CN113375795A - Heat loss compensation method for laser energy meter - Google Patents

Heat loss compensation method for laser energy meter Download PDF

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CN113375795A
CN113375795A CN202110719524.6A CN202110719524A CN113375795A CN 113375795 A CN113375795 A CN 113375795A CN 202110719524 A CN202110719524 A CN 202110719524A CN 113375795 A CN113375795 A CN 113375795A
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measuring
laser
light
max
laser energy
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CN113375795B (en
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付永杰
白旭
齐跃
毕文辉
于东钰
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Institute Of Metrology And Measurement Of People's Liberation Army 92493
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0252—Constructional arrangements for compensating for fluctuations caused by, e.g. temperature, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a photometer; Purge systems, cleaning devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
    • Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

The invention discloses a heat loss compensation method for a laser energy meter, which comprises the following steps: (1) measuring the splitting ratio of the beam splitter at this anglea(ii) a (2) Measuring the power level of the reflected lightP 1(ii) a (3) According to the formulaP 2=P 1/aEstimating the transmitted light power; (4) calculating the longest light-emitting time of lasert max(ii) a (5) Setting the working frequency of the energy counting data acquisition device to befFinding the maximum temperature difference Delta in the measurementT maxAnd measuring the temperature difference delta at each momentT 1/f，ΔT f2/，ΔT f3/………ΔT n f/(ii) a (6) Measuring the accurate light-emitting time of each lasertAnd light rate of each light emittingP，t<t max(ii) a (7) Using formulasE Measuring=P *n/fComputingn/fTime of dayThe standard laser energy derived from the laser energy,E n/fmeasuring(ii) a (8) By usingr=E f1/test/ΔT f1/Calculating the coefficient of the energy meterr(ii) a (9) Calculating heat losses at different temperatures; (10) carry out binomial equationQ=d*ΔT max 2Fitting; (11) measuring the temperature difference delta at each momentT 1/f，ΔT f2/，ΔT f3/………ΔT n f/And pressQ n/f =d*ΔT n/f 2CalculatingQ f1/，Q /f2，Q f3/……… Q n f/And calculating the laser energy according to a formula.

Description

Heat loss compensation method for laser energy meter
Technical Field
The invention relates to a heat loss compensation method for a laser energy meter, and belongs to the field of lasers.
Background
The calorimetric laser energy meter measures the laser energy according to a formula by measuring the temperature difference delta T before and after the laser irradiates the energy meter. However, when the energy of the long pulse laser is measured, the heat loss of the energy meter can have a large influence on the measurement result. The inherent heat loss characteristics of the laser energy meter need to be measured and compensated accordingly.
At present, a heat loss compensation method of a laser energy meter is to compensate according to a formula by measuring a time constant of the energy meter. See the article "systematic laser emission energy loss compensation method research" for details. The specific method comprises the steps of irradiating the probe of the energy meter by using laser pulses with known energy, collecting data of a temperature measuring sensor in the probe of the energy meter for a long time by using a data collecting device, and carrying out data fitting through a curve of a cooling stage of the energy meter to obtain a time constant of the energy meter. And the obtained time constant is used as a parameter and is compensated to the temperature obtained by the data acquisition device at each moment according to a Newton heating curve equation. Finally obtaining the maximum temperature change delta T of the temperature sensor in the laser energy metermaxAnd according to the formula E ═ cm delta TmaxThe laser energy was calculated.
The heat loss compensation method of the laser energy meter needs to measure the weight of each component of the energy meter and the specific heat capacity of each component. And the requirement on the measurement precision of each link is higher, and the method is more suitable for the development of a measurement reference detector.
Disclosure of Invention
The purpose of the invention is as follows: in order to overcome the defects in the prior art, the invention provides a heat loss compensation method for a laser energy meter, which reduces the number of measurement variables required by heat loss compensation and the technical requirement of heat loss compensation.
The technical scheme is as follows: in order to solve the technical problem, the heat loss compensation method of the laser energy meter is characterized by comprising the following steps of:
(1) measuring the beam splitting ratio a of the beam splitter at the angle, wherein the a is the power ratio of the reflected light to the projected light;
(2) laser is turned on, and power value P of reflected light is measured by utilizing laser power and light-emitting time monitoring device1；
(3) According to formula P2＝P1A, estimating the transmitted light power;
(4) according to the designed measuring range of the laser energy meter, according to the formula t ═ E/P2Calculating the longest light-emitting time t of lasermaxE is the designed measuring range of the laser energy meter;
(5) setting the working frequency of the energy counting data acquisition device as f, and finding out the maximum temperature difference delta T in the measurementmaxThe laser energy meter is used for finding out the position with the maximum voltage corresponding to a temperature difference of each sampling point of the thermopile, namely finding out the moment with the maximum temperature difference, wherein the temperature difference refers to the difference between the temperature at each moment and the temperature before measurement, the laser energy meter calculates the laser energy by measuring the temperature difference, finding out the maximum temperature difference is equivalent to finding out the energy of the laser, and measuring the temperature difference delta T at each moment1/f，ΔT2/f，ΔT3/f………ΔTn/fThe temperature difference is the initial temperature of the energy meter and the temperature after the laser irradiates the energy meter; n refers to the time of the nth sampling point n/f, and n corresponds to the sampling point with the largest temperature difference.
(6) The laser power and the light emitting time are monitored by a monitoring device to measure each timeAccurate light-emitting time t of laser and light rate P, t of light-emitting each time<tmax；
(7) Using the formula EMeasuringStandard laser energy obtained by calculating laser energy at n/f time, En/f measurement；
(8) Using r ═ E1/f measurement/ΔT1/fCalculating an energy meter coefficient r;
(9) according to the formula Q ═ P × n/f-r Δ Tn/fCalculating heat losses Q at different temperatures1/f，Q2/f，Q3/f………Qn/f；
(10) Will Q1/f，Q2/f，Q3/f………Qn/fFor Δ T1/f，ΔT2/f，ΔT3/f………ΔTn/fN is the number of sampling points, and a binomial formula Q ═ d ═ Delta T is performedmax 2Fitting, wherein d is a coefficient obtained through fitting, and a curve fitting formula is stored in software for later use;
(11) setting the working frequency of the energy counting data acquisition device as f1And measuring the unknown laser energy to find out the maximum temperature difference delta T in the measurementmaxAnd measuring the temperature difference at each time before the maximum temperature difference point
Figure BDA0003136472800000021
Figure BDA0003136472800000022
l is the number of samples between the maximum points of temperature, and is expressed in terms of Q ═ d ×. DELTA.Tmax 2Calculating
Figure BDA0003136472800000023
Figure BDA0003136472800000024
According to the formula
Figure BDA0003136472800000025
The laser energy was calculated.
Has the advantages that: the heat loss compensation method of the laser energy meter provided by the invention is characterized in that the light energy is accurately simulated by utilizing the light output of continuous laser within a certain time, and the heat loss of the laser under different temperature differences is directly calculated by combining the characteristic of fixed sampling frequency of the long-pulse laser energy meter, so that the heat compensation is carried out. Under the condition of meeting the requirement of the precision of the commercial laser energy meter, the measurement parameters of the heat loss compensation of the laser energy meter are greatly reduced, and the heat loss compensation of the commercial laser energy meter is more suitable for the condition with limited conditions.
Detailed Description
1) The splitting ratio a of the beam splitter at this angle was measured to be 0.3.
2) Laser is turned on, and power value P of reflected light is measured by utilizing laser power and light-emitting time monitoring device1＝30W。
3) According to formula P2＝P1A, estimating the transmitted light power P2＝100W。
4) According to the designed measuring range of the laser energy meter, according to the formula t-EIs provided with/P2Calculating the longest light-emitting time t of lasermax＝30s。
5) Setting the working frequency of the energy counting data acquisition device as f as 100Hz, and finding out the maximum temperature difference delta T in the measurementmax10 ℃, and the temperature difference at each instant Δ T was measured1/f，ΔT2/f，ΔT3/f………ΔTn/f。
6) The laser power and light-emitting time monitoring device is used for measuring the accurate light-emitting time t of each laser to be 20s and the light rate P of each light-emitting to be 101W.
7) Using the formula EMeasuringStandard laser energy obtained by calculating laser energy at n/f time, En/f measurement。
8) Using r ═ E1/f measurement/ΔT1/fAnd (3) calculating the energy meter coefficient r.
9) According to the formula Q ═ P × n/f-r Δ T3fCalculating heat losses Q at different temperatures1/f，Q2/f，Q3/f………Qn/f。
10) Will Q1/f，Q2/f，Q3/f………Qn/fFor Δ T1/f，ΔT2/f，ΔT3/f………ΔTn/fCarrying out a binomial form Q ═ d Δ Tmax 2Fitting, and storing the curve fitting formula in software for later use.
11) Setting the working frequency of the energy counting data acquisition device as f1And measuring the unknown laser energy to find out the maximum temperature difference delta T in the measurementmaxAnd measuring the temperature difference at each time before the maximum temperature difference point
Figure BDA0003136472800000031
Figure BDA0003136472800000032
And according to Q ═ d ═ Δ Tmax 2Calculating
Figure BDA0003136472800000033
According to the formula
Figure BDA0003136472800000034
The laser energy was calculated.
The above description is only of the preferred embodiments of the present invention, and it should be noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the invention and these are intended to be within the scope of the invention.

Claims (1)

1. A heat loss compensation method for a laser energy meter is characterized by comprising the following steps:
(1) measuring the beam splitting ratio a of the beam splitter at the angle, wherein the a is the power ratio of the reflected light to the projected light;
(2) the laser is turned on, and the power value P of the reflected light is measured by utilizing the laser power and light-emitting time monitoring device1；
(3) According to formula P2＝P1A, estimating the transmitted light power;
(4) according to the designed measuring range of the laser energy meter, according to the formula t-EIs provided with/P2Calculating the longest light-emitting time t of lasermax，EIs provided withDesigned for laser energy metersMeasuring range;
(5) setting the working frequency of the energy counting data acquisition device as f, and finding out the maximum temperature difference delta T in the measurementmaxAnd measuring the temperature difference delta T at each time before the maximum point of the temperature difference1/f，ΔT2/f，ΔT3/f………ΔTn/f；
(6) The laser power and light-emitting time monitoring device is used for measuring the accurate light-emitting time t of each laser and the light rate P, t of each light-emitting<tmax；
(7) Using the formula EMeasuringStandard laser energy obtained by calculating laser energy at n/f time, En/f measurement；
(8) Using r ═ E1/f measurement/ΔT1/fCalculating an energy meter coefficient r;
(9) according to the formula Q ═ P × n/f-r Δ Tn/fCalculating heat losses Q at different temperatures1/f，Q2/f，Q3/f………Qn/f；
(10) Will Q1/f，Q2/f，Q3/f………Qn/fFor Δ T1/f，ΔT2/f，ΔT3/f………ΔTn/fCarrying out a binomial form Q ═ d Δ Tmax 2Fitting, wherein d is a coefficient obtained through fitting, and a curve fitting formula is stored in software for later use;
(11) setting the working frequency of the energy counting data acquisition device as f1And measuring the unknown laser energy to find out the maximum temperature difference delta T in the measurementmaxAnd measuring the temperature difference at each time before the maximum temperature difference point
Figure FDA0003136472790000012
Figure FDA0003136472790000013
And according to Q ═ d ═ Δ Tmax 2Calculating
Figure FDA0003136472790000014
According to the formula
Figure FDA0003136472790000011
The laser energy was calculated.
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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0875687A (en) * 1994-09-03 1996-03-22 Chiyoukouon Zairyo Kenkyusho:Kk Analysis of thermal diffusivity, biot number and specific heat data in laser flush method and apparatus therefor
CN103471713A (en) * 2013-09-16 2013-12-25 中国工程物理研究院应用电子学研究所 Measurement device, with step-shaped cone, absorbing all energy of high-energy laser
CN103776529A (en) * 2014-02-10 2014-05-07 南京吉隆光纤通信股份有限公司 Desktop laser power meter capable of real-time compensation and compensation method thereof
CN104048754A (en) * 2014-05-21 2014-09-17 西北核技术研究所 Photothermal effect correcting method of light guide type detector in laser parameter measurement
CN104833418A (en) * 2015-05-13 2015-08-12 西安交通大学 Method for measuring laser energy density and total energy by use of mall-measuring-range energy meter
CN105181131A (en) * 2015-07-28 2015-12-23 哈尔滨工程大学 Laser power measuring method
CN105606214A (en) * 2015-12-28 2016-05-25 湖南华曙高科技有限责任公司 Device for calibrating laser power and method
CN111521283A (en) * 2020-05-19 2020-08-11 宝宇(武汉)激光技术有限公司 Laser wavelength and power monitoring device and method

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0875687A (en) * 1994-09-03 1996-03-22 Chiyoukouon Zairyo Kenkyusho:Kk Analysis of thermal diffusivity, biot number and specific heat data in laser flush method and apparatus therefor
CN103471713A (en) * 2013-09-16 2013-12-25 中国工程物理研究院应用电子学研究所 Measurement device, with step-shaped cone, absorbing all energy of high-energy laser
CN103776529A (en) * 2014-02-10 2014-05-07 南京吉隆光纤通信股份有限公司 Desktop laser power meter capable of real-time compensation and compensation method thereof
CN104048754A (en) * 2014-05-21 2014-09-17 西北核技术研究所 Photothermal effect correcting method of light guide type detector in laser parameter measurement
CN104833418A (en) * 2015-05-13 2015-08-12 西安交通大学 Method for measuring laser energy density and total energy by use of mall-measuring-range energy meter
CN105181131A (en) * 2015-07-28 2015-12-23 哈尔滨工程大学 Laser power measuring method
CN105606214A (en) * 2015-12-28 2016-05-25 湖南华曙高科技有限责任公司 Device for calibrating laser power and method
CN111521283A (en) * 2020-05-19 2020-08-11 宝宇(武汉)激光技术有限公司 Laser wavelength and power monitoring device and method

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Title
吴遥;黎高平;于帅;吴磊;: "量热式激光能量计热损失系数测定方法的研究", 应用光学, no. 03, pages 398 - 402 *

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