CN210953023U - Liquid supply device - Google Patents
Liquid supply device Download PDFInfo
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- CN210953023U CN210953023U CN201921905734.9U CN201921905734U CN210953023U CN 210953023 U CN210953023 U CN 210953023U CN 201921905734 U CN201921905734 U CN 201921905734U CN 210953023 U CN210953023 U CN 210953023U
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Abstract
The utility model relates to a liquid supply device. The method comprises the following steps: the liquid level sensor sends a first signal to the control device when detecting that liquid in the liquid temporary storage device reaches a first liquid level; the second liquid level sensor sends a second signal to the control device when detecting that the liquid in the liquid temporary storage device reaches a second liquid level; and the control device sends a closing signal to the liquid supply switch when receiving the first signal or the second signal to control the liquid supply switch to be closed, and the second liquid level sensor and the floater liquid level sensor have different liquid level detection modes. The liquid level sensor through two different types detects the liquid level in the liquid temporary storage device together, has realized the dual monitoring to the liquid level to still accurately detect the liquid level when arbitrary level sensor became invalid, improved the accuracy control to the fluid infusion volume, avoided overflowing the scheduling problem because of the fluid infusion that leads to excessively.
Description
Technical Field
The utility model relates to the field of semiconductor technology, especially, relate to a liquid supply device.
Background
An exemplary hexamethyldisilazane liquid supply apparatus is provided with a liquid level sensor for detecting a liquid level of the liquid buffer. However, if the detection of the liquid level sensor is inaccurate, a signal that the liquid in the liquid temporary storage device is supplemented in place is not sent out in time, and the problem of excessive liquid supplement occurs. When the hexamethyldisilazane replenishing liquid is excessive, the risk of overflowing liquid in the liquid temporary storage device can be generated, and the hexamethyldisilazane cannot use a foaming function when the hexamethyldisilazane replenishing liquid is excessive, so that the hexamethyldisilazane is a toxic substance, and the treatment of the overflowed hexamethyldisilazane is complicated.
SUMMERY OF THE UTILITY MODEL
In view of the above, it is necessary to provide a liquid supply apparatus with accurate liquid level detection.
A liquid supply apparatus, comprising: the liquid level sensor comprises a floater liquid level sensor, a second liquid level sensor, a control device, a liquid supply switch and a liquid temporary storage device; the floater liquid level sensor is positioned in the liquid temporary storage device and used for sending a first signal to the control device when detecting that liquid in the liquid temporary storage device reaches a first liquid level; the second liquid level sensor is used for sending a second signal to the control device when detecting that the liquid in the liquid temporary storage device reaches a second liquid level; the control device is used for sending a control signal to the liquid supply switch, and the control device sends a closing signal to the liquid supply switch when receiving any one of the first signal and the second signal, so as to control the liquid supply switch to be closed, and the liquid supply device stops supplying liquid to the liquid temporary storage device; wherein the second liquid level sensor and the float liquid level sensor have different liquid level detection modes.
In one embodiment, the first and second levels are the same level.
In one embodiment, the liquid buffer is a bubbling liquid tank.
In one embodiment, the liquid supply switch comprises a valve, the valve is close to the liquid temporary storage device, and the valve is used for opening and closing according to the control signal.
In one embodiment, the liquid supply device further comprises a filter arranged between the liquid supply switch and the liquid supply device, and the filter is used for filtering the liquid supplied by the liquid supply device.
In one embodiment, when the control device receives the first signal or the second signal, the liquid supply switch is turned off under the control of the turn-off signal, and the liquid supply device stops supplying liquid to the liquid temporary storage device; when the control device does not receive the first signal and does not receive the second signal, the liquid supply switch is opened under the control of the opening signal sent by the control device, and the liquid supply device starts to supply liquid to the liquid temporary storage device.
In one embodiment, the float level sensor and the second level sensor are both high level output sensors, and the first signal and the second signal are both high level signals.
In one embodiment, the second liquid level sensor is disposed adjacent to an outer sidewall of the liquid buffer, the second liquid level sensor is a photoelectric liquid level sensor, and the liquid buffer is a transparent container.
In one embodiment, the liquid supply is configured to supply hexamethyldisilazane.
In one of the embodiments, the second liquid level sensor is an electro-optical liquid level sensor or an ultrasonic liquid level sensor.
In one embodiment, the control device sends a control signal to at least one liquid supply switch.
The liquid supply device comprises a floater liquid level sensor, a second liquid level sensor, a control device, a liquid supply switch and a liquid temporary storage device; the floater liquid level sensor is positioned in the liquid temporary storage device and used for sending a first signal to the control device when detecting that liquid in the liquid temporary storage device reaches a first liquid level; the second liquid level sensor is used for sending a second signal to the control device when detecting that the liquid in the liquid temporary storage device reaches a second liquid level; the control device is used for sending a control signal to the liquid supply switch, and the control device sends a closing signal to the liquid supply switch when receiving any one of the first signal and the second signal, so as to control the liquid supply switch to be closed, and the liquid supply device stops supplying liquid to the liquid temporary storage device; wherein the second liquid level sensor and the float liquid level sensor have different liquid level detection modes. This application is through float level sensor and the liquid level that the second level sensor together detected in the liquid temporary storage device, the dual monitoring to the liquid level of the liquid in the liquid temporary storage device has been realized, controlling means all can control the confession liquid switch and close and stop to supply liquid to the liquid temporary storage device when receiving first signal or second signal, thereby still can accurately detect the liquid level when float level sensor and the arbitrary item of second level sensor are inefficacy, the accuracy control to the fluid infusion volume when having improved to supplementing liquid in the liquid temporary storage device, the appearance of the liquid overflow scheduling problem that leads to because of fluid infusion is excessive has been avoided.
Drawings
FIG. 1 is a block diagram of a liquid supply apparatus in one embodiment;
FIG. 2 is a block diagram of a liquid supply apparatus in another embodiment.
Detailed Description
In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
It will be understood that when an element or layer is referred to as being "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it can be directly on, adjacent to, connected or coupled to the other elements or layers or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on," "directly adjacent to," "directly connected to" or "directly coupled to" other elements or layers, there are no intervening elements or layers present. It will be understood that, although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present invention.
Spatial relational terms such as "under," "below," "under," "above," "over," and the like may be used herein for convenience in describing the relationship of one element or feature to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, then elements or features described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary terms "under" and "under" can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatial descriptors used herein interpreted accordingly.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of the associated listed items.
An exemplary liquid supply device detects the liquid level of liquid inside the liquid temporary storage device through 2 floater liquid level detection sensors inside the liquid temporary storage device, when the detected liquid level is lower than a liquid level set value, the floater liquid level sensors send liquid supplementing signals to the control device, liquid is supplemented into the liquid temporary storage device through the liquid supply device, when the floater liquid level sensors detect that the liquid inside the liquid temporary storage device reaches the liquid level set value, the floater liquid level sensors send liquid supplementing stopping signals to the control device, and the liquid supply device stops supplying liquid to the liquid temporary storage device. When the problem that the external pipeline is dry and the like affects the normal lifting of the floater along with the liquid level of the liquid inside the liquid temporary storage device occurs, the high-level floater in the floater liquid level sensor cannot accurately detect the liquid level of the liquid in the liquid temporary storage device, so that a signal that the liquid is supplemented in place cannot be sent out in time, and the problem of excessive liquid supplementation occurs.
As shown in FIG. 1, in one embodiment, a liquid supply apparatus is provided, comprising: a float liquid level sensor 102, a second liquid level sensor 104, a control device 106, a liquid supply switch 108 and a liquid temporary storage device 110. The float level sensor 102 is located inside the liquid buffer 110, the float level sensor 102 being configured to send a first signal to the control device 106 when it is detected that the liquid in the liquid buffer 110 reaches a first level; the second liquid level sensor 104 is used for sending a second signal to the control device 106 when detecting that the liquid in the liquid temporary storage device 110 reaches the second liquid level; the control device 106 is used for sending a control signal to the liquid supply switch 108, when receiving any one of the first signal and the second signal, the control device 106 sends a closing signal to the liquid supply switch 108, the liquid supply switch 108 is controlled to be closed, and the liquid supply device 112 stops supplying liquid to the liquid temporary storage device 110; wherein the second liquid level sensor 104 and the float liquid level sensor 102 detect liquid levels differently.
In one embodiment, the second liquid level sensor is an electro-optical liquid level sensor or an ultrasonic liquid level sensor. In other embodiments, the second liquid level sensor may select other types of liquid level sensors different from the way that the float liquid level sensor detects the liquid level according to actual needs.
In one embodiment, liquid supply switch 108 includes a valve proximate liquid staging device 110 for opening and closing in response to a control signal sent by control device 106.
In one embodiment, when the control device 106 receives the first signal or the second signal, the liquid supply switch 108 is turned off under the control of the turn-off signal sent by the control device 106, and the liquid supply device 112 stops supplying liquid to the liquid buffer 110; when the control device 106 does not receive the first signal and does not receive the second signal, the liquid supply switch 108 is turned on under the control of the on signal sent by the control device 106, and the liquid supply device 112 starts to supply liquid to the liquid temporary storage device 110. When the liquid in the liquid temporary storage device 110 reaches the first liquid level or the second liquid level, the liquid supply switch 108 is turned off under the control of the control signal sent by the control device 106, and the liquid supply device 112 stops supplying liquid to the liquid temporary storage device 110; when the liquid in the liquid temporary storage device 110 does not reach the first liquid level and does not reach the second liquid level, the liquid supply switch 108 is turned on under the control of the control signal sent by the control device 106, and the liquid supply device 112 starts to supply liquid to the liquid temporary storage device 110 until the liquid supply switch 108 is turned off under the action of the control signal.
In one embodiment, the second liquid level sensor 104 is attached to a side wall of the liquid buffer 110, the second liquid level sensor 104 is an electro-optical liquid level sensor, and the liquid buffer 110 is a transparent container.
In one embodiment, control device 106 sends a control signal to at least one liquid supply switch 108, and liquid supply switch 108 is turned on or off under the control of control device 106 to control the liquid level in liquid buffer 110 connected to liquid supply switch 108, for example, the number of liquid supply switches 108 may be 2,3,4, etc.
As shown in FIG. 2, in one embodiment, the liquid supply apparatus further comprises a filter 114 disposed between the liquid supply switch 108 and the liquid supply apparatus 112, the filter 114 being configured to filter the liquid supplied by the liquid supply apparatus 112 to the liquid buffer 110 connected to the liquid supply switch 108.
In one embodiment, the liquid staging device 110 is a bubbling liquid tank.
In one embodiment, the liquid supply device comprises 2 float level sensors, one of which is a high float level sensor and the other of which is a low float level sensor.
In one embodiment, the first and second levels are the same level. In another embodiment, the first liquid level and the second liquid level may be different according to actual conditions.
In one embodiment, the float level sensor 102 and the second level sensor 104 are both high level output sensors.
In one embodiment, the first signal and the second signal are both high level signals.
In one embodiment, the output signals of the second liquid level sensor 104 and the float liquid level sensor 102 are applied to the same feedback point on the control device, thereby ensuring that the control device sends a closing signal to the liquid supply switch as long as any one of the first signal and the second signal is detected, and the liquid supply device immediately stops supplying liquid to the liquid temporary storage device.
In one embodiment, the liquid supply is used to supply hexamethyldisilazane, and in other embodiments, the liquid supply is used to supply different liquids as desired by the user.
The liquid supply device comprises a floater liquid level sensor, a second liquid level sensor, a control device, a liquid supply switch and a liquid temporary storage device; the floater liquid level sensor is positioned in the liquid temporary storage device and used for sending a first signal to the control device when detecting that liquid in the liquid temporary storage device reaches a first liquid level; the second liquid level sensor is used for sending a second signal to the control device when detecting that the liquid in the liquid temporary storage device reaches a second liquid level; the control device is used for sending a control signal to the liquid supply switch, and the control device sends a closing signal to the liquid supply switch when receiving any one of the first signal and the second signal, so as to control the liquid supply switch to be closed, and the liquid supply device stops supplying liquid to the liquid temporary storage device; wherein the second liquid level sensor and the float liquid level sensor have different liquid level detection modes. This application is through float level sensor and the liquid level that the second level sensor together detected in the liquid temporary storage device, the dual monitoring to the liquid level of the liquid in the liquid temporary storage device has been realized, controlling means all can control the confession liquid switch and close and stop to supply liquid to the liquid temporary storage device when receiving first signal or second signal, thereby still can accurately detect the liquid level when float level sensor and the arbitrary item of second level sensor are inefficacy, the accuracy control to the fluid infusion volume when having improved to supplementing liquid in the liquid temporary storage device, the appearance of the liquid overflow scheduling problem that leads to because of fluid infusion is excessive has been avoided.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (10)
1. A liquid supply apparatus, comprising: the liquid level sensor comprises a floater liquid level sensor, a second liquid level sensor, a control device, a liquid supply switch and a liquid temporary storage device;
the floater liquid level sensor is positioned in the liquid temporary storage device and used for sending a first signal to the control device when detecting that liquid in the liquid temporary storage device reaches a first liquid level;
the second liquid level sensor is used for sending a second signal to the control device when detecting that the liquid in the liquid temporary storage device reaches a second liquid level;
the control device is used for sending a control signal to the liquid supply switch, and the control device sends a closing signal to the liquid supply switch when receiving any one of the first signal and the second signal, so as to control the liquid supply switch to be closed, and the liquid supply device stops supplying liquid to the liquid temporary storage device;
wherein the second liquid level sensor and the float liquid level sensor detect liquid levels in different ways.
2. The liquid supply apparatus of claim 1, wherein the first liquid level and the second liquid level are the same level.
3. The liquid supply apparatus of claim 1 wherein the liquid staging device is a bubbling liquid tank.
4. The liquid supply apparatus as claimed in claim 1, wherein the liquid supply switch comprises a valve, the valve being adjacent to the liquid buffer, the valve being adapted to open and close in response to the control signal.
5. The liquid supply apparatus as claimed in claim 1, further comprising a filter disposed between the liquid supply switch and the liquid supply apparatus, wherein the filter is configured to filter the liquid supplied by the liquid supply apparatus.
6. The liquid supply apparatus according to claim 1, wherein when the control apparatus receives the first signal or the second signal, the liquid supply switch is turned off under the control of the turn-off signal, and the liquid supply apparatus stops supplying liquid to the liquid temporary storage apparatus; when the control device does not receive the first signal and does not receive the second signal, the liquid supply switch is opened under the control of the opening signal sent by the control device, and the liquid supply device starts to supply liquid to the liquid temporary storage device.
7. The liquid supply apparatus as claimed in claim 1, wherein the float level sensor and the second level sensor are both high level output sensors, and the first signal and the second signal are both high level signals.
8. The liquid supply apparatus of claim 1, wherein the second liquid level sensor is disposed proximate an outer sidewall of the liquid buffer, the second liquid level sensor is an electro-optical liquid level sensor, and the liquid buffer is a transparent container.
9. The liquid supply device as claimed in claim 1, wherein the liquid supply device is configured to supply hexamethyldisilazane.
10. The liquid supply apparatus of claim 1, wherein the second liquid level sensor is an electro-optical liquid level sensor or an ultrasonic liquid level sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921905734.9U CN210953023U (en) | 2019-11-06 | 2019-11-06 | Liquid supply device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921905734.9U CN210953023U (en) | 2019-11-06 | 2019-11-06 | Liquid supply device |
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| CN210953023U true CN210953023U (en) | 2020-07-07 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113319052A (en) * | 2021-05-12 | 2021-08-31 | 上海中欣晶圆半导体科技有限公司 | Secondary protection device and protection method for preventing liquid level of tank body of semiconductor silicon wafer cleaning machine from overflowing |
| CN113432676A (en) * | 2021-06-28 | 2021-09-24 | 孚创动力控制技术（启东）有限公司 | Multifunctional liquid level detector |
| CN114243058A (en) * | 2021-11-08 | 2022-03-25 | 东风汽车集团股份有限公司 | Fuel cell system, and gas-liquid separation device, control method, and control device for fuel cell system |
-
2019
- 2019-11-06 CN CN201921905734.9U patent/CN210953023U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113319052A (en) * | 2021-05-12 | 2021-08-31 | 上海中欣晶圆半导体科技有限公司 | Secondary protection device and protection method for preventing liquid level of tank body of semiconductor silicon wafer cleaning machine from overflowing |
| CN113432676A (en) * | 2021-06-28 | 2021-09-24 | 孚创动力控制技术（启东）有限公司 | Multifunctional liquid level detector |
| CN114243058A (en) * | 2021-11-08 | 2022-03-25 | 东风汽车集团股份有限公司 | Fuel cell system, and gas-liquid separation device, control method, and control device for fuel cell system |
| CN114243058B (en) * | 2021-11-08 | 2023-07-18 | 东风汽车集团股份有限公司 | Fuel cell system, gas-liquid separation device, control method and control device thereof |
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Address after: No. 518, Linjiang Road, Gaobu Town, Yuecheng District, Shaoxing City, Zhejiang Province Patentee after: Shaoxing SMIC integrated circuit manufacturing Co.,Ltd. Address before: No. 518, Linjiang Road, Gaobu Town, Yuecheng District, Shaoxing City, Zhejiang Province Patentee before: SMIC manufacturing (Shaoxing) Co.,Ltd. |