CN113500289A

CN113500289A - Vacuum pressing jig, laser glass welding system using same and laser glass welding method

Info

Publication number: CN113500289A
Application number: CN202110747834.9A
Authority: CN
Inventors: 库东峰; 黄伟; 柯亮; 吴中晗; 张义; 王建刚
Original assignee: Wuhan Huagong Laser Engineering Co Ltd
Current assignee: Wuhan Huagong Laser Engineering Co Ltd
Priority date: 2021-07-01
Filing date: 2021-07-01
Publication date: 2021-10-15

Abstract

The invention discloses a vacuum pressing jig, a laser glass welding system using the jig and a method thereof, wherein the vacuum pressing jig comprises a sealing cavity capable of being opened and closed, a corrugated pipe is arranged in the sealing cavity, a supporting plate is fixed on the upper surface of the corrugated pipe, and the supporting plate is used for placing a solder to be welded; an inflation hole is arranged below the side wall of the sealed cavity, an air exhaust hole is arranged above the side wall, and an air outlet hole is arranged at the bottom of the sealed cavity; the middle position of the top of the sealed cavity is provided with a glass plate, and the glass plate is matched with the supporting plate. The invention solves the problem of gap control of the glass material to be welded, realizes the quantification of the contact gap and the process management, and successfully and efficiently completes the welding of the glass sample by using the jig.

Description

Vacuum pressing jig, laser glass welding system using same and laser glass welding method

Technical Field

The invention belongs to the technical field of ultrafast laser glass welding, and particularly relates to a vacuum pressing jig, a laser glass welding system using the jig and a laser glass welding method using the jig.

Background

In the laser welding, a laser beam with high energy density is used as a heat source, heat is transferred into a material from the surface through heat conduction in the welding process, and the material is melted by controlling parameters such as pulse width, energy, peak power, repetition frequency and the like of pulse laser to form a specific molten pool. Metal laser welding technology has been developed for over forty years and is widely used in various fields, such as the automotive industry, the aerospace industry, the microelectronics field, and the like. However, the laser welding technology for brittle materials has been developed in nearly fifteen years, and particularly, in nearly 5 years, the technology has been developed for industrial application. The traditional connection between brittle materials (such as glass, ceramic, sapphire and the like) adopts a glue adhesion mode, and although the materials and the process are mature, a plurality of problems still exist, for example, glue/adhesive is a consumable material, and the raw material cost is increased; when the adhesive is used in an unstable environment (with large changes in humidity, temperature and the like) for a long time, the adhesive can lose effectiveness and fall off; the organic high molecular polymer glue has certain influence on the environment and does not accord with the trend of environmental protection. Therefore, the brittle material laser welding technology has considerable market prospect, particularly glass laser welding, and has wide application, such as chip packaging, 3C product welding, semiconductor material bonding and the like.

The glass laser welding is characterized in that two layers of glass are overlapped, ultrafast laser is focused into a lower layer of material to be welded through a focusing objective lens, nonlinear absorption is generated in the glass material through the characteristics of short pulse and high frequency of the ultrafast laser to form low-density plasma, the material is quickly solidified after being melted at high temperature to form a welding molten pool (filling a gap), and the molten pool is distributed along a movement track in the relative movement process of a focus and the material to be welded, so that the welding track is finally formed.

In terms of process, the contact gap between glass and a solder is required to be adjusted in glass laser welding, and is usually less than one-fourth of the laser wavelength and even 100 nanometers; the gap is too big, and the welding molten bath can't fill the gap, can lead to the rosin joint, welds infirm, welds not, if only improve laser welding power this moment, increases the absorbed energy, can destroy the material structure, can not reach the purpose that improves the molten bath. Controlling the fit gap between the materials to be soldered is a significant challenge.

At present, in the laboratory stage, a manual mechanical jig is used for ensuring that the glass is tightly attached, time and labor are wasted, the contact gap of the glass is difficult to accurately control, and the whole process cannot be quantized and managed.

Disclosure of Invention

In order to overcome the defects of the prior art, the invention provides a vacuum pressing jig, a laser glass welding system using the jig and a method thereof, which solve the problem of gap control of glass materials to be welded, realize quantification and process management of contact gaps, and successfully and efficiently finish welding of glass samples by using the jig.

According to one aspect of the specification of the invention, a vacuum pressing jig is provided, which comprises a sealing cavity capable of being opened and closed, wherein a corrugated pipe is arranged in the sealing cavity, a supporting plate is fixed on the upper surface of the corrugated pipe, and the supporting plate is used for placing a solder to be welded; an inflation hole is arranged below the side wall of the sealed cavity, an air exhaust hole is arranged above the side wall, and an air outlet hole is arranged at the bottom of the sealed cavity; the middle position of the top of the sealed cavity is provided with a glass plate, and the glass plate is matched with the supporting plate.

In the technical scheme, firstly, an inflation hole is connected with a barometer and a compressed air bottle, and an air exhaust hole is connected with a vacuum reading meter and a vacuum pump; then opening the sealed cavity, placing two pieces of solder to be welded on the supporting plate after manual preliminary positioning and attaching, covering and locking the sealed cavity; and then opening an air suction hole to vacuumize an upper cavity formed above a supporting plate in the sealed cavity, enabling the corrugated pipe to move upwards to drive the supporting plate to move upwards to press two layers of stacked materials to be welded between the supporting plate and the glass plate, opening an air inflation hole after the vacuum degree value reaches a preset value, simultaneously adjusting an air outlet hole to inflate a lower cavity formed below the supporting plate, further upwards supporting the corrugated pipe to achieve closer pressing, controlling the contact gap between two pieces of materials to be welded by bonding pressure, and controlling the bonding pressure by the inflation pressure and the vacuum degree, so that the quantification and process management of the contact gap are realized, and the problem of gap control of the materials to be welded is solved.

Furthermore, the gap control modes of the glass solders with different thicknesses, different surface roughnesses and different shapes are different, and the gap control can be controlled by the combination of quantized inflation pressure and vacuum degree.

As a further technical scheme, the seal chamber comprises a bottom plate, a base and a cover frame, wherein the base is fixed on the bottom plate, and the cover frame is arranged above the base and detachably connected with the base. This is provided to facilitate the opening and sealing of the sealed housing. Further, threaded holes are formed in two ends of the bottom plate and used for fixedly mounting the bottom plate.

Furthermore, the base and the cover frame are made of metal materials.

Further, the glass plate is a quartz glass plate. The glass plate is preferably quartz glass, glass ceramics, etc. because these glass materials have a small linear expansion coefficient, good thermal stability, heat resistance, and good shock resistance.

As a further technical scheme, a sealing ring is arranged between the cover frame and the base. The sealing ring is used for enhancing the sealing performance of the cover frame and the base and ensuring the vacuumizing effect in the cavity.

As a further technical scheme, the corrugated pipe is a telescopic corrugated pipe. The corrugated pipe is made of rubber, PVC, cloth/PVC, metal, etc. The sealed cavity is separated into an upper cavity and a lower cavity by the supporting plate, and the flexibility of the telescopic corrugated pipe is utilized, so that when the upper cavity is vacuumized, the corrugated pipe can move upwards to drive the supporting plate to move upwards, and then the solder is pressed between the supporting plate and the glass plate.

As a further technical scheme, the support plate is made of aluminum, teflon or iron.

According to another aspect of the present disclosure, a laser glass welding system is provided, which is implemented by using the vacuum pressing fixture, the laser glass welding system includes a laser, an optical unit and the vacuum pressing fixture, wherein laser generated by the laser is focused on a solder to be welded through a glass plate on the top of the vacuum pressing fixture after being conducted by the optical unit; the air inflation hole of the vacuum pressing jig is connected with a compressed air bottle, and a pressure gauge is arranged on the air inlet pipeline; the air exhaust hole of the vacuum pressing fixture is connected with a vacuum pump, and a vacuum reading meter is arranged on an air exhaust pipeline of the vacuum pressing fixture.

Among the above-mentioned technical scheme, after realizing the clearance control between two wait solders and reaching gaseous equilibrium in the sealed cavity through vacuum pressfitting tool, open the laser instrument, guide laser through this optical unit and focus on waiting to weld the material, treat that the solder carries out the laser welding, this technical scheme has realized through vacuum pressfitting tool that two wait the quantization control and the management of contact clearance between the solder to can accomplish the welding of glass sample high-efficiently, improve welding efficiency on the basis of guaranteeing welding quality.

As a further technical solution, the optical unit includes a beam expander, a reflector, and a focusing objective lens, which are sequentially disposed along an optical path. Laser generated by the laser enters the beam expander, enters the reflector after being expanded by the beam expander, the reflector is a 45-degree reflector, and light reflected by the 45-degree reflector is focused by the focusing objective lens to enter the solder to be welded.

According to another aspect of the present specification, there is provided a laser glass welding method implemented using the laser glass welding system, the method comprising:

pre-laminating two glass materials to be welded, placing the two glass materials on a supporting plate in a vacuum pressing jig, covering and locking the sealing jig;

opening a vacuum pumping hole, pumping vacuum to an upper cavity formed above the supporting plate, moving the corrugated pipe upwards to drive the supporting plate to move upwards, and pressing two pieces of glass to-be-welded materials between the supporting plate and the glass plate;

when the vacuum degree value of the upper cavity reaches a preset value, the air inflation hole is opened, and air is inflated to the lower cavity formed below the supporting plate until the lower cavity reaches air balance;

and turning on the laser and welding.

In the technical scheme, after being pre-attached by manual initial positioning and the like, two pieces of glass are placed on a supporting plate of a vacuum pressing jig, and then the jig is covered and locked; the upper cavity is vacuumized, and the vacuum degree of the cavity is adjusted, so that air between contact surfaces of samples to be welded can be pumped out, and the defects of rainbow lines and the like in the subsequent laser processing process are reduced; when the vacuum degree of the upper cavity reaches a certain value, the lower cavity is inflated, the inflation pressure in the lower cavity is adjusted, and the bonding pressure between the two pieces of solder to be welded is improved; when the pointer of the pressure gauge is stable and does not shake, the gas balance in the cavity is indicated; at this time, the laser can be turned on to perform laser welding of the glass to be welded.

As a further technical solution, the method further comprises: when the vacuum value reaches-20 to-90 KPa, the air charging hole is opened to start charging air into the lower cavity. When the vacuum degree reaches-20 KPa to-90 KPa, the air charging valve of the air charging hole can be opened, and when the vacuum degree is-20 KPa to-90 KPa, the air between the contact surfaces of the materials to be welded is basically and completely pumped out, and the rainbow grains are rarely generated. The preset range of the degree of vacuum may also be preferably-20 to-50 KPa, or more preferably-30 KPa.

As a further technical solution, the method further comprises: when the inflation hole is opened to start inflation, the air outlet hole is opened to perform air outlet adjustment, and when a pointer on the pressure gauge is kept stable and does not shake, air balance is achieved in the cavity.

Furthermore, the inflation flow of the inflation hole is always larger than the air outlet flow of the air outlet hole, and the air outlet hole is arranged to enable the air in the cavity to achieve dynamic balance and continuously and stably generate inflation pressure. The charging pressure is the air inlet quantity-the air outlet quantity. The gas output is generally very small and can be ignored in stress analysis, and the numerical value on the pressure gauge is the inflation pressure after the gas is balanced, so that the numerical value pointer of the pressure gauge is stable and cannot shake, and the dynamic balance is indicated.

Compared with the prior art, the invention has the beneficial effects that:

(1) the invention provides a jig which is connected with a barometer and a compressed air bottle through an inflation hole and connected with a vacuum reading meter and a vacuum pump through an air exhaust hole; opening the sealed cavity, placing two pieces of solder to be welded on the supporting plate after manual preliminary positioning and attaching, covering and locking the sealed cavity; and then opening an air suction hole to vacuumize an upper cavity formed above a supporting plate in the sealed cavity, enabling the corrugated pipe to move upwards to drive the supporting plate to move upwards to press two layers of stacked materials to be welded between the supporting plate and the glass plate, opening an air inflation hole after the vacuum degree value reaches a preset value, simultaneously adjusting an air outlet hole to inflate a lower cavity formed below the supporting plate, further upwards supporting the corrugated pipe to achieve closer pressing, controlling the contact gap between two pieces of materials to be welded by bonding pressure, and controlling the bonding pressure by the inflation pressure and the vacuum degree, so that the quantification and process management of the contact gap are realized, and the problem of gap control of the materials to be welded is solved.

(2) The invention provides a system which can control the gap between two pieces of solder to be welded in a vacuum pressing jig and can open a laser after the gas in a sealed cavity is balanced, guide laser to focus on the solder to be welded through an optical unit and carry out laser welding on the solder to be welded.

(3) The invention provides a method, which is characterized in that two pieces of glass to be welded are pre-attached through manual preliminary positioning and the like, then are placed on a supporting plate of a vacuum pressing jig, and the jig is covered and locked; the upper cavity is vacuumized, and the vacuum degree of the cavity is adjusted, so that air between contact surfaces of samples to be welded can be pumped out, and the defects of rainbow lines and the like in the subsequent laser processing process are reduced; when the vacuum degree of the upper cavity reaches a certain value, the lower cavity is inflated, the inflation pressure in the lower cavity is adjusted, and the bonding pressure between the two pieces of solder to be welded is improved; when the pointer of the pressure gauge is stable and does not shake, the gas balance in the cavity is indicated; at the moment, the laser can be turned on to carry out laser welding of glass to be welded, and the method can finish the laser welding with high efficiency and high quality.

Drawings

Fig. 1 is a schematic structural view of a vacuum bonding jig according to an embodiment of the invention.

FIG. 2 is a schematic structural view of a laser glass welding system according to an embodiment of the present invention.

In the figure: 1. a cover frame; 2. a glass plate; 3. a base; 4. a threaded hole; 5. a base plate; 6. a bellows; 7. a support plate; 8. an inflation hole; 9. an air exhaust hole; 10. a cavity; 11. an air outlet; 12. a gasket; 100. vacuum pressing the fixture; 200. a laser; 300. a beam expander; 400. a mirror; 500. a focusing objective lens; 600. a pressure gauge; 700. a compressed air tank; 800. a vacuum reading meter; 900. a vacuum pump.

Detailed Description

The technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings, and it is to be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without any inventive step, are within the scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The invention provides a vacuum pressing jig 100 which comprises a sealing cavity 10 capable of being opened and closed, wherein a corrugated pipe 6 is arranged in the sealing cavity 10, a supporting plate 7 is fixed on the upper surface of the corrugated pipe 6, and the supporting plate 7 is used for placing a solder to be welded; an inflation hole 8 is arranged below the side wall of the sealed cavity 10, an air suction hole 9 is arranged above the side wall, and an air outlet hole 11 is arranged at the bottom of the sealed cavity; the glass plate 2 is arranged in the middle of the top of the sealed cavity 10, and the glass plate 2 is matched with the support plate 7. The inflation hole 8 is used for inflating a lower cavity formed below the support plate 7. The air exhaust hole 9 is used for vacuumizing an upper cavity formed above the supporting plate 7. When the upper cavity is vacuumized or the lower cavity is inflated, the supporting plate 7 moves upwards along with the corrugated pipe 6, and the material to be welded is pressed between the supporting plate 7 and the glass plate 2.

The seal chamber 10 comprises a bottom plate 5, a base 3 and a cover frame 1, wherein the base 3 is fixed on the bottom plate 5, and the cover frame 1 is arranged above the base 3 and detachably connected with the base 3. Threaded holes 4 are formed in two ends of the bottom plate 5. The base 3 and the cover frame 1 are made of metal materials. The glass plate 2 is a quartz glass plate. A sealing gasket 12 is arranged between the cover frame 1 and the base 3. The material of the support plate 7 comprises aluminum, teflon or iron. The bellows 6 is a telescopic bellows. The material of the corrugated pipe 6 can be selected from rubber, PVC, cloth/PVC, metal and the like.

The sealing cavity 10 is separated into an upper cavity and a lower cavity by the supporting plate 7, the flexibility of the telescopic corrugated pipe is utilized, so that the corrugated pipe 6 can move upwards to drive the supporting plate 7 to move upwards when the upper cavity is vacuumized, and then the welding materials are pressed between the supporting plate 7 and the glass plate 2.

The working principle of the jig is as follows: as shown in fig. 1 and 2, 8 is an inflation hole connecting an air pressure valve with a pressure gauge 600 and a compressed air bottle 700; 9 is an air extraction hole which is connected with a vacuum reading meter 800 and a vacuum pump 900; the 6 is a telescopic corrugated pipe, and the 7 is a supporting plate. After the glass material to be welded is cleaned and dried, the glass material is manually positioned and attached to be placed on a supporting plate 7 in a horizontal mode, a cover frame 1 and a base 3 of a jig are covered and locked, an air exhaust hole 9 is opened, a cavity 10 is vacuumized, a corrugated pipe 6 moves upwards to press two layers of stacked materials to be welded between the supporting plate 7 and a quartz glass plate 2, an inflation valve and an inflation hole 8 are opened, an air outlet 11 is adjusted, air is filled into the cavity downwards, the corrugated pipe 6 can be further upwards supported at the moment to achieve tighter pressing, the contact gap can be controlled by attachment pressure, and the attachment pressure can be controlled by air inlet flow (the air inlet flow of the inflation hole 8 is larger than the air outlet flow of the air outlet 11) and vacuum degree.

The intake air flow rate here is a different expression of the charge pressure, and is substantially the same as the intake air flow rate.

The inflation pressure is read by the "pressure gauge" reading, showing how many KPa, and the vacuum is read by the vacuum pump 900 reading, showing how many KPa (negative). The two are added to form the joint pressure, the unit is MPa, and the joint pressure is the product of the joint pressure and the contact area of the welding sample. Different sample shapes and different areas can obtain different bonding pressures.

The upward resultant force generated by the inflation pressure and the vacuum degree is the bonding pressure. The larger the inflation pressure (intake flow rate) and the degree of vacuum, the larger the resultant upward force, the larger the bonding pressure, and the smaller the contact gap between glasses (closer to <100 nm).

In the actual operation, the vacuum degree needs to be firstly pumped, namely the vacuum degree is adjusted, so that air between contact surfaces of samples to be welded can be firstly pumped out, and the generation of defects such as rainbow lines and the like in the subsequent laser processing process is reduced; and then the inflation pressure is adjusted to improve the fitting pressure.

In the embodiment, the problem of quantitative control of the contact gap of the surface of the solder to be welded is solved by a combined adjustment mode of vacuum degree and inflation pressure, and a single vacuum pumping mode of a traditional industrial vacuum pump is used, and as the vacuum limit value of the industrial vacuum pump is less than one atmosphere, namely the vacuum degree is less than 0.1MPa, the maximum vacuum degree of the industrial vacuum pump does not exceed one atmosphere (less than-100 KPa), so that the requirement of the optical contact gap is not necessarily met.

As an implementation mode, the control modes of the contact gaps of the glass with different thicknesses, surface roughnesses or shapes are different, and the contact gaps can be controlled in a combined mode through quantified inflation pressure and vacuum degree, so that the contact gaps can meet optical requirements.

The invention also provides a laser glass welding system which is realized by using the vacuum pressing jig 100. As shown in fig. 1 and 2, the laser glass welding system includes a laser 200, an optical unit and a vacuum press fixture 100, wherein laser generated by the laser 200 is transmitted through the optical unit and focused on a material to be welded through a glass plate 2 on the top of the vacuum press fixture 100; the inflation hole 8 of the vacuum pressing jig 100 is connected with a compressed air bottle 700, and a pressure gauge 600 is arranged on the air inlet pipeline; the air exhaust hole 9 of the vacuum pressing fixture 100 is connected with a vacuum pump 900, and a vacuum reading meter 800 is arranged on an air exhaust pipeline of the vacuum pressing fixture.

The optical unit includes a beam expander 300, a reflector 400, and a focusing objective 500, which are sequentially disposed along an optical path. Laser generated by the laser 200 is incident to the beam expander 300, and is incident to the reflector 400 after being expanded by the beam expander 300, the reflector 400 is a 45-degree reflector, and light reflected by the 45-degree reflector is focused by the focusing objective lens 500 to be incident to the solder to be soldered.

When the system is used, after the gap between two pieces of solder to be welded is controlled and the sealed cavity is internally balanced by gas through the vacuum press-fit jig 100, the laser 200 is opened, the laser is guided to be focused on the solder to be welded through the optical unit, and the solder to be welded is subjected to laser welding.

Example 1

The embodiment provides a laser glass welding method, which comprises the following steps:

1. cleaning, drying and dedusting two pieces of glass to be welded (the size is 50 x 1mm and 80 x 1 mm);

2. pre-bonding a solder to be welded, horizontally placing the solder in a vacuum jig, covering and locking the sealing jig;

3. opening the vacuum pumping hole 9, and pumping air to reach a vacuum value V1;

4. opening the inflation hole 8 and inflating to an inflation pressure P1;

5. standing the sample and the jig, opening the laser when the gas in the cavity is balanced, and welding (speed U, power P and line width D) to obtain a laser welding sample S1;

6. the sample S1 was subjected to weld quality (Q1) evaluation: appearance, weld strength, weld line continuity.

Example 2

1.

Steps

1 and 2 of example 1 were repeated;

2. opening the vacuum pumping hole 9, and pumping air to reach a vacuum value V2;

3. opening the inflation hole 8 and inflating to an inflation pressure P2;

4. standing the sample and the jig, opening the laser when the gas in the cavity is balanced, and welding (speed U, power P and line width D) to obtain a laser welding sample S2;

5. the sample S2 was subjected to weld quality (Q2) evaluation: appearance, weld strength, weld line continuity.

Example 3

1.

Steps

1 and 2 of example 1 were repeated;

2. opening the vacuum pumping hole 9, and pumping air to reach a vacuum value V3;

3. opening the inflation hole 8 and inflating to an inflation pressure P3;

4. standing the sample and the jig, opening the laser when the gas in the cavity is balanced, and welding (speed U, power P and line width D) to obtain a laser welding sample S3;

5. the sample S3 was subjected to weld quality (Q3) evaluation: appearance, weld strength, weld line continuity.

Comparative example 1

2. pre-bonding the solder to be welded, horizontally placing the solder in a common mechanical pressing jig, extruding the lower layer glass upwards by a plurality of jackscrews, extruding the upper layer glass downwards by a quartz glass cover plate, and controlling the stroke of the jackscrews in a clearance control mode;

3. turning on a laser, and welding (speed U, power P and line width D) to obtain a laser welding sample S4;

4. the sample S4 was subjected to weld quality (Q4) evaluation: appearance, weld strength, weld line continuity.

Comparative example 2

2. directly and manually pressing two pieces of glass to be welded (electrostatic adsorption between the glass) and placing the glass on a jig;

3. turning on a laser, and welding (speed U, power P and line width D) to obtain a laser welding sample S5;

the sample S5 was subjected to weld quality (Q5) evaluation: appearance, weld strength, weld line continuity.

The welding parameters for examples 1-3 and comparative examples 1-2 are shown in the following table:

as can be seen from the table, for weld quality, Q3> Q2 ≈ Q4> Q1> Q5.

Since the inflation pressure and the vacuum degree value adopted in example 1 are small, the bonding pressure (corresponding to the pressure of 60KPa) is smaller than the mechanical resultant force (corresponding to the pressure of 80KPa) generated by the quartz glass cover plate and the jackscrew in comparative example 1, and the pressing force corresponding to 80KPa in comparative example 1 is the pressing force within the maximum safety range of the jig used in the comparative example 1. That is, in the manner of comparative example 1, the upper limit of the pressing force corresponds to a pressure of 80KPa, and at this time, the contact gap between the solders to be soldered cannot reach the optical contact, so that there are problems that the gap is too large, the soldering pool cannot fill the gap, and the insufficient soldering, the weak soldering or the poor soldering is caused, and at this time, the problem cannot be solved simply by increasing the laser welding power.

In example 2, the vacuum value was increased so that the bonding pressure between the materials to be soldered was increased, which was the same as the limit bonding pressure that could be achieved in comparative example 1, and therefore, the soldering quality obtained by the two was not much different.

In example 3, the vacuum degree value was the same as that of example 2, but the inflation pressure was increased, and therefore, the bonding pressure between the solder materials to be bonded was increased, the contact gap between the glass solder was decreased, and the bonding pressure was controlled by further controlling the inflation pressure and the vacuum degree, and the contact gap could be decreased to less than 100nm, achieving precise control of the contact gap, and by this precise control, the soldering efficiency and quality were greatly improved.

The vacuum pressing jig can quantitatively control the contact gap, and the laser welding equipment using the jig can efficiently improve the stability and continuity of a laser welding pool, so that the welding strength and the precision are improved; in addition, the glass to be welded is placed in a vacuum environment, air between the two pieces of glass can be completely pumped away, micro bubbles, impurities and the like between the two pieces of glass are completely eliminated, rainbow patterns are greatly reduced, and welding quality and attractiveness are improved.

In the description herein, references to the description of the terms "one embodiment," "certain embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions deviate from the technical solutions of the embodiments of the present invention.

Claims

1. The vacuum pressing jig is characterized by comprising a sealing cavity capable of being opened and closed, wherein a corrugated pipe is arranged in the sealing cavity, and a supporting plate is fixed on the upper surface of the corrugated pipe and used for placing a solder to be welded; an inflation hole is arranged below the side wall of the sealed cavity, an air exhaust hole is arranged above the side wall, and an air outlet hole is arranged at the bottom of the sealed cavity; the middle position of the top of the sealed cavity is provided with a glass plate, and the glass plate is matched with the supporting plate.

2. The vacuum press-fit jig according to claim 1, wherein the sealed cavity comprises a bottom plate, a base and a cover frame, the base is fixed on the bottom plate, and the cover frame is disposed above the base and detachably connected to the base.

3. The vacuum press-fit jig according to claim 2, wherein a seal ring is provided between the cover frame and the base.

4. The vacuum press-fit jig according to claim 1, wherein the bellows is a retractable bellows.

5. The vacuum press-fitting jig according to claim 1, wherein the support plate is made of aluminum, teflon or iron.

6. The laser glass welding system is realized by using the vacuum pressing jig according to any one of claims 1 to 5, and is characterized by comprising a laser, an optical unit and the vacuum pressing jig, wherein laser generated by the laser is transmitted by the optical unit and then is focused on a solder to be welded through a glass plate at the top of the vacuum pressing jig; the air inflation hole of the vacuum pressing jig is connected with a compressed air bottle, and a pressure gauge is arranged on the air inlet pipeline; the air exhaust hole of the vacuum pressing fixture is connected with a vacuum pump, and a vacuum reading meter is arranged on an air exhaust pipeline of the vacuum pressing fixture.

7. The laser glass welding system of claim 6, wherein the optical unit comprises a beam expander, a reflector, and a focusing objective lens arranged in sequence along the optical path.

8. The laser glass welding method is realized by using the vacuum pressing jig of any one of claims 1 to 5, and is characterized by comprising the following steps of:

and turning on the laser and welding.

9. The laser glass welding method of claim 8, further comprising: when the vacuum value reaches-20 to-90 KPa, the air charging hole is opened to start charging air into the lower cavity.

10. The laser glass welding method of claim 8, further comprising: when the inflation hole is opened to start inflation, the air outlet hole is opened to perform air outlet adjustment, and when a pointer on the pressure gauge is kept stable and does not shake, air balance is achieved in the cavity.