CN206483661U - Spin coating flush coater - Google Patents

Spin coating flush coater Download PDF

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CN206483661U
CN206483661U CN201720105205.5U CN201720105205U CN206483661U CN 206483661 U CN206483661 U CN 206483661U CN 201720105205 U CN201720105205 U CN 201720105205U CN 206483661 U CN206483661 U CN 206483661U
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spin coating
heating
heating barrel
sample
dual
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刘汉鹏
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Shandong University of Science and Technology
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Shandong University of Science and Technology
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Abstract

The utility model discloses a kind of spin coating flush coater, including heating bucket, sample holder, dropping liquid atomization double purpose device and the drive device for driving heating bucket rotation, heater strip is wound with the heating bucket, sample holder is arranged in heating bucket, sample holder rotates with heating bucket, dropping liquid atomization double purpose device is arranged on the top of heating bucket, and dropping liquid atomization double purpose device, just to sample holder, it is hatch frame to heat the top of bucket and the top of sample holder.The utility model is using spin coating, spraying integrated device, using centrifugal principle, sample surfaces is formed one layer of uniform, stable film layer, improves final product quality.

Description

旋涂喷涂机Spin coating machine

技术领域technical field

本实用新型属于材料加工技术领域,尤其涉及一种旋涂喷涂机。The utility model belongs to the technical field of material processing, in particular to a spin coating spraying machine.

背景技术Background technique

匀胶机又称为旋涂机、甩胶机、旋转涂胶机、旋转涂膜机、旋转涂层机、旋转涂布机、真空镀膜机。匀胶机适用于微电子、半导体、制版、新能源、生物材料、光学及表面涂覆等工艺,主要应用于溶胶-凝胶实验中的薄膜制作,其工作原理是高速旋转基片,利用离心力使滴在基片上的胶液均匀的涂布在基片上,厚度视不同胶液和基片间的粘滞系数而不同,也和旋转速度及时间有关,可在工况企业、科研、教育等单位作生产、科研、教学之用。Coating machine is also known as spin coating machine, spin coating machine, spin coating machine, spin coating machine, spin coating machine, spin coating machine, vacuum coating machine. The homogenizer is suitable for microelectronics, semiconductors, plate making, new energy, biomaterials, optics, and surface coating processes. It is mainly used in the production of thin films in sol-gel experiments. Its working principle is to rotate the substrate at high speed and use centrifugal force Make the glue dripped on the substrate evenly spread on the substrate, the thickness depends on the viscosity coefficient between different glue and the substrate, and is also related to the rotation speed and time. It can be used in working conditions, enterprises, scientific research, education, etc. The unit is used for production, scientific research and teaching.

喷涂机,是采用喷涂技术的专用涂装设备,原理是控制气流瞬间推动配气换向装置换向,从而使气动马达的活塞作稳定连续的往复运动。对吸入的涂料增压,经高压软管将涂料输送到喷涂机的喷枪内,由喷枪将涂料瞬间雾化后释放到被涂物体表面。喷涂机主要由供料装置、喷枪、雾化发生源构成,适用于皮具手袋、礼品包装、家具、鞋业、汽车制造等行业中。喷涂机的主要工作部位为双作用式气动液压增压泵,换向机构为特殊形式的先导式全气控配气换向装置。进入压缩空气后,活塞移动到气缸上端部或下端部时,使上先导阀或下先导阀动作,控制气流瞬间推动配气换向装置换向,从而使得气动马达的活塞作稳定连续的往复运动。由于活塞与涂料柱塞泵中的柱塞刚性连接,并且活塞的面积比柱塞的面积大,因而使吸入的涂料增压,被增压的涂料,经高压软管输送到无气喷枪,最后在无气喷嘴处释放液压,瞬时雾化后喷向被涂物表面,形成涂膜层。Spraying machine is a special coating equipment using spraying technology. The principle is to control the air flow to instantly push the air distribution reversing device to change direction, so that the piston of the air motor can perform stable and continuous reciprocating motion. The inhaled paint is pressurized, and the paint is delivered to the spray gun of the sprayer through the high-pressure hose, and the paint is atomized by the spray gun and released to the surface of the object to be coated. The spraying machine is mainly composed of a feeding device, a spray gun, and an atomization source, and is suitable for leather handbags, gift packaging, furniture, footwear, automobile manufacturing and other industries. The main working part of the spraying machine is a double-acting pneumatic-hydraulic booster pump, and the reversing mechanism is a special pilot-operated fully air-controlled air distribution reversing device. After entering the compressed air, when the piston moves to the upper or lower end of the cylinder, the upper pilot valve or the lower pilot valve is activated, and the air flow is controlled to instantly push the air distribution reversing device to change direction, so that the piston of the air motor performs stable and continuous reciprocating motion . Since the piston is rigidly connected to the plunger in the paint plunger pump, and the area of the piston is larger than that of the plunger, the inhaled paint is pressurized, and the pressurized paint is transported to the airless spray gun through a high-pressure hose, and finally The hydraulic pressure is released at the airless nozzle, and it is sprayed to the surface of the object to be coated after instantaneous atomization to form a coating layer.

现有技术中不论是匀胶机还是喷涂机,其各自单独作用时功能都很单一,且溶液消耗多,成本高,体积大,不方便实验室等研究使用。且采用传统方法在样品表面成膜时,首先需对样品进行长时间的浸泡,该方法费时长,花费人力大,效果差,膜层不均匀,且结合力弱,成品质量无法满足要求。In the prior art, whether it is a homogenizer or a spraying machine, each of them has a single function when acting alone, and consumes a lot of solution, high cost, and large volume, which is inconvenient for research and use in laboratories. Moreover, when the traditional method is used to form a film on the surface of the sample, the sample needs to be soaked for a long time. This method is time-consuming, labor-intensive, poor in effect, uneven in the film layer, and weak in binding force, and the quality of the finished product cannot meet the requirements.

由此可见,现有技术有待于进一步的改进和提高。This shows that the prior art needs to be further improved and improved.

实用新型内容Utility model content

本实用新型为避免上述现有技术存在的不足之处,提供了一种旋涂喷涂机,其使旋涂、喷涂一体化,利用离心力原理,使样品表面形成一层均匀、稳定的膜层,提高了成品质量。In order to avoid the shortcomings of the above-mentioned prior art, the utility model provides a spin coating sprayer, which integrates spin coating and spray coating, and uses the principle of centrifugal force to form a layer of uniform and stable film on the surface of the sample. Improved finished product quality.

本实用新型所采用的技术方案为:The technical scheme adopted in the utility model is:

旋涂喷涂机,包括加热桶、样品放置盒、滴液雾化两用器及带动加热桶旋转的驱动装置,所述加热桶上缠绕有加热丝,样品放置盒设置在加热桶内,样品放置盒随加热桶一起旋转,滴液雾化两用器设置在加热桶的上方,且滴液雾化两用器正对样品放置盒,加热桶的顶端和样品放置盒的顶端均为开口结构。Spin coating sprayer, including a heating barrel, a sample placement box, a dual-purpose device for dripping and atomizing, and a driving device that drives the heating barrel to rotate. The heating barrel is wound with a heating wire, and the sample placement box is set in the heating barrel. The box rotates together with the heating barrel, and the dual-purpose device for dripping and atomizing is set above the heating barrel, and the dual-purpose device for dropping and atomizing is facing the sample placement box, and the top of the heating barrel and the top of the sample placement box are both open structures.

所述样品放置盒包括左侧面、右侧面、前侧面、后侧面及底面,所述左侧面、右侧面、前侧面、后侧面及底面上分别均布有若干个通孔。The sample storage box includes a left side, a right side, a front side, a rear side and a bottom surface, and several through holes are evenly distributed on the left side, the right side, the front side, the rear side and the bottom surface respectively.

所述加热桶上设置有用于放置样品放置盒的抽屉式卡槽,加热桶的侧壁上开设有用于样品放置盒出入的操作口,且操作口处设置有用于工作过程中防止样品放置盒甩出的开关门。The heating barrel is provided with a drawer-type card slot for placing the sample placing box, and the side wall of the heating barrel is provided with an operation port for entering and exiting the sample placing box, and the operating port is provided with a handle for preventing the sample placing box from being thrown during the working process. out of the switch door.

所述驱动装置包括电机和传动机构,电机的输出轴通过传动机构与加热桶相连。The driving device includes a motor and a transmission mechanism, and the output shaft of the motor is connected with the heating barrel through the transmission mechanism.

所述驱动装置还包括调速器、转速检测器及控制系统,所述调速器、转速检测器均与电机的输出轴相连,转速检测器将检测到的电机输出轴转速实时传输至控制系统,控制系统根据检测到的电机输出轴转速通过调速器控制电机输出轴的转速。The driving device also includes a speed governor, a speed detector and a control system, the speed governor and the speed detector are connected to the output shaft of the motor, and the speed detector transmits the detected speed of the motor output shaft to the control system in real time , the control system controls the speed of the motor output shaft through the governor according to the detected motor output shaft speed.

所述滴液雾化两用器包括溶液盛放槽、溶液输送管及滴液雾化两用喷头,溶液盛放槽通过溶液输送管与滴液雾化两用喷头相连。The dual-purpose device for dripping and atomizing includes a solution holding tank, a solution delivery pipe and a dual-purpose spraying nozzle for dropping and atomizing.

所述滴液雾化两用器还包括设置在溶液输送管内的液体流量传感器和压力调节器,液体流量传感器用于检测溶液输送管内的溶液流落速度,压力调节器用于调节溶液输送管内的流体压力。The drop and atomizer also includes a liquid flow sensor and a pressure regulator arranged in the solution delivery pipe, the liquid flow sensor is used to detect the solution flow rate in the solution delivery pipe, and the pressure regulator is used to adjust the fluid pressure in the solution delivery pipe .

所述加热桶的底部设置有与其相连通的溶液收集管。The bottom of the heating barrel is provided with a solution collecting pipe communicating with it.

所述旋涂喷涂机还包括为所述加热丝和驱动装置供给电力的供电部。The spin coating sprayer also includes a power supply part for supplying electric power to the heating wire and the driving device.

所述旋涂喷涂机还包括加热温控系统,所述加热温控系统包括温度传感器,温度传感器均与加热丝相连,温度传感器用于检测加热丝的温度。The spin coating sprayer also includes a heating temperature control system, the heating temperature control system includes a temperature sensor, the temperature sensors are connected to the heating wire, and the temperature sensor is used to detect the temperature of the heating wire.

由于采用了上述技术方案,本实用新型所取得的有益效果为:Owing to adopting above-mentioned technical scheme, the beneficial effect that the utility model obtains is:

1、本实用新型采用旋涂、喷涂一体式装置,利用离心力原理,使样品表面能够形成一层均匀、稳定的膜层,提高了成品质量。1. The utility model adopts a spin-coating and spraying integrated device, and uses the principle of centrifugal force to form a uniform and stable film layer on the surface of the sample, which improves the quality of the finished product.

2、本实用新型中的滴液雾化两用器可以节约溶液,节约成本,在喷涂模式下,滴液雾化两用器将溶液加压喷射雾化成细小的颗粒,使其均匀地分布于样品表面,在样品表面形成光滑、平顺、致密的膜层,无刷痕、滚痕,这是传统的刷、滚方式涂覆膜层所无法比拟的,大大提高了膜层的均匀度。2. The dual-purpose device for dripping and atomizing in the utility model can save solution and cost. In the spraying mode, the dual-purpose device for dripping and atomizing sprays and atomizes the solution into fine particles so that it can be evenly distributed on the On the surface of the sample, a smooth, smooth and dense film is formed on the surface of the sample, without brush marks and rolling marks, which is incomparable to the traditional brush and roll coating film, which greatly improves the uniformity of the film.

3、本实用新型采用转速检测器检测电机输出轴转速,并通过控制系统和调速器实时调节电机转速,使样品放置盒的转速逐渐趋于稳定,有利于膜层均匀,保证了匀胶质量。此外本实用新型具有很高的转速稳定性和快速启动性,可以保证使样品表面膜层均匀,并可通过调节电机输出轴转速调节膜层厚度。3. The utility model uses a speed detector to detect the speed of the output shaft of the motor, and adjusts the speed of the motor in real time through the control system and the governor, so that the speed of the sample storage box gradually tends to be stable, which is beneficial to the uniformity of the film layer and ensures the quality of the uniform glue . In addition, the utility model has high rotational speed stability and fast start-up performance, which can ensure that the film layer on the surface of the sample is uniform, and the film thickness can be adjusted by adjusting the rotational speed of the output shaft of the motor.

4、本实用新型将样品放入样品放置盒内,样品放置盒被包裹在加热丝内,样品表面的溶液经加热丝持续加热,加速蒸发,使溶剂更多更快的附着在样品表面,附着力好,膜层寿命长。4. The utility model puts the sample into the sample storage box, and the sample storage box is wrapped in the heating wire, and the solution on the surface of the sample is continuously heated by the heating wire to accelerate evaporation, so that more and faster solvents are attached to the sample surface, and the attached Good focus, long film life.

附图说明Description of drawings

图1为本实用新型的结构示意图。Fig. 1 is the structural representation of the utility model.

图2为本实用新型中样品放置盒的结构示意图。Fig. 2 is a schematic structural view of the sample storage box in the present invention.

其中,in,

1、供电部 2、电机 3、调速器 4、样品放置盒 41、通孔 5、加热丝 6、滴液雾化两用器 7、转速检测器 8、溶液收集管 9、加热桶1. Power supply part 2. Motor 3. Governor 4. Sample storage box 41. Through hole 5. Heating wire 6. Dual-purpose device for dripping and atomizing 7. Speed detector 8. Solution collection tube 9. Heating barrel

具体实施方式detailed description

下面结合附图和具体的实施例对本实用新型作进一步的详细说明,但本实用新型并不限于这些实施例。The utility model will be further described in detail below in conjunction with the accompanying drawings and specific embodiments, but the utility model is not limited to these embodiments.

如图1和图2所示,旋涂喷涂机,包括加热桶9、样品放置盒4、滴液雾化两用器6及带动加热桶9旋转的驱动装置,所述加热桶9上缠绕有加热丝5,所述加热丝5沿加热桶9呈螺旋缠绕。所述旋涂喷涂机还包括为所述加热丝5和驱动装置供给电力的供电部1。所述旋涂喷涂机还包括加热温控系统,所述加热温控系统包括温度传感器,温度传感器均与加热丝5相连,温度传感器用于检测加热丝5的温度。As shown in Figures 1 and 2, the spin coating sprayer includes a heating barrel 9, a sample placement box 4, a dual-purpose device for dripping and atomizing 6, and a driving device that drives the heating barrel 9 to rotate, and the heating barrel 9 is wound with The heating wire 5 is spirally wound along the heating barrel 9 . The spin coating sprayer also includes a power supply part 1 for supplying electric power to the heating wire 5 and the driving device. The spin coating sprayer also includes a heating temperature control system, the heating temperature control system includes a temperature sensor, the temperature sensors are connected to the heating wire 5, and the temperature sensor is used to detect the temperature of the heating wire 5.

所述供电部1包括交流稳压电源,所述供电部1还包括蓄电池或变压器,交流稳压电源可经由蓄电池为加热丝5、加热温控系统及驱动装置供给电力,交流稳压电源还可直接经过变压器为加热丝、加热温控系统及驱动装置供给电力The power supply unit 1 includes an AC stabilized power supply, and the power supply unit 1 also includes a battery or a transformer. The AC stabilized power supply can supply power to the heating wire 5, the heating temperature control system and the driving device through the battery, and the AC stabilized power supply can also Directly through the transformer to supply power to the heating wire, heating temperature control system and driving device

所述样品放置盒设置在加热桶9内,样品放置盒4随加热桶9一起旋转。所述加热桶9上设置有用于放置样品放置盒4的抽屉式卡槽,加热桶9的侧壁上开设有用于样品放置盒4出入的操作口,且操作口处设置有用于工作过程中防止样品放置盒4甩出的开关门。所述样品放置盒4可如抽屉一样经操作口方便地出入加热桶9的抽屉式卡槽。所述样品放置盒4包括左侧面、右侧面、前侧面、后侧面及底面,所述左侧面、右侧面、前侧面、后侧面及底面上分别均布有若干个通孔41。所述通孔41不仅用于通风,还用于多余液体的滴落。所述加热桶9的底部设置有与其相连通的溶液收集管8。滴落的多余液体经溶液收集管8流出后被收集,避免了加热桶9内液体的积累。The sample placement box is arranged in the heating barrel 9 , and the sample placement box 4 rotates together with the heating barrel 9 . The heating bucket 9 is provided with a drawer-type drawer slot for placing the sample storage box 4, and the side wall of the heating bucket 9 is provided with an operation port for the entry and exit of the sample storage box 4, and the operation port is provided with an opening for preventing the The opening and closing door that the sample placement box 4 is thrown out. The sample storage box 4 can conveniently enter and exit the drawer-type drawer slot of the heating barrel 9 through the operation port like a drawer. The sample storage box 4 includes a left side, a right side, a front side, a rear side and a bottom surface, and several through holes 41 are evenly distributed on the left side, the right side, the front side, the rear side and the bottom surface respectively. . The through holes 41 are not only used for ventilation, but also for the dripping of excess liquid. The bottom of the heating barrel 9 is provided with a solution collecting pipe 8 communicating therewith. The dripped redundant liquid is collected after flowing out through the solution collecting pipe 8, which avoids the accumulation of liquid in the heating barrel 9.

所述滴液雾化两用器6设置在加热桶9的上方,且滴液雾化两用器6正对样品放置盒4。加热桶9的顶端和样品放置盒4的顶端均为开口结构,以方便来自滴液雾化两用器6的溶液顺利落至样品放置盒4内的样品上。所述滴液雾化两用器6包括溶液盛放槽、溶液输送管及滴液雾化两用喷头,溶液盛放槽通过溶液输送管与滴液雾化两用喷头相连。所述滴液雾化两用器6还包括设置在溶液输送管内的液体流量传感器和压力调节器,液体流量传感器用于检测溶液输送管内的溶液流落速度,压力调节器用于调节溶液输送管内的流体压力。在压力较低时,液体以液滴的方式下落,在压力较高时,液体以雾化喷雾的形式喷射到样品放置盒4内的样品表面。The drop and atomizer 6 is arranged above the heating barrel 9 , and the drop and atomizer 6 faces the sample placement box 4 . Both the top of the heating barrel 9 and the top of the sample placement box 4 are open structures, so that the solution from the dual-purpose device 6 for dripping and atomizing can smoothly fall onto the sample in the sample placement box 4 . The dual-purpose device for dripping and atomizing 6 includes a solution holding tank, a solution delivery pipe and a dual-purpose spraying nozzle for dropping and atomizing. The dripping and atomizing dual-purpose device 6 also includes a liquid flow sensor and a pressure regulator arranged in the solution delivery pipe, the liquid flow sensor is used to detect the solution flow rate in the solution delivery pipe, and the pressure regulator is used to regulate the fluid in the solution delivery pipe. pressure. When the pressure is low, the liquid falls in the form of droplets, and when the pressure is high, the liquid is sprayed onto the surface of the sample in the sample placement box 4 in the form of atomized spray.

所述驱动装置包括电机2和传动机构,电机2的输出轴通过传动机构与加热桶9相连。所述驱动装置还包括调速器3、转速检测器7及控制系统,所述调速器3、转速检测器7均与电机2的输出轴相连,转速检测器7将检测到的电机输出轴转速实时传输至控制系统,控制系统根据检测到的电机输出轴转速通过调速器控制电机输出轴的转速,从而保证了加热桶9转速的稳定性,有利于样品表面形成均匀的膜层。The driving device includes a motor 2 and a transmission mechanism, and the output shaft of the motor 2 is connected with the heating barrel 9 through the transmission mechanism. Described driving device also comprises speed governor 3, speed detector 7 and control system, and described speed governor 3, speed detector 7 all link to each other with the output shaft of motor 2, and speed detector 7 will detect the motor output shaft The rotational speed is transmitted to the control system in real time, and the control system controls the rotational speed of the motor output shaft through the governor according to the detected rotational speed of the motor output shaft, thereby ensuring the stability of the rotational speed of the heating barrel 9 and facilitating the formation of a uniform film on the surface of the sample.

本实用新型中未述及的部分采用或借鉴已有技术即可实现。The parts not mentioned in the utility model can be realized by adopting or referring to the prior art.

本文中所描述的具体实施例仅仅是对本实用新型的精神所作的举例说明。本实用新型所属技术领域的技术人员可以对所描述的具体实施例做各种各样的修改或补充或采用类似的方式替代,但并不会偏离本实用新型的精神或者超越所附权利要求书所定义的范围。The specific embodiments described herein are only examples to illustrate the spirit of the present invention. Those skilled in the technical field to which the utility model belongs can make various modifications or supplements to the described specific embodiments or adopt similar methods to replace them, but they will not deviate from the spirit of the utility model or go beyond the appended claims defined range.

Claims (10)

1.旋涂喷涂机,其特征在于,包括加热桶、样品放置盒、滴液雾化两用器及带动加热桶旋转的驱动装置,所述加热桶上缠绕有加热丝,样品放置盒设置在加热桶内,样品放置盒随加热桶一起旋转,滴液雾化两用器设置在加热桶的上方,且滴液雾化两用器正对样品放置盒,加热桶的顶端和样品放置盒的顶端均为开口结构。1. Spin-coating spraying machine, it is characterized in that, comprises heating barrel, sample placement box, drop liquid atomization dual-purpose device and the driving device that drives heating barrel to rotate, is wound with heating wire on the described heating barrel, and sample placement box is arranged on In the heating barrel, the sample placement box rotates together with the heating barrel, the dual-purpose device for dripping and atomizing is set above the heating barrel, and the dual-purpose device for dripping and atomizing is facing the sample placing box, the top of the heating barrel and the side of the sample placing box The tops are all open structures. 2.根据权利要求1所述的旋涂喷涂机,其特征在于,所述样品放置盒包括左侧面、右侧面、前侧面、后侧面及底面,所述左侧面、右侧面、前侧面、后侧面及底面上分别均布有若干个通孔。2. spin coating sprayer according to claim 1, is characterized in that, described sample placement box comprises left side, right side, front side, rear side and bottom surface, described left side, right side, A plurality of through holes are evenly distributed on the front side, the rear side and the bottom surface respectively. 3.根据权利要求1所述的旋涂喷涂机,其特征在于,所述加热桶上设置有用于放置样品放置盒的抽屉式卡槽,加热桶的侧壁上开设有用于样品放置盒出入的操作口,且操作口处设置有用于工作过程中防止样品放置盒甩出的开关门。3. The spin coating sprayer according to claim 1, wherein the heating barrel is provided with a drawer-type drawer slot for placing the sample placement box, and the side wall of the heating barrel is provided with a door for the sample placement box to enter and exit. The operation port is equipped with a switch door for preventing the sample storage box from being thrown out during the working process. 4.根据权利要求1所述的旋涂喷涂机,其特征在于,所述驱动装置包括电机和传动机构,电机的输出轴通过传动机构与加热桶相连。4. The spin coating sprayer according to claim 1, wherein the driving device comprises a motor and a transmission mechanism, and the output shaft of the motor is connected with the heating barrel through the transmission mechanism. 5.根据权利要求4所述的旋涂喷涂机,其特征在于,所述驱动装置还包括调速器、转速检测器及控制系统,所述调速器、转速检测器均与电机的输出轴相连,转速检测器将检测到的电机输出轴转速实时传输至控制系统,控制系统根据检测到的电机输出轴转速通过调速器控制电机输出轴的转速。5. spin coating sprayer according to claim 4, is characterized in that, described driving device also comprises speed governor, speed detector and control system, and described speed governor, speed detector are all connected with the output shaft of motor The speed detector transmits the detected speed of the output shaft of the motor to the control system in real time, and the control system controls the speed of the output shaft of the motor through the governor according to the detected speed of the output shaft of the motor. 6.根据权利要求1所述的旋涂喷涂机,其特征在于,所述滴液雾化两用器包括溶液盛放槽、溶液输送管及滴液雾化两用喷头,溶液盛放槽通过溶液输送管与滴液雾化两用喷头相连。6. The spin coating sprayer according to claim 1, wherein the dual-purpose device for dripping and atomizing includes a solution holding tank, a solution delivery pipe and a dual-purpose spraying nozzle for dropping and atomizing, and the solution holding tank passes through The solution conveying pipe is connected with the dual-purpose nozzle for dripping and atomizing. 7.根据权利要求6所述的旋涂喷涂机,其特征在于,所述滴液雾化两用器还包括设置在溶液输送管内的液体流量传感器和压力调节器,液体流量传感器用于检测溶液输送管内的溶液流落速度,压力调节器用于调节溶液输送管内的流体压力。7. The spin coating sprayer according to claim 6, characterized in that, the dual-purpose device for dripping and atomizing also includes a liquid flow sensor and a pressure regulator arranged in the solution delivery pipe, and the liquid flow sensor is used to detect the solution The solution flow rate in the delivery pipe, and the pressure regulator is used to adjust the fluid pressure in the solution delivery pipe. 8.根据权利要求1所述的旋涂喷涂机,其特征在于,所述加热桶的底部设置有与其相连通的溶液收集管。8 . The spin coating sprayer according to claim 1 , characterized in that, the bottom of the heating barrel is provided with a solution collecting pipe communicating therewith. 9.根据权利要求1所述的旋涂喷涂机,其特征在于,所述旋涂喷涂机还包括为所述加热丝和驱动装置供给电力的供电部。9 . The spin coating sprayer according to claim 1 , further comprising a power supply part for supplying electric power to the heating wire and the driving device. 10.根据权利要求1所述的旋涂喷涂机,其特征在于,所述旋涂喷涂机还包括加热温控系统,所述加热温控系统包括温度传感器,温度传感器均与加热丝相连,温度传感器用于检测加热丝的温度。10. The spin coating sprayer according to claim 1, characterized in that, the spin coating sprayer also includes a heating temperature control system, and the heating temperature control system includes a temperature sensor, and the temperature sensors are all connected with the heating wire, and the temperature The sensor is used to detect the temperature of the heating wire.
CN201720105205.5U 2017-01-24 2017-01-24 Spin coating flush coater Expired - Fee Related CN206483661U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113417005A (en) * 2021-06-17 2021-09-21 北方民族大学 Preparation method of stable perovskite thin film
CN115463777A (en) * 2022-08-24 2022-12-13 兰州大学 Ultrasonic spray pyrolysis rotary film coating machine and film coating method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113417005A (en) * 2021-06-17 2021-09-21 北方民族大学 Preparation method of stable perovskite thin film
CN113417005B (en) * 2021-06-17 2022-04-08 北方民族大学 Preparation method of stable perovskite thin film
CN115463777A (en) * 2022-08-24 2022-12-13 兰州大学 Ultrasonic spray pyrolysis rotary film coating machine and film coating method thereof
CN115463777B (en) * 2022-08-24 2024-02-20 兰州大学 An ultrasonic spray pyrolysis rotary coating machine and its coating method

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