CN113466246A - High-precision imaging system and method, image acquisition device and detection equipment - Google Patents
High-precision imaging system and method, image acquisition device and detection equipment Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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Abstract
The embodiment of the invention discloses a high-precision imaging system, a high-precision imaging method, an image acquisition device and a detection device, wherein the imaging system comprises: the first point light source and/or the second point light source and the super-telecentric lens; the ultra-telecentric lens and the first point light source are arranged on the same side of a first plane to be imaged; and/or the super-telecentric lens and the second point light source are arranged on the same side of the second plane to be imaged. According to the technical scheme, the hyper-telecentric lens and the point light source are integrally and correspondingly arranged, so that the imaging consistency is effectively improved, and a high-precision and stable workpiece image can be obtained.
Description
Technical Field
The invention relates to the technical field of imaging equipment, in particular to a high-precision imaging system and method, an image acquisition device and detection equipment.
Background
In the field of workpiece detection at present, the defect detection of small workpieces, particularly fine parts, also depends on the visual detection of assembly line workers to a great extent. In order to improve the detection efficiency, the prior art attempts to introduce a machine vision technology based on image recognition, and detects and discovers defects on a workpiece by intelligently recognizing the acquired workpiece image.
However, machine vision technology has long been faced with many challenges, especially, metal surface parts have high light reflection characteristics and have long been difficult to perform stable high quality imaging. Machine vision techniques rely heavily on the quality of the acquired image, which is affected by many factors. Wherein, for most workpieces, there may be multiple surfaces to be detected, it is obviously inefficient and unreliable to turn over the workpiece manually, and the prior art generally collects images of the multiple surfaces of the workpiece by other auxiliary means.
Typical acquisition means include acquisition from directly above the workpiece using an ultra-telecentric lens, acquisition of multiple sides separately using multiple cameras, or acquisition of images of different sides reflected to one camera using multiple mirrors, and these prior art approaches can solve the problem of automatically acquiring images of multiple different surfaces of the workpiece to some extent.
However, in the process of implementing the related technical solution of the embodiment of the present invention, it is found that the image acquisition method in the prior art still has obvious defects: firstly, due to high light reflection of the metal surface, the imaging effect of the super-telecentric lens above the workpiece on the metal upper surface is extremely poor (basically, the imaging cannot be carried out); the side images are heavily compressed, the resolution is insufficient, the imaging consistency is poor, the images presented by the workpiece when placed in different positions are different, and when the workpiece is positioned in certain positions within the field of view, slight defects such as scratches cannot be imaged significantly, resulting in very unstable detection of certain surface defects of the workpiece. Secondly, the mode of a plurality of cameras is obviously higher in cost and complex in light path, and is not easy to realize. The multiple mirror approach is also too complicated to implement in a limited space. In addition, on an automatic detection production line, workpieces are usually kept in a motion state, the acquisition mode in the prior art is difficult to ensure effective position alignment in a dynamic detection process, an ideal acquired image cannot be obtained, the imaging quality is poor, the precision is low, and the detection rate of surface defects of the workpieces is low.
Disclosure of Invention
Aiming at the technical problems in the prior art, the embodiment of the invention provides a high-precision imaging system, a high-precision imaging method, an image acquisition device and a detection device, so as to solve the problem of poor dynamic detection imaging quality in the prior art.
A first aspect of embodiments of the present invention provides a high-precision imaging system, including: a first point light source 120 and/or a second point light source 130, and an hyper-telecentric lens 110; the ultra-telecentric lens 110 and the first point light source 120 are arranged on the same side of a first plane to be imaged; and/or the hyper-telecentric lens 110 and the second point light source 130 are arranged on the same side of the second plane to be imaged.
In some embodiments, the first point light source 120 and/or the second point light source 130 have more than two different color regions.
In some embodiments, the first point light source 120 and/or the second point light source 130 have three different color regions distributed in a Y shape.
In some embodiments, the lens optical axis of the hyper-telecentric lens 110 is disposed obliquely with respect to the first plane to be imaged; and/or the lens optical axis of the hyper-telecentric lens 110 is obliquely arranged relative to the second plane to be imaged.
In some embodiments, the first point light source 120 has a center point O and a boundary point B, and for any point P on the first to-be-imaged plane within the hyper-telecentric lens view, the angle ≦ 12 degrees.
In some embodiments, the first point light source 120 and/or the second point light source 130 are generated by a display device.
In some embodiments, in the imaging system: the super-telecentric lens (110) is provided with a negative center, and the spatial distance between the mirror image point of the negative center of the super-telecentric lens (110) relative to the first plane to be imaged and the center of the first point light source (120) does not exceed a first error range; and/or the spatial distance between the mirror image point of the negative center of the hyper-telecentric lens 110 relative to the second plane to be imaged and the center of the second point light source 130 does not exceed a first error range; wherein the first error range is within 40 mm.
In some embodiments, the first error range is within 20 mm.
A second aspect of an embodiment of the present invention provides a high-precision imaging system, including: an ultra-far-center lens 210, a first point light source 220 and a carrying platform 240; wherein the content of the first and second substances,
an included angle between a lens optical axis of the super-telecentric lens 210 and a normal of the carrying platform 240 is 15-70 degrees;
the first point light source 220 and the hyper-telecentric lens 210 are both disposed on a first side of the stage 240.
In some embodiments, the imaging system further comprises a second point light source 230, the second point light source 230 being disposed on a second side of the stage 240.
In some embodiments, the hyper-telecentric lens 210 has a negative center, and the spatial distance between the mirror image point of the first side surface of the stage 240 and the center of the first point light source 220 does not exceed a first error range, and the first error range is less than 40 mm.
In some embodiments, a spatial distance between a mirror point of the negative center of the hyper-telecentric lens 210 relative to a vertical plane of the stage 240 and a center of the second point light source 230 does not exceed a first error range.
In some embodiments, the first point light source 220 and/or the second point light source 230 have more than two different color regions.
In some embodiments, the first point light source 220 and/or the second point light source 230 have three different color regions distributed in a Y shape.
In some embodiments, the first point light source 220 and/or the second point light source 230 are generated by a display device.
In some embodiments, the first point light source 220 has a center point O and a boundary point B, and for any point P on the first side surface of the stage 240 within the hyper-telecentric lens view, the angle ≦ 12 degrees.
In some embodiments, the first error range is within 20 mm.
A third aspect of the embodiments of the present invention provides an image capturing apparatus, which includes an image sensor and the imaging system as described above, wherein the image sensor is configured to capture an optical image output by the extra-far-center lens.
In some embodiments, a target surface of the image sensor is disposed obliquely with respect to a lens optical axis of the hyper-telecentric lens.
A fourth aspect of embodiments of the present invention provides a high-precision imaging method for obtaining images of multiple surfaces of an object to be detected using the imaging system as described above.
A fifth aspect of an embodiment of the present invention provides a detection apparatus, including: the loading platform, the image acquisition device, the image recognition device and the imaging system are arranged on the loading platform; the object carrying platform can carry an object to be tested and dynamically move the object to be tested into or out of the visual field range of the lens; the imaging system is used for projecting light rays to the article to be detected and outputting an optical image through the lens; the image acquisition device is used for acquiring the optical image; the image recognition device is used for recognizing the collected optical image so as to detect the defect condition of the object to be detected.
According to the technical scheme provided by the embodiment of the invention, the consistency and the quality of imaging are effectively improved through the integrated corresponding arrangement of the super-far-center lens and the point light source, particularly, the imaging capability of fine defects of workpieces is effectively improved through the inclined arrangement of the lens, and high-precision and stable workpiece images can be obtained.
Drawings
The features and advantages of the present invention will be more clearly understood by reference to the accompanying drawings, which are illustrative and not to be construed as limiting the invention in any way, and in which:
FIG. 1 is a schematic block diagram of a high precision imaging system according to some embodiments of the present invention;
FIG. 2 is a schematic diagram of the imaging principle of the hyper-telecentric lens;
FIG. 3 is a schematic diagram of a high precision imaging system according to further embodiments of the present invention;
I-IV in FIG. 4 are examples of the arrangement of the plurality of different color zones of the point light source according to some embodiments of the present invention;
fig. 5 is a schematic diagram of an image capture device according to some embodiments of the present invention.
Detailed Description
In the following detailed description, numerous specific details of the invention are set forth by way of examples in order to provide a thorough understanding of the relevant disclosure. It will be apparent, however, to one skilled in the art that the present invention may be practiced without these specific details. It should be understood that the use of "system," "device," "unit" and/or "module" terminology herein is a method for distinguishing between different components, elements, portions or assemblies at different levels of sequential arrangement. However, these terms may be replaced by other expressions if they can achieve the same purpose.
It will be understood that when a device, unit or module is referred to as being "on" … … "," connected to "or" coupled to "another device, unit or module, it can be directly on, connected or coupled to or in communication with the other device, unit or module, or intervening devices, units or modules may be present, unless the context clearly dictates otherwise. Although the terms "top," "bottom," "front," "back," "side," and the like may be used in this specification to describe various example features and elements of the invention, these terms are used herein for convenience only, e.g., in the orientation of the examples described in the figures. Nothing in this specification should be construed as requiring a specific three dimensional orientation of structures in order to fall within the scope of the invention.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the present invention. As used in the specification and claims of this application, the terms "a," "an," "the," and/or "the" are not intended to be inclusive in the singular, but rather are intended to be inclusive in the plural, unless the context clearly dictates otherwise. In general, the terms "comprises" and "comprising" are intended to cover only the explicitly identified features, integers, steps, operations, elements, and/or components, but not to constitute an exclusive list of such features, integers, steps, operations, elements, and/or components. For example, as used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
These and other features and characteristics of the present invention, as well as the methods of operation and functions of the related elements of structure and the combination of parts and economies of manufacture, will be better understood upon consideration of the following description and the accompanying drawings, which form a part of this specification. It is to be expressly understood, however, that the drawings are for the purpose of illustration and description only and are not intended as a definition of the limits of the invention. It will be understood that the figures are not drawn to scale.
Various block diagrams are used in the present invention to illustrate various variations of embodiments according to the present invention. It should be understood that the foregoing and following configurations are not intended to limit the present invention. The protection scope of the invention is subject to the claims.
The prior art hopes to improve the efficiency and the accuracy of workpiece detection through a machine vision technology, but for a plurality of surfaces of a workpiece, the image acquisition mode in the prior art is often too ideal or complicated in design, the imaging quality of the acquired image cannot be guaranteed, the method cannot be suitable for the requirement of dynamic detection, cannot be suitable for the requirement of increasingly severe workpiece surface defect detection, and is particularly not suitable for the detection of metal surface parts. In view of this, the embodiment of the present invention provides a high-precision imaging system, which effectively improves the consistency of illumination and imaging by the integrated corresponding arrangement of the hyper-telecentric lens and the point light source, and can obtain a plurality of high-precision and stable surface images of the workpiece.
In one embodiment of the present invention, as shown in fig. 1, the high precision imaging system comprises: a first point light source 120 and/or a second point light source 130, and an hyper-telecentric lens 110; the ultra-telecentric lens 110 and the first point light source 120 are arranged on the same side of a first plane to be imaged; and/or the hyper-telecentric lens 110 and the second point light source 130 are arranged on the same side of the second plane to be imaged.
In an embodiment of the present invention, the high precision imaging system is used to simultaneously image multiple surfaces of an article (workpiece) to be inspected. The super-far-center lens (hyper/hyper lens) is a special lens and is different from other lenses, and the hyper-far-center lens has two key characteristics, namely that the entrance pupil is positioned in front of the physical lens; the other is that it can image the surface of an object parallel to the optical axis, i.e., both the top and the side of the subject can be seen in the image. Therefore, as shown in fig. 2, the hyper-telephoto lens can provide a convergent view of the subject, i.e., the captured images are convergent, and images of the top and multiple sides of the subject can be obtained simultaneously. However, as mentioned in the background section, the use of hyper-telecentric lenses is still limited by a number of factors, and the imaging quality is generally poor. In the embodiment of the invention, in order to acquire a clear workpiece image through the super-telecentric lens, point light source auxiliary illumination matched with the super-telecentric lens is further provided. In the embodiment of the invention, at least one point light source is provided, the super-telecentric lens and the point light source are arranged on the same side of the plane to be imaged, and the super-telecentric lens arranged obliquely can effectively receive the light reflected by the point light source through the plane to be imaged: according to the embodiment of the invention, on one hand, the shielding of the light source on the view field of the lens is avoided; on the other hand, the high reflection of the front surface is not generated, and the imaging quality is high; meanwhile, because a plurality of reflectors are not needed to guide light, the light-emitting quality is improved, meanwhile, the light path system is simplified, the cost is reduced, the integration level is improved, and the system can be further miniaturized and facilitated. In the embodiments of the present invention, the point light source refers to a micro light source with a small light emitting area, and is not limited to a point light emitting object. More specifically, in the embodiments of the present invention, the point light source refers to a micro light source having a light emitting area of not more than 1000 square mm, and more preferably, a light emitting area of not more than 500 square mm. The point light source can be in any shape such as a circle, an ellipse, a rectangle and the like, preferably, the radius of a circumscribed circle of the point light source in the embodiment of the invention is not more than 20mm, and more preferably not more than 10 mm; alternatively, the circumscribed rectangle of the point light source in the embodiment of the present invention is not more than 20mm x 20mm, preferably not more than 20mm x 10mm, and more preferably not more than 10mm x 10 mm. In fact, the point light source in the embodiment of the present invention can achieve the effect as long as the point light source has a smaller light emitting area than the conventional surface light source, and specific limitations are not made on the specific shape and size of the point light source.
Further, in order to ensure effective illumination, the point light source and the position of the super-telecentric lens have a certain corresponding relationship. Preferably, the hyper-telecentric lens 110 has a negative center 112, and a spatial distance between a mirror image point of the negative center 112 relative to the first plane to be imaged 141 and a center of the first point light source 120 does not exceed a first error range; and/or the spatial distance between the mirror image point of the negative center of the hyper-telecentric lens 110 relative to the second plane to be imaged and the center of the second point light source 130 does not exceed a first error range. In the embodiment of the present invention, the super-far-center lens 110 has a negative center 112 (or called focus Point, CP), where the negative center 112 is an entrance pupil center of the super-far-center lens 110, the negative center 112 has a first mirror image Point with respect to the first plane to be imaged 141, and a spatial distance between a center of the first Point light source 120 and the first mirror image Point does not exceed a first error range. The imaging system in the embodiment of the present invention mainly aims to acquire images of a plurality of surfaces of an object to be detected (a workpiece, a micro part, etc.), and the object to be detected is usually placed above a carrying platform and has an upper surface parallel (or approximately parallel) to the carrying platform. The first to-be-imaged plane 141 in the embodiment of the present invention refers to a main to-be-detected surface of an object to be detected, and generally refers to an upper surface (of course, other side surfaces are possible, and the above surface is described as an example and is not meant to exclude the possibility of other side surfaces) of the object to be detected when the object to be detected is placed on the loading platform, light emitted by the first point light source 120 is reflected by the first to-be-imaged plane 141 (the upper surface of the workpiece) and enters the lens 110 to form an optical image, and then the defect of the object to be detected can be detected according to the optical image through manual or machine vision (recognition after the image is acquired by using an image sensor or the like).
The negative center of the super-telecentric lens can be determined by a test method, for example, the sensor target surface corresponding to the super-telecentric lens is replaced by flat light, and the lens is a light emitting structure; a piece of white paper is placed in front of the lens (the distance between the white paper and the front end of the lens is different, and the size of a light spot is different), and when the diameter of the light spot approaches to the light spot (namely the minimum area), the position of the light spot (the light spot) is the position of the negative center of the super-telecentric lens. The negative center of the super-telecentric lens is usually far from the lens, and generally, the object to be detected is located between the lens and the negative center (i.e., the lens is located above the workpiece and the negative center is located below the workpiece), so that the negative center is located above the workpiece relative to the first image point of the first plane to be imaged (the upper surface of the workpiece). In the embodiment of the invention, the first point light source is arranged near the first mirror image point (the spatial distance does not exceed the first error range), so that light emitted by the point light source can effectively enter the super-telecentric lens after being reflected by the first plane to be imaged (the upper surface of the workpiece), and stray light rays at other angles are prevented from entering the super-telecentric lens to inhibit defect imaging after being reflected, thereby ensuring that clear and stable imaging is obtained.
Of course, those skilled in the art can understand that, the setting of the first point light source near the first mirror image point may be setting the position of the super-telecentric lens first and then correspondingly adjusting the position setting of the first point light source, or setting the position of the first point light source first and then correspondingly adjusting the position setting of the super-telecentric lens, as long as the relative position relationship between the two is ensured, and the specific setting mode should not be considered as a limitation to the embodiment of the present invention. More specifically, the first point light source may have a certain light emitting area, and the arrangement of the first point light source near the first mirror point preferably means that the center of the first point light source coincides with the first mirror point. Since the shape of the first point light source is not necessarily a regular shape, the center of a circumscribed rectangle of the light emitting surface boundary curve of the first point light source is set as the center of the first point light source for an irregular shape having no clear center. In addition, the above-described form of overlapping two points is only the most preferable embodiment, and in fact, the problem can be solved even if the spatial distances of the two points have a certain deviation, and the deviation does not always exceed the first error range. Here, the first error range is determined according to the imaging and/or detection precision requirement, and is generally within 40mm (or, within 30% of the distance from the lens negative center to the front end of the super-telecentric lens, more specifically, the distance from the lens negative center to the front end of the super-telecentric lens refers to the distance from the lens negative center to the midpoint of the object-side first lens surface of the super-telecentric lens); for a scene with high precision requirement, the distance between the negative center of the lens and the front end of the super-telecentric lens can be within 30mm, 20mm or even 10mm (or within 22%, 15% or even 7% of the distance between the negative center of the lens and the front end of the super-telecentric lens). Meanwhile, the positions of the ultra-telecentric lens and the first point light source can be manually or automatically adjusted, and the spatial distance between the ultra-telecentric lens and the first point light source can be dynamically adjusted according to the actual imaging quality or precision requirement in the detection process.
In one embodiment of the present invention, the first point light source 120 can be implemented in various ways, and some specific settings can be made to obtain more ideal emergent light. Preferably, the first point light source 120 has more than two different color regions; more preferably, the first point light source 120 has three different color regions distributed in a Y shape. Some embodiments of the above-mentioned preferred modes are shown in fig. 4 as I-IV, for example, for a circular or rectangular point light source, it can be divided into two different color areas, i.e. the left and right color areas, and further the colors can be red and green, respectively; it can also be divided into three different color zones distributed in Y shape, further the colors can be respectively red, green and blue. In another preferred embodiment of the present invention, the first point light source 120 may also be a point light source in an embodiment of the present invention obtained by a display device, such as various existing display panels or display screens, including but not limited to a liquid crystal screen (in the form of LCD or LED), a CRT display screen, a PDP display screen, etc., and blocking light through a mask or displaying light only in a designated area; and then can also realize the pointolite at arbitrary assigned position for the position setting of pointolite is more nimble swift, can dispose and adjust the system more conveniently. Through the arrangement of more than two different color areas in the preferred embodiment of the invention, emergent light projected on an object to be detected can have different color areas, and further, images acquired from different directions can have different color effects, so that fine defects on the object to be detected (a miniature workpiece) can have obvious differences in the acquired images (the surface of the workpiece at the defect has geometric differences, and the acquired images can have color differences at the position), thereby improving the imaging quality of the defect, improving the precision and accuracy of defect detection, and being applicable to dynamic detection.
In a preferred embodiment of the present invention, the position of the lens can be further optimized. Preferably, the lens optical axis 111 of the hyper-telecentric lens 110 is obliquely arranged with respect to the first plane to be imaged 141; more preferably, an included angle between the lens optical axis 111 of the super-telecentric lens 110 and a normal of the first plane to be imaged 141 is 15 to 70 degrees. The inclined setting through the camera lens provides the adjustment space of bigger freedom for the position of pointolite, not only makes things convenient for the setting of pointolite, also makes the position of pointolite have certain declination for the camera lens, has avoided sheltering from the camera lens promptly, can avoid the mechanical interference between light and the device again, therefore has realized better imaging quality.
In a preferred embodiment of the present invention, the light emitting region of the point light source has a certain boundary. For example, the first point light source 120 has a central point O and a boundary point B, and for any point P in the super-telecentric lens view on the first plane to be imaged, the angle ≈ OPB is not greater than 12 degrees. Still further, the angle hagopb does not exceed 9 degrees or even 7 degrees. The definition of the center point O of the first point light source is the same as that of the first point light source, a definite geometric center is formed, the center point O is the geometric center, and for irregular shapes without the definite center, the center of a circumscribed rectangle of a boundary curve of the light emitting surface of the first point light source is used as the center of the first point light source. The respective boundary points B should generally be equidistant from the center point O (i.e. the boundary is preferably circular or approximately circular), whereas for non-circular light emitting faces the boundary point B is a point on the maximum inscribed circle of the smallest circumscribed rectangle of the first point light source light emitting face boundary curve. By limiting the size of the light emitting area, the divergence degree of the light emitted by the light source can be controlled, so that the final emergent light has a better illumination angle matched with the lens. With this preferred embodiment, the light from the point light source is directed onto the metal surface (the surface of the metal product or the metal-plated surface of any product), and a clear image formed on the metal surface is obtained through the hyper-telecentric lens. Typical metal-plated surfaces are usually nickel-plated, chrome-plated, zinc-plated, etc., but obviously other forms are also applicable to the solution of the present invention, so that no specific limitation is made to the specific form of the metal surface here. By adopting the technical scheme of the embodiment of the invention, the metal surface with high light reflection property can have excellent imaging effect, and the technical problem which cannot be solved for a long time in the prior art is effectively solved.
In the preferred embodiment of fig. 1, the imaging system may further include a second point light source 130, and a spatial distance between a mirror point of the negative center 112 of the hyper-telecentric lens 110 with respect to the second plane to be imaged 142 and a center of the second point light source 130 does not exceed a first error range. The second to-be-imaged plane refers to another to-be-detected surface of the to-be-detected article, for example, when the first to-be-imaged plane is the upper surface of the to-be-detected article (workpiece), the second to-be-imaged plane may be a side surface of the to-be-detected article (workpiece); when the first to-be-imaged plane is one side surface of the workpiece, the second to-be-imaged plane may be an upper surface or the other side surface of the workpiece. The specific form of the first plane to be imaged and the second plane to be imaged is not limited herein as long as both are two different surfaces of the object to be detected. The definition of the point light source has been described above, and refers to a micro light source having a small light emitting area, and is not limited to a point shape. The concept of the center of the second point light source is similar to that of the first point light source, and when the second point light source has a geometric center, the geometric center is referred to, and for irregular shapes without clear centers, the center of a circumscribed rectangle of a boundary curve of the light emitting surface is taken as the center of the point light source. The logic of the first error range is also similar to the foregoing, and is typically within 40mm (or, within 30% of the distance from the lens negative center to the front end of the ultra-telecentric lens, more specifically, the distance from the lens negative center to the front end of the ultra-telecentric lens refers to the distance from the lens negative center to the midpoint of the object-side first lens surface of the ultra-telecentric lens), depending on the imaging and/or detection accuracy requirements; for a scene with high precision requirement, the distance between the negative center of the lens and the front end of the super-telecentric lens can be within 30mm, 20mm or even 10mm (or within 22%, 15% or even 7% of the distance between the negative center of the lens and the front end of the super-telecentric lens). The arrangement of the second point light source enables the technical scheme of the preferred embodiment of the invention to effectively irradiate the side face of the article to be detected, so that reliable high-definition side face imaging can be simultaneously obtained through the lens, and the defects possibly existing on the side face of the workpiece can be simultaneously identified and detected.
It should be noted that, although some of the above embodiments are described by taking the first point light source as an example, since the structure and principle of the second point light source are similar, the second point light source may also adopt a similar implementation manner, and the description is not repeated here. The corresponding conversion and/or transformation for the various implementations of the second point light source will be obvious to those skilled in the art without inventive effort, and shall fall within the scope of the present invention.
According to the embodiment of the invention, images of a plurality of surfaces of an object to be detected can be simultaneously acquired through the ultra-telecentric lens, and through the arrangement of the first point light source and/or the second point light source in the preferred embodiment of the invention, the light angle projected to the surface to be detected is normalized, the defect display of inhibition of redundant stray light is avoided, and meanwhile, the position relation between the lens and the point light source is specially specified so that an imaging light path and an illumination light path are matched with each other. Further through the slope setting of camera lens, the relative camera lens optical axis of the geometric features on the article surface that awaits measuring is by according with normal distribution change for the off normal distribution, and then has further enlarged the imaging ability of slight defect, and the angle assorted illuminating light of cooperation integrative design, corresponding metal surface detection ability promotes by a wide margin. Through the setting of a plurality of different colour districts in preferred embodiment, can let the emergent light of throwing on waiting to detect article have the subregion of different colours, based on the reflection relation of camera lens and illumination, and then the image of gathering from different directions can demonstrate different colour effects, this makes to detect slight defect on article (miniature work piece, metal surface etc.) can demonstrate the difference (defect department work piece surface has geometric difference, it can demonstrate the color difference to gather the image in this department) that is apparent in gathering the image, thereby defect department image quality has been promoted, the precision and the accuracy of defect detection have been improved, it is applicable in dynamic detection.
Fig. 3 is a schematic diagram of a high precision imaging system in another embodiment of the present invention, and the preferred embodiment of fig. 3 is compared to fig. 1, primarily with reference plane adjustments. In fig. 1, one surface (a first to-be-imaged plane) of an object to be detected is taken as a reference plane, and although the imaging effect is good, the embodiment needs to be matched with the object to be detected; in practical situations, in the system initialization installation configuration process, the specific situation of the object to be detected may not be predicted, and a reference to the object to be detected may not be placed in advance, so that the embodiment of fig. 3 directly uses the loading platform as a reference.
Specifically, as shown in fig. 3, an embodiment of the present invention also provides a high-precision imaging system including: an ultra-far-center lens 210, a first point light source 220 and a carrying platform 240; an included angle between a lens optical axis 211 of the ultratelecentric lens 210 and a normal of the carrying platform 240 is 15-70 degrees; the first point light source 220 and the hyper-telecentric lens 210 are both disposed on a first side of the stage 240. In the preferred embodiment of fig. 3, the hyper-telecentric lens 210 is disposed obliquely with respect to the carrier platform 240, and the first point light source 220 and the hyper-telecentric lens 210 are disposed on the same side of the carrier platform 240, typically above the carrier platform, i.e. the side of the carrier platform for carrying the object (workpiece) to be inspected. The concept of point sources and the advantages of the tilted lens arrangement have been fully described in the foregoing embodiments, and the logic is similar and will not be repeated here.
In the preferred embodiment of fig. 3, the imaging system further comprises a second point light source 230, the second point light source 230 being arranged on a second side of the stage 240. In this embodiment, the objective table is usually a thin plate with a small thickness, and the thickness and the corresponding side elevation thereof are negligible, so that the first side and the second side of the objective table only consider the upper side and the lower side, and therefore, when the first point light source 220 and the hyper-telecentric lens 210 are disposed above the objective table 240, the second point light source 230 is disposed below the objective table 240. To ensure efficient illumination of the second point light source, the carrier platform 240 is preferably a transparent platform.
Further, the hyper-telecentric lens 210 has a negative center 212, and a spatial distance between a mirror image point of the negative center 212 relative to the first side surface 241 of the stage 240 and a center of the first point light source 220 does not exceed a first error range. More preferably, the spatial distance between the mirror image point of the negative center 212 relative to a vertical plane 242 of the stage 240 and the center of the second point light source 230 does not exceed a first error range. Similar to the embodiment of fig. 1, when the hyper-telecentric lens is above the stage, its negative center is generally below the stage, and the center of the first point light source 220 is preferably symmetrical with the negative center about the first side surface (upper surface) of the stage (i.e., the center of the point light source coincides with the negative mirror image point); the center of the second point light source 230 is preferably symmetrical to the negative center with respect to a vertical plane of the stage (which can be understood as a hypothetical side of the workpiece). Through the corresponding arrangement mode of the lens and the point light source, light emitted by the point light source can effectively enter the super-telecentric lens after being reflected by the upper surface of the carrying platform, so that clear and stable imaging is ensured. The concept of the center of the point light source is similar to that of the previous embodiment, and similar to the embodiment of fig. 1, the manner in which the center of the point light source coincides with the mirror point is merely the most preferable embodiment, and in fact, the spatial distance between the two points has a certain deviation, and the deviation does not exceed the first error range. Here, the first error range is determined according to the imaging and/or detection precision requirement, and is generally within 40mm (or, within 30% of the distance from the lens negative center to the front end of the super-telecentric lens, more specifically, the distance from the lens negative center to the front end of the super-telecentric lens refers to the distance from the lens negative center to the midpoint of the object-side first lens surface of the super-telecentric lens); for a scene with high precision requirement, the distance between the negative center of the lens and the front end of the super-telecentric lens can be within 30mm, 20mm or even 10mm (or within 22%, 15% or even 7% of the distance between the negative center of the lens and the front end of the super-telecentric lens).
In some embodiments of the present invention, the first point light source 220 and/or the second point light source 230 have more than two different color regions. More preferably, the first point light source 220 and/or the second point light source 230 have three different color regions distributed in a Y shape. In some embodiments, the first point light source 220 and/or the second point light source 230 are generated by a display device. In some embodiments, the first point light source 220 has a center point O and a boundary point B, and for any point P on the first side surface of the stage 240 within the hyper-telecentric lens view, the angle ≦ 12 degrees.
In these embodiments, the arrangement of the point light sources is similar to that of the related embodiment of fig. 1, and the specific principles, logics and functions are substantially similar, all of which can be understood by referring to the description of the embodiment of fig. 1, and will not be described repeatedly here. It should be noted that, since the embodiment of fig. 3 uses the stage as a reference, there is still a certain difference from the actual plane to be imaged (workpiece surface), and thus some errors will certainly occur, so that there may be some influence on the imaging precision. Typically, the embodiment of figure 3 ensures that the desired imaging is achieved for workpieces having a thickness of no more than 30 mm. Still alternatively, in scenarios where the accuracy requirement is not too high, the embodiment of fig. 3 may already solve the related art problem; when the precision requirement is high, the position of the super-telecentric lens and/or the point light source can be further fine-tuned on the basis of the embodiment of fig. 3 (for example, the position is adjusted to the form of the embodiment of fig. 1 according to the workpiece to be detected), so as to obtain a more ideal imaging effect.
It should be understood by those skilled in the art that the preferred embodiment of fig. 1 or fig. 3 is only an example, and in the technical solution of the present invention, the position relationship of the first point light source and/or the second point light source only needs to ensure that a certain illumination range effectively falls within the field of view of the ultra-telecentric lens, so that the preferred embodiment of fig. 1 or fig. 3 herein should not be considered as a limitation to the specific implementation of the present invention.
In a preferred embodiment of the present invention, as shown in fig. 5, there is also provided an image pickup apparatus including: an image sensor 560 and an imaging system as described above, wherein the image sensor 560 is used to capture an optical image output by the hyper-telecentric lens 510. Preferably, the target surface of the image sensor 560 is obliquely disposed with respect to the lens optical axis 511 of the hyper-telecentric lens 510 (shown at 561). In general, the photosensitive Device of the image sensor is a CMOS (Complementary Metal Oxide Semiconductor) or CCD (Charge Coupled Device) element, so the target surface of the image sensor described herein is preferably referred to as a CMOS target surface or a CCD target surface. The sensor is arranged in an inclined mode relative to the optical axis of the lens, so that the geometric deviation of the workpiece defect position can be deformed more clearly in the collected image, the light ray difference of the defect position can be better reflected, and the detection capability of the system to the workpiece defect is further improved. When the image sensor/camera 560 is obliquely arranged, an included angle T 'between a normal of the target surface of the image sensor/camera 560 and the optical axis 511 of the lens is tan (T'); t is the angle of the lens optical axis 511 relative to the normal of the stage 540, and M is the lens magnification, specifically, the lens magnification at the intersection of the lens optical axis 511 and the stage 540 (or with the workpiece upper surface/first to-be-imaged plane 550). Of course, the above-described tilt angle T' may have a deviation within 1 ° to 2 ° due to the presence of high-order aberrations.
Further, in an embodiment of the present invention, there is also provided a high-precision imaging method for obtaining images of a plurality of surfaces of an object to be detected using the imaging system as described above.
Still further, in an embodiment of the present invention, there is provided a detection apparatus, including a stage, an image capturing device (which may be in an inclined arrangement as in the embodiment of fig. 5), an image recognition device, and the imaging system as described above; the object carrying platform can carry an object to be tested and dynamically move the object to be tested into or out of the visual field range of the lens; the imaging system is used for projecting light rays to the article to be detected and outputting an optical image through the lens; the image acquisition device is used for acquiring the optical image; the image recognition device is used for recognizing the collected optical image so as to detect the defect condition of the object to be detected. Preferably, detecting the defect condition of the object to be detected refers to: and detecting whether the article to be detected has defects, and further detecting the positions and/or types of the defects when the defects exist.
It should be understood by those skilled in the art that the claims and the embodiments of the specification of the present invention are only examples of the preferred embodiments, and should not be construed as limiting the embodiments of the present invention. Typically, the subject in various positional relationships illustrated may be an objective subject, or the virtual image may be constructed by a plane mirror or other feasible means, so that the subject in various positional relationships is a virtual image of the objective subject. Those skilled in the art can make various conversions on various positional relationships of examples and their subjects without creative efforts, and the results of the conversions should be considered to be within the scope of the claims of the present invention.
In summary, embodiments of the present invention provide a high-precision imaging system, method, image capturing device and detection apparatus, which effectively improve the consistency of imaging and obtain a high-precision and stable workpiece image by the integrated corresponding arrangement of the hyper-telecentric lens and the point light source. More specifically, in the preferred embodiment of the invention, the imaging consistency of the part to be detected in the lens field of view is improved, the shape and/or color of the light-emitting region in the imaging system can be further improved, the defect imaging effect is further improved, the defects of the illumination and imaging system which affect the imaging stability are further eliminated, and the better realization of the machine vision dynamic detection is ensured.
It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explaining the principles of the invention and are not to be construed as limiting the invention. Therefore, any modification, equivalent replacement, improvement and the like made without departing from the spirit and scope of the present invention should be included in the protection scope of the present invention. Further, it is intended that the appended claims cover all such variations and modifications as fall within the scope and boundaries of the appended claims or the equivalents of such scope and boundaries.
Claims (21)
1. A high precision imaging system, characterized in that it comprises: a first point light source (120) and/or a second point light source (130), and an ultratelecentric lens (110); wherein the content of the first and second substances,
the super-telecentric lens (110) and the first point light source (120) are arranged on the same side of a first plane to be imaged; and/or
The super-telecentric lens (110) and the second point light source (130) are arranged on the same side of the second plane to be imaged.
2. The imaging system of claim 1, wherein the first point light source (120) and/or the second point light source (130) have more than two different color zones.
3. The imaging system of claim 2, wherein the first point light source (120) and/or the second point light source (130) have three different color zones distributed in a Y-shape.
4. The imaging system according to any one of claims 1-3, characterized in that a lens optical axis of the ultra-telecentric lens (110) is disposed obliquely with respect to the first plane to be imaged; and/or the lens optical axis of the super-telecentric lens (110) is obliquely arranged relative to the second plane to be imaged.
5. The imaging system of any of claims 1-3, wherein the first point source (120) has a center point O and a boundary point B, and an angle ^ OPB is not greater than 12 degrees for any point P within the hyper-telecentric lens view on the first plane to be imaged.
6. The imaging system according to any of claims 1-3, characterized in that the first point light source (120) and/or the second point light source (130) are generated by a display device.
7. The imaging system of claim 1, wherein in the imaging system:
the super-telecentric lens (110) is provided with a negative center, and the spatial distance between the mirror image point of the negative center of the super-telecentric lens (110) relative to the first plane to be imaged and the center of the first point light source (120) does not exceed a first error range; and/or
The spatial distance between the mirror image point of the negative center of the super-telecentric lens (110) relative to the second plane to be imaged and the center of the second point light source (130) does not exceed a first error range;
wherein the first error range is within 40 mm.
8. The imaging system of claim 7, wherein the first error range is within 20 mm.
9. A high precision imaging system, characterized in that it comprises: the system comprises an ultra-far-center lens (210), a first point light source (220) and a carrying platform (240); wherein the content of the first and second substances,
an included angle between a lens optical axis of the super-telecentric lens (210) and a normal of the carrying platform (240) is 15-70 degrees;
the first point light source (220) and the super-telecentric lens (210) are both arranged on a first side of the objective platform (240).
10. The imaging system of claim 9, further comprising a second point light source (230), the second point light source (230) disposed on a second side of the stage (240).
11. The imaging system of claim 9 or 10, wherein the ultra-telecentric lens (210) has a negative center that is no more than a first error range within less than 40mm from a point in space of a mirror image of the first side surface of the stage (240) to a center of the first point source (220).
12. The imaging system of claim 10, wherein a spatial distance between a mirror point of a negative center of the ultratelecentric lens (210) with respect to a vertical plane of the stage (240) and a center of the second point light source (230) does not exceed a first error range.
13. The imaging system of claim 9 or 10, wherein the first point light source (220) and/or the second point light source (230) have more than two different color zones.
14. The imaging system of claim 13, wherein the first point light source (220) and/or the second point light source (230) has three different color zones distributed in a Y-shape.
15. The imaging system of any of claims 9, 10, 12 or 14, wherein the first point light source (220) and/or the second point light source (230) is generated by a display device.
16. The imaging system of any of claims 9, 10, 12, or 14, wherein the first point source (220) has a center point O and a boundary point B, and an angle OPB is no greater than 12 degrees for any point P on the first side surface of the stage (240) within the hyper-telecentric view.
17. The imaging system of claim 11, wherein the first error range is within 20 mm.
18. An image capture device comprising an imaging system as claimed in any one of claims 1 to 17 and an image sensor for capturing an optical image output by the extra-telecentric lens.
19. The image capturing device as claimed in claim 18, wherein the target surface of the image sensor is disposed obliquely with respect to the lens optical axis of the hyper-telecentric lens.
20. A high precision imaging method, characterized in that images of surfaces of an object to be inspected are obtained using an imaging system according to any of claims 1-17.
21. A detection apparatus, comprising: a carrier platform, an image acquisition device, an image recognition device and an imaging system according to any one of claims 1-17; wherein the content of the first and second substances,
the object carrying platform can carry an object to be tested and dynamically move the object to be tested into or out of the visual field range of the lens;
the imaging system is used for projecting light rays to the article to be detected and outputting an optical image through the lens;
the image acquisition device is used for acquiring the optical image;
the image recognition device is used for recognizing the collected optical image so as to detect the defect condition of the object to be detected.
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