CN113447119A - Line spectrum confocal sensor - Google Patents
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- CN113447119A CN113447119A CN202110732230.7A CN202110732230A CN113447119A CN 113447119 A CN113447119 A CN 113447119A CN 202110732230 A CN202110732230 A CN 202110732230A CN 113447119 A CN113447119 A CN 113447119A
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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Abstract
A line-spectrum confocal sensor, comprising: the optical fiber dispersion objective comprises a first lens group and a second lens group which are sequentially arranged from an object side of the dispersion objective to an image side of the dispersion objective, wherein the first lens group is used for controlling the object side to be telecentric and carrying out preliminary dispersion on modulation and detection light, the second lens group is used for controlling the image side to be telecentric and further carrying out further dispersion on the modulation and detection light, the long focal length of the first lens group and the short focal length of the second lens group are matched to be used for controlling the zooming magnification between the object side of the dispersion objective and the image side of the dispersion objective, and the spectrometer is used for distinguishing the wavelength of an echo and generating images at different pixel positions on a camera. The line spectrum confocal sensor system designs the dispersion objective lens into a double telecentric structure, and can effectively ensure the consistency of the brightness and the precision of a measuring light spot projected onto a measured object.
Description
Technical Field
The invention belongs to the field of optics, and particularly relates to a line spectrum confocal sensor.
Background
With the rapid development of precision and ultra-precision manufacturing industry, the demand for high-precision detection is higher and higher, and thus high-precision displacement sensors are also produced. The precision of the ultra-precise displacement sensor can reach the micron level; although the traditional contact measurement has higher precision, the surface of a measured object may be scratched, and when the measured object is a weak rigid or soft material, the contact measurement also causes elastic deformation, which introduces measurement errors.
The spectrum confocal sensor is a device for establishing a corresponding relation between distance and wavelength by an optical dispersion principle and decoding spectrum information by a spectrometer so as to obtain position information, as shown in fig. 1, light emitted by a light source can be approximately regarded as a point light source after passing through an optical fiber coupler, the light is subjected to spectrum dispersion after being focused by a collimating and dispersing objective lens, monochromatic light focuses which are continuously distributed along different wavelengths in the optical axis direction are formed on an image surface, and the distances from the monochromatic light focus of each wavelength to a measured object are different. When the measured object is at a certain position in the measuring range, only the light with specific wavelength is in a focusing state on the measured surface, the light with the wavelength can be reflected back to the optical fiber coupler from the surface of the measured object and enter the spectrometer because the light meets the confocal condition, while the light with other wavelengths is in a defocusing state on the surface of the measured object, and the distribution of the reflected light at the light source is far larger than the diameter of the fiber core of the optical fiber, so most of the light with other wavelengths cannot enter the spectrometer. And decoding by a spectrometer to obtain the wavelength value of the maximum light intensity of the echo, thereby measuring the distance value corresponding to the measured object. The confocal technology is adopted, so the method has good chromatographic characteristics, improves the resolution and is insensitive to the characteristics of the measured object and the ambient stray light.
However, the line spectrum confocal sensor system has the following design difficulties:
(1) the problem of the consistency of the light channels at the non-central positions, namely the consistency of the properties of the spot size, the brightness and the like of a plurality of light channels. The light spots of the optical channels comprise measuring light spots projected to a measured object by the dispersive objective lens, light spots projected to the optical fiber by reflected light on the measured object and light spots projected to the camera by the spectrograph, if the light spots of the optical channels are inconsistent, detection data acquired by the optical channels cannot be unified, and the measurement reliability of the whole line spectrum confocal sensor system cannot be guaranteed.
For a point-spectrum confocal system, only one optical fiber is arranged to form one optical channel, and the position of the optical channel (optical fiber) is at the position of an optical axis, so that only on-axis aberration needs to be corrected, and the requirement of consistency is absent. However, for a line spectrum confocal system, which includes more than one hundred optical channels, each optical channel needs to generate dispersion within a certain range, and since there are many optical channels, the optical channel located at the non-optical axis is far from the optical axis, when performing dispersion and decoding, besides correcting on-axis aberration, it is necessary to correct off-axis aberration, such as coma, field curvature, astigmatism, and distortion, so as to ensure that the brightness, spot size, etc. of each optical channel are as consistent as possible, so how to design the optical path, especially the optical path of the dispersive objective lens and the spectrometer, so as to ensure the brightness uniformity and precision uniformity of hundreds of optical channels needs to be paid attention.
(2) The length of the line spectrum confocal sensor system is inconsistent with the resolution of the measuring light spot, for the line spectrum confocal sensor system, the longer the length of the line length is, the better the length can be scanned at one time, under the condition of determining the scanning area of the measured object, the longer the line length is, the larger the area can be scanned at one time, the faster the corresponding scanning speed can be completed, and the working efficiency is correspondingly improved; each optical channel is imaged at one point on the surface of the object, namely a measuring light spot is formed, the smaller the measuring light spot is, the higher the system resolution and precision are, namely the smaller the resolvable measured object size is, the larger the applicable measured object size range is.
The size of each measuring spot projected onto the measured object by each dispersive objective lens is related to the light passing size of the optical channel, the smaller the light passing size is, the smaller the measuring spot is, and the higher the resolution is, and the smaller the optical fiber diameter R is (the smaller the corresponding light passing size is generally), the shorter the corresponding line length L is. The problem can be solved by increasing the number of optical channels, but if the number of optical channels is simply increased, the contradiction between the line length and the resolution cannot be solved, because the number of optical channels (optical fibers) is increased, the problem of consistency of the optical channels at the non-central position is introduced, which causes the difficulty of designing the optical path to be overlarge, and meanwhile, the problems of high cost, overlarge volume and overlarge weight exist.
(3) Angle adaptability of the line spectrum confocal sensor system; the angular adaptability refers to the maximum inclination angle of a measurable sample, and if the angular characteristics are poor, a plurality of abnormal positions cannot be measured normally. The line spectral confocal sensor system also needs to have a sufficient measurement angle.
Disclosure of Invention
The invention aims to provide a line spectrum confocal sensor to solve the problems in the prior art.
To achieve the above object, the present invention provides a line-spectrum confocal sensor, including: the device comprises a light source, a light source optical fiber, a detection light path, a dispersion objective lens and a spectrometer, wherein the light source is used for generating detection light; the light source optical fiber is used for converting the detection light into modulation detection light and comprises a first light inlet end coupled with the light source and a first light outlet end coupled with the dispersion objective lens; the dispersion objective lens is used for carrying out axial dispersion on the modulation detection light, the dispersion objective lens comprises a first lens group and a second lens group which are sequentially arranged from an object side of the dispersion objective lens to an image side of the dispersion objective lens, the first lens group is used for controlling the object side to be telecentric and carrying out preliminary dispersion on the modulation detection light, the second lens group is used for controlling the image side to be telecentric and carrying out further dispersion on the modulation detection light, and the long focal length f1 of the first lens group and the short focal length f2 of the second lens group are matched for controlling the zoom magnification between the object side of the dispersion objective lens and the image side of the dispersion objective lens, wherein the object side of the dispersion objective lens is an optical fiber array at the first light outlet end, and the image side of the dispersion objective lens is a light spot projected by a line spectrum confocal sensor system; the spectrometer optical fiber is used for transferring the reflected light of the measured object to the spectrometer in a one-to-one correspondence manner, and comprises a second light inlet end coupled with the dispersion objective lens and a second light outlet end coupled with the spectrometer; the spectrometer is used for distinguishing the wavelength of the echo and generating images at different pixel positions on the camera.
Preferably, the zoom magnification between the object side of the dispersive objective lens and the image side of the dispersive objective lens is 0.04 to 0.5.
Preferably, the first lens group includes a first lens, a second lens and a third lens, which are coaxially disposed, wherein the first lens is configured to compress a beam aperture of the modulated detection light and control object-side telecentricity of the dispersive objective lens, and the second lens is configured to balance coma, astigmatism and distortion of the modulated detection light and further compress the beam to generate partial dispersion; the third lens is used for eliminating field curvature and distortion of the modulation detection light, controlling object space telecentricity of the dispersion objective lens, and controlling the focal length of the first lens group to be a long focal length by matching with the first lens and the second lens.
Preferably, the second lens group includes a first lens unit, a second lens unit, and a third lens unit coaxially disposed; the first lens unit is used for eliminating spherical aberration of the modulation detection light, controlling the focal length of the second lens group and controlling image space telecentricity; the second lens unit is used for balancing the spherical aberration and the coma aberration of the modulation detection light, compressing the beam divergence angle of the modulation detection light and further generating dispersion; the third lens unit is configured to remove residual spherical aberration, coma aberration, and astigmatism of the modulated detection light.
Further, the first lens is a positive long focal length lens, the focal length range is 200mm to 250mm, the second lens is a positive long focal length lens, the focal length range is 100mm to 150mm, the third lens is a negative small focal length lens, and the focal length range is-40 mm to 18 mm; the first lens unit comprises a fourth lens, the fourth lens is a negative middle focal length lens, and the focal length range is-100 mm to-80 mm; the second lens unit comprises a fifth lens, a sixth lens and a seventh lens which are sequentially connected, wherein the fifth lens is a positive long focal length lens, the focal length range is 110 mm-160 mm, the sixth lens is a positive long focal length lens, the focal length range is 120 mm-170 mm, the seventh lens is a positive long focal length lens, and the focal length range is 150 mm-200 mm; the third lens unit includes an eighth lens and a ninth lens connected in series; the eighth lens is a positive long-focus lens, the focal length range is 160mm to 210mm, the ninth lens is a positive short-focus lens, and the focal length range is 30mm to 60 mm.
Furthermore, the first lens is a positive meniscus lens and is arranged towards the object space of the dispersive objective lens, the second lens is a positive meniscus lens and is arranged towards the object space of the dispersive objective lens, and the third lens is a negative meniscus lens and is arranged towards the object space of the dispersive objective lens; the fourth lens is a biconcave lens; the fifth lens is a positive meniscus lens and is arranged towards the first image space, the sixth lens is a double-convex lens, and the seventh lens is a positive meniscus lens and is arranged towards the object space of the dispersive objective lens; the eighth lens is a positive meniscus lens and is arranged towards the object space of the dispersive objective lens, and the ninth lens is a positive meniscus lens and is arranged towards the object space of the dispersive objective lens.
Preferably, the spectrometer comprises a third lens group for collimation of the reflected light, a dispersive component for dispersion of the reflected light, and a fourth lens group; the fourth lens group is used for focusing the reflected light after dispersion and eliminating chromatic aberration of the reflected light; and the zoom ratio control of the spectrometer image space and the spectrometer object space is carried out through the cooperation of the third lens group focal length f3 and the fourth lens group focal length f4, wherein the spectrometer image space is an optical fiber array at the second light-emitting end, and the spectrometer image space is a spectral image collected on a camera.
Further, the zoom ratio of the image space and the object space of the spectrometer ranges from 0.1 to 0.8.
Further, the third lens group includes an eleventh lens, a twelfth lens, a thirteenth lens, and a fourteenth lens which are coaxially disposed; wherein the eleventh lens is used for balancing distortion and field curvature of the reflected light and compressing the beam diameter of the reflected light; the twelfth lens is used for balancing the field curvature and the distortion of the reflected light and further compressing the beam diameter of the reflected light; the thirteenth lens and the twelfth lens form a symmetrical structure for balancing distortion, astigmatism and curvature of field to form a large field of view; the fourteenth lens and the eleventh lens form a symmetrical structure for compensating residual coma aberration and astigmatism, and cooperate with the thirteenth lens and the twelfth lens to form a large field of view;
and/or the fourth lens group is used for converging the reflected light after dispersion, and the fourth lens group comprises a fifteenth lens, a sixteenth lens, a seventeenth lens, an eighteenth lens, a nineteenth lens and a twentieth lens which are coaxially arranged; the fifteenth lens is used for balancing coma aberration, astigmatism and spherical aberration in the reflected light and eliminating distortion; the sixteenth lens is used for compensating the spherical aberration and the coma aberration of the reflected light, controlling astigmatism and compressing a beam divergence angle of the reflected light; the seventeenth lens is used for further compressing the beam divergence angle of the reflected light and eliminating astigmatism and distortion; the eighteenth lens is used for controlling spherical aberration and coma aberration of the reflected light and further compressing a beam divergence angle of the reflected light; and the nineteenth lens and the twentieth lens are used for eliminating the reflected light chromatic aberration.
Furthermore, in the third lens group, the eleventh lens is a middle focal length lens, and the focal length range is 80mm to 120 mm; the twelfth lens is a negative middle focal length lens, and the focal length value range is-130 mm to-80 mm; the thirteenth lens is a negative long-focus lens, and the focus value range is-400 mm to-300 mm; the fourteenth lens is a middle focal length lens, and the focal length value range is 110mm to 150 mm;
in the fourth lens group, the fifteenth lens is a negative short-focal-length lens, and the focal length is in a range of-60 mm to-30 mm; the sixteenth lens is a middle focal length lens, and the focal length range is 80mm to 120 mm; the seventeenth lens is a middle focal length lens, and the focal length range is 50mm to 100 mm; the eighteenth lens is a positive short-focal-length lens, and the focal length value range is 30mm to 60 mm; the nineteenth lens and the twentieth lens form a cemented lens, wherein the nineteenth lens is a negative short-focal-length lens, and the focal length range is-40 mm to-10 mm; the twentieth lens is a positive short-focal-length lens, and the focal length range is 15mm to 50 mm.
Further, in the third lens group, the eleventh lens is a plano-convex lens; the twelfth lens is a meniscus lens and is arranged towards the image space of the spectrometer; the thirteenth lens is a meniscus lens and is arranged towards the object space of the spectrometer; the fourteenth lens is a meniscus lens and is arranged towards the image space of the spectrometer; the fifteenth lens is a biconcave lens; the sixteenth lens is a plano-convex lens; the seventeenth lens is a biconvex lens; the eighteenth lens is a biconvex lens; the focal length of the first composition cemented mirror ranges from-100 mm to-50 mm.
Preferably, the dispersion component is a reflective grating or a transmissive grating, so as to disperse the reflected light collimated by the third lens group, and the dispersed reflected light enters the fourth lens group;
further, the reflective grating or the transmissive grating is disposed obliquely, wherein the inclination angle ranges from 10 ° ± 10 °.
Preferably, the length of the optical fiber array of the light source optical fiber is 25mm-85 mm;
preferably, the length of the optical fiber array of the spectrometer optical fiber is 25mm-85 mm;
preferably, the line spectrum confocal sensor system further comprises a light equalizing component, wherein the light equalizing component is located between the light source and the light source optical fiber and used for equalizing the detection light and projecting the detection light into the light source optical fiber.
In the line spectrum confocal sensor, a light source is used for emitting detection light, a light source optical fiber is used for modulating the detection light and generating hundreds of uniform point light sources, a plurality of point light sources (namely, a first light outlet end) of the light source optical fiber are used as an object space of a dispersion objective lens, zooming is realized through the matching of a first lens group and a second lens group of the dispersion objective lens, and a reduced line is formed on an image surface, wherein the specific zooming magnification is f2/f 1; the image space telecentricity enables the chief ray of the marginal field of view to be parallel to the optical axis as well as the chief ray of the on-axis field of view, and ensures that the axes of the cone angles of the light reaching the target point are parallel to each other, thereby ensuring the consistency of the brightness and the precision of the measuring light spot projected on the measured object. After linear, dispersed and uniform measuring light spots formed by the dispersive objective lens are projected on a measured object, the linear, dispersed and uniform measuring light spots are matched with a motion platform which is perpendicular to a line and parallel to the line, and high-precision three-dimensional scanning and model reconstruction of a large object can be realized.
Drawings
FIG. 1 is a schematic diagram of the working principle of a spectral confocal sensor;
fig. 2 is a schematic structural diagram of an embodiment of the spectral confocal sensor of the present invention;
FIG. 3 is a schematic diagram of an optical path structure of an embodiment of a dispersive objective lens;
fig. 4 is a schematic diagram of an optical path structure of an embodiment of a spectrometer.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the scope of the invention in any way.
Like reference numerals refer to like elements throughout the specification. The expression "and/or" includes any and all combinations of one or more of the associated listed items. In the drawings, the thickness, size, and shape of an object have been slightly exaggerated for convenience of explanation. The figures are purely diagrammatic and not drawn to scale.
It will be further understood that the terms "comprises," "comprising," "includes," "including," "has," "includes" and/or "including," when used in this specification, specify the presence of stated features, steps, integers, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, steps, integers, operations, elements, components, and/or groups thereof.
The terms "substantially", "about" and the like as used in the specification are used as terms of approximation and not as terms of degree, and are intended to account for inherent deviations in measured or calculated values that would be recognized by one of ordinary skill in the art.
Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
As shown in fig. 2, the present invention provides a line spectrum confocal sensor, comprising: a light source 10, a light source optical fiber 20, a dispersion objective lens 30, a spectrometer optical fiber 40 and a spectrometer 50; the light source 10 is used for generating detection light; the light source fiber 20 comprises a first light inlet end 21 coupled with the light source and a first light outlet end 22 coupled with the dispersive objective lens 30, and the light source fiber 20 is used for converting the detection light into modulated detection light; the dispersion objective lens 30 is used for carrying out axial dispersion on the modulated detection light; as shown in fig. 3, the dispersive objective lens 30 includes a first lens group 31 and a second lens group 32 sequentially arranged from an object side of the dispersive objective lens to an image side of the dispersive objective lens, the first lens group 31 is configured to control the telecentricity of the object side and perform preliminary dispersion on the modulated detection light, the second lens group 32 is configured to control the telecentricity of the image side and further disperse the modulated detection light, and the long focal length f1 of the first lens group 31 and the short focal length f2 of the second lens group are used in cooperation with each other to control the zoom ratio between the object side of the dispersive objective lens and the image side of the dispersive objective lens, where the object side of the dispersive objective lens is the optical fiber array of the first light outlet 22, and the image side of the dispersive objective lens is the light spot projected by the line spectrum confocal sensor system; the spectrometer optical fiber 40 comprises a second light inlet end 41 coupled with the dispersive objective lens 30 and a second light outlet end 42 coupled with the spectrometer 50, the spectroscope 60 projects reflected light of a measured object to be transferred to the spectrometer optical fiber 40, the spectrometer optical fiber 40 is used for transferring the reflected light to the spectrometer 50 in a one-to-one correspondence manner, the spectrometer 50 is used for distinguishing the wavelength of an echo, and images are generated at different pixel positions on a camera.
In the line spectrum confocal sensor shown in the invention, a light source is used for emitting and generating detection light, a light source fiber 20 is used for modulating the detection light and generating hundreds of uniform point light sources, a plurality of point light sources (namely, a first light outlet end 22) of the light source fiber 20 are used as an object space of a dispersion objective lens 30, zooming is realized through the cooperation of a first lens group 31 and a second lens group 32 of the dispersion objective lens 30, and a reduced line is formed on an image surface, wherein the specific zooming magnification is f2/f1(f1 is the focal length of the first lens group 31, and f2 is the focal length of the second lens group 32), as the dispersion objective lens 30 uses a double telecentric light path to generate dispersion, the object space telecentric light path is that for a light path with non-coaxial edges, the same optical axes of a principal ray and an axial light are parallel, and the brightness among data points is ensured to be consistent; the image space telecentricity enables the chief ray of the marginal field of view to be parallel to the optical axis as well as the chief ray of the on-axis field of view, and ensures that the axes of the cone angles of the light reaching the target point are parallel to each other, thereby ensuring the consistency of the brightness and the precision of the measuring light spot projected on the measured object. After the linear, dispersed and uniform measurement light spots formed by the dispersive objective lens 30 are projected on a measured object, the linear, dispersed and uniform measurement light spots can be matched with a motion platform which is perpendicular to the line and parallel to the line, and high-precision three-dimensional scanning and model reconstruction of a large object can be realized. The modulated detection light is projected to a measured object through the dispersion objective lens 30, the light wavelengths of the focusing light spots at different heights are different, the modulated detection light returns through the dispersion objective lens 30 according to the original light path and is transmitted to the spectrometer through the spectrometer optical fiber 40, so that an image capable of judging the wavelength of the echo is formed on the camera, and the height of the corresponding position of the measured object can be calculated according to the wavelength.
In the line spectrum confocal sensor system, the light source type mainly includes incandescent lamp, halogen lamp, fluorescent lamp, gas discharge lamp (such as mercury lamp, sodium lamp, xenon lamp), LED, wherein the light source brightness and light source life are the key consideration factors of the line spectrum confocal sensor system light source selection, the brightness is the requirement of measuring different reflectivity surfaces, when measuring the object to be measured with lower reflectivity, if the light source brightness is insufficient, only the exposure time can be prolonged or the gain can be improved by the detector, the processing can obviously reduce the frame rate and the signal-to-noise ratio of the detector; short light source life can significantly increase light source replacement and equipment maintenance costs. In this embodiment, as a preferred scheme, the light source is an LED light source, which gives consideration to brightness, stability, lifetime, and uniformity of light spots, and the butt optical fiber has high coupling efficiency and large transmission luminous flux.
As mentioned above, in the line spectrum confocal sensor system, the more the number of optical fibers (optical channels) is, the longer the line length projected by the system is, and the higher the detection efficiency of the system is, but the more the number of optical fibers is, the larger the corresponding size of the optical device is, and the difficulty of the corresponding optical design is too high, so in the existing line spectrum confocal sensor system, the length of the optical fiber array is usually not more than 20 mm. In a preferred embodiment, in the line spectrum confocal sensor shown in the present invention, based on the structural design of the dispersive objective lens 30, the length of the light source fiber 20 is set to be 25mm to 85mm, and the zoom ratio between the object space of the dispersive objective lens 30 and the image space of the dispersive objective lens 30 is set to be 0.04 to 0.5, so as to improve the length of the line projected by the system as much as possible while ensuring the uniformity of the brightness and accuracy of the light spot projected to the object to be measured. In one embodiment, the focal length f1 of the first lens assembly 31 ranges from 500mm to 800mm, and the focal length f2 of the second lens assembly 32 ranges from 32mm to 250 mm. Of course, it is needless to say that in the line spectral confocal sensor system shown in the present invention, the optical fiber array may be set to be 25mm or less, such as 20mm as is conventional.
In addition, as a preferable scheme, in the present embodiment, a light equalizing element 70 is further disposed between the light source and the light source fiber 20, and the light equalizing element 70 is configured to uniformly process the detection light emitted by the light source and then enter the first light-entering end 21 of the light source fiber 20. In this embodiment, the number of optical channels of the light source fibers 20 is greater than the conventional number, and the length of the fiber array is long, so as to ensure that the detection light provided by the light source can effectively cover the whole light source fibers 20, a light equalizing component 70 is further disposed between the light source and the light source fibers 20 to expand and uniformly process the detection light provided by the light source to match the size of the fiber array, so that the detection light can completely cover the first light incident end 21 of the light source fibers 20, wherein the light equalizing component 70 can be a solid or hollow light equalizing rod.
After the detection light is modulated and split by the light source fiber 20, the modulated detection light formed by the plurality of point light sources at the first light outlet end 22 of the light source fiber 20 reaches the dispersion objective lens 30, and the dispersion objective lens 30 disperses the modulated detection light, so that the modulated detection light forms an extended, linear, dispersed and uniform-brightness measurement light spot in one direction on the measured object and is projected on the measured object.
In this embodiment, the objective lens 30 uses lens combinations with different curvatures, thicknesses and materials to control monochromatic aberrations including aberrations such as spherical aberration, coma, field curvature, astigmatism and distortion on the basis of maximizing chromatic dispersion, so that the system has a diffuse spot close to or reaching a diffraction limit level at different wavelengths, and has perfect imaging effect on different wavelengths in a light source spectrum, and the objective lens 30 does not use dispersive devices such as gratings, thereby realizing chromatic dispersion under a coaxial light path, and transmitting and receiving the same light path.
Specifically, as shown in fig. 3, the dispersive objective lens 30 includes a first lens group 31 for controlling object-side telecentricity and a second lens group 32 for controlling image-side telecentricity, wherein the object side of the dispersive objective lens 30 is the optical fiber array of the first light-emitting end 22, and the image side of the dispersive objective lens 30 is the projection light spot of the line spectrum confocal sensor system.
The first lens group 31 includes a first lens L1, a second lens L2, and a third lens L3 coaxially disposed, where the first lens L1 is used to compress the beam aperture of the modulation detection light, control object telecentricity, convert the light emitted by the optical fibers in the first light-emitting end 22 into spatial light and then reach the first lens L1, the first lens L1 preliminarily compresses each beam aperture and then reaches the second lens L2, and the second lens L2 is used to balance coma, astigmatism, and distortion of the modulation detection light, further compress the beam aperture of the modulation detection light, and generate partial dispersion; after the light beam tuned by the first lens L1 and the second lens L2 reaches the third lens L3, the third lens L3 is used to eliminate curvature of field and distortion of the modulated and detected light, control the object-side telecentricity, and control the focal length of the first lens group 31 to be a long focal length.
Wherein, the focal length adjustment of the first lens group 31 is realized by adjusting relevant parameters of the first lens L1, the second lens L2 and the third lens L3; and different arrangements of the main functions of the lenses are realized through curvature, thickness and material selection. In this embodiment, the first lens L1 is a positive long focal length lens, the focal length range is 200mm to 250mm, the second lens L2 is a positive long focal length lens, the focal length range is 100mm to 150mm, the third lens L3 is a negative small focal length lens, and the focal length range is-40 mm to 18 mm; furthermore, in the present embodiment, the first lens L1 is a positive meniscus lens disposed toward the object side of the dispersive lens, the second lens L2 is a positive meniscus lens disposed toward the object side of the dispersive lens, and the third lens L3 is a negative meniscus lens disposed toward the object side of the dispersive objective lens 30.
The second lens group 32 includes a first lens unit, a second lens unit, and a third lens unit that are coaxially disposed; the first lens unit is used for eliminating the spherical aberration of the modulated detection light, controlling the focal length of the second lens group 32, and controlling image space telecentricity, in this embodiment, the first lens unit includes a fourth lens L4, and the modulated detection light processed by the first lens group 31 passes through the fourth lens L4 to eliminate the spherical aberration of the modulated detection light; the second lens unit is used for balancing the spherical aberration and the coma aberration of the modulation detection light, compressing the beam divergence angle of the modulation detection light and further generating dispersion; in the present embodiment, the second lens unit includes a fifth lens L5, a sixth lens L6, and a seventh lens L7, which are coaxially arranged; the third lens unit is configured to remove residual spherical aberration, coma aberration, and astigmatism of the modulated detection light. In the present embodiment, the third lens unit includes an eighth lens L8 and a ninth lens L9 connected in series.
Wherein, the focal length adjustment of the second lens group 32 is realized by adjusting relevant parameters of the fourth lens L4, the fifth lens L5, the sixth lens L6, the seventh lens L7, the eighth lens L8 and the ninth lens L9; and different arrangements of the main functions of the lenses are realized through curvature, thickness and material selection. The fourth lens L4 is a negative middle focal length lens, and the focal length range is-100 mm to-80 mm; the second lens unit comprises a fifth lens L5, a sixth lens L6 and a seventh lens L7 which are sequentially connected, wherein the fifth lens L5 is a positive long focal length lens, the focal length range is 110 mm-160 mm, the sixth lens L6 is a positive long focal length lens, the focal length range is 120 mm-170 mm, the seventh lens L7 is a positive long focal length lens, and the focal length range is 150 mm-200 mm; the third lens unit includes an eighth lens L8 and a ninth lens L9 connected in series; the eighth lens L8 is a positive long focal length lens with a focal length ranging from 160mm to 210mm, and the ninth lens L9 is a positive short focal length lens with a focal length ranging from 30mm to 60 mm.
Further, the fourth lens L4 is a biconcave lens, the fifth lens L5 is a positive meniscus lens and is disposed toward the image space of the objective lens 30, the sixth lens L6 is a biconvex lens, the seventh lens L7 is a positive meniscus lens and is disposed toward the object space of the objective lens 30, the eighth lens L8 is a positive meniscus lens and is disposed toward the object space of the objective lens 30, and the ninth lens L9 is a positive meniscus lens and is disposed toward the object space of the objective lens 30.
The dispersion objective lens 30 is arranged through a double telecentric structure, the object space telecentricity and the image space telecentricity are respectively controlled, the line light sources in a large range can be equivalent, so that the dispersion of uniform line light sources is generated, the brightness and the accuracy consistency of measured light spots are ensured, the zooming is formed through the matching of the focal length f1 of the first lens group 31 and the focal length f2 of the second lens group 32, the zooming ratio beta of the dispersion objective lens 30 can be confirmed by adjusting the ratio of the f1 to the f2, and the control of the line length of the system can be realized according to actual requirements.
Meanwhile, the dispersion objective lens 30 is arranged in cooperation with the light source optical fiber 20, so that the angle adaptability, the angle size, the zoom magnification beta and the object numerical aperture NA of the system are effectively improved1In relation to this, the smaller the zoom factor beta is, the smaller the object numerical aperture NA1The larger the image-side numerical aperture NA2The larger the angle, the better the angular adaptability.
As shown in the above formula, the realization of large angle adaptability of image space is mainly determined by two aspects, one is to increase the object space aperture NA in the range smaller than the numerical aperture of the optical fiber1Numerical values, while improving the efficiency of the light source, would correspondingly increase the difficulty and complexity of the optical design, and compare the on-axis and off-axis aberrationsDifficult to eliminate; on the other hand, the zoom ratio of the whole dispersive mirror is determined, the smaller the zoom ratio is, the larger the image-side numerical aperture is under the condition that the object-side numerical aperture is fixed, but the zoom ratio is also limited by the transverse resolution of the dispersive mirror, so that the limit is large, and the change is not generally made.
In the line spectrum confocal system of the present invention, as described above, the zoom ratio of the dispersive objective lens 30 of the present invention is 0.04 to 0.5, and the objective aperture NA is increased as much as possible based on the zoom ratio1The numerical values are matched with each other, so that under the condition of large line length of the system, uniformity and precision of all points on the line are guaranteed to be consistent, and large angle adaptability on a target surface is realized, namely, light can return to an original optical fiber channel within the range of 90 degrees +/-35 degrees; the characteristics of large line length, high consistency and large angle are considered.
In addition, the chromatic dispersion objective 30 adopts a single group of lenses to generate chromatic aberration, corrects other chromatic aberration, and has convenient processing and simple production.
The reflected light reflected by the surface of the object to be measured is transmitted to the spectrometer through the spectrometer optical fiber 40, the spectrometer focuses the reflected light and quantifies the reflected light through the lens group arranged in the spectrometer, the quantified light wave generates a spectrum peak on the spectrometer, and the peak position of the spectrum curve and the wavelength focused on the surface of the object to be measured generate a corresponding relation for subsequent analysis.
In this embodiment, the length of the spectrometer optical fiber 40 is set to be 25mm to 85mm, the specific value is the same as the value of the light source optical fiber, the reflected light of the measured object reaches the spectrometer optical fiber 40 after passing through the dispersion objective lens 30 and the beam splitter prism 60, and the consistency of the light spot projected into the optical fiber by the reflected light of the measured object can be effectively ensured due to the arrangement of the dispersion objective lens 30.
As mentioned above, the consistency of the light spots projected by the spectrometer onto the camera affects the consistency of the light channels at non-central positions, so as to effectively receive the light source projected by the large-size spectrometer optical fiber 40 and ensure the consistency of the light spots projected by the spectrometer onto the camera, in this embodiment, as a preferred scheme, the spectrometer includes a third lens group, a dispersion component and a fourth lens group, wherein the third lens group is used for the collimation of the reflected light, and the dispersion component is used for the dispersion of the reflected light; the fourth lens group is used for focusing the reflected light after dispersion and eliminating chromatic aberration of the reflected light; and the zoom ratio control of the spectrometer image space/spectrometer object space is performed through the cooperation of the focal length f3 of the third lens group and the focal length f4 of the fourth lens group, wherein the spectrometer object space is the optical fiber array of the second light-emitting end 42, and the spectrometer image space is a spectral image collected by the camera.
The structure of a general spectrometer is generally a slit, a collimation component, a dispersion component, a focusing component, a camera and the like; the slit controls the size of an input light spot, the optical system only corrects the on-axis aberration, and the field of view only has an on-axis field of view. The line spectrum confocal spectrometer needs to simultaneously collimate, disperse, focus and measure the spectra of hundreds of channels, and simultaneously needs to ensure the uniformity and accuracy of each channel;
in order to realize consistency among channels, the spectrometer disclosed by the invention adopts a double telecentric design: the third lens group is telecentric on the object space with a long focal length, the diameter of a light beam is compressed, the uniformity of each channel after being collimated by the third lens group is ensured, and meanwhile, the symmetrical structure is adopted, so that the off-axis aberration is more easily balanced, and the object space view field is increased; the fourth lens group is used as a short-focus image space telecentric lens and forms a zooming relation with the third lens group in a matching manner, the imaging is zoomed to be matched with the size of the detector, a proper focal length is formed to focus the spectrum and adapt the detector, and the image space telecentric lens ensures the brightness consistency of all channels on the detector; from the light source, a light homogenizing device, a double telecentric dispersion mirror, a double telecentric spectrometer and the like are respectively arranged to ensure the brightness consistency of the light channel on the image surface of the final detector.
As a preferred scheme, the range of the zoom ratio of the image space and the object space of the spectrometer is 0.1 to 0.8. In one embodiment, the focal length f3 of the third lens assembly ranges from 150mm to 250mm, and the focal length f4 of the fourth lens assembly ranges from 25mm to 120 mm.
As a preferable aspect, as shown in fig. 4, the third lens group includes an eleventh lens L11, a twelfth lens L12, a thirteenth lens L13, and a fourteenth lens L14 coaxially disposed; the eleventh lens L11 is used for balancing the distortion and the field curvature of the reflected light and compressing the beam diameter of the reflected light; the twelfth lens L12 is used for balancing the curvature of field and distortion of the reflected light and further compressing the beam diameter of the reflected light; the thirteenth lens L13 and the twelfth lens L12 form a symmetrical structure for balancing distortion, astigmatism and curvature of field to form a large field of view; the fourteenth lens L14 and the eleventh lens L11 form a symmetrical structure for compensating the residual coma aberration and astigmatism to form a large field of view, and zoom control of the image side/object side of the spectrometer is performed through the cooperation of the L13 group of the thirteenth lens and the focal length of the L11 group of the fourth lens. As mentioned above, the length of the spectrometer optical fiber 40 is set to be 25mm to 85mm, the number of optical channels of the spectrometer optical fiber 40 exceeds the conventional number, and the length of the optical fiber array is large, so that the large field of view of the spectrometer is effectively realized through the symmetrical structure in the embodiment, and the reflected light energy transmitted by the spectrometer optical fiber is effectively received by the spectrometer.
The focal length of the third lens group can be adjusted by adjusting relevant parameters of the eleventh lens L11, the twelfth lens L12, the thirteenth lens L13 and the fourteenth lens L14, and different settings of main functions of the lenses are realized through curvature, thickness and material selection. Further, the eleventh lens L11 is a middle focal length lens, and the focal length range is 80mm to 120 mm; the twelfth lens L12 is a negative middle focal length lens, and the focal length value range is-130 mm to-80 mm; the thirteenth lens L13 is a negative long-focus lens, and the focal length is in the range of-400 mm to-300 mm; the fourteenth lens L14 is a middle focal length lens, and the focal length range is 110mm to 150 mm.
In this embodiment, furthermore, the eleventh lens L11 is a plano-convex lens for balancing the distortion and curvature of field of the reflected light and compressing the beam diameter of the reflected light; the twelfth lens L12 is a meniscus lens, is arranged towards the image space of the spectrometer, and is used for balancing the field curvature and distortion of the reflected light and further compressing the beam diameter of the reflected light; the thirteenth lens L13 is a meniscus lens and is arranged towards the object space of the spectrometer, and forms a symmetrical structure with the twelfth lens L12 for balancing distortion, astigmatism and field curvature to form a large field of view; the fourteenth lens L14 is a meniscus lens and is disposed toward the image side of the spectrometer, and forms a symmetrical structure with the eleventh lens L11 to compensate the residual coma aberration and astigmatism, so as to form a large field of view.
In this embodiment, the dispersion component is a reflective grating or a transmissive grating to disperse the collimated reflected light passing through the third lens group, and the dispersed reflected light enters the fourth lens group.
The fourth lens group is used for focusing the dispersed reflected light and comprises a fifteenth lens L15, a sixteenth lens L16, a seventeenth lens L17, an eighteenth lens L18, a nineteenth lens L19 and a twentieth lens L20 which are coaxially arranged; wherein the fifteenth lens L15 is used for balancing coma, astigmatism and spherical aberration in the reflected light to eliminate distortion; the sixteenth lens L16 is used to compensate for spherical aberration and coma aberration of the reflected light, control astigmatism, and compress a beam divergence angle of the reflected light; the seventeenth lens L17 is used for further compressing the beam divergence angle of the reflected light and eliminating astigmatism and distortion; the eighteenth lens L18 is configured to control spherical aberration and coma aberration of the reflected light, and further compress a beam divergence angle of the reflected light; the nineteenth lens L19 and the twentieth lens L20 cooperate to eliminate chromatic aberration.
The focal length adjustment of the third lens group can be realized by adjusting relevant parameters of the eleventh lens L11, the twelfth lens L12, the thirteenth lens L13 and the fourteenth lens L14, and different settings of the main functions of the above lenses can be realized through curvature, thickness and material selection.
Further, in the fourth lens group, the fifteenth lens L15 is a negative short focal length lens, and the focal length value range is-60 mm to-30 mm; the sixteenth lens L16 is a middle focal length lens, and the focal length range is 80mm to 120 mm; the seventeenth lens L17 is a middle focal length lens, and the focal length range is 50mm to 100 mm; the eighteenth lens L18 is a positive short-focal-length lens, and the focal length value range is 30mm to 60 mm; the nineteenth lens L19 and the twentieth lens L20 form a cemented mirror, wherein the nineteenth lens L19 is a negative short-focal-length lens, and the focal length ranges from-40 mm to-10 mm; the twentieth lens L20 is a positive short-focal-length lens, and the focal length is in the range of 15mm to 50 mm.
Furthermore, in the present embodiment, the fifteenth lens L15 is a biconcave lens for balancing coma, astigmatism and spherical aberration in the reflected light and eliminating distortion; the sixteenth lens L16 is a plano-convex lens, and is used for compensating spherical aberration and coma aberration of reflected light and controlling astigmatism; compressing the beam divergence angle; the seventeenth lens L17 is a biconvex lens for further compressing the divergence angle of the reflected light beam; eliminating astigmatism and distortion; the eighteenth lens L18 is a biconvex lens, is used for controlling spherical aberration and coma aberration of the reflected light, is a main condenser element, and is used for further compressing the divergence angle of the reflected light beam; the nineteenth lens L19 and the twentieth lens L20 are constituent cemented lenses for eliminating chromatic aberration.
In addition, in the present embodiment, the grating is inclined by an angle in the range of 10 ° ± 10 ° for eliminating stray light. The incident light is dispersed by the dispersion objective lens 30 to generate reflected light, diffracted light of 0 th order, ± 1 st order, ± 2 nd order …, etc., generally, in order to achieve both efficiency and resolution, light of +1 st order or-1 st order is used, and in this case, the reflected light and diffracted light of other diffraction orders become stray light. In order to improve the signal-to-noise ratio of the system, in this embodiment, the grating is installed in an inclined manner, the angle is 10 ° ± 10 °, that is, the grating is inclined at a certain angle, or the angle of the grating is set to 0 degree, so as to prevent reflected light from being reflected to the vicinity of the end face of the optical fiber to form stray light, and in addition, in this embodiment, the inner side of the lens barrel is blackened to eliminate diffracted light of the remaining orders.
In addition, the spectral confocal sensor shown in the invention also takes into account the matching problem of the spectral consistency of the source optical fiber 20, the dispersive mirror, the spectrometer optical fiber 40, and the spectrometer; the source optical fiber 20 and the spectrometer optical fiber 40 have the optimal light passing wavelength due to the limitation of materials, the dispersion mirror has the design wavelength, and the dispersion device in the spectrometer also has the requirement of adapting to the wavelength.
The above-mentioned serial numbers of the embodiments of the present invention are merely for description and do not represent the merits of the embodiments.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (12)
1. A line-spectrum confocal sensor, comprising: light source, light source optic fibre, detection light path, dispersion objective, spectrum appearance, its characterized in that:
the light source is used for generating detection light;
the light source optical fiber is used for converting the detection light into modulation detection light and comprises a first light inlet end coupled with the light source and a first light outlet end coupled with the dispersion objective lens;
the dispersion objective lens is used for carrying out axial dispersion on the modulation detection light, the dispersion objective lens comprises a first lens group and a second lens group which are sequentially arranged from an object side of the dispersion objective lens to an image side of the dispersion objective lens, the first lens group is used for controlling the object side to be telecentric and carrying out preliminary dispersion on the modulation detection light, the second lens group is used for controlling the image side to be telecentric and carrying out further dispersion on the modulation detection light, and the long focal length f1 of the first lens group and the short focal length f2 of the second lens group are matched for controlling the zoom magnification between the object side of the dispersion objective lens and the image side of the dispersion objective lens, wherein the object side of the dispersion objective lens is an optical fiber array at the first light outlet end, and the image side of the dispersion objective lens is a light spot projected by a line spectrum confocal sensor system;
the spectrometer optical fiber is used for transferring the reflected light of the measured object to the spectrometer in a one-to-one correspondence manner, and comprises a second light inlet end coupled with the dispersion objective lens and a second light outlet end coupled with the spectrometer;
the spectrometer is used for distinguishing the wavelength of the echo and generating images at different pixel positions on the camera.
2. The line-spectrum confocal sensor of claim 1, wherein: the zoom magnification between the object side of the dispersive objective lens and the image side of the dispersive objective lens is 0.04 to 0.5.
3. The line-spectrum confocal sensor of claim 1, wherein: the first lens group comprises a first lens, a second lens and a third lens which are coaxially arranged, wherein the first lens is used for compressing the beam aperture of the modulation detection light and controlling the object-side telecentricity of the dispersion objective lens, and the second lens is used for balancing the coma aberration, astigmatism and distortion of the modulation detection light and further compressing the beam to generate partial dispersion; the third lens is used for eliminating field curvature and distortion of the modulation detection light, controlling object space telecentricity of the dispersion objective lens, and controlling the focal length of the first lens group to be a long focal length by matching with the first lens and the second lens;
and/or the second lens group comprises a first lens unit, a second lens unit and a third lens unit which are coaxially arranged; the first lens unit is used for eliminating spherical aberration of the modulation detection light, controlling the focal length of the second lens group and controlling image space telecentricity; the second lens unit is used for balancing the spherical aberration and the coma aberration of the modulation detection light, compressing the beam divergence angle of the modulation detection light and further generating dispersion; the third lens unit is configured to remove residual spherical aberration, coma aberration, and astigmatism of the modulated detection light.
4. The confocal sensor of claim 3, wherein the first lens is a positive long focal length lens with a focal length ranging from 200mm to 250mm, the second lens is a positive long focal length lens with a focal length ranging from 100mm to 150mm, the third lens is a negative small focal length lens with a focal length ranging from-40 mm to 18 mm; the first lens unit comprises a fourth lens, the fourth lens is a negative middle focal length lens, and the focal length range is-100 mm to-80 mm; the second lens unit comprises a fifth lens, a sixth lens and a seventh lens which are sequentially connected, wherein the fifth lens is a positive long focal length lens, the focal length range is 110 mm-160 mm, the sixth lens is a positive long focal length lens, the focal length range is 120 mm-170 mm, the seventh lens is a positive long focal length lens, and the focal length range is 150 mm-200 mm; the third lens unit includes an eighth lens and a ninth lens connected in series; the eighth lens is a positive long-focus lens, the focal length range is 160mm to 210mm, the ninth lens is a positive short-focus lens, and the focal length range is 30mm to 60 mm.
5. The confocal sensor of claim 4, wherein the first lens is a positive meniscus lens disposed toward the objective of the dispersive objective, the second lens is a positive meniscus lens disposed toward the objective of the dispersive objective, and the third lens is a negative meniscus lens disposed toward the objective of the dispersive objective; the fourth lens is a biconcave lens; the fifth lens is a positive meniscus lens and is arranged towards the first image space, the sixth lens is a double-convex lens, and the seventh lens is a positive meniscus lens and is arranged towards the object space of the dispersive objective lens; the eighth lens is a positive meniscus lens and is arranged towards the object space of the dispersive objective lens, and the ninth lens is a positive meniscus lens and is arranged towards the object space of the dispersive objective lens.
6. The line-spectrum confocal sensor of claim 1, wherein: the spectrometer comprises a third lens group, a dispersion component and a fourth lens group, wherein the third lens group is used for the parallel of the reflected light, and the dispersion component is used for the dispersion of the reflected light; the fourth lens group is used for focusing the reflected light after dispersion and eliminating chromatic aberration of the reflected light; and the zoom ratio control of the spectrometer image space and the spectrometer object space is carried out through the cooperation of the third lens group focal length f3 and the fourth lens group focal length f4, wherein the spectrometer image space is an optical fiber array at the second light-emitting end, and the spectrometer image space is a spectral image collected on a camera.
7. The line-spectrum confocal sensor of claim 6, wherein: the zoom ratio value range of the image space and the object space of the spectrograph is 0.1-0.8.
8. The line-spectrum confocal sensor of claim 6, wherein: the third lens group includes an eleventh lens, a twelfth lens, a thirteenth lens and a fourteenth lens which are coaxially arranged; wherein the eleventh lens is used for balancing distortion and field curvature of the reflected light and compressing the beam diameter of the reflected light; the twelfth lens is used for balancing the field curvature and the distortion of the reflected light and further compressing the beam diameter of the reflected light; the thirteenth lens and the twelfth lens form a symmetrical structure for balancing distortion, astigmatism and curvature of field to form a large field of view; the fourteenth lens and the eleventh lens form a symmetrical structure for compensating residual coma aberration and astigmatism, and cooperate with the thirteenth lens and the twelfth lens to form a large field of view;
and/or the fourth lens group is used for converging the reflected light after dispersion, and the fourth lens group comprises a fifteenth lens, a sixteenth lens, a seventeenth lens, an eighteenth lens, a nineteenth lens and a twentieth lens which are coaxially arranged; the fifteenth lens is used for balancing coma aberration, astigmatism and spherical aberration in the reflected light and eliminating distortion; the sixteenth lens is used for compensating the spherical aberration and the coma aberration of the reflected light, controlling astigmatism and compressing a beam divergence angle of the reflected light; the seventeenth lens is used for further compressing the beam divergence angle of the reflected light and eliminating astigmatism and distortion; the eighteenth lens is used for controlling spherical aberration and coma aberration of the reflected light and further compressing a beam divergence angle of the reflected light; and the nineteenth lens and the twentieth lens are used for eliminating the reflected light chromatic aberration.
9. The line-spectrum confocal sensor of claim 8, wherein: in the third lens group, the eleventh lens is a middle focal length lens, and the focal length range is 80mm to 120 mm; the twelfth lens is a negative middle focal length lens, and the focal length value range is-130 mm to-80 mm; the thirteenth lens is a negative long-focus lens, and the focus value range is-400 mm to-300 mm; the fourteenth lens is a middle focal length lens, and the focal length value range is 110mm to 150 mm;
in the fourth lens group, the fifteenth lens is a negative short-focal-length lens, and the focal length is in a range of-60 mm to-30 mm; the sixteenth lens is a middle focal length lens, and the focal length range is 80mm to 120 mm; the seventeenth lens is a middle focal length lens, and the focal length range is 50mm to 100 mm; the eighteenth lens is a positive short-focal-length lens, and the focal length value range is 30mm to 60 mm; the nineteenth lens and the twentieth lens form a cemented lens, wherein the nineteenth lens is a negative short-focal-length lens, and the focal length range is-40 mm to-10 mm; the twentieth lens is a positive short-focal-length lens, and the focal length range is 15mm to 50 mm.
10. The line-spectrum confocal sensor of claim 9, wherein: in the third lens group, the eleventh lens is a plano-convex lens; the twelfth lens is a meniscus lens and is arranged towards the image space of the spectrometer; the thirteenth lens is a meniscus lens and is arranged towards the object space of the spectrometer; the fourteenth lens is a meniscus lens and is arranged towards the image space of the spectrometer; the fifteenth lens is a biconcave lens; the sixteenth lens is a plano-convex lens; the seventeenth lens is a biconvex lens; the eighteenth lens is a biconvex lens; the focal length of the first composition cemented mirror ranges from-100 mm to-50 mm.
11. The line-spectrum confocal sensor of claim 6, wherein: the dispersion component is a reflection grating or a transmission grating, so as to disperse the reflected light after being collimated by the third lens group, and the reflected light after being dispersed is incident to the fourth lens group;
further, the reflective grating or the transmissive grating is disposed obliquely, wherein the inclination angle ranges from 10 ° ± 10 °.
12. The line-spectrum confocal sensor of claim 1, wherein: the length of the optical fiber array of the light source optical fiber is 25mm-85 mm;
and/or the length of the optical fiber array of the optical fiber of the spectrometer is 25mm-85 mm;
and/or, the line spectrum confocal sensor system also comprises a light-equalizing component, wherein the light-equalizing component is positioned between the light source and the light source optical fiber and is used for equalizing the detection light and projecting the detection light into the light source optical fiber.
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| CN212843416U (en) * | 2020-07-15 | 2021-03-30 | 大族激光科技产业集团股份有限公司 | Optical system, dispersion lens and spectrum measuring device |
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| CN115597711A (en) * | 2022-12-16 | 2023-01-13 | 聚时科技（深圳）有限公司（Cn） | Spectrometer and light path design method thereof |
| CN116892883A (en) * | 2023-09-11 | 2023-10-17 | 深圳市深视智能科技有限公司 | Inclination displacement sensor and optical anti-shake system |
| CN116892883B (en) * | 2023-09-11 | 2023-11-28 | 深圳市深视智能科技有限公司 | Inclination displacement sensor and optical anti-shake system |
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