CN113401975A

CN113401975A - Equipment water treatment system

Info

Publication number: CN113401975A
Application number: CN202110827138.9A
Authority: CN
Inventors: 朱伯顺
Original assignee: Funing Xiexin Photovoltaic Technology Co ltd
Current assignee: Funing Xiexin Photovoltaic Technology Co ltd
Priority date: 2021-07-21
Filing date: 2021-07-21
Publication date: 2021-09-17

Abstract

The invention relates to a plant water treatment system comprising: the device comprises a first device, a filtering module, a water storage module, a water flow pipeline and a driving device. The first equipment is used for producing products, and the first equipment possibly comprises cleaning and other processes in the production process, so that the first equipment can consume more water sources and generate more wastewater; the filtering module is used for purifying and recycling the wastewater generated by the first equipment, and the filtering module can realize the filtering of the wastewater by utilizing a reverse osmosis principle; the water storage module can store the wastewater treated by the filtering module; the water flow pipeline realizes the delivery of water flow in the system; the drive means enables water flow transport between the water storage module and the first device. Because the waste water that produces first equipment in this system can used repeatedly after purifying through filter module to make the utilization ratio of water source improve, and reduce the cost of first equipment production product.

Description

Equipment water treatment system

Technical Field

The invention relates to the technical field of machining, in particular to a water treatment system of equipment.

Background

In the field of machining technology, it is generally necessary to clean or cool the workpiece to be machined, and in the process, more waste water is generated. In the prior art, waste water generated by mechanical processing is generally recycled and treated, and then the purified waste water is discharged to an external space. Although the mode can enable the wastewater treatment to reach the discharge standard and reduce the pollution problem of the wastewater, the method has the problems that the treated wastewater is directly discharged and cannot be recycled, so that the waste of water sources is serious, and the production cost of products is high.

For example, in the process of processing a silicon wafer by a wafer inserting machine, the processes of degumming, inserting a wafer, cleaning and the like are generally included, more water sources are consumed in the process of cleaning the silicon wafer, and more waste water is generated at the same time. In the prior art, waste water generated by cleaning a silicon wafer is directly discharged or is subjected to purification treatment, so that the utilization rate of a water source is low, the waste of the water source is serious, and the production cost of the silicon wafer is difficult to reduce.

Disclosure of Invention

In view of the above, there is a need to provide an apparatus water treatment system to improve the utilization rate of water source and reduce the production cost of the product.

An appliance water treatment system, comprising:

a first device;

the filtering module comprises an RO membrane water purifying device;

a water storage module comprising a water storage tank, the water storage tank comprising a first water inlet and a first water outlet;

the water flow pipeline comprises a first pipeline, a second pipeline and a third pipeline, the first pipeline comprises an A1 end and an A2 end which are communicated, the A1 end is communicated with a first water outlet, and the A2 end is communicated with a water inlet of the first equipment; the second pipeline comprises a B1 end and a B2 end which are communicated, the B1 end is communicated with the water outlet of the first equipment, and the B2 end is communicated with the water inlet of the RO membrane water purifier; the third pipeline comprises a C1 end and a C2 end which are communicated, the C1 end is communicated with the water outlet of the RO membrane water purifier, and the C2 end is communicated with the first water inlet;

a drive arrangement including a first drive element disposed in the first conduit for delivering flow of water from the reservoir to the first device.

According to the equipment water treatment system, the water storage tank in the water storage module conveys the stored water flow to the first equipment along the first pipeline through the first driving element in the driving device, the first equipment conveys the RO membrane water purifying device in the filtering module through the second pipeline by using the generated wastewater, and the water source purified by the RO membrane water purifying device can flow back to the water storage tank along the third pipeline, so that the water flow is recycled. Because the waste water that first equipment produced in this system can recycle, and not direct or discharge to the external space after purifying, consequently this system can improve the utilization ratio of water source, can reduce the manufacturing cost of first equipment production product simultaneously.

In one embodiment, the water storage module further comprises a rich water tank, the rich water tank comprises a second water inlet and an overflow port, the water flow pipeline further comprises a fourth pipeline, and the fourth pipeline comprises a D1 end and a D2 end which are communicated;

the second water inlet is communicated with the C2 end, the overflow port is communicated with the D1 end, and the D2 end is communicated with the first water inlet.

In one embodiment, the second water inlet is located at an upper end of the concentrate tank and the overflow outlet is located on a side wall of the concentrate tank near the upper end of the concentrate tank.

In one embodiment, the water storage tank further comprises a third water inlet, the water flow line further comprises a fifth line, the fifth line comprises an E1 end and an E2 end which are communicated, the E1 end is communicated with the third water inlet, and the E2 end is communicated with an external water supply source.

In one embodiment, the inner cavity of the water storage tank is provided with a liquid level control module.

In one embodiment, the fifth pipeline is provided with a control valve for controlling the fifth pipeline to be communicated and closed.

In one embodiment, the liquid level control module includes a float level switch, the control valve is an electromagnetic valve, and the control valve is electrically connected to the float level switch and controlled by the float level switch to operate.

In one embodiment, the water treatment system further comprises a control module, wherein the control module is electrically connected with the first device, the first driving element, the liquid level control module and the control valve and controls the operation of the first device, the first driving element, the liquid level control module and the control valve.

In one embodiment, the first drive element is a water pump.

In one embodiment, the first device is a chip mounter.

Drawings

FIG. 1 is a block schematic diagram of an apparatus water treatment system in one embodiment of the invention;

FIG. 2 is a schematic diagram of the structure of an apparatus water treatment system in one embodiment of the present invention;

FIG. 3 is a schematic structural diagram of an apparatus water treatment system in another embodiment of the present invention.

Description of reference numerals:

100. a first device;

200. a filtration module; 210. an RO membrane water purification device;

300. a water storage module; 310. a water storage tank; 311. a first water inlet; 312. a first water outlet;

313. a third water inlet; 314. a liquid level control module; 320. a concentrated water tank; 321. a second water inlet;

322. an overflow port;

400. a water flow line; 410. a first pipeline; 420. a second pipeline; 430. a third pipeline;

440. a fourth pipeline; 450. a fifth pipeline; 451. a control valve;

500. a drive device; 510. a first drive element.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

For example, in the process of processing a silicon wafer by a wafer inserting machine, the processes of degumming, inserting a wafer, cleaning and the like are generally included, more water sources are consumed in the process of cleaning the silicon wafer, and more waste water is generated at the same time. In the prior art, waste water generated by cleaning a silicon wafer is directly discharged or is subjected to purification treatment, so that the utilization rate of a water source is low, the waste of the water source is serious, and the production cost of the silicon wafer is difficult to reduce. Therefore, the present invention is directed to solving the above problems, and it is a need to provide an apparatus water treatment system to improve the utilization rate of water source and reduce the production cost of the product.

Referring to fig. 1, fig. 1 is a schematic block diagram of an apparatus water treatment system according to an embodiment of the present invention, which includes: a first device 100, a filter module 200, a water storage module 300, a water flow circuit 400, and a drive means 500. Wherein the first apparatus 100 is used for production of products, the first apparatus 100 may include cleaning processes during the production process, so that the first apparatus 100 consumes more water and generates more waste water. For example, the first apparatus 100 may be a wafer inserting machine, which includes a cleaning process during the process of manufacturing and treating silicon wafers, and requires more water source and generates more wastewater; the filtering module 200 is used for purifying and recycling the wastewater generated by the first device 100, and the filtering module 200 can realize the filtering of the wastewater by using the reverse osmosis principle; the water storage module 300 can store the wastewater treated by the filtering module 200; the water flow pipeline 400 realizes the delivery of water flow in the system; the driving means 500 enable water flow transport between the water storage module 300 and the first device 100. In the system, the wastewater generated by the first equipment 100 can be reused after being purified by the filtering module 200, so that the utilization rate of a water source is improved, and the cost of producing products by the first equipment 100 is reduced.

Specifically, referring to fig. 2, the filtration module 200 includes an RO membrane water purification device 210; wherein, the RO membrane water purifier 210 can filter the wastewater by the principle of reverse osmosis, for example, the filter element inside the RO membrane water purifier 210 adopts 5 μm PP cotton, which can well remove the large particle impurities such as rust, sand, etc. in the wastewater. The wastewater generated from the first apparatus 100 can be filtered by the RO membrane water purification device 210 and reach the standard of reuse. It should be noted that the system of the filtering module 200 includes, for example, a water pump, etc., and is capable of delivering the wastewater generated in the first apparatus 100 to the water inlet of the RO membrane water purifier 210, and when the wastewater delivered by the water pump reaches the water inlet of the RO membrane water purifier 210, the wastewater may be gathered at the water inlet of the RO membrane water purifier 210, which results in a large water pressure at the water inlet of the RO membrane water purifier 210, and a clean water source in the wastewater can pass through the filter element of the RO membrane water purifier 210 under the pressure, while impurities in the wastewater are isolated at the water inlet of the RO membrane water purifier 210, so as to purify the wastewater generated in the first apparatus 100 through the process.

The water storage module 300 comprises a water reservoir 310, wherein the water reservoir 310 comprises a first water inlet 311 and a first water outlet 312. The water flow line 400 comprises a first line 410, a second line 420 and a third line 430, wherein the first line 410 comprises an end A1 and an end A2 which are communicated, the end A1 of the first line 410 is communicated with the first water outlet 312 of the water reservoir 310, and the end A2 of the first line 410 is communicated with the water inlet of the first device 100; the second pipeline 420 comprises a B1 end and a B2 end which are communicated, the B1 end of the second pipeline 420 is communicated with the water outlet of the first device 100, and the B2 end of the second pipeline 420 is communicated with the water inlet of the RO membrane water purifier 210; the third pipeline 430 comprises a C1 end and a C2 end which are communicated, the C1 end of the third pipeline 430 is communicated with the water outlet of the RO membrane water purifier 210, and the C2 end of the third pipeline 430 is communicated with the first water inlet 311 of the water tank 310.

The driving means 500 comprises a first driving element 510, wherein the first driving element 510 is arranged in the first pipe 410, the first driving element 510 is used for conveying the water flow of the water reservoir 310 to the first device 100, and the first driving element 510 can be a water pump.

The working principle of the water treatment system of the equipment in the embodiment can be explained as follows: in an initial situation, a water source is stored in the reservoir 310 of the water storage module 300, for example, an external source of tap water is introduced into the reservoir 310. When the first apparatus 100 is initially manufactured, the first driving member 510 of the driving device 500 is operated, and the water source of the water reservoir 310 is driven by the first driving member 510 to the water inlet of the first apparatus 100 along the end a1 of the first pipeline 410 and the end a2 of the first pipeline 410. The wastewater generated by the first device 100 reaches the water inlet of the RO membrane water purifier 210 in the filtering device along the end B1 of the second pipeline 420 and the end B2 of the second pipeline 420, and the clean water obtained after the RO membrane water purifier 210 purifies reaches the water storage tank 310 along the end C1 of the third pipeline 430, the end C2 of the third pipeline 430 and the first water inlet 311 of the water storage tank 310.

In the above process, the water storage tank 310 in the water storage module 300 can deliver the stored water to the first device 100 through the first driving element 510 in the driving device 500 along the first pipeline 410, then the first device 100 delivers the generated waste water to the RO membrane water purifier 210 in the filtration module 200 through the second pipeline 420, and the water source purified by the RO membrane water purifier 210 can flow back to the water storage tank 310 along the third pipeline 430, so as to realize the recycling of the water flow. Because the waste water generated by the first device 100 in the system can be recycled, and is not directly or after being purified, discharged to the external space, the system can improve the utilization rate of the water source, and simultaneously can reduce the production cost of the first device 100 for producing products.

Consider that it may be difficult for the water storage tank 310 in the water storage module 300 to completely store clean water obtained after the RO membrane purifier 210 in the filtration module 200 purifies the wastewater, i.e., overflow may occur due to the stored water source reaching the upper limit in the water storage tank 310. In one embodiment, referring to fig. 3, the water storage module 300 further comprises a rich water tank 320, wherein the rich water tank 320 comprises a second water inlet 321 and an overflow 322, the water flow line 400 further comprises a fourth line 440, and the fourth line 440 comprises a D1 end and a D2 end which are communicated with each other; the second water inlet 321 of the rich water tank 320 is communicated with the end C2 of the third pipeline 430, the overflow port 322 of the rich water tank 320 is communicated with the end D1 of the fifth pipeline 450, and the end D2 of the fifth pipeline 450 is communicated with the first water inlet 311 of the water storage tank 310. The idea of this embodiment is that clean water obtained after the RO membrane water purification device 210 purifies waste water is not directly conveyed into the water storage tank 310 first, but is conveyed into the concentrated water tank 320 in the water storage module 300 first, the clean water generated by purifying waste water by the RO membrane water purification device 210 can be buffered and stored by the concentrated water tank 320, and then the stored water source of the concentrated water tank 320 is discharged into the water storage tank 310, so that the phenomenon that when the RO membrane water purification device 210 directly conveys water into the water storage tank 310, the water source in the water storage tank 310 overflows can be better avoided.

Further, in order to enable the rich water tank 320 to achieve a better buffer storage effect, in an embodiment, referring to fig. 3, the second water inlet 321 of the rich water tank 320 is located at the upper end of the rich water tank 320, and the overflow port 322 of the rich water tank 320 is located on the side wall of the rich water tank 320 and near the upper end of the rich water tank 320. Therefore, the water source of the concentrated water tank 320 can be stored at a certain height and then is conveyed into the water storage tank 310, and the concentrated water tank 320 can achieve a good buffer storage effect. In addition, the concentrate tank 320 is made of glass fiber reinforced plastic, the water storage tank 310 is made of stainless steel, the volume of the concentrate tank 320 can be smaller than that of the water storage tank 310, and the height of the overflow port 322 of the concentrate tank 320 can be higher than that of the water storage tank 310, so that the concentrate can be conveyed from the overflow port 322 of the concentrate tank 320 to the water storage tank 310 along the fourth pipeline 440 under the gravity action of water flow in the concentrate tank 320; alternatively, a water pump may be provided in fourth conduit 440 to pump the water from concentrate tank 320 to reservoir 310.

Considering that the water demand of the first apparatus 100 may fluctuate, for example, the water demand of the first apparatus 100 may have a large demand, and the efficiency of the filter module 200 for purifying wastewater is limited, the first apparatus 100 may risk lack of a water source. In one embodiment, referring to fig. 3, the water tank 310 further comprises a third water inlet 313, the water flow line 400 further comprises a fifth line 450, wherein the fifth line 450 comprises an end E1 and an end E2 which are communicated, the end E1 of the fifth line 450 is communicated with the third water inlet 313 of the water tank 310, and the end E2 of the fifth line 450 is communicated with an external water supply. When the first apparatus 100 may be at risk of a lack of water supply, the water reservoir 310 may now be replenished with water via the fifth conduit 450. The external water supply source may be an external tap water pipe, for example, when it is necessary to replenish the water in the water storage tank 310, the end E1 of the fifth pipe 450 is connected to the third water inlet 313 of the water storage tank 310, and the end E2 of the fifth pipe 450 is connected to the tap water pipe, so that the water is replenished in the water storage tank 310.

In order to know the water source storage status of the water storage tank 310 in time, in one embodiment, referring to fig. 3, a liquid level control module 314 is disposed in the inner cavity of the water storage tank 310. The liquid level control module 314 can display the water storage value in the water storage tank 310, for example, the liquid level control module 314 includes a display module capable of displaying the water storage value in the water storage tank 310 in real time; alternatively, the level control module 314 may include an alarm module, such as a buzzer, that may sound an alarm when the water level in the reservoir 310 is below the minimum water level, thereby prompting the operator to replenish water in the reservoir 310.

In order to better control the communication or the closing of the fifth pipeline 450, in one embodiment, referring to fig. 3, the fifth pipeline 450 is provided with a control valve 451 for controlling the communication and the closing of the fifth pipeline 450. That is, the fifth pipe 450 may always maintain the end E1 of the fifth pipe 450 in communication with the third water inlet port 313 of the water reservoir tank 310 and the end E2 of the fifth pipe 450 in communication with the outside water supply source. When it is desired to replenish the reservoir 310 with water, the control valve 451 is opened; and remain off at other times.

In one embodiment, the liquid level control module 314 includes a float level switch (not shown), the control valve 451 on the fifth pipeline 450 is a solenoid valve, and the liquid level control module 314 can control the operation of the control valve 451. The working principle of the float ball liquid level switch is as follows: the magnetic floater of the float level switch rises or falls along with the liquid level, and the reed pipe chip at the position arranged in the detection pipe of the sensor in the float level switch acts to send out a contact switch conversion signal. Namely, when the float level switch rises or falls along with the liquid level, the float level switch can output a switch signal. For example, in a possible case, when the float level switch in the water storage tank 310 senses that the water level in the water storage tank 310 drops to reach a threshold value, the float level switch gives a switch signal, which is generally an electric signal, the control valve 451 receives the electric signal and controls the fifth pipeline 450 to be communicated, and the external water supply source enters the water storage tank 310 along the fifth pipeline 450; when the water level of the water storage tank 310 rises to reach the threshold value, the float level switch gives the switch signal again, the control valve 451 closes the fifth pipeline 450, and the external water supply source stops supplying water to the water storage tank 310.

In order to achieve intelligent control of the water treatment system, in one embodiment, the water treatment system further comprises a control module (not shown), wherein the control module is electrically connected to and controls the operation of the first device 100, the first driving element 510, the liquid level control module 314 and the control valve 451. The control module comprises a control chip or adopts a PLC logic controller, and the control module controls the opening and closing of the first device 100, the first driving element 510, the liquid level control module 314 and the control valve 451 through electric signals.

The equipment water treatment system provided by the invention can better utilize water resources, thereby achieving the production cost of products. For example, in an actual test, when the first apparatus 100 is a wafer inserting machine, the wastewater purified by the filtration module 200 is about 400 tons per day, the conductance of the clean water obtained after the wastewater is purified by the filtration module 200 is about 1100 μm/cm, the water quality data of the clean water is not different from that of the tap water, and the clean water obtained after the purification by the test can be used for cleaning the silicon wafer by the wafer inserting machine. If these purified water sources are not recycled, there is a large waste of water sources, which also makes it difficult to reduce the production cost of silicon wafers. In addition, reservoir 310 may be a 100 cubic meter stainless steel tank and concentrate tank 320 may be a 40 cubic meter fiberglass tank. The water flow rate of the wafer inserting machine per hour is 23 cubic meters, the overflow amount of the concentrated water tank 320 per hour is 17 cubic meters, the situation that the water storage tank 310 overflows is generally avoided under the design condition, and the water supply of the wafer inserting machine can be well guaranteed. If the water supply of the inserting machine is insufficient, water can be supplied into the water storage tank 310 through an external water supply source.

The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above examples only show some embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. An appliance water treatment system, comprising:

a first device;

the filtering module comprises an RO membrane water purifying device;

2. The facility water treatment system of claim 1 wherein the water storage module further comprises a concentrate tank comprising a second water inlet and an overflow, the water flow line further comprising a fourth line comprising a D1 end and a D2 end in communication;

3. The facility water treatment system of claim 2 wherein the second water inlet is located at an upper end of the concentrate tank and the overflow outlet is located on a side wall of the concentrate tank proximate the upper end of the concentrate tank.

4. The instrumented water treatment system of claim 1, wherein the water storage tank further comprises a third water inlet, the water flow line further comprises a fifth line comprising an end E1 and an end E2 in communication, the end E1 in communication with the third water inlet, the end E2 in communication with an external water supply.

5. The facility water treatment system of claim 4 wherein the reservoir chamber is provided with a level control module.

6. The facility water treatment system according to claim 5, wherein the fifth pipeline is provided with a control valve for controlling the fifth pipeline to be communicated and closed.

7. The facility water treatment system of claim 6, wherein the level control module comprises a float level switch, the control valve is an electromagnetic valve, and the control valve is electrically connected to the float level switch and controlled by the float level switch to operate.

8. The facility water treatment system of claim 7 further comprising a control module electrically connected to the first facility, the first drive element, the liquid level control module, and the control valve.

9. The facility water treatment system of claim 1 wherein the first drive element is a water pump.

10. The facility water treatment system of claim 1 wherein the first facility is a wafer inserter.