CN113416934B - Double-cabin vacuum coating process for lenses - Google Patents
Double-cabin vacuum coating process for lenses Download PDFInfo
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- CN113416934B CN113416934B CN202110715201.XA CN202110715201A CN113416934B CN 113416934 B CN113416934 B CN 113416934B CN 202110715201 A CN202110715201 A CN 202110715201A CN 113416934 B CN113416934 B CN 113416934B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
- C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Coating Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to a lens double-cabin vacuum coating process, when the vacuum environment of a main cabin and an auxiliary cabin of a lens double-cabin vacuum coating machine is consistent and a valve is opened and communicated, transferring a lens to be coated in the auxiliary cabin to the main cabin or transferring a coated lens in the main cabin to the auxiliary cabin; when the valve between the main cabin and the auxiliary cabin is closed, vacuum coating is carried out on the lenses in the main cabin, vacuum is put in the auxiliary cabin, the lenses to be coated are put in or the lenses which are coated are taken out, and vacuum is pumped after the putting in or taking out operation until the vacuum environment of the auxiliary cabin is consistent with that of the main cabin; the operation of transferring and taking and placing is repeated to carry out continuous vacuum coating on the lenses, the main cabin is always in a vacuum environment to carry out continuous coating through the conversion between the main cabin which can be opened and closed and the auxiliary cabin of the double-cabin vacuum lens coating machine to be coated and the coated lenses, the production period is reduced, the vacuum lower inserting plate valve, the main cabin platform, the auxiliary cabin platform, the transferring mechanism and the rotary handle driving structure are reliable, and the vacuum automatic lens coating efficiency, the stability and the coating quality are obviously improved.
Description
Technical Field
The invention relates to a lens double-cabin vacuum coating process, and belongs to the technical field of lens vacuum coating.
Background
The lens made of inorganic, organic and other materials is processed by vacuum coating to form one or more layers of films including wear-resistant hard films, antireflection films, anti-pollution top films, waterproof films and the like, which is favorable for enriching the color of the lens, increasing the abrasion and surface scratches of the lens caused by dust or gravel friction, reducing specular reflection, avoiding the phenomena of no provision of the generated reflected light ghost images, overlapping glare and the like on the front and back surface curvatures of the refractive lens. In the prior art, a single-cabin processing technology is generally adopted for vacuum coating of lenses, a lens frame with lenses to be coated is integrally hung on the top of a coating chamber, vacuumizing and heating are carried out to constant temperature, so that air moisture in the vacuum coating chamber is removed, an electron beam generated by an electron gun is beaten on a coating material to be separated into high-energy molecules, atoms or ions, and the high-energy molecules, atoms or ions fly towards the lens frame and are adhered or wedged on the surface of the lenses to form a coating.
Because of adopting single-cabin vacuum coating equipment and processing technology, the vacuum pumping and heating operation is needed before feeding and vacuum coating, the vacuum environment is needed to be relieved after coating, the cabin door is opened again to take out the coated lens frame, the lens frame to be coated is put in and fixed, the cabin door is closed to repeatedly perform the vacuum pumping and heating operation, the vacuum pumping and pumping operation between the lens coating processes of adjacent batches and the environment of the coating vacuum chamber is stable for a long time, the processing efficiency is low, continuous coating processing is difficult, and meanwhile, the transferring and driving mechanism in the prior art has the defects of large size, difficulty in stable operation under the vacuum environment and the like.
Disclosure of Invention
The invention aims at overcoming the defects of the prior art, and provides a double-cabin vacuum coating process for lenses, which is characterized in that a main cabin is always in a vacuum environment for continuous coating by switching between a main cabin and an auxiliary cabin which can be opened and closed by a double-cabin vacuum coating machine for lenses to be coated and coated, so that the production period is reduced, the driving structure under vacuum is reliable, and the vacuum automatic coating efficiency, stability and coating quality of the lenses are obviously improved.
The invention is realized by the following technical scheme:
when the vacuum environment of the main cabin and the auxiliary cabin of the lens double-cabin vacuum coating machine is consistent and the valve is opened and communicated, transferring the lens to be coated in the auxiliary cabin to the main cabin or transferring the coated lens in the main cabin to the auxiliary cabin; when the valve between the main cabin and the auxiliary cabin is closed, vacuum coating is carried out on the lenses in the main cabin, the vacuum environment is relieved in the auxiliary cabin, the lenses to be coated are put in or taken out, and the vacuum is pumped after the putting in or taking out operation until the vacuum environment of the auxiliary cabin is consistent with that of the main cabin; repeating the transferring, taking and placing operations to perform continuous lens vacuum coating;
the main cabin and the auxiliary cabin of the lens double-cabin vacuum coating machine are opened and closed through a plugboard valve, a material port for passing through lenses is arranged on the plugboard valve, a plugboard door plate capable of lifting and moving back and forth relative to the material port is arranged in the plugboard valve, lifting and moving are realized through a first chain with two sides synchronously and vertically rotating, front and back moving are realized through cylinder sliding blocks with two sides synchronously moving back and forth, a first sprocket with synchronous rotation is arranged in the first chain, and a plurality of jacks are arranged between the plugboard door plate and the inner wall of the material port;
the auxiliary cabin of the lens double-cabin vacuum coating machine is internally provided with lenses by an auxiliary cabin platform which can be lifted, and the main cabin is internally provided with lenses by a main cabin platform which can be lifted; the main cabin platform and the auxiliary cabin platform are respectively hung on the main cabin platform or the auxiliary cabin platform through second chain wheels which synchronously rotate at four corners of the top of the double-cabin vacuum coating machine and rotate in the positive and negative directions to drive the meshed second chain to realize lifting movement;
the auxiliary cabin platform comprises at least two platform frames, a plurality of first rollers which correspondingly rotate are arranged on two sides of the platform frames and the main cabin platform, second rollers which correspond to the first rollers are arranged on the valves, the lens transfer is realized through a moving platform with the first rollers and the second rollers in rolling fit, and the sensor which is positioned on the side of the main cabin platform or the auxiliary cabin platform through the lens double-cabin vacuum coating machine during transfer is positioned in an induction way;
during film coating, a lens is clamped by a rotary handle at the top of a main cabin of the lens double-cabin vacuum film coating machine and is driven to rotate, the rotary handle comprises a gear sleeve which is rotationally driven by speed reduction and a clamping plate which is arranged at a circle interval around the bottom of the gear sleeve and can be used for outwards expanding or inwards contracting the clamp, and the clamping plate is matched with the conical surface of an outer ring of a clamping head in lifting movement at the top, a movable sliding plate on the clamping plate is in sliding fit with a fixed sliding plate at the top of the main cabin, and the tension spring between the clamping plate and the fixed sliding plate acts to realize outwards expanding or inwards contracting;
the swinging adjustment comprises two first palettes on a main cabin platform of the lens double-cabin vacuum coating machine or a second palette positioned between the two first palettes on a main cabin door plate, and coating color matching is carried out by changing shielding of coating rays.
The double-cabin vacuum coating process for the lenses comprises the following specific steps:
s1: cleaning lenses and placing the lenses to be coated on a lens frame;
s2: opening an auxiliary cabin material inlet and outlet of the lens double-cabin vacuum coating machine, integrally placing the lens frame in the step S1 on an empty platform frame of an auxiliary cabin platform, closing the auxiliary cabin material inlet and outlet, and vacuumizing and heating the auxiliary cabin of the lens double-cabin vacuum coating machine;
s3: vacuumizing and heating the main cabin of the lens double-cabin vacuum coating machine until the pressure and the temperature of the main cabin are consistent with those of the auxiliary cabin; step S2 and S3, when the auxiliary cabin and the main cabin are respectively vacuumized through a vacuumizing device, controlling the pressure in the vacuum chambers of the auxiliary cabin and the main cabin to be 4.5x10 e5Torr and controlling the temperature to be 60-300 ℃;
s4: opening a plugboard valve between an auxiliary cabin and a main cabin of the lens double-cabin vacuum coating machine, lifting and leveling an auxiliary cabin platform and the main cabin platform, transferring the whole lens frame onto the main cabin platform from a material port of the auxiliary cabin platform and the plugboard valve through a transfer mechanism, and closing the plugboard valve;
s5: the main cabin platform ascends in a main cabin of the lens double-cabin vacuum coating machine, the lens frame is hoisted by rotating the grabbing clips of the grabbing clips, and the auxiliary cabin platform descends to be separated from the lens frame;
s6: the rotary handles drive the hoisted lens frame to rotate and carry out vacuum coating, and meanwhile, the auxiliary cabin is charged with air to release the vacuum environment, and the step S2 is repeated until the pressure and the temperature of the auxiliary cabin are consistent with those of the main cabin;
s7: after the film coating is finished, the main cabin platform ascends, the rotary handles stop rotating and release the clamping of the lens frame, so that the lens frame descends and moves along with the main cabin platform;
s8: opening the plugboard valve, lifting or lowering the auxiliary cabin platform to the level of the main cabin platform and the empty platform frame of the auxiliary cabin platform, transferring the lens frame carrying the coated lenses to the auxiliary cabin platform from the main cabin platform and the material port of the plugboard valve through the transfer mechanism, lifting or lowering the auxiliary cabin platform to the level of the main cabin platform and the platform frame of the auxiliary cabin platform carrying the lens frame carrying the lenses to be coated, transferring the lens frame carrying the lenses to be coated to the main cabin platform from the auxiliary cabin platform and the material port of the plugboard valve through the transfer mechanism, and closing the plugboard valve;
s9: repeating the steps S5 and S6, putting a lens frame carrying the lens to be coated on a corresponding platform frame when the auxiliary cabin opens the auxiliary cabin feeding and discharging port, and taking out the lens frame of the lens to be coated;
s10: and repeating the steps S1 to S9 to perform continuous film coating processing.
The beneficial effects of the invention are as follows:
(1) The invention adopts a double-cabin structure, utilizes the auxiliary cabin which can be opened and closed with the main cabin to carry out vacuum coating on the main cabin, so that the lenses can be fed and discharged conveniently, and the vacuum is pumped so that the lenses to be coated and the coated lenses can be converted conveniently, thereby avoiding the vacuum pumping preparation time of the adjacent batches of lenses when the single-cabin vacuum coating machine and the coating process are adopted in the prior art, ensuring the stable control of the vacuum coating condition, ensuring that the main cabin is always in the vacuum environment so as to carry out continuous coating, and reducing the production period;
(2) The driving structure which has compact structure and can automatically and stably run in a vacuum environment is adopted to control the plugboard valve, the main cabin platform, the auxiliary cabin platform, the transfer mechanism and the rotary handle; the flashboard valve is opened and closed through the flashboard door plate and the material port to realize the opening and closing of the main cabin and the auxiliary cabin so as to facilitate the conversion of lenses; lifting the main cabin platform and the auxiliary cabin platform for transferring the corresponding lenses, feeding and discharging or coating; the transfer mechanism is used for driving the lens frame carrying the lens to be coated to transfer to the main cabin platform by the moving platform and transferring the lens frame carrying the lens to be coated to the auxiliary cabin platform; the rotary gripper grips the clamp and lifts and drives the lens frame to rotate during film coating so as to ensure uniform film coating;
in conclusion, the vacuum automatic film coating efficiency, stability and film coating quality of the lens are obviously improved by the double-cabin vacuum film coating process of the lens.
Drawings
Fig. 1 is a front perspective view of a lens double-cabin vacuum coating machine of the present invention.
Fig. 2 is a rear perspective view of a lens double-compartment vacuum coater according to the present invention.
Fig. 3 is a front perspective view of a lens double-cabin vacuum coater of the present invention omitting a partial door panel.
Fig. 4 is a front view structural diagram of fig. 3.
Fig. 5 is a side view structural diagram of fig. 3.
Fig. 6 is an internal structural view of the valve of the insert plate of the present invention.
Fig. 7 is a perspective view of the auxiliary deck platform of the present invention.
Fig. 8 is a perspective view of the main deck platform of the present invention.
Fig. 9 is a view showing the structure of the rotary grip according to the present invention.
Fig. 10 is a bottom perspective view of the rotary grip of the present invention.
The marks in the figure: the device comprises a main cabin 1, an auxiliary cabin 2, a plugboard valve 3, a material port 4, a plugboard door plate 5, a first chain 6, a first chain wheel 7, a jack 8, an auxiliary cabin platform 9, a main cabin platform 10, a second chain wheel 11, a second chain 12, a platform frame 13, a first roller 14, a second roller 15, a sensor 16, a rotary gripper 17, a gear sleeve 18, a clamping plate 19, a chuck outer ring 20, a conical surface 21, a movable sliding plate 22, a fixed sliding plate 23, a tension spring 24, a first palette 25, a second palette 26, a material inlet and outlet 27, a vacuumizing device 28, a lens frame 29, a first servo motor 30, a first transmission shaft 31, a transmission gear 32, a first cylinder 33, a cylinder upright 34, an upright post slider 35, a second servo motor 36, a first driving shaft 37, a second transmission shaft 38, a third chain wheel 39, a second cylinder 40, a third servo motor 41, a bevel gear 42, a second driving shaft 43, a pinion 44 and a large gear 45, a sliding hole 46, an electronic gun 47, a moving platform 48, a speed reducer 49, a cylinder slider 50, a third motor transmission shaft 51 and a fourth servo motor transmission 52.
Detailed Description
The following describes the embodiments of the present invention further with reference to the drawings.
When the vacuum environment of a main cabin 1 and an auxiliary cabin 2 of the lens double-cabin vacuum coating machine is consistent and a valve is opened and communicated, transferring the lens to be coated in the auxiliary cabin 2 to the main cabin 1 or transferring the coated lens in the main cabin 1 to the auxiliary cabin 2; when the valve between the main cabin 1 and the auxiliary cabin 2 is closed, vacuum coating is carried out on the lenses in the main cabin 1, the vacuum environment is relieved in the auxiliary cabin 2, the lenses to be coated are put in or taken out, and the vacuum is pumped after the putting in or taking out operation until the vacuum environment of the auxiliary cabin 2 is consistent with that of the main cabin 1; repeating the transferring, taking and placing operations to perform continuous lens vacuum coating;
the main cabin 1 and the auxiliary cabin 2 of the lens double-cabin vacuum coating machine are opened and closed through a plugboard valve 3, a material port 4 for passing through lenses is arranged on the plugboard valve 3, a plugboard door plate 5 capable of lifting and moving back and forth relative to the material port 4 is arranged in the plugboard valve 3, lifting and moving are realized through a first chain 6 with two sides synchronously and vertically rotating, front and back moving are realized through a cylinder sliding block 50 with two sides synchronously and vertically moving, a first chain wheel 7 with synchronous rotation is arranged in the first chain 6, and a plurality of jacks 8 are arranged between the plugboard door plate 5 and the inner wall of the material port 4;
the auxiliary cabin 2 of the lens double-cabin vacuum coating machine is internally provided with lenses through an auxiliary cabin platform 9 which can be lifted, and the main cabin 1 is internally provided with lenses through a main cabin platform 10 which can be lifted; the main cabin platform 10 and the auxiliary cabin platform 9 are respectively hung with the main cabin platform 10 or the auxiliary cabin platform 9 through second chain wheels 11 which synchronously rotate at four corners of the top of the double-cabin vacuum coating machine and rotate in the positive and negative directions to drive a meshed second chain 12 so as to realize lifting movement;
the auxiliary cabin platform 9 comprises at least two platform frames 13, a plurality of first rollers 14 which correspondingly rotate are arranged on two sides of the platform frames 13 and the main cabin platform 10, second rollers 15 which correspond to the first rollers 14 are arranged on the valves, the lens transfer is realized through a moving platform 48 in rolling fit with the first rollers 14 and the second rollers 15, and the sensor 16 which is positioned on the side of the main cabin platform 10 or the auxiliary cabin platform 9 through a lens double-cabin vacuum coating machine during transfer is positioned in an induction manner;
during film coating, a lens is clamped by a rotary handle 17 at the top of a main cabin 1 of the lens double-cabin vacuum film coating machine and is driven to rotate, the rotary handle 17 comprises a gear sleeve 18 which is rotationally driven by speed reduction and a clamping plate 19 which surrounds the bottom of the gear sleeve 18 at a circle interval and can be used for outwards expanding or inwards contracting the clamp, the clamping plate 19 is matched with a conical surface 21 of a chuck outer ring 20 which moves up and down at the top, a movable sliding plate 22 on the clamping plate 19 is in sliding fit with a fixed sliding plate 23 at the top of the main cabin 1, and a tension spring 24 between the clamping plate 19 and the fixed sliding plate 23 acts to realize outwards expanding or inwards contracting;
the swinging adjustment during film coating comprises two first palettes 25 on the main cabin platform 10 of the lens double-cabin vacuum film coating machine or a second palettes 26 positioned between the two first palettes 25 on the door plate of the main cabin 1, and film coating and color mixing are carried out by changing the shielding of film coating rays.
The double-cabin vacuum coating process for the lenses comprises the following specific steps:
s1: cleaning the lens, placing the lens to be coated on the lens frame 29;
s2: opening a material inlet and outlet 27 of an auxiliary cabin 2 of the lens double-cabin vacuum coating machine, integrally placing a lens frame 29 in the step S1 on an empty platform frame 13 of an auxiliary cabin platform 9, closing the material inlet and outlet 27 of the auxiliary cabin 2, and vacuumizing and heating the auxiliary cabin 2 of the lens double-cabin vacuum coating machine;
s3: vacuumizing and heating the main cabin 1 of the lens double-cabin vacuum coating machine until the pressure and the temperature of the main cabin are consistent with those of the auxiliary cabin 2; step S2 and step S3, when the auxiliary cabin 2 and the main cabin 1 are respectively vacuumized through the vacuumizing device 28, controlling the pressures in the vacuum chambers of the auxiliary cabin 2 and the main cabin 1 to be 4.5x10e5 times Torr and controlling the temperature to be 60-300 ℃;
s4: opening a plugboard valve 3 between an auxiliary cabin 2 and a main cabin 1 of the lens double-cabin vacuum coating machine, enabling an auxiliary cabin platform 9 to be level with a main cabin platform 10 in a lifting manner, transferring the whole lens frame 29 to the main cabin platform 10 through a material port 4 of the auxiliary cabin platform 9 and the plugboard valve 3 by a transfer mechanism, and closing the plugboard valve 3;
s5: the main cabin platform 10 ascends in the main cabin 1 of the lens double-cabin vacuum coating machine, the lens frame 29 is clamped and lifted by the rotary grippers 17, and the auxiliary cabin platform 9 descends to be separated from the lens frame 29;
s6: the rotary handles 17 drive the hoisted lens frame 29 to rotate and carry out vacuum coating, and meanwhile, the auxiliary cabin 2 is subjected to air inlet to release the vacuum environment, and the step S2 is repeated until the pressure and the temperature of the auxiliary cabin 2 are consistent with those of the main cabin 1;
s7: after the film plating is finished, the main cabin platform 10 ascends, the rotary handles 17 stop rotating and release the clamping of the lens frame 29, so that the lens frame 29 descends along with the main cabin platform 10;
s8: opening the plugboard valve 3, lifting or lowering the auxiliary cabin platform 9 to enable the main cabin platform 10 to be level with the empty platform frame 13 of the auxiliary cabin platform 9, transferring the lens frame 29 carrying the lens to be coated to the auxiliary cabin platform 9 from the main cabin platform 10 and the material port 4 of the plugboard valve 3 through the transferring mechanism, lifting or lowering the auxiliary cabin platform 9 to enable the main cabin platform 10 to be level with the platform frame 13 of the auxiliary cabin platform 9 carrying the lens frame 29 to be coated, transferring the lens frame 29 carrying the lens to be coated to the main cabin platform 10 from the auxiliary cabin platform 9 and the material port 4 of the plugboard valve 3 through the transferring mechanism, and closing the plugboard valve 3;
s9: repeating the steps S5 and S6, putting the lens frame 29 carrying the lens to be coated on the corresponding platform frame 13 when the auxiliary cabin 2 opens the material inlet and outlet 27 of the auxiliary cabin 2, and taking out the lens frame 29 of the lens to be coated;
s10: and repeating the steps S1 to S9 to perform continuous film coating processing.
The principle of the invention is as follows:
referring to the drawings, step S1: the lens is cleaned to avoid the influence of grease, stains and the like on the coating film and imaging quality, the lens frame 29 is of an umbrella-shaped structure, and a plurality of cleaned lenses can be stored so as to synchronously coat the film once, thereby improving the processing efficiency;
step S2: the material inlet and outlet 27 of the auxiliary cabin 2 can be opened and closed by opening the whole cabin 2 cabin door or a material inlet and outlet door plate which can vertically lift and move with the material inlet and outlet 27 on the cabin 2 cabin door, so that the material inlet and outlet 27 of the auxiliary cabin 2 is opened and closed; the lens frame 29 carrying the lens to be coated is integrally placed on the moving platform 48 of the empty platform frame 13 of the auxiliary cabin platform 9 for transferring, and the vacuum pressure and the temperature are controlled properly;
step S3: vacuumizing and heating the main cabin 1 until the vacuum environment is consistent with the pressure and temperature of the auxiliary cabin 2, so that after the main cabin 1 and the auxiliary cabin 2 are communicated and lenses are transferred, the vacuum coating environment of the main cabin 1 is stable during coating so as to continuously coat;
step S4: the valve between the main cabin 1 and the auxiliary cabin 2 of the lens double-cabin vacuum coating machine adopts a plugboard valve 3, when the plugboard valve 3 is closed, a plugboard door plate 5 is positioned at a material port 4 and is abutted by a jack 8, so that the sealing and sealing performance between the main cabin 1 and the auxiliary cabin 2 during vacuum pumping is ensured;
the first servo motor 30 is arranged in the plug board valve 3, the first transmission shafts 31 are coaxially connected with the corresponding first chain wheels 7 of the two first chains 6, the first transmission shafts 31 are supported in the plug board valve through brackets, and a transmission gear 32 is arranged between any one of the first transmission shafts 31 and a motor shaft of the first servo motor 30; the first servo motor 30 drives the transmission shaft to rotate under the transmission of the transmission gear 32 to drive the first sprocket 7 to synchronously rotate, so that the first chain 6 can vertically rotate forwards or reversely, and the lifting movement of the plugboard door plate 5 connected with the first chain 6 can be realized; the four corners of the plugboard valve 3 are provided with first air cylinders 33, air cylinder sliding blocks 50 of the first air cylinders 33 are connected with the plugboard valve 3 through air cylinder upright posts 34 and upright post sliding blocks 35 on the air cylinder upright posts 34, so that the plugboard valve 3 is guided in a sliding fit manner through the upright post sliding blocks 35 and the air cylinder upright posts 34 when being lifted, and the air cylinder sliding blocks 50 drive the plugboard valve 3 to move forwards and backwards when being driven by the first air cylinders 33;
when the plugboard valve 3 is opened, the jack 8 is separated from the plugboard door plate 5, the plugboard door plate 5 moves backwards and upwards to be separated from the inner wall of the plugboard valve 3, and is out of position with the material port 4 to realize the opening of the material port 4, and the main cabin 1 is communicated with the inner cavity of the auxiliary cabin 2; if the flashboard door plate 5 moves forwards and downwards, the material port 4 is closed;
the tops of the main cabin 1 and the auxiliary cabin 2 of the lens double-cabin vacuum coating machine are respectively provided with a first driving shaft 37 driven by a second servo motor 36, the first driving shaft 37 is in reduction transmission to two vertical second transmission shafts 38 through a speed reducer 49, the two second transmission shafts 38 respectively drive coaxial second chain wheels 11 and are positioned at four corners to synchronously rotate, the meshed second chains 12 are driven to retract and unwind when the second chain wheels 11 positively and negatively rotate, the main cabin platform 10 or the auxiliary cabin platform 9 hung at the end parts of the second chains 12 is lifted, and when the auxiliary cabin platform 9 is lifted and leveled with the main cabin platform 10, the transfer is convenient;
the transfer mechanism is a plurality of first rollers 14 which are arranged on the platform frame 13 and the main cabin platform 10 and correspondingly rotate on two sides, a fourth servo motor 52 is arranged on one side of the platform frame 13 or the main cabin platform 10, a motor shaft of the fourth servo motor 52 and the first rollers 14 are respectively coaxially provided with a third chain wheel 39, a third chain is arranged between the third chain wheels 39 of the fourth servo motor 52 and the third chain wheels 39 of the adjacent first rollers 14, a third transmission shaft is arranged between any corresponding second rollers 15 on two sides, and synchronous forward or reverse rotation of the platform frame 13 or the plurality of first rollers 14 of the main cabin platform 10 is realized through forward and reverse rotation of the motor shaft of the second servo motor 36 and transmission of the third chain wheels 39, the third chain and the third transmission shaft 51;
the method comprises the steps that a lens frame 29 for plating a lens to be plated is planted on a moving platform 48 of a platform frame 13 of an auxiliary cabin platform 9, the moving platform 48 is matched with a first roller 14 at the bottom in a rolling mode, the moving platform advances to a material port 4 of a plugboard valve 3, a second roller 15 is matched with the bottom of the moving platform 48 in a rolling mode to support, the moving platform advances to the first roller 14 of a main cabin platform 10 and continues to advance until the moving platform is transported to the main cabin platform 10, during transportation, a sensor 16 positioned on the side of the main cabin platform 10 or the auxiliary cabin platform 9 through a lens double-cabin vacuum plating machine senses and positions, and the sensor 16 can adopt a laser sensor 16 to range to sense the position of the lens frame 29, so that the operation of a transportation mechanism is controlled;
step S5: the ascending driving structure of the main cabin platform 10 is consistent with that of the auxiliary cabin platform 9, and when the main cabin platform 10 drives the lens frame 29 of the upper moving platform 48 to ascend integrally, the lens frame is close to the rotary grip 17;
the top of the main cabin 1 of the lens double-cabin vacuum coating machine is provided with a second air cylinder 40, an air cylinder rod of the second air cylinder 40 penetrates through the main cabin 1 and is connected with the chuck outer ring 20 to drive the chuck outer ring 20 to move in a lifting manner, when the chuck outer ring 20 descends, a plurality of clamping plates 19 are propped up by the conical surface 21, so that the clamping plates 19 are outwards expanded around the center of the gear sleeve 18 under the limit guide of sliding fit of the movable sliding plate 22 and the fixed sliding plate 23, the tension spring 24 is stretched, the outer diameter of the end part of the lens frame 29 is larger than that of the end part of the lens frame 29, when the main cabin platform 10 drives the lens machine to continuously ascend, the chuck outer ring 20 ascends, and the clamping plates 19 synchronously shrink inwards to clamp the lens frame 29 under the restoring force of the tension spring 24, the cooperation of the clamping plates 19 and the conical surface 21 of the chuck outer ring 20 and the guide of the movable sliding plate 22 and the fixed sliding plate 23;
step S6: the top of the main cabin 1 of the lens double-cabin vacuum coating machine is provided with a third servo motor 41, a motor shaft of the third servo motor 41 and a vertical second driving shaft 43 at one side of a gear sleeve 18 are provided with meshed bevel gears 42, the second driving shaft 43 and the gear sleeve 18 are respectively provided with meshed pinion gears 44 and large gears 45, the second driving shaft 43 is driven to rotate under the transmission of the bevel gears 42 through the three servo motors, the bevel gears 42 are driven to rotate in a speed-reducing manner under the meshing of the pinion gears 44 and the large gears 45, the bottoms of the bevel gears 42 are provided with sliding holes 46, when a deflector rod at the bottom of a lens frame 29 is inserted into the sliding holes 46, the deflector rod is driven to rotate through the sliding holes 46 when the bevel gears 42 are rotated, and the lens frame 29 which is clamped and hoisted by a clamping plate 19 is driven to integrally rotate;
an electron gun 47 is arranged at the bottom of a main cabin 1 of the lens double-cabin vacuum coating machine, and an electron beam of the electron gun 47 separates coating materials in a vacuum environment and flies upwards to pass through the center of a main cabin platform 10, and the lenses of a top rotary lens frame 29 are coated under the condition that shielding and color mixing on coating rays are changed by swinging a first palette 25 of the main cabin platform 10 and a second palette 26 of an auxiliary cabin platform 9;
meanwhile, the vacuum environment is relieved by air inlet in the auxiliary cabin 2, the lens to be coated is placed in the auxiliary cabin platform 9 in the repeated step 2, and the lens to be coated is vacuumized again until the lens is consistent with the vacuum environment of the main cabin 1, so that the lens to be coated can be transported later;
step S7: the gear sleeve 18 of the rotary gripper 17 stops rotating, the main cabin platform 10 ascends, and the clamping plates 19 of the rotary gripper 17 synchronously expand outwards to release the gripping clamp of the lens frame 29, so that the lens frame 29 is separated from the rotary gripper 17 along with the descending of the main cabin platform 10 when the main cabin platform 10 descends;
step S8: if the lens frame 29 of the auxiliary cabin platform 9 is positioned on the upper layer platform frame 13 in the appointed step 2, the auxiliary cabin platform 9 is driven to ascend until the first roller 14 of the main cabin platform 10, the second roller 15 on the plugboard valve 3 and the first roller 14 on the lower layer empty platform frame 13 of the auxiliary cabin platform 9 are flush, the moving platform 48 is matched with the first roller 14 and the second roller 15 in the reverse rotation, and the moving platform 48 and the lens frame 29 carrying the coated lenses are conveyed from the main cabin platform 10 to the empty platform frame 13 of the auxiliary cabin platform 9 through the material port 4 of the plugboard valve 3;
then the auxiliary cabin platform 9 descends to the level of the main cabin platform 10 and the platform frame 13 of the auxiliary cabin platform 9 carrying the lens frame 29 of the lens to be coated, the moving platform 48 is matched with the first roller 14 and the second roller 15 which rotate positively, the moving platform 48 and the lens frame 29 carrying the lens to be coated are transferred to the main cabin platform 10, the lens material conversion is formed, and the plugboard valve 3 is closed;
step S9: the film plating processing of the steps S5 and S6 is repeated, and after the plugboard valve 3 is closed, the main cabin 1 and the auxiliary cabin 2 form independent spaces, so that after the auxiliary cabin 2 is vacuumized, the auxiliary cabin is leveled with the material inlet and outlet 27 through the lifting of the auxiliary cabin platform 9, and the auxiliary cabin is fed, moved and discharged, and can be opened when approaching to the ambient pressure by only opening the material inlet and outlet 27, so that the temperature and pressure loss are reduced, and the energy consumption is saved;
step S10: by repeating the steps S1 to S9, when the vacuum environment of the main cabin 1 and the vacuum environment of the auxiliary cabin 2 of the lens double-cabin vacuum coating machine are consistent and the valve is opened and communicated, transferring the lens to be coated in the auxiliary cabin 2 to the main cabin 1 or transferring the coated lens in the main cabin 1 to the auxiliary cabin 2; when the valve between the main cabin 1 and the auxiliary cabin 2 is closed, vacuum coating is carried out on the lenses in the main cabin 1, the vacuum environment is relieved in the auxiliary cabin 2, the lenses to be coated are put in or taken out, and the vacuum is pumped after the putting in or taking out operation until the vacuum environment of the auxiliary cabin 2 is consistent with that of the main cabin 1;
the main cabin 1 is always in a vacuum environment so as to carry out continuous coating, the auxiliary cabin 2 which can be opened and closed with the main cabin 1 is utilized to carry out vacuum simultaneously in the main cabin 1 so as to feed and discharge lenses, vacuum is pumped so as to convert the lenses to be coated and the coated lenses, the vacuum pumping preparation time of the adjacent batches of lens coating is avoided when a single-cabin vacuum coating machine and a coating process are adopted in the prior art, the production period is shortened by continuous coating, the stable control of vacuum coating conditions is ensured, and the vacuum automatic coating efficiency and stability of the lenses are remarkably improved by adopting the main cabin platform 10, the auxiliary cabin platform 9, the transfer mechanism, the plugboard valve 3 and the rotary gripper 17 which can be driven in a vacuum chamber.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the invention, unless otherwise indicated, the meaning of "a number" is two or more.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art in a specific case.
The present invention is not limited to the above-mentioned embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present invention are intended to be included in the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.
Claims (2)
1. A lens double-cabin vacuum coating process is characterized in that when a main cabin (1) of a lens double-cabin vacuum coating machine is consistent with a vacuum environment of an auxiliary cabin (2) and a valve is opened and communicated, a lens to be coated in the auxiliary cabin (2) is transferred to the main cabin (1) or a coated lens in the main cabin (1) is transferred to the auxiliary cabin (2); when the valve between the main cabin (1) and the auxiliary cabin (2) is closed, vacuum coating is carried out on the lenses in the main cabin (1), the vacuum environment is relieved in the auxiliary cabin (2), the lenses to be coated are put in or taken out, and the vacuum is pumped after the putting in or taking out operation until the vacuum environment of the auxiliary cabin (2) is consistent with that of the main cabin (1); repeating the transferring, taking and placing operations to perform continuous lens vacuum coating;
the main cabin (1) and the auxiliary cabin (2) of the lens double-cabin vacuum coating machine are opened and closed through a plugboard valve (3), and a material port (4) for passing through lenses is formed in the plugboard valve (3);
the lifting type material inlet opening is characterized in that a plugboard door plate (5) capable of lifting and moving forwards and backwards relative to the material inlet opening (4) is arranged in the plugboard valve (3), lifting and moving are achieved through a first chain (6) with two sides capable of synchronously and vertically rotating, front and back moving are achieved through a cylinder sliding block (50) with two sides capable of synchronously and backwards moving, a first chain wheel (7) capable of synchronously rotating is arranged in the first chain (6), and a plurality of jacks (8) are arranged between the plugboard door plate (5) and the inner wall of the material inlet opening (4);
the auxiliary cabin (2) of the lens double-cabin vacuum coating machine is internally provided with lenses by an auxiliary cabin platform (9) which can be lifted, and the main cabin (1) is internally provided with lenses by a main cabin platform (10) which can be lifted;
the main cabin platform (10) and the auxiliary cabin platform (9) are respectively hung on the main cabin platform (10) or the auxiliary cabin platform (9) through second chain wheels (11) which synchronously rotate at four corners of the top of the double-cabin vacuum coating machine and rotate in the positive and negative directions to drive a meshed second chain (12) so as to realize lifting movement;
the auxiliary cabin platform (9) comprises at least two platform frames (13), a plurality of first rollers (14) which correspondingly rotate are arranged on two sides of the platform frames (13) and the main cabin platform (10), second rollers (15) which correspond to the first rollers (14) are arranged on the valves, the lens transfer is realized through a moving platform (48) which is in rolling fit with the first rollers (14) and the second rollers (15), and during the transfer, the sensor (16) which is positioned on the side of the main cabin platform (10) or the auxiliary cabin platform (9) through a lens double-cabin vacuum coating machine is positioned in an induction way;
during film coating, a lens is clamped by a rotary handle (17) at the top of a main cabin (1) of the lens double-cabin vacuum film coating machine and is driven to rotate, the rotary handle (17) comprises a gear sleeve (18) which is driven to rotate by decelerating rotation, clamping plates (19) which are wound around the bottom of the gear sleeve (18) at intervals and can be used for clamping the lens in an outward expansion or inward contraction mode, the clamping plates (19) are matched with conical surfaces (21) of a clamp head outer ring (20) which moves up and down at the top, a movable sliding plate (22) on the clamping plates (19) is in sliding fit with a fixed sliding plate (23) at the top of the main cabin (1), and the tension springs (24) between the clamping plates (19) and the fixed sliding plate (23) are used for achieving outward expansion or inward contraction;
the double-cabin vacuum coating process for the lenses comprises the following specific steps:
s1: the lens to be coated and the lens to be cleaned are placed on a lens frame (29);
s2: opening a feed inlet and a feed outlet (27) of an auxiliary cabin (2) of the lens double-cabin vacuum coating machine, integrally placing a lens frame (29) in the step S1 on an empty platform frame (13) of an auxiliary cabin platform (9), closing the feed inlet and the feed outlet (27) of the auxiliary cabin (2), and vacuumizing and heating the auxiliary cabin (2) of the lens double-cabin vacuum coating machine;
s3: vacuumizing and heating the main cabin (1) of the lens double-cabin vacuum coating machine until the pressure and the temperature of the main cabin are consistent with those of the auxiliary cabin (2);
s4: opening a plugboard valve (3) between an auxiliary cabin (2) and a main cabin (1) of the lens double-cabin vacuum coating machine, lifting and leveling an auxiliary cabin platform (9) and a main cabin platform (10), transferring the whole lens frame (29) onto the main cabin platform (10) from the auxiliary cabin platform (9) and a material port (4) of the plugboard valve (3) through a transfer mechanism, and closing the plugboard valve (3);
s5: the main cabin platform (10) ascends in a main cabin (1) of the lens double-cabin vacuum coating machine, the lens frame (29) is clamped and hoisted by the rotary grippers (17), and the auxiliary cabin platform (9) descends to be separated from the lens frame (29);
s6: the rotary handles (17) drive the hoisted lens frame (29) to rotate and carry out vacuum coating, and meanwhile, the auxiliary cabin (2) is charged with air to release the vacuum environment, and the pressure and the temperature of the auxiliary cabin (2) are repeated until the pressure and the temperature of the auxiliary cabin (2) are consistent with those of the main cabin (1);
s7: after the film plating is finished, the main cabin platform (10) ascends, the rotary handles (17) stop rotating, the clamping of the lens frame (29) is released, and the lens frame (29) descends and moves along with the main cabin platform (10);
s8: opening the plugboard valve (3), lifting or lowering the auxiliary cabin platform (9) to enable the main cabin platform (10) to be flush with the empty platform frame (13) of the auxiliary cabin platform (9), transferring the lens frame (29) carrying the lens to be coated to the auxiliary cabin platform (9) from the main cabin platform (10) and the material port (4) of the plugboard valve (3) through the transfer mechanism, lifting or lowering the auxiliary cabin platform (9) to enable the main cabin platform (10) to be flush with the platform frame (13) of the auxiliary cabin platform (9) carrying the lens frame (29) carrying the lens to be coated, transferring the lens frame (29) carrying the lens to be coated to the main cabin platform (10) through the transfer mechanism and enabling the lens frame (29) carrying the lens to be coated to be transferred to the auxiliary cabin platform (9) and the material port (4) of the plugboard valve (3), and closing the plugboard valve (3);
s9: repeating the steps S5 and S6, putting a lens frame (29) carrying the lens to be coated on a corresponding platform frame (13) when the auxiliary cabin (2) opens a feed inlet (27) and a feed outlet (27) of the auxiliary cabin (2), and taking out the lens frame (29) carrying the lens to be coated;
s10: and repeating the steps S1 to S9 to perform continuous film coating processing.
2. The process according to claim 1, wherein the auxiliary chamber (2) and the main chamber (1) are controlled to have a vacuum chamber pressure of 4.5x10 e5torr and a temperature of 60-300 ℃ when the auxiliary chamber (2) and the main chamber (1) are respectively vacuumized by the vacuumizing device (28) in the steps S2 and S3.
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CN115449768B (en) * | 2022-09-30 | 2024-06-21 | 深圳市激埃特光电有限公司 | Coating system for optical lens processing |
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CN102234767B (en) * | 2010-04-30 | 2014-04-30 | 鸿富锦精密工业(深圳)有限公司 | Coating device and coating method |
EP3296423B1 (en) * | 2016-09-16 | 2019-01-30 | Satisloh AG | Vacuum coating apparatus |
CN206918280U (en) * | 2017-04-28 | 2018-01-23 | 星弧涂层新材料科技(苏州)股份有限公司 | High vacuum push-pull valve |
CN207104227U (en) * | 2017-06-29 | 2018-03-16 | 迅得机械(东莞)有限公司 | A kind of lens barrel transfer assembling mechanism |
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