CN113484713A - Semiconductor perspective detection equipment - Google Patents
Semiconductor perspective detection equipment Download PDFInfo
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- CN113484713A CN113484713A CN202110812871.3A CN202110812871A CN113484713A CN 113484713 A CN113484713 A CN 113484713A CN 202110812871 A CN202110812871 A CN 202110812871A CN 113484713 A CN113484713 A CN 113484713A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
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Abstract
The invention discloses a semiconductor perspective detection device which comprises supporting ground feet, a lower inner frame, a sealing cover door, a new sliding table, an X-Y-U material loading platform, an upper inner frame, a swinging combination assembly, a control panel, a three-color lamp, a perspective door, a display, an operation control table, a connecting hinge, an X-ray protection casing, a proximity switch, an inductor mounting frame, an inductor supporting frame, an arc-shaped guide rail, a third inductor, a fourth sensor and a mounting clamping frame, wherein the sealing cover door used for limiting is symmetrically clamped on the outer end face of the lower inner frame in a rotating mode, and the supporting ground feet used for supporting are uniformly and equidistantly fixedly connected to four corners of the bottom end face. Compared with the prior equipment, the invention mainly has the advantages that the flat panel detector is provided with the arc-shaped guide rail, can perform unidirectional tilting movement to 60 degrees, adopts the X-Y-U material carrying platform, can perform X-axis and Y-axis movement and can also perform 360-degree rotation movement, and can perform omnibearing detection on products at different angles and different visual angles.
Description
Technical Field
The invention relates to the technical field of semiconductor production equipment, in particular to a semiconductor perspective detection device.
Background
As patent numbers: the utility model discloses a CN202010508285.5 discloses a semiconductor detection equipment, including the casing, the inner chamber front side top of casing is provided with baffle, ventilation window, the ventilation window sets up in the rear side bottom of casing, clamping mechanism, the quantity of clamping mechanism is four, four clamping mechanism sets gradually in the top of casing from a left side to the right side, measuring mechanism, four measuring mechanism sets gradually in the inner chamber front side of casing along left and right sides direction, the on-off lamp is located clamping mechanism's bottom and sets up in the upper surface front side of casing, display module sets up in the inner chamber right side bottom of casing. This semiconductor detection equipment makes the semiconductor sample installation step suddenly change's that detects simple, and it is consuming time to have reduced to detect, and a plurality of data are favorable to in time contrasting and analysis, and detection equipment is nimble to the detection of semiconductor, and it can carry out audio-visual timely reaction to detect numerical value, has increased the detection precision, has guaranteed the production quality of product.
Although the above patent can detect the semiconductor product, the device can only detect the outside of the semiconductor product to a certain extent, and can not detect the semiconductor product in all directions at different angles and different viewing angles, so as to reduce the accuracy and efficiency of subsequent detection.
Disclosure of Invention
An object of the present invention is to provide a semiconductor perspective inspection apparatus to solve the problems set forth in the above background art.
In order to achieve the purpose, the invention provides the following technical scheme: a semiconductor perspective detection device comprises a supporting foot margin, a lower inner frame, a sealing cover door, a new sliding table, an X-Y-U material loading platform, an upper inner frame, a swinging combination assembly, a control panel, a three-color lamp, a perspective door, a display, an operation control table, a connecting hinge, an X-ray protection machine shell, a proximity switch, an inductor mounting frame, an inductor supporting frame, an arc-shaped guide rail, a third inductor, a fourth sensor and a mounting clamping frame.
Preferably, the outer end face of the lower part inner frame is symmetrically rotated and clamped with a sealing cover door for limiting, the sealing cover door is located at the bottom end face four corners of the lower part inner frame and is fixedly connected with supporting ground feet for supporting at equal intervals, the upper end face center of the lower part inner frame is fixedly provided with an upper part inner frame, the outer end faces of the lower part inner frame and the upper part inner frame are fixedly sleeved with an X-ray protection casing for protection, the rear end face of the X-ray protection casing is close to the top and is fixedly provided with a control panel for controlling, the rear end face of the X-ray protection casing is close to the middle and is rotatably connected with a perspective door through a connecting hinge, the top end face of the X-ray protection casing is close to the rear corner and is fixedly provided with a three-color lamp for warning, and the side end face of the X-ray protection casing is close to the rear and is fixedly provided with an operation control console, the upper end face fixedly connected with display of operation control cabinet, the interior terminal surface of lower part inner frame is close to middle part department fixed mounting and has new slip table, and is located the rear end face of upper portion inner frame is close to middle part fixed mounting and has the combination assembly of swaing, the up end of lower part inner frame just carries the material platform to X-Y-U that new slip table department fixed connection was used for the direction, the rear end face of upper portion inner frame just is swaing combination assembly department fixed connection inductor mounting bracket, and is located the side end face fixed mounting of inductor mounting bracket has the inductor support frame, the up end center department fixed mounting of inductor mounting bracket has proximity switch, and is located the rear end face of upper portion inner frame is close to inductor support frame department fixed mounting and has the arc guide rail, the interior terminal surface fixedly connected with of arc guide rail is used for the third inductor that detects, an installation clamping frame for supporting is fixedly installed at the rear end face attaching and swinging combined general assembly position of the upper inner frame, a fourth sensor for detecting is fixedly connected to the inner end face of the installation clamping frame, the X-Y-U material carrying platform comprises a rotary motor base, a bottom fixed drive, a large rotary platform, a Y-axis motor, a large tow chain, a supporting motor and a small tow chain, the Y-axis motor is connected to the upper end face of the bottom fixed drive in a sliding and clamping mode, a supporting clamping plate is fixedly installed at the center of the upper end face of the Y-axis motor, servo motors are fixedly installed at the positions, close to the ends, of the side end faces of the bottom fixed drive and the Y-axis motor, a lead screw is fixedly installed at the center of the front end face of each servo motor, each servo motor is connected with the Y-axis motor in a sliding mode through lead screw threads, and a lower layer tow chain frame is fixedly installed at the upper end face of the Y-axis motor, the Y axle motor carries out fixed connection through the big tow chain of lower floor's tow chain frame fixedly connected with, servo motor's outer terminal surface carries out fixed connection through the bottom of lead screw and rotatory big platform, and is located the preceding terminal surface fixed mounting of rotatory big platform has upper tow chain frame, rotatory big platform passes through the little tow chain of upper tow chain frame fixedly connected with, the bottom fixed mounting who supports the cardboard has the rotating electrical cabinet, and is located the bottom fixedly connected with supporting motor of rotating electrical cabinet, supporting motor has rotatory big platform through connecting belt sliding connection, just rotatory big platform rotates the joint with the support cardboard.
Preferably, it supports and ring rail mounting plate including swaing combination, belt flange, ring rail, belt to sway the combination assembly, the interior terminal surface slip joint that sways the combination has ring rail, and is located ring rail's rear end face fixed mounting has the ring rail mounting plate who is used for supporting, ring rail mounting plate's rear end face fixedly connected with is used for the belt support of connecting, ring rail mounting plate supports fixed mounting through the belt and has the belt flange.
Preferably, the new slip table is including the guide rail base that is used for supporting, fixed connection at the fixed motor on guide rail base upper portion, fixed connection at the connecting screw of fixed motor bottom, through connecting the inside sliding support of lead screw slip joint in guide rail bottom and the inside elevating system combination of fixed connection at the sliding support.
Preferably, the upper end face of the lower part inner frame is close to the edge and is fixedly connected with a pressing plate, the pressing plate is fixedly connected with the large drag chain, one end of the small drag chain is fixedly connected with the supporting clamping plate through the upper layer drag chain frame, and the other end of the small drag chain is fixedly connected with the upper end face of the Y-axis motor through a connecting piece.
Preferably, the side part of the swinging combination assembly is fixedly connected to the inner end face of the upper inner frame through an annular guide rail mounting bottom plate, the inner end face of the swinging combination is fixedly connected with a flat panel detector for detection, and the front end of the X-ray protection casing is symmetrically and rotatably clamped with a safety door for sealing.
Preferably, the four corners of the bottom end surface of the lower inner frame are fixedly provided with installation support plates, and the bottom end surface of the installation support plates is uniformly and equidistantly fixedly connected with the supporting integrated heavy-duty caster with the support legs.
Preferably, take even size heavy load truckle of stabilizer blade including the spacing cardboard that is used for supporting, rotate the support truckle of joint in spacing cardboard bottom, fixed connection is at the thread plate of spacing cardboard lateral part and threaded connection is at the inside support pad foot of thread plate.
Compared with the prior art, the invention has the following beneficial effects:
compared with the prior art, the invention mainly aims to provide the arc-shaped guide rail for the flat panel detector, the X-Y-U material carrying platform can move in a one-way inclined mode to 60 degrees, the X-Y-U material carrying platform can move in an X axis and a Y axis and can also rotate in 360 degrees, the products can be detected in all directions at different angles and different visual angles, and through the integral structural arrangement, the more uniform distribution is realized, the better perspective detection work is facilitated, the integral detection efficiency is improved, the streamlined production detection work is facilitated, the production is matched, the integral efficiency is improved, and the integrated industrial integration is facilitated.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of the main structure of the present invention;
FIG. 2 is a side view of the body of the present invention;
FIG. 3 is a schematic structural view of a main body sleeved arc-shaped guide rail shell of the invention;
FIG. 4 is an enlarged view of a portion of the subject of the present invention at I;
FIG. 5 is an enlarged view of a portion of the main body II of the present invention;
FIG. 6 is a front view of the body of the present invention;
FIG. 7 is a cross-sectional view taken along the main body elevation A-A of the present invention;
FIG. 8 is a schematic diagram of the X-Y-U platform structure of the present invention;
FIG. 9 is a schematic view of the swing assembly of the present invention;
FIG. 10 is a side view of the swing assembly of the present invention;
fig. 11 is a schematic structural diagram of a second embodiment of the main body of the present invention.
In the figure: 1-supporting feet, 2-lower inner frame, 3-sealing door, 4-new sliding table, 5-X-Y-U material carrying platform, 6-upper inner frame, 7-swinging combined assembly, 8-control panel, 9-three-color lamp, 10-perspective door, 11-display, 12-operation console, 13-connecting hinge, 14-X ray protective casing, 15-proximity switch, 16-inductor mounting rack, 17-inductor supporting rack, 18-arc guide rail, 19-third inductor, 20-fourth sensor, 21-mounting clamping rack, 22-integral heavy-load caster with supporting feet, 51-rotating motor base, 52-bottom fixed drive, 53-large rotating platform, 54-Y shaft motor, 55-large drag chain, 56-supporting motor, 57-small drag chain, 71-swinging combination, 72-belt flange, 73-annular guide rail, 74-belt support and 75-annular guide rail mounting bottom plate.
Detailed Description
In order to make the technical solutions better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only partial embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It should be understood that the data so used may be interchanged under appropriate circumstances such that embodiments of the application described herein may be used. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
The invention is further described below with reference to the accompanying drawings.
Example 1
Referring to fig. 1-10, an embodiment of the present invention is shown: a semiconductor perspective detection device comprises a supporting foot 1, a lower inner frame 2, a cover closing door 3, a new sliding table 4, an X-Y-U material loading platform 5, an upper inner frame 6, a swing combination assembly 7, a control panel 8, a three-color lamp 9, a perspective door 10, a display 11, an operation control table 12, a connecting hinge 13, an X-ray protection machine shell 14, a proximity switch 15, an inductor mounting frame 16, an inductor supporting frame 17, an arc-shaped guide rail 18, a third inductor 19, a fourth sensor 20 and a mounting clamping frame 21.
The outer end face of the lower inner frame 2 is symmetrically and rotatably clamped with a sealing cover door 3 for limiting, four corners of the bottom end face of the lower inner frame 2 are uniformly and equidistantly fixedly connected with supporting feet 1 for supporting, the center of the upper end face of the lower inner frame 2 is fixedly provided with an upper inner frame 6, the outer end faces of the lower inner frame 2 and the upper inner frame 6 are fixedly sleeved with an X-ray protection casing 14 for protection, the rear end face of the X-ray protection casing 14 is fixedly provided with a control panel 8 for control near the top, the rear end face of the X-ray protection casing 14 is rotatably connected with a perspective door 10 near the middle through a connecting hinge 13, the top end face of the X-ray protection casing 14 is fixedly provided with a tricolor lamp 9 for warning near the rear corner, and the side end face of the X-ray protection casing 14 is fixedly provided with an operation control console 12 near the rear, the upper end face of an operation control console 12 is fixedly connected with a display 11, a new sliding table 4 is fixedly arranged at the position, close to the middle part, of the inner end face of a lower inner frame 2, a swinging combination assembly 7 is fixedly arranged at the position, close to the middle part, of the rear end face of an upper inner frame 6, the upper end face of the lower inner frame 2 is fixedly connected with an X-Y-U material loading platform 5 for guiding right opposite to the new sliding table 4, a sensor mounting frame 16 is fixedly connected at the position, right opposite to the swinging combination assembly 7, of the rear end face of the upper inner frame 6, a sensor supporting frame 17 is fixedly arranged at the side end face of the sensor mounting frame 16, a proximity switch 15 is fixedly arranged at the center of the upper end face of the sensor mounting frame 16, an arc-shaped guide rail 18 is fixedly arranged at the position, close to the sensor supporting frame 17, of the rear end face of the upper inner frame 6, and a third sensor 19 for detection are fixedly connected to the inner end face of the arc-shaped guide rail 18, an installation clamping frame 21 for supporting is fixedly installed at the position of a rear end face attaching and swinging combination assembly 7 of an upper inner frame 6, a fourth sensor 20 for detecting is fixedly connected to the inner end face of the installation clamping frame 21, an X-Y-U material carrying platform 5 comprises a rotary motor base 51, a bottom fixed drive 52, a large rotary platform 53, a Y-axis motor 54, a large drag chain 55, a support motor 56 and a small drag chain 57, the upper end face of the bottom fixed drive 52 is in sliding clamping connection with the Y-axis motor 54, a support clamping plate is fixedly installed at the center of the upper end face of the Y-axis motor 54, servo motors are fixedly installed at the positions, close to the end heads, of the side end faces of the bottom fixed drive 52 and the Y-axis motor 54, a screw rod is fixedly installed at the center of the front end face of each servo motor, the servo motors are in sliding connection with the Y-axis motor 54 through screw threads, and a lower layer drag chain frame is fixedly installed at the upper end face of the Y-axis motor 54, y axle motor 54 carries out fixed connection through the big tow chain 55 of lower floor's tow chain frame fixedly connected with, servo motor's outer terminal surface carries out fixed connection through the bottom of lead screw with rotatory big platform 53, and be located the preceding terminal surface fixed mounting of rotatory big platform 53 and have upper tow chain frame, rotatory big platform 53 passes through the little tow chain 57 of upper tow chain frame fixedly connected with, the bottom fixed mounting who supports the cardboard has rotating motor seat 51, and be located rotating motor seat 51's bottom fixedly connected with supporting motor 56, supporting motor 56 has rotatory big platform 53 through connecting belt sliding connection, and rotatory big platform 53 rotates the joint with the supporting cardboard.
The swinging combination assembly 7 comprises a swinging combination 71, a belt rib 72, an annular guide rail 73, a belt support 74 and an annular guide rail installation bottom plate 75, wherein the inner end face of the swinging combination 71 is connected with the annular guide rail 73 in a sliding and clamping manner, the annular guide rail installation bottom plate 75 used for supporting is fixedly installed on the rear end face of the annular guide rail 73, the belt support 74 used for connection is fixedly connected to the rear end face of the annular guide rail installation bottom plate 75, and the belt rib 72 is fixedly installed on the annular guide rail installation bottom plate 75 through the belt support 74.
The new sliding table 4 comprises a guide rail base for supporting, a fixed motor fixedly connected to the upper portion of the guide rail base, a connecting lead screw fixedly connected to the bottom of the fixed motor, a sliding support in sliding connection with the inside of the bottom of the guide rail through threads of the connecting lead screw, and a lifting mechanism combination fixedly connected to the inside of the sliding support.
The up end of lower part inner frame 2 is close to edge fixedly connected with clamp plate, and the clamp plate carries out fixed connection with big tow chain 55, and the one end of little tow chain 57 carries out fixed connection through upper tow chain frame and support cardboard, and the other end of little tow chain 57 passes through connecting piece fixed connection at the up end of Y axle motor 54.
The side part of the swinging combination assembly 7 is fixedly connected to the inner end face of the upper inner frame 6 through an annular guide rail mounting bottom plate 75, the inner end face of the swinging combination 71 is fixedly connected with a flat panel detector for detection, and the front end of the X-ray protection casing 14 is symmetrically and rotatably clamped with a safety door for sealing.
In the implementation of the embodiment, a user can open the safety door firstly, then a product to be detected is placed on the X-Y-U loading platform 5, then the safety door is closed, the external X-ray source can be opened after the safety door is closed, at the moment, the user can control the control stepless speed regulation rocker on the operation console 12 to determine the position angle of the product, then the flat plate angle of the product is determined, the detection is started after the determination is completed, the X-ray source is closed after the detection is completed, and the product is taken out after the door is opened.
Example 2
On the basis of embodiment 1, as shown in fig. 11, the bottom face four corners fixed mounting of lower part inner frame 2 has the installation extension board, and the even equidistance fixedly connected with of bottom face that is located the installation extension board is used for the even tape foot connector type heavy load truckle 22 that supports, tape foot connector type heavy load truckle 22 is including the spacing cardboard that is used for supporting, rotate the support truckle of joint in spacing cardboard bottom, fixed connection is at the thread plate and the inside support pad foot of threaded connection at the thread plate of spacing cardboard lateral part.
This embodiment is when implementing, although its stability is higher when supporting above-mentioned support lower margin 1, nevertheless because equipment need remove equipment when overhauing and debugging, support lower margin 1 and do not possess the displacement function, and then increased the follow-up efficiency of carrying out the displacement to equipment, when the displacement, user's accessible is adjusted and is supported the pad foot and at the inside height of spacing cardboard to remove the restriction to supporting the truckle, make things convenient for the follow-up displacement operation that carries on.
The working principle is as follows: the X-ray protection machine shell 14 is arranged, the X-ray protection machine shell 14 can carry out omnibearing protection and blocking operation on X-rays, so that the overall safety performance of the device is improved, meanwhile, a safety door is arranged, the rapid opening and closing of a follow-up user through the safety door can be facilitated, the stability of feeding and discharging products is improved, meanwhile, the control console 12 is operated, the rapid and stable regulation and control of the detected products can be automatically carried out by the user according to the detection requirements, the adaptability of the device is improved, the efficiency of detecting the products is improved, a microfocus X-ray light source and a high-definition dynamic flat panel detector are adopted, the X-Y-U material carrying platform 5 can carry out X-axis and Y-axis movement and can also carry out 360-degree rotary movement, and meanwhile, the flat panel detector is provided with an arc-shaped guide rail 18 and can carry out unidirectional inclination movement to 60 degrees, can carry out different angles to the product, the all-round detection at different visual angles, operation control console 12 is equipped with electrodeless speed governing motion control rocker, the position and the required angle of illumination of control product that can convenient and fast, carry out all-round detection to detecting the product, if it is follow-up needs to overhaul equipment and maintain to detect the completion simultaneously, user's accessible external tool is with four support pad foot screw thread rotations of group to breaking away from ground, support the truckle this moment and can play the supporting role to the device, the simultaneous user can carry out fast and stable's removal with equipment through supporting the truckle, thereby convenient follow-up quick stable detection operation that carries out, the convenient performance of carrying out the displacement to the device has been improved.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. A semiconductor perspective inspection apparatus, characterized by: the device comprises a supporting foot margin (1), a lower inner frame (2), a sealing cover door (3), a new sliding table (4), an X-Y-U material carrying platform (5), an upper inner frame (6), a swinging combination assembly (7), a control panel (8), a three-color lamp (9), a perspective door (10), a display (11), an operation control table (12), a connecting hinge (13), an X-ray protection machine shell (14), a proximity switch (15), an inductor mounting frame (16), an inductor supporting frame (17), an arc-shaped guide rail (18), a third inductor (19), a fourth sensor (20) and an installation clamping frame (21).
2. The apparatus for inspecting semiconductor perspective according to claim 1, wherein: the outer end face symmetrical rotating joint of the lower part inner frame (2) is provided with a sealing cover door (3) for limiting, and is located the bottom end face four corners of the lower part inner frame (2) are fixedly connected with supporting ground feet (1) for supporting at equal intervals, the upper end face center of the lower part inner frame (2) is fixedly provided with an upper part inner frame (6), and is located the outer end face fixed sleeves of the lower part inner frame (2) and the upper part inner frame (6) are provided with an X-ray protection casing (14) for protection, the rear end face of the X-ray protection casing (14) is close to the top and is fixedly provided with a control panel (8) for control, the rear end face of the X-ray protection casing (14) is close to the middle part and is rotatably connected with a perspective door (10) through a connecting hinge (13), the top end face of the X-ray protection casing (14) is close to the rear corner and is fixedly provided with a three-color lamp (9) for warning, and is located the side end face of X ray protection casing (14) is close to rear portion fixed mounting has operating console (12), the up end fixedly connected with display (11) of operating console (12), the interior terminal surface of lower part inner frame (2) is close to middle part department fixed mounting and has new slip table (4), and is located the rear end face of upper portion inner frame (6) is close to middle part fixed mounting and has swagged combination assembly (7), the up end of lower part inner frame (2) just locates fixedly connected with X-Y-U to be used for the direction to new slip table (4) and carries material platform (5), the rear end face of upper portion inner frame (6) just locates fixedly connected with inductor mounting bracket (16) to swagger combination assembly (7), and is located the side end fixed mounting of inductor mounting bracket (16) has inductor support frame (17), fixed mounting is located proximity switch (15) in the up end mounting bracket center of inductor (16), an arc-shaped guide rail (18) is fixedly arranged at the position, close to an inductor support frame (17), of the rear end face of the upper inner frame (6), the inner end face of the arc-shaped guide rail (18) is fixedly connected with a third inductor (19) for detection, the position, close to an inductor support frame (17), of the rear end face of the upper inner frame (6) is fixedly provided with an installation clamping frame (21) for support, the inner end face of the installation clamping frame (21) is fixedly connected with a fourth sensor (20) for detection, the X-Y-U material carrying platform (5) comprises a rotating motor base (51), a bottom fixed drive (52), a large rotating platform (53), a Y-axis motor (54), a large drag chain (55), a support motor (56) and a small drag chain (57), and the Y-axis motor (54) is slidably clamped on the upper end face of the bottom fixed drive (52), a supporting clamping plate is fixedly arranged at the center of the upper end face of the Y-axis motor (54), servo motors are fixedly arranged at the positions, close to the ends, of the side end faces of the bottom fixed drive (52) and the Y-axis motor (54), a lead screw is fixedly arranged at the center of the front end face of the servo motor, the servo motors are connected with the Y-axis motor (54) in a sliding mode through lead screw threads, a lower-layer drag chain frame is fixedly arranged at the upper end face of the Y-axis motor (54), the Y-axis motor (54) is fixedly connected with a large drag chain (55) through the lower-layer drag chain frame, the outer end face of each servo motor is fixedly connected with the bottom of a large rotating platform (53) through the lead screw, an upper-layer drag chain frame is fixedly arranged at the front end face of the large rotating platform (53), and the large rotating platform (53) is fixedly connected with a small drag chain (57) through the upper-layer drag chain frame, the bottom fixed mounting who supports the cardboard has rotating electrical machines seat (51), and is located the bottom fixedly connected with support motor (56) of rotating electrical machines seat (51), support motor (56) have rotatory big platform (53) through connecting belt sliding connection, just rotatory big platform (53) rotate the joint with the support cardboard.
3. The apparatus for inspecting semiconductor perspective according to claim 2, wherein: swing combination assembly (7) including swing combination (71), belt flange (72), ring rail (73), belt support (74) and ring rail mounting plate (75), the interior terminal surface slip joint of swing combination (71) has ring rail (73), and is located the rear end face fixed mounting of ring rail (73) has ring rail mounting plate (75) that are used for supporting, the rear end face fixedly connected with of ring rail mounting plate (75) is used for the belt support (74) of connecting, ring rail mounting plate (75) support (74) through the belt (74) fixed mounting have belt flange (72).
4. A semiconductor perspective inspection apparatus according to claim 3, wherein: the novel sliding table (4) comprises a guide rail base used for supporting, a fixed motor fixedly connected to the upper portion of the guide rail base, a connecting lead screw fixedly connected to the bottom of the fixed motor, a sliding support in the guide rail bottom through a connecting lead screw thread sliding joint, and a lifting mechanism fixedly connected to the inside of the sliding support.
5. The apparatus for inspecting semi-conductor perspective as claimed in claim 4, wherein: the upper end face of the lower inner frame (2) is close to the edge and is fixedly connected with a pressing plate, the pressing plate is fixedly connected with a large drag chain (55), one end of a small drag chain (57) is fixedly connected with a supporting clamping plate through an upper layer drag chain frame, and the other end of the small drag chain (57) is fixedly connected with the upper end face of a Y-axis motor (54) through a connecting piece.
6. The apparatus for inspecting semi-conductor perspective as claimed in claim 4, wherein: the side part of the swinging combination assembly (7) is fixedly connected to the inner end face of the upper inner frame (6) through an annular guide rail mounting bottom plate (75), the inner end face of the swinging combination (71) is fixedly connected with a flat panel detector for detection, the front end of the X-ray protection machine shell (14) is symmetrically and rotatably clamped with a safety door for sealing, and the front end of the X-ray protection machine shell (14) is symmetrically and rotatably clamped with a safety door for sealing.
7. The apparatus for inspecting semi-conductor perspective as claimed in claim 4, wherein: and four corners of the bottom end surface of the lower inner frame (2) are fixedly provided with installation support plates, and the bottom end surface of the installation support plates is uniformly and equidistantly fixedly connected with supporting integral heavy-duty casters (22) with support legs.
8. The apparatus for inspecting semi-conductor perspective as claimed in claim 7, wherein: the integral heavy-load caster (22) with the support legs comprises a limiting clamping plate for supporting, a supporting caster rotatably clamped at the bottom of the limiting clamping plate, a threaded plate fixedly connected to the side part of the limiting clamping plate and a supporting pad leg connected to the inside of the threaded plate in a threaded manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110812871.3A CN113484713B (en) | 2021-07-19 | 2021-07-19 | Semiconductor perspective detection equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110812871.3A CN113484713B (en) | 2021-07-19 | 2021-07-19 | Semiconductor perspective detection equipment |
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| CN113484713A true CN113484713A (en) | 2021-10-08 |
| CN113484713B CN113484713B (en) | 2022-07-29 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10160796A (en) * | 1996-11-28 | 1998-06-19 | Ando Electric Co Ltd | Connection stand for test head of ic tester |
| US20050116728A1 (en) * | 2003-10-27 | 2005-06-02 | Chisato Nagamine | Tester device, inspection device, and interconnection board receiving unit for the tester device and inspection device |
| CN101281145A (en) * | 2008-05-19 | 2008-10-08 | 东莞市正业电子有限公司 | Detection device |
| WO2019143091A1 (en) * | 2018-01-19 | 2019-07-25 | 주식회사 쎄믹스 | Wafer prober |
| CN111537866A (en) * | 2020-05-28 | 2020-08-14 | 龙岩市远尚工贸有限公司 | Clamp for detecting PCB (printed circuit board) |
| WO2020184807A1 (en) * | 2019-03-12 | 2020-09-17 | 주식회사 쎄믹스 | Wafer inspection device |
-
2021
- 2021-07-19 CN CN202110812871.3A patent/CN113484713B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10160796A (en) * | 1996-11-28 | 1998-06-19 | Ando Electric Co Ltd | Connection stand for test head of ic tester |
| US20050116728A1 (en) * | 2003-10-27 | 2005-06-02 | Chisato Nagamine | Tester device, inspection device, and interconnection board receiving unit for the tester device and inspection device |
| CN101281145A (en) * | 2008-05-19 | 2008-10-08 | 东莞市正业电子有限公司 | Detection device |
| WO2019143091A1 (en) * | 2018-01-19 | 2019-07-25 | 주식회사 쎄믹스 | Wafer prober |
| WO2020184807A1 (en) * | 2019-03-12 | 2020-09-17 | 주식회사 쎄믹스 | Wafer inspection device |
| CN111537866A (en) * | 2020-05-28 | 2020-08-14 | 龙岩市远尚工贸有限公司 | Clamp for detecting PCB (printed circuit board) |
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| CN113484713B (en) | 2022-07-29 |
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