CN206483661U - Spin coating flush coater - Google Patents
Spin coating flush coater Download PDFInfo
- Publication number
- CN206483661U CN206483661U CN201720105205.5U CN201720105205U CN206483661U CN 206483661 U CN206483661 U CN 206483661U CN 201720105205 U CN201720105205 U CN 201720105205U CN 206483661 U CN206483661 U CN 206483661U
- Authority
- CN
- China
- Prior art keywords
- spin coating
- flush coater
- heating bucket
- sample holder
- dropping liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of spin coating flush coater, including heating bucket, sample holder, dropping liquid atomization double purpose device and the drive device for driving heating bucket rotation, heater strip is wound with the heating bucket, sample holder is arranged in heating bucket, sample holder rotates with heating bucket, dropping liquid atomization double purpose device is arranged on the top of heating bucket, and dropping liquid atomization double purpose device, just to sample holder, it is hatch frame to heat the top of bucket and the top of sample holder.The utility model is using spin coating, spraying integrated device, using centrifugal principle, sample surfaces is formed one layer of uniform, stable film layer, improves final product quality.
Description
Technical field
The utility model belongs to materials processing technology field, more particularly to a kind of spin coating flush coater.
Background technology
Sol evenning machine is also known as spin coater, photoresist spinner, photoresist spinner, whirler, spin coating machine, rotary coating
Machine, vacuum coating equipment.Sol evenning machine is applied to microelectronics, semiconductor, plate-making, new energy, biomaterial, optics and surface coating etc.
Technique, the film being mainly used in sol-gel experiment makes, and its operation principle is high speed rotary substrate, utilizes centrifugal force
Make to drop in the glue on substrate to be uniformly coated on substrate, thickness is different regarding the coefficient of viscosity between different glues and substrate,
Also it is relevant with rotary speed and time, it can be produced in units such as operating mode enterprise, scientific research, education, scientific research, teaching are used.
Flush coater, is the Special coating equipment using spraying technology, and principle is to promote distribution commutation dress control air-flow moment
Replace to so that the piston of air motor makees the reciprocating motion of steady and continuous.Coating supercharging to suction, will through high-pressure hose
Coating is transported in the spray gun of flush coater, and coated article body surface face will be discharged into after the atomization of coating moment by spray gun.Flush coater is main
It is made up of feeding device, spray gun, atomization occurring source, it is adaptable to the row such as leatherware handbag, gift wrap, furniture, footwear industry, automobile making
In industry.The groundwork position of flush coater is double-acting type pneumatic hydraulic booster pump, and changement is the pilot-operated type of special shape
Full Pneumatic control air distribution reversing arrangement.Into after compressed air, when piston is moved to cylinder upper end or bottom, make pilot valve or
Lower guide's valve events, control air-flow moment promotes the commutation of distribution reversing arrangement, so that the piston of air motor makees stable connect
Continuous reciprocating motion.Because piston is rigidly connected with the plunger in coating plunger pump, and area of the area than plunger of piston
Greatly, thus it is pressurized the coating of suction, the coating being pressurized is transported to airless spray gun through high-pressure hose, finally without gas jets
Place's release hydraulic pressure, sprays to coated article surface after instantaneous atomization, forms film layer.
Whether sol evenning machine or flush coater in the prior art, its each independent role when function it is all very single, and solution
Consumption is more, and cost is high, and volume is big, it has not been convenient to which the research such as laboratory is used.And using conventional method in sample surfaces film forming, it is first
First need to soak sample for a long time, the time-consuming length of this method, spend manpower big, effect is poor, and film layer is uneven, and adhesion
Weak, final product quality can not meet requirement.
As can be seen here, prior art awaits further improving.
Utility model content
The utility model be the weak point for avoiding above-mentioned prior art from existing there is provided a kind of spin coating flush coater, it makes
Spin coating, spraying integration, using centrifugal principle, make one layer of uniform, stable film layer of sample surfaces formation, improve into quality
Amount.
The technical scheme that the utility model is used for：
Spin coating flush coater, including heating bucket, sample holder, dropping liquid atomization double purpose device and the driving for driving heating bucket rotation
Heater strip is wound with device, the heating bucket, sample holder is arranged in heating bucket, and sample holder is with heating bucket
Rotation, dropping liquid atomization double purpose device is arranged on the top of heating bucket, and dropping liquid atomization double purpose device is just to sample holder, heating bucket
Top and the top of sample holder are hatch frame.
The sample holder includes left surface, right flank, leading flank, trailing flank and bottom surface, the left surface, right side
Several through holes are evenly equipped with face, leading flank, trailing flank and bottom surface respectively.
The drawer type neck for placing sample holder is provided with the heating bucket, is offered on the side wall for heating bucket
The gathering hole come in and gone out for sample holder, and it is provided with what is thrown away for preventing sample holder in the course of work at gathering hole
Switch gate.
The drive device includes motor and transmission mechanism, and the output shaft of motor is connected by transmission mechanism with heating bucket.
The drive device also includes speed regulator, revolution detector and control system, and the speed regulator, revolution detector are equal
It is connected with the output shaft of motor, revolution detector controls the motor output shaft rotating speed real-time Transmission detected to control system
The rotating speed that system passes through speed regulator controlled motor output shaft according to the motor output shaft rotating speed detected.
The dropping liquid atomization double purpose device includes solution containing tank, solution conveyor tube and dropping liquid and is atomized dual-purpose shower nozzle, and solution is contained
Groove is put by solution conveyor tube and the dual-purpose shower nozzle of dropping liquid atomization to be connected.
The dropping liquid atomization double purpose device also includes liquid flow sensor and the pressure regulation being arranged in solution conveyor tube
Device, the solution that liquid flow sensor is used to detect in solution conveyor tube wanders speed, and pressure regulator is defeated for adjusting solution
Send the Fluid pressure in pipe.
The bottom of the heating bucket is provided with coupled logical solution collecting pipe.
The spin coating flush coater also includes the power supply for the heater strip and drive device supply electric power.
The spin coating flush coater also includes heating temperature-control system, and the heating temperature-control system includes temperature sensor, temperature
Sensor is connected with heater strip, and temperature sensor is used for the temperature for detecting heater strip.
By adopting the above-described technical solution, having the beneficial effect that acquired by the utility model：
1st, the utility model, using centrifugal principle, enables sample surfaces to be formed using spin coating, spraying integrated device
One layer of uniform, stable film layer, improves final product quality.
2nd, the dropping liquid atomization double purpose device in the utility model can save solution, cost-effective, under spray pattern, dropping liquid
Solution pressurized jet is atomized into tiny particle by atomization double purpose device, it is distributed evenly in sample surfaces, in sample surfaces
Form smooth, smooth-going, fine and close film layer, no brush mark, roller marks, it is incomparable that this is that traditional brush, rolling mode coat film layer,
Substantially increase the uniformity of film layer.
3rd, the utility model detects motor output shaft rotating speed using revolution detector, and real by control system and speed regulator
When regulation motor rotating speed, the rotating speed of sample holder is gradually tended towards stability, be conducive to even film layer, it is ensured that spin coating quality.
In addition the utility model has very high speed stability and quick startability, it is ensured that make sample surfaces even film layer, and
Regulation motor output shaft rotational speed regulation thicknesses of layers can be passed through.
4th, sample is put into sample holder by the utility model, and sample holder is wrapped in heater strip, sample table
The heated silk continuous heating of solution in face, accelerates evaporation, makes solvent is more to be attached to sample surfaces faster, adhesive force is good, film
Layer long lifespan.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the structural representation of sample holder in the utility model.
Wherein,
1st, power supply 2, motor 3, speed regulator 4, sample holder 41, through hole 5, heater strip 6, dropping liquid atomization are dual-purpose
Device 7, revolution detector 8, solution collecting pipe 9, heating bucket
Embodiment
The utility model is described in further detail with specific embodiment below in conjunction with the accompanying drawings, but the utility model
It is not limited to these embodiments.
As depicted in figs. 1 and 2, spin coating flush coater, including heating bucket 9, sample holder 4, dropping liquid atomization double purpose device 6 and band
Be wound with heater strip 5 on the drive device that dynamic heating bucket 9 rotates, the heating bucket 9, the heater strip 5 along heating bucket 9 helically
Winding.The spin coating flush coater also includes the power supply 1 for the heater strip 5 and drive device supply electric power.The spin coating spray
Painting machine also include heating temperature-control system, the heating temperature-control system include temperature sensor, temperature sensor with the phase of heater strip 5
Even, temperature sensor is used for the temperature for detecting heater strip 5.
The power supply 1 includes alternating current steady voltage plug, and the power supply 1 also includes battery or transformer, AC voltage-stabilizing
Power supply can be heater strip 5, heating temperature-control system and drive device supply electric power via battery, and alternating current steady voltage plug can also be direct
It is heater strip, heating temperature-control system and drive device supply electric power by transformer
The sample holder is arranged in heating bucket 9, and sample holder 4 rotates with heating bucket 9.The heating bucket
The drawer type neck for placing sample holder 4 is provided with 9, is offered on the side wall for heating bucket 9 for sample holder 4
The gathering hole of discrepancy, and the switch gate for preventing sample holder 4 from throwing away in the course of work is provided with gathering hole.The sample
Product holder 4 can easily come in and go out through gathering hole as drawer and heat the drawer type neck of bucket 9.The sample holder 4 is wrapped
Include and divide on left surface, right flank, leading flank, trailing flank and bottom surface, the left surface, right flank, leading flank, trailing flank and bottom surface
Several through holes 41 are not evenly equipped with.The through hole 41 is applied not only to ventilation, is additionally operable to the drippage of surplus liquid.The heating bucket 9
Bottom be provided with coupled logical solution collecting pipe 8.The surplus liquid of drippage is collected after being flowed out through solution collecting pipe 8,
Avoid the accumulation of liquid in heating bucket 9.
The dropping liquid atomization double purpose device 6 is arranged on the top of heating bucket 9, and dropping liquid atomization double purpose device 6 is just placed to sample
Box 4.It is hatch frame to heat the top of bucket 9 and the top of sample holder 4, and double purpose device 6 is atomized from dropping liquid to facilitate
Solution is smoothly dropped down onto on the sample in sample holder 4.The dropping liquid atomization double purpose device 6 includes solution containing tank, solution and conveyed
Pipe and dropping liquid are atomized dual-purpose shower nozzle, and solution containing tank is atomized dual-purpose shower nozzle by solution conveyor tube and dropping liquid and is connected.The dropping liquid
Atomization double purpose device 6 also includes the liquid flow sensor and pressure regulator being arranged in solution conveyor tube, fluid flow sensing
The solution that device is used to detect in solution conveyor tube wanders speed, and pressure regulator is used to adjust the fluid pressure in solution conveyor tube
Power.When pressure is relatively low, liquid is fallen in the way of drop, and when pressure is higher, liquid is ejected into the form of atomisation
Sample surfaces in sample holder 4.
The drive device includes motor 2 and transmission mechanism, and the output shaft of motor 2 passes through transmission mechanism and the heating phase of bucket 9
Even.The drive device also includes speed regulator 3, revolution detector 7 and control system, and the speed regulator 3, revolution detector 7 are equal
It is connected with the output shaft of motor 2, revolution detector 7 controls the motor output shaft rotating speed real-time Transmission detected to control system
System processed is according to rotating speed of the motor output shaft rotating speed detected by speed regulator controlled motor output shaft, so as to ensure that heating
The stability of 9 rotating speeds of bucket, is conducive to sample surfaces to form uniform film layer.
The part do not addressed in the utility model uses or used for reference prior art and can be achieved.
Specific embodiment described herein is only to spiritual example explanation of the present utility model.This practicality
New person of ordinary skill in the field can make various modifications or supplement or adopt to described specific embodiment
Substituted with similar mode, but without departing from spirit of the present utility model or surmount model defined in appended claims
Enclose.
Claims (10)
1. spin coating flush coater, it is characterised in that including heating bucket, sample holder, dropping liquid atomization double purpose device and drive heating bucket
Heater strip is wound with the drive device of rotation, heating bucket, sample holder is arranged in heating bucket, sample holder with
Heating bucket is rotated together, and dropping liquid atomization double purpose device is arranged on the top of heating bucket, and dropping liquid atomization double purpose device is just placed to sample
Box, it is hatch frame to heat the top of bucket and the top of sample holder.
2. spin coating flush coater according to claim 1, it is characterised in that the sample holder includes left surface, right side
It is evenly equipped with respectively on face, leading flank, trailing flank and bottom surface, the left surface, right flank, leading flank, trailing flank and bottom surface some
Individual through hole.
3. spin coating flush coater according to claim 1, it is characterised in that be provided with the heating bucket for placing sample
The gathering hole come in and gone out for sample holder is offered on the drawer type neck of holder, the side wall for heating bucket, and at gathering hole
It is provided with the switch gate for preventing sample holder from throwing away in the course of work.
4. spin coating flush coater according to claim 1, it is characterised in that the drive device includes motor and driver
Structure, the output shaft of motor is connected by transmission mechanism with heating bucket.
5. spin coating flush coater according to claim 4, it is characterised in that the drive device also includes speed regulator, rotating speed
Detector and control system, the speed regulator, revolution detector are connected with the output shaft of motor, and revolution detector will be detected
Motor output shaft rotating speed real-time Transmission to control system, control system passes through speed governing according to the motor output shaft rotating speed detected
The rotating speed of device controlled motor output shaft.
6. spin coating flush coater according to claim 1, it is characterised in that the dropping liquid atomization double purpose device is held including solution
Groove, solution conveyor tube and dropping liquid are atomized dual-purpose shower nozzle, and solution containing tank is atomized dual-purpose shower nozzle phase by solution conveyor tube with dropping liquid
Even.
7. spin coating flush coater according to claim 6, it is characterised in that the dropping liquid atomization double purpose device also includes being arranged on
Liquid flow sensor and pressure regulator in solution conveyor tube, liquid flow sensor are used to detect in solution conveyor tube
Solution wanders speed, and pressure regulator is used to adjust the Fluid pressure in solution conveyor tube.
8. spin coating flush coater according to claim 1, it is characterised in that the bottom of the heating bucket is provided with coupled
Logical solution collecting pipe.
9. spin coating flush coater according to claim 1, it is characterised in that the spin coating flush coater also includes being the heating
The power supply of silk and drive device supply electric power.
10. spin coating flush coater according to claim 1, it is characterised in that the spin coating flush coater also includes heating temperature control
System, the heating temperature-control system includes temperature sensor, and temperature sensor is connected with heater strip, and temperature sensor is used to examine
Survey the temperature of heater strip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720105205.5U CN206483661U (en) | 2017-01-24 | 2017-01-24 | Spin coating flush coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720105205.5U CN206483661U (en) | 2017-01-24 | 2017-01-24 | Spin coating flush coater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206483661U true CN206483661U (en) | 2017-09-12 |
Family
ID=59767290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720105205.5U Expired - Fee Related CN206483661U (en) | 2017-01-24 | 2017-01-24 | Spin coating flush coater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206483661U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113417005A (en) * | 2021-06-17 | 2021-09-21 | 北方民族大学 | Preparation method of stable perovskite thin film |
| CN115463777A (en) * | 2022-08-24 | 2022-12-13 | 兰州大学 | Ultrasonic spray pyrolysis rotary film coating machine and film coating method thereof |
-
2017
- 2017-01-24 CN CN201720105205.5U patent/CN206483661U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113417005A (en) * | 2021-06-17 | 2021-09-21 | 北方民族大学 | Preparation method of stable perovskite thin film |
| CN113417005B (en) * | 2021-06-17 | 2022-04-08 | 北方民族大学 | Preparation method of stable perovskite thin film |
| CN115463777A (en) * | 2022-08-24 | 2022-12-13 | 兰州大学 | Ultrasonic spray pyrolysis rotary film coating machine and film coating method thereof |
| CN115463777B (en) * | 2022-08-24 | 2024-02-20 | 兰州大学 | Ultrasonic spray pyrolysis rotary coating machine and coating method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170912 Termination date: 20190124 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |