CN113340895A - Adjusting method of detection system and detection system - Google Patents
Adjusting method of detection system and detection system Download PDFInfo
- Publication number
- CN113340895A CN113340895A CN202110625926.XA CN202110625926A CN113340895A CN 113340895 A CN113340895 A CN 113340895A CN 202110625926 A CN202110625926 A CN 202110625926A CN 113340895 A CN113340895 A CN 113340895A
- Authority
- CN
- China
- Prior art keywords
- detection
- optical path
- target
- detection device
- incident surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 305
- 238000000034 method Methods 0.000 title claims abstract description 35
- 230000003287 optical effect Effects 0.000 claims abstract description 171
- 239000013307 optical fiber Substances 0.000 claims description 20
- 230000008859 change Effects 0.000 claims description 7
- 238000007689 inspection Methods 0.000 claims description 5
- 239000000523 sample Substances 0.000 description 9
- 230000003750 conditioning effect Effects 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000004075 alteration Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/12—Circuits of general importance; Signal processing
- G01N2201/127—Calibration; base line adjustment; drift compensation
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The application discloses a method for adjusting a detection system. The detection system comprises a plurality of detection devices and a plurality of light ray emergent surfaces, each detection device comprises a light incident surface, the light rays emitted by the plurality of emergent surfaces enter the plurality of light incident surfaces in a one-to-one correspondence manner, and each detection device collects at least part of the light rays entering from the light incident surfaces to form detection information; the adjusting method comprises the following steps: calculating target characteristic values suitable for all the detection devices according to the characteristic values of the detection information acquired by the detection devices; aiming at each detection device, when the acquired detection information meets the target characteristic value, a target optical path between the corresponding emergent surface and the incident surface of the detection device is acquired; and adjusting the relative position between each emergent surface and the corresponding incident surface so that the optical path between the emergent surface and the corresponding incident surface meets the target optical path. The application also discloses a detection system.
Description
Technical Field
The present disclosure relates to the field of industrial detection technologies, and in particular, to an adjusting method of a detection system and a detection system.
Background
In the inspection of some devices, such as panels, multiple inspection devices are often used to visually inspect different locations of the device simultaneously, as the inspected area of the device may be large. However, since there is inevitably a difference in hardware performance between a plurality of detection devices, there is a large difference in characteristic values such as brightness and gray scale of images captured by different detection devices, and the consistency of the characteristic values of the images captured by different detection devices is poor, so that it is inconvenient to uniformly process different images in the following.
Disclosure of Invention
The embodiment of the application provides an adjusting method of a detection system and the detection system.
The adjusting method of the detection system in the embodiment of the application is used for the detection system, the detection system comprises a plurality of detection devices and a plurality of light emergent surfaces, each detection device comprises a light incident surface, the light rays emitted by the plurality of emergent surfaces enter the plurality of light incident surfaces in a one-to-one correspondence manner, and each detection device collects at least part of the light rays entering from the light incident surfaces to form detection information; the adjusting method comprises the following steps: calculating target characteristic values suitable for all the detection devices according to characteristic values of detection information acquired by the detection devices; for each detection device, acquiring a target optical path between the corresponding emergent surface and the incident surface of the detection device when the acquired detection information meets the target characteristic value; and adjusting the relative position between each emergent surface and the corresponding incident surface so that the optical path between the emergent surface and the corresponding incident surface meets the target optical path.
In some embodiments, the detection information collected by the detection devices includes an image, and the calculating the target characteristic value applicable to all the detection devices according to the characteristic values of the detection information collected by a plurality of the detection devices includes: adjusting the adjusting optical path between the corresponding emergent surface and the incident surface for multiple times; acquiring images by utilizing the detection device under different optical paths to obtain a group of images; and calculating target characteristic values suitable for all the detection devices according to the characteristic values of the multiple groups of images acquired by the detection devices.
In some embodiments, the calculating the target feature value applicable to all the detection devices according to the feature values of the plurality of sets of images acquired by the plurality of detection devices includes: calculating the value with the maximum characteristic value in each group of images as a candidate value to obtain a plurality of candidate values of the plurality of groups of images; and calculating the minimum value in the plurality of alternative values as the target characteristic value.
In some embodiments, the acquiring, for each of the detection devices, a target optical path between the corresponding exit surface and the light incident surface of the detection device when the acquired detection information satisfies the target characteristic value includes: when each alternative value is calculated, the optical path between the corresponding emergent surface and the incident surface is an initial optical path; in a preset virtual model of the detection device, adjusting the optical path between the virtual emergent surface and the virtual incident surface to be the initial optical path, and recording the initial brightness on the virtual detection surface; calculating target brightness according to the initial brightness and the ratio of the alternative value to the target characteristic value; and in the virtual model, adjusting the optical path between the virtual emergent surface and the virtual incident surface until the brightness recorded on the virtual detection surface is the target brightness, and taking the current optical path between the virtual emergent surface and the virtual incident surface as the target optical path.
In some embodiments, the acquiring, for each of the detection devices, a target optical path between the corresponding exit surface and the light incident surface of the detection device when the acquired detection information satisfies the target characteristic value includes: for each group of corresponding emergent surfaces and incident surfaces, adjusting the adjusting optical path between the emergent surfaces and the incident surfaces for multiple times, and acquiring detection information by using the detection device; calculating a characteristic value of the detection information acquired by the detection device; and taking the current adjusting optical path as the current target optical path of the detection device until the characteristic value of the detection information acquired by the detection device is the target characteristic value.
The detection system comprises a plurality of detection devices, a plurality of light emergent surfaces, a processor and a motion platform; each detection device comprises a light incident surface; the light rays emitted by the plurality of emergent surfaces enter the plurality of incident surfaces in a one-to-one correspondence manner, and each detection device collects at least part of the light rays entering from the incident surfaces to form detection information; the processor is configured to: calculating target characteristic values suitable for all the detection devices according to characteristic values of detection information acquired by the detection devices; for each detection device, acquiring a target optical path between the corresponding emergent surface and the incident surface of the detection device when the acquired detection information meets the target characteristic value; the emergent surfaces are connected to the moving platform, and the moving platform is used for adjusting the relative position between each emergent surface and the corresponding incident surface so that the optical path between each emergent surface and the corresponding incident surface meets the target optical path.
In some embodiments, the detection information collected by the detection device includes an image, and the motion platform is further configured to adjust an adjustment optical path between the corresponding exit surface and the light entrance surface for multiple times; the detection device is used for acquiring images to obtain a group of images under different adjusting optical paths respectively; the processor is used for calculating target characteristic values suitable for all the detection devices according to the characteristic values of the multiple groups of images acquired by the detection devices.
In some embodiments, the characteristic value is an average gray value of pixels of the image, and the processor is further configured to: calculating the value with the maximum characteristic value in each group of images as a candidate value to obtain a plurality of candidate values of the plurality of groups of images; and calculating the minimum value in the plurality of alternative values as the target characteristic value.
In some embodiments, the processor is further configured to: when each alternative value is calculated, the optical path between the corresponding group of the emergent surfaces and the incident surface is an initial optical path; in a preset virtual model of the detection device, adjusting the optical path between the virtual emergent surface and the virtual incident surface to be the initial optical path, and recording the initial brightness on the virtual detection surface; calculating target brightness according to the initial brightness and the ratio of the alternative value to the target characteristic value; and in the virtual model, adjusting the optical path between the virtual emergent surface and the virtual incident surface until the brightness recorded on the virtual detection surface is the target brightness, and taking the current optical path between the virtual emergent surface and the virtual incident surface as the target optical path.
In some embodiments, for each group of the corresponding exit surface and the corresponding incident surface, the motion platform is further configured to adjust an adjustment optical path between the exit surface and the incident surface for multiple times, and the detection device is configured to acquire detection information at multiple adjustment distances; the processor is configured to: calculating a characteristic value of the detection information acquired by the detection device; and taking the current adjusting optical path as the current target optical path of the detection device until the characteristic value of the detection information acquired by the detection device is the target characteristic value.
In some embodiments, each of the detecting devices includes a cylindrical mirror, the light incident surface is formed on the cylindrical mirror, and the light passing through the cylindrical mirror is compressed in one direction and then projected to the object to be detected.
The detection system comprises a light source, an optical fiber, a detection device and a motion platform, wherein the light source is used for generating light; the optical fiber is used for conducting light rays generated by the light source, and the light rays are emitted from the incident surface of the optical fiber and are emitted from the emergent surface of the optical fiber; the detection device comprises a light incident surface, and light rays emitted from the light emergent surface are incident into the light incident surface to be collected by the detection device and form detection information; the emergent surface is connected to the moving platform, and the moving platform drives the emergent surface to move relative to the incident surface when moving so as to change the optical path between the emergent surface and the incident surface.
In some embodiments, the number of the exit surfaces is multiple, the number of the detection devices is multiple and corresponds to the multiple exit surfaces one to one, the number of the motion platforms is multiple and corresponds to the multiple exit surfaces one to one, and each motion platform can independently move to drive one of the connected exit surfaces to move.
In some embodiments, the detection device includes a cylindrical mirror, the light incident surface is formed on the cylindrical mirror, and light passing through the cylindrical mirror is compressed in one direction and then projected to the object to be detected.
In the adjusting method and the detecting system of the detecting system in the embodiment of the application, the target characteristic value is applicable to all detecting devices, and according to the target characteristic value, when the detection information which accords with the target characteristic value can be collected by each detecting device, the target optical path between the emergent surface and the incident surface is obtained, only the relative position between the emergent surface and the incident surface needs to be adjusted, so that the optical path between the emergent surface and the corresponding incident surface meets the target optical path, and then the detecting devices can be in the state of collecting the detection information of the target characteristic value, thus, the hardware difference among the detecting devices is compensated, and the unified processing of the detection information collected by the detecting devices is facilitated.
Additional aspects and advantages of embodiments of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
The above and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic diagram of the construction of a detection system according to certain embodiments of the present application;
FIG. 2 is a schematic structural view of a detection system according to certain embodiments of the present application;
FIG. 3 is a schematic flow chart of a conditioning method according to certain embodiments of the present application;
FIG. 4 is a schematic flow chart of a conditioning method according to certain embodiments of the present application;
FIG. 5 is a schematic diagram of the conditioning method of certain embodiments of the present application;
FIG. 6 is a schematic flow chart of a conditioning method according to certain embodiments of the present application;
FIG. 7 is a schematic flow chart of a conditioning method according to certain embodiments of the present application;
FIG. 8 is a schematic model diagram of a model of a probing apparatus according to certain embodiments of the present application;
FIG. 9 is a schematic flow chart of a conditioning method according to certain embodiments of the present application.
Description of the elements and symbols:
the device comprises a detection system 100, a detection device 10, a light incoming surface 11, a camera 12, a lens 13, a beam splitter prism 14, a cylindrical mirror 15, a processor 20, a light source 30, an optical fiber 40, an outgoing surface 41, a motion platform 50, a piece to be detected 200,
The virtual model 100 ', the virtual exit surface 41', the virtual cylindrical mirror 15 ', the virtual entrance surface 11', the virtual beam splitter prism 14 ', and the virtual detection surface 200'.
Detailed Description
Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below by referring to the drawings are exemplary only for the purpose of explaining the embodiments of the present application, and are not to be construed as limiting the embodiments of the present application.
Referring to fig. 1, a detection system 100 according to an embodiment of the present disclosure includes a plurality of detection devices 10 and a plurality of light exit surfaces 41 corresponding to the plurality of detection devices 10 one by one, wherein each detection device 10 uses at least a portion of light emitted from the corresponding light exit surface 41 as detection light.
Specifically, the detection system 100 may be configured to perform visual detection on the to-be-detected piece 200, the to-be-detected piece 200 may be any component such as a display panel, a wafer, a chip, or a substrate, and the detection system 100 may be configured to detect a pattern, a defect, a scratch, a pit, a particle, an impurity, or the like of the to-be-detected piece 200.
The detecting system 100 comprises a plurality of detecting devices 10, and the plurality of detecting devices 10 can be used for detecting different positions of the to-be-detected piece 200 simultaneously or detecting in a time-sharing manner. The plurality of detecting devices 10 may be arranged side by side along a straight line, may be arranged in an array, and may be arranged in any shape, which is not limited herein. The specific structure of the detecting device 10 may have different configurations according to different detection requirements, for example, the detecting device 10 may include any optical elements such as a sensor, a lens, a prism, a mirror, a cylindrical mirror, and the like.
Each detection device 10 comprises at least an incident surface 11, light can enter the detection device 10 from the incident surface 11, and each detection device 10 collects at least part of the light entering from the incident surface 11 to form detection information. In one example, the light entering the detecting device 10 may be projected to the object 200 to be detected, and the light reflected, scattered or transmitted by the object 200 to be detected is received by the detecting device 10, in this case, the light emitted from the exit surface 41 may be a part of the light, or may be the whole light entering the detecting device 10 to be used as the detecting light of the detecting device 10. In another example, the light emitted from the exit surface 41 may be reflected or scattered by the object 200 to be detected, and then enter the detecting device 10 from the incident surface 11.
The number of the exit surfaces 41 is also plural, for example, the number of the exit surfaces 41 may be the same as the number of the detection devices 10, and the plurality of detection devices 10 correspond to the plurality of exit surfaces 41 one by one. The one-to-one correspondence means: the light emerging from one exit face 41 enters a single detection device 10 and does not enter the other detection devices 10, each detection device 10 also receiving light emerging from only one exit face 41.
The exit surface 41 may be any surface capable of emitting light, for example, the exit surface 41 may be a surface on the light source, and the exit surface 41 may also be a surface on the light guide element, which is not limited herein.
Referring to fig. 2, in the example of the detection system 100 shown in fig. 2, the detection device 10 includes a camera 12, a lens 13, a beam splitter prism 14 and a cylindrical mirror 15. The light entering the detecting device 10 from the light incident surface 11 firstly passes through the cylindrical mirror 15 to reach the beam splitter prism 14, the beam splitter prism 14 reflects part of the light to the to-be-detected piece 200, the light reflected or scattered by the to-be-detected piece 200 returns to the beam splitter prism 14 and passes through the beam splitter prism 14, the light passing through the beam splitter prism 14 passes through the lens 13 to finally reach the camera 12, and the camera 12 receives the light and then completes imaging of the to-be-detected piece 200.
The light incident surface 11 is formed on the cylindrical mirror 15, and the light passing through the cylindrical mirror 15 is compressed in one direction and then projected to the object 200 to be detected. The cylindrical mirror 15 may not compress the light in the other direction, so that the light passing through the cylindrical mirror 15 and reflected by the beam splitter prism 14 onto the object 200 to be detected is in the form of a linear light spot. The beam splitting prism 14 may be a half-reflecting and half-transmitting prism.
In addition, as shown in the example of fig. 2, the detection system 100 further includes a light source 30, an optical fiber 40, and a motion platform 50.
The light source 30 is used for generating light, and the light source 30 may be, for example, a xenon lamp, a halogen lamp, an LED light, a laser lamp, or a lamp box, etc., without limitation.
The optical fiber 40 is used for transmitting the light generated by the light source 30, the light enters from the incident surface of the optical fiber 40 and exits from the exit surface 41 of the optical fiber 40, and at least part of the light exiting from the exit surface 41 of the optical fiber 40 can enter into the detecting device 10 from the incident surface 11.
The motion platform 50 may be a motorized platform or a manual platform. The moving platform 50 is connected to the exit surface 41, and when the moving platform 50 moves, the exit surface 41 is driven to move relative to the incident surface 11, so as to change a distance D between the exit surface 41 and the incident surface 11. Specifically, the emitting end of the optical fiber 40 may be detachably connected to the moving platform 50, the moving platform 50 may be a linear moving platform 50, and when the moving platform 50 moves along the X direction in fig. 2, the moving platform 50 drives the emitting surface 41 to move relative to the light incident surface 11, so as to change the distance D between the emitting surface 41 and the light incident surface 11, and further change the optical path between the emitting surface 41 and the light incident surface 11. The change of the optical path between the exit surface 41 and the entrance surface 11 has at least the following effects on the quantity and intensity of the light finally projected to the to-be-detected object 200:
in the case of the same intensity of the light rays emitted from the exit surface 41, the farther the distance D between the exit surface 41 and the incident surface 11 is, the longer the optical path between the exit surface 41 and the incident surface 11 is, the stronger the attenuation of the light rays by the propagation medium is, and the larger the range of light ray divergence is, the weaker the intensity of the light rays finally entering the detection device 10 is, the closer the distance D between the exit surface 41 and the incident surface 11 is, the shorter the optical path between the exit surface 41 and the incident surface 11 is, the weaker the attenuation of the light rays by the propagation medium is, and the smaller the range of light ray divergence is, the stronger the intensity of the light rays finally collected and used for imaging by the detection device 10 is.
Moreover, when the optical path between the emergent surface 41 and the incident surface 11 changes, the shape of the light beam passing through the cylindrical mirror 15 and reflected to the to-be-detected element 200 by the beam splitter prism 14 also changes, specifically, when the optical path between the emergent surface 41 and the incident surface 11 is closer to the focal length of the cylindrical mirror 15, the more concentrated the light beam projected onto the to-be-detected element 200 is, the smaller the light spot is, and the stronger the intensity of the light beam finally used for imaging by the detection device 10 is.
Therefore, by controlling the moving platform 50 to drive the exit surface 41 to move relative to the incident surface 11, so as to change the optical path between the exit surface 41 and the incident surface 11, the intensity of the light collected by the detecting device 10 for imaging can be changed.
More specifically, in one example, the number of the light sources 30 may be one, the number of the optical fibers 40 may also be one, the one optical fiber 40 may include one incident end and a plurality of exit ends, the incident end is connected with the light sources 30, and each exit end may include one exit surface 41. The number of exit faces 41 of the optical fibers 40 and the number of the detection devices 10 may be the same, so that the detection devices 10 correspond one-to-one to the exit faces 41. The number of the motion platforms 50 may also be multiple, and the multiple motion platforms 50 are in one-to-one correspondence with the multiple exit surfaces 41, that is, each motion platform 50 only drives one exit surface 41 connected with it to move, and each motion platform 50 can move independently without affecting each other. Thus, by adjusting the different motion platforms 50, the optical distance between the corresponding exit surface 41 and the light incident surface 11 can be adjusted, so that the light intensities collected by the different detection devices 10 for imaging can be differentiated, and it can be known in the following that the difference can be used to compensate the deviation of the detection information caused by the performance difference of the different detection devices 10.
Of course, in other examples, the number of the light sources 30 may be plural, the number of the optical fibers 40 may also be plural, and the light sources 30, the optical fibers 40 and the detection devices 10 may correspond to one another, which is not limited herein.
The adjustment method of the inspection system 100 according to any of the above embodiments will be described below.
Referring to fig. 2 and fig. 3, an adjusting method of the detecting system 100 according to an embodiment of the present disclosure includes the steps of:
01: calculating target characteristic values suitable for all the detection devices 10 according to characteristic values of detection information acquired by the detection devices 10;
02: for each detection device 10, when the acquired detection information meets the target characteristic value, the corresponding target optical path between the exit surface 41 and the light incident surface 11 of the detection device 10 is acquired; and
03: the relative position between each exit surface 41 and the corresponding entrance surface 11 is adjusted so that the optical path between the exit surface 41 and the corresponding entrance surface 11 satisfies the target optical path.
The detection system 100 may further comprise a processor 20, the processor 20 may be configured to perform steps 01 and 02 of the adjustment method, and the motion platform 50 may be configured to perform step 03 of the adjustment method. That is, the processor 20 may be configured to calculate a target feature value applicable to all the detection apparatuses 10 according to feature values of detection information acquired by a plurality of detection apparatuses 10; and for each detection device 10, acquiring a target optical path between the corresponding exit surface 41 and the light incident surface 11 of the detection device 10 when the acquired detection information meets the target characteristic value; the moving platform 50 may be configured to adjust a relative position between each exit surface 41 and the corresponding incident surface 11, so that an optical path between the exit surface 41 and the corresponding incident surface 11 satisfies a target optical path.
In the adjusting method and the detecting system 100 of the above embodiment, the target characteristic value is applicable to all the detecting devices 10, and when the detecting information meeting the target characteristic value can be acquired by each detecting device 10 according to the target characteristic value, the target optical path between the emergent surface 41 and the incident surface 11 is obtained, and only the relative position between the emergent surface 41 and the incident surface 11 needs to be adjusted again, so that the optical path between the emergent surface 41 and the corresponding incident surface 11 meets the target optical path, and the plurality of detecting devices 10 can be in the state of being able to acquire the detecting information of the target characteristic value, so that the hardware difference among the plurality of detecting devices 10 is compensated, and the detecting information acquired by the plurality of detecting devices 10 is conveniently processed in a unified manner.
Specifically, in step 01, a target characteristic value applicable to all the detection devices 10 is calculated according to characteristic values of detection information acquired by a plurality of detection devices 10. The detection information may be an image, a light intensity signal, or the like, which may be used to characterize the intensity, phase, color, or the like of light, and in the embodiments of the present specification, the detection information is exemplified as an image. A plurality of detecting devices 10 may be controlled to capture images of the same scene, for example, a calibration board. And then, respectively calculating characteristic values of the plurality of images, wherein the characteristic values may be an average value of gray values, an average value of brightness, an average value of saturation, an average value of pixel values of a certain channel, and the like of the images, and may be selected according to different adjustment requirements without limitation. And then, calculating the target characteristic value applicable to all the detection devices 10 according to the characteristic values of the plurality of images, wherein the calculation is applicable to all the detection devices 10, and means that all the detection devices 10 can shoot the images meeting the target characteristic value at the same time by appropriately adjusting the detection system 100. In one example, the characteristic value is a light intensity that can characterize the light received by the detection device 10 and used for imaging.
In step 02, for each detection device 10, when the acquired detection information satisfies the target characteristic value, a target optical path between the corresponding exit surface 41 and the light incident surface 11 of the detection device 10 is obtained. As described above, different detection devices 10 have different performances, and when an image satisfying a target characteristic value is obtained, the optical paths between the corresponding exit surface 41 and the light incident surface 11 of the detection device 10 may be different, so that for each detection device 10, the target optical path of the detection device 10 needs to be obtained first, so as to perform adjustment on the difference of each detection device 10.
In step 03, the relative position between each exit surface 41 and the corresponding light incident surface 11 is adjusted, so that the optical distance between the exit surface 41 and the corresponding light incident surface 11 satisfies the target optical distance, and each detection device 10 can capture an image satisfying the target feature value under the respective corresponding target optical distance, thereby avoiding that different detection results are presented to the same object to be detected due to the difference of different detection devices 10. The optical path between the exit surface 41 and the light entrance surface 11 refers to a path that the optical axis passes through while the light emitted from the exit surface 41 enters the light entrance surface 11.
Referring to fig. 4, in some embodiments, an information image is detected, step 01: calculating target characteristic values applicable to all the detection devices 10 according to characteristic values of detection information acquired by a plurality of detection devices 10, comprising the steps of:
011: adjusting the optical path between the corresponding emergent surface 41 and the incident surface 11 for multiple times;
012: acquiring images by using the detection device 10 under different adjusting optical paths to obtain a group of images;
013: the target characteristic values applicable to all the detection devices 10 are calculated from the characteristic values of the plurality of sets of images acquired by the plurality of detection devices 10.
Referring to fig. 2, in some embodiments, the moving platform 50 may be used to perform step 011, that is, the moving platform 50 may be used to adjust the optical distance between the corresponding exit surface 41 and the light incident surface 11 for multiple times. The detection device 10 may be used to perform step 012, that is, the detection device 10 may be used to acquire images at different adjustment optical paths respectively to obtain a set of images. The processor 20 may be configured to implement step 013, that is, the processor 20 may be configured to calculate the target feature values applicable to all of the detection devices 10 according to the feature values of the plurality of sets of images acquired by the plurality of detection devices 10.
Specifically, when step 011 is performed, the adjustment optical path between the corresponding exit surface 41 and the light incident surface 11 is adjusted multiple times. The motion platform 50 to be adjusted may be selected first, and m nodes are selected within the range of travel of the motion platform 50, and the distance between each node may be the same or different. The moving platform 50 moves to the positions of the m nodes, so that the optical paths between the exit surface 41 and the incident surface 11 are respectively at m different adjusted optical paths. After one motion platform 50 has moved, the next motion platform 50 may be selected to move to the positions of m nodes within the stroke range, so as to adjust the optical path between the next exit surface 41 and the light incident surface 11, and so on, and traverse all the motion platforms 50. In one example, the distance between adjacent nodes of each motion platform 50 may be equal.
In step 012, images are acquired by the detecting device 10 at different optical paths to obtain a set of images. As described above, when the moving platform 50 moves to a node, that is, the corresponding exit surface 41 and the incident surface 11 are in one of the adjusted optical paths, the detecting device 10 acquires an image to obtain an image, and after m nodes of the moving platform 50 are traversed, a group of images are acquired by one detecting device 10. In the example shown in fig. 5, the set of images acquired by the first probe device 10 is P1, the set of images acquired by the second probe device 10 is P2, … …, and the set of images acquired by the nth probe device 10 is Pn.
In step 013, target feature values applicable to all the detecting devices 10 are calculated according to the feature values of the plurality of sets of images acquired by the plurality of detecting devices 10. Each of the images in each group can be calculated to obtain a feature value, each of the images in each group can be calculated to obtain a group of feature values, and the range of the feature values of the image that can be captured by the corresponding detection device 10 can be obtained according to the distribution of the group of feature values. Therefore, the range of the feature value of the image that can be captured by each detection device 10 can be derived by calculation. Based on the range of the plurality of characteristic values, the target characteristic value applicable to all the detecting devices 10 can be obtained. In the example shown in fig. 5, the target feature value G is finally obtained by processing the images of the P1, P2, … …, Pn groups.
Therefore, by adjusting the adjustment optical paths between the exit surface 41 and the entrance surface 11 to have a plurality of different values, and by capturing a plurality of images by the detection devices 10 at different adjustment optical paths, and calculating the target feature value based on the feature values of the plurality of images, it is ensured that the calculated target feature value can be applied to all the detection devices 10.
Referring to fig. 6, in some embodiments, the feature value is an average gray scale value of the image pixels, and step 013: calculating target characteristic values applicable to all the detection devices 10 according to the characteristic values of a plurality of groups of images acquired by a plurality of detection devices 10, comprising the steps of:
0131: calculating the value with the maximum characteristic value in each group of images as a candidate value to obtain a plurality of candidate values of the plurality of groups of images; and
0132: and calculating the minimum value in the plurality of alternative values as the target characteristic value.
Referring to fig. 2, in some embodiments, processor 20 may be further configured to implement steps 0131 and 0132, that is, processor 20 may be further configured to: calculating the value with the maximum characteristic value in each group of images as a candidate value to obtain a plurality of candidate values of the plurality of groups of images; and calculating the minimum value in the plurality of candidate values as the target characteristic value.
Specifically, the characteristic value may be selected as an average gray-scale value of an image pixel, and when an image obtained from the same scene is captured, the average gray-scale value of the image pixel may reflect the light intensity when the image is captured.
In step 0131, the value with the largest feature value in each group of images is calculated as the candidate value, so as to obtain a plurality of candidate values of the plurality of groups of images. Each image of each set of images may be calculated to obtain a characteristic value, and the largest value of the characteristic values calculated from the plurality of images of the same set of images may be used to represent the extent to which the best photographing capability of the detection apparatus 10 can be achieved. It is understood that the upper limit of the shooting capability of the plurality of detection apparatuses 10 evaluated by the characteristic values can be understood by calculating the alternative values of the plurality of sets of images.
When step 032 is performed, the smallest value among the plurality of candidate values is calculated as the target feature value. The minimum value of the multiple candidate values is selected as the target characteristic value, so that all the detection devices 10 have the ability to capture an image of the target characteristic value, that is, each detection device 10 can capture the target characteristic value by adjusting the distance between the corresponding exit surface 41 and the light entrance surface 11, and thus, it is possible for multiple detection devices 10 to capture images with consistent characteristic values at the same time. In the example shown in fig. 5, the candidate value of the P1 group image is G1, the candidate value of the P2 group image is G2, … …, and the candidate value of the Pn group image is Gn, and the target feature value is G by calculating the minimum value of G1, G2, … …, and Gn.
Referring to fig. 8, in some embodiments, step 02: for each detection device 10, when the acquired detection information satisfies the target characteristic value, the method for acquiring the target optical path between the corresponding exit surface 41 and the light incident surface 11 of the detection device 10 includes the steps of:
021: when each alternative value is obtained and calculated, the optical path between the corresponding emergent surface 41 and the incident surface 11 is an initial optical path;
022: in a preset virtual model 100 'of the detection device 10, adjusting an optical path between the virtual exit surface 41' and the virtual entrance surface 11 'to be an initial optical path, and recording initial brightness on the virtual detection surface 200';
023: calculating the target brightness according to the initial brightness and the ratio of the alternative value to the target characteristic value; and
024: in the virtual model 100 ', the optical path between the virtual exit surface 41' and the virtual entrance surface 11 'is adjusted until the brightness recorded on the virtual detection surface 200' is the target brightness, and the current optical path between the virtual exit surface 41 'and the virtual entrance surface 11' is taken as the target optical path.
Referring to fig. 2, in some embodiments, the processor 20 may be configured to perform steps 021, 022, 023, and 024, that is, the processor 20 may be configured to obtain an initial optical distance as the optical distance between the corresponding set of exit surface 41 and the light-in surface 11 when calculating each candidate value; in a preset virtual model 100 'of the detection device 10, adjusting an optical path between the virtual exit surface 41' and the virtual entrance surface 11 'to be an initial optical path, and recording initial brightness on the virtual detection surface 200'; calculating the target brightness according to the initial brightness and the ratio of the alternative value to the target characteristic value; and in the virtual model 100 ', adjusting the optical path between the virtual emergent surface 41' and the virtual incident surface 11 'until the brightness recorded on the virtual detection surface 200' is the target brightness, and taking the current optical path between the virtual emergent surface 41 'and the virtual incident surface 11' as the target optical path.
Specifically, in the step 021, when each candidate value is obtained and calculated, the optical path between the corresponding exit surface 41 and the light entrance surface 11 is the initial optical path, please refer to the example shown in fig. 5, since each image corresponds to one adjusted optical path, an image of the candidate value G1 is obtained, one adjusted optical path Z1 of the detecting device 10 corresponding to the group of images P1 is obtained, and so on, an image of the candidate value G2 is obtained, one adjusted optical path Z2, … … of the detecting device 10 corresponding to the group of images P2 is obtained, an image of the candidate value Gn is obtained, one adjusted optical path Zn of the detecting device 10 corresponding to the group of images Pn is obtained, and the adjusted optical paths Z1, Z2, … …, Zn are the initial optical paths corresponding to the plurality of detecting devices 10, respectively.
Before step 022 is performed, a virtual model 100 'of each of the detecting devices 10 can be constructed, as shown in fig. 8, the virtual model 100' of the detecting device 10 can be constructed by using optical software such as Lighttools, and specifically, a virtual exit surface 41 ', a virtual cylindrical mirror 15', and a virtual beam splitter prism 14 'are respectively established according to the size and the light emitting characteristics of the used optical fiber 40, the parameters of the cylindrical mirror 15, the size and the materials of the beam splitter prism 14, and the relative positions of the elements, and a virtual sensor is arranged at the position of the virtual detection surface 200', so it can be understood that the virtual model 100 'is actually constructed according to the optical parameters, the materials, and the like related to the detecting device 10, and thus, the virtual model 100' can be used to simulate the real detecting device 10. In step 022, in the virtual model 100 'of the predetermined detecting device 10, the optical distance between each virtual emergent surface 41' and the corresponding virtual incident surface 11 'is adjusted to be the initial optical distance, and the initial brightness on the virtual detecting surface 200' is recorded. For example, in the first virtual model 100 ', the optical distance between the virtual exit surface 41' and the corresponding virtual entrance surface 11 'is adjusted to be Z1, and the initial brightness on the virtual detection surface 200' is recorded to be E1; in the second virtual model 100 ', the optical path length between the virtual exit surface 41' and the corresponding virtual entrance surface 11 'is adjusted to Z2, and the initial brightness on the virtual detection surface 200' is recorded to E2, … …, and in the nth virtual model 100 ', the optical path length between the virtual exit surface 41' and the corresponding virtual entrance surface 11 'is adjusted to Zn, and the initial brightness on the virtual detection surface 200' is recorded to En.
In step 023, the target brightness is calculated according to the initial brightness and the ratio of the candidate value to the target feature value. Since the final output value of the virtual model 100 'is the brightness of the detected surface, it is necessary to first establish a consistency coefficient between the brightness of the virtual model 100' of each detection apparatus 10 on the detected surface and the characteristic value of the actual detection apparatus 10. In the example of this step, the consistency factor is determined by the ratio of the candidate value to the target feature, for example, the consistency factor of the virtual model 100' of the first probe 10 is K1 — G1/G, the consistency factor of the model of the second probe 10 is K2 — G2/G … …, and the consistency factor of the model of the nth probe 10 is Kn — Gn/G.
The target brightness may be calculated from the initial brightness and the consistency coefficient, for example, the target brightness may be a ratio of the initial brightness to the consistency coefficient, for example, the target brightness of the virtual model 100 'of the first probe device 10 is E1' ═ E1/K1, the target brightness of the virtual model 100 'of the second probe device 10 is E2' ═ E2/K2, … …, and the target brightness of the virtual model 100 'of the nth probe device 10 is En' ═ En/Kn. When the target brightness is obtained, the optical path between the virtual emergent surface 41 'and the virtual incident surface 11' can be used as the target optical path between the actual emergent surface 41 and the incident surface 11.
When step 024 is performed, in the virtual model 100 ', the optical path length between the virtual exit surface 41' and the virtual entrance surface 11 'is adjusted until the brightness recorded on the virtual detection surface 200' is the target brightness, and the current optical path length between the virtual exit surface 41 'and the virtual entrance surface 11' is taken as the target optical path length. Step 024 is performed for each detection apparatus 10 model to calculate a target optical path of the detection apparatus 10 corresponding to the virtual model 100' of each detection apparatus 10. In the process of calculating the target distance, the optical path between the exit surface 41 and the entrance surface 11 in the detection system 100 does not need to be actually adjusted, and the simulation can be performed in the virtual model 100' of the detection device 10, so that the process of calculating the target optical path is simplified, and the efficiency of implementing the adjustment mode is improved.
Referring to fig. 9, in some embodiments, step 02: for each detection device 10, when the acquired detection information satisfies the target characteristic value, the method for acquiring the target optical path between the corresponding exit surface 41 and the light incident surface 11 of the detection device 10 includes the steps of:
025: for each group of corresponding emergent surface 41 and incident surface 11, adjusting the optical path between the emergent surface 41 and the incident surface 11 for multiple times, and acquiring detection information by using the detection device 10;
026: calculating a characteristic value of the detection information acquired by the detection device 10; and
027: and when the characteristic value of the detection information acquired by the detection device 10 is the target characteristic value, taking the current adjusting optical path as the current target optical path of the detection device 10.
Referring to fig. 2, in some embodiments, the moving platform 50 may be used to implement step 025, that is, the moving platform 50 may be used to adjust the optical path between the exit surface 41 and the light incident surface 11 for multiple times for each set of the corresponding exit surface 41 and light incident surface 11, and the detection device 10 is used to collect the detection information under multiple adjusted optical paths. Processor 20 may be configured to perform steps 026 and 027, i.e., processor 20 may be configured to calculate a characteristic value of the detection information collected by detection apparatus 10; and when the characteristic value of the detection information acquired by the detection device 10 is the target characteristic value, taking the current adjusting optical path as the current target optical path of the detection device 10.
Specifically, when step 025 is performed, for each group of the corresponding exit surface 41 and the corresponding detection device 10, the adjustment optical path between the exit surface 41 and the incident surface 11 is adjusted multiple times, and the detection device 10 is used to collect the detection information. After the target characteristic value is obtained through calculation, the optical path between the exit surface 41 and the light incident surface 11 needs to be fixed on the target optical path where the target characteristic value can be obtained, and therefore, the adjustment optical path between the exit surface 41 and the light incident surface 11 needs to be adjusted multiple times to collect detection information under different adjustment optical paths.
Every time a detection information is collected at an adjustment distance, step 026 can be implemented: and calculating a characteristic value of the detection information acquired by the detection device 10, and if the characteristic value does not accord with the target characteristic value, indicating that the optical path needs to be changed continuously. In one example, if the calculated feature value is less than the target feature value, the adjustment may be made in a direction to decrease the optical path between the exit surface 41 and the entrance surface 11, whereas if the calculated feature value is greater than the target feature value, the adjustment may be made in a direction to increase the optical path between the exit surface 41 and the entrance surface 11.
In step 027, until the feature value of the detection information acquired by the detection apparatus 10 is the target feature value, the current adjustment optical path is used as the current target optical path of the detection apparatus 10. When the optical paths between the exit surface 41 and the light entrance surface 1 corresponding to all the detection devices 10 are adjusted to the target optical path, all the detection devices 10 are adjusted, and at this time, when all the detection devices 10 acquire the detection information of the same scene (for example, when images of the same scene are shot), the feature values are uniform.
In summary, in the adjusting method and the detecting system 100 according to the embodiment of the application, the target characteristic value is applicable to all the detecting devices 10, and when the detecting information meeting the target characteristic value can be acquired by each detecting device 10 according to the target characteristic value, the target optical path between the emergent surface 41 and the incident surface 11 needs to be adjusted again only by adjusting the relative position between the emergent surface 41 and the incident surface 11, so that the optical path between the emergent surface 41 and the corresponding incident surface 11 meets the target optical path, and the detecting devices 10 can be in a state of being able to acquire the detecting information of the target characteristic value, so that the hardware difference among the detecting devices 10 is compensated, and the detecting information acquired by the detecting devices 10 is conveniently processed in a unified manner.
In the description herein, reference to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example" or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps of the process, and the scope of the preferred embodiments of the present application includes other implementations in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the present application.
Although embodiments of the present application have been shown and described above, it is to be understood that the above embodiments are exemplary and not to be construed as limiting the present application, and that changes, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present application.
Claims (14)
1. The adjusting method of the detection system is characterized in that the detection system comprises a plurality of detection devices and a plurality of light ray emergent surfaces, each detection device comprises a light incident surface, the light rays emitted by the emergent surfaces enter the light incident surfaces in a one-to-one correspondence mode, and each detection device collects at least part of the light rays entering from the light incident surfaces to form detection information; the adjusting method comprises the following steps:
calculating target characteristic values suitable for all the detection devices according to characteristic values of detection information acquired by the detection devices;
for each detection device, acquiring a target optical path between the corresponding emergent surface and the incident surface of the detection device when the acquired detection information meets the target characteristic value; and
and adjusting the relative position between each emergent surface and the corresponding incident surface so that the optical path between the emergent surface and the corresponding incident surface meets the target optical path.
2. The method for adjusting a detection system according to claim 1, wherein the detection information collected by the detection devices includes an image, and the calculating of the target characteristic value applicable to all the detection devices according to the characteristic values of the detection information collected by the plurality of detection devices includes:
adjusting the adjusting optical path between the corresponding emergent surface and the incident surface for multiple times;
acquiring images by utilizing the detection device under different optical paths to obtain a group of images; and
and calculating target characteristic values suitable for all the detection devices according to the characteristic values of the plurality of groups of images acquired by the detection devices.
3. The method for adjusting a detection system according to claim 2, wherein the characteristic value is an average gray value of pixels of an image, and the calculating the target characteristic value applicable to all the detection devices according to the characteristic values of the plurality of sets of images acquired by the plurality of detection devices comprises:
calculating the value with the maximum characteristic value in each group of images as a candidate value to obtain a plurality of candidate values of the plurality of groups of images; and
and calculating the minimum value in the plurality of alternative values as the target characteristic value.
4. The method for adjusting a detection system according to claim 3, wherein the obtaining, for each detection device, a target optical path between the corresponding exit surface and the light incident surface of the detection device when the acquired detection information satisfies the target characteristic value includes:
when each alternative value is calculated, the optical path between the corresponding emergent surface and the incident surface is an initial optical path;
in a preset virtual model of the detection device, adjusting the optical path between the virtual emergent surface and the virtual incident surface to be the initial optical path, and recording the initial brightness on the virtual detection surface;
calculating target brightness according to the initial brightness and the ratio of the alternative value to the target characteristic value; and
in the virtual model, the optical path between the virtual emergent surface and the virtual incident surface is adjusted until the brightness recorded on the virtual detection surface is the target brightness, and the current optical path between the virtual emergent surface and the virtual incident surface is taken as the target optical path.
5. The method for adjusting a detection system according to claim 1, wherein the obtaining, for each detection device, a target optical path between the corresponding exit surface and the light incident surface of the detection device when the acquired detection information satisfies the target feature value includes:
for each group of corresponding emergent surfaces and incident surfaces, adjusting the adjusting optical path between the emergent surfaces and the incident surfaces for multiple times, and acquiring detection information by using the detection device;
calculating a characteristic value of the detection information acquired by the detection device; and
and taking the current adjusting optical path as the current target optical path of the detection device until the characteristic value of the detection information acquired by the detection device is the target characteristic value.
6. A detection system, characterized in that the detection system comprises:
the detection device comprises a plurality of detection devices, a light source and a light source, wherein each detection device comprises a light incident surface;
the light rays emitted by the light emitting surfaces enter the light incident surfaces in a one-to-one correspondence manner, and each detection device collects at least part of the light rays entering from the light incident surfaces to form detection information;
a processor to: calculating target characteristic values suitable for all the detection devices according to characteristic values of detection information acquired by the detection devices; for each detection device, acquiring a target optical path between the corresponding emergent surface and the incident surface of the detection device when the acquired detection information meets the target characteristic value; and
the emergent surface is connected with the motion platform, and the motion platform is used for adjusting the relative position between each emergent surface and the corresponding light incident surface so that the optical path between the emergent surface and the corresponding light incident surface meets the target optical path.
7. The detection system according to claim 6, wherein the detection information collected by the detection device includes an image, and the motion platform is further configured to adjust the adjustment optical path between the corresponding exit surface and the light incident surface for a plurality of times;
the detection device is used for acquiring images to obtain a group of images under different adjusting optical paths respectively;
the processor is used for calculating target characteristic values suitable for all the detection devices according to the characteristic values of the multiple groups of images acquired by the detection devices.
8. The inspection system of claim 7, wherein the characteristic value is an average gray scale value of image pixels, the processor further configured to:
calculating the value with the maximum characteristic value in each group of images as a candidate value to obtain a plurality of candidate values of the plurality of groups of images; and
and calculating the minimum value in the plurality of alternative values as the target characteristic value.
9. The detection system of claim 8, wherein the processor is further configured to:
when each alternative value is calculated, the optical path between the corresponding group of the emergent surfaces and the incident surface is an initial optical path;
in a preset virtual model of the detection device, adjusting the optical path between the virtual emergent surface and the virtual incident surface to be the initial optical path, and recording the initial brightness on the virtual detection surface;
calculating target brightness according to the initial brightness and the ratio of the alternative value to the target characteristic value; and
in the virtual model, the optical path between the virtual emergent surface and the virtual incident surface is adjusted until the brightness recorded on the virtual detection surface is the target brightness, and the current optical path between the virtual emergent surface and the virtual incident surface is taken as the target optical path.
10. The detection system according to claim 6, wherein for each set of the corresponding exit surface and the incident surface, the motion platform is further configured to adjust the adjustment optical path between the exit surface and the incident surface for a plurality of times, and the detection device is configured to collect detection information at a plurality of adjustment distances;
the processor is configured to: calculating a characteristic value of the detection information acquired by the detection device; and
and taking the current adjusting optical path as the current target optical path of the detection device until the characteristic value of the detection information acquired by the detection device is the target characteristic value.
11. The detecting system according to any one of claims 6 to 10, wherein each of the detecting devices includes a cylindrical mirror, the light incident surface is formed on the cylindrical mirror, and light passing through the cylindrical mirror is compressed in one direction and then projected onto the member to be detected.
12. A detection system, characterized in that the detection system comprises:
a light source for generating light;
the optical fiber is used for conducting light rays generated by the light source, and the light rays enter from the incident surface of the optical fiber and are emitted from the emergent surface of the optical fiber;
the detection device comprises a light incident surface, and light rays emitted from the emergent surface are incident into the light incident surface to be collected by the detection device and form detection information; and
the emergent surface is connected to the motion platform, and the motion platform drives the emergent surface to move relative to the incident surface when moving so as to change the optical path between the emergent surface and the incident surface.
13. The inspection system of claim 12, wherein the number of the exit surfaces is plural, the number of the detection devices is plural and corresponds to the plural exit surfaces, the number of the motion platforms is plural and corresponds to the plural exit surfaces, and each motion platform can move independently to drive the connected one of the exit surfaces to move.
14. The detection system according to claim 12 or 13, wherein the detection device includes a cylindrical mirror, the light incident surface is formed on the cylindrical mirror, and light passing through the cylindrical mirror is compressed in one direction and then projected to the object to be detected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110625926.XA CN113340895A (en) | 2021-06-04 | 2021-06-04 | Adjusting method of detection system and detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110625926.XA CN113340895A (en) | 2021-06-04 | 2021-06-04 | Adjusting method of detection system and detection system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113340895A true CN113340895A (en) | 2021-09-03 |
Family
ID=77474036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110625926.XA Pending CN113340895A (en) | 2021-06-04 | 2021-06-04 | Adjusting method of detection system and detection system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113340895A (en) |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090033947A1 (en) * | 2007-07-31 | 2009-02-05 | United Technologies Corporation | Method for repeatable optical determination of object geometry dimensions and deviations |
| GB201007249D0 (en) * | 2010-04-30 | 2010-06-16 | Sony Corp | A camera device, arrangement and system |
| KR20160090553A (en) * | 2015-01-22 | 2016-08-01 | (주)프로옵틱스 | a a multi surface inspection apparatus |
| JP2017152866A (en) * | 2016-02-23 | 2017-08-31 | キヤノン株式会社 | Image processing system and image processing method |
| CN109934875A (en) * | 2017-12-18 | 2019-06-25 | 长光华大基因测序设备（长春）有限公司 | Camera calibration peace field correction apparatus, camera calibration method and method for correcting flat field |
| CN110567970A (en) * | 2019-09-23 | 2019-12-13 | 上海御微半导体技术有限公司 | edge defect detection device and method |
| CN110646431A (en) * | 2019-10-30 | 2020-01-03 | 易思维（杭州）科技有限公司 | Automatic teaching method of gluing sensor |
| KR20200016507A (en) * | 2018-08-07 | 2020-02-17 | 주식회사 한컴엠디에스 | Method and Apparatus for Synthesizing Image |
| CN111189621A (en) * | 2020-02-17 | 2020-05-22 | 上海复瞻智能科技有限公司 | Head-up display optical detection calibration method and system |
| CN111458293A (en) * | 2019-01-18 | 2020-07-28 | 长沙青波光电科技有限公司 | Object surface detection device and silicon wafer detection device |
| JP2020154167A (en) * | 2019-03-20 | 2020-09-24 | 株式会社日立ハイテクサイエンス | Three-dimensional shape measurement method and three-dimensional shape measurement device |
| CN111951237A (en) * | 2020-08-04 | 2020-11-17 | 上海微亿智造科技有限公司 | Visual appearance detection method |
-
2021
- 2021-06-04 CN CN202110625926.XA patent/CN113340895A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090033947A1 (en) * | 2007-07-31 | 2009-02-05 | United Technologies Corporation | Method for repeatable optical determination of object geometry dimensions and deviations |
| GB201007249D0 (en) * | 2010-04-30 | 2010-06-16 | Sony Corp | A camera device, arrangement and system |
| KR20160090553A (en) * | 2015-01-22 | 2016-08-01 | (주)프로옵틱스 | a a multi surface inspection apparatus |
| JP2017152866A (en) * | 2016-02-23 | 2017-08-31 | キヤノン株式会社 | Image processing system and image processing method |
| CN109934875A (en) * | 2017-12-18 | 2019-06-25 | 长光华大基因测序设备（长春）有限公司 | Camera calibration peace field correction apparatus, camera calibration method and method for correcting flat field |
| KR20200016507A (en) * | 2018-08-07 | 2020-02-17 | 주식회사 한컴엠디에스 | Method and Apparatus for Synthesizing Image |
| CN111458293A (en) * | 2019-01-18 | 2020-07-28 | 长沙青波光电科技有限公司 | Object surface detection device and silicon wafer detection device |
| JP2020154167A (en) * | 2019-03-20 | 2020-09-24 | 株式会社日立ハイテクサイエンス | Three-dimensional shape measurement method and three-dimensional shape measurement device |
| CN110567970A (en) * | 2019-09-23 | 2019-12-13 | 上海御微半导体技术有限公司 | edge defect detection device and method |
| CN110646431A (en) * | 2019-10-30 | 2020-01-03 | 易思维（杭州）科技有限公司 | Automatic teaching method of gluing sensor |
| CN111189621A (en) * | 2020-02-17 | 2020-05-22 | 上海复瞻智能科技有限公司 | Head-up display optical detection calibration method and system |
| CN111951237A (en) * | 2020-08-04 | 2020-11-17 | 上海微亿智造科技有限公司 | Visual appearance detection method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0571431B1 (en) | An optical sensor | |
| CN100520286C (en) | 3d shape measuring apparatus and method thereof | |
| JP6387416B2 (en) | Wafer image inspection system | |
| JP2007528028A (en) | Optical system for generating images with different focus | |
| TWI629470B (en) | Systems and methods for sample inspection and review | |
| JP2006515668A (en) | Illumination system for optical inspection | |
| CN111735413A (en) | Three-dimensional shape measuring device | |
| CN212206548U (en) | Optical lens MTF testing device | |
| KR101523336B1 (en) | apparatus for examining pattern image of semiconductor wafer | |
| KR100292434B1 (en) | Device and method for inspecting lens of camera by using linear ccd | |
| JPH01216306A (en) | Focus detecting device having image pickup means | |
| JP2004045266A (en) | Three-dimensional information detection method and apparatus | |
| TWI607253B (en) | Auto-focus system, method and optical imaging inspection apparatus | |
| CN115380203A (en) | Optical imaging system and biochemical substance detection system using same | |
| CN113340895A (en) | Adjusting method of detection system and detection system | |
| CN112461141A (en) | Structured light 3D height measuring device and height measuring method | |
| US7869017B2 (en) | Test apparatus and test method having a plurality of combinations of object distances | |
| KR101333161B1 (en) | Apparatus of processing image based on confocal and method thereof | |
| JP2003279446A (en) | Imaging lens inspection device and imaging lens inspection method | |
| KR101447857B1 (en) | Particle inspectiing apparatus for lens module | |
| US20210199800A1 (en) | Method for measuring distance of image displayed on television camera | |
| KR101507950B1 (en) | apparatus for examining pattern image of semiconductor wafer | |
| CN109936692B (en) | Through scattering medium image acquisition system and method based on epipolar constraint | |
| CN106643798B (en) | Visible light target simulation system | |
| JPH11304640A (en) | Inspection apparatus for optical element |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |