CN1134321A - Cleaning apparatus - Google Patents

Cleaning apparatus Download PDF

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Publication number
CN1134321A
CN1134321A CN 95105729 CN95105729A CN1134321A CN 1134321 A CN1134321 A CN 1134321A CN 95105729 CN95105729 CN 95105729 CN 95105729 A CN95105729 A CN 95105729A CN 1134321 A CN1134321 A CN 1134321A
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China
Prior art keywords
heat
steam
cleaning
clean room
exchanging piece
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Granted
Application number
CN 95105729
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Chinese (zh)
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CN1080147C (en
Inventor
武田丰
纸谷守
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Chugai Ro Co Ltd
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Chugai Ro Co Ltd
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Priority to CN95105729A priority Critical patent/CN1080147C/en
Publication of CN1134321A publication Critical patent/CN1134321A/en
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Publication of CN1080147C publication Critical patent/CN1080147C/en
Anticipated expiration legal-status Critical
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  • Cleaning By Liquid Or Steam (AREA)

Abstract

The cleaning apparatus includes a sealed cleaning chamber containing workpiece to be cleaned, an organic solvent vapour generator connected through pipeline to the chamber and a vacuum pump for evacuating the chamber. Heat exchanger cooling medium passes through is over the chamber. After the chamber is pressure reduced, cooling medium is supplied to the heat exchanger while organic solvent vapour is induced from the vapour generator to the chamber.

Description

Cleaning device
The present invention relates to a kind of cleaning device, particularly a kind of cleaning device that has the element part (being called workpiece hereinafter) of oil or similar adhesion by the organic vapor cleaning.
Type for cleaning device, by convention, as Japanese unexamined disclose 54-113965 number and Japanese Utility Model do not examine disclose among the 63-193588 represented, known cleaning device comprises the clean room of a vacuum tightness structure, an organic vapor generation tank (being called steam generating tank hereinafter), it links to each other with clean room by means of pipe, the vavuum pump of the clean room that is used to find time.
In this cleaning device, organic vapor (being called steam hereinafter) is admitted to clean room from steam generating tank, and the steam of being supplied with contacts with the surface of the workpiece of adorning in the clean room, and being condensed at this steam becomes condensate water.The organic solvent fluid of condensation flows on surface of the work and falls then, finishes cleaning thus.
But common above-mentioned cleaning device can run into following problem.That is, workpiece surface temperature is increased to the temperature that equals steam gradually, makes steam stop liquefaction.No longer carry out cleaning steam, the result has shortened cleaning time, causes bad cleaning.Another problem is, when workpiece is a kind of parts of difficult cleaning, the parts that complex appearance is for example arranged, the parts that the high-viscosity oil adhesion is arranged, or when the parts of big gauging adhesion are arranged, can not begin cleaning again, reducing up to workpiece surface temperature is enough to interrupt the steam supply, and the result needs the long processing time.
Also have another problem to be, when the used low temperature clean liquid that is accumulated in the clean room bottom was sent back to steam generating tank, the organic solvent temperature in jar became lower, and steam generating amount is reduced, and the steam supply reduces.As a result, can not reach sufficient cleaning, particularly to the above-mentioned parts that are difficult to clean.
The purpose of this invention is to provide a kind of cleaning device, it can finish sufficient cleaning steam by the increase of control workpiece surface temperature, that utilizes attaching simple and mechanically finishes above-mentioned work, and it can carry out sufficient cleaning steam at short notice, even if work is as above-mentioned difficult cleaning member.
In order to finish above-mentioned purpose, according to a first aspect of the invention, a kind of cleaning device is provided, it comprises the clean room of a vacuum seal structure, wherein contain the work that to clean, an organic vapor generation tank that communicates with clean room by the road, and the vavuum pump of the clean room that is used to find time, wherein stream has the heat-exchanging piece of cooling medium to be arranged on the upside of this clean room.
In cleaning device according to a first aspect of the invention, when workpiece is put into clean room, by vavuum pump clean room is found time, cooling medium is supplied with heat-exchanging piece, then organic vapor is imported clean room from steam generating tank, the organic vapor drop that condensation and dewfall becomes on working surface, organic solvent fluid drop on the working surface and flow, and cause the cleaning of work.Simultaneously, with the liquefaction of the contacted steam of heat-exchanging piece, fall in the work as shower.As a result, the surface temperature of shower restraint of labour raises, and makes the workpiece cleaning simultaneously.After having finished cleaning, heat-exchanging piece is given in the cooling medium stop supplies, and workpiece is heated by steam and makes it dry.
Therefore, according to a first aspect of the invention, in cleaning steam technology, cooling medium is supplied with the heat-exchanging piece that is arranged on clean room, so organic vapor is liquefied by heat-exchanging piece, make it to drop onto on the workpiece, suppressed because the raising of steam workpiece surface temperature.As a result, compare, can control cleaning time arbitrarily, thereby can clean any workpiece fully with common cleaning device.
In addition, except that common cleaning steam, carry out so-calledly carrying out shower cleaning by liquefaction solvent.Therefore, compare with common device and improved cleaning effect significantly.
According to a second aspect of the invention, be provided with a kind of cleaning device, wherein organic vapor generation tank inside is divided into steam generating chamber and waste liquid and reclaims the chamber, by the road these two jars each communicate with clean room.
Clean room according to a second aspect of the invention, the used cleaning solution of being made up of organic solvent is recycled in the waste liquid recovery chamber, above-mentioned organic solvent is that the cleaning that has been used for clean room is liquefied, above-mentioned recovery chamber is independent of steam generating chamber, so, the temperature of the organic solvent that heats in steam generating tank reduces, or worsens that to add thermal effect then be impossible.Therefore, can stably provide steam.
Therefore, according to a second aspect of the invention, will can not sneak into steam generating chamber to the liquefaction organic solvent of low temperature.So, improved the efficiency of heating surface of organic solvent, stably produce steam simultaneously, so that improve cleaning effect.
According to a third aspect of the invention we, provide a kind of cleaning device, two steam generating tanks wherein are provided at least, between them, change if desired.
Cleaning device according to a third aspect of the invention we, if carry out the workpiece cleaning by a steam generating tank after, the cleaning solution with crossing that has been accumulated in the low temperature of clean room bottom turns back to the words of steam generating tank, then the organic solvent temperature in the jar then can become lower, therefore, this steam generating tank is redirect to another, under this state, clean in the above described manner.
Therefore, according to a third aspect of the invention we, this cleaning device is made up of two or more independent steam generating tanks.So,, also can continue cleaning steam by being transformed into another steam generating tank even the organic solvent in a steam generating tank is because the low temperature organic solvent that liquefies in the clean room turns back in the jar, and temperature reduces.In view of the above, can stably carry out cleaning steam many times continuously, and not be subjected to the influence of any reduction of solvent temperature.In addition, can shorten cleaning cycle.In addition, even workpiece is when resembling such workpiece that is difficult to clean of complex appearance, also can clean it repeatedly in the short period.
According to a forth aspect of the invention, provide a kind of cleaning device, wherein heat-exchanging piece both can also can selectively be provided by heat medium by cooling medium.
In the cleaning device according to fourth aspect present invention, the cleaning procedure that is undertaken by steam and drop is that the cooling medium that passes through to be provided carries out, and on the contrary, what the heat medium that using is provided carried out only is the cleaning procedure that is undertaken by steam.
Therefore, according to a forth aspect of the invention, cooperate oil effective cleaning of level of adhesion of workpiece to be finished by suitably selecting cooling medium and heat medium to make up by the cleaning that will be undertaken by shower and the cleaning of being undertaken by steam.Further,, can from low temperature to high temperature, promptly change, so cleaning steam technology can next at short notice Steam Heating technology continues by the temperature that heat medium is offered the heat-exchanging piece heat-exchanging piece because after cleaning procedure.Therefore shortened the process time that is used to clean.
As the alternative of fourth aspect, this cleaning device can further be made up of the heater that is used to heat the cooling medium that is provided in heat-exchanging piece.
In addition, according to the cleaning device of above-mentioned either side, preferably, a porous member is installed below heat-exchanging piece, is made liquid pass porous member and drop onto equably on the workpiece, described liquid is by heat-exchanging piece condensation from organic vapor.
In addition, this cleaning device also comprises a releasing device, is used for when the stop supplies cooling medium cooling medium in the discharging heat-exchanging piece.
With reference to accompanying drawing, by following explanation to most preferred embodiment of the present invention, further purpose advantage of the present invention will become apparent.Wherein:
Fig. 1 is the diagrammatic cross-sectional view according to first embodiment of cleaning device of the present invention;
Fig. 2 is the diagrammatic cross-sectional view according to second embodiment of cleaning device of the present invention;
Fig. 3 is the flow chart of the cleaning of presentation graphs 1 device;
Fig. 4 is the diagrammatic cross-sectional view according to the 3rd embodiment of cleaning device of the present invention;
Fig. 5 is the flow chart of presentation graphs 4 device cleanings;
Fig. 6 is the diagrammatic cross-sectional view according to the 4th embodiment of cleaning device of the present invention;
Fig. 7 is the presentation graphs flow chart of 6 device cleaning phase I;
Fig. 8 is the flow chart of presentation graphs 6 device cleaning second stage;
Fig. 9 is the view that example is improved in first of presentation graphs 1,2 and 4;
Figure 10 is the view that example is improved in second of presentation graphs 1,2,4 and 6;
Figure 11 is the view that example is improved in the 3rd of presentation graphs 1,2,4 and 6.
Fig. 1 shows first embodiment according to cleaning device of the present invention.
This cleaning device generally is made up of the clean room 1 that has heat-exchanging piece 3, steam generating tank 4 and vavuum pump 6.
Clean room 1 is a vacuum seal structure, and has a door 2.Heater 9 is embedded in the wall of clean room 1.
Heat-exchanging piece 3 is made of finned tube, and is positioned at the upside of clean room 1, has valve V 1Cooling medium supply pipe P 1Link to each other with the inlet side of heat-exchanging piece 3, and have flow control valve V cPipe P 4Be connected to outlet side.Therefore, can offer heat-exchanging piece 3 to cooling medium.
Steam generating tank 4 be set at clean room 1 below, have a heater 5 that is used to heat organic solvent S therein.The top of steam generating tank 4 is through steam generation valve V 3With time liquid valve V 4Link up mutually with the bottom of clean room 1.
Vavuum pump 6 is through pipe P 3 Clean room 1 is vacuumized, and import valve Va through air, main evacuation valve Vb and condenser 7 communicate with the inside of clean room 1.
The working condition of the cleaning device of said structure is described with reference to Fig. 1 and 3 after this.
At first, open door 2, the workpiece w that is positioned on the workbench 8 is put into clean room 1, close and call 2.
Then, open along with driving vavuum pump 6 and main evacuation valve vb, clean room 1 is evacuated to and is not more than 1.4 * 10 3Pa (10 holder) closes main evacuation valve then.Simultaneously, along with opening valve V 1With flow control valve Vc, cooling medium is offered heat-exchanging piece 3.
Then, as steam importing valve V 3With time liquid valve V 4When being opened, the steam that produces in the steam generating tank 4 imports valve V through steam 3Under differential pressure action, be imported into clean room 1.Because the condensation on the surface of workpiece w of the underlaying surface temperature of workpiece w, the steam that is imported becomes dew.This dew generates on the whole surface of workpiece w, thereby falls, and finishes the cleaning steam of workpiece w thus.
Related to this is, if the surface temperature of workpiece w increases with contacting gradually of workpiece w surface by steam, make the temperature equal steam, and if the internal pressure of saturated vapour pressure and clean room 1 become consistent with each other, cleaning steam then is impossible (prior art).But in this embodiment, cooling medium passes heat-exchanging piece 3, makes that the temperature of heat-exchanging piece 3 is under normal circumstances low than vapor (steam) temperature.Therefore, the steam that imports clean room 1 by with the liquefaction that contacts of heat-exchanging piece 3, last fluid drips is fallen on the workpiece w.Drop cools off the surface temperature of workpiece w below vapor (steam) temperature.As a result, cleaning steam is proceeded.
In addition, except with the cleaning steam, can carry out so-called shower cleaning by discharge drop from heat-exchanging piece 3.Therefore, cleaning effect is further strengthened.Fallen the organic solvent s of union and passed through back liquid valve V in clean room 1 bottom 4Turn back to steam generating tank 4.
Now, the surface of workpiece w, shut off valve V have fully been cleaned with aforesaid way 1, make cooling medium stop to offer heat-exchanging piece 3.Simultaneously, steam is continued to import clean room 1, whereby, and by Steam Heating workpiece w.
Then, after implementing Steam Heating one special time, steam off imports valve V 3With time liquid valve V 4, open main evacuation valve Vb then, make vavuum pump 6 work.Therefore, along with the reduction of the internal pressure of clean room 1, workpiece w is carried out drying process and handles.Liquefy and regeneration by condenser 7 from the steam of clean room sucking-off.
According to finishing of drying process, close main evacuation valve Vb, vavuum pump 6 quits work, and opens air and imports valve Va, and the internal pressure of clean room 1 is restored, and then, along with opening door 2, workpiece w is removed.Therefore, finish the cleaning of workpiece w, afterwards, clean next workpiece w with above-mentioned same mode.
Be noted that the heating that in whole above-mentioned technology, keeps clean room 1 by heater 9.
Another embodiment of the present invention now is described.Unless stated otherwise, this embodiment is similar to aforesaid first embodiment, and therefore, the element of this embodiment of corresponding first embodiment is by same label representative and omit explanation.
Fig. 2 has represented second embodiment according to cleaning device of the present invention.
In this cleaning device, steam generating tank 4 is divided into two separated cells, and one is the 4A of steam generating chamber, and another is that waste liquid reclaims chamber 4B, and two cell 4A, 4B not only are integral but also relatively independent.The 4A of steam generating chamber with the heater 5 that is used to heat organic solvent S arranges like this, so that it can import valve V through steam 3The steam of organic solvent S is imported clean room 1.Waste liquid reclaims chamber 4B and arranges like this, so that it is through returning liquid valve V 4Recovery is by organic solvent S, the cleaning solution of use that oil or analog are formed, and this cleaning solution has been used for the cleaning of clean room 1, and liquefies.Waste liquid reclaims the top and pipe P of chamber 4B 3Through valve V 7Communicate.
In the device of first embodiment in aforesaid Fig. 1, because the organic solvent S of liquefaction turns back to steam generating tank 4 in clean room 1, so the temperature of the organic solvent S of heating will descend in the steam generating tank 4, thereby the deterioration efficiency of heating surface can not obtain stable steam in some cases at this and supply with.But, in the device of second embodiment,,, can obtain stable steam and supply with so can improve the thermal efficiency among the 4A of steam generating chamber because steam generating tank 4 is divided into the 4A of steam generating chamber and waste liquid reclaims two cells of chamber 4B.In addition, because by opening valve V 7Reduce the pressure that waste liquid reclaims chamber 4B, can improve the organic efficiency of waste liquid.
Fig. 4 represents the 3rd embodiment according to this cleaning device.
In this cleaning device, be provided with two steam generating tanks, the first steam generating tank 4a and the second steam generating tank 4b.These first and second steam generating tanks have same separate structure, are useful on the heater 5 of heating organic solvent S on each.The top of steam generating tank 4a, 4b imports valve V with steam respectively by the road 3A, V 3B communicates, by the road with time liquid valve V 4A, V 4B communicates.
Below, explain the as above working condition of the cleaning device of structure.
Just as shown in Figure 5, the work of this cleaning device can be finished the cleaning of phase I by the first steam generating tank 4a, finish the cleaning of second stage by the second steam generating tank 4b,, then only carry out the cleaning of phase I when workpiece w has less oily adhesion or part arranged relatively during simple structure.But, for resembling parts, the parts of high-viscosity oil adhesion are arranged or the parts of difficulty cleaning of the parts of labyrinth being arranged, then proceed the cleaning of second stage than the heavy wool adhesion, what describe in detail below is to carry out first situation to second stage.
At first, in the phase I cleaning,, workpiece w is put into clean room 1 along with door 2 is opened.After door 2 is closed, reduce the internal pressure of clean room 1 by vavuum pump 6.Then, cooling medium is supplied with heat-exchanging piece 3.Import valve V along with opening steam 3A and time liquid valve V 4A, the steam that produces in the first steam generating tank 4a is imported into clean room 1.Therefore, as first embodiment, the steam condensation becomes water droplet, and liquefaction ground is mobile on the surface of workpiece w, finishes the cleaning steam of workpiece w thus.Simultaneously, by heat-exchanging piece 3 cooling steams, make it liquefaction, drop on the workpiece w, carry out the shower type cleaning thus, the organic solvent S that has dropped on and amassed in clean room 1 bottom passes through back liquid valve V 4A turns back to the first steam generating tank 4a.
Be used for the organic solvent S that above-mentioned cleaning procedure turns back to the first steam generating tank 4a and lowered the temperature, thereby made organic solvent S cooling in the first steam generating tank 4a.As a result, if continue to clean, then no longer can stably supply with steam by the above-mentioned phase I that the first steam generating tank 4a carries out.In addition, allow the temperature of the organic solvent of efflux in the first steam generating tank 4a to return to a specified temp, the result will be the long processing time.Therefore, the temperature of the organic solvent in the first steam generating tank 4a has dropped on the time point of this specified temp when following, opens air and imports valve Va, and the internal pressure of clean room 1 returns to 13 * 10 3To 20 * 10 3Pa (100 to 150 holder), so that cleaning solution turns back to the first steam generating tank 4a, above-mentioned cleaning solution is what to have amassed in clean room 1 bottom.Then, shut steam importing valve V just 3A and time liquid valve V 4After a, technology is forwarded to the following second stage cleaning of being undertaken by the second steam generating tank 4b.
In second stage cleaning, drive vavuum pump 6 again, open main evacuation valve Vb, the internal pressure of clean room 1 is dropped to be lower than 1.4 * 10 3Pa (10 holder).After this, cooling medium is supplied with heat-exchanging piece 3.Import valve V along with opening steam 3B and time liquid valve V 4B imports clean room 1 to organic vapor from the second steam generating tank 4b.Thus, to continue the cleaning of workpiece w with same mode of phase I.
Processing after first and second stages cleaning of such workpiece w finishes is similar to first embodiment, therefore no longer describes.
Fig. 6 represents the 4th embodiment according to cleaning device of the present invention.
This cleaning device is arranged like this, promptly is provided with valve V extraly 2Heat medium supply pipe P 2, make from cooling medium supply pipe P 1Expenditure provides steam or hot-air for thus heat-exchanging piece 3.In this device, can select cooling medium or heat medium, and with opening valve V 1Or V 2Supply with heat-exchanging piece 3.
As the 3rd embodiment, this cleaning device can carry out first and second stages cleaning of workpiece w.In addition, by selecting thermal medium, offer heat-exchanging piece 3, or among cleaning, be transformed into this situation in the cleaning beginning, can cooperate effective cleaning of oily adhesion degree or workpiece w clean conditions.
Say in detail, can from as shown in Figure 7 technology A and technology B, select the phase I cleaning procedure of finishing by the first steam generating tank 4a.
In technology A as shown in Figure 7, when cooling medium is supplied with heat-exchanging piece 3, reduce the internal pressure of clean room 1, in this situation, import organic vapor.So, can carry out cleaning steam and shower cleaning simultaneously, in cleaning steam, steam condensation on the surface of work w in the shower cleaning, by heat-exchanging piece 3 liquefaction steam, drops on the workpiece w.
In technology B as shown in Figure 7, when being supplied with heat-exchanging piece 3, reduces heat medium the internal pressure of clean room 1, in this situation, import organic vapor.So can not make and only can carry out cleaning steam by heat-exchanging piece 3 liquefaction steam.
On the other hand, can be by technology C, technology D, technology E, technology F second stage cleaning as shown in Figure 8 from selecting to finish by the second steam generating tank 4b.
In technology C as shown in Figure 8, when being supplied with heat-exchanging piece 3, reduces cooling medium the internal pressure of clean room 1, under this situation, import the steam of organic solvent S.So, might carry out cleaning steam and shower cleaning simultaneously.
In technology D as shown in Figure 8, when cooling medium is supplied with heat-exchanging piece 3, reduce the internal pressure of clean room 1, in this situation, import the steam of organic solvent S.Therefore, as technology C, might carry out cleaning steam and shower cleaning simultaneously.After the cleaning, if be supplied to the valve V of medium by closing of heat-exchanging piece 3 1With open valve V 2, change into heat medium from cooling medium, then, can clean at last workpiece w and heat with steam.
Among the step C in front, when finishing cleaning with steam and shower simultaneously, stop cooling medium being supplied with heat-exchanging piece 3.So solvent vapo(u)r continues liquefaction and equals vapor (steam) temperature up to the temperature of heat-exchanging piece 3, so that the long time of change expense moves on to next Steam Heating technology, the result loses time.But, in technology D, the cleaning of finishing with steam and shower simultaneously being continued by being transformed into heat medium at once, the temperature of heat-exchanging piece 3 is raised to rapidly more than the vapor (steam) temperature, makes steam stop liquefaction, can not lose time.
In technology E shown in Figure 8, when supplying with heat-exchanging piece 3, reduces heat medium the internal pressure of clean room 1, in this state, import the steam of organic solvent S.Therefore, only carry out cleaning steam.After cleaning, open valve V if utilize 1, shut valve V 2The medium of supplying with heat-exchanging piece 3 is changed into cooling medium from heat medium, then can implement to finish last cleaning workpiece w by steam and shower.
In technology F shown in Figure 8, when heat medium is supplied with heat-exchanging piece 3, reduce the internal pressure of clean room 1, in this situation, import the steam of organic solvent S.Therefore, only carry out cleaning steam.
According to the degree of difficulty of workpiece w cleaning, can select technology A or the B of phase I with operator's wish, and the technology C to F of second stage.
It should be noted that the heater H resemble the heater can be attached to refrigeration filling supply pipe P as shown in Figure 9 1On.In this case, this cooling medium supply pipe is heated by this heater H, and the heat-exchange tube P as the 4th embodiment need not be set 2, and can adopt similar technology.
Equally, as shown in figure 10, valve V can be set 6, making can be at the first distolateral arm that adds of flow control valve Vc.In this case, by shut off valve V 1Stop the supply of cooling medium, by opening valve V 6Bleed off the cooling medium in the heat-exchanging piece 3, can shorten heating the time of heat-exchanging piece 3 whereby.
In addition, as shown in figure 11, also layout that can be such, promptly the porous member resemble the wire netting 10 be installed in heat-exchanging piece 3 below, drop is dripped on the workpiece w equably.The bypass discharge leg pipe P with valve Vd of clean room 1 also can be provided at the secondary side of main evacuation valve Vb finding time 5In this case,, drive vavuum pump 6 and carry out cleaning steam and Steam Heating, the steam in the clean room 1 is flowed with constant direction by opening valve Vd.
Although the present invention has been referenced the embodiment of accompanying drawing and has fully described, it should be noted that for this area ordinary skill variations and modifications be conspicuous.Therefore, unless such change and modification break away from thought of the present invention and scope, then should all be covered by the present invention.

Claims (7)

1. cleaning device, the clean room that comprises a vacuum seal structure, wherein contain the workpiece that will be cleaned, an organic vapor generation tank that communicates with this clean room by the road, vavuum pump with this clean room that is used to find time, wherein the upside at clean room is provided with heat-exchanging piece, flows through cooling agent by this heat-exchanging piece.
2. according to the cleaning device of claim 1, wherein said organic vapor generation tank is divided into steam generating chamber and waste liquid and reclaims the chamber in inside, and these two chambers communicate with clean room separately by the road.
3. according to the cleaning device of claim 1, wherein provide at least two described steam generating tanks, can between it, change as required.
4. according to any cleaning device of claim 1 to 3, wherein said heat-exchanging piece can cooling medium or heat medium provide.
5. according to any cleaning device of claim 1 to 3, further comprise the heater that is used to heat the cooling medium that within described heat-exchanging piece, is provided.
6. according to any cleaning device of claim 1 to 3, wherein under described heat-exchanging piece porous member is installed, liquid is fallen on the workpiece by this porous member equably, aforesaid liquid is by heat-exchanging piece condensation from organic vapor.
7. according to any cleaning device of claim 1 to 3, further comprise a tapping equipment that is used to discharge cooling medium in the heat-exchanging piece.
CN95105729A 1995-04-27 1995-04-27 Cleaning apparatus Expired - Fee Related CN1080147C (en)

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Application Number Priority Date Filing Date Title
CN95105729A CN1080147C (en) 1995-04-27 1995-04-27 Cleaning apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN95105729A CN1080147C (en) 1995-04-27 1995-04-27 Cleaning apparatus

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Publication Number Publication Date
CN1134321A true CN1134321A (en) 1996-10-30
CN1080147C CN1080147C (en) 2002-03-06

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CN95105729A Expired - Fee Related CN1080147C (en) 1995-04-27 1995-04-27 Cleaning apparatus

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101484252B (en) * 2006-08-23 2012-05-23 杜尔艾科克林有限公司 Cleaning device and method for cleaning a workpiece
CN104568716A (en) * 2013-10-29 2015-04-29 中国石油天然气股份有限公司 Clean-type corrosion monitoring coupon device and clean-type corrosion monitoring method
US9636716B2 (en) 2012-04-25 2017-05-02 Ihi Corporation Vacuum cleaning device
CN108402490A (en) * 2018-05-03 2018-08-17 贵州省凤冈县稀源食用菌种植有限公司 The cleaning device of hickory chick
CN111889414A (en) * 2020-07-29 2020-11-06 天台益嘉环保科技有限公司 Chinese herbal medicine cleaning equipment with sewage treatment function

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1157287B (en) * 1982-07-02 1987-02-11 Vittorio Colombini PROCEDURE FOR THE POLLUTION OF ELECTRICAL-MECHANICAL EQUIPMENT FROM POLY-CHLORINE-DIPHENYL
IT1260831B (en) * 1992-07-17 1996-04-22 MACHINING PARTS DEGREASING PROCESS AND PLANT TO PERFORM THE PROCEDURE

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101484252B (en) * 2006-08-23 2012-05-23 杜尔艾科克林有限公司 Cleaning device and method for cleaning a workpiece
US9636716B2 (en) 2012-04-25 2017-05-02 Ihi Corporation Vacuum cleaning device
CN104568716A (en) * 2013-10-29 2015-04-29 中国石油天然气股份有限公司 Clean-type corrosion monitoring coupon device and clean-type corrosion monitoring method
CN104568716B (en) * 2013-10-29 2017-12-01 中国石油天然气股份有限公司 A kind of cleaning type corrosion monitoring piece suspension device and method
CN108402490A (en) * 2018-05-03 2018-08-17 贵州省凤冈县稀源食用菌种植有限公司 The cleaning device of hickory chick
CN111889414A (en) * 2020-07-29 2020-11-06 天台益嘉环保科技有限公司 Chinese herbal medicine cleaning equipment with sewage treatment function
CN111889414B (en) * 2020-07-29 2021-10-26 天台益嘉环保科技有限公司 Chinese herbal medicine cleaning equipment with sewage treatment function

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