CN113363222A - Semiconductor packaging structure with radiating fin and preparation method thereof - Google Patents
Semiconductor packaging structure with radiating fin and preparation method thereof Download PDFInfo
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- CN113363222A CN113363222A CN202010152816.1A CN202010152816A CN113363222A CN 113363222 A CN113363222 A CN 113363222A CN 202010152816 A CN202010152816 A CN 202010152816A CN 113363222 A CN113363222 A CN 113363222A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3677—Wire-like or pin-like cooling fins or heat sinks
Abstract
The invention provides a semiconductor packaging structure with a heat sink and a preparation method thereof, wherein the method comprises the following steps: bonding a chip on the upper surface of the packaging substrate, and forming a heat conduction lead of an arc-shaped vertical line, wherein the first end of the heat conduction lead is connected with the surface of the chip, and the second end of the heat conduction lead is connected with a welding ball; forming a plastic packaging material layer of the plastic packaging chip and the heat conducting lead; forming a heat-conducting adhesive layer on the surface of the plastic packaging material layer, wherein the heat-conducting adhesive layer is connected with the solder balls on the second ends of the heat-conducting leads; and forming a heat dissipation layer on the surface of the heat conduction adhesive layer. The heat dissipation layer is completely formed on the outer surface of the plastic packaging material layer, so that the heat dissipation area of the heat dissipation layer is increased, and meanwhile, heat is transferred to the heat dissipation layer through the heat conduction lead, so that the heat dissipation efficiency of the chip is effectively improved; in addition, the heat conducting lead is directly formed, so that welding wires and parts do not need to be cut off, and the manufacturing cost is effectively reduced; meanwhile, the heat conducting lead is connected with the heat conducting adhesive layer through the solder ball, so that the contact area of the heat conducting lead and the heat dissipation layer is further increased, and the heat dissipation efficiency is improved.
Description
Technical Field
The invention relates to the technical field of semiconductor packaging, in particular to a semiconductor packaging structure with a heat radiating fin and a preparation method thereof.
Background
At present, with rapid development of electronic information technology and continuous improvement of consumption level of people, functions of a single electronic device are increasingly diversified and sizes of the single electronic device are increasingly miniaturized, so that in an internal structure of the electronic device, the density of chips and functional components is continuously increased, and Critical dimensions (line width) of devices are continuously reduced, which brings great challenges to the semiconductor packaging industry.
With the demand for electronic products to be light, thin, and compact, semiconductor packages such as Ball Grid Array (BGA) packages that can be scaled down to form Integrated Circuits (ICs) and have high density and multiple pins are becoming one of the mainstream in the packaging market. However, since such a semiconductor package provides a higher density of electronic circuits (electronic circuits) and electronic components (electronic components), the amount of heat generated during operation is also high; moreover, the semiconductor package is formed by encapsulating a semiconductor chip (PBGA, Plastic Ball Grid Array) with a package colloid with poor thermal conductivity, so that the performance of the semiconductor chip is often affected by poor heat dissipation efficiency. In order to improve the Heat dissipation efficiency of the semiconductor package, it is proposed to add a Heat Sink (Heat Sink, Heat slug, Heat block) in the PBGA package structure.
Fig. 1 shows a conventional PBGA package structure with a heat spreader added. Although the package structure has the heat sink added in the package structure in consideration of the heat dissipation problem, the heat sink 14 extends from the package substrate 11 to the upper side of the chip 12 through the support connection of several brackets; however, the problem with this structure is that the heat generated by the chip 12 can reach the heat sink 14 only by conduction through the plastic packaging material layer 13, and the plastic packaging material layer 13 is usually made of resin, which has poor heat conductivity, resulting in poor heat dissipation effect of the package structure; meanwhile, in the package structure, the heat sink 14 is usually mounted after the chip 12 is bonded to the package substrate 11, and then the plastic package material layer 13 is subjected to plastic package, and the plastic package material layer 13 is usually formed by curing a liquid plastic package material, so that the plastic package material is likely to overflow to the surface of the heat sink 14 during the plastic package process, which leads to a reduction in the heat dissipation effect of the heat sink 14, and finally leads to problems of poor heat dissipation of the package device, a reduction in electrical performance caused by poor heat dissipation, and the like.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a semiconductor package structure with a heat sink and a method for manufacturing the same, which are used to solve the problem of performance degradation of the package structure due to poor heat dissipation effect of the semiconductor package structure with the heat sink in the prior art.
To achieve the above and other related objects, the present invention provides a method for fabricating a semiconductor package structure having a heat sink, the method comprising:
providing a packaging substrate, bonding a chip on the upper surface of the packaging substrate, and forming a heat conducting lead of an arc-shaped vertical line, wherein the heat conducting lead is provided with a first end and a second end which are opposite, the first end is connected with the surface of the chip through a routing lug, and the second end is connected with a welding ball;
forming a plastic package material layer for plastic packaging the chip and the heat conducting lead, wherein the surface of the plastic package material layer exposes the solder balls on the second end of the heat conducting lead;
forming a heat-conducting adhesive layer on the surface of the plastic packaging material layer, wherein the heat-conducting adhesive layer is connected with the solder balls on the second ends of the heat-conducting leads;
and forming a heat dissipation layer on the surface of the heat conduction adhesive layer.
Optionally, the thermal conductive adhesive layer is a conductive material layer.
Optionally, the heat dissipation layer has a non-planar surface structure.
Optionally, the heat dissipation layer includes a metal main body layer and a plating layer on the metal main body layer.
Optionally, the chip is bonded to the upper surface of the package substrate by a bonding wire.
Optionally, the step of forming the heat conducting wire of an arc-shaped upright wire comprises:
providing a bonding wire and a cleaver, wherein the position of the bonding wire is fixed by the cleaver, a solder ball is formed at the tail end of the bonding wire, and the solder ball is welded on a bonding pad on the surface of the chip;
the part of the bonding wire connected with the welding ball is deformed by the cleaver to generate a crack;
moving the chopper upwards by a preset distance along the vertical direction, wherein the preset distance defines the length of the heat conducting wire, and the chopper reciprocates along an arc-shaped track while keeping the chopper in the vertical direction so as to enable a welding wire at the preset distance to generate internal stress and present an arc-shaped vertical line;
moving the cleaver and the bonding wire upwards along the vertical direction, and breaking the bonding wire, thereby forming a routing bump, and meanwhile, the bonding wire below the cleaver is an arc-shaped vertical line;
forming the solder ball on the second end of the heat conducting lead at the tail end of the welding wire in an arc-shaped vertical line;
welding the upper end of the welding wire in the arc-shaped vertical line to the routing bump by the cleaver, and tilting the welding wire in the arc-shaped vertical line upwards under the action of welding pressure;
and breaking the bonding wire by the cleaver, thereby forming the heat conducting lead on the routing bump.
Optionally, the step of generating the crack by deforming the portion of the bonding wire connected to the solder ball by the cleaver includes: the riving knife is moved up in a vertical direction and then moved to the right or left in a horizontal direction, thereby generating a crack.
Optionally, the step of breaking the bonding wire by the cleaver, so as to form the heat conductive wire on the wire bonding bump includes: and moving the cleaver upwards along the vertical direction, and then pulling the bonding wire upwards through the cleaver until the bonding wire is broken, thereby forming the heat conducting wire.
Optionally, the step of forming the plastic package material layer includes:
forming a plastic packaging material on the upper surfaces of the packaging substrate, the chip and the heat conducting lead;
and grinding and removing the plastic package material until the solder balls on the second ends of the heat conducting leads are exposed, thereby forming a plastic package material layer for plastically packaging the chip and the heat conducting leads.
The present invention also provides a semiconductor package structure having a heat sink, the package structure comprising:
a package substrate;
the chip is bonded on the upper surface of the packaging substrate;
the plastic packaging material layer is positioned on the upper surfaces of the packaging substrate and the chip and is used for plastically packaging the chip;
the heat-conducting adhesive layer is positioned on the upper surface of the plastic packaging material layer;
the heat dissipation layer is positioned on the upper surface of the heat conduction adhesive layer;
the heat conducting lead of the arc-shaped vertical line is provided with a first end and a second end which are opposite, the first end is connected with the surface of the chip through the routing lug, the second end is connected with a welding ball, and the welding ball is connected with the heat conducting adhesive layer.
Optionally, the chip is bonded to the upper surface of the package substrate by a bonding wire, and the bonding wire and the heat conducting wire are made of the same material.
Optionally, the thermal conductive adhesive layer is a conductive material layer.
Optionally, the heat dissipation layer has a non-planar surface structure.
Optionally, the heat dissipation layer includes a metal main body layer and a plating layer on the metal main body layer.
As described above, the semiconductor package structure with a heat sink and the method for manufacturing the same of the present invention have the following advantages: the heat dissipation layer is completely formed on the outer surface of the plastic packaging material layer, so that the heat dissipation area of the heat dissipation layer is increased, and meanwhile, heat dissipated by the chip is transferred to the heat dissipation layer with a large area through the heat conduction lead; in addition, compared with the routing process in the prior art, the heat conducting lead can be formed only by cutting off redundant leads and part of the packaging substrate, the arc-shaped vertical line heat conducting lead is directly formed, the welding line and part of the packaging substrate do not need to be cut off, the process complexity is reduced, raw materials are saved, the routing process can be realized by using the existing machine equipment, and the manufacturing cost is effectively reduced; meanwhile, the heat conducting lead is connected with the heat conducting adhesive layer through the solder ball, so that the contact area of the heat conducting lead and the heat dissipation layer can be further increased, and the heat dissipation efficiency is improved.
Drawings
Fig. 1 is a schematic cross-sectional view of a semiconductor package structure in the prior art.
Fig. 2 is a flow chart illustrating a method for fabricating a semiconductor package structure with a heat spreader in accordance with the present invention.
Fig. 3 to 11 are schematic cross-sectional views of structures obtained in steps of a method for manufacturing a semiconductor package structure with a heat sink according to the present invention, wherein fig. 4 to 7 are schematic flow charts of the method for manufacturing a heat conducting wire shown in dotted line a in fig. 3, and fig. 11 is a schematic cross-sectional structure of the semiconductor package structure with a heat sink according to the present invention.
Description of the element reference numerals
11 packaging substrate
12 chips
13 layer of plastic packaging material
14 Heat sink
21 packaging substrate
22 chip
23 Heat conducting wire
24 solder ball
25 Plastic packaging material
26 layer of plastic packaging material
27 heat-conducting glue layer
28 Heat dissipation layer
29 bonding wire
31 welding wire
32 cleaver
33 pad
34 wire bonding bump
35 wire clamp
S1-S4
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
Please refer to fig. 2 to 11. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the drawings only show the components related to the present invention rather than the number, shape and size of the components in actual implementation, the type, quantity and proportion of each component in actual implementation may be changed at will, and the layout of the components may be more complex, and the "upper" and "lower" in the present embodiment are not strictly limited and are only for the convenience of description.
Example one
As shown in fig. 2, in the embodiment, the heat dissipation layer is entirely formed on the outer surface of the molding compound layer, so that the heat dissipation area of the heat dissipation layer is increased, and meanwhile, the heat dissipated by the chip is transferred to the heat dissipation layer with a large area through the heat conduction lead, because the heat conduction lead (made of metal) has better heat conduction performance than the molding compound layer (made of insulating material), the heat dissipation efficiency of the chip is effectively improved by arranging the heat conduction lead and combining the heat dissipation layer with a large area; in addition, compared with the routing process in the prior art, the heat conducting lead can be formed only by cutting off redundant leads and part of the packaging substrate, the heat conducting lead of the arc-shaped vertical line is directly formed in the embodiment, the process is simple, extra material waste is not needed, the process can be realized by using the existing machine equipment, the manufacturing cost is effectively reduced, meanwhile, the heat conducting lead is connected with the heat conducting glue layer through the welding ball, the contact area between the heat conducting lead and the heat dissipation layer can be further increased, and the heat dissipation efficiency is improved.
Fig. 3 to 11 are schematic structural diagrams illustrating steps of preparing a semiconductor package structure having a heat sink.
As shown in fig. 2 and fig. 3, step S1 is performed to provide a package substrate 21, bond a chip 22 on the upper surface of the package substrate 21, and form a heat conducting wire 23 having an arc-shaped vertical line, where the heat conducting wire 23 has a first end and a second end opposite to each other, the first end is connected to the surface of the chip 22 through a wire bonding bump 34, and the second end is connected to a solder ball 24.
The material of the package substrate 21 may be selected according to different requirements, and may be, for example, non-metal material such as silicon, glass, silicon oxide, ceramic, polymer, etc., metal material such as copper, etc., or composite material of two or more, the shape of which may be circular, square, or any other desired shape, and the surface area of which is determined to be capable of bearing subsequent structures. In this embodiment, for subsequent packaging, the surface area of the package substrate 21 is larger than the surface area of the chip 22, for example, the surface area of the package substrate 21 is 1.1 to 2 times of the surface area of the chip 22.
By way of example, the chip 22 may include various types of active or passive components, the number of which may be one or more. In this embodiment, the chip 22 is bonded on the package substrate 21 through a wire bonding process (i.e., through a bonding wire 29), two ends of the bonding wire 29 are respectively connected to the package substrate 21 and the chip 22, and a bonding pad (not shown) may be disposed on a surface of the chip 22 and connected to the bonding wire 29. The material of the bonding wire 29 is preferably gold wire, because gold wire not only has good conductivity and oxidation resistance, but also has the characteristics of very good ductility and easy balling, and thus contributes to the improvement of the performance of the semiconductor packaging structure. Of course, in other examples, the chip 22 may also be soldered on the package substrate 21 by using a die bonding (die bonding), which is not strictly limited in this embodiment.
As an example, the bonding wire 29 and the heat conducting wire 23 are made of the same material, such as gold wire, so that the heat conducting wire 23 and the bonding wire 29 can be formed in the same process, which is beneficial to simplifying the manufacturing process. Of course, in other examples, the heat conducting wire 23 may also be other metal wires with good heat conducting performance, such as copper wire, aluminum wire, copper alloy wire, and the like, and is not limited in this embodiment. The heat generated by the chip 22 can be quickly transferred to the heat conductive adhesive layer 27 to be formed later through the heat conductive wire 23 and finally dissipated through the heat dissipation layer formed on the heat conductive adhesive layer 27, and since the heat conductive performance of the metal material is better than that of the insulating material, the heat conductive wire 23 is adopted to increase the heat conductive path of the chip, and the heat dissipation efficiency of the chip 22 is effectively improved; in addition, the solder balls 24 are connected to the upper ends of the heat conducting wires 23, so that the contact area between the heat conducting wires and the heat dissipation layer 28 can be further increased, and the heat dissipation efficiency can be improved. It should be noted that the number of the heat conducting wires 23 and the bonding wires 29 may be multiple, for example, 2 or more than 2, and the specific number may be set according to different product requirements, which is not limited herein.
Fig. 4 to 7 are schematic flow charts illustrating a method for manufacturing the heat conducting wire 23 in the dotted line a of fig. 3, as follows:
as shown in fig. 4 and 5, a bonding wire 31, a cleaver 32 and a wire clamp 35 are provided, the position of the bonding wire 31 is fixed by the cleaver 32, a solder ball 24 is formed at the end of the bonding wire 31, and the solder ball 24 is soldered to a pad 33 on the surface of the chip 22.
The steps specifically include: first, the bond wire 31 (shown in fig. 4 a) is clamped by a riving knife 32 and a clamp 35; then melting the end of the bonding wire 31 by electric spark at the end of the bonding wire 31 to form a solder ball 24 (as shown in fig. 4 b); the wire clamp 35 is then released and the wire 31 is moved upward so that the solder ball 24 is at the end of the riving knife 32 (as shown in fig. 4 c); the clamp 35 is then closed (as shown in fig. 5 a); the solder balls 24 are then soldered to the pads 33 by the riving knife 32 (as shown in fig. 5 b); the clamp 35 is then released and the riving knife 32 is moved upward in the vertical direction a distance (as shown in fig. 5 c) to form a wire bond bump 34 on the pad 33 that is eutectic with the pad.
As shown in fig. 6a, the portion of the wire 31 connected to the wire bump 34 is deformed by the cleaver 32, and a crack is generated.
The steps specifically include: the cleaver 32 is moved upward in the vertical direction, and then the cleaver 32 is moved rightward or leftward in the horizontal direction, so that the portion where the bonding wire 31 is connected to the bonding bump 34 is deformed to generate a crack.
As shown in fig. 6b, the riving knife 32 is moved upward in the vertical direction by a predetermined distance, which defines the length of the heat conducting wire 23, and while the riving knife 32 is kept in the vertical direction, the riving knife 32 is reciprocated along the arc-shaped locus, so that the welding wire 31 at the predetermined distance generates internal stress, thereby appearing as an arc-shaped vertical line.
As shown in fig. 6c, the wire 31 is broken by moving the wire-splitting blade 32 and the wire 31 upward in the vertical direction to form the wire-bonding bump 34, and the wire 31 under the wire-splitting blade 32 is in an arc-shaped vertical line. It should be noted here that when the wire 31 is broken, the wire clamp 35 is kept in a clamped state, and the shape of the wire 31 under the chopper 32 in 6c in fig. 6 has a part of reduced curvature compared to 6b in fig. 6 due to the pull-up action in the vertical direction, but the shape of the wire 31 under the chopper 32 in 6c in fig. 6 can be precisely controlled to be an arc-shaped straight line by presetting the pull-up force, and these can be set according to the parameters of the specific process, and are not limited herein.
As shown in fig. 6d, the solder ball 24 on the second end of the heat conducting wire 23 is formed at the end of the bonding wire 31 in an arc-shaped vertical line. Specifically, the solder ball 24 may be formed by melting the end of the bonding wire 31 by an electric spark at the end of the bonding wire 31. It should be noted here that the clip 35 is held in a clamped state when the solder balls 24 are formed.
As shown in fig. 7a, the upper end of the bonding wire 31 in the form of an arc-shaped vertical line is then bonded to the bonding bump 34 by the cleaver 32, and the bonding wire 31 in the form of an arc-shaped vertical line is tilted upward by the bonding pressure, so as to form the shape of the heat conducting wire 23 in fig. 3. It should be noted here that the clamp 35 remains loose during the welding process.
As shown in fig. 7b and 7c, the thermal conductive wire 23 is formed on the wire bump 34 by finally breaking the bonding wire 31 by the cleaver 32.
The steps specifically include: holding the clamp 35 loose, moving the riving knife 32 upward in a vertical direction, and then clamping the clamp 35 (as shown in fig. 7 b); the wire 31 is then pulled upward by the riving knife 32 until the wire 31 is broken, thereby forming the thermally conductive wire 23.
Thus, a cycle of manufacturing the heat conductive wire 23 is formed. Compared with the routing process in the prior art, the vertical heat conducting lead can be formed only by cutting off redundant leads and part of the packaging substrate, but the method directly forms an arc-shaped vertical line without cutting off a welding wire and part of the packaging substrate, thereby reducing the process complexity, saving raw materials, realizing the routing process by using the existing machine equipment and effectively reducing the manufacturing cost; meanwhile, the heat conducting lead is connected with the heat conducting adhesive layer through the solder ball, so that the contact area of the heat conducting lead and the heat dissipation layer can be further increased, and the heat dissipation efficiency is improved.
As shown in fig. 2 and 9, step S2 is then performed to form a molding compound layer 26 for molding the chip 22 and the heat conductive wires 23, and the solder balls 24 on the second ends of the heat conductive wires 23 are exposed on the surface of the molding compound layer 26.
As shown in fig. 8 and 9, the step of forming the molding compound layer 26 includes, as an example:
forming a molding compound 25 on the upper surfaces of the package substrate 21, the chip 22 and the thermal conductive wires 23 (as shown in fig. 8);
grinding and removing the molding compound 25 until the solder balls 24 on the second ends of the heat conducting wires 23 are exposed, thereby forming a molding compound layer 26 (shown in fig. 9) for molding the chip 22 and the heat conducting wires 23.
By way of example, the material of the molding compound layer 26 may include, but is not limited to, one or more of polyimide, silicone, and epoxy, and the process of forming the molding compound layer 26 may include, but is not limited to, one or more of an inkjet process, a dispensing process, a compression molding process, a transfer molding process, a liquid encapsulation process, a vacuum lamination process, or a spin coating process.
As shown in fig. 2 and 10, step S3 is performed to form a thermal conductive adhesive layer 27 on the surface of the molding compound layer 26, where the thermal conductive adhesive layer 27 is connected to the solder balls 24 on the second ends of the thermal conductive wires 23.
As an example, the thermal conductive adhesive layer 27 may be an insulating material layer, such as a silicone layer; in this embodiment, the thermal conductive adhesive layer 27 preferably has a material layer with an electrical conduction function, such as an electrically conductive silver adhesive layer, so as to ground the heat dissipation layer 28 through the thermal conductive adhesive layer 27, so that the heat dissipation layer 28 can also play a role of electromagnetic shielding while achieving a heat dissipation function, thereby improving the performance of the semiconductor package device; the process for forming the thermal conductive adhesive layer 27 may include, but is not limited to, one or more of an inkjet process, a dispensing process, a compression molding process, a transfer molding process, a liquid sealing process, a vacuum lamination process, or a spin coating process; in this embodiment, an inkjet or dispensing process is preferred, so that the thermal conductive adhesive layer 27 with a non-flat surface structure can be more easily formed, and thus there are more process options in the subsequent process of forming the heat dissipation layer 28 with a non-flat surface structure, for example, the heat dissipation layer 28 with a metal body layer and a plating layer on the metal body layer can be formed by a physical vapor deposition or electroplating process, because the thermal conductive adhesive layer 27 has a non-flat surface structure, the formed heat dissipation layer 28 naturally has a non-flat surface structure, so that the heat dissipation layer 28 has a larger heat dissipation surface area, and deformation caused by thermal expansion and/or adverse effects caused by stress can be avoided; meanwhile, the thermal conductive adhesive layer 27 and the heat dissipation layer 28 can be made to be more closely attached, so that the heat of the chip 22 is more quickly conducted into the heat dissipation layer 28 through the thermal conductive adhesive layer 27 and finally dissipated into the external environment.
As shown in fig. 2 and 11, step S4 is finally performed to form a heat dissipation layer 28 on the surface of the thermal conductive adhesive layer 27.
For example, the heat dissipation layer 28 may be made of any material with good heat dissipation performance. In the present embodiment, the heat dissipation layer 28 includes, as an example, a metal main body layer and a plating layer on the metal main body layer; the metal main body layer can be a copper layer, an aluminum layer, a stainless steel layer, a copper alloy layer or a composite layer of multiple metal layers, the coating layer can be a nickel layer, a chromium layer or other coatings with good antirust and anticorrosive properties, and the coating layer is used for protecting the metal main body layer so as to prevent the heat dissipation performance of the metal main body layer from being reduced due to oxidation and/or corrosion and ensure the heat dissipation performance of the heat dissipation layer 28. The surface area of heat dissipation layer 28 is usually not less than the surface area of plastic packaging material layer 26, promptly heat dissipation layer 28 will plastic packaging material layer 26 covers completely, just heat dissipation layer 28's edge can also buckle downwards in order to incite somebody to action plastic packaging material layer 26's lateral wall portion cladding not only can increase through such setting heat dissipation layer 28's heat radiating area increases semiconductor packaging structure's heat dissipation route can make simultaneously heat dissipation layer 28 with plastic packaging material layer 26's connection is more firm, promotes semiconductor packaging structure's performance.
In another example, the heat sink layer 28 is a graphene layer; the graphene is conductive, has good heat dissipation performance, and has good oxidation resistance, corrosion resistance and other characteristics. By using graphene as the heat dissipation layer 28, the thickness of the heat dissipation layer 28 can be reduced, which is beneficial to further miniaturization of the semiconductor package device. If the heat dissipation layer 28 is a graphene layer, the heat dissipation layer 28 may be formed by transfer molding.
By way of example, the heat dissipation layer 28 has a non-flat surface structure, that is, the surface of the heat dissipation layer 28 is not flat, and may be, for example, an uneven structure, or a corrugated structure, or may also be any other irregular shape, which is not limited in this embodiment. The surface of the heat dissipation layer 28 is configured to be non-flat, so that on one hand, the surface area of the heat dissipation layer 28 can be increased to increase the heat dissipation area, and meanwhile, the problems of expansion deformation, stress and the like of the heat dissipation layer 28 when being heated are avoided through the configuration of the non-flat surface structure, and the performance of the semiconductor package structure is ensured.
Example two
This embodiment provides a semiconductor package structure with a heat sink, which can be prepared by the preparation method of the first embodiment, but is not limited to the preparation method of the first embodiment, as long as the package structure can be formed. Please refer to embodiment one, and details are not repeated herein.
As shown in fig. 11, the package structure includes:
a package substrate 21;
a chip 22 bonded to an upper surface of the package substrate 21;
a plastic packaging material layer 26 which is located on the upper surfaces of the package substrate 21 and the chip 22 and which is used for plastic packaging the chip 22;
a heat-conducting adhesive layer 27 located on the upper surface of the plastic package material layer 26;
a heat dissipation layer 28 located on the upper surface of the thermal conductive adhesive layer 27;
the heat conducting wire 23 is a straight arc-shaped heat conducting wire, the heat conducting wire 23 has a first end and a second end opposite to each other, the first end is connected with the surface of the chip 22 through a wire bonding bump 34, the second end is connected with a solder ball 24, and the solder ball 24 is connected with the heat conducting adhesive layer 27.
As an example, the chip 22 is bonded to the upper surface of the package substrate 21 by bonding wires 29, and the bonding wires 29 and the heat conducting wires 23 are made of the same material.
As an example, the thermal conductive adhesive layer 27 is a conductive material layer, and may be a conductive silver adhesive layer, for example.
As an example, the heat dissipation layer 28 has a non-flat surface structure.
As an example, the heat dissipation layer 28 includes a metal body layer and a plating layer on the metal body layer.
In summary, the invention provides a semiconductor package structure with a heat sink and a method for manufacturing the same, wherein the heat dissipation layer is formed on the outer surface of the plastic package material layer, so that the heat dissipation area of the heat dissipation layer is increased, and the heat dissipated by the chip is transferred to the heat dissipation layer with a large area through the heat conduction lead; in addition, compared with the routing process in the prior art, the heat conducting lead can be formed only by cutting off redundant leads and part of the packaging substrate, the arc-shaped vertical line heat conducting lead is directly formed, the welding line and part of the packaging substrate do not need to be cut off, the process complexity is reduced, raw materials are saved, the routing process can be realized by using the existing machine equipment, and the manufacturing cost is effectively reduced; meanwhile, the heat conducting lead is connected with the heat conducting adhesive layer through the solder ball, so that the contact area of the heat conducting lead and the heat dissipation layer can be further increased, and the heat dissipation efficiency is improved. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (14)
1. A preparation method of a semiconductor packaging structure with a heat sink is characterized by comprising the following steps:
providing a packaging substrate, bonding a chip on the upper surface of the packaging substrate, and forming a heat conducting lead of an arc-shaped vertical line, wherein the heat conducting lead is provided with a first end and a second end which are opposite, the first end is connected with the surface of the chip through a routing lug, and the second end is connected with a welding ball;
forming a plastic package material layer for plastic packaging the chip and the heat conducting lead, wherein the surface of the plastic package material layer exposes the solder balls on the second end of the heat conducting lead;
forming a heat-conducting adhesive layer on the surface of the plastic packaging material layer, wherein the heat-conducting adhesive layer is connected with the solder balls on the second ends of the heat-conducting leads;
and forming a heat dissipation layer on the surface of the heat conduction adhesive layer.
2. The method of manufacturing a semiconductor package structure with a heat sink according to claim 1, wherein: the heat-conducting adhesive layer is a conductive material layer.
3. The method of manufacturing a semiconductor package structure with a heat sink according to claim 1, wherein: the heat dissipation layer has a non-flat surface structure.
4. The method of manufacturing a semiconductor package structure with a heat sink according to claim 1, wherein: the heat dissipation layer comprises a metal main body layer and a coating layer located on the metal main body layer.
5. The method of manufacturing a semiconductor package structure with a heat sink according to claim 1, wherein: the chip is bonded on the upper surface of the packaging substrate through a bonding wire.
6. The method of manufacturing a semiconductor package structure with a heat sink according to claim 1, wherein the step of forming the heat conductive wire having an arc-shaped vertical line comprises:
providing a bonding wire and a cleaver, wherein the position of the bonding wire is fixed by the cleaver, a solder ball is formed at the tail end of the bonding wire, and the solder ball is welded on a bonding pad on the surface of the chip;
the part of the bonding wire connected with the welding ball is deformed by the cleaver to generate a crack;
moving the chopper upwards by a preset distance along the vertical direction, wherein the preset distance defines the length of the heat conducting wire, and the chopper reciprocates along an arc-shaped track while keeping the chopper in the vertical direction so as to enable a welding wire at the preset distance to generate internal stress and present an arc-shaped vertical line;
moving the cleaver and the bonding wire upwards along the vertical direction, and breaking the bonding wire, thereby forming a routing bump, and meanwhile, the bonding wire below the cleaver is an arc-shaped vertical line;
forming the solder ball on the second end of the heat conducting lead at the tail end of the welding wire in an arc-shaped vertical line;
welding the upper end of the welding wire in the arc-shaped vertical line to the routing bump by the cleaver, and tilting the welding wire in the arc-shaped vertical line upwards under the action of welding pressure;
and breaking the bonding wire by the cleaver, thereby forming the heat conducting lead on the routing bump.
7. The method for manufacturing a semiconductor package structure with a heat sink according to claim 6, wherein the step of deforming the portion of the bonding wire connected to the solder ball by the cleaver to generate a crack comprises: the riving knife is moved up in a vertical direction and then moved to the right or left in a horizontal direction, thereby generating a crack.
8. The method of claim 6, wherein the step of forming the thermally conductive wire on the wire bonding bump by breaking the bonding wire with the cleaver comprises: and moving the cleaver upwards along the vertical direction, and then pulling the bonding wire upwards through the cleaver until the bonding wire is broken, thereby forming the heat conducting wire.
9. The method for manufacturing a semiconductor package structure with a heat sink according to claim 1, wherein the step of forming the molding compound layer comprises:
forming a plastic packaging material on the upper surfaces of the packaging substrate, the chip and the heat conducting lead;
and grinding and removing the plastic package material until the solder balls on the second ends of the heat conducting leads are exposed, thereby forming a plastic package material layer for plastically packaging the chip and the heat conducting leads.
10. A semiconductor package having a heat sink, the package comprising:
a package substrate;
the chip is bonded on the upper surface of the packaging substrate;
the plastic packaging material layer is positioned on the upper surfaces of the packaging substrate and the chip and is used for plastically packaging the chip;
the heat-conducting adhesive layer is positioned on the upper surface of the plastic packaging material layer;
the heat dissipation layer is positioned on the upper surface of the heat conduction adhesive layer;
the heat conducting lead of the arc-shaped vertical line is provided with a first end and a second end which are opposite, the first end is connected with the surface of the chip through the routing lug, the second end is connected with a welding ball, and the welding ball is connected with the heat conducting adhesive layer.
11. The semiconductor package structure with a heat sink as recited in claim 10, wherein: the chip is bonded on the upper surface of the packaging substrate through a bonding wire, and the bonding wire and the heat conducting wire are made of the same material.
12. The semiconductor package structure with a heat sink as recited in claim 10, wherein: the heat-conducting adhesive layer is a conductive material layer.
13. The semiconductor package structure with a heat sink as recited in claim 10, wherein: the heat dissipation layer has a non-flat surface structure.
14. The semiconductor package structure with a heat sink as recited in claim 10, wherein: the heat dissipation layer comprises a metal main body layer and a coating layer located on the metal main body layer.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010152816.1A CN113363222A (en) | 2020-03-06 | 2020-03-06 | Semiconductor packaging structure with radiating fin and preparation method thereof |
| US17/195,389 US11488925B2 (en) | 2020-03-06 | 2021-03-08 | Semiconductor package structure with heat sink and method preparing the same |
| US17/974,391 US11842976B2 (en) | 2020-03-06 | 2022-10-26 | Semiconductor package structure with heat sink and method preparing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010152816.1A CN113363222A (en) | 2020-03-06 | 2020-03-06 | Semiconductor packaging structure with radiating fin and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113363222A true CN113363222A (en) | 2021-09-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010152816.1A Pending CN113363222A (en) | 2020-03-06 | 2020-03-06 | Semiconductor packaging structure with radiating fin and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113363222A (en) |
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2020
- 2020-03-06 CN CN202010152816.1A patent/CN113363222A/en active Pending
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