CN113420578A - Scribing blue film inspection system and method - Google Patents
Scribing blue film inspection system and method Download PDFInfo
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- CN113420578A CN113420578A CN202110682651.3A CN202110682651A CN113420578A CN 113420578 A CN113420578 A CN 113420578A CN 202110682651 A CN202110682651 A CN 202110682651A CN 113420578 A CN113420578 A CN 113420578A
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- 238000007689 inspection Methods 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims abstract description 33
- 238000003860 storage Methods 0.000 claims description 9
- 238000001514 detection method Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
- G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
- G06K7/14—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation using light without selection of wavelength, e.g. sensing reflected white light
- G06K7/1404—Methods for optical code recognition
- G06K7/1408—Methods for optical code recognition the method being specifically adapted for the type of code
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K17/00—Methods or arrangements for effecting co-operative working between equipments covered by two or more of main groups G06K1/00 - G06K15/00, e.g. automatic card files incorporating conveying and reading operations
- G06K17/0022—Methods or arrangements for effecting co-operative working between equipments covered by two or more of main groups G06K1/00 - G06K15/00, e.g. automatic card files incorporating conveying and reading operations arrangements or provisious for transferring data to distant stations, e.g. from a sensing device
Abstract
The present disclosure provides a dicing blue film inspection system and an inspection method. The inspection system comprises a bearing table, an image acquisition module and a comparison module, wherein the comparison module is electrically connected with the image acquisition module; the bearing platform is used for placing a scribing blue film to be inspected; the image acquisition module is used for respectively acquiring a bar code identifier of the scribing blue film and a scribing number identifier of the wafer corresponding to the scribing blue film; and the comparison module is used for comparing the bar code identification with the engraved identification and outputting a comparison result. The image acquisition module is used for acquiring the bar code identification of the scribing blue film to be inspected and the scribing mark identification of the corresponding wafer, so that the condition that the bar code identification and the scribing mark are read by people and are wrong can be effectively avoided. The comparison module compares the acquired bar code identification with the mark identification, outputs a comparison result, can accurately and quickly detect out inconsistent scribing blue films, improves the inspection efficiency and the inspection yield of the scribing blue films, and can improve the processing yield of subsequent chips and reduce the cost.
Description
Technical Field
The disclosure belongs to the technical field of blue film inspection, and particularly relates to a scribing blue film inspection system and a scribing blue film inspection method.
Background
At present, after dicing the blue film, dicing is performed. The scribing process will cause the carved number of the wafer to be damaged and is not easy to be automatically read. Therefore, bar codes are added in the scribing and film pasting process, and the bar codes are used as information circulation after scribing. How to ensure that the affixed bar code is consistent with the carved number of the wafer is very important in the process. If the information of the bar code and the wafer is inconsistent, the electronic map called by the chip in the chip processing process is wrong, and a wrong mixed material is produced.
Disclosure of Invention
The present disclosure is directed to at least one of the problems of the prior art, and provides a scribing blue film inspection system and an inspection method.
In one aspect of the disclosure, a scribing blue film inspection system is provided, which includes a carrying table, an image acquisition module and a comparison module, wherein the comparison module is electrically connected with the image acquisition module;
the bearing table is used for placing a scribing blue film to be inspected;
the image acquisition module is used for respectively acquiring a bar code identifier of the scribing blue film and a scribing number identifier of a wafer corresponding to the scribing blue film;
the comparison module is used for comparing the bar code identification with the carving number identification and outputting a comparison result.
In some embodiments, the image acquisition module comprises a barcode gun and a camera with a text recognition function;
the camera is arranged above the bearing table and used for acquiring the engraving mark of the wafer;
the bar code gun is arranged on one side of the bearing platform and used for acquiring the bar code identification of the scribing blue film.
In some embodiments, the device further comprises a storage module, wherein the storage module is electrically connected with the image acquisition module and the comparison module respectively;
the storage module is used for storing the bar code identification, the carving number identification and the comparison result.
In some embodiments, the alignment result comprises an alignment conclusion and an alignment image.
In some embodiments, the device further comprises an alarm module, wherein the alarm module is electrically connected with the comparison module;
the comparison module is specifically used for controlling the alarm module to output an alarm signal when the bar code identification is inconsistent with the scale mark identification.
In another aspect of the present disclosure, there is provided a method for inspecting a scribed blue film, the method including:
respectively acquiring a bar code identification of a scribing blue film and a scribing number identification of a wafer corresponding to the scribing blue film;
and comparing the bar code identification with the engraved identification, and outputting a comparison result.
In some embodiments, the method further comprises:
and storing the bar code identification, the engraving identification and the comparison result.
In some embodiments, the method further comprises:
and when the bar code identification is inconsistent with the carving identification, outputting an alarm signal.
In some embodiments, the alarm signal comprises an acoustic signal and/or a light signal.
In some embodiments, the alignment result comprises an alignment conclusion and an alignment image.
According to the scribing blue film inspection system and the scribing blue film inspection method, the image acquisition module is used for acquiring the bar code identification of the scribing blue film to be inspected and the mark carving identification of the corresponding wafer, so that the situation that the bar code identification and the mark carving identification are read by people and are wrong can be effectively avoided. The comparison module compares the obtained bar code identification with the mark identification and outputs a comparison result, so that the inconsistent scribing blue film can be accurately and quickly detected, the detection efficiency and the detection yield of the scribing blue film are improved, the processing yield of subsequent chips can be improved, and the cost is reduced.
Drawings
Fig. 1 is a schematic structural diagram of a dicing blue film inspection system according to an embodiment of the present disclosure;
FIG. 2 is a schematic structural diagram of a dicing blue film inspection system according to another embodiment of the disclosure;
fig. 3 is a flowchart of a dicing blue film inspection method according to another embodiment of the disclosure.
Detailed Description
For a better understanding of the technical aspects of the present disclosure, reference is made to the following detailed description taken in conjunction with the accompanying drawings.
As described in the background art, the dicing operation is performed after the blue film is pasted on the wafer, and the scribing process will cause the number of the wafer to be damaged, which is not easy to be automatically read. Therefore, bar codes are added in the scribing and film pasting process, and the bar codes are used as information circulation after scribing. The process is very important here. If the bar code on the scribing blue film is inconsistent with the cutting number of the wafer, the electronic map called by the scribing blue film is wrong in the chip processing process, and a wrong production mixed material is formed.
Based on this, the inventors of the present disclosure have devised the dicing blue film inspection system described below.
As shown in fig. 1 and 2, an embodiment of the present disclosure relates to a dicing blue film inspection system 100, which includes a carrier stage 110, an image acquisition module 120, and a comparison module 130. The carrying table 110 is used for placing the dicing blue film 200 to be inspected, the dicing blue film 200 is attached to the corresponding wafer 300, that is, the dicing blue film 200 and the wafer 300 are integrally placed on the carrying table 110, the dicing blue film 200 is provided with the barcode identifier 210, and the wafer 300 is provided with the mark code identifier 310. The image obtaining module 120 is configured to obtain the barcode identifier 210 of the dicing blue film 200 and the mark identifier 310 of the wafer 300 respectively. The comparison module 130 is electrically connected to the image acquisition module 120, and the comparison module 130 is configured to compare the obtained barcode identifier 210 on the blue film 200 of the wafer with the mark code identifier 310 on the wafer 300, and output a comparison result.
The scribing blue film inspection system of the embodiment utilizes the image acquisition module to acquire the bar code identification of the scribing blue film to be inspected and the scribing mark identification of the corresponding wafer, so that the condition that the bar code identification and the scribing mark are read by people and are wrong can be effectively avoided. The comparison module compares the obtained bar code identification with the mark identification and outputs a comparison result, so that the inconsistent scribing blue film can be accurately and quickly detected, the detection efficiency and the detection yield of the scribing blue film are improved, the processing yield of subsequent chips can be improved, and the cost is reduced.
It should be noted that, the specific structure of the image obtaining module is not limited, for example, the image module may be a dedicated camera, and the dedicated camera may be directly used to obtain an image of the dicing blue film, and then identify the barcode identifier on the dicing blue film and the mark on the wafer. Alternatively, the image acquisition module may also be some other image acquisition devices capable of recognizing the barcode identifier and the engraved identifier, such as a scanner, and the embodiment is not limited thereto.
Illustratively, as shown in fig. 1, the image acquisition module 120 includes a barcode gun 121 and a camera 122 with a text recognition function. The camera 122 is disposed above the carrier 110, and is configured to obtain the mark 310 of the wafer 300. The bar code gun 121 is disposed on one side of the carrier 110, and is configured to obtain a bar code identifier 210 of the dicing blue film 200. In this embodiment, an operator may first scan the bar code gun 121 disposed on one side of the carrier stage 110 to obtain the bar code identifier 210 of the dicing blue film 200, then place the dicing blue film 200 on the carrier stage 110, and obtain the mark number identifier 310 of the wafer 300 by using the camera 122. Alternatively, the dicing blue film 200 may be directly placed on the carrier stage 110, and then the barcode gun 121 and the camera 122 are used to obtain the barcode identifier 210, the mark code 310, and the like.
Illustratively, as shown in fig. 1, the inspection system 100 further includes a storage module 140, and the storage module 140 is electrically connected to the image acquisition module 120 and the comparison module 130, respectively. The storage module 140 is configured to store the barcode identifier, the mark identifier, and the comparison result. The alignment result may include an alignment conclusion and an alignment image. The comparison result can be stored through the arranged storage module, so that the comparison result can be conveniently called subsequently.
Illustratively, as shown in fig. 1, the inspection system 100 further includes an alarm module 150, and the alarm module 150 is electrically connected to the comparison module 130. The comparison module 130 is further configured to control the alarm module 150 to output an alarm signal when the barcode identifier is inconsistent with the mark identifier. The alarm signal includes an acoustic signal, or the alarm signal may also include an optical signal, or the alarm signal may also include both an acoustic signal and an optical signal, and the embodiment is not limited thereto.
In another aspect of the present disclosure, a method for inspecting a scribed blue film is provided, wherein the method can use the inspection system described above, and reference may be made to the related description, which is not repeated herein.
As shown in fig. 3, the method S100 includes:
s110, respectively obtaining a bar code mark of the scribing blue film and a scribing mark of the wafer corresponding to the scribing blue film.
Specifically, in this step, the image acquisition module may be used to respectively acquire the barcode identifier of the dicing blue film and the mark number identifier of the corresponding wafer.
S120, comparing the bar code identification with the carving number identification, and outputting a comparison result.
Specifically, in this step, the operator may compare the barcode identifier obtained from the image acquisition module with the engraved identifier to determine a comparison result. The obtained bar code identification and the obtained scale mark identification can be input into some electronic equipment with data processing capacity, such as a central processing unit, a single chip microcomputer, a micro control unit and the like, so that the comparison between the bar code identification and the scale mark identification is automatically realized, and a comparison result is output. In this step, the comparison result may include a comparison conclusion and a comparison image, and the comparison image may be obtained by using the image obtaining module. As an example of an alignment result: when the bar code identification is consistent with the engraved identification, the comparison result is as follows: and comparing the images in a consistent manner.
S130, storing the bar code identification, the carving number identification and the comparison result.
S140, when the bar code identification is inconsistent with the carving identification, an alarm signal is output.
Specifically, in this step, the alarm signal includes an acoustic signal, or the alarm signal may also include an optical signal, or the alarm signal may also include both an acoustic signal and an optical signal, and the present embodiment is not limited thereto.
It should be noted that, the steps S130 and S140 are not necessarily required to be present, for example, the dicing blue film inspection method may include the step S110 and the step S120, or the dicing blue film inspection method may also include only the step S110, the step S120 and the step S130, or the dicing blue film inspection method may also include only the step S110, the step S120 and the step S140, and so on.
According to the scribing blue film inspection method, the bar code identification of the scribing blue film to be inspected and the mark carving identification of the corresponding wafer are obtained, so that the situation that the bar code identification and the mark carving identification are read by people in an error mode can be effectively avoided. And then, the obtained bar code identification and the mark identification are compared, and a comparison result is output, so that the inconsistent scribing blue film can be accurately and quickly detected, the inspection efficiency and the inspection yield of the scribing blue film are improved, the subsequent chip processing yield can be improved, and the cost is reduced.
It is to be understood that the above embodiments are merely exemplary embodiments that are employed to illustrate the principles of the present disclosure, and that the present disclosure is not limited thereto. It will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the disclosure, and these are to be considered as the scope of the disclosure.
Claims (10)
1. The scribing blue film inspection system is characterized by comprising a bearing table, an image acquisition module and a comparison module, wherein the comparison module is electrically connected with the image acquisition module;
the bearing table is used for placing a scribing blue film to be inspected;
the image acquisition module is used for respectively acquiring a bar code identifier of the scribing blue film and a scribing number identifier of a wafer corresponding to the scribing blue film;
the comparison module is used for comparing the bar code identification with the carving number identification and outputting a comparison result.
2. The scribing blue film inspection system according to claim 1, wherein the image acquisition module comprises a barcode gun and a camera with a text recognition function;
the camera is arranged above the bearing table and used for acquiring the engraving mark of the wafer;
the bar code gun is arranged on one side of the bearing platform and used for acquiring the bar code identification of the scribing blue film.
3. The scribing blue film inspection system according to claim 1, further comprising a storage module electrically connected to the image acquisition module and the comparison module, respectively;
the storage module is used for storing the bar code identification, the carving number identification and the comparison result.
4. The dicing blue film inspection system according to claim 3, wherein the alignment result includes an alignment conclusion and an alignment image.
5. The scribing blue film inspection system according to any one of claims 1 to 4, further comprising an alarm module, wherein the alarm module is electrically connected with the comparison module;
the comparison module is specifically used for controlling the alarm module to output an alarm signal when the bar code identification is inconsistent with the scale mark identification.
6. A method for inspecting a scribed blue film, the method comprising:
respectively acquiring a bar code identification of a scribing blue film and a scribing number identification of a wafer corresponding to the scribing blue film;
and comparing the bar code identification with the engraved identification, and outputting a comparison result.
7. The method of claim 6, further comprising:
and storing the bar code identification, the engraving identification and the comparison result.
8. The method according to claim 6 or 7, characterized in that the method further comprises:
and when the bar code identification is inconsistent with the carving identification, outputting an alarm signal.
9. The method according to claim 8, characterized in that the alarm signal comprises an acoustic signal and/or a light signal.
10. The method of claim 6 or 7, wherein the alignment result comprises an alignment conclusion and an alignment image.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202110682651.3A CN113420578A (en) | 2021-06-18 | 2021-06-18 | Scribing blue film inspection system and method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110682651.3A CN113420578A (en) | 2021-06-18 | 2021-06-18 | Scribing blue film inspection system and method |
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Citations (6)
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|---|---|---|---|---|
| JPH07335510A (en) * | 1994-06-09 | 1995-12-22 | Hitachi Ltd | Semiconductor device, supply of its identifier and defect analysis |
| CN202079038U (en) * | 2011-04-06 | 2011-12-21 | 晶能光电（江西）有限公司 | Bar code scanning structure of separator and separator |
| US20120249773A1 (en) * | 2009-12-23 | 2012-10-04 | Ismeca Semiconductor Holding Sa | Wafer handler comprising a vision system |
| CN203760430U (en) * | 2013-11-22 | 2014-08-06 | 中航（重庆）微电子有限公司 | Automatic identification system for marking numbers on the wafers |
| CN106557709A (en) * | 2015-09-28 | 2017-04-05 | 京元电子股份有限公司 | Chip identifier automatic inspection system and its method |
| CN207993825U (en) * | 2018-04-13 | 2018-10-19 | 江西鸿利光电有限公司 | One kind being used for LED chip die bond anti-reverse device |
-
2021
- 2021-06-18 CN CN202110682651.3A patent/CN113420578A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07335510A (en) * | 1994-06-09 | 1995-12-22 | Hitachi Ltd | Semiconductor device, supply of its identifier and defect analysis |
| US20120249773A1 (en) * | 2009-12-23 | 2012-10-04 | Ismeca Semiconductor Holding Sa | Wafer handler comprising a vision system |
| CN202079038U (en) * | 2011-04-06 | 2011-12-21 | 晶能光电（江西）有限公司 | Bar code scanning structure of separator and separator |
| CN203760430U (en) * | 2013-11-22 | 2014-08-06 | 中航（重庆）微电子有限公司 | Automatic identification system for marking numbers on the wafers |
| CN106557709A (en) * | 2015-09-28 | 2017-04-05 | 京元电子股份有限公司 | Chip identifier automatic inspection system and its method |
| CN207993825U (en) * | 2018-04-13 | 2018-10-19 | 江西鸿利光电有限公司 | One kind being used for LED chip die bond anti-reverse device |
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