CN113417005B - Preparation method of stable perovskite thin film - Google Patents

Preparation method of stable perovskite thin film Download PDF

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CN113417005B
CN113417005B CN202110670549.1A CN202110670549A CN113417005B CN 113417005 B CN113417005 B CN 113417005B CN 202110670549 A CN202110670549 A CN 202110670549A CN 113417005 B CN113417005 B CN 113417005B
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spin coating
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fixedly connected
box
worm
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CN113417005A (en
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韦志成
楚树勇
张正国
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North Minzu University
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North Minzu University
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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00Liquid-phase epitaxial-layer growth
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/54Organic compounds
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    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/10Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising heterojunctions between organic semiconductors and inorganic semiconductors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
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    • Y02E10/549Organic PV cells

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Abstract

The invention belongs to the field of perovskite thin film preparation, and particularly relates to a stable perovskite thin film preparation method which mainly comprises the following steps: prepare precursor solution, spin coating, heating, the spin coating equipment that above-mentioned perovskite film preparation in-process was used includes the spin coating case, rotate in the spin coating case and be connected with the back shaft, and the upper end fixedly connected with supporting seat of back shaft, be connected with the substrate on the supporting seat, a plurality of slots have been seted up to the lower extreme of substrate, and fixedly connected with and slot matched with hollow inserted block on the supporting seat. The invention can electrify the electromagnetic plate in a clearance way through the arranged reciprocating conductive mechanism, can move the permanent magnetic plate in a clearance way by matching with the reset spring, and simultaneously can ensure that the dropper intermittently drips precursor solution on the substrate under the action of the automatic opening and closing mechanism, thereby avoiding the complexity and labor loss of manual intermittent dripping.

Description

Preparation method of stable perovskite thin film
Technical Field
The invention belongs to the field of perovskite thin film preparation, and particularly relates to a stable perovskite thin film preparation method.
Background
The perovskite material is used as a core layer of the perovskite solar cell, the crystallinity and the morphology of the film can greatly influence the photoelectric conversion efficiency and the stability of the device, researchers regulate and control the nucleation and the growth of perovskite crystals by optimizing the preparation process of the perovskite film so as to prepare the high-quality perovskite film with high coverage, low porosity, good stability and low roughness, and further improve the performance of the device.
The preparation method of the perovskite thin film comprises the following steps: prepare precursor solution, spin coating, heating, wherein the spin coating is that the precursor solution who prepares drips on the substrate to drive the substrate through spin coating equipment and rotate, make precursor solution can diffuse and form liquid film, in order to avoid disposable dropwise add excessive, generally all through artifical clearance dropwise add precursor solution, however, artifical clearance dropwise add comparatively loaded down with trivial details and consume the manpower.
To this end, we propose a stable perovskite thin film preparation method to solve the above problems.
Disclosure of Invention
The invention aims to solve the problems and provide a stable perovskite thin film preparation method.
In order to achieve the purpose, the invention adopts the following technical scheme: a preparation method of a stable perovskite thin film mainly comprises the following steps:
s1, preparing a precursor solution, and mixing the methyl amine iodide solution and the lead iodide solution in a DMF (dimethyl formamide) solvent according to a certain proportion by using mixing equipment to form a clear and transparent perovskite precursor solution;
s2 spin coating, driving the substrate plate to rotate through spin coating equipment, and then intermittently dripping the perovskite precursor solution obtained through S1 on the substrate plate which is processed in advance to uniformly diffuse the perovskite precursor solution on the substrate plate to obtain a liquid film;
s3, heating, namely placing the liquid film obtained in the S2 in heating equipment for heating, so that the solvent on the surface of the liquid film is volatilized, and the conversion to the perovskite crystal film is completed;
the spin coating equipment used in the perovskite film preparation process comprises a spin coating box, wherein a support shaft is rotatably connected in the spin coating box, a support seat is fixedly connected at the upper end of the support shaft, a substrate is connected on the support seat, a plurality of slots are formed at the lower end of the substrate, hollow insertion blocks matched with the slots are fixedly connected on the support seat, cavities matched with the hollow insertion blocks are formed in the support seat, thread sleeves corresponding to the hollow insertion blocks are rotatably arranged in the cavities, screw rods are connected in the thread sleeves in a threaded manner, the upper ends of the screw rods extend into the corresponding hollow insertion blocks and are fixedly connected with convex blocks, abutting mechanisms matched with the convex blocks are arranged on two sides of each hollow insertion block, driving mechanisms matched with the thread sleeves are arranged in the cavities, each abutting mechanism comprises a T-shaped block and a spherical block, and the T-shaped block is slidably arranged on the hollow insertion blocks, the T-shaped block is fixedly connected with the side wall of the hollow insert block through a plurality of extension springs, one end of the T-shaped block positioned in the hollow insert block is fixedly connected with the spherical block, the spherical block abuts against the convex block, one end of the T-shaped block far away from the spherical block abuts against the inner wall of the slot, a first worm is rotatably connected in the spin coating box, a first worm wheel meshed with the first worm is sleeved on the supporting shaft, a speed reducing mechanism matched with the first worm is arranged on the spin coating box and comprises a driving bevel gear, a driven bevel gear and a driving motor, a transmission box is fixedly connected to one side of the spin coating box, the driving bevel gear is rotatably arranged in the transmission box, a transmission shaft of the driving bevel gear is in transmission connection with the driving motor, one end of the first worm extends into the transmission box and is sleeved with the driven bevel gear, and the driven bevel gear is meshed with the driving bevel gear, the gear ratio of the driving bevel gear to the driven bevel gear is 1:2, the upper end of the spin coating box is fixedly connected with a liquid storage box, the inner top surface of the upper end of the liquid storage box is embedded with an electromagnetic plate, the electromagnetic plate is fixedly connected with a permanent magnetic plate in sliding connection with the liquid storage box through a plurality of reset springs, the liquid storage box is communicated with the spin coating box through a dropper, the dropper is positioned right above a substrate, an automatic opening and closing mechanism is arranged in the dropper and comprises a closing plate and a compression spring, the closing plate is rotatably arranged in the dropper and can close the dropper, the closing plate is fixedly connected with the inner wall of the dropper through the compression spring, a reciprocating conductive mechanism electrically connected with the electromagnetic plate is arranged in the spin coating box and comprises an incomplete gear, a driven gear, a spiral spring, a conductive block, a conductive sheet and a servo motor, and a protection box is fixedly connected in the spin coating box, incomplete gear revolve sets up in protecting the box, and the transmission shaft of incomplete gear runs through the spin coating case and is connected with the servo motor transmission, the clockwork spring is fixed to be set up in protecting the box, and the clockwork spring is connected with the driven gear transmission, driven gear meshes with incomplete gear mutually, the conducting block is fixed to be set up on driven gear's transmission shaft, and the lower extreme of protecting the box in the top surface set up with conducting block matched with annular spout, the conducting strip inlays to be located in the annular spout, and the conducting strip can dock with the conducting block.
In the above method for preparing a stable perovskite thin film, the driving mechanism includes a second worm and a plurality of second worm wheels, the second worm is rotatably disposed in the cavity, one end of the second worm penetrates through the cavity and is fixedly connected with a knob, each of the second worm wheels is respectively sleeved on a corresponding thread sleeve, and each of the second worm wheels is meshed with the second worm.
In the above stable perovskite thin film preparation method, the bump is fixedly connected with a positioning block, and one side of the T-shaped block is bonded with a friction pad.
In the above stable perovskite thin film preparation method, a limiting rod is fixedly connected between the screws.
Compared with the prior art, the preparation method of the stable perovskite thin film has the advantages that:
1. through the reciprocating conductive mechanism, the electromagnetic plate can be electrified in a clearance mode, the permanent magnetic plate can move in a clearance mode by matching with the reset spring, and meanwhile, precursor solution is dripped onto the substrate intermittently by the burette under the action of the automatic opening and closing mechanism, so that the tedious and labor loss caused by manual intermittent dripping is avoided.
2. The driving mechanism can regulate and control each thread bush to synchronously rotate, the usability of the device is greatly facilitated, the thread bush can regulate and control the up-and-down movement of the convex block through the screw rod in the rotating process, the supporting seat can be matched with the abutting-pressing mechanism to quickly lock or unlock the substrate, and the substrate can be greatly and conveniently detached and replaced.
3. Through the reduction gears who sets up, can reduce the rotational speed of first worm, and then reduce the rotational speed of supporting seat for the supporting seat can more stable drive substrate rotate, through setting up the locating piece, can offset through locating piece and slot inner wall, the state that locating lug and spherical piece offset.
Drawings
FIG. 1 is a process diagram of the preparation of a stable perovskite thin film according to the present invention;
FIG. 2 is a schematic perspective view of a stable perovskite thin film manufacturing method provided by the present invention;
FIG. 3 is a schematic diagram of a front perspective structure of a stable perovskite thin film preparation method provided by the present invention;
FIG. 4 is a schematic diagram of the internal structure of the protective box of a stable perovskite thin film preparation method provided by the invention;
FIG. 5 is a schematic structural diagram of the support seat and the substrate of the stable perovskite thin film preparation method provided by the invention in cooperation with each other;
FIG. 6 is an enlarged schematic view of the structure at A in FIG. 3;
FIG. 7 is an enlarged view of the structure at B in FIG. 5;
fig. 8 is an enlarged schematic view of the structure at C in fig. 5.
In the figure: 1 spin coating box, 2 support shafts, 3 support seats, 4 substrates, 5 slots, 6 hollow plug blocks, 7 cavities, 8 thread sleeves, 9 screws, 10 bumps, 11 abutting mechanisms, 111T-shaped blocks, 112 spherical blocks, 12 driving mechanisms, 121 second worms, 122 second worm wheels, 13 first worms, 14 first worm wheels, 15 speed reducing mechanisms, 151 driving bevel gears, 152 driven bevel gears, 153 driving motors, 16 liquid storage boxes, 17 electromagnetic plates, 18 reset springs, 19 permanent magnetic plates, 20 droppers, 21 self-opening and closing mechanisms, 211 closing plates, 212 compression springs, 22 reciprocating conductive mechanisms, 221 incomplete gears, 222 driven gears, 223 clockwork springs, 224 conductive blocks, 225 conductive sheets, 226 servo motors, 23 extension springs, 24 knobs, 25 transmission boxes, 26 protection boxes, 27 annular chutes and 28 and 29 positioning block limiting rods.
Detailed Description
The following examples are for illustrative purposes only and are not intended to limit the scope of the present invention.
As shown in fig. 1-8, a method for preparing a stable perovskite thin film mainly comprises the following steps:
s1, preparing a precursor solution, and mixing the methyl amine iodide solution and the lead iodide solution in a DMF (dimethyl formamide) solvent according to a certain proportion by using mixing equipment to form a clear and transparent perovskite precursor solution;
s2 spin coating, driving the substrate plate to rotate through spin coating equipment, and then intermittently dripping the perovskite precursor solution obtained through S1 on the substrate plate which is processed in advance to uniformly diffuse the perovskite precursor solution on the substrate plate to obtain a liquid film;
s3, heating, namely placing the liquid film obtained in the S2 in heating equipment for heating, so that the solvent on the surface of the liquid film is volatilized, and the conversion to the perovskite crystal film is completed;
the spin coating equipment used in the perovskite thin film preparation process comprises a spin coating box 1, a support shaft 2 is connected in the spin coating box 1 in a rotating mode, a support seat 3 is fixedly connected at the upper end of the support shaft 2, a substrate 4 is connected onto the support seat 3, a plurality of slots 5 are formed in the lower end of the substrate 4, hollow insertion blocks 6 matched with the slots 5 are fixedly connected onto the support seat 3, cavities 7 matched with the hollow insertion blocks 6 are formed in the support seat 3, thread sleeves 8 corresponding to the hollow insertion blocks 6 are rotatably arranged in the cavities 7, screw rods 9 are connected into the thread sleeves 8 in a threaded mode, the upper ends of the screw rods 9 extend into the corresponding hollow insertion blocks 6 and are fixedly connected with convex blocks 10, limiting rods 29 are fixedly connected among the screw rods 9, the limiting rods 29 are arranged, the screw rods 9 can be limited mutually, the rotation of the screw rods 9 along with the thread sleeves 8 is avoided, abutting mechanisms 11 matched with the convex blocks 10 are arranged on two sides of the hollow insertion blocks 6, and a driving mechanism 12 is arranged in the cavity 7 and is matched with each threaded sleeve 8.
The abutting mechanism 11 comprises a T-shaped block 111 and a spherical block 112, the T-shaped block 111 is arranged on the hollow inserting block 6 in a sliding mode, the T-shaped block 111 is fixedly connected with the side wall of the hollow inserting block 6 through a plurality of extension springs 23, one end of the T-shaped block 111 located in the hollow inserting block 6 is fixedly connected with the spherical block 112, the spherical block 112 abuts against the protruding block 10, one end, far away from the spherical block 112, of the T-shaped block 111 abuts against the inner wall of the slot 5, the T-shaped block 111 can move up and down in a matched mode through the arranged T-shaped block 111 and the extension springs 23, the T-shaped block 111 can quickly abut against or keep away from the inner wall of the slot 5, a positioning block 28 is fixedly connected onto the protruding block 10, a friction pad is bonded to one side of the T-shaped block 111, the positioning block 28 is arranged, a user can conveniently judge the motion state of the protruding block 10, and the friction force between the T-shaped block 111 and the slot 5 can be increased.
The driving mechanism 12 comprises a second worm 121 and a plurality of second worm wheels 122, the second worm 121 is rotatably disposed in the cavity 7, one end of the second worm 121 penetrates through the cavity 7 and is fixedly connected with the knob 24, each second worm wheel 122 is respectively sleeved on the corresponding threaded sleeve 8, each second worm wheel 122 is meshed with the second worm 121, through the matching of the second worm 121 and each second worm wheel 122, the threaded sleeves 8 can be regulated and controlled to rotate synchronously, the spin coating box 1 is rotatably connected with a first worm 13, the supporting shaft 2 is sleeved with a first worm wheel 14 meshed with the first worm 13, and the spin coating box 1 is provided with a speed reducing mechanism 15 matched with the first worm 13.
The speed reducing mechanism 15 comprises a driving bevel gear 151, a driven bevel gear 152 and a driving motor 153, one side of the spin coating box 1 is fixedly connected with a transmission box 25, the driving bevel gear 151 is rotatably arranged in the transmission box 25, a transmission shaft of the driving bevel gear 151 is in transmission connection with the driving motor 153, one end of a first worm 13 extends into the transmission box 25 and is sleeved with the driven bevel gear 152, the driven bevel gear 152 is meshed with the driving bevel gear 151, the gear ratio of the driving bevel gear 151 to the driven bevel gear 152 is 1:2, the rotating speed of the worm 1 can be reduced through the number of teeth of the driven bevel gear 152, the upper end of the spin coating box 1 is fixedly connected with a liquid storage box 16, an electromagnetic plate 17 is embedded on the inner top surface of the upper end of the liquid storage box 16, the electromagnetic plate 17 is fixedly connected with a permanent magnetic plate 19 in sliding connection with the liquid storage box 16 through a plurality of return springs 18, and the liquid storage box 16 is communicated with the spin coating box 1 through a dropper 20, and a dropper 20 is positioned right above the substrate 4, and an automatic opening and closing mechanism 21 is arranged in the dropper 20.
From starting and stopping mechanism 21 including closing plate 211 and compression spring 212, closing plate 211 rotates and sets up in burette 20, and closing plate 211 can close burette 20, closing plate 211 passes through compression spring 212 and burette 20's inner wall fixed connection, cooperation through closing plate 211 and the compression spring 212 that sets up, can make burette 20 automatic opening when permanent magnetism board 19 pushes down, slide the return back on permanent magnetism board 19, make burette 20 automatic closure, the automation of device has been improved greatly, be provided with in the spin coating box 1 with electromagnetic plate 17 electric connection's reciprocal electric conduction mechanism 22.
The reciprocating conductive mechanism 22 comprises an incomplete gear 221, a driven gear 222, a spring 223, a conductive block 224, a conductive sheet 225 and a servo motor 226, wherein a protective box 26 is fixedly connected in the spin coating box 1, the incomplete gear 221 is rotatably arranged in the protective box 26, a transmission shaft of the incomplete gear 221 penetrates through the spin coating box 1 and is in transmission connection with the servo motor 226, the spring 223 is fixedly arranged in the protective box 26, the spring 223 is in transmission connection with the driven gear 222, the driven gear 222 is meshed with the incomplete gear 221, the conductive block 224 is fixedly arranged on the transmission shaft of the driven gear 222, a ring-shaped chute 27 matched with the conductive block 224 is arranged on the inner top surface of the lower end of the protective box 26, the conductive sheet 225 is embedded in the ring-shaped chute 27, the conductive sheet 225 can be butted with the conductive block 224, and under the driving of the servo motor 226 through the matching of the incomplete gear 221, the driven gear 222 and the spring 223, so that the conductive block 224 intermittently abuts against the conductive sheet 225, thereby allowing the electromagnetic plate 17 to be intermittently energized.
The operating principle of the present invention will now be described as follows: when the spin coating operation is required, firstly, the substrate 4 which is processed in advance is butted with the hollow insert block 6 on the supporting seat 3 through the slot 5, then, the knob 24 is rotated, the knob 24 can drive the second worm 121 to rotate, under the transmission of each second worm wheel 122, the second worm 121 can drive each threaded sleeve 8 to synchronously rotate, the threaded sleeve 8 can drive the convex block 10 to ascend through the screw rod 9, when the positioning block 28 is butted with the slot 5, the convex block 10 can be butted against the spherical blocks 112 on two sides, further, the T-shaped block 111 is butted against the slot 5, the substrate 4 is locked, and then, precursor solution is input into the liquid storage box 16.
Then, the driving motor 153 and the servo motor 226 are started, the servo motor 226 drives the incomplete gear 221 to rotate, the incomplete gear 221 reciprocally engages with the driven gear 222 in the rotating process, the conductive block 224 can reciprocally rotate in the annular chute 27 by matching with the clockwork spring 223, the conductive block 224 can reciprocally abut against the conductive sheet 225, the electromagnetic plate 17 is intermittently energized, the permanent magnetic plate 19 can reciprocally extrude the precursor solution in the liquid storage tank 16 by matching with the reset spring 18, the dropper 20 can intermittently drip the precursor solution onto the substrate 4 by matching with the rotatably arranged closing plate 211 and the compression spring 212, the driving motor 153 drives the driving bevel gear 151 to rotate, the driving bevel gear 151 drives the first worm 13 to rotate under the transmission of the driven bevel gear 152, the first worm 13 drives the substrate 4 to rotate under the transmission of the first worm 14, during the rotation of the substrate 4, the precursor solution dropped thereon is uniformly diffused to form a liquid film.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims (4)

1. A preparation method of a stable perovskite thin film is characterized by mainly comprising the following steps:
s1, preparing a precursor solution, and mixing the methyl amine iodide solution and the lead iodide solution in a DMF (dimethyl formamide) solvent according to a certain proportion by using mixing equipment to form a clear and transparent perovskite precursor solution;
s2 spin coating, driving the substrate plate to rotate through spin coating equipment, and then intermittently dripping the perovskite precursor solution obtained through S1 on the substrate plate which is processed in advance to uniformly diffuse the perovskite precursor solution on the substrate plate to obtain a liquid film;
s3, heating, namely placing the liquid film obtained in the S2 in heating equipment for heating, so that the solvent on the surface of the liquid film is volatilized, and the conversion to the perovskite crystal film is completed;
the spin coating equipment used in the perovskite thin film preparation process comprises a spin coating box (1), a supporting shaft (2) is connected in the spin coating box (1) in a rotating mode, a supporting seat (3) is fixedly connected to the upper end of the supporting shaft (2), a substrate (4) is connected to the supporting seat (3), a plurality of slots (5) are formed in the lower end of the substrate (4), hollow inserting blocks (6) matched with the slots (5) are fixedly connected to the supporting seat (3), cavities (7) matched with the hollow inserting blocks (6) are formed in the supporting seat (3), threaded sleeves (8) corresponding to the hollow inserting blocks (6) are arranged in the cavities (7) in a rotating mode, screw rods (9) are connected to the threaded sleeves (8) in a threaded mode, the upper ends of the screw rods (9) extend into the corresponding hollow inserting blocks (6) and are fixedly connected with convex blocks (10), two sides of the hollow insert block (6) are respectively provided with a pressing mechanism (11) matched with the convex block (10), a cavity (7) is internally provided with a driving mechanism (12) matched with each thread bushing (8), the pressing mechanism (11) comprises a T-shaped block (111) and a spherical block (112), the T-shaped block (111) is arranged on the hollow insert block (6) in a sliding manner, the T-shaped block (111) is fixedly connected with the side wall of the hollow insert block (6) through a plurality of stretching springs (23), one end of the T-shaped block (111) positioned in the hollow insert block (6) is fixedly connected with the spherical block (112), the spherical block (112) is pressed against the convex block (10), one end of the T-shaped block (111) far away from the spherical block (112) is pressed against the inner wall of the slot (5), a first worm (13) is rotatably connected in the spin coating box (1), and a first worm wheel (14) meshed with the first worm (13) is sleeved on the support shaft (2), the spin coating box (1) is provided with a speed reducing mechanism (15) matched with the first worm (13), the speed reducing mechanism (15) comprises a driving bevel gear (151), a driven bevel gear (152) and a driving motor (153), one side of the spin coating box (1) is fixedly connected with a transmission box (25), the driving bevel gear (151) is rotatably arranged in the transmission box (25), a transmission shaft of the driving bevel gear (151) is in transmission connection with the driving motor (153), one end of the first worm (13) extends into the transmission box (25) and is sleeved with the driven bevel gear (152), the driven bevel gear (152) is meshed with the driving bevel gear (151), the gear ratio of the driving bevel gear (151) to the driven bevel gear (152) is 1:2, the upper end of the spin coating box (1) is fixedly connected with a liquid storage box (16), an electromagnetic plate (17) is embedded in the inner top surface of the upper end of the liquid storage box (16), and the electromagnetic plate (17) is fixedly connected with a permanent magnetic plate (19) in sliding connection with the liquid storage box (16) through a plurality of reset springs (18), the liquid storage box (16) is communicated with the spin coating box (1) through a dropper (20), the dropper (20) is positioned right above the substrate (4), a self-opening and closing mechanism (21) is arranged in the dropper (20), the self-opening and closing mechanism (21) comprises a closing plate (211) and a compression spring (212), the closing plate (211) is rotationally arranged in the dropper (20), the closing plate (211) can close the dropper (20), the closing plate (211) is fixedly connected with the inner wall of the dropper (20) through the compression spring (212), a reciprocating conductive mechanism (22) electrically connected with the electromagnetic plate (17) is arranged in the spin coating box (1), and the reciprocating conductive mechanism (22) comprises an incomplete gear (221), a driven gear (222) and a driven gear (222), A spring (223), a conductive block (224), a conductive sheet (225) and a servo motor (226), a protective box (26) is fixedly connected in the spin coating box (1), the incomplete gear (221) is rotatably arranged in the protective box (26), and the transmission shaft of the incomplete gear (221) penetrates through the spin coating box (1) and is in transmission connection with a servo motor (226), the clockwork spring (223) is fixedly arranged in the protective box (26), and the clockwork spring (223) is in transmission connection with the driven gear (222), the driven gear (222) is meshed with the incomplete gear (221), the conductive block (224) is fixedly arranged on the transmission shaft of the driven gear (222), and the inner top surface of the lower end of the protection box (26) is provided with an annular sliding chute (27) matched with the conductive block (224), the conducting strip (225) is embedded in the annular sliding groove (27), and the conducting strip (225) can be butted with the conducting block (224).
2. The preparation method of a stable perovskite thin film as claimed in claim 1, wherein the driving mechanism (12) comprises a second worm (121) and a plurality of second worm wheels (122), the second worm (121) is rotatably disposed in the cavity (7), one end of the second worm (121) penetrates through the cavity (7) and is fixedly connected with a knob (24), each second worm wheel (122) is respectively sleeved on the corresponding threaded sleeve (8), and each second worm wheel (122) is meshed with the second worm (121).
3. The method for preparing a stable perovskite thin film as claimed in claim 1, wherein a positioning block (28) is fixedly connected to the bump (10), and a friction pad is bonded to one side of the T-shaped block (111).
4. The method for preparing a stable perovskite thin film as claimed in claim 1, wherein a limiting rod (29) is fixedly connected between each screw (9).
CN202110670549.1A 2021-06-17 2021-06-17 Preparation method of stable perovskite thin film Expired - Fee Related CN113417005B (en)

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