CN113495080A - Test fixture and test method for scanning electron microscope energy spectrometer - Google Patents
Test fixture and test method for scanning electron microscope energy spectrometer Download PDFInfo
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- CN113495080A CN113495080A CN202010257508.5A CN202010257508A CN113495080A CN 113495080 A CN113495080 A CN 113495080A CN 202010257508 A CN202010257508 A CN 202010257508A CN 113495080 A CN113495080 A CN 113495080A
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- sample
- electron microscope
- scanning electron
- tested
- clamp
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2206—Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement
Abstract
The invention relates to a test fixture for an energy spectrometer of a scanning electron microscope, which comprises a plurality of clamping openings, wherein two sides of each clamping opening comprise different metals, the energy spectrometer of the scanning electron microscope comprises a scanning electron microscope and an energy spectrum analyzer, the scanning electron microscope comprises a cabin of the scanning electron microscope, the fixture is arranged in the cabin of the scanning electron microscope, and the energy spectrum analyzer is used for: the two sides of each clamping opening on the clamp are made of different metals, so that the technical problems of test result interference and inaccurate element distribution measurement caused by the fact that the clamp and the test sample contain the same metal are solved.
Description
Technical Field
The invention belongs to the field of testing, and particularly relates to a testing clamp and a testing method for an energy spectrometer of a scanning electron microscope.
Background
At present, the detection of element types and content is a necessary link in many production and research, wherein an energy spectrum analyzer can be matched with a scanning electron microscope to detect elements of partial small samples, the small samples include but are not limited to semiconductor chip sections, many samples have requirements for testing element distribution of the cross sections of the samples, some samples are relatively difficult to detect due to thinness, and a clamp is needed to fix the samples, however, many existing clamps are made of the same metal at present, and if the samples contain the metal, the clamp can interfere with a test result, and the phenomenon of inaccurate element distribution measurement is caused.
Disclosure of Invention
In order to solve the problems of test result interference and inaccurate measured element distribution caused by the fact that the clamp and a sample to be tested contain the same metal in the prior art, the invention provides a test clamp and a test method for a scanning electron microscope energy spectrometer, which comprise the following steps: the test fixture comprises a plurality of jaws; two sides of each clamping opening comprise different metals;
the scanning electron microscope energy spectrometer comprises a scanning electron microscope and an energy spectrum analyzer;
the scanning electron microscope comprises a scanning electron microscope cabin, and the clamp is arranged in the scanning electron microscope cabin;
the energy spectrum analyzer is used for: and testing the element distribution of the cross section of the sample to be tested.
Preferably, the bottom of the clamp is provided with an interface; the clamp is connected with a scanning electron microscope sample stage through an interface.
Preferably, the size of the clamp is determined according to the volume in the cabin of the scanning electron microscope and the sample to be measured.
Preferably, the clamp is of a rectangular structure; the clamping openings are sequentially arranged along the direction of the rectangular structure, and a certain distance is reserved between the clamping openings.
Preferably, the clamp comprises at least 3 clamp openings;
the metal on the two sides of the clamping opening is pure metal, and the pure metal at least comprises 4 kinds.
Preferably, the pure metal includes, but is not limited to, copper, aluminum, nickel, silver, gold, manganese.
Preferably, the thickness of the sample to be tested is less than 2 mm.
A method of testing using the test fixture of any of claims 1-7, comprising: selecting a clamping opening from the clamp to fix the sample to be detected based on the metal elements contained in the sample to be detected;
placing the clamp and the sample to be detected in a scanning electron microscope cabin for observation to obtain an observation result;
and based on the observation result, testing the element distribution of the section of the sample to be tested by adopting an energy spectrum measuring instrument.
Preferably, the selecting a clamping opening from the clamp to fix the sample to be tested based on the metal element contained in the sample to be tested comprises:
and determining a clamping opening different from the metal element in the sample to be detected based on the metal element possibly contained in the sample to be detected.
Preferably, the testing the distribution of the elements on the cross section of the sample to be tested by using the energy spectrum measuring instrument based on the observation result includes:
based on a sample to be tested, selecting a clamping opening with different metal elements from the sample to be tested for multiple times, and selecting different clamping openings during multiple tests;
and (4) integrating the multiple test results and the metal elements contained on the two sides of the nip to obtain the final element distribution.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention provides a test fixture, which comprises a plurality of clamping openings, wherein two sides of each clamping opening comprise different metals, the scanning electron microscope energy spectrometer comprises a scanning electron microscope and an energy spectrum analyzer, the scanning electron microscope comprises a scanning electron microscope cabin, the fixture is arranged in the scanning electron microscope cabin, and the energy spectrum analyzer is used for: the two sides of each clamping opening on the clamp are made of different metals, so that the technical problems of test result interference and inaccurate element distribution measurement caused by the fact that the clamp and the test sample contain the same metal are solved.
2. The invention provides a test method, which comprises the following steps: based on metal elements contained in a sample to be measured, a clamping opening is selected from a clamp to fix the sample to be measured, the clamp and the sample to be measured are placed in a scanning electron microscope cabin to be observed, an observation result is obtained, based on the observation result, an energy spectrum measuring instrument is adopted to test the distribution of the elements on the section of the sample to be measured, and the method enables the measurement result to be more accurate by changing different clamping openings to repeatedly measure.
Drawings
In order to more clearly illustrate the technical solution of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a top view of the clamp of the present invention;
FIG. 2 is a side view of the fixture of the present invention including a sample to be tested in a 2-sided orientation;
FIG. 3 is a diagram of the steps of the test method of the present invention;
in the figure: 1-clamping the opening; 2. 3, 4, 5, 6-table top made of different metals; 7-a sample to be tested; 8-interface for connecting the clamp with the sample stage of the scanning electron microscope.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
As shown in fig. 1, the present invention provides a test fixture for a scanning electron microscope spectrometer, the fixture comprises a plurality of clamping openings 1, two sides of each clamping opening 1 comprise different metals 2, 3, 4, 5, 6;
the scanning electron microscope energy spectrometer comprises a scanning electron microscope and an energy spectrum analyzer, wherein the scanning electron microscope comprises a scanning electron microscope cabin, and a clamp is arranged in the scanning electron microscope cabin;
the energy spectrum analyzer is used for: testing the element distribution of the section of the sample 7 to be tested;
according to the test fixture provided by the invention, as the two sides of each clamping opening 1 on the fixture are made of different metals 2, 3, 4, 5 and 6, the technical problems of test result interference and inaccurate measured element distribution caused by the fact that the fixture and a test sample contain the same metal are solved;
as shown in fig. 2, an interface 8 is arranged at the bottom of the clamp, and the clamp is connected with a sample stage of the scanning electron microscope through the interface 8;
in addition, the size of the clamp is determined according to the volume in the cabin of the scanning electron microscope and the sample 7 to be measured;
the clamp is of a rectangular structure; the plurality of clamping openings 1 are sequentially arranged along the direction of the rectangular structure, and a certain distance is reserved between the clamping openings 1;
wherein the distance between the clamping openings 1 exceeds 1 cm;
the clamp at least comprises 3 clamp openings 1;
the metals on two sides of the clamping opening 1 are pure metals, and the pure metals at least comprise 4 metals;
pure metals include, but are not limited to, copper, aluminum, nickel, silver, gold, manganese;
the thickness of the sample to be tested is less than 2 mm.
Example 2
As shown in fig. 3, the present invention further provides a testing method using the testing jig for a scanning electron microscope energy spectrometer, comprising:
selecting a clamping opening 1 from a clamp to fix a sample 7 to be detected based on metal elements contained in the sample 7 to be detected;
placing the clamp and the sample 7 to be detected in a scanning electron microscope cabin for observation to obtain an observation result;
based on the observation result, testing the element distribution of the section of the sample 7 to be tested by adopting an energy spectrum measuring instrument;
the method has the advantages that the measurement result is more accurate by changing different clamping openings 1 to repeat the measurement;
based on the metal element that sample 7 to be measured contains, select from the anchor clamps that presss from both sides mouth 1 fixes sample 7 to be measured, include:
determining a clamping opening 1 different from the metal elements in the sample 7 to be detected based on the metal elements possibly contained in the sample 7 to be detected;
based on the observation result, the method for testing the element distribution of the section of the sample 7 to be tested by adopting the energy spectrum measuring instrument comprises the following steps:
based on a sample 7 to be tested, selecting a clamp opening 1 with different metal elements from the sample 7 to be tested for multiple times, and selecting different clamp openings 1 during multiple tests;
and (4) integrating the multiple test results and the metal elements contained at the two sides of the clamping opening 1 to obtain the final element distribution.
Finally, it should be noted that the above-mentioned embodiments are only preferred embodiments of the present invention, and are not intended to limit the present invention, and those skilled in the art will appreciate that various modifications and changes can be made to the present invention. Any modification, equivalent replacement, improvement or the like made within the spirit and principle of the present invention is included in the scope of the claims of the present invention filed as filed.
Claims (10)
1. A test fixture for a scanning electron microscope energy spectrometer is characterized by comprising a plurality of clamping openings; two sides of each clamping opening comprise different metals;
the scanning electron microscope energy spectrometer comprises a scanning electron microscope and an energy spectrum analyzer;
the scanning electron microscope comprises a scanning electron microscope chamber; the clamp is arranged in the scanning electron microscope cabin;
the energy spectrum analyzer is used for: and testing the element distribution of the cross section of the sample to be tested.
2. The test fixture of claim 1, wherein an interface is provided at a bottom of the fixture; the clamp is connected with a scanning electron microscope sample stage through an interface.
3. The test fixture of claim 1, wherein the fixture is sized according to a volume within a scanning electron microscope chamber and a sample to be tested.
4. The test fixture of claim 1, wherein the fixture is a rectangular structure; the clamping openings are sequentially arranged along the direction of the rectangular structure, and a certain distance is reserved between the clamping openings.
5. The test fixture of claim 1, wherein the fixture includes at least 3 jaws;
the metal on the two sides of the clamping opening is pure metal, and the pure metal at least comprises 4 kinds.
6. The test fixture of claim 5, wherein the pure metal includes, but is not limited to, copper, aluminum, nickel, silver, gold, manganese.
7. The test fixture of claim 1, wherein the thickness of the sample to be tested is less than 2 mm.
8. A method of testing using the test fixture of any of claims 1-7, comprising:
selecting a clamping opening from the clamp to fix the sample to be detected based on the metal elements contained in the sample to be detected;
placing the clamp and the sample to be detected in a scanning electron microscope cabin for observation to obtain an observation result;
and based on the observation result, testing the element distribution of the section of the sample to be tested by adopting an energy spectrum measuring instrument.
9. The method according to claim 8, wherein the selecting the clamping opening from the clamp to fix the sample to be tested based on the metal element contained in the sample to be tested comprises:
and determining a clamping opening different from the metal element in the sample to be detected based on the metal element possibly contained in the sample to be detected.
10. The method according to claim 9, wherein the testing the element distribution of the cross section of the sample to be tested by using the energy spectrum measuring instrument based on the observation result comprises:
based on a sample to be tested, selecting a clamping opening with different metal elements from the sample to be tested for multiple times, and selecting different clamping openings during multiple tests;
and (4) integrating the multiple test results and the metal elements contained on the two sides of the nip to obtain the final element distribution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010257508.5A CN113495080A (en) | 2020-04-03 | 2020-04-03 | Test fixture and test method for scanning electron microscope energy spectrometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010257508.5A CN113495080A (en) | 2020-04-03 | 2020-04-03 | Test fixture and test method for scanning electron microscope energy spectrometer |
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| Publication Number | Publication Date |
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| CN113495080A true CN113495080A (en) | 2021-10-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010257508.5A Pending CN113495080A (en) | 2020-04-03 | 2020-04-03 | Test fixture and test method for scanning electron microscope energy spectrometer |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116953007A (en) * | 2023-09-19 | 2023-10-27 | 成都电科星拓科技有限公司 | Component analysis method for developing new product by chip framework |
-
2020
- 2020-04-03 CN CN202010257508.5A patent/CN113495080A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116953007A (en) * | 2023-09-19 | 2023-10-27 | 成都电科星拓科技有限公司 | Component analysis method for developing new product by chip framework |
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