CN113341179A - Device and method for preparing scanning tunnel microscope needle tip based on liquid film electrochemical corrosion - Google Patents
Device and method for preparing scanning tunnel microscope needle tip based on liquid film electrochemical corrosion Download PDFInfo
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- CN113341179A CN113341179A CN202110682845.3A CN202110682845A CN113341179A CN 113341179 A CN113341179 A CN 113341179A CN 202110682845 A CN202110682845 A CN 202110682845A CN 113341179 A CN113341179 A CN 113341179A
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- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
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Abstract
The invention relates to a device and a method for preparing a scanning tunnel microscope needle tip based on liquid film electrochemical corrosion, wherein the device comprises a metal wire to be etched, a direct-current power supply, an anode and a cathode, wherein a needle support a is fixed on the lower end surface of the anode; a platinum ring is fixed at one end of the cathode, extends out of the cathode for a certain distance and is positioned under the needle support a, the platinum ring is used for bearing a liquid film formed by etching liquid, and a magnet needle support seat is arranged under the platinum ring; the device also comprises a needle support b, one end of the metal wire to be etched is fixed on the needle support a, the other end of the metal wire to be etched passes through a platinum ring and is fixed on the needle support b, and the needle support b is suspended right above the magnet needle support.
Description
Technical Field
The invention belongs to the technical field of scanning tunneling microscopes, and particularly relates to an electrochemical etching device and method capable of simultaneously obtaining an upper needle point and a lower needle point of a liquid film.
Background
The scanning tunnel microscope enables researchers to see images of surface atomic levels, and is an important research means of surface science. The internal complex circuits, vibration isolation, piezoelectric scanners and the like have already mature and commercialized schemes and are responsible for manufacturing companies; the needle point preparation and processing device is not provided with mature commercial equipment, and the needle point is an important component of scanning imaging, and the quality of the needle point is closely related to the imaging quality and is a part needing important consideration of researchers.
The center idea of the needle tip preparation is to obtain a needle tip with an extremely fine tip, the preparation method of the tungsten needle tip mainly comprises electrochemical corrosion, a tungsten filament is put into a sodium hydroxide solution with a certain concentration or a liquid film (Z.Q.Yu, et al.ultramicroscopy, 108, 873(2008)), and the tungsten filament is used as an anode until the tungsten filament is corroded and broken; the needle tip prepared in this way is often not sharp enough, researchers need to pull the needle tip before the needle tip is etched and close the current at the moment of the needle tip etching in order to improve the sharp degree of the tip, so that the operation not only makes the device complicated, but also operators often cannot find the accurate time for pulling the needle tip, and the tip with repeated consistency is difficult to obtain. Moreover, the needle tip at the lower end of the liquid surface is difficult to use and is often discarded.
Disclosure of Invention
The invention aims to solve the technical problem of overcoming the defects of the existing technology for preparing the needle point of the scanning tunnel microscope by electrochemical corrosion and provides a preparation device which is simple and effective, has good repeatability and can utilize the lower half part of the needle point.
In order to solve the technical problems, the invention adopts the technical scheme that:
on one hand, the invention provides a scanning tunnel microscope needle tip device prepared based on liquid film electrochemical corrosion, which comprises a metal wire to be etched, a direct-current power supply, an anode connected with the positive pole of the direct-current power supply and a cathode connected with the negative pole of the direct-current power supply, wherein a needle support a is fixed on the lower end surface of the anode; a platinum ring is fixed at one end of the cathode, extends out of the cathode for a certain distance and is positioned under the needle support a, the platinum ring is used for bearing a liquid film formed by etching liquid, and a magnet needle support seat is arranged under the platinum ring; the device also comprises a needle support b, wherein one end of the metal wire to be etched is fixed on the needle support a, the other end of the metal wire to be etched penetrates through the platinum ring and is fixed on the needle support b, and the needle support b is suspended right above the magnet needle support.
Based on the above scheme, preferably, the anode is a magnetic-type anode; the cathode is a flat plate type cathode; the anode and the cathode are fixed through an iron support; a strip-shaped stainless steel piece is transversely detachably mounted on a vertical rod of the iron support, and the magnetic-type anode is adsorbed on the lower end face of one end of the stainless steel piece; and a three-dimensional mobile platform is installed on a base of the iron support, and the flat plate type cathode is detachably installed on the upper end face of the three-dimensional mobile platform.
Based on above-mentioned scheme, preferably, the magnetism of magnet needle holder is less than magnetism and inhales formula anode, and the distance of magnet needle holder and needle support b is confirmed according to magnetism size.
Based on the scheme, preferably, the plane of the platinum ring is parallel to the flat-plate cathode, so that the liquid film is ensured to be parallel to the flat-plate cathode.
Based on the scheme, preferably, the fixed ends of the strip-shaped stainless steel piece and the iron support are insulated by using an insulating adhesive tape and are fixed on the iron support by using a cross clamp.
Based on the above scheme, preferably, the magnetic-type anode is made of a conductive wire soldered to a pancake magnet.
Based on the scheme, the cross section of the strip-shaped stainless steel piece is preferably semicircular and is formed by cutting a stainless steel column through a lathe.
Based on the scheme, the device preferably further comprises a camera, wherein the camera is connected with a computer and is used for observing the tungsten wire corrosion condition in real time and carrying out initial shape identification on the finished needle point product.
In another aspect, the present invention provides a method of using the above apparatus, the method comprising the steps of:
(1) polishing and brightening the metal wire to be etched, and then putting the metal wire into absolute ethyl alcohol for ultrasonic treatment; putting the needle holder a and the needle holder b into absolute ethyl alcohol for ultrasonic treatment;
(2) after ultrasonic treatment, fixing a needle holder a on the lower end face of an anode, fixing one end of a metal wire to be etched on the needle holder a, and vertically penetrating the center of a platinum ring at the other end of the metal wire to be etched to be fixed on a needle holder b;
(3) the anode lead is connected with the positive pole of the direct current power supply, and the cathode lead is connected with the negative pole of the direct current power supply;
(4) dropwise adding an etching solution on the platinum ring to form a liquid film;
(5) starting a direct current power supply, starting corrosion, observing the corrosion process by using a camera, correspondingly adjusting until the corrosion process is broken, and immediately closing the power supply;
(6) after the etching is finished, cleaning the needle points on the needle support a and the needle support b to obtain an upper needle point and a lower needle point of a liquid film.
The invention has the advantages that:
(1) the invention provides a device and a method capable of simultaneously obtaining an upper needle point and a lower needle point for the first time, wherein a magnetic suction type anode and a magnetic bracket are respectively positioned above and below a platinum ring for bearing a liquid film and are respectively used for bearing a needle holder a and a needle holder b, so that the upper needle point and the lower needle point of the liquid film can be simultaneously obtained;
(2) according to the invention, the magnetic force of the magnetic bracket and the gravity of the needle support b are utilized for the first time to simultaneously pull the tungsten filament, when the tungsten filament is corroded to be thin and cannot bear downward resultant force, the tungsten filament is pulled to be elongated until being broken, the tungsten filament at the lower end is quickly separated from a loop after being broken, and the corrosion is immediately stopped, so that the needle point borne by the needle support b is completely ensured not to be excessively corroded, meanwhile, due to the dual actions of the gravity and the magnetic force, a sharper tip can be pulled out before the tungsten filament is broken, and the needle point at the lower end is sharper than the needle point at the upper end;
(3) the gravity and the magnetic force of the needle support b are almost the same in different batches of experiments, so that the consistent repeatability is ensured;
(4) the power supply is immediately turned off after the tungsten filament is broken, the pulling time does not need to be controlled intentionally, the power supply turning off time is easier to control, the operation steps are simplified, and the operation difficulty is reduced; the power off time is easier to control, and the excessive corrosion degree of the needle point on the needle support a is reduced to the maximum extent;
(5) the device has real-time observation equipment, and can check the corrosion degree of the tungsten filament at any time.
Drawings
FIG. 1 is a schematic view of an apparatus of the present invention;
FIG. 2 is a scanning electron micrograph of a needle point above and below a liquid surface etched by an embodiment of the present invention, wherein a is the needle point below the liquid surface; b, needle points on the liquid surface;
FIG. 3 is a scanning electron microscope photomicrograph showing a magnified view of the tips of the upper and lower liquid-level tips etched according to the embodiment of the present invention, wherein a is the tip of the lower liquid-level tip; b. a sharp tip above the liquid level;
FIG. 4 is an atomic resolution image (5 nm) of a MnO (100)/Pt (111) sample scanned after annealing of a corroded needle tip according to the present invention;
in the figure, 1: a cross clamp; 2: specially manufacturing a semicircular stainless steel column; 3: a platinum ring; 4: a camera; 5: an iron stand base; 6: a magnet needle holder; 7: a needle holder b; 8: a needle holder a; 9: a precision three-dimensional mobile station; 10: a flat cathode welded with a platinum ring (diameter 4 mm); 11: magnetic attraction type anode.
Detailed Description
The following further description is provided in terms of specific embodiments in conjunction with the accompanying drawings so that the advantages and features of the present invention will be more readily understood by those skilled in the art.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
Example 1
A device for preparing a scanning tunnel microscope needle tip based on liquid film electrochemical corrosion specifically comprises:
the device comprises an iron support, a cross clamp 1, a precise three-dimensional mobile platform 9, a platinum ring 3, a flat plate with holes (a flat plate type cathode 10), a special semicircular stainless steel column 2, a magnetic type anode 11, a needle holder a8, a needle holder b 7, a magnet needle holder 6, a plurality of wires, a direct current power supply, a camera 4 and related connecting wires.
A platinum wire with the diameter of 0.5mm is bent into a platinum ring with the diameter of 4mm to bear a liquid film, the thickness of the liquid film is adjustable, the maximum thickness can reach 4mm of a liquid bead shape, and the minimum thickness is about 0.01 mm;
the flat-plate cathode 10 can more conveniently and effectively maintain the platinum ring 3 parallel to the table top, namely the liquid film is parallel to the table top; the magnetic type anode 11 has no physical damage to the needle holder, and the position can be adjusted according to the experimental requirement;
the lower part is provided with a magnet needle holder 6, the magnetism of the magnet needle holder is smaller than that of a magnetic type anode 11, a needle holder a8 is adsorbed on the anode for power supply, one end of a tungsten filament is fixed on the needle holder a8, the other end of the tungsten filament penetrates through a platinum ring 3 and is fixed on a needle holder b 7, and the needle holder b 7 is suspended above the magnet needle holder 6; after corrosion occurs, the needle holder b 7 is attracted by resultant force formed by gravity and magnetic force of the magnet needle holder seat, when the tungsten filament is corroded to be thin and cannot bear downward resultant force, the tungsten filament is stretched until the tungsten filament is broken, and a power supply is immediately turned off after the tungsten filament is broken, so that the lifting before the tungsten filament is etched and broken by the traditional method is replaced, the lifting time does not need to be deliberately sought, the force applied to two ends of the tungsten filament at each time can be ensured to be consistent, the repeatability is ensured, the sharp degree of the tip is ensured, and the time for cutting off the power supply is easy to grasp; wherein the magnet on the magnet needle bracket 6 is detachable, is convenient to adjust, satisfies the unanimity of experimental condition of every turn, can guarantee repeatability.
Specifically, the precise three-dimensional mobile station 9 is fixed on the iron stand base 5 by 4M 2 screws, the three-dimensional adjustable ranges are respectively 1cm, and the precision is 0.03 mm; the upper surface of the mobile station 9 adopts 2M 2 screws to fix the flat cathode 10, the range of the tail end of the platinum ring 3 extending out of the flat is about 7mm, and the plane of the platinum ring 3 is strictly parallel to the flat; a magnet needle bracket 6 is arranged under the platinum ring 3, and the magnetism of the magnet needle bracket is smaller than that of the magnetic attraction type anode 11; a specially-made semicircular stainless steel column 2 fixed by a cross clamp 1 is arranged above the platinum ring 3, and the fixed end is insulated by an insulating tape; the diameter of the semicircular stainless steel column 2 is 8mm, one end of the semicircular stainless steel column is cut into a semicircle, and a plane with a wide diameter is exposed; the magnetic-type anode 11 is adsorbed on a plane with the width of 0.8mm of the specially-made semicircular stainless steel column 2 and is positioned right above the platinum ring 3; when in use, the needle holder a8 is attracted on the magnetic attraction type anode 11, one end of a tungsten wire is fixed at the tail end of the tungsten wire, and the other end of the tungsten wire after penetrating through the platinum ring 3 is fixed at the tail end of the needle holder b 7, so that the needle holder b 7 is suspended above the magnet needle holder seat 6; dripping sodium hydroxide solution with certain concentration on the platinum ring 3, and adjusting the thickness of the liquid film by utilizing the water absorption characteristic of filter paper, wherein the corrosion voltage is 1-12V; at the end of corrosion, the needle holder b 7 is subjected to the resultant force of the magnetic force of the magnet needle holder and the gravity, and has a downward pulling trend, when the tungsten filament is too thin to bear the resultant force, the tungsten filament is stretched and broken, the needle holder b 7 is separated from a loop at the moment of disconnection, and is adsorbed by the magnet needle holder 6, so that the needle tip on the needle holder a8 or the needle tip on the needle holder b 7 can be effectively utilized; the camera with the magnification of 500 is connected with a computer, so that the corrosion condition of the tungsten filament can be observed in real time, and the initial appearance identification of the needle point is carried out.
The platinum ring 3 is a platinum wire with the diameter of 0.5mm, is bent into a zigzag shape and is welded on the flat plate type cathode 10, the tail end of the platinum ring is bent into a ring with the diameter of about 4mm, the tail end of the platinum ring extends out of the range of the flat plate by about 7mm, and the plane where the platinum ring is located is strictly parallel to the flat plate type cathode 10, so that a liquid film is ensured to be parallel to the flat plate type cathode 10, the ring with the diameter of 4mm can realize wide-range adjustment of the thickness of the liquid film, and a liquid bead-shaped liquid film with the thickness of 4mm can be formed at the thickest; the liquid film is used for bearing the liquid film and is used for connecting the negative pole of a power supply, and other tools capable of playing the role can be replaced;
the special semicircular stainless steel column 2 is formed by processing a stainless steel metal column with the diameter of about 8mm, one end of the special semicircular stainless steel column is cut into a semicircle by a lathe, a plane with the width of 8mm is exposed, the other end of the special semicircular stainless steel column is insulated by an insulating adhesive tape, and the special semicircular stainless steel column is fixed on an iron support by a cross clamp 1;
the magnetic attraction type anode 11 is made of a cake-shaped magnet, a lead wire is soldered on the magnetic attraction type anode, the diameter of the magnet is about 8mm, the thickness of the magnet is about 1mm, and the magnetic attraction type anode is adsorbed on the plane of a special stainless steel metal column 2 and is positioned right above a platinum ring 3; the needle holder a8 is mainly fixed and used for connecting the positive pole of a power supply, and other tools capable of playing the role can be replaced;
the needle holder a8 and the needle holder b 7 are used for fixing tungsten wires in the corrosion process, and any other needle holder or tool capable of playing the role can be adopted;
the magnetism of the magnet needle bracket 6 is required to be less than that of the magnetic attraction type anode 11 and is positioned 1cm below the needle bracket b 7; the liquid film lower needle support b 7 is carried to protect the needle point, and the magnet is detachable;
the camera 4 can be connected with a computer, can observe the corrosion degree of the tungsten filament in real time and performs initial shape identification on a corroded needle tip finished product; the function is to observe the corrosion condition of the tungsten wire, and any other tool capable of playing the role can be replaced.
The specific using method and the steps for preparing the scanning tunnel microscope needle tip device based on the liquid film electrochemical corrosion are as follows:
(1) preparing a section of tungsten wire, polishing and brightening the tungsten wire by using carborundum paper, and putting the tungsten wire into absolute ethyl alcohol for ultrasonic treatment for 3 min;
(2) preparing two needle supports a and b, and putting the needle supports a and b into absolute ethyl alcohol for ultrasonic treatment for 3 min;
(3) taking down the flat cathode 10 welded with the platinum wire, fixing one end of the tungsten wire on a needle holder a8, then penetrating the tungsten wire through the platinum ring 3, and fixing the other end of the tungsten wire on a needle holder b 7;
(4) installing a flat plate type cathode 10 on a precise three-dimensional moving platform 9, sucking a needle holder a8 on a magnetic suction type anode 11, placing a magnet needle holder seat 6 under a needle holder b 7, and adjusting the position of a camera 4 until a tungsten filament and a platinum ring 3 can be clearly seen; if the needle holder cannot be adsorbed on the anode magnet or the needle holder is not needed, a proper means can be adopted to enable the tungsten filament to be vertically downward, namely to be vertical to the plane of the platinum ring 3; because the magnetism of the magnet needle holder 6 is required to be smaller than that of the magnetic attraction type anode 11, if the magnet needle holder with proper magnetism is not available, the magnet can be taken down, and the needle holder needs to be very close to the needle holder b 7;
(5) adjusting the precise three-dimensional moving platform 9 to enable the tungsten wire to be positioned at the circle center of the platinum ring 3, and the center of the platinum ring 3 to be positioned at the midpoint of the tungsten wire;
(6) the magnetic type anode 11 is connected with the positive pole of the direct current power supply through a lead, and the flat cathode is connected with the negative pole of the direct current power supply through a lead;
(7) carefully dropping a drop of sodium hydroxide solution with the concentration of 2 mol per liter on the platinum ring 3, and sucking off redundant liquid by using filter paper to form a liquid film with proper thickness, generally about 0.1 mm;
(8) carefully starting a direct-current power supply, adjusting the voltage to about 4V, and controlling the bubble generation rate around the platinum ring by adjusting the voltage so as not to influence the meniscus of the tungsten filament, wherein the higher the voltage is, the higher the bubble generation rate is;
(9) starting corrosion, wherein the middle process can not touch the desktop, observing the corrosion process by using a camera, correspondingly adjusting until the corrosion process is broken, and immediately turning off the power supply;
(10) the liquid film may break in the midway, or the sodium hydroxide solution needs to be added, at this time, the power supply is turned off, and after the thickness and the position of the liquid film are adjusted, the corrosion is continued;
(11) after the etching is finished, the modified needle supports a and b are respectively washed for 3 times by absolute ethyl alcohol and deionized water, and the needle supports a and b are placed under an optical microscope to observe the appearance, the shape of the needle supports is similar to a sharpened pencil, and the tips have no obvious crease, so that the needle supports a and b can be transmitted into the cavity to be subjected to quasi-in-situ annealing and oxide layer removing treatment.
The laboratory is provided with a commercialized variable-temperature scanning tunnel microscope of the company of the European and American departments of Sweden, so that the needle holders a and b in the example are the commercialized variable-temperature scanning tunnel microscope needle holders of the company of the European and American departments of Sweden, which are transformed, and are used for fixing tungsten wires in the corrosion process, and any other needle holder or tool capable of playing the role can be replaced; after the device is built according to the figure 1, the corrosion is finished according to the steps, and the corrosion result is shown in the figures 2 and 3. FIG. 4 is an atomic resolution image (5 nm) of a MnO (100)/Pt (111) sample scanned after annealing of a corroded needle tip according to the present invention; as can be seen from FIG. 4, the needle tip prepared by the invention can realize atomic resolution, and the tip can meet the requirement of atomic resolution.
The equipment and the method for preparing the scanning tunnel microscope needle point based on the liquid film electrochemical corrosion can meet the requirement of repeatedly preparing a sufficient sharp needle point and reduce the operation difficulty; the difficult-to-use subsurface needle tip can be used, and the characterization result (fig. 3) also shows that the subsurface needle tip is more sharp.
The above examples are provided only for the purpose of describing the present invention, and are not intended to limit the scope of the present invention. The scope of the invention is defined by the appended claims. Various equivalent substitutions and modifications can be made without departing from the spirit and principles of the invention, and are intended to be within the scope of the invention.
Claims (9)
1. A device for preparing a scanning tunnel microscope needle tip based on liquid film electrochemical corrosion comprises a metal wire to be etched, a direct-current power supply, an anode connected with the positive pole of the direct-current power supply and a cathode connected with the negative pole of the direct-current power supply, and is characterized in that a needle support a is fixed on the lower end face of the anode; a platinum ring is fixed at one end of the cathode, extends out of the cathode for a certain distance and is positioned under the needle support a, the platinum ring is used for bearing a liquid film formed by etching liquid, and a magnet needle support seat is arranged under the platinum ring;
the device also comprises a needle support b, wherein one end of the metal wire to be etched is fixed on the needle support a, the other end of the metal wire to be etched penetrates through the platinum ring and is fixed on the needle support b, and the needle support b is suspended right above the magnet needle support.
2. The apparatus of claim 1, wherein the anode is a magnetically attractable anode; the cathode is a flat plate type cathode; the anode and the cathode are fixed through an iron support;
a strip-shaped stainless steel piece is transversely detachably mounted on a vertical rod of the iron support, and the magnetic-type anode is adsorbed on the lower end face of one end of the stainless steel piece; and a three-dimensional mobile platform is installed on a base of the iron support, and the flat plate type cathode is detachably installed on the upper end face of the three-dimensional mobile platform.
3. The device of claim 2, wherein the magnetic needle holder has a smaller magnetic property than the magnetic anode, and the distance between the magnetic needle holder and the needle holder b is determined according to the magnetic property.
4. The apparatus of claim 2, wherein: the plane of the platinum ring is parallel to the flat-plate cathode, so that the liquid film is ensured to be parallel to the flat-plate cathode.
5. The apparatus of claim 2, wherein: the fixed ends of the strip-shaped stainless steel piece and the iron support are insulated by insulating tapes and fixed on the iron support by adopting cross clamps.
6. The apparatus of claim 2, wherein: the magnetic attraction type anode is made of a cake-shaped magnet and a lead by tin soldering.
7. The apparatus of claim 1, wherein: the cross section of the strip-shaped stainless steel part is semicircular and is formed by cutting a stainless steel column through a lathe.
8. The liquid membrane electrochemical corrosion device according to claim 1, wherein: the device also comprises a camera which is connected with a computer and used for observing the tungsten wire corrosion condition in real time and carrying out initial shape identification on the finished needle point product.
9. A method of using the device of any of claims 1-8, the method comprising the steps of:
(1) polishing and brightening the metal wire to be etched, and then putting the metal wire into absolute ethyl alcohol for ultrasonic treatment; putting the needle holder a and the needle holder b into absolute ethyl alcohol for ultrasonic treatment;
(2) after ultrasonic treatment, fixing a needle holder a on the lower end face of an anode, fixing one end of a metal wire to be etched on the needle holder a, and vertically penetrating the center of a platinum ring at the other end of the metal wire to be etched to be fixed on a needle holder b;
(3) the anode lead is connected with the positive pole of the direct current power supply, and the cathode lead is connected with the negative pole of the direct current power supply;
(4) dropwise adding an etching solution on the platinum ring to form a liquid film;
(5) starting a direct current power supply, starting corrosion, observing the corrosion process by using a camera, correspondingly adjusting until the corrosion process is broken, and immediately closing the power supply;
(6) after the etching is finished, cleaning the needle points on the needle support a and the needle support b to obtain an upper needle point and a lower needle point of a liquid film.
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| CN108318710A (en) * | 2018-05-04 | 2018-07-24 | 南京工业职业技术学院 | A kind of preparation facilities and preparation method of nanometer pinpoint |
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2021
- 2021-06-18 CN CN202110682845.3A patent/CN113341179B/en active Active
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| US5145564A (en) * | 1990-03-08 | 1992-09-08 | Forschungszentrum Julich Gmbh | Method of and apparatus for producing electrically-conductive probe tips |
| JP2000065712A (en) * | 1998-08-20 | 2000-03-03 | Japan Science & Technology Corp | Method for manufacturing silver probe of scanning tunnel microscope |
| CN1482623A (en) * | 2003-06-10 | 2004-03-17 | 东南大学 | Equipment and method for preparing fibre-optical microprobe by siphon lifting method corrosion |
| CN203025209U (en) * | 2013-01-09 | 2013-06-26 | 贵州大学 | Device for preparing pure-tungsten probe of tunnel scanning microscope |
| CN203479833U (en) * | 2013-09-30 | 2014-03-12 | 贵州大学 | Modification device for pure metal probe of scanning tunnel microscope |
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