CN113352060A - Method for improving deformation of titanium attachment plate - Google Patents

Method for improving deformation of titanium attachment plate Download PDF

Info

Publication number
CN113352060A
CN113352060A CN202110721873.1A CN202110721873A CN113352060A CN 113352060 A CN113352060 A CN 113352060A CN 202110721873 A CN202110721873 A CN 202110721873A CN 113352060 A CN113352060 A CN 113352060A
Authority
CN
China
Prior art keywords
milling cutter
milling
treatment
thermal annealing
finish machining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110721873.1A
Other languages
Chinese (zh)
Inventor
姚力军
边逸军
潘杰
王学泽
章丽娜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ningbo Jiangfeng Electronic Material Co Ltd
Original Assignee
Ningbo Jiangfeng Electronic Material Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ningbo Jiangfeng Electronic Material Co Ltd filed Critical Ningbo Jiangfeng Electronic Material Co Ltd
Priority to CN202110721873.1A priority Critical patent/CN113352060A/en
Publication of CN113352060A publication Critical patent/CN113352060A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23PMETAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/08Control or regulation of cutting velocity
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/16Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
    • C22F1/18High-melting or refractory metals or alloys based thereon
    • C22F1/183High-melting or refractory metals or alloys based thereon of titanium or alloys based thereon

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Milling Processes (AREA)

Abstract

The invention provides a method for improving the deformation of a titanium attachment prevention plate, which comprises the following steps: and sequentially carrying out first thermal annealing treatment, rough milling treatment, second thermal annealing treatment, finish milling treatment and polishing treatment on the anti-sticking plate blank. The method can reduce the deformation problem of the titanium attachment prevention plate in the machining process and improve the flatness of the titanium attachment prevention plate.

Description

Method for improving deformation of titanium attachment plate
Technical Field
The invention belongs to the field of manufacture of anti-sticking plates, and relates to a method for improving deformation of a titanium anti-sticking plate.
Background
The sputtering process is a technique for forming various functional thin films on a substrate by sputtering under appropriate process conditions through magnetron sputtering, multi-arc ion plating or other types of coating systems. However, during sputtering, sputtered target atoms or large-sized particles are easy to fly to the inner wall of the sputtering machine, which affects the cleaning of the inner wall of the sputtering chamber. In order to prevent the sputtered target atoms or large-sized particles from affecting the cleaning of the inner wall of the sputtering machine, a shielding plate is usually added in the sputtering machine. The anti-landing plate is a thin plate structure with a large area and a small thickness. The attachment preventing plate is provided with a connecting hole and a groove, and the attachment preventing plate is arranged on the inner wall of the sputtering machine through the connecting hole and the groove. The anti-adhesion plate can adsorb sputtering atoms and large-size particles flying to the inner wall of the sputtering machine, so that the pollution of the sputtering atoms and the large-size particles to the inner wall of the sputtering machine is reduced. The materials of the protection plate include silver, copper, aluminum, titanium and the like. Among them, the titanium attachment prevention plate is a commonly used attachment prevention plate. However, the existing processing technology of the titanium attachment prevention plate easily deforms the formed titanium attachment prevention plate, so that the performance of the titanium attachment prevention plate is reduced.
CN102107347A discloses a processing method of a landing prevention plate, which comprises: providing a plate attachment prevention blank; cutting the attachment prevention plate blank; and a 4000-ton press machine and an auxiliary disc are also provided, and after the tool carries out each step of processing on the anti-sticking plate blank, the 4000-ton press machine is used for applying pressure intensity of 10-20 MPa and the holding time of 1-2 minutes to the anti-sticking plate blank through the auxiliary disc so as to release stress. Compared with the prior art, the invention can release the stress generated in the machining process of the anti-sticking plate blank so as to correct the deformation part of the anti-sticking plate blank, ensure the parallelism and the planeness of the machined product to keep consistency and stability, improve the production efficiency and meet the production requirement of the target material.
CN102069359A discloses a method for processing a defending plate structure, which comprises: providing a plate attachment prevention blank; blanking the blank of the attachment prevention plate; roughly milling two surfaces of the anti-sticking plate; then finish milling the anti-sticking surface of the anti-sticking plate; the uneven structure is formed on the anti-sticking surface of the anti-sticking plate by machining, and the used machining tool is a ball end milling cutter. The processing method solves the problems that the uneven structure of the landing-preventing surface of the landing-preventing plate is irregular and easy to deform, and the uneven structure of the landing-preventing surface of the landing-preventing plate obtained after processing is uniform, high in dimensional precision and good in surface smoothness.
Disclosure of Invention
In order to solve the technical problems, the invention provides a method for improving the deformation of a titanium attachment prevention plate, which can reduce the deformation problem of the titanium attachment prevention plate in the machining process and improve the flatness of the titanium attachment prevention plate.
In order to achieve the technical effect, the invention adopts the following technical scheme:
the invention provides a method for improving the deformation of a titanium attachment prevention plate, which comprises the following steps:
and sequentially carrying out first thermal annealing treatment, rough milling treatment, second thermal annealing treatment, finish milling treatment and polishing treatment on the anti-sticking plate blank.
According to the invention, before the rough milling treatment and the finish milling treatment, the annealing treatment is respectively carried out on the anti-sticking plate blank, so that the cutting machinability of the anti-sticking plate blank can be improved, meanwhile, the internal stress of the anti-sticking plate blank is eliminated, the anti-sticking plate deformation generated in the rough milling treatment and the finish milling treatment is reduced, and the flatness of the anti-sticking plate is improved.
In a preferred embodiment of the present invention, the temperature of the first thermal annealing treatment is 430 to 500 ℃, for example, 440 ℃, 450 ℃, 460 ℃, 470 ℃, 480 ℃, or 490 ℃, but is not limited to the above-mentioned values, and other values not shown in the above-mentioned value range are also applicable.
Preferably, the time of the first thermal annealing treatment is 1 to 3 hours, such as 1.2 hours, 1.5 hours, 1.8 hours, 2 hours, 2.2 hours, 2.5 hours or 2.8 hours, but is not limited to the recited values, and other values not recited in the range of the values are also applicable.
As a preferable technical scheme of the invention, the rough milling treatment is rough milling of two surfaces of the anti-sticking plate.
Preferably, the rough milling process has a bite of 0.1mm or less, such as 0.01mm, 0.02mm, 0.03mm, 0.04mm, 0.05mm, 0.06mm, 0.07mm, 0.08mm, or 0.09mm, but not limited to the recited values, and other values not recited in the numerical range are equally applicable.
Preferably, the rough milling process has a feed rate of 2250-2750 mm/min, such as 2300mm/min, 2350mm/min, 2400mm/min, 2450mm/min, 2500mm/min, 2550mm/min, 2600mm/min, 2650mm/min, or 2700mm/min, but is not limited to the values listed, and other values not listed in this range are equally applicable.
As a preferable aspect of the present invention, the rough milling process is performed by a first milling cutter.
Preferably, the first milling cutter has a cutting edge diameter of 9 to 12mm, such as 9.5mm, 10mm, 10.5mm, 11mm or 11.5mm, but not limited to the values listed, and other values not listed within this range of values are equally applicable.
Preferably, the first milling cutter has a spindle rotation speed of 1800-2500 rpm, such as 1900rpm, 2000rpm, 2100rpm, 2200rpm, 2300rpm or 2400rpm, but not limited to the recited values, and other values not recited in the range of values are also applicable.
In a preferred embodiment of the present invention, the temperature of the second thermal annealing treatment is 350 to 420 ℃, for example, 360 ℃, 370 ℃, 380 ℃, 390 ℃, 400 ℃ or 410 ℃, but is not limited to the above-mentioned values, and other values not shown in the above-mentioned value range are also applicable.
Preferably, the time of the second thermal annealing treatment is 0.5 to 1.5 hours, such as 0.6 hour, 0.7 hour, 0.8 hour, 0.9 hour, 1.0 hour, 1.1 hour, 1.2 hour, 1.3 hour or 1.4 hour, etc., but is not limited to the enumerated values, and other values not enumerated in the numerical range are also applicable.
In the present invention, after the first thermal annealing treatment and the second thermal annealing treatment, the titanium deposition preventive plate blank is cooled and then processed in the next step, and the cooling method is preferably air cooling.
As a preferred technical solution of the present invention, the finish milling method includes:
performing first finish machining on the first surface and the second surface of the initial titanium anti-sticking plate and the side wall surface of the initial contact hole by using a first milling cutter; performing second finish machining on the side wall of the initial groove through a second milling cutter; and performing third finish machining on the bottom of the initial groove by using a third milling cutter.
As a preferred technical solution of the present invention, the process parameters of the first finishing include: the rotating speed of a main shaft of the first milling cutter is 2500-3500 rpm, the feeding amount of the first finish machining is 450-550 mm/min, and the tool feeding amount is 0.045-0.055 mm.
The spindle speed of the first milling cutter may be 2600rpm, 2700rpm, 2800rpm, 2900rpm, 3000rpm, 3100rpm, 3200rpm, 3300rpm, 3400rpm, etc., the feed amount of the first finishing cutter may be 460mm/min, 470mm/min, 480mm/min, 490mm/min, 500mm/min, 510mm/min, 520mm/min, 530mm/min, 540mm/min, etc., the cutting amount may be 0.046mm, 0.047mm, 0.048mm, 0.049mm, 0.050mm, 0.051mm, 0.052mm, 0.053mm, 0.054mm, etc., but is not limited thereto, and other values not listed in the above numerical ranges may be equally applicable.
As a preferred technical solution of the present invention, the process parameters of the second finishing include: the rotation speed of a main shaft of the second milling cutter is 2500-3500 rpm, the feeding amount of the second finish machining is 500-1500 mm/min, and the cutting feed amount is 0.1-0.2 mm.
The spindle speed of the second milling cutter may be 2600rpm, 2700rpm, 2800rpm, 2900rpm, 3000rpm, 3100rpm, 3200rpm, 3300rpm, 3400rpm, etc., the feed rate of the second finishing cutter may be 600mm/min, 700mm/min, 800mm/min, 900mm/min, 1000mm/min, 1100mm/min, 1200mm/min, 1300mm/min, 1400mm/min, etc., and the cutting rate may be 0.11mm, 0.12mm, 0.13mm, 0.14mm, 0.15mm, 0.16mm, 0.17mm, 0.18mm, 0.19mm, etc., but is not limited to the values listed, and other values not listed in the above ranges of values are also applicable.
Preferably, the process parameters of the third finishing include: the rotating speed of a main shaft of the third milling cutter is 2500-3500 rpm, the feeding amount of the third finish machining is 450-550 mm/min, and the tool feeding amount is 0.045-0.055 mm.
The spindle speed of the third milling cutter may be 2600rpm, 2700rpm, 2800rpm, 2900rpm, 3000rpm, 3100rpm, 3200rpm, 3300rpm, 3400rpm, etc., the feed amount of the third finishing cutter may be 460mm/min, 470mm/min, 480mm/min, 490mm/min, 500mm/min, 510mm/min, 520mm/min, 530mm/min, 540mm/min, etc., and the cutting amount may be 0.046mm, 0.047mm, 0.048mm, 0.049mm, 0.050mm, 0.051mm, 0.052mm, 0.053mm, 0.054mm, etc., but is not limited thereto, and other values not listed in the above numerical ranges may be equally applicable.
As a preferred embodiment of the present invention, the method for improving the deformation of the titanium sheathing comprises:
sequentially carrying out first thermal annealing treatment on the anti-sticking plate blank, wherein the temperature of the first thermal annealing treatment is 430-500 ℃, and the time is 1-3 h;
carrying out rough milling treatment on two surfaces of the anti-sticking plate blank by using a first milling cutter, wherein the tool consumption of the rough milling treatment is less than or equal to 0.1mm, the feed rate is 2250-2750 mm/min, the blade diameter of the first milling cutter is 9-12 mm, and the rotating speed of a main shaft is 1800-2500 rpm;
performing second thermal annealing treatment, wherein the temperature of the second thermal annealing treatment is 350-420 ℃, and the time is 0.5-1.5 h;
performing first finish machining on the first surface and the second surface of the initial titanium anti-sticking plate and the side wall surface of the initial contact hole by using a first milling cutter; performing second finish machining on the side wall of the initial groove through a second milling cutter; performing third finish machining on the bottom of the initial groove through a third milling cutter;
the technological parameters of the first finishing comprise: the rotation speed of a main shaft of the first milling cutter is 2500-3500 rpm, the feeding amount of the first finish machining is 450-550 mm/min, the cutting amount is 0.045-0.055 mm, and the blade diameter of the first milling cutter is 9-12 mm;
the technological parameters of the second finishing comprise: the rotation speed of a main shaft of the second milling cutter is 2500-3500 rpm, the feeding amount of the second finish machining is 500-1500 mm/min, the cutting depth is 0.1-0.2 mm, the blade diameter of the second milling cutter is 5.4-6.6 mm, and the radius of an R angle is 0.45-0.55 mm;
the technological parameters of the third finishing comprise: the rotation speed of a main shaft of the third milling cutter is 2500-3500 rpm, the feeding amount of the third finish machining is 450-550 mm/min, the tool cutting amount is 0.045-0.055 mm, the blade diameter of the third milling cutter is 2.7-3.3 mm, and the radius of an R angle is 0.45-0.55 mm.
Compared with the prior art, the invention has at least the following beneficial effects:
the invention provides a method for improving the deformation of a titanium attachment plate, which can reduce the deformation problem of the titanium attachment plate in the processing process and improve the flatness of the titanium attachment plate, wherein the flatness can be improved from more than or equal to 0.5mm to less than or equal to 0.2 mm.
Detailed Description
For the purpose of facilitating an understanding of the present invention, the present invention will now be described by way of examples. It should be understood by those skilled in the art that the examples are only for the understanding of the present invention and should not be construed as the specific limitations of the present invention.
Example 1
The embodiment provides a method for improving the deformation of a titanium attachment prevention plate, which comprises the following steps:
sequentially carrying out first thermal annealing treatment on the anti-sticking plate blank, wherein the temperature of the first thermal annealing treatment is 430 ℃, and the time is 3 h;
roughly milling the two surfaces of the anti-sticking plate blank by using a first milling cutter, wherein the cutting depth of the rough milling treatment is 0.02mm, the feed rate is 2250mm/min, the blade diameter of the first milling cutter is 9mm, and the rotating speed of a main shaft is 1800 rpm;
carrying out second thermal annealing treatment, wherein the temperature of the second thermal annealing treatment is 350 ℃, and the time is 1.5 h;
performing first finish machining on the first surface and the second surface of the initial titanium anti-sticking plate and the side wall surface of the initial contact hole by using a first milling cutter; performing second finish machining on the side wall of the initial groove through a second milling cutter; performing third finish machining on the bottom of the initial groove through a third milling cutter;
the technological parameters of the first finishing comprise: the rotation speed of a main shaft of the first milling cutter is 2500rpm, the feeding amount of the first finish machining is 450mm/min, the cutting amount is 0.045mm, and the blade diameter of the first milling cutter is 9 mm;
the technological parameters of the second finishing comprise: the rotation speed of a main shaft of the second milling cutter is 2500rpm, the feeding amount of the second finish machining is 500mm/min, the cutting depth is 0.1mm, the blade diameter of the second milling cutter is 5.4mm, and the radius of an R angle is 0.45 mm;
the technological parameters of the third finishing comprise: the rotating speed of a main shaft of the third milling cutter is 2500rpm, the feeding amount of the third finish machining is 450mm/min, the cutting amount is 0.045mm, the blade diameter of the third milling cutter is 2.7mm, and the radius of an R angle is 0.45 mm.
Example 2
The embodiment provides a method for improving the deformation of a titanium attachment prevention plate, which comprises the following steps:
sequentially carrying out first thermal annealing treatment on the anti-sticking plate blank, wherein the temperature of the first thermal annealing treatment is 500 ℃ and the time is 1 h;
roughly milling two surfaces of the anti-sticking plate blank by using a first milling cutter, wherein the cutting depth of the rough milling treatment is 0.1mm, the feed rate is 2750mm/min, the blade diameter of the first milling cutter is 12mm, and the rotating speed of a main shaft is 2500 rpm;
carrying out second thermal annealing treatment, wherein the temperature of the second thermal annealing treatment is 420 ℃, and the time is 0.5 h;
performing first finish machining on the first surface and the second surface of the initial titanium anti-sticking plate and the side wall surface of the initial contact hole by using a first milling cutter; performing second finish machining on the side wall of the initial groove through a second milling cutter; performing third finish machining on the bottom of the initial groove through a third milling cutter;
the technological parameters of the first finishing comprise: the rotation speed of a main shaft of the first milling cutter is 3500rpm, the feed amount of the first fine machining is 550mm/min, the cutting depth is 0.055mm, and the blade diameter of the first milling cutter is 12 mm;
the technological parameters of the second finishing comprise: the rotation speed of a main shaft of the second milling cutter is 3500rpm, the feeding amount of the second finish machining is 1500mm/min, the cutting depth is 0.2mm, the blade diameter of the second milling cutter is 6.6mm, and the radius of an R angle is 0.55 mm;
the technological parameters of the third finishing comprise: the rotation speed of a main shaft of the third milling cutter is 3500rpm, the feed amount of the third fine machining is 550mm/min, the cutting depth is 0.055mm, the blade diameter of the third milling cutter is 3.3mm, and the radius of the R angle is 0.55 mm.
Example 3
The embodiment provides a method for improving the deformation of a titanium attachment prevention plate, which comprises the following steps:
sequentially carrying out first thermal annealing treatment on the anti-sticking plate blank, wherein the temperature of the first thermal annealing treatment is 460 ℃, and the time is 2.5 h;
roughly milling two surfaces of the anti-sticking plate blank by using a first milling cutter, wherein the cutting depth of the rough milling treatment is 0.02mm, the feed rate is 2450mm/min, the blade diameter of the first milling cutter is 10mm, and the rotating speed of a main shaft is 2000 rpm;
carrying out second thermal annealing treatment, wherein the temperature of the second thermal annealing treatment is 360 ℃ and the time is 1.2 h;
performing first finish machining on the first surface and the second surface of the initial titanium anti-sticking plate and the side wall surface of the initial contact hole by using a first milling cutter; performing second finish machining on the side wall of the initial groove through a second milling cutter; performing third finish machining on the bottom of the initial groove through a third milling cutter;
the technological parameters of the first finishing comprise: the rotating speed of a main shaft of the first milling cutter is 2700rpm, the feeding amount of the first finish machining is 460mm/min, the cutting amount is 0.048mm, and the blade diameter of the first milling cutter is 9-12 mm;
the technological parameters of the second finishing comprise: the rotating speed of a main shaft of the second milling cutter is 2700rpm, the feeding amount of the second finish machining is 800mm/min, the cutting depth is 0.12mm, the blade diameter of the second milling cutter is 5.8mm, and the radius of an R angle is 0.48 mm;
the technological parameters of the third finishing comprise: the rotating speed of a main shaft of the third milling cutter is 2500-3500 rpm, the feeding amount of the third finish machining is 480mm/min, the cutting depth is 0.048mm, the blade diameter of the third milling cutter is 2.8mm, and the radius of an R angle is 0.48 mm.
Example 4
The embodiment provides a method for improving the deformation of a titanium attachment prevention plate, which comprises the following steps:
sequentially carrying out first thermal annealing treatment on the plate sticking prevention blanks, wherein the temperature of the first thermal annealing treatment is 480 ℃, and the time is 2.5 hours;
carrying out rough milling treatment on two surfaces of the plate attachment prevention blank by using a first milling cutter, wherein the cutting consumption of the rough milling treatment is 0.08mm, the feed rate is 2700mm/min, the blade diameter of the first milling cutter is 11mm, and the rotating speed of a main shaft is 2300 rpm;
carrying out second thermal annealing treatment, wherein the temperature of the second thermal annealing treatment is 410 ℃, and the time is 0.8 h;
performing first finish machining on the first surface and the second surface of the initial titanium anti-sticking plate and the side wall surface of the initial contact hole by using a first milling cutter; performing second finish machining on the side wall of the initial groove through a second milling cutter; performing third finish machining on the bottom of the initial groove through a third milling cutter;
the technological parameters of the first finishing comprise: the rotating speed of a main shaft of the first milling cutter is 3200 revolutions per minute, the feeding amount of the first finish machining is 480mm/min, the tool cutting amount is 0.052mm, and the blade diameter of the first milling cutter is 9-12 mm;
the technological parameters of the second finishing comprise: the rotating speed of a main shaft of the second milling cutter is 3200 revolutions per minute, the feeding amount of the second finish machining is 1200mm/min, the cutting depth is 0.18mm, the blade diameter of the second milling cutter is 6.3mm, and the radius of the R angle is 0.53 mm;
the technological parameters of the third finishing comprise: the rotating speed of a main shaft of the third milling cutter is 2500-3500 rpm, the feeding amount of the third finish machining is 520mm/min, the cutting depth is 0.52mm, the edge diameter of the third milling cutter is 3.2mm, and the radius of an R angle is 0.52 mm.
Example 5
The embodiment provides a method for improving the deformation of a titanium attachment prevention plate, which comprises the following steps:
sequentially carrying out first thermal annealing treatment on the anti-sticking plate blank, wherein the temperature of the first thermal annealing treatment is 450 ℃ and the time is 2 h;
roughly milling the two surfaces of the anti-sticking plate blank by using a first milling cutter, wherein the cutting depth of the rough milling treatment is 0.06mm, the feed rate is 2500mm/min, the blade diameter of the first milling cutter is 10.5mm, and the rotating speed of a main shaft is 2200 rpm;
carrying out second thermal annealing treatment, wherein the temperature of the second thermal annealing treatment is 400 ℃, and the time is 1 h;
performing first finish machining on the first surface and the second surface of the initial titanium anti-sticking plate and the side wall surface of the initial contact hole by using a first milling cutter; performing second finish machining on the side wall of the initial groove through a second milling cutter; performing third finish machining on the bottom of the initial groove through a third milling cutter;
the technological parameters of the first finishing comprise: the rotating speed of a main shaft of the first milling cutter is 3000rpm, the feeding amount of the first finish machining is 500mm/min, the cutting depth is 0.050mm, and the blade diameter of the first milling cutter is 10.5 mm;
the technological parameters of the second finishing comprise: the rotating speed of a main shaft of the second milling cutter is 3000rpm, the feeding amount of the second finish machining is 1000mm/min, the cutting depth is 0.15mm, the blade diameter of the second milling cutter is 6.0mm, and the radius of an R angle is 0.50 mm;
the technological parameters of the third finishing comprise: the rotation speed of a main shaft of the third milling cutter is 2500-3500 rpm, the feeding amount of the third finish machining is 500mm/min, the cutting depth is 0.050mm, the edge diameter of the third milling cutter is 3.0mm, and the radius of the R angle is 0.50 mm.
Comparative example 1
This comparative example was the same as example 5 except that the first thermal annealing treatment was not performed.
Comparative example 2
This comparative example was the same as example 5 except that the second thermal annealing treatment was not performed.
Comparative example 3
This comparative example was the same as example 5 except that the first thermal annealing treatment and the second thermal annealing treatment were not performed.
The titanium armor provided in examples 1-5 and comparative examples 1-3 were tested for flatness using the method of GB/T11337-2004, and the results are shown in Table 1.
TABLE 1
Flatness/mm
Example 1 0.18
Example 2 0.11
Example 3 0.15
Example 4 0.16
Example 5 0.15
Comparative example 1 0.31
Example 2 0.33
Example 3 0.58
The applicant states that the present invention is illustrated by the above examples to show the detailed process equipment and process flow of the present invention, but the present invention is not limited to the above detailed process equipment and process flow, i.e. it does not mean that the present invention must rely on the above detailed process equipment and process flow to be implemented. It should be understood by those skilled in the art that any modification of the present invention, equivalent substitutions of the raw materials of the product of the present invention, addition of auxiliary components, selection of specific modes, etc., are within the scope and disclosure of the present invention.

Claims (10)

1. A method of improving the deformation of a titanium armor, said method comprising:
and sequentially carrying out first thermal annealing treatment, rough milling treatment, second thermal annealing treatment, finish milling treatment and polishing treatment on the anti-sticking plate blank.
2. The method according to claim 1, wherein the temperature of the first thermal annealing treatment is 430-500 ℃;
preferably, the time of the first thermal annealing treatment is 1-3 h.
3. The method according to claim 1 or 2, wherein the rough milling treatment is rough milling of both surfaces of the shielding plate;
preferably, the cutting depth of the rough milling treatment is less than or equal to 0.1 mm;
preferably, the feeding amount of the rough milling treatment is 2250-2750 mm/min.
4. A method according to any one of claims 1-3, characterized in that the rough milling treatment is performed by means of a first milling cutter;
preferably, the diameter of the first milling cutter is 9-12 mm;
preferably, the rotation speed of the main shaft of the first milling cutter is 1800-2500 rpm.
5. The method according to any one of claims 1 to 4, wherein the temperature of the second thermal annealing treatment is 350 to 420 ℃;
preferably, the time of the second thermal annealing treatment is 0.5-1.5 h.
6. The method according to any one of claims 1 to 5, wherein the method of finish milling comprises:
performing first finish machining on the first surface and the second surface of the initial titanium anti-sticking plate and the side wall surface of the initial contact hole by using a first milling cutter; performing second finish machining on the side wall of the initial groove through a second milling cutter; and performing third finish machining on the bottom of the initial groove by using a third milling cutter.
7. The method according to claim 6, characterized in that the process parameters of the first finishing comprise: the rotating speed of a main shaft of the first milling cutter is 2500-3500 rpm, the feeding amount of the first finish machining is 450-550 mm/min, and the cutting feed amount is 0.045-0.055 mm.
8. The method according to claim 6, characterized in that the process parameters of the second finishing comprise: the rotation speed of a main shaft of the second milling cutter is 2500-3500 rpm, the feeding amount of the second finish machining is 500-1500 mm/min, and the cutting feed amount is 0.1-0.2 mm;
preferably, the process parameters of the third finishing include: the rotating speed of a main shaft of the third milling cutter is 2500-3500 rpm, the feeding amount of the third finish machining is 450-550 mm/min, and the cutting feed amount is 0.045-0.055 mm.
9. The method according to claim 6, wherein the first milling cutter has a blade diameter of 9 to 12 mm;
preferably, the diameter of the edge of the second milling cutter is 5.4-6.6 mm, and the radius of the R angle is 0.45-0.55 mm.
Preferably, the diameter of the edge of the third milling cutter is 2.7-3.3 mm, and the radius of the R angle is 0.45-0.55 mm.
10. The method according to any one of claims 1-9, characterized in that the method comprises:
sequentially carrying out first thermal annealing treatment on the anti-sticking plate blank, wherein the temperature of the first thermal annealing treatment is 430-500 ℃, and the time is 1-3 h;
carrying out rough milling treatment on two surfaces of the anti-sticking plate blank by using a first milling cutter, wherein the tool consumption of the rough milling treatment is less than or equal to 0.1mm, the feed rate is 2250-2750 mm/min, the blade diameter of the first milling cutter is 9-12 mm, and the rotating speed of a main shaft is 1800-2500 rpm;
performing second thermal annealing treatment, wherein the temperature of the second thermal annealing treatment is 350-420 ℃, and the time is 0.5-1.5 h;
performing first finish machining on the first surface and the second surface of the initial titanium anti-sticking plate and the side wall surface of the initial contact hole by using a first milling cutter; performing second finish machining on the side wall of the initial groove through a second milling cutter; performing third finish machining on the bottom of the initial groove through a third milling cutter;
the technological parameters of the first finishing comprise: the rotation speed of a main shaft of the first milling cutter is 2500-3500 rpm, the feeding amount of the first finish machining is 450-550 mm/min, the cutting amount is 0.045-0.055 mm, and the blade diameter of the first milling cutter is 9-12 mm;
the technological parameters of the second finishing comprise: the rotation speed of a main shaft of the second milling cutter is 2500-3500 rpm, the feeding amount of the second finish machining is 500-1500 mm/min, the cutting depth is 0.1-0.2 mm, the blade diameter of the second milling cutter is 5.4-6.6 mm, and the radius of an R angle is 0.45-0.55 mm;
the technological parameters of the third finishing comprise: the rotation speed of a main shaft of the third milling cutter is 2500-3500 rpm, the feeding amount of the third finish machining is 450-550 mm/min, the tool cutting amount is 0.045-0.055 mm, the blade diameter of the third milling cutter is 2.7-3.3 mm, and the radius of an R angle is 0.45-0.55 mm.
CN202110721873.1A 2021-06-28 2021-06-28 Method for improving deformation of titanium attachment plate Pending CN113352060A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110721873.1A CN113352060A (en) 2021-06-28 2021-06-28 Method for improving deformation of titanium attachment plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110721873.1A CN113352060A (en) 2021-06-28 2021-06-28 Method for improving deformation of titanium attachment plate

Publications (1)

Publication Number Publication Date
CN113352060A true CN113352060A (en) 2021-09-07

Family

ID=77536818

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110721873.1A Pending CN113352060A (en) 2021-06-28 2021-06-28 Method for improving deformation of titanium attachment plate

Country Status (1)

Country Link
CN (1) CN113352060A (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004002953A (en) * 2002-04-10 2004-01-08 Nippon Steel Corp TITANIUM PLATE FOR DRUM FOR MANUFACTURING ELECTROLYTIC Cu FOIL, AND MANUFACTURING METHOD THEREFOR
CN102069359A (en) * 2011-01-04 2011-05-25 宁波江丰电子材料有限公司 Method for processing defensive move plate structure
CN102107347A (en) * 2010-12-30 2011-06-29 宁波江丰电子材料有限公司 Method for processing anti-sticking board
CN102335754A (en) * 2011-10-13 2012-02-01 中国船舶重工集团公司第七二五研究所 High-precision machining deformation control method for titanium alloy spherical shell
CN107662008A (en) * 2016-07-27 2018-02-06 宁波江丰电子材料股份有限公司 The processing method that titanium prevents plate
CN109079431A (en) * 2018-07-25 2018-12-25 滁州市经纬装备科技有限公司 A kind of vertical gusset processing method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004002953A (en) * 2002-04-10 2004-01-08 Nippon Steel Corp TITANIUM PLATE FOR DRUM FOR MANUFACTURING ELECTROLYTIC Cu FOIL, AND MANUFACTURING METHOD THEREFOR
CN102107347A (en) * 2010-12-30 2011-06-29 宁波江丰电子材料有限公司 Method for processing anti-sticking board
CN102069359A (en) * 2011-01-04 2011-05-25 宁波江丰电子材料有限公司 Method for processing defensive move plate structure
CN102335754A (en) * 2011-10-13 2012-02-01 中国船舶重工集团公司第七二五研究所 High-precision machining deformation control method for titanium alloy spherical shell
CN107662008A (en) * 2016-07-27 2018-02-06 宁波江丰电子材料股份有限公司 The processing method that titanium prevents plate
CN109079431A (en) * 2018-07-25 2018-12-25 滁州市经纬装备科技有限公司 A kind of vertical gusset processing method

Similar Documents

Publication Publication Date Title
EP2123791B1 (en) Deep-pot-shaped copper sputtering target
US8936706B2 (en) Sputtering target with low generation of particles
US7909949B2 (en) Sputtering target with few surface defects, and surface processing method thereof
US9328411B2 (en) Ytterbium sputtering target and method of producing said target
US9034154B2 (en) Sputtering target and process for producing same
CN112404461A (en) Turning method of titanium target assembly
EP2612952B1 (en) Indium target and method for producing same
EP2772564A1 (en) Indium sputtering target, and method for producing same
CN105734508A (en) Oxide target material and preparation method thereof
CN111299669B (en) Processing technology of target material
CN111889769A (en) Machining method for improving flatness of target
CN113352060A (en) Method for improving deformation of titanium attachment plate
CN111889768A (en) Processing method for reducing surface roughness of target
CN102069359B (en) Method for processing defensive move plate structure
JP4761605B2 (en) Sputtering target
CN113547390B (en) Tungsten target assembly and surface processing method thereof
CN105755435A (en) A sputtering surface machining method for a titanium target material
CN115156565A (en) Method for turning chip breaking of titanium target
CN112935839B (en) Processing method of G5 integrated aluminum target
DE112019007736T5 (en) Coated cutting tool for machining titanium alloys and super alloys and manufacturing method therefor
CN106544632A (en) A kind of tungsten niobium alloy target processing method
US7776166B2 (en) Texture and grain size controlled hollow cathode magnetron targets and method of manufacture
CN111455328A (en) SIP (Session initiation protocol) series target material capable of avoiding stripping of reverse sputtering layer and application thereof
CN109676800B (en) Processing method of high-hardness and high-brittleness ceramic rotary target material
CN117182470A (en) Machining method of titanium target

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination