow discharge system apparatus;
FIG. 2 is a schematic diagram of the structure of an atmospheric pressure glow discharge system and a sample chamber;
FIG. 3 is a schematic diagram of a quartz chamber (refractory chamber) configuration;
FIG. 4 is a flow chart of the operation of a combined laser-induced breakdown spectroscopy-atmospheric glow discharge apparatus;
FIG. 5 is a graph comparing LIBS signal with LIBS and APGD coaction signals for soil solids samples;
description of the symbols:
1-inert gas source, 2-rubber hose (air pipe), 3-gas flow controller, 4-optical fiber, 5-laser, 6-three-dimensional moving platform, 7-lead, 8-high voltage direct current power supply, 9-current stabilizing resistor, 10-quartz tube, 11-quartz chamber (high temperature resistant chamber), 12-anode metal bar, 13-fixing nut, 14-solid sample, 15-high temperature resistant insulating gasket and 16-cathode metal tube.
Detailed Description
The present invention is further described below in conjunction with the following embodiments and the accompanying drawings, it being understood that the drawings and the following embodiments are illustrative of the invention only and are not limiting; the same or corresponding reference numerals denote the same components in the respective drawings, and redundant description is omitted.
Disclosed herein is a laser-induced breakdown spectroscopy-atmospheric glow discharge combined device (hereinafter sometimes referred to simply as a combined device), which includes a laser-induced breakdown spectroscopy system, an atmospheric glow discharge system, and a sample chamber, as shown in fig. 1. The laser-induced breakdown spectroscopy system degrades a solid sample into aerosol particles and generates laser-induced breakdown plasma, and a laser-induced breakdown plasma discharge area is formed on the surface of the solid sample.
The sample cavity is positioned on a three-dimensional moving platform of the laser induced breakdown system, the position of the three-dimensional moving platform is adjusted to enable a laser induced breakdown point to be positioned on the surface of a solid sample between two discharge electrode pairs of an atmospheric pressure glow system, laser pulses are emitted to trigger generation of atmospheric pressure glow discharge plasmas, the laser induced breakdown plasmas and the atmospheric pressure glow discharge plasmas are overlapped in time and space, aerosol particles are excited together in the sample cavity to generate a characteristic atomic emission spectrum, and the laser induced breakdown spectroscopy system is used for simultaneously collecting the characteristic atomic emission spectra of the two plasmas through optical fibers and transmitting the spectra to a spectrometer for detection.
In this embodiment, the laser-induced breakdown system includes a laser 5, a three-dimensional moving platform 6, an optical fiber 4, and a spectrometer for detecting and analyzing a characteristic atomic emission spectrum. The laser 5 emits 266nm pulsed ultraviolet light, the pulsed ultraviolet light is focused on the surface of a solid sample 14 in a quartz chamber 11 on the three-dimensional moving platform by adjusting the three-dimensional moving platform, the solid sample 14 placed in the quartz chamber 11 is ablated, the solid sample 14 is ablated into aerosol particles, and laser-induced breakdown plasma is generated.
Fig. 2 is a schematic diagram of the structure of the atmospheric pressure glow discharge system and the sample chamber, and the structure of a further embodiment is described below with reference to fig. 2.
As shown in fig. 2, the atmospheric pressure glow discharge system includes a high voltage dc power supply 8, a ballast resistor 9, a cathode metal tube 16, an anode metal rod 12, a gas flow rate controller 3, and an inert gas source 1. The cathode metal tube 16 is a stainless steel tube with the inner diameter of 1.1mm, the outer diameter of 1.6mm and the length of 30mm, a current stabilizing resistor 9 of 10k omega is connected in series through a lead 7 and then connected with the negative electrode of the high-voltage direct-current power supply 8, the anode metal rod 12 is a stainless steel rod with the diameter of 1.5mm and the length of 30mm, the anode metal rod is connected with the positive electrode of the high-voltage direct-current power supply 8 through the lead 7, the high-voltage direct-current power supply 8 outputs current in a constant current mode, and the current is 20-40 mA.
The inert gas source 1 is helium, the gas flow controller 3 is provided with a gas inlet and a gas outlet, the gas pipe is a rubber hose 2, the inert gas source 1 is connected with the gas inlet through the rubber hose 2, the gas outlet is connected with the cathode metal pipe 16 through the rubber hose 2, and the gas flow controller 3 controls the helium to enter the sample cavity at the flow rate of 100-500 mL/min, so that glow discharge is formed in the inert gas atmosphere.
In this embodiment, the positive electrode of the high voltage dc power supply is connected to the current stabilizing resistor through a wire, and then connected to the anode metal rod, and the negative electrode of the high voltage dc power supply is connected to the cathode metal tube through a wire.
In addition, in the embodiment, the resistance value range of the current stabilizing resistor is 2.5-12 k Ω, so that the conversion from the atmospheric pressure glow discharge plasma to arc discharge is avoided, and the stability of the atmospheric pressure glow discharge is improved.
Fig. 3 is a schematic structural diagram of the quartz chamber 11, i.e., the refractory chamber, and the present embodiment is further described below with reference to fig. 3 and 2.
As shown in fig. 2 and 3, a solid sample 14 is placed in a chamber of a sample chamber, including a quartz chamber 11, a pair of quartz tubes 10, a fixing nut 13, and a high temperature resistant insulating spacer 15. The quartz chamber 11 has a length of 90mm, a width of 90mm, a height of 25mm and a wall thickness of 3mm, the quartz cover of the quartz chamber 11 has an opening in the center, the opening in this embodiment is a square opening with a side length of 25mm, the pulsed ultraviolet light enters the sample chamber through the square opening, and the optical fiber collects the emitted light inside the chamber through the opening outside the chamber. The high-temperature resistant insulating gasket 15 is an alumina ceramic wafer with the diameter of 50mm and the thickness of 6mm, and is fixed in the center of the quartz chamber 11, and four fixing nuts 13 with the model number of M4 are coaxially fixed on the high-temperature resistant insulating gasket 15. Two quartz tubes 10 with an inner diameter of 1.7mm, an outer diameter of 3mm and a length of 15mm are respectively fixed in the fixing nut 13, so that the two quartz tubes 10 are positioned at two sides of the high-temperature-resistant insulating gasket 15, the anode metal rod 12 and the cathode metal tube 16 are respectively arranged in the quartz tubes 10 at the two sides, and the two electrodes are fixed by the quartz tubes 10 and are insulated from the fixing nut 13. The quartz chamber 11 has two openings on two sides, wherein one opening is inserted with the lead 7 connected with the anode metal rod 12, the other opening is inserted with the lead 7 connected with the cathode metal tube 16 and the gas tube 2, the anode metal rod 12, the cathode metal tube 16, the quartz tube 10 and the fixing nut 13 are mutually wound and fixed by winding a raw material belt, so that the anode metal rod 12 and the cathode metal tube 16 are coaxially arranged in the high temperature resistant chamber 11.
In this embodiment, the distance between the anode metal rod 12 and the cathode metal tube 16 can be adjusted, and the distance range is 3-15 mm.
In addition, in this embodiment, the sample chamber may further use a high temperature resistant chamber made of a high temperature resistant and insulating material such as ceramic, polytetrafluoroethylene, etc., the sample chamber isolates the generation area of the atmospheric pressure glow discharge from the laser emitting device, and the advantages of good insulation, high temperature resistance, low heat conduction, etc. of the manufacturing material are utilized to prevent the heat and electricity generated by the atmospheric pressure glow discharge system from adversely affecting the instrument, thereby being beneficial to saving resources and cost.
In addition, in the embodiment, the length and the width of the high-temperature resistant chamber are 50-150 mm, the height is 15-100 mm, and the wall thickness is 2-8 mm. With this, the high temperature resistant chamber is made to have a suitable size, and can be mounted on the three-dimensional moving platform and moved along with the platform, and can include a high temperature resistant insulating gasket 15, an anode metal rod 12, a cathode metal tube 16, a fixing nut 13, a quartz tube 10, and a solid sample 14 inside.
The workflow of the present invention is described in further detail below in conjunction with fig. 4.
In the work flow diagram using the combined apparatus shown in fig. 4, step S1 is used to degrade the solid sample 14 into aerosol particles and generate laser-induced plasma. Opening a laser-induced breakdown spectroscopy system, placing a solid sample 14 on a high-temperature-resistant insulating gasket 15 in a sample cavity, adjusting a three-dimensional moving platform 6 to enable a laser emission point of a laser 5 to be focused on the surface of the solid sample 14 and be positioned between two electrodes of atmospheric pressure glow discharge, enabling the laser 5 to emit pulse ultraviolet light of 266nm, corroding the solid sample 14 into aerosol particles and generating laser-induced breakdown plasma, and forming a laser-induced breakdown plasma discharge area on the surface of the solid sample 14.
Next, an atmospheric pressure glow discharge is formed through step S2, the gas flowmeter 3 delivers He at a stable flow rate as a discharge medium to a discharge region of the atmospheric pressure glow discharge system, then the high voltage power supply 8 is turned on to apply a constant current high voltage to the two electrodes, an atmospheric pressure glow discharge is formed between the two electrodes in a laser pulse triggering manner, the laser-induced breakdown plasma and the atmospheric pressure glow discharge plasma overlap in time and space, and both of them excite the aerosol particles of the solid sample.
Finally, the characteristic atomic emission spectrum when the laser-induced breakdown plasma and the atmospheric pressure glow discharge plasma are acted together is collected and analyzed through step S3, and by setting parameters such as spectrometer delay time, the characteristic atomic emission spectrum is collected by using the optical fiber 4 and the spectral data is transmitted to the spectrometer for analysis.
The device can directly carry out micro-area analysis on the solid sample. Taking a soil solid sample as an example, the experiment is carried out under the conditions of 20mJ of laser energy, 1Hz of frequency, 1 mu s of spectrum acquisition delay time, 10 mu s of integration time, 2500 of spectrometer gain, 28mA of current, 200mL/min of He gas flow rate and 5mm of electrode spacing. Fig. 5 shows the results of a comparison of LIBS signal with the combined LIBS and APGD signal for soil solids samples under this experimental condition, and this embodiment is further described below in conjunction with fig. 5.
As shown in fig. 5, arrow a represents a signal detected by LIBS, arrow B represents a signal detected after LIBS and APGD are coupled, the horizontal axis represents wavelength, and the vertical axis represents intensity of the signal. Comparing the intensities of the two signals in fig. 5, it is found that the multi-element signal intensity detected after LIBS coupling APGD is significantly greater than the signal intensity of LIBS, especially within the 250-450 nm band (fig. 5 only shows the 300-350 nm band), which indicates that the device of the present invention can significantly improve the multi-element signal intensity. And it can be seen from fig. 5 that some signals that cannot be detected by LIBS can be clearly resolved after APGD coupling, indicating that the device of the present invention has a generally improved ability to detect multiple elements.
In summary, the laser-induced breakdown spectroscopy and atmospheric pressure glow discharge ion source combined device provided by the embodiment has a simple structure, and the atmospheric pressure glow discharge plasma and the laser-induced breakdown plasma are spatially combined by adopting the high temperature resistant sample cavity, so that the signal emission intensity of the laser-induced laser spectroscopy can be effectively improved, the detection sensitivity of the laser-induced breakdown spectroscopy can be improved, and the application range of the laser-induced breakdown spectroscopy can be widened under the condition that the laser and lighting conditions are not changed.
The above embodiments are further described in detail for the purpose of illustrating the invention, and it is to be understood that the invention is not limited to the scope of the invention, but may be embodied in various forms without departing from the spirit of the essential characteristics thereof, and therefore, the present invention is intended to be limited only by the appended claims rather than by the foregoing description, and all changes that fall within the metes and bounds of the claims, or equivalence of such metes and bounds thereof are therefore intended to be embraced by the appended claims.
Claims (9)
1. A laser-induced breakdown spectroscopy-atmospheric pressure glow discharge combined device is characterized by comprising a laser-induced breakdown spectroscopy system, an atmospheric pressure glow discharge system and a sample cavity with a sample placed at the bottom; the laser-induced breakdown spectrometer is used for denudating a sample into aerosol particles and generating laser-induced breakdown plasma to form a laser-induced breakdown plasma discharge area on the surface of the sample; the atmospheric pressure glow discharge system forms an atmospheric pressure glow discharge area on the surface of the sample in a mode of generating atmospheric pressure glow discharge plasma in an atmospheric environment; the laser-induced breakdown plasma discharge area and the atmospheric pressure glow discharge area are overlapped on the surface of the sample, and the aerosol particles are excited in the sample cavity together.
2. The laser-induced breakdown spectroscopy-atmospheric pressure glow discharge combined device according to claim 1, wherein the laser-induced breakdown spectroscopy comprises a laser emitting device, a three-dimensional moving platform, a time sequence control system and a detection system, the laser emitting device is used for emitting high-energy laser beams to degrade fixed samples, the three-dimensional moving platform is used for placing the sample cavity, the time sequence control system is used for setting parameters for collecting characteristic atomic emission spectra, the detection system comprises an optical fiber and an enhanced charge-coupled device, and the optical fiber is used for collecting the characteristic atomic emission spectra and sending spectral signals to the spectrometer for resolution and processing.
3. The laser-induced breakdown spectroscopy-atmospheric pressure glow discharge combined device according to claim 1, wherein the atmospheric pressure glow discharge system comprises a high-voltage direct-current power supply, a current-stabilizing resistor, an anode metal rod, a cathode metal tube, a gas flow controller, an inert gas source containing inert gas, a lead wire and a gas tube for transmitting the inert gas; the anode of the high-voltage direct-current power supply is connected with the anode metal rod through a wire, the cathode of the high-voltage direct-current power supply is connected with the cathode metal tube after being connected with the current-stabilizing resistor through a wire, the gas flow controller is provided with an air inlet and an air outlet, two air pipes are inserted into the air inlet and the air outlet respectively, the air inlet is connected with the inert gas source through the air pipes, and the air outlet is connected with the cathode metal tube through the air pipes.
4. The laser-induced breakdown spectroscopy-atmospheric pressure glow discharge combined device according to claim 3, wherein the sample chamber comprises a high temperature resistant chamber, a high temperature resistant insulating gasket, a plurality of fixing nuts and a pair of quartz tubes; openings are respectively arranged on two sides of the high-temperature resistant cavity, one opening is used for inserting the air pipe and a lead connected with the negative electrode of the high-voltage direct current power supply, and the other opening is used for inserting a lead connected with the positive electrode of the high-voltage direct current power supply; the high-temperature-resistant insulating gasket is fixed at the bottom of the high-temperature-resistant chamber, the fixing nuts are coaxially arranged on two sides of the high-temperature-resistant insulating gasket, the pair of quartz tubes are respectively fixed in the fixing nuts in a mode of being located on two sides of the high-temperature-resistant insulating gasket, and the cathode metal tube and the anode metal rod are respectively arranged inside the pair of quartz tubes.
5. The laser-induced breakdown spectroscopy-atmospheric pressure glow discharge combined device as claimed in any one of claims 1 to 4, wherein the high temperature-resistant chamber comprises a high temperature-resistant cover with an opening, the laser emitted by the laser emitting device enters the interior of the chamber through the opening of the high temperature-resistant cover, and the optical fiber collects the emitted light inside the chamber through the opening.
6. The combined laser-induced breakdown spectroscopy-atmospheric pressure glow discharge device of claim 3, wherein the inert gas is He, Ar or H2-He mixed gas.
7. The laser-induced breakdown spectroscopy-atmospheric pressure glow discharge combined device as claimed in claim 4, wherein a gap for placing the solid sample is provided between the anode metal rod and the cathode metal tube and between the high temperature resistant insulating gasket, the height of the gap is 2-5 mm, and the distance between the anode metal rod and the cathode metal tube is 3-15 mm.
8. The laser-induced breakdown spectroscopy-atmospheric pressure glow discharge combined device as claimed in claim 3, wherein the diameter of the metal rod anode is 1.5-4.5 mm, and the inner diameter of the metal tube cathode is 1-2.5 mm and the outer diameter is 1.5-4.5 mm.
9. The laser-induced breakdown spectroscopy-atmospheric pressure glow discharge combination apparatus as claimed in claim 1, wherein the material of the sample chamber is ceramic, quartz or polytetrafluoroethylene.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114509426A (en) * | 2022-02-23 | 2022-05-17 | 西北师范大学 | Device and method for detecting heavy metal elements in liquid by LIBS-GD combination |
| CN114509426B (en) * | 2022-02-23 | 2024-04-26 | 西北师范大学 | LIBS-GD combined device and method for detecting heavy metal elements in liquid |
| CN115808408A (en) * | 2023-01-18 | 2023-03-17 | 江苏奥文仪器科技有限公司 | Glow spectrometer excitation device for enhancing glow discharge intensity by laser |
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Application publication date: 20211015 |