CN113504138A - Silicon-based MEMS multi-environment torsion fatigue characteristic testing system and method - Google Patents
Silicon-based MEMS multi-environment torsion fatigue characteristic testing system and method Download PDFInfo
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- CN113504138A CN113504138A CN202110798194.4A CN202110798194A CN113504138A CN 113504138 A CN113504138 A CN 113504138A CN 202110798194 A CN202110798194 A CN 202110798194A CN 113504138 A CN113504138 A CN 113504138A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/32—Investigating strength properties of solid materials by application of mechanical stress by applying repeated or pulsating forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0001—Type of application of the stress
- G01N2203/0005—Repeated or cyclic
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- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0014—Type of force applied
- G01N2203/0021—Torsional
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- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
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Abstract
The invention discloses a silicon-based MEMS multi-environment torsion fatigue characteristic test system which comprises a torsion test piece, a torsion test part and an environment control part, wherein the torsion test piece and the torsion test part are both positioned in the environment control part, and the torsion test piece is fixedly connected with the torsion test part. The invention can realize that a complicated driving structure and a detection structure are not designed on the test piece, and has simpler shape and processing method and strong universality. And fixing the torsion test piece on an external piezoelectric ceramic driver, loading the torsion test piece, and monitoring and measuring the torsion angle through an optical sensor. Meanwhile, the fatigue characteristic of the micro torsion beam under the actual working condition of the test can be simulated by adjusting the relevant environment of the fatigue test through the temperature integrated with the environment control platform and the vacuum degree controller.
Description
Technical Field
The invention relates to the technical field of reliability evaluation of micro-electro-mechanical systems, in particular to a system and a method for testing multi-environment torsional fatigue characteristics of a silicon-based MEMS.
Background
The mechanical property of the micro-nano material directly influences the performance and reliability of industrial finished products of MEMS components, and accurately measuring various mechanical parameters of the micro-nano material is an important guarantee for manufacturing high-reliability MEMS components in the MEMS field which takes silicon as a brittle material as a main body at present. Among them, the torsional fatigue characteristic is one of the important mechanical parameters, and determines the scanning angle and the service life index of products such as Digital micro-mirrors (DMD). However, the torsional fatigue characteristics of the silicon-based MEMS torsion beam are not only related to the material properties such as the crystal structure, doping type, doping amount, etc. of silicon itself, but also directly hooked with the processing technology, the use environment, etc. Therefore, the torsional fatigue performance of the silicon-based MEMS torsion beam in different environments under different processes is accurately measured, and the reliability of MEMS products such as DMD and the like is favorably improved.
Currently, very few reports are reported on torsional fatigue testing systems and methods for MEMS torsion beams. The principle of the patent application numbers 200610114431.6, 201410767834.5, and the patent application numbers 201410767834.5, namely the patent application numbers 200610114431.6, a microstructure torsion fatigue experimental device driven by parallel plate capacitance and a test structure for testing the fatigue strength of an electrostatic MEMS torsion beam, are based on torsion and stress detection of the torsion beam by the electrostatic driving principle and integrated on comb electrodes of a test piece. However, the torsional fatigue test, as a statistical test, requires a large amount of measurement data to support. The test pieces in the two patents are complex in structural design, fixed in processing technology and high in processing difficulty, and the influence of multiple processes on the fatigue property of the torsion beam is difficult to eliminate. Meanwhile, the complex process may cause low sample production efficiency and test efficiency, and affect the number and statistical result of the micro-torsion fatigue tests. Therefore, the MEMS torsional fatigue characteristic testing system and method which are simple and efficient and compatible with various processing modes and testing environments have obvious practical requirements and values.
Disclosure of Invention
The invention aims to provide a system and a method for testing multi-environment torsional fatigue characteristics of a silicon-based MEMS (micro-electromechanical system), which are used for solving the problems in the prior art and can realize the provision of a silicon-based torsional fatigue test specimen with a bias mass block. The test piece is not designed with a complex driving structure and a complex detection structure, and has simpler shape and processing method and strong universality. And fixing the torsion test piece on an external piezoelectric ceramic driver, loading the torsion test piece, and monitoring and measuring the torsion angle through an optical sensor. Meanwhile, the fatigue characteristic of the micro torsion beam under the actual working condition of the test can be simulated by adjusting the relevant environment of the fatigue test through the temperature integrated with the environment control platform and the vacuum degree controller.
In order to achieve the purpose, the invention provides the following scheme: the invention provides a silicon-based MEMS multi-environment torsion fatigue characteristic test system, which comprises a torsion test piece, a torsion test part and an environment control part, wherein the torsion test piece and the torsion test part are both positioned in the environment control part, and the torsion test piece is fixedly connected with the torsion test part;
the torsion testing part comprises a three-axis displacement table arranged in the environment control part, the top end of the three-axis displacement table is fixedly connected with a piezoelectric ceramic driver through a first clamp, and the top end of the piezoelectric ceramic driver is fixedly connected with the torsion test piece through a second clamp; a measuring piece for testing the torsion angle of the torsion test piece is arranged on one side of the triaxial displacement table, and the measuring piece is arranged corresponding to the torsion test piece;
the torsion test piece comprises a round torsion mirror and a frame, the round torsion mirror is located in the frame, the round torsion mirror is fixedly connected with the frame through a torsion supporting beam, and the bottom end of the frame is fixedly connected with the second clamp.
Preferably, the control part includes vacuum box and warm table, the warm table with the triaxial displacement platform all is located in the vacuum box, the warm table top pass through the connecting plate with triaxial displacement platform bottom rigid coupling, the measuring part with connecting plate top rigid coupling.
Preferably, the measuring part comprises a supporting plate and a supporting frame, the supporting plate is fixedly connected with the top end of the connecting plate, a position sensor is fixedly connected to the supporting plate through a connecting rod and is located above the circular torsion mirror, a groove is formed in the top end of the supporting frame, a laser emitter is arranged in the groove and is rotatably connected with the supporting frame through a rotating rod, and the laser emitter is arranged corresponding to the circular torsion mirror.
Preferably, the number of the torsion supporting beams is eight, any two torsion supporting beams are positioned on the same straight line, and the circular torsion mirror is fixedly connected with the frame through any two torsion supporting beams positioned on the same straight line.
Preferably, two ends of the torsion support beam are respectively fixedly connected with the circular torsion mirror and the frame through arc transition surfaces.
Preferably, the first clamp comprises a clamping plate fixedly connected with the top end of the three-axis displacement table, four pressing plates are axially arranged at the top end of the clamping plate, a sliding groove is formed in the top end of each pressing plate, a fixing bolt is arranged in each sliding groove, each pressing plate is fixedly connected with the clamping plate through the corresponding fixing bolt, and one end of each pressing plate is abutted to the corresponding piezoelectric ceramic driver; the second clamp comprises two connecting plates fixedly connected with the top end of the piezoelectric ceramic driver, the two connecting plates are respectively arranged corresponding to the two sides of the frame, and the top ends of the two connecting plates are fixedly connected with the bottom end of the frame.
Preferably, the clamping plate is an insulating plate.
A silicon-based MEMS multi-environment torsion fatigue characteristic test system using method comprises the following processing steps:
a. preparing a torsion test piece: manufacturing a torsion test piece on a wafer by adopting a standard bulk silicon process;
b. cutting a torsion test piece: after the step a is finished, cutting the wafer, and separating the frame from the wafer;
c. installing a torsion test piece: after the step b is finished, cutting off six torsional support beams, reserving two torsional support beams on the same straight line, respectively fixing the bottom ends of the frames on two connecting plates, and fixing the piezoelectric ceramic driver on the clamping plate;
d. installing a three-axis displacement table: after the step c is finished, fixing the three-axis displacement table on a heating table;
e. adjusting the position of the measuring part: after the step c is finished, opening a laser transmitter, adjusting the three-axis displacement table and the laser transmitter, and reflecting laser emitted by the laser transmitter to the position sensor after striking on the circular torsion mirror;
f. starting test: and starting the heating table and the vacuum box, starting the piezoelectric ceramic driver, and measuring the torsional fatigue property of the torsional test piece.
Preferably, in the step b, a cutting line for facilitating separation of the frame is disposed on the wafer, and the wafer is located in deionized water or edible oil.
Preferably, in the step c, the frame is fixedly connected to the top ends of the two connecting plates by a high-temperature-resistant adhesive.
The invention discloses the following technical effects:
compared with the background technology, the invention has obvious advancement, and designs the torsion test piece which is compatible with various current processing methods and has simple structure aiming at the conditions that the torsion fatigue test piece of the current MEMS torsion beam has complicated process, fixed processing flow and difficult direct analogy with the reliability of an actual torsion product. The torsion test piece only comprises a torsion supporting beam and a circular torsion mirror, a torsion load is directly applied to the torsion test piece through a piezoelectric ceramic driver outside the structure, and a position sensor is adopted to measure the torsion angle and the torsion stress of the torsion test piece. The torsional fatigue characteristic testing system and the method principle have the advantages that the processing and the operation are simple, the requirements for a large amount of test data in the fatigue characteristic are met, and the torsional fatigue characteristic testing system and the method principle are a testing method with high practicability.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a block diagram of a torsional fatigue test system;
FIG. 2 is a perspective view of the environmental control section;
FIG. 3 is a perspective view of a torsion testing section;
FIG. 4 is a perspective view of a piezoceramic driver;
FIG. 5 is a plan view of a torsion test piece;
FIG. 6 is a perspective view of a torsion test piece;
FIG. 7 is a graph of the original data obtained from the torsional fatigue test system when a sample is again fatigue-damaged;
FIG. 8 is a flow chart of a torsion test piece processing method;
the device comprises a three-axis displacement table 1, a piezoelectric ceramic driver 2, a circular twisting mirror 3, a frame 4, a vacuum box 5, a heating table 6, a connecting plate 7, a supporting plate 8, a supporting frame 9, a connecting rod 10, a position sensor 11, a groove 12, a laser emitter 13, a rotating rod 14, an arc transition surface 15, a clamping plate 16, a pressing plate 17, a sliding chute 18, a fixing bolt 19, a connecting plate 20, a wafer 21, a cutting line 22, a twisting supporting beam 23 and a data power interface 24.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
The invention provides a silicon-based MEMS multi-environment torsion fatigue characteristic test system which is characterized by comprising a torsion test piece, a torsion test part and an environment control part, wherein the torsion test piece and the torsion test part are both positioned in the environment control part, and the torsion test piece is fixedly connected with the torsion test part; the torsion testing part comprises a three-axis displacement table 1 arranged in the environment control part, the top end of the three-axis displacement table 1 is fixedly connected with a piezoelectric ceramic driver 2 through a first clamp, and the top end of the piezoelectric ceramic driver 2 is fixedly connected with a torsion test piece through a second clamp; one side of the triaxial displacement table 1 is provided with a measuring piece for testing the torsion angle of the torsion test piece, and the measuring piece is arranged corresponding to the torsion test piece; the torsion test piece comprises a round torsion mirror 3 and a frame 4, the round torsion mirror 3 is positioned in the frame 4, the round torsion mirror 3 is fixedly connected with the frame 4 through a torsion supporting beam 23, and the bottom end of the frame 4 is fixedly connected with a second clamp.
The effect of triaxial displacement platform 1 is the position of adjustment frame 4, make the position that is located circular torsion mirror 3 in frame 4 can adjust, finally make the measuring part can normally measure the torsion angle of circular torsion mirror 3, the effect of piezoceramics driver 2 is that the angle that makes the torsion test piece can change, wherein triaxial displacement platform 1 and piezoceramics driver 2 all belong to prior art, high durability and convenient use, be convenient for observe, demand to a large amount of test data in being fit for the fatigue characteristic.
Further optimize the scheme, the control part includes vacuum box 5 and warm table 6, and warm table 6 and triaxial displacement platform 1 all are located vacuum box 5, and warm table 6 top is passed through connecting plate 7 and the 1 bottom rigid coupling of triaxial displacement platform, and the measuring part is with the 7 top rigid couplings of connecting plate. The temperature and the vacuum degree of a test environment of the torsion test piece are respectively controlled by the heating table 6 and the vacuum box 5, wherein the maximum heating temperature of the heating table 6 is not more than 80 ℃ in order to ensure the stable work of the torsion test part.
The side wall of the vacuum box 5 is provided with a data power supply interface 24. The data power supply interface 25 is used for realizing power supply input and signal output of the piezoelectric ceramic driver 2, the measuring piece and the heating table 6.
Further optimize the scheme, the measuring part includes backup pad 8 and support frame 9 with 7 top rigid couplings of connecting plate, has position sensor 11 through connecting rod 10 rigid coupling in backup pad 8, and position sensor 11 is located circular turning mirror 3 tops, and recess 12 has been seted up on support frame 9 top, is provided with laser emitter 13 in the recess 12, and laser emitter 13 rotates with support frame 9 through bull stick 14 to be connected, and laser emitter 13 corresponds the setting with circular turning mirror 3. Laser emitter 13 can the lasing, after the installation of torsion test piece finishes, open laser emitter 13, laser emitter 13 launches laser and beats on circular twist mirror 3, through the position of the circular twist mirror 3 of triaxial displacement platform 1 adjustment, finally make laser through the reflection of circular twist mirror 3 to position sensor 11 on the sensing face, in the process of the test afterwards, position sensor 11 can obtain required data according to the shift position of laser, and laser generator 13 can take place to rotate under the effect of bull stick 14, the purpose is convenient for beat laser on circular twist mirror 3, with improvement testing personnel's work efficiency.
In a further optimized scheme, the number of the torsion supporting beams 23 is eight, any two torsion supporting beams 23 are positioned on the same straight line, and the circular torsion mirror 3 is fixedly connected with the frame 4 through any two torsion supporting beams 23 positioned on the same straight line. The torsion test piece mainly comprises a round torsion mirror 3 with a larger size and eight torsion supporting beams 23 which are symmetrically distributed, wherein the diameter of the round torsion mirror 3 ranges from 1000 mu m to 2500 mu m, the thickness of the round torsion mirror is the same as that of a silicon wafer for manufacturing the torsion test piece, and the diameter of the round torsion mirror is generally 525 mu m. The torsion support beam 23 has a length of 20 μm to 200 μm, a width of 20 μm to 50 μm, a thickness of only 5 μm to 50 μm, and a distance from the symmetry axis of the torsion test piece may be zero to the radius of the circular torsion mirror 3. The diameter of the circular torsion mirror 3, the length, width and height of the torsion support beam 23, and the distance between the torsion support beam 23 and the symmetry axis of the test piece, also referred to as eccentricity, can be varied within the dimensional ranges described above to control the resonance frequency of the torsion test piece to conform to the operating frequency band of the piezoceramic driver 2.
The eight torsion support beams 23 are divided into four groups, each two torsion support beams 23 on the same straight line are one group, when a test is carried out, only one group of torsion support beams 23 is required to be reserved, the four groups are arranged, when a torsion test piece is manufactured or transported, even if part of the torsion support beams 23 are damaged, the damaged group of torsion support beams 23 can still be selected to be discarded, and the other groups of torsion support beams 23 which are not damaged are selected to be reserved, so that the arrangement improves the qualification rate of the torsion test piece and is suitable for the requirement of a large amount of test data in fatigue characteristics.
In a further optimized scheme, two ends of the torsion supporting beam 23 are respectively fixedly connected with the circular torsion mirror 3 and the frame 4 through the arc transition surface 15. Because the connection part of the torsion support beam 23, the round torsion mirror 3 and the frame 4 is easy to damage, the arc transition surface 15 is arranged at the connection part of the torsion support beam 23, the round torsion mirror 3 and the frame 4, on one hand, the qualification rate of a torsion test piece is improved by the arc transition surface 15, and on the other hand, the torsion support beam 23 adopts arc transition at the position close to the round torsion mirror 3 and the position close to the frame 4 so as to reduce the stress concentration phenomenon at the position.
According to a further optimized scheme, the first clamp comprises a clamping plate 16 fixedly connected with the top end of the three-axis displacement table 1, four pressing plates 17 are axially arranged at the top end of the clamping plate 16, a sliding groove 18 is formed in the top end of each pressing plate 17, a fixing bolt 19 is arranged in each sliding groove 18, each pressing plate 17 is fixedly connected with the clamping plate 16 through the corresponding fixing bolt 19, and one end of each pressing plate 17 is abutted to the piezoelectric ceramic driver 2; the second clamp comprises two connecting plates 20 fixedly connected with the top end of the piezoelectric ceramic driver 2, the two connecting plates 20 are respectively arranged corresponding to the two sides of the frame 4, and the top ends of the two connecting plates 20 are fixedly connected with the bottom end of the frame 4. The clamping plate 16 is provided with a fixing hole (not shown in the figure) for placing the fixing bolt 19, when the installation starts, the bottom end of the fixing bolt 19 in the sliding groove 18 is not abutted to the top end of the pressing plate 17, the piezoelectric ceramic driver 2 is placed in the middle positions of the four pressing plates 17, the pressing plate 17 is moved, one end of the pressing plate 17 is abutted to the piezoelectric ceramic driver 2, the fixing bolt 19 is rotated subsequently, the bottom end of the fixing bolt 19 is abutted to the top end of the fixing pressing plate 17, the fixing bolt 19 limits the movement of the pressing plate 17, therefore, the piezoelectric ceramic driver 2 works and vibrates to enable, the pressing plate 17 can enable the piezoelectric ceramic driver 2 and the clamping plate 16 not to generate relative displacement, and the test is normally performed.
In a further optimized scheme, the clamping plate 16 is an insulating plate. The purpose of the clamping plate 16 being an insulating plate is to prevent short-circuiting of the three-axis displacement table 1, so that the device is used properly.
A silicon-based MEMS multi-environment torsion fatigue characteristic test system using method comprises the following processing steps:
a. preparing a torsion test piece: a torsion test piece was fabricated on wafer 21 using standard bulk silicon processing. And manufacturing a torsion test piece by adopting a standard bulk silicon process.
The plane structure of the torsion test piece is shown in figure 4, and the torsion test piece can be processed by the same method as a product with a micro torsion beam structure due to the simple structure, so that the test result of the torsion test piece is ensured to be matched with the reliability of an actual product to the maximum extent. The processing method of the torsion test piece can be based On an SOI (Silicon-On-Insulator) wafer processing mode, can also be based On a processing mode that Silicon wafer dry anisotropic etching is followed by isotropic etching, and can also be based On a processing mode of Silicon wafer bonding technology, the processing mode can be determined according to actual use conditions to process the torsion test piece, and the measured fatigue strength and the actual strength of a product are guaranteed to have better reference value to the greatest extent.
As shown in fig. 8, the torsion support beam 23 according to the present invention is manufactured using a general silicon wafer. Firstly, a Silicon wafer is cleaned, and then a column structure is formed by combining photoetching with a Deep Silicon Etching technology (Deep Silicon Etching), wherein the Etching depth is the same as the design height of the torsion supporting beam 23 of the torsion test piece. Secondly, according to the design width of the torsion supporting beam 23, the single deep silicon etching is carried out after the reaction time of sulfur hexafluoride in the deep silicon etching technology is increased. As the reaction of the sulfur hexafluoride and the silicon belongs to isotropic etching, the etching morphology is approximately circular or elliptical, and by reasonably adjusting the reaction time, two circular etching surfaces can be intersected to cut a part of the silicon structure from the wafer 21 to form a movable torsion supporting beam 23 part. Again, the photoresist is removed, a resist layer of silicon dioxide is deposited and photolithography is performed on the back side of the wafer 21. And finally, taking the photoresist pattern on the back as a mask to carry out deep silicon etching, and stopping etching automatically after the etching reaches the silicon dioxide anti-corrosion layer. And removing the photoresist and the silicon dioxide corrosion resistant layer to obtain the torsional fatigue characteristic test piece.
The processing mode adopts the common silicon wafer and does not relate to a bonding process, so that the processing cost and the complexity are low, and the process repeatability is good.
b. Cutting a torsion test piece: after step a, the wafer 21 is diced, and the frame 4 is separated from the wafer 21. Because the wafer 21 is provided with a plurality of torsion test pieces, in the test process, the torsion test pieces need to be cut and separated from the wafer 21 so as to facilitate the normal operation of the subsequent test, and after the cutting is finished, the torsion test pieces are soaked in an isopropanol solution at 75 ℃ for cleaning and then are dried in the atmosphere.
c. Installing a torsion test piece: after the step b is completed, cutting off six torsional support beams 23, reserving two torsional support beams 23 on the same straight line, respectively fixing the bottom ends of the frames 4 on the two connecting plates 20, and fixing the piezoelectric ceramic driver 2 on the clamping plate 16. Selecting one group of torsion supporting beams 23 which normally connect the round torsion mirror 3 and the frame 4, cutting off the other three groups of torsion supporting beams 23 by adopting a laser cutting method, only keeping two torsion supporting beams 23 which are positioned on the same straight line as a torsion shaft in a torsion test, and then fixing the cut frame 4 on the two connecting plates 20.
d. Installing a three-axis displacement table 1: after step c is completed, the three-axis displacement table 1 is fixed on the heating table 6. And (3) putting the triaxial displacement table 1 provided with the torsion test piece into a vacuum box 5, fixing the triaxial displacement table and a heating table 6, and penetrating out a power line, a signal output line and a signal input line through a data power interface to finally access a terminal computer.
e. Adjusting the position of the measuring part: and c, after the step c is finished, opening the laser transmitter 13, adjusting the three-axis displacement table 1 and the laser transmitter 13, and reflecting laser emitted by the laser transmitter 13 to the position sensor 11 after striking the round torsion mirror 3. And starting the laser emitter 13 and the three-axis displacement table 1, and adjusting the three-axis displacement table 1 to enable the laser to be reflected by the round torsion mirror 3 and then projected onto a sensing surface of the position sensor 11.
f. Starting test: and starting the heating table 6 and the vacuum box 5, starting the piezoelectric ceramic driver 2, and measuring the torsional fatigue property of the torsional test piece. After the adjustment is finished, the vacuum box 5 is closed, and the temperature and the atmospheric pressure in the cavity of the vacuum box 5 are adjusted according to the preset test environment. After stabilizing for 5 minutes, inputting a low-amplitude sinusoidal voltage signal to the piezoelectric ceramic driver 2, and controlling the voltage frequency to be the same as the resonance frequency of the torsion test piece to start vibration. And gradually increasing the amplitude of the input voltage after the oscillation is started, so that the maximum torsion angle of the torsion test piece is the same as the test preset value. The change curve of the torsion angle displayed by the position sensor 11 along with the time is observed, and when the numerical value of the torsion angle in the curve is suddenly changed, the sample is subjected to fatigue failure. The signal displayed by the position sensor 11 at the moment of occurrence of the breakage is shown in fig. 5, and the total test time of the test piece at the time of occurrence of the breakage is recorded. Calculating the number of turns when torsional fatigue breakage occurs according to the test time recorded in the experiment and the resonance frequency of the torsional test piece; the maximum stress borne by the test piece is calculated through the preset maximum torsion angle, and the fatigue performance (S-N curve) of the structure in a specific processing mode and in a specific environment can be obtained after repeated tests.
In a further optimized scheme, in the step b, the wafer 21 is provided with a cutting line 22 for facilitating the separation of the frame 4, and the wafer 21 is located in deionized water or edible oil. After the wafer 21 is formed, a large number of torsion test pieces can be simultaneously prepared. However, since the dimensions of the circular torsion mirror 3 and the torsion support beam 23 of the torsion test piece are greatly different, and the three-dimensional structure thereof is as shown in fig. 5, if the cutting mode of the blade in the traditional micro-nano processing is directly adopted, the torsion support beam 23 is directly broken. The torsion test piece is cut along the cutting line 22 directly by hand in deionized water or edible oil to avoid damage to the torsion test piece structure due to the large vibration generated during cutting.
By providing the dicing lines 22 around the torsion test piece, a dicing region is provided, which has the same structure thickness as the torsion support beams 23, so that the individual torsion test piece can be separated from the wafer 21 along the dicing region by hand.
In step c, the frame 4 is fixedly connected to the top ends of the two connecting plates 20 by a high-temperature-resistant adhesive. The frame 4 is fixed to the connecting plate 20 by an adhesive, and the adhesive is resistant to high temperature because the temperature in the vacuum box 5 is greatly changed, so that the frame 4 is not easily separated from the connecting plate 20.
In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, are merely for convenience of description of the present invention, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
The above-described embodiments are merely illustrative of the preferred embodiments of the present invention, and do not limit the scope of the present invention, and various modifications and improvements of the technical solutions of the present invention can be made by those skilled in the art without departing from the spirit of the present invention, and the technical solutions of the present invention are within the scope of the present invention defined by the claims.
Claims (10)
1. A silicon-based MEMS multi-environment torsion fatigue characteristic test system is characterized by comprising a torsion test piece, a torsion test part and an environment control part, wherein the torsion test piece and the torsion test part are both positioned in the environment control part, and the torsion test piece is fixedly connected with the torsion test part;
the torsion testing part comprises a triaxial displacement table (1) arranged in the environment control part, the top end of the triaxial displacement table (1) is fixedly connected with a piezoelectric ceramic driver (2) through a first clamp, and the top end of the piezoelectric ceramic driver (2) is fixedly connected with the torsion test piece through a second clamp; a measuring piece for testing the torsion angle of the torsion test piece is arranged on one side of the triaxial displacement table (1), and the measuring piece is arranged corresponding to the torsion test piece;
the torsion test piece comprises a round torsion mirror (3) and a frame (4), the round torsion mirror (3) is located in the frame (4), the round torsion mirror (3) is fixedly connected with the frame (4) through a torsion supporting beam (23), and the bottom end of the frame (4) is fixedly connected with a second clamp.
2. The silicon-based MEMS multi-environment torsional fatigue property testing system of claim 1, wherein: control part includes vacuum box (5) and warm table (6), warm table (6) with triaxial displacement platform (1) all is located in vacuum box (5), warm table (6) top pass through connecting plate (7) with triaxial displacement platform (1) bottom rigid coupling, the measurement piece with connecting plate (7) top rigid coupling.
3. The silicon-based MEMS multi-environment torsional fatigue property testing system of claim 2, wherein: the measuring part comprises a supporting plate (8) and a supporting frame (9) which are fixedly connected to the top end of the connecting plate (7), a position sensor (11) is fixedly connected to the supporting plate (8) through a connecting rod (10), the position sensor (11) is located above the circular twisting mirror (3), a groove (12) is formed in the top end of the supporting frame (9), a laser transmitter (13) is arranged in the groove (12), the laser transmitter (13) is rotatably connected with the supporting frame (9) through a rotating rod (14), and the laser transmitter (13) corresponds to the circular twisting mirror (3).
4. The silicon-based MEMS multi-environment torsional fatigue property testing system of claim 1, wherein: the number of the torsion supporting beams (23) is eight, any two torsion supporting beams (23) are positioned on the same straight line, and the circular torsion mirror (3) is fixedly connected with the frame (4) through any two torsion supporting beams (23) positioned on the same straight line.
5. The silicon-based MEMS multi-environment torsional fatigue property testing system of claim 1, wherein: and two ends of the torsion supporting beam (23) are fixedly connected with the circular torsion mirror (3) and the frame (4) through arc transition surfaces (15) respectively.
6. The silicon-based MEMS multi-environment torsional fatigue property testing system of claim 1, wherein: the first clamp comprises a clamping plate (16) fixedly connected with the top end of the three-axis displacement table (1), four pressing plates (17) are axially arranged at the top end of the clamping plate (16), a sliding groove (18) is formed in the top end of each pressing plate (17), a fixing bolt (19) is arranged in each sliding groove (18), each pressing plate (17) is fixedly connected with the corresponding clamping plate (16) through the corresponding fixing bolt (19), and one end of each pressing plate (17) is abutted to the corresponding piezoelectric ceramic driver (2); the second clamp comprises two connecting plates (20) fixedly connected with the top end of the piezoelectric ceramic driver (2), the two connecting plates (20) are respectively arranged corresponding to the two sides of the frame (4), and the top ends of the connecting plates (20) are fixedly connected with the bottom end of the frame (4).
7. The silicon-based MEMS multi-environment torsional fatigue property testing system of claim 6, wherein: the clamping plate (16) is an insulating plate.
8. A method for using a silicon-based MEMS multi-environment torsional fatigue property testing system according to any one of claims 1-7, wherein the processing step comprises:
a. preparing a torsion test piece: manufacturing a torsion test piece on a wafer (21) by adopting a standard bulk silicon process;
b. cutting a torsion test piece: after the step a is finished, cutting the wafer (21), and separating the frame (4) from the wafer (21);
c. installing a torsion test piece: after the step b is finished, cutting off six torsional support beams (23), reserving two torsional support beams (23) on the same straight line, respectively fixing the bottom ends of the frame (4) on the two connecting plates (20), and fixing the piezoelectric ceramic driver (2) on the clamping plate (16);
d. installing a triaxial displacement table (1): after the step c is finished, fixing the three-axis displacement table (1) on the heating table (6);
e. adjusting the position of the measuring part: after the step c is finished, a laser transmitter (13) is turned on, the three-axis displacement table (1) and the laser transmitter (13) are adjusted, and laser emitted by the laser transmitter (13) is shot on the round torsion mirror (3) and then reflected to the position sensor (11);
f. starting test: and starting the heating table (6) and the vacuum box (5), starting the piezoelectric ceramic driver (2), and measuring the torsional fatigue property of the torsional test piece.
9. The method for using the silicon-based MEMS multi-environment torsional fatigue property test system according to claim 8, wherein the method comprises the following steps: in the step b, the wafer (21) is provided with a cutting line (22) for separating the frame (4), and the wafer (21) is positioned in deionized water or edible oil.
10. The method for using the silicon-based MEMS multi-environment torsional fatigue property test system according to claim 8, wherein the method comprises the following steps: in the step c, the frame (4) is fixedly connected with the top ends of the two connecting plates (20) through a high-temperature-resistant adhesive.
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