CN113375754A - Liquid level detector capable of avoiding foam interference and liquid level detection method - Google Patents
Liquid level detector capable of avoiding foam interference and liquid level detection method Download PDFInfo
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- CN113375754A CN113375754A CN202110481585.3A CN202110481585A CN113375754A CN 113375754 A CN113375754 A CN 113375754A CN 202110481585 A CN202110481585 A CN 202110481585A CN 113375754 A CN113375754 A CN 113375754A
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- 239000007788 liquid Substances 0.000 title claims abstract description 276
- 238000001514 detection method Methods 0.000 title claims abstract description 204
- 239000006260 foam Substances 0.000 title claims abstract description 37
- 238000003860 storage Methods 0.000 claims abstract description 50
- 239000012530 fluid Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000013543 active substance Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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Abstract
The invention discloses a liquid level detector for avoiding foam interference and a liquid level detection method, wherein the liquid level detector comprises: the detection head at least comprises an upper detection head and a lower detection head which are arranged at different heights outside the liquid storage tank so as to respectively acquire liquid level signals at different heights inside the liquid storage tank; and the processor is in communication connection with the detecting head and is used for acquiring the liquid level signal of the detecting head so as to judge the state of the liquid level in the liquid storage tank based on the liquid level signal of the upper detecting head and the liquid level signal of the lower detecting head. According to the liquid level detector and the liquid level detection method for avoiding the foam interference, provided by the invention, the upper detection head and the lower detection head are arranged at different heights outside the liquid storage tank, so that liquid level signals at different heights in the liquid storage tank are respectively obtained, and the liquid level condition in the liquid storage tank is judged based on the liquid level signals of the upper detection head and the liquid level signals of the lower detection head, so that the interference of a foam layer on liquid level detection is avoided, and a real and accurate liquid level state is obtained.
Description
Technical Field
The invention relates to the field of liquid level detection, in particular to a liquid level detector and a liquid level detection method capable of avoiding foam interference.
Background
The liquid level detector is a device widely applied to liquid storage equipment, and has the main functions of detecting whether liquid exists at a corresponding position in a liquid storage tank outside the liquid storage tank, and then sending out a corresponding signal to realize the functions of automatic liquid supplement, liquid discharge, alarm and the like.
However, during the manufacturing process, such as the polishing and cleaning process of the silicon wafer, it is usually necessary to use some liquid (such as cleaning liquid, active agent, etc.) which is easy to generate foam, so that a foam layer with a certain thickness is formed in the liquid storage tank and floats on the liquid. The liquid level detector is very unstable in detecting the foam layer, and signals are sometimes not provided, so that whether liquid exists at the liquid level can not be accurately judged, and misoperation or false alarm can be caused.
Therefore, it is necessary to provide a liquid level detector and a liquid level detection method for avoiding the interference of bubbles to solve the above problems.
Disclosure of Invention
In this summary, concepts in a simplified form are introduced that are further described in the detailed description. This summary of the invention is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.
The invention provides a liquid level detector for avoiding foam interference, which comprises:
the detection head at least comprises an upper detection head and a lower detection head which are arranged at different heights outside the liquid storage tank so as to respectively acquire liquid level signals at different heights inside the liquid storage tank;
and the processor is in communication connection with the detecting head and is used for acquiring the liquid level signal of the detecting head so as to judge the position of the liquid level in the liquid storage tank based on the liquid level signal of the upper detecting head and the liquid level signal of the lower detecting head.
Further, the processor is further configured to determine a change in the liquid level in the liquid storage tank based on a change in the liquid level signal of the upper detection head and a change in the liquid level signal of the lower detection head.
Further, the liquid level detector further comprises: and the height adjuster is arranged between the upper detecting head and the lower detecting head and is used for adjusting the height difference between the upper detecting head and the lower detecting head.
Further, the liquid level detector further comprises: the detection indicating lamp is arranged on the detection head and used for indicating the liquid level signal at the height of the detection head.
Further, when the height of the detection head is provided with liquid, the detection indicator light is turned on; when the height of the detection head is not provided with liquid, the detection indicator lamp is turned off; when the height position of the detection head has foam, the detection indicator lamp is turned on and turned off.
Further, the liquid level detector further comprises: and the liquid level indicator light is in communication connection with the processor and is used for indicating whether liquid exists at the height of the lower detection head.
Further, when liquid exists at the height of the lower detection head, the liquid level indicator lamp is turned on; when the lower detection head is not filled with liquid at the height, the liquid level indicator lamp is turned off; when the lower detection head is in the height position, the liquid level indicator lamp is turned off.
The invention also provides a method for detecting liquid level by using the liquid level detector, which comprises the following steps:
the upper detection head and the lower detection head are arranged at different heights outside the liquid storage tank, so that liquid level signals at different heights inside the liquid storage tank are respectively acquired;
and judging the position of the liquid level in the liquid storage tank based on the liquid level signal of the upper detection head and the liquid level signal of the lower detection head.
And further, the change of the liquid level in the liquid storage tank is judged based on the liquid level signal change of the upper detection head and the liquid level signal change of the lower detection head.
Further, before the upper detecting head and the lower detecting head are arranged at different heights outside the liquid storage tank, the method further comprises the following steps:
estimating the thickness of a foam layer in the liquid storage tank;
and adjusting a height adjuster between the upper detection head and the lower detection head based on the estimated thickness of the foam layer to set a height difference between the upper detection head and the lower detection head.
According to the liquid level detector and the liquid level detection method for avoiding the foam interference, provided by the invention, the upper detection head and the lower detection head are arranged at different heights outside the liquid storage tank, so that liquid level signals at different heights in the liquid storage tank are respectively obtained, and the liquid level condition in the liquid storage tank is judged based on the liquid level signals of the upper detection head and the liquid level signals of the lower detection head, so that the interference of a foam layer on liquid level detection is avoided, and a real and accurate liquid level state is obtained.
Drawings
The following drawings of the invention are included to provide a further understanding of the invention. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.
In the drawings:
FIG. 1 is a schematic diagram of a liquid level detector for avoiding bubble interference according to an embodiment of the present invention;
FIGS. 2A-2C illustrate signals and signal variations of the level detector as the liquid level rises according to one embodiment of the present invention;
3A-3C illustrate the signal and the change of signal of the level detector when the liquid level decreases according to one embodiment of the present invention;
FIG. 4 is a flow chart of a liquid level detection method according to an embodiment of the invention.
Detailed Description
In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention. It will be apparent, however, to one skilled in the art, that the present invention may be practiced without one or more of these specific details. In other instances, well-known features have not been described in order to avoid obscuring the invention.
It is to be understood that the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity. Like reference numerals refer to like elements throughout.
It will be understood that when an element or layer is referred to as being "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it can be directly on, adjacent to, connected or coupled to the other elements or layers or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on," "directly adjacent to," "directly connected to" or "directly coupled to" other elements or layers, there are no intervening elements or layers present. It will be understood that, although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present invention.
Spatial relational terms such as "under," "below," "under," "above," "over," and the like may be used herein for convenience in describing the relationship of one element or feature to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, then elements or features described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary terms "under" and "under" can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatial descriptors used herein interpreted accordingly.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of the associated listed items.
In order to provide a thorough understanding of the present invention, detailed steps and detailed structures will be set forth in the following description in order to explain the present invention. The following detailed description of the preferred embodiments of the invention, however, the invention is capable of other embodiments in addition to those detailed.
During the production process, such as the polishing and cleaning processes of silicon wafers, it is usually necessary to use some liquid (such as cleaning liquid, active agent, etc.) which is easy to generate foam, so that a foam layer with a certain thickness is formed in the liquid storage tank and floats on the liquid. The liquid level detector is very unstable in detecting the foam layer, and signals are sometimes not provided, so that whether liquid exists at the liquid level can not be accurately judged, and misoperation or false alarm can be caused.
In view of the above problem, the present invention provides a liquid level detector for avoiding bubble interference, as shown in fig. 1, comprising:
the detection head at least comprises an upper detection head 210 and a lower detection head 220 which are arranged at different heights outside the liquid storage tank 100 so as to respectively obtain liquid level signals at different heights inside the liquid storage tank 100;
and the processor is in communication connection with the detection head and is used for acquiring the liquid level signal of the detection head so as to judge the position of the liquid level in the liquid storage tank 100 based on the liquid level signal of the upper detection head 210 and the liquid level signal of the lower detection head 220.
Illustratively, a fixing bracket 101 is disposed along an outer wall of the fluid reservoir 100 for fixing the upper detecting head 210 and the lower detecting head 220 at different heights outside the fluid reservoir 100.
Further, a height adjuster 230 is disposed between the upper detecting head 210 and the lower detecting head 220 for adjusting a height difference between the upper detecting head 210 and the lower detecting head 220.
In one embodiment, the thickness T of the foam layer within the fluid reservoir is estimated1Based on said estimated thickness T of the foam layer1A height adjuster 230 for adjusting a height between the upper and lower detecting heads to set a height difference T between the upper and lower detecting heads2. Specifically, the height difference T between the upper detecting head 210 and the lower detecting head 2202Greater than said estimated foam layer thickness T1Preferably, T2＝(1.1～1.2)×T1。
Optionally, the detecting head is further provided with a detecting indicator, as shown in fig. 1, the upper detecting head 210 is provided with an upper detecting indicator 211, and the lower detecting head 220 is provided with a lower detecting indicator 222. The detection indicator light is used for indicating a liquid level signal at the height of the detection head. Specifically, when liquid exists at the height of the detection head, the liquid level signal is clear and stable, and the detection indicator light is on; when no liquid exists at the height of the detection head, the liquid level signal is clear and stable, and the detection indicator lamp is turned off; and when the height position of the detection head has foam, the liquid level signal is unclear and unstable, and the detection indicator lights are turned on and off.
Optionally, the liquid level detector further comprises a liquid level indicator 240 communicatively connected to the processor for indicating whether there is liquid at the height of the lower detector head 220. Specifically, when there is liquid at the height of the current detection head 220, the liquid level indicator lamp 240 is on; when the height of the lower detection head 220 is not filled with liquid, the liquid level indicator lamp 240 is turned off; when the lower detection head 220 has foam at the height, the liquid level indicator lights are turned off.
Illustratively, the processor is further configured to determine a change in the liquid level in the liquid storage tank 100 based on a change in the liquid level signal of the upper detection head 210 and a change in the liquid level signal of the lower detection head 220.
Referring to fig. 2A-2C, when the liquid level in the liquid storage tank 100 rises from a low liquid level, in an initial stage, neither the upper detection head 210 nor the lower detection head 220 detects a liquid level signal, and therefore, both the upper detection indicator 211 and the lower detection indicator 222 are turned off, the state of the detection indicator is referred to as "up-off-down-off" for short, and the processor determines that no liquid exists at the current height of the lower detection head 220, and therefore, the liquid level indicator 240 is turned off, as shown in fig. 2A; as the liquid level rises, the foam layer reaches the height of the lower detection head 220, the lower detection head 220 detects an unstable liquid level signal, therefore, the lower detection indicator 222 turns off when turning on from off, and can be regarded as turning on from off, while the upper detection head 210 does not detect a liquid level signal, the upper detection indicator 211 still turns off, the state of the detection indicator is simply referred to as "turning on from off" and turning on from on ", the processor judges that no liquid exists at the height of the lower detection head 220 currently, and therefore, the liquid level indicator 240 still turns off, as shown in fig. 2B; as the liquid level continues to rise, the foam layer reaches the height of the upper detection head 210, the lower detection head 220 detects a stable liquid level signal, and therefore the lower detection indicator 222 is on, the upper detection head 210 detects an unstable liquid level signal, the upper detection indicator 211 is turned off when turned off, and the state of the detection indicator is simply referred to as "on-up and off-up", and the processor determines that the height of the lower detection head 220 currently has liquid, and therefore the liquid level indicator is still 240 on, as shown in fig. 2C.
Referring to fig. 3A-3C, when the liquid level in the liquid storage tank 100 is lowered from a high liquid level, in an initial stage, both the upper detection head 210 and the lower detection head 220 detect stable liquid level signals, so that both the upper detection indicator 211 and the lower detection indicator 222 are turned on, the detection indicator status is referred to as "up-down-up", and the processor determines that there is liquid at the height of the current lower detection head 220, so that the liquid level indicator 240 is turned on, as shown in fig. 3A; as the liquid level decreases, the foam layer decreases to the height of the upper detection head 210, the upper detection head 210 detects an unstable liquid level signal, the upper detection indicator lamp 211 turns off when turning on from on to off, which can be regarded as turning off from on, the lower detection head 220 detects a stable liquid level signal, the lower detection indicator lamp 222 turns on, the state of the detection indicator lamp is referred to as "turning off on off" for short, and the processor determines that there is liquid at the height of the lower detection head 220 based on the state of the detection indicator lamp changing from "turning on off, so the liquid level indicator lamp 240 still turns on, as shown in fig. 3B; as the liquid level continues to fall, the foam layer falls to the height of the lower detection head 220, the upper detection head 210 does not detect a liquid level signal, the upper detection indicator lamp 211 goes out, the lower detection head 220 detects an unstable liquid level signal, the lower detection indicator lamp 222 goes out when the light changes from on to off, the state of the detection indicator lamp is referred to as "on-off and off-off", the processor determines that no liquid exists at the height of the lower detection head 220 based on the state of the detection indicator lamp changing from "on-off and off-on" to "on-off and off-off", and therefore the liquid level indicator lamp 240 goes out, as shown in fig. 3C.
The present invention also provides a method for detecting liquid level by using the above liquid level detector for avoiding bubble interference, as shown in fig. 4, comprising the following steps:
step S401: the upper detection head and the lower detection head are arranged at different heights outside the liquid storage tank, so that liquid level signals at different heights inside the liquid storage tank are respectively acquired;
step S402: and judging the position of the liquid level in the liquid storage tank based on the liquid level signal of the upper detection head 210 and the liquid level signal of the lower detection head 220.
Further, based on the liquid level signal variation of the upper detection head 210 and the liquid level signal variation of the lower detection head 220, the variation of the liquid level in the liquid storage tank is determined.
Further, before the upper detecting head 210 and the lower detecting head 220 are disposed at different heights outside the liquid storage tank, the method further includes the steps of:
the thickness T of the foam layer in the liquid storage tank 100 is estimated1；
Adjusting a height adjuster 230 between the upper and lower detection heads 210 and 220 based on the estimated foam layer thickness to set a height difference T between the upper and lower detection heads 210 and 2202。
Specifically, the height difference T between the upper detecting head 210 and the lower detecting head 2202Greater than said estimated foam layer thickness T1Preferably, T2＝(1.1～1.2)×T1。
For example, the position of the liquid level in the liquid storage tank is determined based on the liquid level signal of the upper detection head 210 and the liquid level signal of the lower detection head 220.
In one embodiment, the level signals at different heights within the fluid reservoir 100 include a clear, stable, fluid present signal, a clear, stable, fluid absent signal, and an unclear, unstable level signal. The liquid level signal at the height of the detection head can be indicated through the detection indicator lamp. Specifically, when the detection indicator light is on, the liquid is present at the height of the detection head, and the liquid level signal is clear and stable; when the detection indicator light is turned off, the detection head is indicated to be in a position without liquid at the height, and the liquid level signal is clear and stable; when the detection indicator light is on, the detection indicator light is off, and the detection head is indicated to be foamed at the height position, so that the liquid level signal is unclear and unstable.
Further, the liquid level indicator 240 can indicate whether the liquid is present at the height of the lower detecting head 220. Specifically, when the liquid level indicator 240 is turned on, it indicates that there is liquid at the height of the lower detecting head 220; when the liquid level indicator 240 goes off, it indicates that there is no liquid or foam at the height of the lower detecting head 220.
For example, the change of the liquid level in the liquid storage tank is determined based on the change of the liquid level signal of the upper detection head 210 and the change of the liquid level signal of the lower detection head 220.
In the initial stage, the upper detection indicator 211 and the lower detection indicator 222 are both turned off, and the detection indicator status is referred to as "turned off on off" for short, which means that neither the upper detection head 210 nor the lower detection head 220 detects a liquid level signal, the processor determines that no liquid exists at the height of the current lower detection head 220, and the liquid level indicator 240 is turned off, as shown in fig. 2A; next, the lower detection indicator 222 goes off when turning on from off to on, and can be regarded as turning on from off, which means that the lower detection head 220 detects an unstable liquid level signal, and the upper detection indicator 211 still goes off, which means that the upper detection head 210 does not detect a liquid level signal, and the state of the detection indicator is referred to as "turning on off from top" for short, the processor determines that the liquid level rises, but still does not reach the height of the lower detection head 220, that is, there is no liquid at the height of the lower detection head 220, and the liquid level indicator 240 still goes off, as shown in fig. 2B; next, the lower detection indicator 222 is turned on to indicate that the lower detection head 220 detects a stable liquid level signal, and the upper detection indicator 211 is turned off when it is turned on from off to on to indicate that the upper detection head 210 detects an unstable liquid level signal, the state of the detection indicator is simply referred to as "up-on-down-on", the processor determines that the liquid level rises and reaches the height of the lower detection head 220, that is, the liquid is present at the height of the lower detection head 220, and the liquid level indicator is still 240 on, as shown in fig. 2C.
At the initial stage, the upper detection indicator 211 and the lower detection indicator 222 are both on, and the detection indicator status is referred to as "up-down-up", which means that the upper detection head 210 and the lower detection head 220 both detect stable liquid level signals, the processor determines that there is liquid at the height of the lower detection head 220, and the liquid level indicator 240 is on, as shown in fig. 3A; next, the upper detection indicator 211 is turned off when it is turned on from on to off, which indicates that the upper detection head 210 detects an unstable liquid level signal, the lower detection indicator 222 is still on, which indicates that the lower detection head 220 detects a stable liquid level signal, the state of the detection indicator is referred to as "turn on and turn off", the processor determines that the liquid level is reduced based on the fact that the state of the detection indicator is changed from "turn on and turn off on" to "turn on and turn off on" but is not lower than the height of the lower detection head 220, that is, the liquid is present at the height of the lower detection head 220, and the liquid level indicator 240 is still on, as shown in fig. 3B; next, the upper detection indicator 211 goes out to indicate that the upper detection head 210 does not detect the liquid level signal, the lower detection indicator 222 goes out when the light changes from on to off, which can be regarded as turning from on to off to indicate that the lower detection head 220 detects an unstable liquid level signal, the state of the detection indicator is referred to as "going out from top to bottom" for short, the processor determines that the liquid level is reduced based on the fact that the state of the detection indicator changes from "going out from top to bottom on" to "going out from top to bottom" and is already lower than the height of the lower detection head 220, that is, no liquid is present at the height of the lower detection head 220, and the liquid level indicator 240 goes out, as shown in fig. 3C.
According to the liquid level detector and the liquid level detection method for avoiding the foam interference, provided by the invention, the upper detection head and the lower detection head are arranged at different heights outside the liquid storage tank, so that liquid level signals at different heights in the liquid storage tank are respectively obtained, and the liquid level condition in the liquid storage tank is judged based on the liquid level signals of the upper detection head and the liquid level signals of the lower detection head, so that the interference of a foam layer on liquid level detection is avoided, and a real and accurate liquid level state is obtained.
The present invention has been illustrated by the above embodiments, but it should be understood that the above embodiments are for illustrative and descriptive purposes only and are not intended to limit the invention to the scope of the described embodiments. Furthermore, it will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that many variations and modifications may be made in accordance with the teachings of the present invention, which variations and modifications are within the scope of the present invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. A liquid level detector for avoiding foam interference, comprising:
the detection head at least comprises an upper detection head and a lower detection head which are arranged at different heights outside the liquid storage tank so as to respectively acquire liquid level signals at different heights inside the liquid storage tank;
and the processor is in communication connection with the detecting head and is used for acquiring the liquid level signal of the detecting head so as to judge the position of the liquid level in the liquid storage tank based on the liquid level signal of the upper detecting head and the liquid level signal of the lower detecting head.
2. The fluid level detector of claim 1, wherein the processor is further configured to determine a change in fluid level within the fluid reservoir based on a change in the fluid level signal from the upper detector and a change in the fluid level signal from the lower detector.
3. The fluid level detector of claim 1, further comprising:
and the height adjuster is arranged between the upper detecting head and the lower detecting head and is used for adjusting the height difference between the upper detecting head and the lower detecting head.
4. The fluid level detector of claim 1, further comprising:
the detection indicating lamp is arranged on the detection head and used for indicating the liquid level signal at the height of the detection head.
5. The liquid level detector of claim 4, wherein said detection indicator lights up when there is liquid at the level of said detection head; when the height of the detection head is not provided with liquid, the detection indicator lamp is turned off; when the height position of the detection head has foam, the detection indicator lamp is turned on and turned off.
6. The fluid level detector of claim 1, further comprising:
and the liquid level indicator light is in communication connection with the processor and is used for indicating whether liquid exists at the height of the lower detection head.
7. The liquid level detector of claim 6, wherein said liquid level indicator lights up when there is liquid at the level of said lower detector head; when the lower detection head is not filled with liquid at the height, the liquid level indicator lamp is turned off; when the lower detection head is in the height position, the liquid level indicator lamp is turned off.
8. A method of detecting a liquid level using the liquid level detector as claimed in any one of claims 1 to 7, comprising the steps of:
the upper detection head and the lower detection head are arranged at different heights outside the liquid storage tank, so that liquid level signals at different heights inside the liquid storage tank are respectively acquired;
and judging the position of the liquid level in the liquid storage tank based on the liquid level signal of the upper detection head and the liquid level signal of the lower detection head.
9. The liquid level detecting method as claimed in claim 8, wherein the change of the liquid level in the liquid storage tank is determined based on the change of the liquid level signal of the upper detecting head and the change of the liquid level signal of the lower detecting head.
10. The method of claim 8, wherein before the upper and lower detecting heads are disposed at different heights outside the liquid storage tank, the method further comprises:
estimating the thickness of a foam layer in the liquid storage tank;
and adjusting a height adjuster between the upper detection head and the lower detection head based on the estimated thickness of the foam layer to set a height difference between the upper detection head and the lower detection head.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114061706A (en) * | 2021-11-15 | 2022-02-18 | 苏州晶洲装备科技有限公司 | Liquid level detection method and device and readable storage medium |
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Application publication date: 20210910 |